CN108326442B - A kind of laser carving device - Google Patents

A kind of laser carving device Download PDF

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Publication number
CN108326442B
CN108326442B CN201810459763.0A CN201810459763A CN108326442B CN 108326442 B CN108326442 B CN 108326442B CN 201810459763 A CN201810459763 A CN 201810459763A CN 108326442 B CN108326442 B CN 108326442B
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China
Prior art keywords
sliding
wall
cavity
face
adjusting
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CN201810459763.0A
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CN108326442A (en
Inventor
何龙飞
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Hercynian (Fujian) branch Co., Ltd., General Institute of Mechanical Science
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Hercynian (fujian) Branch Co Ltd General Institute Of Mechanical Science
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Priority to CN201810459763.0A priority Critical patent/CN108326442B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/361Removing material for deburring or mechanical trimming
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a kind of laser carving devices, processing main body including being fixedly mounted on regulating arm subordinate side, it is equipped with to pass in the processing main body inner wall body and connects chamber, described pass is equipped with adjusting cavity in the processing main body for connecing top of chamber, being slidably installed in the adjusting cavity has adjusting bracket, the biography connects inner wall connection on the right side of chamber and is equipped with sliding cavity, being slidably installed in the sliding cavity has sliding seat, first motor is installed between the sliding cavity and the adjusting cavity, first motor top power is connected with threaded rod, the upper threaded rod is threadedly engaged connection with the adjusting bracket and top end is rotatably assorted with the adjusting cavity inner roof wall and connect, first motor bottom end power is connected with lower threaded rod, the lower threaded rod and the sliding seat are threadedly engaged connection and bottom end and the sliding cavity inner bottom wall rotate It is cooperatively connected.

Description

A kind of laser carving device
Technical field
The present invention relates to Computerized Numerical Control processing technology field, specially a kind of laser carving device.
Background technique
Rapid laser carving is using based on Numeric Control Technology, and laser is process medium.Rapidoprint is under laser irradiation The fusing of moment and the physical modification of gasification achieve the purpose that processing, and traditional laser engraving facility usually has a single function, only Individual local laser carving function makes material surface in general, rapidoprint needs polishing treatment before carrying out laser engraving In smooth state, therefore, urgent need designs a kind of laser engraving and polishing integral equipment.
Summary of the invention
The purpose of the present invention is to provide a kind of laser carving devices, for overcoming drawbacks described above in the prior art.
A kind of laser carving device according to the present invention, the processing main body including being fixedly mounted on regulating arm subordinate side, institute It states to be equipped with to pass in processing main body inner wall body and connects chamber, described pass is equipped with adjusting cavity, the tune in the processing main body for connecing top of chamber Being slidably installed in section chamber has adjusting bracket, and the biography connects inner wall connection on the right side of chamber and is equipped with sliding cavity, slides in the sliding cavity It is fitted with sliding seat, first motor is installed between the sliding cavity and the adjusting cavity, the first motor top is dynamic Force-fitting is connected with threaded rod, and the upper threaded rod and the adjusting bracket are threadedly engaged connection and top end and the adjusting Intracavitary roof is rotatably assorted connection, and first motor bottom end power is connected with lower threaded rod, the lower threaded rod and institute State that sliding seat is threadedly engaged connection and bottom end is rotatably assorted with the sliding cavity inner bottom wall and connect, the sliding seat left-hand end It is installed with the second motor in face, the second motor left-hand end power, which is fitted with, to be protruded into the biography and connect intracavitary activity cone tooth Wheel, the biography, which connects intracavitary bottom wall and is rotatably assorted, is connected with rotational sleeve, and extended segment is protruded into the biography and connect at the top of the rotational sleeve Intracavitary and outer surface be circumferentially installed with to the movable intermeshing fixed bevel gear of bevel gear, the rotational sleeve bottom Portion extended segment is outside the processing bottom part body end face and end is installed with the head that is loaded, and is equipped in the bottom end face that is loaded Rectangular slot, mating in the rectangular slot to be equipped with polishing wheel, inner wall is symmetrically arranged at left and right sides of the rectangular slot It is described to be loaded on head up and down through being equipped with the first perforation in the rotational sleeve to lock the locked component of the polishing wheel Lower to perforate through equipped with second be oppositely arranged with first perforation, the polishing wheel runs through to be equipped with up and down to be worn with described second The third that hole is oppositely arranged is perforated, and is installed with laser engraving machine, the laser engraving machine bottom end in the adjusting bracket bottom end face Equipped with emitting head, the emitting head successively protrudes into first perforation, the second perforation and third perforation and gap is matched therewith Connection is closed, is equipped with emission port in the emitting head.
Further technical solution, the adjusting bracket bottom end are installed with electric contact, are equipped with and use in the adjusting cavity inner bottom wall With the shrinkage pool that the electric contact is inserted into, the shrinkage pool bottom wall is installed with the elasticity power supply piece to contact with the electric contact.
Further technical solution, the locked component include being symmetricly set on inner wall at left and right sides of the rectangular slot Logical sliding slot, logical sliding slot end face at left and right sides of the head that is loaded, and be slidably installed in the logical sliding slot and have locking Bar, the locking level outside are installed with handle, are symmetrically arranged in end face at left and right sides of the polishing wheel and insert to the locking level The locking mouth entered is equipped with press sliding slot in the logical sliding slot inner roof wall, be slidably installed in the press sliding slot have bottom end and The press sliding block that the locking level is fixedly connected, the interior press of the press sliding slot pressed on the outside of sliding block are fitted with top Pressing spring.
Further technical solution is slidably connected with slide guide in the adjusting bracket on the left of the laser engraving machine Bar, inner wall is fixedly connected the slide guide bar up and down with the adjusting cavity.
Further technical solution, the processing main body inner bottom wall is interior to be equipped with socket chamber, consolidates in the intracavitary roof of socket Equipped with air compressor, the air compressor top is connected with air inlet pipe, and the air inlet pipe is stretched out on the left of the processing main body Outside end face, the air compressor bottom end is equipped with escape pipe, and the outlet tube outer surface is slidably connected with and the socket Chamber sliding connection goes out gas spray gun, and the gas spray gun right end face out is installed with connecting plate, and the connecting plate top is fixed There is piston rod, the piston rod top end has been connected by power cylinder, and the cylinder is fixedly arranged in the processing main body exterior bottom wall.
Further technical solution, the upper threaded rod and the lower threaded rod screw thread are oppositely arranged.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, passed by being equipped in processing main body inner wall body Chamber is connect, passes and is equipped with adjusting cavity in the processing main body for connecing top of chamber, being slidably installed in adjusting cavity has adjusting bracket, and biography connects on the right side of chamber Inner wall connection is equipped with sliding cavity, and being slidably installed in sliding cavity has sliding seat, and first is installed between sliding cavity and adjusting cavity Motor, first motor top power are connected with threaded rod, and upper threaded rod and adjusting bracket are threadedly engaged connection and top end End is rotatably assorted with adjusting cavity inner roof wall to be connect, and first motor bottom end power is connected with lower threaded rod, lower threaded rod and cunning Dynamic seat is threadedly engaged connection and bottom end is rotatably assorted with sliding cavity inner bottom wall and connect, and is installed in sliding seat left end face Two motors, the second motor left-hand end power, which is fitted with to protrude into pass, connects intracavitary movable bevel gear, and biography connects intracavitary bottom wall rotation Be connected with rotational sleeve, at the top of rotational sleeve extended segment protrude into biography connect intracavitary and outer surface be circumferentially installed with to activity The intermeshing fixed bevel gear of bevel gear, rotational sleeve bottom extended segment is outside processing bottom part body end face and end is fixed Be loaded head, is loaded in a bottom end face and is equipped with rectangular slot, mating in rectangular slot to be equipped with polishing wheel, rectangular slot Left and right sides inner wall is symmetrically arranged with the locked component to lock polishing wheel, perforates up and down through equipped with first in rotational sleeve, The head that is loaded runs through the second perforation for being equipped with and being oppositely arranged with the first perforation up and down, and polishing wheel runs through up and down to be equipped with and the second perforation phase It perforates to the third of setting, laser engraving machine is installed in adjusting bracket bottom end face, laser engraving machine bottom end is equipped with emitting head, hair It penetrates that head successively protrudes into the first perforation, the second perforation and third perforation and clearance fit connects therewith, hair is equipped in emitting head Loophole, so as to use laser engraving and the convenient adjusting of polishing wheel, regulating step is simple and convenient, when emitting head stretches out, Laser engraving machine connects electricity automatically, meanwhile, fixed bevel gear is in an off state with movable bevel gear, that is, polishing wheel will not be unexpected Or start due to misoperation, moreover, the ash that can be blown by going out gas spray gun to polishing generation in polishing Dirt is blown away, and is increased property easy to use and safety, is effectively increased staff's working efficiency.
Detailed description of the invention
Fig. 1 is a kind of laser carving device inside overall structure diagram in the present invention;
Fig. 2 is enlarged structure schematic diagram at A in Fig. 1.
Specific embodiment
Below with reference to Fig. 1-2, the present invention is described in detail.
Referring to Fig.1-2, a kind of laser carving device of embodiment according to the present invention, including it is fixedly mounted on regulating arm hand The processing main body 10 of 21 downsides, is equipped in 10 inner wall of processing main body to pass and connects chamber 24, and the biography connects described at the top of chamber 24 It processes and is equipped with adjusting cavity 20 in main body 10, being slidably installed in the adjusting cavity 20 has adjusting bracket 18, and it is right that the biography connects chamber 24 Inner wall connection in side is equipped with sliding cavity 12, and being slidably installed in the sliding cavity 12 has sliding seat 13, the sliding cavity 12 and institute It states and is installed with first motor 16 between adjusting cavity 20, the 16 top power of first motor is connected with threaded rod 19, institute State that threaded rod 19 is threadedly engaged connection with the adjusting bracket 18 and top end is rotatably assorted with 20 inner roof wall of adjusting cavity Connection, the 16 bottom end power of first motor are connected with lower threaded rod 11, the lower threaded rod 11 and the sliding seat 13 It is threadedly engaged connection and bottom end is rotatably assorted with 12 inner bottom wall of sliding cavity and connect, in 13 left end face of sliding seat It is installed with the second motor 36, the 36 left-hand end power of the second motor, which is fitted with, protrudes into the activity cone for passing and connecing in chamber 24 Gear 35, the biography, which connects 24 inner bottom wall of chamber and is rotatably assorted, is connected with rotational sleeve 48, and the 48 top extended segment of rotational sleeve is stretched Enter the biography connect in chamber 24 and outer surface be circumferentially installed with to the intermeshing fixed bevel gear of the movable bevel gear 35 37, the 48 bottom extended segment of rotational sleeve through 10 bottom end face of processing main body outside and end is installed with and is loaded first 45, Described be loaded in first 45 bottom end face is equipped with rectangular slot 55, mating in the rectangular slot 55 to be equipped with polishing wheel 41, 55 left and right sides inner wall of rectangular slot is symmetrically arranged with the locked component to lock the polishing wheel 41, the rotational sleeve Up and down through being equipped with the first perforation 47 in 48, described be loaded first about 45 47 is oppositely arranged through being equipped with to perforate with described first Second perforation 46, about 41 polishing wheel runs through the third perforation 56 for being equipped with and being oppositely arranged with second perforation 46, described Laser engraving machine 23 is installed in 18 bottom end face of adjusting bracket, 23 bottom end of laser engraving machine is equipped with emitting head 50, the hair Penetrate first 50 successively protrude into it is described first perforation 47, second perforation 46 and third perforation 56 in and therewith clearance fit connect, institute It states and is equipped with emission port 57 in emitting head 50.
Valuably or illustratively, 18 bottom end of adjusting bracket is installed with electric contact 15, bottom in the adjusting cavity 20 The shrinkage pool 17 being inserted into the electric contact 15 is equipped in wall, 17 bottom wall of shrinkage pool is installed with to connect with the electric contact 15 The elasticity power supply piece 14 of touching, so that the laser engraving machine 23 is powered and be powered off automatically.
Valuably or illustratively, the locked component includes being symmetricly set on 55 left and right sides inner wall of rectangular slot Logical sliding slot 54, the logical sliding slot 54 is slidably matched in the logical sliding slot 54 through first 45 left and right sides end face that is loaded Locking level 43 is installed, handle 44 is installed on the outside of the locking level 43, is symmetrically set in 41 left and right sides end face of polishing wheel There is the locking mouth 42 to the locking level 43 insertion, press sliding slot 52, the press are equipped in logical 54 inner roof wall of sliding slot Be slidably installed the press sliding block 51 that bottom end is fixedly connected with the locking level 43 in sliding slot 52, outside the press sliding block 51 Press is fitted with top pressure spring 53 in the press sliding slot 52 of side, consequently facilitating to the polishing wheel 41 carry out locking with Unlock, and then convenient for being dismounted to the polishing wheel 41.
Valuably or illustratively, it is slidably connected with and leads in the adjusting bracket 18 in 23 left side of laser engraving machine Slide bar 22, the slide guide bar 22 is fixedly connected with about 20 inner wall of adjusting cavity, to increase the sliding of the adjusting bracket 18 Stability.
Valuably or illustratively, socket chamber 27, top in the socket chamber 27 are equipped in 10 inner bottom wall of processing main body Air compressor 26 is installed in wall, 26 top of air compressor is connected with air inlet pipe 25, and the air inlet pipe 25 stretches out institute It states outside processing 10 left end face of main body, 26 bottom end of air compressor is equipped with escape pipe 28, and 28 outer surface of escape pipe is sliding The dynamic gas spray gun 31 out being connected with the socket chamber 27 sliding connection, 31 right end face of gas spray gun out are fixed There is connecting plate 33,33 top of connecting plate is installed with piston rod 30, and 30 top of piston rod has been connected by power cylinder 34, institute It states cylinder 34 to be fixedly arranged in 10 exterior bottom wall of processing main body, the dust generated when consequently facilitating the polishing wheel 41 being worked is blown It walks.
Valuably or illustratively, the upper threaded rod 19 and lower 11 screw thread of threaded rod are oppositely arranged, thus simultaneously Adjusting bracket 18 is driven to slide in the opposite direction with sliding seat 13.
When original state, adjusting bracket 18 is in 20 bottom end of adjusting cavity, and electric contact 15 is contacted with elasticity power supply piece 14, emitting head 50 stretch out 41 bottom end face of polishing wheel, meanwhile, sliding seat 13 is in 12 top of sliding cavity, movable bevel gear 35 and fixed bevel gear 37 are disengaged from, at this point, laser engraving machine 23 can carry out rapid laser carving to material.
When needing polishing, starting first motor 16 makes 18 upward sliding of adjusting bracket and sliding seat 13 to downslide It is dynamic, at this point, polishing wheel 41 is in 50 lower position of emitting head, meanwhile, movable bevel gear 35 and fixed bevel gear 37 are at a fully engaged, Starting the second motor 36 can drive polishing wheel 41 to be rotated, so that polishing is carried out, meanwhile, open air compressor 26 Compressed air is sprayed from gas spray gun 31 out, the dust generated to polishing is blown away, and passes through the length of regulating piston bar 30 Adjust out the upper and lower position of gas spray gun 31.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, passed by being equipped in processing main body inner wall body Chamber is connect, passes and is equipped with adjusting cavity in the processing main body for connecing top of chamber, being slidably installed in adjusting cavity has adjusting bracket, and biography connects on the right side of chamber Inner wall connection is equipped with sliding cavity, and being slidably installed in sliding cavity has sliding seat, and first is installed between sliding cavity and adjusting cavity Motor, first motor top power are connected with threaded rod, and upper threaded rod and adjusting bracket are threadedly engaged connection and top end End is rotatably assorted with adjusting cavity inner roof wall to be connect, and first motor bottom end power is connected with lower threaded rod, lower threaded rod and cunning Dynamic seat is threadedly engaged connection and bottom end is rotatably assorted with sliding cavity inner bottom wall and connect, and is installed in sliding seat left end face Two motors, the second motor left-hand end power, which is fitted with to protrude into pass, connects intracavitary movable bevel gear, and biography connects intracavitary bottom wall rotation Be connected with rotational sleeve, at the top of rotational sleeve extended segment protrude into biography connect intracavitary and outer surface be circumferentially installed with to activity The intermeshing fixed bevel gear of bevel gear, rotational sleeve bottom extended segment is outside processing bottom part body end face and end is fixed Be loaded head, is loaded in a bottom end face and is equipped with rectangular slot, mating in rectangular slot to be equipped with polishing wheel, rectangular slot Left and right sides inner wall is symmetrically arranged with the locked component to lock polishing wheel, perforates up and down through equipped with first in rotational sleeve, The head that is loaded runs through the second perforation for being equipped with and being oppositely arranged with the first perforation up and down, and polishing wheel runs through up and down to be equipped with and the second perforation phase It perforates to the third of setting, laser engraving machine is installed in adjusting bracket bottom end face, laser engraving machine bottom end is equipped with emitting head, hair It penetrates that head successively protrudes into the first perforation, the second perforation and third perforation and clearance fit connects therewith, hair is equipped in emitting head Loophole, so as to use laser engraving and the convenient adjusting of polishing wheel, regulating step is simple and convenient, when emitting head stretches out, Laser engraving machine connects electricity automatically, meanwhile, fixed bevel gear is in an off state with movable bevel gear, that is, polishing wheel will not be unexpected Or start due to misoperation, moreover, the ash that can be blown by going out gas spray gun to polishing generation in polishing Dirt is blown away, and is increased property easy to use and safety, is effectively increased staff's working efficiency.
Those skilled in the art can define, can in the case of not departing from overall spirit of the invention and design To make the various modifications for above embodiments.It falls within the scope of protection of the present invention.Protection scheme of the invention It is subject to claims appended hereto.

Claims (6)

1. a kind of laser carving device, the processing main body including being fixedly mounted on regulating arm subordinate side, it is characterised in that: described to add It is equipped with to pass in work main body inner wall body and connects chamber, described pass is equipped with adjusting cavity, the adjusting cavity in the processing main body for connecing top of chamber In be slidably installed and have adjusting bracket, the biography connects inner wall connection on the right side of chamber and is equipped with sliding cavity, is slidably matched in the sliding cavity Sliding seat is installed, first motor is installed between the sliding cavity and the adjusting cavity, first motor top power is matched Conjunction is connected with threaded rod, and the upper threaded rod and the adjusting bracket are threadedly engaged connection and in top end and the adjusting cavities Roof is rotatably assorted connection, and first motor bottom end power is connected with lower threaded rod, the lower threaded rod and the cunning Dynamic seat is threadedly engaged connection and bottom end is rotatably assorted with the sliding cavity inner bottom wall and connect, in the sliding seat left end face It is installed with the second motor, the second motor left-hand end power, which is fitted with, to be protruded into the biography and connects intracavitary movable bevel gear, The biography, which connects intracavitary bottom wall and is rotatably assorted, is connected with rotational sleeve, at the top of the rotational sleeve extended segment protrude into the biography connect it is intracavitary And outer surface be circumferentially installed with to the movable intermeshing fixed bevel gear of bevel gear, the rotational sleeve bottom is prolonged Section is stretched outside the processing bottom part body end face and end is installed with the head that is loaded, and is equipped with rectangle in the bottom end face that is loaded Slot, it is mating in the rectangular slot that polishing wheel is installed, at left and right sides of the rectangular slot inner wall be symmetrically arranged with to The locked component of the polishing wheel is locked, is perforated up and down through equipped with first in the rotational sleeve, the head that is loaded passes through up and down It is equipped with the second perforation being oppositely arranged with first perforation, the polishing wheel runs through up and down to be equipped with and the second perforation phase It perforates to the third of setting, is installed with laser engraving machine in the adjusting bracket bottom end face, the laser engraving machine bottom end is equipped with Emitting head, the emitting head successively protrudes into first perforation, the second perforation and third perforation and clearance fit connects therewith It connects, emission port is equipped in the emitting head.
2. a kind of laser carving device according to claim 1, it is characterised in that: the adjusting bracket bottom end, which is installed with, connects electricity Head, is equipped with the shrinkage pool being inserted into the electric contact in the adjusting cavity inner bottom wall, the shrinkage pool bottom wall be installed with to institute State the elasticity power supply piece of electric contact contact.
3. a kind of laser carving device according to claim 1, it is characterised in that: the locked component includes being symmetrical arranged The logical sliding slot of inner wall at left and right sides of the rectangular slot, logical sliding slot end face at left and right sides of the head that is loaded, and institute It states to be slidably installed in logical sliding slot and has locking level, handle, end at left and right sides of the polishing wheel are installed on the outside of the locking level It is symmetrically arranged with the locking mouth to locking level insertion in face, press sliding slot, the top are equipped in the logical sliding slot inner roof wall The press sliding block for pressing the bottom end that is slidably installed in sliding slot to be fixedly connected with the locking level, the institute pressed on the outside of sliding block It states press in press sliding slot and is fitted with top pressure spring.
4. a kind of laser carving device according to claim 1, it is characterised in that: described on the left of the laser engraving machine Slide guide bar is slidably connected in adjusting bracket, inner wall is fixedly connected the slide guide bar up and down with the adjusting cavity.
5. a kind of laser carving device according to claim 1, it is characterised in that: be equipped in the processing main body inner bottom wall Socket chamber is installed with air compressor in the intracavitary roof of socket, and the air compressor top is connected with air inlet pipe, described Air inlet pipe is stretched out outside the processing main body left end face, and the air compressor bottom end is equipped with escape pipe, the escape pipe appearance Face is slidably connected with the gas spray gun that goes out with socket chamber sliding connection, and the gas spray gun right end face out is installed with Connecting plate, the connecting plate top are installed with piston rod, and the piston rod top end has been connected by power cylinder, and the cylinder is fixedly arranged on In the processing main body exterior bottom wall.
6. a kind of laser carving device according to claim 1, it is characterised in that: the upper threaded rod and the lower screw thread Bar screw thread is oppositely arranged.
CN201810459763.0A 2018-05-15 2018-05-15 A kind of laser carving device Active CN108326442B (en)

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CN201810459763.0A CN108326442B (en) 2018-05-15 2018-05-15 A kind of laser carving device

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Application Number Priority Date Filing Date Title
CN201810459763.0A CN108326442B (en) 2018-05-15 2018-05-15 A kind of laser carving device

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CN108326442A CN108326442A (en) 2018-07-27
CN108326442B true CN108326442B (en) 2019-01-11

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109702487A (en) * 2019-01-02 2019-05-03 重庆大学 A kind of device and method of microscopic surfaces structure processing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07148649A (en) * 1993-10-07 1995-06-13 Ryobi Ltd Polishing device
WO2014164360A1 (en) * 2013-03-13 2014-10-09 Applied Materials, Inc. Laser pad conditioning process control
JP2015023135A (en) * 2013-07-18 2015-02-02 株式会社ディスコ Wafer processing method
CN107363486A (en) * 2017-08-08 2017-11-21 北京航空航天大学 A kind of method of electric knife surface laser cutting polishing integral processing

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07148649A (en) * 1993-10-07 1995-06-13 Ryobi Ltd Polishing device
WO2014164360A1 (en) * 2013-03-13 2014-10-09 Applied Materials, Inc. Laser pad conditioning process control
JP2015023135A (en) * 2013-07-18 2015-02-02 株式会社ディスコ Wafer processing method
CN107363486A (en) * 2017-08-08 2017-11-21 北京航空航天大学 A kind of method of electric knife surface laser cutting polishing integral processing

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