CN108318137A - Spectrum measuring system, spectral measuring device, optical measurement method and optical correction method - Google Patents
Spectrum measuring system, spectral measuring device, optical measurement method and optical correction method Download PDFInfo
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- CN108318137A CN108318137A CN201710032473.3A CN201710032473A CN108318137A CN 108318137 A CN108318137 A CN 108318137A CN 201710032473 A CN201710032473 A CN 201710032473A CN 108318137 A CN108318137 A CN 108318137A
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- 238000001228 spectrum Methods 0.000 title claims abstract description 207
- 230000003595 spectral effect Effects 0.000 title claims abstract description 205
- 230000003287 optical effect Effects 0.000 title claims abstract description 124
- 238000012937 correction Methods 0.000 title claims abstract description 118
- 238000000034 method Methods 0.000 title claims abstract description 76
- 238000000691 measurement method Methods 0.000 title claims description 10
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000005259 measurement Methods 0.000 claims description 27
- 230000008569 process Effects 0.000 claims description 27
- 238000012545 processing Methods 0.000 claims description 16
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2866—Markers; Calibrating of scan
Abstract
A kind of optical correction method, for being executed for the spectral measuring device with light input unit.First, the narrow frequency light of multiple tracks is measured by light input unit, is responded with obtaining more narrow frequency spectrographic pulse respectively.Later, it is responded according to these narrow frequency spectrographic pulses, establishes stray light data bank.According to stray light data bank, generates and correct formula.Then, spectroradio standard light is received from light input unit, and enables and corrects the spectrum that the spectral measuring device that formula is enabled measures spectroradio standard light, to obtain spectral measuring data.According to spectral measuring data and spectroradio standard spectrum data, correction coefficient formula is generated, spectral measuring data and spectroradio standard spectrum material matches can be made.
Description
Technical field
The present invention relates to a kind of optical measurement system (optical measurement system), optical measurement device with
A kind of optical correction method more particularly to spectrum measuring system, the spectrum measuring method and optics school applied to aforementioned the two
Correction method.
Background technology
Spectrometer (spectrometer) be it is a kind of can analyze light with obtain spectrum (spectrum) conventional optical measure
Device, and many industries now, such as biotechnology, display panel manufacturer and light emitting diode (Light Emitting
Diode, LED) manufactory, possess the more spectrometers used in producing line mostly.These spectrometers measure product in first time
(product) or sample (sample) in the past, can first with spectroradio flux standard lamp (spectral radiant flux
Standard lamp), such as halogen lamp (halogen lamp), to carry out spectroradio light quantity correction (spectral
radiant flux calibration)。
However, when each spectrometer receives the light of spectroradio flux standard lamp come when being corrected, in these spectrometers
The stray light (stray light) that portion can all generate, and stray light will produce influence undesirable on measurement and reduce light splitting
The accuracy of radiation flux, to weaken the effect of above-mentioned correction.In addition, the stray light of these spectrometers is different from each other, so
These spectrometers may have the measurement measured by identical product or sample apparent and ignorable each other
Difference causes the obtained measurement of these spectrometers inconsistent situation occur.
Invention content
The present invention provides a kind of optical correction method, accurate to be promoted using influence of the stray light to measurement is reduced
Property.
The present invention provides a kind of spectral measuring device, uses above-mentioned optical correction method.
The present invention provides a kind of spectrum measuring system comprising more above-mentioned spectral measuring devices, and use above-mentioned optics
Bearing calibration is consistent to help the measurement between these spectral measuring devices.
The present invention provides a kind of spectrum measuring method, and it is suitable for above-mentioned spectral measuring devices and spectrum measuring system.
The present invention optical correction method that wherein an embodiment is provided is suitable for a spectral measuring device, wherein amount of spectrum
It includes a smooth input unit to survey device.In above-mentioned optical correction method, first, spectral measuring device is measured more by light input unit
The narrow frequency light in road (narrow-band rays) responds (impulse response) to obtain more narrow frequency spectrographic pulse respectively.
Then, it is responded according to these narrow frequency spectrographic pulses, establishes a stray light data bank, wherein stray light data bank has spectrum measuring
The stray light information of device and its light input unit.According to stray light data bank, the amendment formula for belonging to spectral measuring device is generated,
Formula is wherein corrected to correct stray light caused by spectral measuring device and its light input unit.It is enabled correcting formula
(enabled) in the state of, spectral measuring device measures spectroradio standard light by light input unit, to obtain by correcting journey
The spectral measuring data of formula processing.Later, according to spectral measuring data and spectroradio standard spectrum data, generation belongs to spectrum
The correction coefficient formula (calibration coefficient program) of measuring equipment, wherein the correction coefficient formula amount of making
SPECTRAL DATA and spectroradio standard spectrum material matches are surveyed, and spectroradio standard spectrum data can be measured by standard spectrum and be filled
It sets and measures spectroradio standard light and obtain.
The spectrum measuring system that a present invention wherein embodiment is provided comprising outside one first spectral measuring device and one
Portion's processing unit.First spectral measuring device passes through above-mentioned optical correction method, and generates and belong to the first spectral measuring device
One first corrects formula and one first correction coefficient formula.First spectral measuring device includes one first optics module, one first
Circuit module and an external process devices.First optics module includes one first smooth input unit and one first spectrum generating piece
(first spectrum former).First smooth input unit is for receiving one first light to be measured, and the first spectrum generating piece is used for
A plurality of first spectrum light beam is generated from the first light to be measured.First circuit module includes that one first optical receiver and one first control are single
Member.First optical receiver generates one first SPECTRAL DATA according to these the first spectrum light beams.First control unit electrical connection first
Optical receiver.External process devices couple the first control unit, wherein the first control unit or external process devices can be according to the
One corrects formula and/or the first correction coefficient formula the first SPECTRAL DATA of processing.
The present invention spectral measuring device that wherein an embodiment is provided passes through above-mentioned optical correction method, generates category
One in the spectral measuring device corrects formula and a correction coefficient formula.Spectral measuring device includes an optics module and an electricity
Road module.Optics module generates a plurality of spectrum light beam for receiving a light to be measured, and from light to be measured.Circuit module connects including a light
Receive device and a control unit.Optical receiver is for receiving these spectrum light beams to generate a SPECTRAL DATA.Control unit is electrically connected
Storage element and optical receiver, wherein control unit or said external processing unit can be according to amendment formula and/or correction coefficient
Formula handles SPECTRAL DATA.
The present invention optical measurement method that wherein an embodiment is provided is suitable for the light by above-mentioned optical correction method
Compose measuring equipment.In optical measurement method, first, a spectrum measuring system is established, wherein spectrum measuring system includes one the
One spectral measuring device.First spectral measuring device belongs to the first spectral measuring device by above-mentioned optical correction method to generate
One first correct formula and one first correction coefficient formula.One first light to be measured is measured by the first spectral measuring device, with
Obtain one first SPECTRAL DATA.In the state that the first amendment formula and/or the first correction coefficient formula are enabled, according to first
It corrects formula and/or the first correction coefficient formula handles the first SPECTRAL DATA.
Using above-mentioned amendment formula, influence of the stray light to measurement can be reduced or eliminate, to promote spectrum measuring
The luminous flux accuracy of device, and then help the measurement of these spectral measuring devices can be consistent.
Above description is only the general introduction of technical solution of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, and in order to allow the above and other objects, features and advantages of the present invention can
It is clearer and more comprehensible, spy is for embodiment below, and coordinates attached drawing, and detailed description are as follows.
Description of the drawings
Fig. 1 is the block schematic diagram of the spectral measuring device of one embodiment of the invention.
Fig. 2A is the flow diagram of the optical correction method of one embodiment of the invention.
Fig. 2 B are the block schematic diagrams that spectral measuring device carries out step S21 in Fig. 2A.
Fig. 2 C are the spectral schematics of wherein one narrow frequency light in Fig. 2 B.
Fig. 2 D are the stray light spectral schematics of the narrow frequency light in Fig. 2 C.
Fig. 2 E are the schematic diagrames for the spectrum stray light distribution matrix that the narrow frequency light of multiple tracks according to fig. 2 in B is established.
Fig. 2 F are the block schematic diagrams that spectral measuring device carries out step S24 in Fig. 2A.
Fig. 3 is the block schematic diagram of the spectrum measuring system of one embodiment of the invention.
Specific implementation mode
It is further illustrated the present invention below by the mode of embodiment, but does not therefore limit the present invention to the reality
It applies among a range.
Referring to Fig. 1, it is painted the block diagram of spectral measuring device 100.In the embodiment shown in fig. 1, amount of spectrum
Survey device 100 can spectral measuring (optical spectrum), and include optics module 110 and circuit module 120, and amount of spectrum
It can be spectrometer, light splitting brightness photometer, spectral irradiance meter or integrating sphere measurement system or colorimeter to survey device 100
(colorimeter).Optics module 110 can receive light to be measured (survey light) L1, and generate a plurality of light from smooth L1 to be measured
Compose light beam L2.Circuit module 120 can receive these spectrum light beam L2, and these spectrum light beams L2 is converted into containing spectrum information
The electric signal of (spectrum information).
Optics module 110 includes light input unit 111 and spectrum generating piece 112, wherein light input unit 111 and spectrum generating piece
112 are all configured at the path (path) of smooth L1 to be measured.Light input unit 111 is for receiving smooth L1 to be measured in addition, light input unit 111 can
Including detachable optical component (detachable optical part) and/or non-dismountable optical component (non-
Detachable optical part), wherein detachable optical component include integrating sphere, cosine corrector, optical coupler,
Optical fiber, optical filter and/or lens group include lens group, optical fiber, optical filter and/or slit without detachable optical component.Scheming
In 1, illustrated so that light input unit 111 includes optical fiber 111f as an example.
Smooth L1 to be measured can be directional light, be accumulated the light beam of (focused) (light beam) or the light beam of diverging, and
In the embodiment shown in fig. 1, smooth L1 to be measured is the light beam being accumulated.For example, smooth L1 to be measured can be converged by least a piece of lens.
Therefore, smooth L1 to be measured can have convergency (converging angle) L1a.Light input unit 111, which has, is less than convergency L1a
Receipts optic angle (light-receiving angle) 111a, as shown in Figure 1.But, in other embodiments, optic angle 111a is received
Also it can be equal to convergency L1a.It is less than or equal to convergency L1a due to receiving optic angle 111a, so the numerical aperture of smooth L1 to be measured
(numerical aperture, NA) can be greater than or equal to the numerical aperture of light input unit 111, so that the light of light input unit 111
Receiving area (light-receiving area, be not painted) and receipts angular can be irradiated by smooth L1 to be measured completely.In addition, scheming
In embodiment shown in 1, smooth L1 to be measured is the light beam being accumulated, but in other embodiments, and smooth L1 to be measured is alternatively directional light
Or a plurality of light (rays) directly sent out by point light source (point light source), it does not limit as shown in Figure 1
Light beam.
It can be incident in spectrum generating piece 112 by the smooth L1 to be measured of light input unit 111, and spectrum generating piece 112 can be from waiting for
Survey light L1 and generate a plurality of spectrum light beam L2, wherein spectrum generating piece 112 may include collimating mirror, focus lamp, spectroscope, optical filter,
Grating and/or dispersor generate these spectrum light beams L2.Circuit module 120 include optical receiver 121, storage element 122 with
Control unit 123.In terms of hardware, circuit module 120 can be circuit board assembly (Printed Circuit Board,
PCBA), and optical receiver 121, storage element 122 and control unit 123 all install (mounted) at least one piece of circuit board
On.Control unit 123 is electrically connected optical receiver 121 and storage element 122, to control optical receiver 121 and storage element 122,
Wherein control unit 123 is, for example, programmable logic controller (Programmable Logic Controller, PLC), micro-control
Device (Microcontroller, MCU), microprocessor (Microprocessor, μ P) or programmable logic device processed
(Programmable Logic Device, PLD).
Optical receiver 121 can receive these spectrum light beam L2 caused by spectrum generating piece 112, and by these spectrum light beams
L2 is converted into the electric signal containing spectrum information, and optical receiver 121 can be one-dimensional or two-dimensional light sensing array
(optical sensor array) is, for example, photodiode array detector (photodiode array), charge coupling
Clutch (Charge-Coupled Device, CCD) or complementary metal-oxide layer-semiconductor (Complementary
Metal-Oxide-Semiconductor, CMOS).Above electrical signal can be transmitted to control unit 123 by optical receiver 121, be allowed
Control unit 123 handles the spectrum information in (processing) electric signal, to generate SPECTRAL DATA (spectrum data),
The measurement of smooth L1 i.e. to be measured.
Storage element 122 can be non-volatility memory (non-volatile memory), be, for example, fast flash memory bank
(flash memory).So storage element 122 can be memory card, such as secure digital card (Secure Digital
Memory Card, SD Card) or memory stick (Memory Stick, MS).Storage element 122 can store more formulas, and control
Unit 123 processed can execute the formula in storage element 122, to control the running of optical receiver 121, wherein 123 energy of control unit
Selectively wherein at least the two in enable (enabling) these formulas.It is handled inside electric signal in control unit 123
After spectrum information, SPECTRAL DATA can be stored in storage element 122 by control unit 123.So storage element 122 can not only store up
Formula is deposited, and the measurement (i.e. SPECTRAL DATA) of smooth L1 to be measured can also be stored.
Circuit module 120 may also include transmission unit (transmission unit) 124, be electrically connected control unit
123.Transmission unit 124 can be Port (port), can be serial port (serial port) or parallel port (parallel
), such as universal serial bus (Universal Serial Bus, USB), RS-232-C serial ports or RS-485 tandems port
Port.Transmission unit 124 can utilize transmission line (electrical cable, be not painted) to be electrically connected external process devices 10,
E.g. notebook computer, desktop computer, tablet computer or industrial computer (industrial computer).That is,
Control unit 123 can couple external process devices 10 by transmission unit 124 and transmission line, so as to provide above-mentioned spectrum
Material, i.e., the measurement of smooth L1 to be measured, via transmission unit 124 and transmission line to external process devices 10, so that external
Processing unit 10 carries out subsequent processing to SPECTRAL DATA.
In addition, transmission unit 124 can also be wireless transmission unit (wireless transmission unit), so that
Control unit 123 can couple external process devices by Wi-Fi (Wi-Fi) or bluetooth connection (Bluetooth link)
10, to which above-mentioned SPECTRAL DATA is transmitted to external process devices 10, wherein external treatment via Wi-Fi or bluetooth connection
Device 10 can also be cloud server.So can be established between control unit 123 and transmission unit 124 wired or wireless
Coupling, and it can only be wire transmission unit (wire transmission unit) that transmission unit 124, which does not limit,.
These formulas stored by storage element 122 include correct formula and/or correction coefficient formula, and correct formula with
Correction coefficient formula can help to promote the spectroradio flux accuracy of spectral measuring device 100.At control unit 123 or outside
Reason device 10 can execute amendment formula formula and correction coefficient formula, and can also selectively enable and forbidden energy
(disabling) formula and correction coefficient formula one at least within are corrected.It can be all with correction coefficient formula in addition, correcting formula
It is the optical correction method executed described in Fig. 2A and generates, and outside can be also stored in by correcting formula and/or correction coefficient formula
Processing unit 10 (such as desktop computer or cloud server) or external storage media (not being painted), be, for example, optical disc or with
Body dish, storage element 122 can only be stored in by not limiting.
It please refers to Fig. 2A and Fig. 2 B, in the optical correction method shown in Fig. 2A, first, carries out step S21, enable amount of spectrum
It surveys device 100 and the narrow frequency light L31 of multiple tracks is measured by light input unit 111, responded with obtaining more narrow frequency spectrographic pulse respectively.These
Narrow frequency light L31 is, for example, monochromatic light (monochromatic ray), is sent out by narrow frequency light source 21, and narrow frequency light source 21 is for example
It is single light apparatus (monochromator) or tunable laser (tunable laser).In addition, the wavelength per narrow frequency light L31 together is all
Difference, so that the wavelength of these narrow frequency light L31 can cover certain range, such as 300 nanometers (nm) between 800 nanometers.
Art technology person can also determine that interval is smaller every how many nanometers transmitting together narrow frequency light according to its demand, generated later
Stray light data bank can more precisely；Interval is bigger, and step S21 the time it takes can be shorter.
Narrow frequency light source 21 only exports the narrow frequency light L31 with specific wavelength together every time, and light input unit 111 can individually
Receive these narrow frequency light L31.That is, these narrow frequency light L31 can seriatim (one by one) by light input unit 111
It is incident in spectrum generating piece 112, all will not once be incident in spectrum generating piece 112.When these narrow frequency light L31 are individually incident
When spectrum generating piece 112, spectrum generating piece 112 can seriatim be generated from these narrow frequency light L31 a plurality of is incident in optical receiver
121 spectrum light beam L32.
Optical receiver 121 can individually receive these spectrum light beam L32, and these spectrum light beams L32 is converted into multiple
The SPECTRAL DATA of electrical signal form, wherein these SPECTRAL DATAs can be described as narrow frequency spectrographic pulse response again.Control unit 123 can be used
To handle these narrow frequency spectrographic pulse responses.In other words, light input unit 111 often receives narrow frequency light L31 together, control unit
123 will receive a corresponding narrow frequency spectrographic pulse response, represent the spectrum of wherein one narrow frequency light L31.In this way, light
Spectrum measuring equipment 100 is able to obtain these narrow frequency spectrographic pulse responses.
In the embodiment shown in Fig. 2 B, optical module can be configured between narrow frequency light source 21 and light input unit 111
22b, so that these narrow frequency light L31 are incident in light input unit 111, wherein optical module 22b after by optical module 22b
It is optical coupled (optical coupling) with light input unit 111.Optical module 22b can be lens group, can be saturating by multi-disc
Mirror is formed, and optical module 22b can converge these narrow frequency light L31 so that each narrow frequency light L31 has convergency L3a, wherein respectively
The convergency L3a of narrow frequency light L31, which is greater than or equal to, receives optic angle 111a.That is, the numerical aperture of each narrow frequency light L31 can be more than
Or the numerical aperture equal to light input unit 111.In addition, convergency L3a is determined by optical module 22b, so optical module
22b can also determine the numerical aperture of each narrow frequency light L31.In the present embodiment, optical module 22b can be used to change narrow frequency light source 21
Optical output mode, use simulation preset light source optical output mode.In other embodiments, optics group can not also be configured
Part 22b.
Fig. 2A and Fig. 2 B are please referred to, after carrying out step S21, step S22 is then carried out, according to these narrow frequency spectrum arteries and veins
Stray light data bank is established in punching response, and stray light data bank has spectral measuring device and its stray light of light input unit money
News, wherein stray light information includes these narrow frequency light L31 generated spuious in light input unit 111 (including optical fiber 111f)
Light, and by spuious caused by these narrow frequency light L31 after light input unit 111 until being received by optical receiver 121
Light.In addition, the wavelength of these narrow frequency light L31 can cover certain range (such as 300 nanometer nm are between 800 nanometers), so
Stray light information obviously only includes the stray light of wavelength within this range, does not include stray light of the wavelength other than this range.
In other embodiment, this field portrayer can also adjust the wave-length coverage that narrow frequency light L31 is covered according to its demand.
Step S22 can be executed by spectral measuring device 100 or external process devices 10, i.e., stray light data bank can be built
It is vertical and be stored in spectral measuring device 100 or external process devices 10, so control unit 123 or external process devices 10 can be according to
It is responded according to these narrow frequency spectrographic pulses, to establish stray light data bank, wherein stray light data bank can utilize spectrum stray light
Distribution matrix (spectral stray light distribution matrix) is established, and spectrum stray light distribution matrix
Can be according on 2 20th, 2006, Application Optics the 6th phase (Vol.45, No.6, APPLIED OPTICS) of volume 45 is delivered
Paper：「Simple spectral stray light correction method for array
The content of spectroradiometers " is established.Art technology person also can establish stray light money according to its demand using other
Expect the method in library.
Specifically, Fig. 2A and Fig. 2 C are please referred to, wherein spectrum 32j shown in fig. 2 C is wherein certain one of narrow frequency light L31
Spectrum.In fig. 2 c, horizontal axis is picture element number (pixel number), represents each picture element in optical receiver 121 (not
It is painted), and in embodiment shown in fig. 2 C, picture element quantity shares 1024.The longitudinal axis is relative intensity, maximum value 1.
In the optical receiver 121 of the present embodiment, these 1024 picture elements can be with aligning (line) or array
(array), each picture element can substantially receive spectrum light beam (such as spectrum light beam L32 or the spectrum light beam of specific wavelength
L2), so the wavelength for the light that these picture elements are received substantially also can be different from each other.Therefore, the picture element number in Fig. 2 C can
To represent the wavelength of spectrum light beam.In addition, spectrum 32j (being equal to wherein one narrow frequency spectrographic pulse response) shown in fig. 2 C can
It is described with line spread function (Line-Spread Function, LSF).Since spectrum 32j is to measure certain narrow frequency light L31 together
And generate, so Fig. 2 C will appear the wave crest 32p for representing this narrow frequency light L31, it is located in frequency band (band) IB1.In frequency band IB1
Wave crest 32p can be considered the actual signal of narrow frequency light L31, and the spectrum 32j other than frequency band IB1 can be considered the signal of stray light.
Fig. 2 C and Fig. 2 D are please referred to, then, stray light spectrum 32js is captured from spectrum 32j.Due to the wave crest in frequency band IB1
32p can be considered the actual signal of narrow frequency light L31, and the spectrum 32j other than frequency band IB1 can be considered the signal of stray light, so will
Wave crest 32p removals in frequency band IB1, so that the relative intensity in frequency band IB1 becomes zero, then left spectrum is (such as Fig. 2 D institutes
Show) it theoretically should be stray light and contributed.It then, will be in the relative intensity of the spectrum 32j other than frequency band IB1 and frequency band IB1
Relative intensity sum total is divided by, to carry out normalization (normalization), to obtain stray light spectrum 32js.Later, according to
Method disclosed by Fig. 2 C and Fig. 2 D captures more stray light spectrum from all narrow frequency spectrographic pulse responses, and according to all
Stray light spectrum (including stray light spectrum 32js), establish spectrum stray light distribution matrix D as shown in Figure 2 E.
Please refer to Fig. 2 E, spectrum stray light distribution matrix D substantially comprises more stray light spectrum, and these stray light light
Spectrum is from different narrow frequency light L31.By taking Fig. 2 E as an example, spectrum stray light distribution matrix D include stray light spectrum 32jc,
32js and 32jx, and these stray light spectrum 32jc, 32js and 32jx are from wavelength narrow frequency light L31 different from each other.
In spectrum stray light distribution matrix D, same stray light spectrum (such as stray light spectrum 32jc, 32js or
The relative intensity value of each picture element in 32jx) is sequentially to fill in matrix along line direction (row direction) X2
Wherein one row (column) in, and the relative intensity of the different narrow frequency light L31 received by the same picture element is then along row side
It is sequentially filled in wherein a line (row) of matrix to (column direction) X1.In this way, completing light shown in Fig. 2 E
Compose stray light distribution matrix D.Further, since the wave crest 32p in frequency band IB1 is removed and (please refers to Fig. 2 D), so spectrum is spuious
The multiple elements (element) being located in light distribution matrix D on diagonal line are all zero, such as the first row first row, the second row the
Two row and the tertial element of the third line are all zero.
Spectrum stray light distribution matrix D represents stray light to the influence caused by spectral measuring device 100, and spectrum is spuious
Light distribution matrix D meets following mathematical expression (1).
Ym=Yr+DYr............................................... ... (1)
In mathematical expression (1), Ym and Yr is all column matrix (column matrix).It is real that Ym represents spectral measuring device 100
The spectrum measured on border, such as the obtained spectrum of smooth L1 or narrow frequency light L31 to be measured are measured, and Yr represents removal or reduces
Ideal spectrum after stray light.
Mathematical expression (1) can be rewritten into following mathematical expression (2).
Ym=(I+D) Yr..................................................... (2)
In mathematical expression (2), I is unit matrix (identity matrix).Ym, D and I are known, and Yr is not
Know, so unlocking mathematical expression (2) to find out the solution of Yr, can be removed or be reduced the ideal spectrum of stray light.
According to linear algebra (linear algebra), there are many solutions for mathematical expression (2).For example, mathematical expression (2) can use height
This elimination approach (Gaussian elimination algorithm) acquires Yr, and above application optics (APPLIED OPTICS)
Paper is mentioned at its page 1114 can be used iterative method (iterative approach) to acquire Yr.The present embodiment is to use anti-square
Battle array (inverse matrix) acquires Yr.
Specifically, mathematical expression (2) is rewritable at mathematical expression (3).
Ym=(I+D) Yr=AYr................................................ (3)
In mathematical expression (3), A is coefficient matrix (coefficient matrix), and represents stray light data bank, wherein
Stray light data bank A meets mathematical expression：A=(I+D).That is, by spectrum stray light distribution matrix D and unit matrix I phases
Add and can be obtained stray light data bank A, to complete step S22.Further, since in spectrum stray light distribution matrix D in pair
Element on linea angulata is all zero, so the element in stray light data bank A on diagonal line is all 1.
Then, step S23 is carried out, according to stray light data bank, generates the amendment formula for belonging to spectral measuring device 100.
Formula is corrected to correct stray light caused by spectral measuring device 100 and its light input unit 111, wherein being provided according to stray light
Expect to correct caused by library formula can produced by spectral measuring device 100 or external process devices 10, and in the present embodiment,
It is to correct formula as an example caused by spectral measuring device 100, wherein spectrum measuring can be stored in by correcting formula
In the storage element 122 of device 100.But, in other embodiments, correcting formula can also be produced by external process devices 10
It is raw, and correcting formula also can be stored in external storage media, such as in optical disc, memory card, hard disc or high in the clouds hard disc.It corrects
Formula may include Linear Algebra Operation method, such as inverse matrix.Specifically, mathematical expression (3) can derive into following mathematical expression
(4)
A-1Ym=A-1AYr=Yr......................................... ... (4)
In mathematical expression (4), A-1 is the inverse matrix of A, and to correct formula, so it can be coefficient matrices A to correct formula
The inverse matrix of (i.e. stray light data bank).It can clearly be seen that from mathematical expression (4), the spectrum Ym actually measured be multiplied by
After inverse matrix A-1, you can obtain ideal spectrum Yr.
It is (such as shown in fig. 2 C to obtain these narrow frequency spectrographic pulses responses measuring these narrow frequency light L31 based on above-mentioned
Spectrum 32j) after, it can establish stray light data bank according to these narrow frequency spectrographic pulse responses and generate and correct formula.It corrects
Formula can be generated using linear algebra, such as inverse matrix.When formula is corrected in 123 enable of control unit, it can reduce or disappear
Except the influence of stray light, to promote the accuracy of spectral measuring device 100.
It should be noted that the above formula of correcting is according to miscellaneous caused by the intrinsic light path in spectral measuring device 100
Astigmatism and establish, wherein intrinsic light path refers to the Actual path that light is transmitted to optical receiver 121 from light input unit 111, and consolidate
Light path is the practical optical layout being made of with 121 three of optical receiver light input unit 111, spectrum generating piece 112
(practical optical layout) and determine.If practical optics is laid with variation slightly, such as mobility spectrum life
Member 112, then intrinsic light path can also change, so that stray light caused by intrinsic light path can also change.
In other words, after spectral measuring device 100 has had and corrected formula, if any light of mobile optics module 110
Element (such as optical fiber 111f) or optical receiver 121 are learned, then the intrinsic light path in spectral measuring device 100 will change and cause
The stray light of script also changes, and to change the effect for correcting formula, or even generation amendment formula can not reduce stray light
Situation.In addition, in a practical situation, the intrinsic light path of wantonly two spectral measuring devices 100 will not be mutually the same, so wantonly two
The stray light of platform spectral measuring device 100 is also amendment journey different from each other, having down to each spectral measuring device 100
Formula is all different.
According to the above it is found that it is according to the more narrow frequency spectrum measured acquired by the narrow frequency light L31 of multiple tracks to correct formula
Impulse response and generate, and the wavelength of these narrow frequency light L31 cover certain range (such as 300 nanometers (nm) to 800 nanometers it
Between).Therefore, it corrects formula and is applied basically for the smooth L1 to be measured in the wave-length coverage that these narrow frequency light L31 are covered.For
Smooth L1 to be measured other than the wave-length coverage that these narrow frequency light L31 are covered, correcting formula may be difficult to play to be effectively reduced
The effect of stray light.In other words, formula is corrected mainly to be only capable of eliminating or reducing the stray light institute in particular range of wavelengths
The influence brought.
Fig. 2A and Fig. 2 F are please referred to, then, sequentially carries out step S24 and step S25 to generate and store correction coefficient journey
Formula.Specifically, in step s 24, in the state that amendment formula is enabled, spectral measuring device 100 passes through light input unit
111 measure spectroradio standard light S1, to obtain the spectral measuring data by correcting formula processing, wherein spectroradio standard
Light S1 has continuous spectrum (continuous spectrum), and can be sent out by spectroradio standard sources, and spectroradio mark
Quasi-optical source is the light source for the absolute spectroradio flux information for having standard measurement mechanism proposition, is, for example, halogen lamp or incandescent lamp
(incandescent lamp).Under conditions of 123 enable of control unit is stored in the amendment formula of storage element 122, light splitting
After radiation standard light S1 is measured by spectral measuring device 100, spectral measuring device 100 can be obtained according to formula amendment is corrected
Spectral measuring data.So theoretically corrected spectral measuring data contains intrinsic light path in spectral measuring device 100 and is made
At spuious optical signal can be very low so that spectral measuring device 100 can measure by stray light degree it is relatively low point
Light radiation standard light S1 spectrum.
In step S21 and step S24, it is narrow that spectral measuring device 100 can measure these under identical smooth input condition
The spectrum of the spectrum and spectroradio standard light S1 of frequency light L31.For example, spectral measuring device 100 is inputted using the same light
Portion 111 measures the spectrum of the spectrum and spectroradio standard light S1 of these narrow frequency light L31, the i.e. light of spectroradio standard light S1
The spectrum of spectrum and all or part of narrow frequency light L31 can be these the narrow frequency light L31 and spectroradio measured through optical fiber 111f
Standard light S1 and obtain.Secondly, it is defeated in identical light that both narrow frequency light L31 and spectroradio standard light S1 spectrum also be can be for example
Enter and measured under 111 numerical aperture of portion, i.e., the spectrum measuring of narrow frequency light L31 and spectroradio standard light S1 is in same receipts optic angle
It is carried out under 111a.
In the embodiment shown in Fig. 2 F, light can be configured between light input unit 111 and spectroradio standard sources 31
Component 22f is learned, it is optical coupled with light input unit 111, and spectroradio standard light S1 enters after by optical module 22f
It penetrates in light input unit 111.The convergency L1a of spectroradio standard light S1, which is greater than or equal to, receives optic angle 111a, i.e. spectroradio mark
The numerical aperture of quasi-optical S1 is greater than or equal to the numerical aperture of light input unit 111, so that the optical receiving region energy of light input unit 111
The S1 irradiations of the radiation standard that is split completely light.
After obtaining spectral measuring data, step S25 is carried out, according to spectral measuring data and spectroradio standard spectrum
Data generates the correction coefficient formula for belonging to spectral measuring device 100, and wherein correction coefficient formula makes spectral measuring data and divides
Light radiation standard SPECTRAL DATA matches, and spectroradio standard spectrum data is that light splitting spoke can be measured by standard spectrum measuring equipment
It penetrates standard light S1 and obtains.Later, it can store and correct formula and/or correction coefficient formula in the storage of spectral measuring device 100
Unit 122 or external process devices 10.Palpus one is mentioned that, is corrected formula and is stored in spectral measuring device with correction coefficient formula
Operation can be made more instant in 100 storage element 122.
More specifically, standard spectrum measuring equipment has low stray light characteristic, and can be using hardware or software come effectively
Reduce stray light.In terms of hardware, for example, standard spectrum measuring equipment can be used temperature resistance float optical system, low thermal coefficient of expansion light
Learn element, high-accuracy low tolerance optical element, disappear spuious optical element and/or optical filter etc. to reach low stray light characteristic.It is soft
In terms of body, such as standard spectrum measuring equipment can be another spectral measuring device by bearing calibration of the present invention.Also that is,
Standard spectrum measuring equipment can be had been subjected to above-mentioned steps S21 to S23 and generate and belong to its amendment formula, and spectroradio
Standard spectrum data is that spectroradio standard light S1 is measured under conditions of the amendment formula of standard spectrum measuring equipment is enabled
Spectrum and obtain.So it also may achieve low stray light characteristic.
Palpus one is mentioned that, if spectral measuring data can seriously affect step with spectroradio standard spectrum data with stray light
The effect of correction coefficient formula produced by rapid S25.The present embodiment first passes through the mode of hardware and/or software, reduces spectral measuring
The stray light of data and spectroradio standard spectrum data.Then step S25 is executed again, and external process devices 10 can be according to measurement
SPECTRAL DATA generates the correction coefficient formula for belonging to spectral measuring device 100 with spectroradio standard spectrum data.Also that is, miscellaneous
Generated correction coefficient formula can be such that spectral measuring device 100 is being measured with standard spectrum measuring equipment in the case that astigmatism is low
Relatively similar measurement is obtained when identical smooth L1 to be measured.In other embodiments, other tool operational capabilities can also be passed through
Electronic device generates correction coefficient formula, such as the control unit 123 of spectral measuring device 100.Then external process devices
10 can be stored in the correction coefficient formula for belonging to spectral measuring device 100 in its storage element 122.
It is following in use, the amendment formula when spectral measuring device 100 is all caused with correction coefficient formula based on above-mentioned
When energy, spectral measuring device 100 passes through light input unit 111 (including optical fiber 111f) and measures the smooth obtained SPECTRAL DATAs of L1 to be measured
It can quite be similar to that standard spectrum measuring equipment measures the SPECTRAL DATA of identical smooth L1 to be measured or even SPECTRAL DATA can substantial phase
Together, wherein the wavelength of smooth L1 to be measured can overlap with the wave-length coverage that these aforementioned narrow frequency light L31 are covered, so as to correct formula energy
Effectively playing reduces the effect of stray light.In this way, spectral measuring device 100 can be reduced by correcting formula and correction coefficient formula
With the accurate sex differernce of standard spectrum measuring equipment between the two, and the measurement both allow is consistent.
In addition, in the optical correction method described in earlier figures 2A, since these narrow frequency spectrographic pulse responses are all logical
It crosses the light input unit 111 of the 111f containing optical fiber and measures and obtain, so stray light data bank will include caused by light input unit 111
It is inevitable to correct formula so that if correcting formula caused by bearing calibration of the enable according to Fig. 2A for spuious optical signal
Stray light caused by light input unit 111 can be eliminated automatically.Therefore, when amendment formula is all caused with correction coefficient formula
Can spectral measuring device 100 when measuring smooth L1 to be measured, spectral measuring device 100 needs to be equipped with (including the optical fiber of light input unit 111
111f), and by light input unit 111 smooth L1 to be measured is measured, amendment formula can just be made correctly to eliminate or reduce the shadow of stray light
It rings, effectively to reduce the measurement difference between spectral measuring device 100 and standard spectrum measuring equipment.
Correction coefficient formula can be proportion function (ration function), contain the ratio corresponding to each optical wavelength
Example.That is, the numerical value of proportion function can change with optical wavelength and be changed.Generate correction coefficient formula method can be by
Spectroradio standard spectrum data is divided by with spectral measuring data, to obtain proportion function.When correction coefficient formula and amendment journey
When the spectral measuring device 100 that formula is all enabled is measured, control unit 123 (or external process devices 10) can will measure
The SPECTRAL DATA arrived is multiplied with proportion function.For example, the ratio corresponding to 500nm optical wavelength is 2, and control unit 123
The numerical value (such as light intensity sensitivity) of 500nm optical wavelength in SPECTRAL DATA can be multiplied by 2.
In addition, the measurements of at least two spectral measuring devices 100 can also be allowed by correcting formula and correction coefficient formula
It is consistent with standard spectrum measuring equipment, and so that these spectral measuring devices 100 is had and approach or be equal to standard spectrum measurement dress
The luminous flux accuracy set.That is, multiple spectral measuring devices 100 can carry out the above optical correction method to obtain respectively
Belong to respective amendment formula and correction coefficient formula, so that the measurement of these spectral measuring devices 100 can be consistent with each other,
It is poor to reduce the machine between these measuring equipments 100.In addition, the stray light due to wantonly two spectral measuring devices 100 is practical
On be different from each other, respective amendment formula can not be converted mutually with correction coefficient formula.
Fig. 3 is the block schematic diagram of the spectrum measuring system of one embodiment of the invention.Referring to Fig. 3, spectrum measuring system
300 include multiple (at least two) spectral measuring devices and an at least external process devices 10, and each spectral measuring device packet
Optics module and circuit module are included, wherein these optics modules respectively include multiple smooth input units.In figure 3, spectrum measuring system
System 300 includes at least two spectral measuring devices, is the first spectral measuring device 301 and the second spectral measuring device 302 respectively.
First spectral measuring device 301 includes the first optics module 310 and the first circuit module 320.First optics module
310 include the first smooth input unit 311 and the first spectrum generating piece 312.First circuit module 320 include the first optical receiver 321,
First storage element 322, the first control unit 323 and the first transmission unit 324.Second spectral measuring device 302 includes second
Optics module 410 and second circuit module 420.Second optics module 410 includes that the second smooth input unit 411 and the second spectrum generate
Part 412.Second circuit module 420 includes the second optical receiver 421, the second storage element 422, the second control unit 423 and the
Two transmission units 424.
First spectral measuring device 301 and the second spectral measuring device 302 can refer to previous embodiment spectral measuring device
100 embodiment, details are not described herein.So the first spectral measuring device 301 can be carried out with the second spectral measuring device 302
Optical correction method described in Fig. 2A, to generate the first amendment formula and the first correction that belong to the first spectral measuring device 301
Coefficient formula, and belong to the second of the second spectral measuring device 302 and correct formula and the second correction coefficient formula.
One embodiment of the invention also provides a kind of optical measurement method, is applicable in the correction having been subjected to described in earlier figures 2A
The spectrum measuring system of method, for example, Fig. 3 spectrum measuring system 300, wherein correct formula (such as first and second correct journey
Formula) and/or correction coefficient formula (such as first and second correction coefficient formula) the first spectral measuring device 301 can be stored in
In the second spectral measuring device 302, external process devices 10 (such as cloud server) and/or external storage media, wherein
External storage media are, for example, optical disc or Portable disk.Correcting formula and/or correction coefficient formula has spectral measuring device related
Machine-recognition information, and machine-recognition information can make spectral measuring device using belonging to it amendment formula and/or correction system
Number formula, and to make above-mentioned amendment formula and/or correction coefficient formula be only capable of measuring light institute for correcting spectral measuring device
The SPECTRAL DATA of generation.
By taking the spectrum measuring system of Fig. 3 as an example, in the optical measurement method of the present embodiment, first, the first spectrum measuring
Device 301 and the second spectral measuring device 302 establish spectrum measuring system by the optical correction method described in above example
System 300.Later, the first smooth L301 to be measured is measured by the first spectral measuring device 301, to obtain the first SPECTRAL DATA, and
The second smooth L302 to be measured is measured by the second spectral measuring device 302, to obtain the second SPECTRAL DATA, wherein the first spectrum measuring
Device 301 is to survey the first smooth L301 to be measured by the first smooth input unit 311, and the second spectral measuring device 302 is by the
Two smooth input units 411 measure the second smooth L302 to be measured.
Then, in the state that the first amendment formula and/or the first correction coefficient formula are enabled, journey is corrected according to first
Formula and/or the first correction coefficient formula handle the first SPECTRAL DATA, and the first SPECTRAL DATA after processing is compared with no stray light
And the data that can be measured with standard spectrum measuring equipment matches.On the other hand, formula and/or the second correction are corrected second
In the state that coefficient formula is enabled, corrects formula according to second and/or the second correction coefficient formula handles the second SPECTRAL DATA,
The second SPECTRAL DATA after processing matches compared with no stray light and the data that can be measured with standard spectrum measuring equipment.
That is, revised first SPECTRAL DATA also can indirect matching with revised second SPECTRAL DATA.But, in other realities
It applies in example, can also hold and come the amendment formula of forbidden energy first and/or the first correction coefficient formula and the second amendment journey depending on different situations
Formula and/or the second correction coefficient formula, and first and second SPECTRAL DATA is handled in this case.So first and second
Correct formula and first and second correction coefficient formula all can with user's demand enable or forbidden energy.
Based on above-mentioned, formula is corrected in enable first, second corrects formula, the first correction coefficient formula and the second correction
Under conditions of coefficient formula, the first spectral measuring device 301 can have close or be equal with 302 the two of the second spectral measuring device
In the accuracy of standard spectrum measuring equipment.In this way, both the first spectral measuring device 301 and the second spectral measuring device 302
It is able to accurately measure the first smooth L302 to be measured of smooth L301 and second to be measured respectively in the case where eliminating or reducing stray light.Effect
Just as gone respectively with standard spectrum measuring equipment measure the first smooth L302 to be measured of smooth L301 and second to be measured.Art technology person
The spectrum measuring system with more platform spectral measuring devices can be established according to its demand.
In conclusion correcting formula using above, influence of the stray light to measurement can be reduced, to promote amount of spectrum
It is relatively low by stray light degree to survey device (such as the first spectral measuring device 301 or second spectral measuring device 302) generation
Correction coefficient formula.The measurement difference between more spectral measuring devices can be reduced, these spectral measuring devices are helped
Measurement can be consistent.In addition, above-mentioned optical correction method can allow more spectral measuring devices to have close or be equal to
The accuracy of standard spectrum measuring equipment, to establish the spectrum measuring system for including more high accuracy spectral measuring devices.Such as
This once can carry out accurate spectrum measuring, and then increase using this spectrum measuring system to a large amount of product or sample
Processing capacity (throughput) on spectrum measuring.
The above is only the embodiment of the present invention, is not intended to limit the present invention in any form, although originally
Invention is disclosed above with embodiment, and however, it is not intended to limit the invention, any person skilled in the art, is not taking off
From within the scope of technical solution of the present invention, when the method and technique content using the disclosure above makes a little change or is modified to
The equivalent embodiment of equivalent variations, it is right according to the technical essence of the invention as long as being the content without departing from technical solution of the present invention
Any simple modification, equivalent change and modification made by above example, in the range of still falling within technical solution of the present invention.
Claims (20)
1. a kind of optical correction method is suitable for a spectral measuring device, which is characterized in that the spectral measuring device includes a light
Input unit, the optical correction method include：
The spectral measuring device measures the narrow frequency light of multiple tracks by the light input unit, is rung with obtaining more narrow frequency spectrographic pulse respectively
It answers；
It is responded according to those narrow frequency spectrographic pulses, establishes a stray light data bank, wherein the stray light data bank has the spectrum
The stray light information of measuring equipment and its light input unit；
According to the stray light data bank, generate and belong to the one of the spectral measuring device and correct formula, wherein the amendment formula to
Correct stray light caused by the spectral measuring device and its light input unit；
In the state that the amendment formula is enabled, which measures a spectroradio standard by the light input unit
Light, to obtain the spectral measuring data by amendment formula processing；And
According to the spectral measuring data and a spectroradio standard spectrum data, the correction for belonging to the spectral measuring device is generated
Coefficient formula, wherein the correction coefficient formula make the spectral measuring data and the spectroradio standard spectrum material matches, and are somebody's turn to do
Spectroradio standard spectrum data is to be measured the spectroradio standard light by a standard spectrum measuring equipment and obtained.
2. it is spuious to establish this wherein being responded according to those narrow frequency spectrographic pulses for optical correction method according to claim 1
The step of light data bank is produced by the spectral measuring device or an external process devices.
3. optical correction method according to claim 1, wherein according to the amendment journey caused by the stray light data bank
Formula is produced by the spectral measuring device or an external process devices.
4. optical correction method according to claim 1, wherein in the state that the amendment formula is enabled, the amount of spectrum
The spectrum that device measures the spectroradio standard light by the light input unit is surveyed, to obtain the amount by amendment formula processing
The step of surveying SPECTRAL DATA, is to execute the amendment formula by the spectral measuring device or an external process devices.
5. optical correction method according to claim 1, wherein the spectroradio standard spectrum data are by the standard light
Composing the step of measuring equipment measures the spectrum of the spectroradio standard light and obtains includes：
The standard spectrum measuring equipment measures the first narrow frequency light of multiple tracks by its light input unit, to obtain more the first narrow frequencies respectively
Spectrographic pulse responds；
According to those the first narrow frequency spectrographic pulse responses, one first stray light data bank is established, wherein the first stray light data
Library has the stray light information of the standard spectrum measuring equipment and its light input unit；
It according to the first stray light data bank, generates one first and corrects formula, the wherein first amendment formula is correcting the mark
Stray light caused by quasi- spectral measuring device and its light input unit；And
In the state that the first amendment formula is enabled, which measures the light splitting by its light input unit
The spectrum of radiation standard light, to obtain the spectroradio standard spectrum data by the first amendment formula processing.
6. optical correction method according to claim 1, further includes：
Second spectral measuring device measures the second narrow frequency light of multiple tracks by its light input unit, to obtain more the second narrow frequencies respectively
Spectrographic pulse responds；
According to those the second narrow frequency spectrographic pulse responses, one second stray light data bank is established, wherein the second stray light data
Library has the stray light information of second spectral measuring device and its light input unit；
According to the second stray light data bank, generate one second and correct formula, wherein the second amendment formula to correct this
Stray light caused by two spectral measuring devices and its light input unit；
In the state that the second amendment formula is enabled, which measures the light splitting by its light input unit
The spectrum of radiation standard light, to obtain the one second spectral measuring data by the second amendment formula processing；And
According to the second spectral measuring data and the spectroradio standard spectrum data, one second correction coefficient formula is generated,
In the second correction coefficient formula make the spectral measuring data and the spectroradio standard spectrum material matches, and the spectroradio
Standard spectrum data is to be measured the spectroradio standard light by the standard spectrum measuring equipment and obtained.
7. optical correction method according to claim 1, wherein respectively the numerical aperture of the narrow frequency light is greater than or equal to the light
The numerical aperture of input unit, and the numerical aperture of the spectroradio standard light is greater than or equal to the numerical aperture of the light input unit.
8. optical correction method according to claim 1, wherein those narrow frequencies are just sent out by a narrow frequency light source, and are somebody's turn to do
Configure an optical module between narrow frequency light source and the light input unit, those narrow frequency light from the narrow frequency light source by the optical module by
It is incident in the light input unit, and the optical module is used to determine the numerical aperture of the respectively narrow frequency light.
9. optical correction method according to claim 1, further includes：
The amendment formula and/or the correction coefficient formula are stored in the non-volatility memory in the spectral measuring device.
10. optical correction method according to claim 1, further includes：
The amendment formula and/or the correction coefficient formula are stored in an external storage media, wherein the amendment formula and/or should
Correction coefficient formula has the relevant machine-recognition information of the spectral measuring device, and the machine-recognition information is making the amendment
Formula and/or the correction coefficient formula are only capable of measuring SPECTRAL DATA caused by light for correcting the spectral measuring device.
11. a kind of spectrum measuring system, including：
One first spectral measuring device by optical correction method as described in claim 1, and generates and belongs to first spectrum
The one first of measuring equipment corrects formula and one first correction coefficient formula, which includes：
One first optics module, including one first smooth input unit and one first spectrum generating piece, the first smooth input unit is for connecing
One first light to be measured is received, and the first spectrum generating piece is used to generate a plurality of first spectrum light beam from first light to be measured；
One first circuit module, including：
One first optical receiver generates one first SPECTRAL DATA according to those the first spectrum light beams；
One first control unit is electrically connected first optical receiver；And
One external process devices couple first control unit, and wherein first control unit or an external process devices can be according to
First SPECTRAL DATA is handled according to the first amendment formula and/or the first correction coefficient formula.
12. spectrum measuring system according to claim 11, further includes：
One second spectral measuring device by optical correction method as described in claim 1, and generates and belongs to second spectrum
The one second of measuring equipment corrects formula and one second correction coefficient formula, which includes：
One second optics module, including one second smooth input unit and one second spectrum generating piece, the second smooth input unit is for connecing
One second light to be measured is received, and the second spectrum generating piece is used to generate a plurality of second spectrum light beam from second light to be measured；
One second circuit module, including：
One second optical receiver generates one second SPECTRAL DATA according to those the second spectrum light beams；And
One second control unit is electrically connected second optical receiver, and couples the external process devices, and wherein second control is single
Member or the external process devices can handle second spectrum money according to the second amendment formula and/or the second correction coefficient formula
Material.
13. spectrum measuring system according to claim 11, wherein first circuit module further include：
One storage element is electrically connected the control unit, and stores the first amendment formula and/or the first correction coefficient journey
Formula.
14. spectrum measuring system according to claim 11, the wherein storage element more store the first amendment formula
And/or information whether the first correction coefficient formula enable.
15. a kind of spectral measuring device by optical correction method as described in claim 1, and generates and belongs to the amount of spectrum
Survey device one corrects formula and a correction coefficient formula, which includes：
One optics module generates a plurality of spectrum light beam for receiving a light to be measured, and from the light to be measured；
One circuit module, including：
One optical receiver, for receiving those spectrum light beams to generate a SPECTRAL DATA；And
One control unit is electrically connected the storage element and the optical receiver, wherein the control unit or an external process devices energy
The SPECTRAL DATA is handled according to the amendment formula and/or the correction coefficient formula.
16. spectral measuring device according to claim 15, the wherein circuit module further include：
One storage element is electrically connected the control unit, and stores the amendment formula and/or the correction coefficient formula.
17. a kind of optical measurement method is suitable for one and is filled by the spectrum measuring of optical correction method as described in claim 1
It sets, which includes：
A spectrum measuring system is established, wherein the spectrum measuring system includes one first spectral measuring device, first amount of spectrum
Device is surveyed to belong to the one first of first spectral measuring device to generate by optical correction method as described in claim 1 and repair
Positive formula and one first correction coefficient formula；
One first light to be measured is measured by first spectral measuring device, to obtain one first SPECTRAL DATA；And
In the state that the first amendment formula and/or the first correction coefficient formula are enabled, according to the first amendment formula
And/or the first correction coefficient formula handles first SPECTRAL DATA.
18. optical measurement method according to claim 17, further includes：
Forbidden energy or the enable first amendment formula and/or the first correction coefficient formula.
19. optical measurement method according to claim 17, wherein in the step of establishing the spectrum measuring system, the spectrum
Measurement system further includes one second spectral measuring device, which passes through optics as described in claim 1
Bearing calibration belongs to the one second amendment formula and one second correction coefficient formula of second spectral measuring device, the light to generate
Method for measurement is learned to further include：
One second light to be measured is measured by second spectral measuring device, to obtain one second SPECTRAL DATA；And
In the state that the second amendment formula and/or the second correction coefficient formula are enabled, according to the second amendment formula
And/or the second correction coefficient formula handles second SPECTRAL DATA.
20. optical measurement method according to claim 17, wherein in the step of establishing the spectrum measuring system, this first
Amendment formula and the first correction coefficient formula, which are first spectral measuring devices, has institute in the state of one first smooth input unit
It generates, in addition, in the step that first spectral measuring device measures first light to be measured, which is logical
It crosses the first smooth input unit and measures first light to be measured.
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