CN108303758A - A kind of visible infrared band broad band absorber and preparation method thereof - Google Patents
A kind of visible infrared band broad band absorber and preparation method thereof Download PDFInfo
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- CN108303758A CN108303758A CN201810081464.8A CN201810081464A CN108303758A CN 108303758 A CN108303758 A CN 108303758A CN 201810081464 A CN201810081464 A CN 201810081464A CN 108303758 A CN108303758 A CN 108303758A
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
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Abstract
The invention discloses a kind of visible ultra-wideband absorbers and preparation method thereof.The absorber includes substrate, is equipped with polystyrene sphere single layer film layer successively from top to bottom on the substrate and alternates the alternate membrane constituted by metal absorption layer and nonmetal medium layer, metallic dielectric layer is close to bottom polystyrene sphere single layer film layer；The metal absorption layer is made of one or more Metal absorption layer units, and the nonmetal medium layer is made of one or more Metal absorption layer units.The absorber has absorption efficiency height, service band wide；It is simple for process, of low cost, can large area prepare etc. series of advantages.The absorber of the present invention is compact multi-layer film structure, and compared to traditional broad band absorber, production cost is remarkably decreased, and the production cycle significantly shortens, convenient for extensive, mass production.
Description
Technical field
The present invention relates to photothermal conversion, field of optical device technology, and in particular to a kind of broadband of visible infrared band
Absorber and preparation method.
Background technology
With the fast development of modern science and technology, broadband perfect absorber is all the hot spot class of sciemtifec and technical sphere all the time
Topic, especially visible red wave section wide band absorption is because it is in solar energy acquisition, infrared acquisition, information sensing, solar thermal utilization etc.
The important application demand of various fields is even more to receive the extensive concern of people.
In recent years, people devise various absorbent structures, for example, planar metal/dielectric structure, reflective metals light
Grid structure, metamaterial structure and the structure based on surface phasmon.Hypersorption is realized based on phasmon metamaterial system
Scheme have very much, metallic particles-dielectric layer-metal layer metamaterial system be realize super-absorbent one of typical structure.With
Conventional method is compared, which there is sub-wavelength characteristic, the integral thickness of general system there was only more than one the percent of operation wavelength.
But this structure general work wave band is relatively narrow.In addition the New Radar Absorbing structure of metamaterial structure and surface phasmon is by intimate
Perfect absorption efficiency, with characteristics such as angle polarization insensitive, the small, light weights of structural unit, in design choice heat emitters,
The fields such as biosensor and solar energy collecting system have prodigious potential using value.But the structure of such absorber
Complexity, prepare it is cumbersome, in practical applications be difficult large area production.So design structure is simple, and it is easily prepared, it is inexpensive
Efficient wide-spectrum absorbent structure is still a major challenge in the field.
Invention content
The invention discloses a kind of broad band absorbers and preparation method of visible infrared band, and large area is cheap,
It is simple controllable.
The present invention is realized with following technical solution：A kind of visible near-infrared broad band absorber, including substrate, in institute
It states and is equipped with polystyrene sphere single layer film layer on substrate successively from top to bottom and by metal absorption layer and nonmetal medium layer phase
The alternate membrane mutually alternately constituted, metallic dielectric layer is close to bottom polystyrene sphere single layer film layer；The metal absorption layer by
One or more Metal absorption layer unit compositions, the nonmetal medium layer are made of one or more Metal absorption layer units,
The shape and size of alternate membrane can be with the regulation and control at deposition inclination angle and azimuth rotation angle.
Preferably, the substrate is made of silicon wafer or sheet glass.
Preferably, in the polystyrene sphere single layer film layer small ball straight diameter≤1000nm.
Preferably, the metal absorption layer is made using silvery.
Preferably, the use silica of the nonmetal medium layer makes.
Preferably, the thickness of the metal absorption layer and nonmetal medium layer is 10nm-30nm.
A kind of any of the above-described visible near-infrared broad band absorber preparation method, is as follows：
(1) requirement with absorptivity is required according to Absorber Bandwidth, the thickness of each tunic is obtained by optimization design；
(2) it prepares washing lotion and cleans substrate, then rinsed well with deionized water, nitrogen drying is fixed on vacuum deposition chamber
In；
(3) a concentration of polystyrene spheres aqueous solution is uniformly mixed with absolute ethyl alcohol, ratio 1：1, and it is 20 minutes ultrasonic, it will
Mixing drop falls on the substrate handled by step (2) and is dried after liquid level, forms polystyrene sphere single layer film layer；
(4) it is less than 1 × 10 in pressure-6In the vacuum deposition chamber of Torr, by electron beam evaporation, the substrate in step (3)
On, first with the deposition rate metal absorption layer and nonmetal medium layer of 0.1nm/s, and rotary substrate makes its normal and deposition direction
Angle is 75 ° -85 °, and the sample stage azimuth rotation angle of each metal absorption layer and nonmetal medium layer unit can regulate and control.
Preferably, washing lotion described in step (2) uses volume ratio for 8:The mixing of 2 98% sulfuric acid and 30% hydrogen peroxide is molten
Liquid or volume ratio are 5:1:1 deionized water, the mixed solution of hydrogen peroxide, ammonium hydroxide.
Beneficial effects of the present invention：This absorber is compact multi-layer film structure, compared to traditional broad band absorber,
Production cost is remarkably decreased, and the production cycle significantly shortens, convenient for extensive, mass production；This absorber has absorption simultaneously
It is efficient, service band is wide；It is simple for process, of low cost, can large area prepare etc. series of advantages.
Description of the drawings
Attached drawing 1 is the structural schematic diagram of the ultra wide band absorber of the visible near infrared band of the present invention；
Attached drawing 2 is the scanning electron microscope (SEM) photograph (SEM) of the ultra wide band absorber of visible near infrared band；
Attached drawing 3 be prepared on different-diameter (d=300,500,750nm) polystyrene monolayer film substrate it is visible close
The absorption spectra of the ultra wide band absorber of infrared band.
Specific implementation mode
It is further below in conjunction with specific embodiment to make present disclosure, technical solution and advantage be more clearly understood
Illustrate the present invention, these embodiments are merely to illustrate the present invention, and the present invention is not limited only to following embodiment.Below in conjunction with the accompanying drawings
It elaborates to the specific implementation mode of the present invention.
Embodiment 1
Polystyrene sphere monofilm is prepared on the glass sheet and makees substrate, and ball used in us is Huge
The aqueous solution of the polystyrene spheres of Biotechnology companies production, the small ball's diameter d=300nm.Thermal evaporation is utilized on substrate
Deposited metal absorbed layer/nonmetal medium layer unit, and rotary substrate makes the optimal angle of its normal and deposition direction be 75 °,
Each metal absorption layer/nonmetal medium layer unit sample stage azimuth rotation angle increases by 65 ° every time, a total of 7 Metal absorptions
The thickness optimization of layer/nonmetal medium layer unit, metal absorption layer/each layer of nonmetal medium layer alternate membrane is 30nm.Attached drawing 1
For the structural schematic diagram of the ultra wide band absorber of the visible near infrared band of the present invention.In figure 1. -7. indicate 7 Metal absorptions
Layer/nonmetal medium layer unit.Sample is by test, as shown in figure 3, gained absorption spectra is in 350nm-850nm wave-length coverages
Integral absorption efficiency value reach 87%.
Embodiment 2
Polystyrene sphere monofilm is prepared on the glass sheet and makees substrate, and ball used in us is Huge
The aqueous solution of the polystyrene spheres of Biotechnology companies production, the small ball's diameter d=500nm.Thermal evaporation is utilized on substrate
Deposited metal absorbed layer/nonmetal medium layer unit, and rotary substrate makes the optimal angle of its normal and deposition direction be 75 °,
Each metal absorption layer/nonmetal medium layer unit sample stage azimuth rotation angle increases by 65 ° every time, a total of 7 Metal absorptions
The thickness optimization of layer/nonmetal medium layer unit, metal absorption layer/each layer of nonmetal medium layer alternate membrane is 30nm.Attached drawing 1
For the structural schematic diagram of the ultra wide band absorber of the visible near infrared band of the present invention.In figure 1. -7. indicate 7 Metal absorptions
Layer/nonmetal medium layer unit.Sample is by test, as shown in figure 3, gained absorption spectra is in 350nm-850nm wave-length coverages
Integral absorption efficiency value reach 90%.
Embodiment 3
Polystyrene sphere monofilm is prepared on the glass sheet and makees substrate, and ball used in us is Huge
The aqueous solution of the polystyrene spheres of Biotechnology companies production, the small ball's diameter d=750nm.Thermal evaporation is utilized on substrate
Deposited metal absorbed layer/nonmetal medium layer unit, and rotary substrate makes the optimal angle of its normal and deposition direction be 75 °,
Each metal absorption layer/nonmetal medium layer unit sample stage azimuth rotation angle increases by 65 ° every time, a total of 7 Metal absorptions
The thickness optimization of layer/nonmetal medium layer unit, metal absorption layer/each layer of nonmetal medium layer alternate membrane is 30nm.Attached drawing 1
For the structural schematic diagram of the ultra wide band absorber of the visible near infrared band of the present invention.In Fig. 1 1. -7. indicate 7 Metal absorptions
Layer/nonmetal medium layer unit.Attached drawing 2 be prepared on diameter d=750nm polystyrene monolayer film substrates it is visible close red
The scanning electron microscope (SEM) photograph (SEM) of the ultra wide band absorber of wave section, particle diameter is adjustable in nanometer to micron range.Ball and ball it
Between be approximately to be arranged in such a way that hexagonal is closely packed, long-range order.Sample is by test, as shown in figure 3, gained absorption spectra exists
Integral absorption efficiency value in 350nm-850nm wave-length coverages reaches 92%.
Claims (8)
1. a kind of visible near-infrared broad band absorber, it is characterised in that：Including substrate, it is characterised in that:On the substrate
It is equipped with polystyrene sphere single layer film layer successively from top to bottom and structure is alternateed by metal absorption layer and nonmetal medium layer
At alternate membrane, metallic dielectric layer is close to bottom polystyrene sphere single layer film layer；The metal absorption layer is by one or more
A Metal absorption layer unit composition, the nonmetal medium layer are made of one or more Metal absorption layer units.
2. a kind of visible near-infrared broad band absorber according to claim 1, it is characterised in that：The substrate uses silicon
Chip or sheet glass make.
3. a kind of visible near-infrared broad band absorber according to claim 1, it is characterised in that：The polystyrene is small
Straight diameter≤1000nm of small ball in ball single layer film layer.
4. a kind of visible near-infrared broad band absorber according to claim 1, it is characterised in that：The metal absorption layer
Made using silvery.
5. a kind of visible near-infrared broad band absorber according to claim 1, which is characterized in that the nonmetal medium
Layer is made of silica.
6. a kind of visible near-infrared broad band absorber according to claim 4 or 5, it is characterised in that：The metal is inhaled
The thickness for receiving layer and nonmetal medium layer is 10nm-30nm.
7. a kind of any visible near-infrared broad band absorber preparation methods of claim 1-6, it is characterised in that：Specifically
Steps are as follows：
(1) requirement with absorptivity is required according to Absorber Bandwidth, the thickness of each tunic is obtained by optimization design；
(2) it prepares washing lotion and cleans substrate, then rinsed well with deionized water, nitrogen drying is fixed in vacuum deposition chamber；
(3) a concentration of polystyrene spheres aqueous solution is uniformly mixed with absolute ethyl alcohol, ratio 1：1, and it is 20 minutes ultrasonic, it will mix
Drop falls on the substrate handled by step (2) and is dried after liquid level, forms polystyrene sphere single layer film layer；
(4) it is less than 1 × 10 in pressure-6In the vacuum deposition chamber of Torr, by electron beam evaporation, on the substrate of step (3), first
With the deposition rate metal absorption layer and nonmetal medium layer of 0.1nm/s, and rotary substrate makes its normal and deposition direction angle
It it is 75 ° -85 °, the sample stage azimuth rotation angle of each metal absorption layer and nonmetal medium layer unit can regulate and control.
8. a kind of visible near-infrared broad band absorber preparation method according to claim 7, it is characterised in that：Step
(2) washing lotion described in uses volume ratio for 8:2 98% sulfuric acid and the mixed solution or volume ratio of 30% hydrogen peroxide are 5:1:
1 deionized water, the mixed solution of hydrogen peroxide, ammonium hydroxide.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810081464.8A CN108303758A (en) | 2018-01-29 | 2018-01-29 | A kind of visible infrared band broad band absorber and preparation method thereof |
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| CN201810081464.8A CN108303758A (en) | 2018-01-29 | 2018-01-29 | A kind of visible infrared band broad band absorber and preparation method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109972103A (en) * | 2019-02-25 | 2019-07-05 | 中山大学 | A kind of width angle solar spectral selection absorbing membrane and preparation method thereof |
| CN113050205A (en) * | 2019-12-27 | 2021-06-29 | 比亚迪股份有限公司 | Black material and preparation method and application thereof |
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| CN104733056A (en) * | 2015-04-08 | 2015-06-24 | 哈尔滨理工大学 | Ultra wide band absorber based on cascade structure metamaterials |
| CN104916920A (en) * | 2015-05-29 | 2015-09-16 | 上海交通大学 | Dual-band continuously tunable terahertz wave meta-material based on thermal driving |
| CN107179571A (en) * | 2017-05-27 | 2017-09-19 | 中国科学院上海技术物理研究所 | A kind of visible ultra-wideband absorber and preparation method thereof |
| US20170373386A1 (en) * | 2014-12-09 | 2017-12-28 | 3M Innovative Properties Company | System having a telecommunications element being concealed by a reflective structure comprising a polymer optical multilayer film |
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2018
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Patent Citations (4)
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| US20170373386A1 (en) * | 2014-12-09 | 2017-12-28 | 3M Innovative Properties Company | System having a telecommunications element being concealed by a reflective structure comprising a polymer optical multilayer film |
| CN104733056A (en) * | 2015-04-08 | 2015-06-24 | 哈尔滨理工大学 | Ultra wide band absorber based on cascade structure metamaterials |
| CN104916920A (en) * | 2015-05-29 | 2015-09-16 | 上海交通大学 | Dual-band continuously tunable terahertz wave meta-material based on thermal driving |
| CN107179571A (en) * | 2017-05-27 | 2017-09-19 | 中国科学院上海技术物理研究所 | A kind of visible ultra-wideband absorber and preparation method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109972103A (en) * | 2019-02-25 | 2019-07-05 | 中山大学 | A kind of width angle solar spectral selection absorbing membrane and preparation method thereof |
| CN113050205A (en) * | 2019-12-27 | 2021-06-29 | 比亚迪股份有限公司 | Black material and preparation method and application thereof |
| CN113050205B (en) * | 2019-12-27 | 2021-09-21 | 比亚迪股份有限公司 | Black material and preparation method and application thereof |
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Application publication date: 20180720 |