CN108296493A - A kind of teeth processing route generating method of fine turning lathe processing Fresnel micro structure array - Google Patents
A kind of teeth processing route generating method of fine turning lathe processing Fresnel micro structure array Download PDFInfo
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- CN108296493A CN108296493A CN201810041635.4A CN201810041635A CN108296493A CN 108296493 A CN108296493 A CN 108296493A CN 201810041635 A CN201810041635 A CN 201810041635A CN 108296493 A CN108296493 A CN 108296493A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
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Abstract
The present invention relates to a kind of method of surface finish of Fresnel micro structure array.This method can be applicable on the ultra-precision machine tool of four axis or more, be processed using single-point diamond lathe tool, lathe tool is mounted on C axis main shafts when processing, and workpiece is mounted on Z axis.According to the method for using " XYC three-shaft linkages " in process, and the principle that lathe tool blade direction is overlapped with the annulus tangential direction of workpiece Fresnel structure, calculate the corresponding lathe XYZ axis value of each circle trajectory coordinates point and C shaft angle degree of the Fresnel subelement on workpiece, conversion of the cutting point in workpiece coordinate system and lathe coordinate system is completed by the above method, generates complete machining track.To realize that the Ultra-precision Turning of Fresnel micro structure array, the directional velocity of cutting direction, cutter relative to workpiece are consistent with the circular tangential direction of Fresnel.
Description
Technical field
The invention belongs to Ultra-precision Turning complex parts manufacturing technology fields, are related to a kind of table of Fresnel micro structure array
Method for processing surface.
Background technology
Fresnel structure is the common lens arrangement of contemporary optics, is made of a series of concentric ring band, surface phase
When in by traditional convex or plano-concave lens part " collapse " to plane on.In terms of section, surface profile is a series of sawtooth patterns
Groove, central part are circular camber lines.Each annulus on Fresnel structure surface can regard an independent lens as, real
Now light path is converging or diverging with, whole optical effect is equivalent to conventional lenses, but general thickness is much smaller, this is but also thoroughly
The absorption loss of mirror is small, has many advantages, such as that light structure, light transmission are good, manufacturing cost is low, diffraction efficiency is high.
As shown in Figure 1, Fresnel micro structure array is to make multiple orderly, small Fei Nie on a workpiece surface
That structure, the height of each annulus only has several microns, and needs the roughness for reaching Nano grade, belongs to Ultra-precision Turning model
Farmland.
For the processing of Fresnel micro structure array, single Fresnel microstructural mold is commonly processed at present, then will
Injection molding of multiple mold splicings for lens array, such processing method are easy to cause the appearance and size of different subelements, phase
It is low to the precision and consistency of position dimension.If carrying out Fresnel micro-structure battle array using the method for fast tool servo or slow knife servo
The overall processing of row mold, for main shaft out-of-alignment unit, in process the direction of the cutting blade of cutter and these
The tangential direction of unit Fresnel annulus is not in the same direction, and the presence of tool inclination angle can cause these ring part edges that can not cut,
To the problems such as low precision, roughness is high occur.In recent years, some scholars propose to link by the XYC axis of lathe, carry out inclined
The method of heart processing, realizes the overall processing of Fresnel micro structure array.The method of the linkage eccentric processing is to fill workpiece
On main shaft, cutter on Z axis, process array on a certain subelement some circular contour when, lathe is joined by XY axis
It is dynamic so that workpiece integrally runs a circular trace relative to cutter on X/Y plane, and spindle shaft is deviateed in the center of circle of circular trace
The heart, and C axis links with the track of XY in this process, rotates a circle.However party's normal coordinate calculates complexity, it is processed
The sum velocity direction change of cutter opposite piece is big in journey, has a certain impact to roughness.
It is therefore desirable to develop new processing method, it can realize that the clamped one time of Fresnel micro structure array, entirety add
Work, and the cutting blade direction processed is identical as annulus tangential direction always, the process velocity direction change of cutter opposite piece
Uniformly, to improve machining accuracy, reduce surface roughness.
Invention content
The purpose of the present invention is overcome existing diamond super precision Technology for Turning Machining in processing Fresnel micro structure array
On deficiency, propose it is a kind of it is simple, can realize that cutter is processed along the track of each Fresnel circle on array, and cutting side
The processing method consistent with each annulus tangential direction to, directional velocity.This method do not need lathe carry out Z axis fast tool servo or
The slow knife servo work of person, but the XYC three-shaft linkages of super precision lathe are utilized, and it is based on relative trajectory computational algorithm, you can it is real
The Ultra-precision Turning of existing Fresnel micro structure array.
The present invention provides a kind of machining locus generation side realizing the processing of Fresnel micro structure array using super precision lathe
Method, in the super precision lathe system of processing, lathe tool is mounted on the lathe C axis with closed loop positioning function, and blade center is in C
On the axis centre of gyration, lathe tool can be rotated with C axis, and C axis can realize the linkage with XY axis, be moved in X/Y plane with XY axis
Dynamic, workpiece is mounted on machine Z-axis slide unit, and the machined surface of workpiece is parallel with the faces XY, which is characterized in that the machining locus generation side
Method includes following steps：
(1) coordinate system of workpiece machining surface is established, the geometric parameters of each subelement on Fresnel micro structure array are calculated
Number, including：The central coordinate of circle of each subelement, radius, in subelement different radii position the corresponding height value of point；
(2) the working origin position under lathe coordinate system is demarcated, to establish each subelement on Fresnel micro structure array
Cutting point and machine coordinates transformational relation；
(3) and micro- according to cutting direction and Fresnel on workpiece according to the method for using XYC three-shaft linkages in process
The principle that the annulus tangential direction of array of structures overlaps calculates the corresponding machine coordinates of each circle cutting point of subelement on workpiece
XYZ axis value under system and corresponding C shaft angles degree；
(4) it turns around according to the rotation of C axis, contour round one week mode of a Fresnel subelement is processed, to step (3)
The coordinate points of calculating are ranked up, and generate the complete machining track of the corresponding Fresnel micro structure array；
(5) tool nose radius compensation is carried out to machining locus, forms final machining locus.
The method for carrying out geometric description in step (1) to Fresnel micro structure array is as follows：Establish the coordinate of workpiece surface
System, in each subelement, central coordinate of circle is (xoi,yoi), i indicates that the serial number of array structure neutron cells, the center of circle are returned with C axis
The distance for turning center is li, the unit profile elevations h where the interior point apart from center of circle r of subelement is zr, for same in subelement
Point on a circle, height Z values are identical, and Z values are related to radius, determined by Fresnel structure parameter, right according to formula (1), (2)
Fresnel micro structure array carries out geometric description,
zr=f (r) (2).
Following method can be used in step (2) to demarcate processing far point position：
Using the method for trial cut-measurement-adjustment, workpiece, the XY axis of mobile machine tool so that tool in cutting sword center is just are installed
To workpiece centre, the XY axial coordinates (x of machine processing system at this time is write downc,yc), C axis is rotated to angular coordinate theta=0, is measured
Blade direction and X-direction angle △ θ.
Determine that the method for cutting point and machine coordinates conversion relation is as follows in step (3)：
(A) determination subelement is taken up an official post the conversion of the workpiece coordinate and lathe XY axial coordinates of a cutting point.
Under workpiece coordinate system, one central coordinate of circle of workpiece surface is (xoi,yoi), radius of machining be r subelement circular wheel
Exterior feature needs the linkage of lathe XY axis to complete the processing of circular trace, and corresponding linkage track reduction formula is as follows：
Wherein, (xc,yc,zc) it is that processing circular contour is taken up an official post coordinate of the cutting point under lathe coordinate system, i is indicated should
The serial number of subelement, ε are the corresponding rotation angle of each point on subelement circular contour.
(B) determination subelement is taken up an official post the conversion of the workpiece coordinate and lathe XYC axial coordinates of a cutting point.Realize cutting direction
It is consistent with the luxuriant and rich with fragrance subelement circular cut line direction of alunite array mechanism.
In process, it needs to adjust C shaft angle degree according to the position of current cutting point so that cutting edge direction is along cutting
The circular trace tangential direction cut is obtained in step (2) when C axis angular coordinate theta=0, blade direction and X-direction angle
On the basis of △ θ, can obtain C axis is with XY interaction relations：
Wherein, (xc,yc,zc) it is that processing circular contour is taken up an official post coordinate of the cutting point under lathe coordinate system, θcIt is C axis
Corner, linked by C axis and XY axis, so that blade is cut along annulus in process.
Present invention only requires tri- axis of lathe XYC to link, and Z axis only completes corresponding cutting-in feeding, by closing
The trajectory planning of reason, Z axis can realize that maximum stationary state, lathe need not be configured with fast tool servo in process
Or the knife of slow knife servo.In the present invention, workpiece completes the processing of all arrays after clamped one time, is conducive to improve each phenanthrene
Dimensional accuracy between Nie Er subelements, cutting edge cutting direction is consistent with the tangential direction that Fresnel is justified, and advantageously reduces and adds
The roughness on work surface improves the consistency of surface quality.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without having to pay creative labor, may be used also for those of ordinary skill in the art
With obtain other attached drawings according to these attached drawings.
Fig. 1 is Fresnel micro structure array schematic diagram in embodiment provided by the invention.
Fig. 2 is system of processing schematic diagram in embodiment provided by the invention
Fig. 3 is machining sketch chart 1 in embodiment provided by the invention.
Fig. 4 is machining sketch chart 2 in embodiment provided by the invention.
Fig. 5 is machining locus schematic diagram in embodiment provided by the invention.
Fig. 6 is the displacement-time curve figure under XYC three-shaft linkages in embodiment provided by the invention.
In figure, 1. workpiece, 2. cutters.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without creative efforts
Embodiment shall fall within the protection scope of the present invention.
Fig. 2 is the system of processing schematic diagram of the embodiment of the present invention, using the C axis positioned with angle as main shaft, C axis energy
Realize the linkage with XY axis.Workpiece is fixed on C axis, and XY axis is moved accordingly according to the corner of C axis, and three-shaft linkage is formed
Cutter is in the final track of workpiece surface, to form processing pattern.
Realize that the important technical basis of the present invention is the seat between Fresnel micro structure array geometric parameter and lathe XYC axis
Subscript conversion relationship.In order to improve processing quality, it is single with the son in processing always that the present invention claims the cutting directions in process
The tangent to periphery direction of first circular band is identical, and by Cutting tool installation manner on C axis, calculates corresponding conversion relation.
The present embodiment includes following steps：
1. demarcating working origin position.
With the method for trial cut-measurement-adjustment, workpiece, the XY axis of mobile machine tool so that tool in cutting sword center face are installed
Workpiece centre writes down the XY axial coordinates (x of machine processing system at this timec,yc)；C axis is rotated to angular coordinate theta=0, knife is measured
Sword direction and X-direction angle △ θ.
2. determining the conversion relation of cutting point and machine coordinates
A the coordinate system for) establishing workpiece surface carries out geometric description to fresnel lens array.
Such as Fig. 1, the coordinate system of workpiece surface is established, each subelement central coordinate of circle is (xoi,yoi), i indicates array neutron
The serial number of unit, the center of circle with at a distance from the C axis centres of gyration be li, the unit profile elevations h where the point apart from center of circle r is zr,
For the point on the same circle of subelement, height Z values are identical, and the value is related to radius, are by Fresnel structure parameter
It determines.
zr=f (r) (2)
B the conversion of certain subelement workpiece coordinate and lathe XY axial coordinates) is determined
For under workpiece coordinate system, workpiece surface central coordinate of circle is (xoi,yoi) subelement, radius of machining is r
Circular contour needs lathe XY axis linkage circular trace, corresponding linkage track reduction formula as follows：
Wherein, (xc,yc,zc) it is that machining profile is taken up an official post XYZ axial coordinate of the cutting point under lathe coordinate system, i is indicated should
The serial number of unit, ε are the corresponding rotation angle of each point in subelement circle.
C it) determines the conversion of certain subelement workpiece coordinate and lathe XYC axial coordinates, realizes that cutting direction and Fresnel are single
First circular cut line direction is consistent.
In process, C axis needs the position according to the subelement currently cut, adjusts C shaft angle degree so that cutting edge
Direction along cutting circular trace tangential direction., when C axis angular coordinate theta=0, measure blade direction and X-direction angle
△ θ, can obtain C axis is with XY interaction relations：
Wherein, θcIt is the corner of main shaft, so that blade is cut along annulus in process.
Using the processing method in the embodiment of the present invention, the XYC axis of lathe needs to be linked according to formula (4).Wherein, XY
Axis driving cutter is moved along the Fresnel circle of each subelement of workpiece, and C links with XY axis, it is ensured that cutting blade begins
All morning to cutting direction, as shown in Figure 5.Assuming that main shaft is at the uniform velocity rotated, the XYC axle positions of analysis one subelement circumference of processing
Curve is moved, as shown in Figure 6, it is seen that XY axis carries out acceleration and deceleration movement, XY axis stable movements according to simple harmonic motion.Main shaft rotates a circle
One circular processing of subelement is completed, in the process, it is motionless that Z axis is kept fixed cutting-in；Before cutting next circumference, Z
Axis is fed according to formula (2), and without doing reciprocal servo feed, therefore entire system of processing has prodigious rigidity.
According to the associated shape parameter equation (1) (2) of Fresnel micro structure array, and combine coordinate system proposed by the present invention
Transfer algorithm formula (4), can complete the conversion of workpiece surface structure coordinate, obtain machine tool motion coordinate value.In order to ensure processing
When cutting direction it is consistent with the circular tangential direction of subelement, according to main shaft rotate a circle complete one circular processing of subelement
Method, the sequence of layout point.Finally, tool nose radius compensation is carried out to machining locus, forms final machining locus.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.
Claims (6)
1. a kind of teeth processing route generating method for realizing the processing of Fresnel micro structure array using super precision lathe, in the ultraprecise
In lathing system, lathe tool be mounted on closed loop positioning function lathe C axis on, blade center on the C axis centres of gyration,
Lathe tool can be rotated with C axis, and C axis can realize the linkage with XY axis, be moved in X/Y plane with XY axis, workpiece is mounted on
On machine Z-axis slide unit, the machined surface of workpiece is parallel with the faces XY, which is characterized in that the teeth processing route generating method includes following several
A step：
(1) coordinate system of workpiece machining surface is established, the geometric parameter of each subelement on Fresnel micro structure array, packet are calculated
It includes：The central coordinate of circle of each subelement, radius, in subelement different radii position the corresponding height value of point；
(2) the working origin position under lathe coordinate system is demarcated, to establish cutting for each subelement on Fresnel micro structure array
Cut the transformational relation a little with machine coordinates；
(3) according to the method for using XYC three-shaft linkages in process, and according to Fresnel micro-structure in cutting direction and workpiece
The principle that the annulus tangential direction of array overlaps calculates under the corresponding lathe coordinate system of each circle cutting point of subelement on workpiece
XYZ axis value and corresponding C shaft angles degree；
(4) it turns around according to the rotation of C axis, processes contour round one week mode of a Fresnel subelement, step (3) are calculated
Coordinate points be ranked up, generate the complete machining track of the corresponding Fresnel micro structure array；
(5) tool nose radius compensation is carried out to machining locus, forms final machining locus.
2. a kind of as described in the appended claim 1 realize that the machining locus of Fresnel micro structure array processing is given birth to using super precision lathe
At method, which is characterized in that the method for carrying out geometric description in step (1) to Fresnel micro structure array is as follows：Establish workpiece
The coordinate system on surface, in each subelement, central coordinate of circle is (xoi,yoi), i indicates the serial number of array structure neutron cells, circle
The heart is l at a distance from the C axis centres of gyrationi, the unit profile elevations h where the interior point apart from center of circle r of subelement is zr, for sub single
Point in member on the same circle, height Z values are identical, and Z values are related to radius, determined by Fresnel structure parameter, according to formula
(1), (2) carry out geometric description to Fresnel micro structure array,
zr=f (r) (2).
3. a kind of as stated in claim 2 realize that the machining locus of Fresnel micro structure array processing is given birth to using super precision lathe
At method, which is characterized in that the method for calibration working origin position is as follows in step (2)：
Using the method for trial cut-measurement-adjustment, workpiece, the XY axis of mobile machine tool so that tool in cutting sword center face work are installed
XY axial coordinates (the x of machine processing system at this time is write down at part centerc,yc), C axis is rotated to angular coordinate theta=0, blade is measured
Direction and X-direction angle △ θ.
4. a kind of as claimed in claim 3 realize that the machining locus of Fresnel micro structure array processing is given birth to using super precision lathe
At method, which is characterized in that determine that the method for cutting point and machine coordinates conversion relation is as follows in step (3)：
(A) determination subelement is taken up an official post the conversion of the workpiece coordinate and lathe XY axial coordinates of a cutting point,
(B) determination subelement is taken up an official post the conversion of the workpiece coordinate and lathe XYC axial coordinates of a cutting point, realize cutting direction with it is luxuriant and rich with fragrance
The subelement circular cut line direction of alunite array mechanism is consistent.
5. a kind of as claimed in claim 4 realize that the machining locus of Fresnel micro structure array processing is given birth to using super precision lathe
At method, which is characterized in that determination subelement is taken up an official post the turning of workpiece coordinate and the lathe XY axial coordinates of a cutting point in step (A)
It is as follows to change method, under workpiece coordinate system, one central coordinate of circle of workpiece surface is (xoi,yoi), radius of machining be r subelement justify
Shape profile needs the linkage of lathe XY axis to complete the processing of circular trace, and corresponding linkage track reduction formula is as follows：
Wherein, (xc,yc,zc) it is that processing circular contour is taken up an official post coordinate of the cutting point under lathe coordinate system, i indicates the son singly
The serial number of member, ε are the corresponding rotation angle of each point on subelement circular contour.
6. a kind of as claimed in claim 5 realize that the machining locus of Fresnel micro structure array processing is given birth to using super precision lathe
At method, which is characterized in that conversion method is as follows in step (B)：In process, the position according to current cutting point is needed
Adjust C shaft angle degree so that cutting edge direction obtains working as C shaft angle degree in step (2) along the circular trace tangential direction of cutting
When coordinate θ=0, on the basis of blade direction and X-direction angle are △ θ, can obtain C axis is with XY interaction relations：
Wherein, (xc,yc,zc) it is that processing circular contour is taken up an official post coordinate of the cutting point under lathe coordinate system, θcIt is turning for C axis
Angle is linked by C axis and XY axis, so that blade is cut along annulus in process.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109676155A (en) * | 2019-01-28 | 2019-04-26 | 中国工程物理研究院激光聚变研究中心 | The bit shift compensation method for turning of metallic tin disk |
| CN111198408A (en) * | 2018-11-19 | 2020-05-26 | 三代光学科技（天津）有限公司 | Ultra-precision machining device and method for micro-lens array |
| CN112207291A (en) * | 2020-07-19 | 2021-01-12 | 苏州科技大学 | Transition zone cutter path optimization ultra-precise turning method under slow cutter servo |
| CN112238535A (en) * | 2019-07-17 | 2021-01-19 | 哈尔滨工业大学 | High-hardness and crisp material secondary clamping ultra-precise deterministic scoring processing system and method |
| CN112372001A (en) * | 2020-11-04 | 2021-02-19 | 深圳大学 | Electric field auxiliary processing machine tool and processing method for iron-based material |
| CN112372036A (en) * | 2020-10-30 | 2021-02-19 | 东北林业大学 | Processing method of sub-wavelength blazed grating structure |
| CN113601257A (en) * | 2021-07-09 | 2021-11-05 | 霖鼎光学(上海)有限公司 | Microstructure array processing device and method based on variable-pitch fly cutter cutting |
| CN113618091A (en) * | 2021-08-26 | 2021-11-09 | 北京理工大学 | Method for processing microsphere lens based on tool rotation processing |
| CN114799294A (en) * | 2022-03-24 | 2022-07-29 | 哈尔滨工业大学 | Multi-process machining device for complex-surface-shaped ball and repeated positioning method thereof |
| CN114952425A (en) * | 2022-05-27 | 2022-08-30 | 南方科技大学 | Processing method and processing equipment for aspheric surface by linear blade pair |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111198408A (en) * | 2018-11-19 | 2020-05-26 | 三代光学科技（天津）有限公司 | Ultra-precision machining device and method for micro-lens array |
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| CN112238535A (en) * | 2019-07-17 | 2021-01-19 | 哈尔滨工业大学 | High-hardness and crisp material secondary clamping ultra-precise deterministic scoring processing system and method |
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| CN112372036A (en) * | 2020-10-30 | 2021-02-19 | 东北林业大学 | Processing method of sub-wavelength blazed grating structure |
| CN112372001A (en) * | 2020-11-04 | 2021-02-19 | 深圳大学 | Electric field auxiliary processing machine tool and processing method for iron-based material |
| CN113601257A (en) * | 2021-07-09 | 2021-11-05 | 霖鼎光学(上海)有限公司 | Microstructure array processing device and method based on variable-pitch fly cutter cutting |
| CN113601257B (en) * | 2021-07-09 | 2023-09-05 | 霖鼎光学(上海)有限公司 | Microstructure array processing device and method based on variable-pitch fly cutter cutting |
| CN113618091A (en) * | 2021-08-26 | 2021-11-09 | 北京理工大学 | Method for processing microsphere lens based on tool rotation processing |
| CN114799294A (en) * | 2022-03-24 | 2022-07-29 | 哈尔滨工业大学 | Multi-process machining device for complex-surface-shaped ball and repeated positioning method thereof |
| CN114799294B (en) * | 2022-03-24 | 2024-04-12 | 哈尔滨工业大学 | Device for machining complex surface-shaped spheres in multiple steps and repeated positioning method thereof |
| CN114952425A (en) * | 2022-05-27 | 2022-08-30 | 南方科技大学 | Processing method and processing equipment for aspheric surface by linear blade pair |
| CN118342668A (en) * | 2024-05-21 | 2024-07-16 | 苏州多谱芯光科技有限公司 | Processing equipment and method for wafer-level array optical element and die |
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