CN108284529A - With the spool for sawing silk for thering is elasticity and plasticity to rotate - Google Patents
With the spool for sawing silk for thering is elasticity and plasticity to rotate Download PDFInfo
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- CN108284529A CN108284529A CN201710014922.1A CN201710014922A CN108284529A CN 108284529 A CN108284529 A CN 108284529A CN 201710014922 A CN201710014922 A CN 201710014922A CN 108284529 A CN108284529 A CN 108284529A
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- silk
- spool
- saw silk
- saw
- texturized
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- 229910000831 Steel Inorganic materials 0.000 claims abstract description 36
- 239000010959 steel Substances 0.000 claims abstract description 36
- 238000005452 bending Methods 0.000 claims description 27
- 238000004804 winding Methods 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 8
- 239000003082 abrasive agent Substances 0.000 description 7
- 230000001965 increasing effect Effects 0.000 description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 241001589086 Bellapiscis medius Species 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- 210000003811 finger Anatomy 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000005482 strain hardening Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241001155433 Centrarchus macropterus Species 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000677 High-carbon steel Inorganic materials 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910000742 Microalloyed steel Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 240000006909 Tilia x europaea Species 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910001567 cementite Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- KSOKAHYVTMZFBJ-UHFFFAOYSA-N iron;methane Chemical compound C.[Fe].[Fe].[Fe] KSOKAHYVTMZFBJ-UHFFFAOYSA-N 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to a kind of spools of saw silk, for the spool of the winding saw silk on the core of spool.Saw silk is made by being implemented within two or more Texturized steel wires.It is described two or more it is Texturized in each with curl direction perpendicularly to the longitudinal axis.Each in curl direction is different from other curl directions.Saw silk on spool includes the multiple elastic rotaries of per unit length applied on elastic rotary direction.It can also implement plasticity rotation in silk other than elastic rotary.
Description
Technical field
The present invention relates to the spools with saw silk.The material that such spool is used to cut or sawing is hard and crisp, such as silicon,
The material of quartz, GaAs, silicon carbide and similar type.
Background technology
Silk saw be for cut the hard of silicon wafer used in solar cell industry and semi-conductor industry etc. and
The machine of crisp material.In silk saw, long (typically beyond 200km, but 700km is more conventional) individually saw silk by
It is sent in the silk screen of the feeding side of silk saw.Silk screen is a series of on the capstan winch of trough of belt by being guided in a helical pattern
Ring (typically between 100 and 1200 rings) formation.Capstan winch make entire silk move in a reciprocation manner (for example,
For semiconductor wafer) or (for example, for cutting solar cell wafer) is mobile in one direction.
Topple over abrasive water abrasive grain being maintained in adhesive carrier on silk screen.Usually using silicon carbide or Buddha's warrior attendant
Masonry uses polyethylene glycol (PEG) or oil to be used as carrier for abrasive grain.Workpiece (such as silicon ingot) is sunk in silk screen.Abrasive material
Particle is drawn by saw silk and is fallen the abrasion of materials for leaving cutting of workpiece as swarf.Saw silk is also abraded simultaneously in this process
Therefore the continuous supply of new saw silk is needed in the feeding side, and used saw silk is collected at the receipts silk spool of saw.
In order to correctly understand：Silk saw is the machine for sawing, and saw silk is used on such machines for sawing
The silk cut." sawing silk " is identical as " saw silk ".Saw the steel wire that silk is preferably very thin.Really, saw silk is thinner, the material being eroded away
Material is fewer, and more chips can be extracted from same block of material.However, because during silk allows for bearing sawing
Certain operational forces (typically 25N) are for maintaining silk to tighten and can apply downward pressure on abrasive material, so steel wire is straight
The lower limit of diameter is limited by the tensile strength of silk.Traditional saw silk is substantially straight and has smooth surface.
Structuring saw silk is introduced in recent years.In the context of this application, " structuring saw silk " is the steel with bending
Silk has straight segment between bending.That is, the curvature of silk by straight segment low-down value with bending from be in compared with
Change between high level.The surface of steel wire is that smooth and silk cross section is round.Structuring saw in the meaning of the application
The typical case of cutting wire is described in the WO 2006/067062 based entirely on 99/28547 A1 of WO.Two disclosures all describe
It is provided with the steel wire of curling, there is pitch length and amplitude, curling to be disposed at least two different planes for each curling.
The use of structuring sawing silk cause faster sawing, less energy expenditure, each chip cutting need compared with
Few silk and less slurries use.This is attributed to the fact that structuring causes abrasive material the fact bending place preferably conveys significantly.This
Outside, structuring provides the open space in cutting, and better swarf is caused to empty.In addition, the very delicate mill used
Material particle (clast) is at them by that will not hinder sawing when the hatch frame of silk.See " structuring silk：From monofilament experiment to polycrystalline
Silicon wafer mass produces ", 131 (2014) 58-63 of solar energy materials ＆ solar cells.
As being had disclosed in 2012/069314 A1 of WO, WO 99/28547 A1 thread above have the sawing phase
Between curl direction the shortcomings that may starting to surpass other curl directions.This is attributed to following fact-and is sawed when along structuring
When the longitudinal axis observation of cutting wire-silk do not have circular symmetry：Lissajous curves (lissajous) type is formed in rectangle
Track.The result is that silk will find privileged direction, total thickness variations (TTV), increased depth and the increasing of increased chip are caused
The kerf quantity added.
Although the solution suggested in WO2012/069314 A1 provides a kind of structuring sawing with spiral shape
Silk, including between there is the segment of bending, and gap is formed wherein between segment and workpiece, it has therefore proved that abrasive material can be protected
It holds in the gap with work, but there is obstacles for producing the efficiency of such silk.
Therefore the present inventor seeks other solutions to overcome the problems, such as this and propose the solution that will be disclosed in the following
Scheme.
Invention content
The object of the present invention is to provide the spools with following saw silk：So that saw silk is better carried out chip sawing and obtains
The wafer characteristics of better sawing.The present invention's further objective is that provide have will be given in saw singulation it is excellent can
The spool of the saw silk of processability.
A kind of spool with saw silk is provided according to the first aspect of the invention, that is, the present invention relates to combined with silk
Spool.For the reason of will illustrate later, it is impossible to determine this on the structuring saw silk of one short (for example, being less than 1 meter)
The presence of invention.
Saw silk is wound onto on the core of spool.Spool will substantially have flange, but this is not clearly required.
Saw silk has the longitudinal axis for the general shape for following saw silk.Axis can be shown when on the core for being wound onto spool
Some deviations with straight line are shown.Longitudinal axis follows this wide circle at the center of saw silk.It is also short when being cut from spool
Silk sample when, silk can show the curvature of some long ranges.In any situation, it is equal to or more than the half of core diameter
Any radius of curvature will not all interfere the longitudinal axis of identification saw silk.
Saw silk is made of steel wire.Steel wire has substantial circular cross section, although being substantially not excluded for polygonal crosssection.Silk
With the diameter between 60 μm and 300 μm, but most preferred size is 70 μm, 80 μm, 90 μm, 100 μm, 110 μm, 115 μm,
120 μm, 130 μm, 140 μm and 150 μm.Nowadays the most commonly used is the silks with 115 μm and 120 μm of diameter.For being referred to as
For the special applications of " stripping and slicing (bricketing) ", 200 μm or 250 μm of large-size diameter is common." stripping and slicing " is
Larger ingot becomes the cutting of the square of standard wafer size.Standard wafer size is 100 × 100mm2、125×125mm2Or
156×156mm2。
In order to bear the workload of the 20N to 25N during sawing, 1000N/mm is needed2(for as at 200 μm
With the thicker silk between 300 μm) and 4000N/mm2Minimum tensile strength between (for the steel wire of 90 μ m diameters).It is typical
Ground is 3700N/mm respectively for 100 μm, 110 μm, 115 μm and 120 μm of most common size2、3200N/mm2、2900N/
mm2、2700N/mm2Minimum tensile strength, wherein safety is built in 500N/mm2On with overcome stretch fluctuate.
High tensile strength can only reach on the high tensile steel silk that remote drawing goes out.Steel quilt for silk as drawing
Referred to as high-carbon steel can be or can not be microalloy.Actual composition of steel include not only iron and carbon further include it is a large amount of its
His alloy and trace element, some of which is in intensity, ductility, formability, corrosion resistance etc. etc. to the property of steel
With far-reaching influence.For the application, intensity is vital, for the preferably following elemental composition of steel wire：
At least carbon of 0.70wt%, limes superiors depend on being formed other alloying elements (seeing below) of silk
- 0.20wt% is to the manganese content between 0.70wt%.Manganese-as carbon-increase silk strain hardening and also
Deoxidier is served as in the manufacture of steel.
- 0.20wt% is to the silicone content between 0.30wt%.Silicon for making steel-deoxidizing during manufacture.It is helped as carbon
Help the strain hardening for increasing steel.
As the presence of the element aluminium, sulphur (being less than 0.03%), phosphorus (being less than 0.03%) should be kept minimum.
The remainder of steel is iron and other elements.
Chromium (0.005wt% to 0.30wt%), vanadium (0.005wt% to 0.30wt%), (0.05wt% is extremely for nickel
0.30wt%), the presence of molybdenum (0.05wt% to 0.25wt%) and boron trace, which can reduce, contains the carbon higher than eutectoid composition
It measures the formation of the crystal boundary cementite of (C of 0.80wt%) and hence improves the formability of silk.Such alloying makes it possible to
Enough realize 0.90wt% to 1.20wt% carbon content, cause in the silk that drawing goes out can be high as 4000MPa
Tensile strength.Such steel is referred to as micro alloyed steel.
Saw silk is provided with the steel wire of two or more curlings, each in two or more curlings has curling
Direction, each in the curl direction is perpendicularly to the longitudinal axis, and curl direction is different each other.
For the purpose of this application, " Texturized " is wherein by giving the alternate left side of silk and the right side in the length of silk
The permanent bending of side and the plastic deformation for obtaining the wave repeatedly on curl direction or zigzag shape.Curl direction hangs down
Directly in longitudinal axis.In the context of this application：Whenever referring to " projection ", the projection of the center line of saw silk can mean that.
" center line " is formed by the central point connection for the circle that will be formed in the vertical cross-section of steel wire.About specific Texturized
" parallel projection " mean saw silk center line on being parallel to the plane of longitudinal direction and in regarding perpendicular to the plane
The projection on specific curl direction in figure.Mean that the center line for sawing silk ought seen along longitudinal axis about " longitudinal projection "
Projection when examining in plane perpendicularly to the longitudinal axis." shade projection " means to just look like the same from the irradiation of the light source of infinity
Entire silk (surrounding steel wire main body) projection.
If there is only one silk is sawed if Texturized would indicate that wave-like in one plane, the plane and volume
Qu Fangxiang is parallel with longitudinal axis, i.e. the shape of silk is plane.Texturized parallel projection will be apparent from showing waveform
Shape.
When provided on two different curl directions two it is Texturized when, two curl directions be all placed in perpendicular to
In the plane of longitudinal axis, then with the flat shape comparison that there is only one when Texturized, spatial form will be presented by sawing silk.
In spatial form, steel wire will deviate on two different curl directions perpendicular to the longitudinal axis of saw silk from longitudinal axis.
However, specific Texturized parallel projection will only show the curly form on that specific direction, other are Texturized
It will not show.The longitudinal projection that silk is sawed when there is only two curl directions shows parallelogram shape.
Processing can extend to three it is Texturized：Again, the parallel projection of the first, second or third curling will only be distinguished
Show the first, second or third curling, and other Texturized will not show.If involving three curl directions,
Longitudinal projection would indicate that the non-regular hexagonal with parallel opposite edges.Processing can extend to four, five or more
Curl direction.
Characteristic about the spool with saw silk is that it includes that the per unit length that applies on elastic rotary direction is more
A elastic rotary.For the purpose of this application, " rotation " is longitudinal axis rotation of the spatial form around saw silk of silk.About
" elastic rotary " means that these rotations are permanently obtained by saw silk.Preferably, exist on the spool with saw silk
Every meter of at least 0.5 to 10 elastic rotaries.The quantity of elastic rotary can saw silk length at such as 0.5 every meter extremely
Change between rotating between 5 rotations or at 1 every meter and 3.The presence of elastic rotary on the spool with saw silk can
Easily to confirm.When in the case where making the end of silk be kept fixed in rotation from saw silk spool on extract length
When the saw silk of " L ", elastic rotary is maintained in silk, because two ends cannot all rotate freely through.The bullet in silk end release
Property rotation liberate and silk end will rotation.The quantity for the rotation made by silk end divided by the solution spooling length " L " of silk are
The quantity of the elastic rotary of per unit length.Length " L " is the length that at least one complete rotation is released.Such as when
One complete is rotated on long 2 meters of silk is released, and every meter of number of rotations are 0.5 every meter and rotate.Rotation will with rotation
Turn to liberate on the opposite direction of rotation in the direction of rotation where being applied in.Note that two ends do not exist during sample obtains
In the case of being held stationary in rotation, the presence of elastic rotary cannot be found out on the sample of saw silk.
The work of the present invention is as follows：When the solution winding saw silk from spool during the normal condition for sawing silk, workpiece quilt cover
To saw silk, saw silk rotates when by fixed point (such as entrance of ingot) using around its rotation axis.Entering per unit time
Speed equal to silk is multiplied by the quantity of per unit length elastic rotary by the quantity for the rotation that mouth is made.Because putting a spool and receipts
Both silk spools are the fixed point for the rotation for preventing saw silk, so the quantity put silk and receive the elastic rotary between silk spool is kept
Length about constant and that the Silk Road diameter sawed by silk is multiplied by equal to per unit length elastic rotary.
Two or more Texturized improvement for causing abrasive grain conveying to pass through notch in saw silk.In the sawing phase
Between, saw silk mainly denudes workpiece in the bending place of curling：Bending pushes abrasive grain against workpiece, and the straight segment between bending
Do not wear workpiece.Haul as a result silk by power it is much smaller because the wear surface between silk and workpiece is reduced.Separately
Outside, swarf and clast by the space between straight segment and can will not hinder still active abrasive grain.
The present invention the first effect be：It is attributed to the rotary motion generated by elastic rotary, slurries are also by Stirring.This
Contribute to the removal of swarf and clast.The present invention the second effect be：It is attributed to the rotary motion of saw silk, silk will not be rolled up at one
Song deformation can surpass it is other it is Texturized in the case of have an opportunity to find preferred orientations and silk made to keep that direction.As long as
Such case has occurred, and rotation will accumulate in before notch until the torque on silk becomes so high so that saw silk is forced
It rotates again.Both first and second effects cause the surface quality of the chip of cutting increased.
In the further refinement of the present invention, Texturized rotation can make permanent along the longitudinal direction of saw silk
Property.All curl directions sawed in two or more curl directions of silk are then rotated in the multiple plasticity of per unit length
It is rotated on the plasticity direction of rotation of longitudinal axis.The rotation of curling is plasticity, i.e. permanent.Therefore from the volume of saw silk
Cut on axis one section saw silk will still show the rotation of curl direction along its length, even if when end rotates freely through
When.
The quantity of elastic rotary is preferably between every meter of 0.5 to 10 rotation, even more preferably at 0.5 every meter
To between being rotated between 5 rotations or at 0.5 to 1.
The plasticity applied rotates and can be opposite each other along the direction of rotation of the elastic rotary of longitudinal axis.For example,
Plasticity rotation can in the clockwise direction, and elastic rotary can apply in the counterclockwise direction.Such arrangement is possible
But less preferably because rotation can eliminate each other.
It is preferred if plasticity direction of rotation is identical with elastic rotary direction.Like that, it more improves in notch
Inlet rotates effe.
Between the summation of the quantity of quantity and the plasticity rotation of elastic rotary is preferably rotated at 0.5 every meter and 20.
In summation, it is contemplated that symbol appropriate, that is, opposite direction is subtracted each other, and similar direction is coupled with.If summation is small
In every meter of 0.5 rotation, then the advantageous effects during sawing are will not notice that.It rotates, deposits if summation is more than 20 every meter
In the risk of " skipping ".It skips during being happened at sawing when a slot for leaving it in the silk in silk screen and is placed in adjacent
When in slot.More specific range be between being rotated at 0.8 every meter and 10 or at 0.8 every meter and 5 between rotation or
Between person even rotates at 0.8 and 2.
In a preferred embodiment of the invention, the quantity of per unit length plasticity rotation is less than per unit length elastic rotary
Quantity, such as 3 rotations that are less than in 10 of silk rotations are plasticity rotations, and remainder is elastic rotary.Same excellent
In the embodiment of choosing, the quantity of plasticity rotation is approximately equal to the quantity of elastic rotary.About being approximately equal to mean 10 rotations
In 3 and 7 between rotation be elastic rotary, remainder is plasticity rotation.
In a preferred embodiment, the quantity of curl direction is equal to two.Two curl directions are preferably relative to each other at 70 °
To between 110 ° of angles.If angle is too small, longitudinal projection would indicate that the parallelogram for becoming flat.Such shape will
The limitation saw silk in its rotation, the risk for sawing sleek as a result increase.If angle is 90 °, longitudinal projection can show
Rectangular shape.Note that curling between angle must locally measure — that is, for example in ten to 100 wavelength-because
The overall orientation of two curlings can be rotated along the length of saw silk there are elastic rotary.
Each in Texturized will show curling wavelength in that Texturized parallel projection.For institute
It is the average axial distance between two peak values followed on the same side of axis to have actual purpose, curling wavelength.It is excellent
Being averaged at least 30 wavelength is taken in choosing.It is highly preferred that crimping wavelength difference and not mutual multiple each other.
It is even more preferably if wavelength relatively prime each other (coprime).If wavelength is equal or mutual multiple, exist
It two curlings and is agglomerated into the risk individually crimped.
In two Texturized concrete conditions on two curl directions, it can will become with the curling of larger wavelength
Shape be named as it is first Texturized, and will be with compared with small wavelength Texturized, to be named as second Texturized.Preferably, first
It is Texturized to crimp wavelength strictly less than the second curling wavelength with the wavelength and first that crimp wavelength strictly larger than second
Twice.It is even furthermore preferable that first wave length is greater than or equal to 1.1 times of second wave length and is less than or equal to 1.5 times.
It is described two or more it is Texturized in each will have crimp amplitude.For the purpose of this application, volume
Song deformation crimp amplitude be that curling central hair parallel projection low peak and peak value between-" peak value to peak
The distance of value "-.Crimp amplitude is equal to Texturized at that between the top and bottom on the side that shade projects
Difference in the height of parallel shade projection.If the difference between crimp amplitude is too big, there is with maximum crimp amplitude
It is Texturized by dominance and the risk that prevents silk from being rotated in notch.Therefore preferably two or more Texturized institutes
There is crimp amplitude in +/- the 40% of two or more Texturized mean values；Alternatively, two or more Texturized
Mean value +/- 30% in it is more preferable, or in +/- 15% it is even better.
It is attributed to the presence of steel wire main body, the ratio of the diameter on curl direction will be cut down.For the purpose of this application,
" the slide calliper rule diameter " measured in a direction in the plane perpendicular to the longitudinal axis of saw silk is that two of contact saw silk are flat
The distance between row plane.Plane should at least cover twice of the maximum wavelength of curling.By determining the card for any direction
Ruler diameter, it may be determined that minimum and maximum slide calliper rule diameter.The difference sawed between the minimum and maximum slide calliper rule diameter of silk should keep low
In the 10% of the mean value of minimum and maximum slide calliper rule diameter.If poor keep below mean value 8% or even lower than 6% even more
It is good.
Two or more Texturized presence in saw silk cause the steel wire with bending.There is connection between bending
The subsequent segment continuously bent.In bending place, the radius of curvature ratio of center line is much smaller in segment, that is, the song of bending place
Rate ratio is much higher in segment.Therefore bending is characterized as the peak value of the curvature when the axial length along saw silk moves.With
The average distance between bending afterwards can pass through the quantity of the bending in count measurement length " L " (for example, 100mm or longer)
And the length is removed with the quantity of the bending counted to measure.Note that bending the distance between with Texturized wavelength not
Unanimously, because a wavelength shows two bendings.
20 times of the silk diameter " d " of steel wire should be less than along average distance of the longitudinal axis between subsequent bending
And more than three times of steel wire diameter.If the distance between bending is too big, the abrasive material carrying capacity at curling is impaired.If
Bending the distance between it is too small, then not enough abrasive materials carried together and swarf and abrasive material clast will not filter it is logical
It crosses.It is even furthermore preferable that bending between average distance be gauge of wire slave three times to ten times.
In order to make elastic distortion be maintained on spool, recommend the outer end of saw silk, i.e. at the available end in the outside of spool
Portion is rotatably fixed to spool to prevent the release of elastic rotary.
Description of the drawings
Fig. 1 a, Fig. 1 b and Fig. 1 c show the measured tool in mutually orthogonal direction, and there are two Texturized existing skills
The saw silk track of art；
Fig. 2 a, Fig. 2 b and Fig. 2 c show the saw silk track of the same prior art, are only now rotated so that first and
Two is Texturized visible；
Fig. 3 a, Fig. 3 b and Fig. 3 c show the saw silk in sawing silk with the present invention elastically and/or plastically distorted；
Fig. 4 shows longitudinal shade projection of the saw silk of the prior art；
Fig. 5 shows longitudinal shade projection of the saw silk of the present invention；
Fig. 6 illustrates how that elastic rotary can be measured on spool；
Fig. 7 illustrates how that the spool of the saw silk of plasticity and elastic rotary can be made.
Specific implementation mode
The structuring saw silk of traditional prior art is by making 130 μm of fine high tensile steel silk guiding pass through then
Two pairs crimp device wheels and make.Steel wire is formed in two subsequent crimp operations in mutually orthogonal direction.In the first volume
In song operation, it is Texturized to give silk first, i.e. zigzag, wherein two bendings in straight segment connection opposite direction.The first volume
The direction of song deformation is in the plane formed by zigzag and perpendicular to the longitudinal axis of structuring sawing silk.Then
The plane wave is upsweeped in the side of the plane perpendicular to wave in two crimp operations.First and second it is Texturized can be with
With amplitude and wavelength different from each other.Generated structuring sawing silk is shown by the first curl direction and longitudinal axis shape
At plane on parallel projection in it is first Texturized and in the plane formed by the second curl direction and longitudinal axis
Second in parallel projection is Texturized.
Structuring saw silk shape can by means of described in such as WO 95/16816 with KEYENCE LS 3100
3034 laser scanning systems of KEYENCE LS (being referred to as " track scanning device ") that unit combines are processed to measure.Within the system,
So that the structuring of about 20cm length is sawed silk and keeps tight under the power of 1 ± 0.2N.The sample, which is fixed on two, can synchronize rotation
Between the drill chuck turned.A bending or twisting deformation must not forced at carefully when seated.Then diode laser head
Silk is scanned along the longitudinal axis (z axis) of silk and records function of the upper and lower edge of silk as length " z ".Two value
The average center line to wire vent is along the position of the X-axis line perpendicular to " z axis " as the function of z, i.e. x (z).Then it will fix
Point is rotated by 90 ° and multiple scanning.The center line of this formation silk is along the position of Y-axis line as the function of " z " coordinate, i.e. y (z).
Therefore parametric function (x (z), y (z), z) defines the shape of the center line of saw silk in three dimensions.By the way that the array is loaded into
It, can be as needed in enlarged drawing when impression is fairly small in spreadsheet program or any other suitable data analysis program
Middle observation track.It can be by virtually making it rotate or from any desired angle using rotation transformation to track
Projection.
Fig. 1 shows to saw the track that the center line of silk is formed by the prior art measured.Fig. 1 a be in 0 ° of angle, i.e. try
Sample is mounted on the direction observed when the angle freely chosen residing between drill chuck.Fig. 1 b are shown when carrying out the second scanning
Same sample, be only now rotated by 90 °.Fig. 1 c show the longitudinal projection of saw silk.Fig. 1 a and Fig. 1 b show not allow to identify
Go out any track individually crimped.The mean wavelength of wave-like is 3.598mm (0.377mm respectively for Fig. 1 a and Fig. 1 b
Standard deviation) and 3.542 (standard deviations of 0.800mm).Fig. 1 c provide that there are the signs of two orthogonal curlings.Note
Meaning, is expressed along the longitudinal length of z axis with millimeter, and vertical axis (X or Y) is expressed with micron, that is, is crimped small.
Now by virtually silk being made to rotate, the wavelength with 3.617mm and 0.098mm are found most when being in 30.5 °
The first of small standard deviation is Texturized：Fig. 2 a.Further rotation provide in 123 ° when wavelength with 3.078mm with
The second of the minimum sandards deviation of 0.048mm is Texturized：Fig. 2 b.These are two Texturized two parallel projections.Two
It is a it is Texturized between angle be 123 ° to 30.5 ° or 92.5 °, this is very close vertical.The curling of silk can be made in order in this way
Deformation.When in 30.5 ° and 123 ° of rotation angle, longitudinal projection (Fig. 2 c) shows by the curling side with the first and second curlings
The figure for the Lissajous curves type delimited to the rectangle of alignment.First crimp amplitude is 38 μm, and the second crimp amplitude is 30 μm.
Fig. 4 shows longitudinal shade projection of the silk of the prior art.The steel with 130 μm of diameter is considered in the projection
406 main bodys of silk.The external envelope of saw silk is indicated with 402.All steel wires are held in the envelope.Central hair longitudinal projection uses
404 indicate.Show different slide calliper rule diameter D0 and D1.The rectangular shape at center is reflected in the shape of envelope, envelope
Shape show circumferential slide calliper rule diametrically big poor.D0 is 168.0 μm of minimum slide calliper rule diameter, D1 be 185.6 μm most
Beam calliper diameter.The average value 10% of minimum and maximum diameter.Such silk (during sawing) is grown for a certain cutting
Degree may be intermittently blocked in the preferred direction.The parameter of crystal sheets of total thickness variations and kerf etc. is by the phenomenon
Adverse effect.
In order to overcome the defect, the present inventor makes a kind of spool of saw silk, wherein in the saw silk on spool
Contain elastic distortion or elasticity and plasticity distortion.
In order to induce elasticity or plasticity rotation onto the saw silk on spool, inventors used as described in Fig. 7
Process.Fig. 7 shows to be built in firm stand 708 and includes by 704 synchronously driven two rotary shafts 706 and 706 ' of motor
Double twisters 700.Two rotary shafts 706,706 ' carry bracket 702, be rotationally supported within rotary shaft 706,706 ' it
Between and suspended on stationaryly when rotary shaft rotates on the direction (arrow) of instruction.Silk volume is put with raw silk rings 712
Axis 710 is mounted on bracket 702 and is directed to first pair of curling device wheel 714.Silk is obtained in the first curl direction there
On it is first Texturized.Generated plane waveform silk is conducted through axis of the axis perpendicular to first pair of curling device wheel
The second couple of installation crimps device wheel 714 '.Generated silk 712 ' shows two with the curl direction being mutually orthogonal to one another
It is Texturized.
Silk 712 ' is then directed over angle pulley 715.It is attributed to the rotary motion of axis 706,706 ', silk is by be equal to
Every meter of rotation amount " RA " of the linear velocity of the 706,706 ' revolution per minute made of axis divided by silk is twisted around its first axle.Silk
712 " movements are by flier (flyer) or pass through air to the second angle pulley 715 '.There silk receive equal to the first amount and
Every meter of second rotation amount RA on identical twist direction.Generated saw silk 712 " ' therefore receive every meter of 2RA rotation.
Optionally, silk is conducted through false twister device 716, rotates up but can have not in side identical with axis
Same rotation number per minute.Silk is sawed as 712 " ' separating device 716 and be wrapped around on spool 718, spool 718 have core and
As the spool with saw silk according to the present invention.
In order to introduce a certain amount of elastic distortion on silk, the amount 2RA of the rotation induced on silk is far below the rotation of steel wire
Turn elastic limit with regard to much of that." the turnable elastic limit " REL can be also flexibly discharged most from silk when being twisted on silk
High rotation number.So being induced to silk if it is greater than the multipurpose rotary of REL, then in release, only REL rotations can be liberated from silk
Out.As long as therefore 2RA<REL is sawed and is found that the elastic rotary number returned will be 2RA on silk.
Whether the spool with saw silk can easily confirm as illustrated in Figure 6 comprising elastic rotary.There to be saw
The spool 610 of silk is mounted on and puts in a stand.Tester 620 remains fixed in the end for making silk between thumb and index finger
In the case of exited from spool saw silk 612 length " L ".1 to 3 meter of length " L " provides enough precision.To sawing the end of silk
Make hook 614.When finger grip discharges, the amount of the rotation 616 discharged is counted up to closest to a quarter circle.To prevent rotation
Revolution amount is less than one, and the length " L " of measurement is increased until the quantity of rotation is more than 1.Revolution (including a quarter counted
Circle) divided by the length " L " of silk is sawed to obtain every meter of rotation number.
When the rotation number 2RA applied is more than REL, REL rotations will be present in as elastic rotary in saw silk, and
2RA-REL rotations will be used as plasticity rotation to leave.However, for the very delicate steel wire with high tensile,
REL values are very high (being more than every meter 90 rotation), cause to come out the elastic rotary more than 90 from saw silk.This is not for using
It is acceptable.In order to cut down elastic residual torsions, scroll tube 716 is introduced.Scroll tube 716 is in plastic region with every meter of FT's
Silk is twisted in false twisting, and hereafter the elastic rotary of identical quantity FT is removed.What is left is with the rate control by scroll tube
The saw silk of multiple plasticity rotation and multiple elastic rotaries of system.If the quantity FT for the false twisting added is equal to REL, produced
There is no elastic rotary in raw saw silk.Also apply on direction identical with the direction that plasticity rotates when FT is less than REL
Elastic rotary.When FT is higher than REL, also there are the elastic rotaries above applied in the opposite direction in the side rotated with plasticity.
Fig. 3 a and Fig. 3 b show the projection of the silk being curled identical with Fig. 1 and Fig. 2, wherein inducing every meter of 3.5 plasticity
Rotation.Projection is that orthogonal each other X-Z and Y-Z are projected.Measurement length of longitudinal projection's (on an x-y plane) in 100mm
On do not show rectangular characteristic.100mm represents the length of the silk in notch.Longitudinal shade projection of this thread is illustrated in Fig. 5
In.Again indicate that out the envelope 502 of the longitudinal projection of central hair 504 and the shade projection of steel wire 506.Indicate 185.6 μm
Maximum slide calliper rule diameter D1 and 175.3 μm of minimum slide calliper rule diameter D0.The difference of minimum and maximum slide calliper rule diameter is average diameter now
5.7%, i.e. workpiece is faced with more round saw silk.Elastic rotary is equal to plasticity rotation to the influence that shade projects and is projected to shade
Influence.
Whether saw silk, which includes plasticity rotation shown in such as Fig. 3 a, Fig. 3 b and Fig. 3 c, can also be based on being remembered by track scanning device
The track of record confirms.By making the end at z=0 be kept fixed and the end at z=100mm is made back to rotate, can give
It gives silk and virtually returns twirl, wherein equably rotating out of multiple plasticity rotations on the complete length of silk track.When make Fig. 3 a, Fig. 3 b and
When the track of Fig. 3 c back rotates, there is the track of Fig. 1.It is Texturized that first and second can be exported from that longitudinal projection
Property.Therefore it can confirm to give the quantity that the plasticity of saw silk rotates.Profile has to every meter back rotate in this case
1.26°。
It is bent to traditional two-fold of no elasticity and plasticity rotation in two different saw tests (" situation 1 ", " situation 2 ")
Structuring sawing silk (" prior art ") and rotate (0.25 turn every meter) with elastic rotary (every about meter Yi Zhuan) and plasticity
Both silks (" invention ") be tested.Increase operating rate step by step dduring test until maximum.Maximum is permissible
Operating rate show in table 1.
Table 1
Much higher sawing rate can be obtained using the silk of the present invention (operating rate corresponds to the rate of cutting).Cause
It is no different between the sawing carried out using the silk of the prior art and invention saw to transmission rate for silk, so with existing skill is utilized
The silk of art is compared can be with the more chips of sawing using the silk of the present invention.In addition the quantity of the chip of sawing per unit time increases
Add, i.e., handling capacity increases.
In addition, more preferable using the parameter of crystal sheets of the silk all wafers of the present invention compared with the prior art saws silk：
[21 μm from the silk for the prior art of maximum cutting mark depth range；48 μm] it drops to for saw silk of the invention
[16 μm to 27 μm].
The total thickness variations of chip in the silk for the prior art [2.8；31.5] silk between μm and for the present invention
[3.1；13.6] change between μm.
Statistics indicate that parameter of crystal sheets can be obtained when using the spool for the saw silk for having elasticity and plasticity rotation
Substantial improvements, increased handling capacity and less silk use.
Claims (15)
1. a kind of spool with saw silk,
The spool includes the core for being wound with saw silk above,
The saw silk has longitudinal axis,
The saw silk includes steel wire,
The steel wire is provided with two or more Texturized；
It is described two or more it is Texturized in each Texturized there is curl direction；
Each curl direction in the curl direction is perpendicular to the longitudinal axis；
The curl direction is different each other；
It is characterized in that,
The saw silk includes multiple elasticity rotations of the per unit length applied on elastic rotary direction around the longitudinal axis
Turn.
2. the spool with saw silk according to claim 1, wherein the quantity of the elastic rotary is at 0.5 every meter and 10
Between a rotation.
3. the spool with saw silk according to any one of claim 1 to 2, wherein saw silk described two or
All curl directions in more curl directions are rotated along the longitudinal axis with the multiple plasticity of per unit length in plasticity
It is rotated on direction of rotation.
4. having the spool of saw silk according to any one of claims 1 to 3, wherein plasticity described in per unit length is revolved
Between the quantity turned is rotated at 0.5 every meter and 10.
5. the spool with saw silk according to any one of claims 1 to 4, wherein the plasticity direction of rotation and institute
It is opposite to state elastic rotary direction.
6. the spool with saw silk according to any one of claims 1 to 4, wherein the plasticity direction of rotation and institute
It is identical to state elastic rotary direction.
7. the spool with saw silk according to any one of claims 1 to 6, the wherein quantity and elasticity of plasticity rotation
Between the summation of the quantity of rotation is rotated at 0.5 every meter and 20.
8. the spool with saw silk according to any one of claims 1 to 7, wherein the Texturized quantity is
Two.
9. the spool with saw silk according to claim 8, curl direction described in two of which have 70 ° relative to each other
Angle between 110 °.
10. the spool with saw silk according to any one of claim 1 to 9, wherein described two or more volumes
Each in bent deformation is Texturized with wavelength is crimped, each in the curling wavelength crimps wavelength each other not
Together.
11. the spool with saw silk according to claim 10, wherein Texturized quantity is two and wherein first
Wavelength is crimped to be more than twice that the second curling wavelength and the first curling wavelength crimp wavelength less than described second.
12. the spool with saw silk according to any one of claim 1 to 11, wherein described two or more volumes
In song deformation each it is Texturized there is crimp amplitude, each crimp amplitude in the crimp amplitude is described two
Or more Texturized crimp amplitude mean value +/- 40% in.
13. the spool with saw silk according to claim 12, wherein the maximum of the saw silk and minimum slide calliper rule diameter it
Between difference be less than minimum and maximum slide calliper rule diameter mean value 10%.
14. the spool with saw silk according to any one of claim 1 to 11, wherein the steel wire has silk straight
Diameter, wherein it is described two or it is multiple it is Texturized show between with segment bending, wherein between the bending along
The average distance of the longitudinal axis is between the three times of the silk diameter and 20 times.
15. the spool with saw silk according to any one of claim 1 to 14, wherein the saw silk has outer end
Portion, the outer end are rotatably fixed against the release of the elastic rotary.
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710014922.1A CN108284529B (en) | 2017-01-09 | 2017-01-09 | Reel with elastic and plastic rotating saw wire |
| JP2017004600U JP3215089U (en) | 2017-01-09 | 2017-10-06 | Saw wire spool with elastic and plastic rotation |
| KR1020197023087A KR20190100390A (en) | 2017-01-09 | 2017-12-26 | Spool with top wire with elastic and plastic rotation |
| SG10202106533TA SG10202106533TA (en) | 2017-01-09 | 2017-12-26 | Spool with saw wire having elastic and plastic rotations |
| EP17890317.5A EP3565693B1 (en) | 2017-01-09 | 2017-12-26 | Spool with saw wire having elastic and plastic rotations |
| KR1020237003091A KR102654263B1 (en) | 2017-01-09 | 2017-12-26 | Spool with saw wire having elastic and plastic rotations |
| PCT/CN2017/118550 WO2018126945A1 (en) | 2017-01-09 | 2017-12-26 | Spool with saw wire having elastic and plastic rotations |
| US16/474,382 US11938654B2 (en) | 2017-01-09 | 2017-12-26 | Spool with saw wire having elastic and plastic rotations |
| FIEP17890317.5T FI3565693T3 (en) | 2017-01-09 | 2017-12-26 | Spool with saw wire having elastic and plastic rotations |
| TW106145975A TWI772350B (en) | 2017-01-09 | 2017-12-27 | Spool with saw wire having elastic and plastic rotations |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710014922.1A CN108284529B (en) | 2017-01-09 | 2017-01-09 | Reel with elastic and plastic rotating saw wire |
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| Publication Number | Publication Date |
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| CN108284529A true CN108284529A (en) | 2018-07-17 |
| CN108284529B CN108284529B (en) | 2024-07-16 |
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| CN201710014922.1A Active CN108284529B (en) | 2017-01-09 | 2017-01-09 | Reel with elastic and plastic rotating saw wire |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023016690A1 (en) * | 2021-08-13 | 2023-02-16 | voestalpine Wire Rod Austria GmbH | Sawing wire, and method for producing same |
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| US2709553A (en) * | 1951-08-20 | 1955-05-31 | Florence K Wellcome | Method of wire coiling |
| CN103619742A (en) * | 2011-06-17 | 2014-03-05 | 贝卡尔特公司 | Spool for winding fine wire at high tension with flexible core |
| US20130061842A1 (en) * | 2011-09-08 | 2013-03-14 | Siltronic Ag | Single-layered winding of sawing wire with fixedly bonded abrasive grain for wire saws for slicing wafers from a workpiece |
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| WO2023016690A1 (en) * | 2021-08-13 | 2023-02-16 | voestalpine Wire Rod Austria GmbH | Sawing wire, and method for producing same |
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