CN206748775U - Spool with saw silk - Google Patents

Abstract

A kind of spool with saw silk is the utility model is related to, it saws the spool of silk to be wound on the core of spool.Saw silk is made by being implemented within two or more Texturized steel wires.It is described two or more it is Texturized in each there is curl direction perpendicularly to the longitudinal axis.Each in curl direction is different from other curl directions.Saw silk on spool is included in the multiple elastic rotaries of the per unit length applied on elastic rotary direction.Plasticity rotation can also be implemented in silk in addition to elastic rotary.According to the utility model, saw silk is better carried out chip sawing and obtains the wafer characteristics of more preferable sawing, and excellent machinability is given in saw singulation.

Description

Spool with saw silk

Technical field

It the utility model is related to the spool with saw silk.Such spool is used for the material cut or sawing is hard and crisp, all Such as the material of silicon, quartz, GaAs, carborundum and similar type.

Background technology

Silk saw be for cut the hard of the silicon wafer used in solar cell industry and semi-conductor industry etc. and The machine of crisp material.In silk saw, long (typically beyond 200km, but 700km is more conventional) single saw silk by It is sent in the silk screen of the feeding side of silk saw.Silk screen is a series of on the capstan winch of trough of belt by being guided in a helical pattern Ring (typically between 100 and 1200 rings) formation.Capstan winch make whole silk move in a reciprocation manner (for example, For semiconductor wafer) or (for example, for cutting solar cell wafer) is mobile in one direction.

Topple over abrasive water abrasive grain being maintained in adhesive carrier on silk screen.Usually using carborundum or Buddha's warrior attendant Masonry uses polyethylene glycol (PEG) or oil to be used as carrier for abrasive grain.Workpiece (such as silicon ingot) is sunk in silk screen.Abrasive material Particle is drawn by saw silk and is fallen the abrasion of materials for leaving cutting of workpiece as swarf.Saw silk is also abraded simultaneously in this process Therefore the continuous supply of new saw silk is needed in the feeding side, and used saw silk is collected at the receipts silk spool of saw.

In order to correctly understand：Silk saw is the machine for sawing, and saw silk is used on such machines for sawing The silk cut." sawing silk " is identical with " saw silk ".It is preferably very thin steel wire to saw silk.Really, it is thinner to saw silk, the material being eroded away Material is fewer, and more chips can be extracted from same block of material.However, because during silk allows for bearing sawing Certain operational forces (typically 25N) are used to maintain silk to tighten and can apply downward pressure on abrasive material, so steel wire is straight The lower limit in footpath is limited by the tensile strength of silk.Traditional saw silk is substantially straight and has a smooth surface.

Structuring saw silk is introduced in recent years.In the context of this application, " structuring saw silk " is the steel with bending Silk, has straight section between bending.That is, the curvature of silk by low-down value at straight section with bending from be in compared with Change between high level.The surface of steel wire is that smooth and silk cross section is round.Structuring saw in the implication of the application The typical case of cutting wire, which is described in, to be based entirely in the A1 of WO 99/28547 WO 2006/067062.Two disclosures all describe The steel wire of curling is provided with, each curling has pitch length and amplitude, crimps and be disposed at least two different planes.

The use of structuring sawing silk cause faster sawing, less energy expenditure, each chip cutting need compared with Few silk and less slurries use.This is attributed to the fact that the fact that structuring causes abrasive material preferably to be conveyed in bending place significantly.This Outside, structuring provides the open space in cutting, causes more preferable swarf to empty.Further, the very fine mill used Material particle (chip) is at them by that will not hinder sawing during the hatch frame of silk.See " structuring silk：From monofilament experiment to polycrystalline Silicon wafer mass produces ", (2014) 58-63 of solar energy materials ＆ solar cells 131.

As disclosed in the A1 of WO 2012/069314, the A1 silks of WO 99/28547 above have the sawing phase Between curl direction the shortcomings that may starting to surpass other curl directions.This be attributed to it is following it is true-sawed when along structuring During the longitudinal axis observation of cutting wire-silk do not have circular symmetry：Lissajous curves (lissajous) type is formed in rectangle Track.Result is that silk will find privileged direction, causes total thickness variations (TTV), increased depth and the increasing of increased chip The kerf quantity added.

Although the solution offer suggested in WO2012/069314 A1 is a kind of to have spiral-shaped structuring sawing Silk, including between there is the section of bending, and gap is formed wherein between section and workpiece, it has therefore proved that abrasive material can be protected Hold in the gap with work, but there is obstacle for the efficiency of silk as production.

Therefore the present inventor seeks other solutions to overcome the problem and propose the solution that will be disclosed in the following Scheme.

Utility model content

The purpose of this utility model is to provide the spool with following saw silk：So that saw silk is better carried out chip sawing simultaneously Obtain the wafer characteristics of more preferable sawing.It is of the present utility model to be given further objective is that providing and having in saw singulation The spool of the saw silk of excellent machinability.

According to first aspect of the present utility model provide it is a kind of have saw silk spool, i.e. the utility model be on The spool combined with silk.For the reason for will illustrate later, it is impossible to saw silk in the structuring of one short (for example, less than 1 meter) It is upper to determine presence of the present utility model.

Saw silk is wound onto on the core of spool.Spool will substantially have flange, but this is not clearly required.

Saw silk has the longitudinal axis for the general shape for following saw silk.Axis can show when on the core for being wound onto spool Some deviations with straight line are shown.Longitudinal axis follows this wide circle at the center of saw silk.It is also short when being cut from spool Silk sample when, silk can show the curvature of some long scopes.In any situation, equal to or more than the half of core diameter Any radius of curvature identifies the longitudinal axis of saw silk all without hindering.

Saw silk is made up of steel wire.Steel wire has substantial circular cross section, although being substantially not excluded for polygonal crosssection.Silk With the diameter between 60 μm and 300 μm, but most preferably size be 70 μm, 80 μm, 90 μm, 100 μm, 110 μm, 115 μm, 120 μm, 130 μm, 140 μm and 150 μm.Nowadays the silk most commonly with 115 μm and 120 μm of diameter.For being referred to as For the special applications of " stripping and slicing (bricketing) ", 200 μm or 250 μm of large-size diameter is common." stripping and slicing " is Larger ingot becomes the cutting of the square of standard wafer size.Standard wafer size is 100 × 100mm²、125×125mm²Or 156×156mm²。

In order to bear the 20N during sawing to 25N workload, it is necessary to 1000N/mm²(for as at 200 μm With the thicker silk between 300 μm) and 4000N/mm²Minimum tensile strength between (for the steel wire of 90 μ m diameters).Typical case Ground is 3700N/mm respectively for 100 μm, 110 μm, 115 μm and 120 μm the most frequently used of size²、3200N/mm²、2900N/ mm²、2700N/mm²Minimum tensile strength, wherein security is built in 500N/mm²On with overcome stretching fluctuate.

Reach on the high tensile steel silk that high tensile strength can only go out in remote drawing.Steel quilt for silk as drawing Referred to as high-carbon steel, it can be or can not be microalloy.Actual composition of steel not only include iron and carbon also include it is a large amount of its His alloy and trace element, property of some of which in intensity, ductility, formability, corrosion resistance etc. etc. to steel With far-reaching influence.For the application, intensity is vital, for the preferably following elemental composition of steel wire：

- at least 0.70wt% carbon, limes superiors depends on being formed other alloying elements (seeing below) of silk

- 0.20wt% is to the manganese content between 0.70wt%.Manganese-as carbon-increases the strain hardening of silk and gone back Deoxidier is served as in the manufacture of steel.

- 0.20wt% is to the silicone content between 0.30wt%.Silicon is used to make steel-deoxidizing during manufacture.It is helped as carbon Help the strain hardening of increase steel.

- as the presence of the element aluminium, sulphur (be less than 0.03%), phosphorus (being less than 0.03%) it should be kept minimum.

The remainder of-steel is iron and other elements.

Chromium (0.005wt% to 0.30wt%), vanadium (0.005wt% to 0.30wt%), (0.05wt% is extremely for nickel 0.30wt%), the presence of molybdenum (0.05wt% to 0.25wt%) and boron trace can reduce contains for the carbon higher than eutectoid composition Measure the formation of the crystal boundary cementite of (0.80wt% C) and hence improve the formability of silk.Such alloying makes it possible to Enough realize 0.90wt% to 1.20wt% carbon content, cause in the silk that drawing goes out can be high as 4000MPa Tensile strength.Such steel is referred to as micro alloyed steel.

Saw silk is provided with the steel wire of two or more curlings, and each in two or more curlings has curling Direction, each in the curl direction is perpendicularly to the longitudinal axis, and curl direction is different each other.

For the purpose of this application, " Texturized " is wherein by giving the alternate left side of silk and the right side in the length of silk The permanent bending of side and the plastic deformation for obtaining the wave repeatedly on curl direction or zigzag shape.Curl direction hangs down Directly in longitudinal axis.In the context of this application：Whenever " projection " is referred to, the projection of the center line of saw silk can mean that. The central point of circle in the vertical cross-section of " center line " by will be formed in steel wire is connected to be formed.On specific Texturized " parallel projection " mean saw silk center line in the plane parallel to longitudinal direction and in regarding perpendicular to the plane The projection on specific curl direction in figure.Mean that the center line for sawing silk ought seen along longitudinal axis on " longitudinal projection " Projection when examining in plane perpendicularly to the longitudinal axis." shade projection " means to just look like to be irradiated equally from the light source of infinity Whole silk (surrounding steel wire main body) projection.

If only exist one it is Texturized if saw silk and would indicate that wave-like in one plane, the plane and volume The shape of Qu Fangxiang and longitudinal axis parallel, i.e. silk is plane.Texturized parallel projection will be apparent from showing waveform Shape.

When provided on two different curl directions two it is Texturized when, two curl directions be all placed in perpendicular to In the plane of longitudinal axis, then with only exist one it is Texturized when flat shape contrast, saw silk spatial form will be presented. In spatial form, steel wire will deviate on two different curl directions perpendicular to the longitudinal axis of saw silk from longitudinal axis. However, specific Texturized parallel projection will only show the curly form on that specific direction, other are Texturized It will not show.The longitudinal projection that silk is sawed when only existing two curl directions shows parallelogram shape.

Processing can extend to three it is Texturized：Again, the parallel projection of first, second or third curling will only be distinguished Show first, second or third curling, and other Texturized will not show.If involving three curl directions, Longitudinal projection would indicate that the non-regular hexagonal with parallel opposite edges.Processing can extend to four, five or more Curl direction.

It is more that characteristic on the spool with saw silk is that it is included in the per unit length applied on elastic rotary direction Individual elastic rotary.For the purpose of this application, " rotation " is longitudinal axis rotation of the spatial form around saw silk of silk.On " elastic rotary " means that these rotations are permanently obtained by saw silk.Preferably, exist on the spool with saw silk Every meter of at least 0.5 to 10 elastic rotaries.The quantity of elastic rotary can saw silk length at such as 0.5 every meter extremely Change between 5 rotations or between 1 every meter and 3 rotation.The presence of elastic rotary on the spool with saw silk can Easily to confirm.In the case of keeping fixed in rotation in the end for making silk length is extracted from the spool with saw silk During the saw silk of " L ", elastic rotary is maintained in silk, because two ends can not all rotate freely through.The bullet in silk end release Property rotation liberate and silk end will rotation.The quantity for the rotation made by silk end divided by the solution spooling length " L " of silk are The quantity of the elastic rotary of per unit length.Length " L " is the length that at least one complete rotation is released to obtain.Such as when One complete is rotated on long 2 meters silk is released, and every meter of rotation quantity rotates for 0.5 every meter.Rotation will with rotation Turn to liberate on the opposite direction of rotation in the direction of rotation where being applied in.Pay attention to, two ends do not exist during sample obtains In the case of being held stationary in rotation, the presence of elastic rotary can not be found out on the sample of saw silk.

Work of the present utility model is as follows：When the solution winding saw silk from spool during the normal condition for sawing silk, workpiece Saw silk is oriented to, saw silk utilizes when by fixing point (such as entrance of ingot) to be rotated around its rotation axis.Time per unit The speed equal to silk is multiplied by the quantity of per unit length elastic rotary in the quantity for the rotation that entrance is made.Because put a spool It is the fixing point for the rotation for preventing saw silk with both silk spools are received, so putting silk and receiving the quantity of the elastic rotary between silk spool Keep length about constant and that the Silk Road footpath sawed by silk is multiplied by equal to per unit length elastic rotary.

Two or more Texturized improvement for causing abrasive grain conveying to pass through otch in saw silk.In the sawing phase Between, saw silk mainly denudes workpiece in the bending place of curling：Bending promotes abrasive grain be pressed against workpiece, and the straight section between bending Do not wear workpiece.Haul that the power that silk passes through is much smaller as a result, because the wear surface between silk and workpiece is reduced.Separately Outside, swarf and chip by the space between straight section and can will not hinder still active abrasive grain.

First effect of the present utility model is：The rotary motion as caused by elastic rotary is attributed to, slurries are also stirred by rotation Mix.This contributes to the removal of swarf and chip.Second effect of the present utility model is：The rotary motion of saw silk is attributed to, silk is not Can one it is Texturized can surpass it is other it is Texturized in the case of have an opportunity to find preferred orientations and silk is kept that Individual direction.As long as such case there occurs, rotation will accumulate in otch before until the moment of torsion on silk become so height with Cause to be forced to rotate again in saw silk.Both first and second effects cause the surface quality added of the chip of cutting.

In further refinement of the present utility model, Texturized rotation can make the longitudinal direction along saw silk It is permanent.All curl directions in two or more curl directions of silk are sawed then to revolve with the multiple plasticity of per unit length Turn to rotate on the plasticity direction of rotation along longitudinal axis.The rotation of curling is plasticity, i.e. permanent.Therefore from saw silk Spool on cut one section saw silk will still show the rotation of curl direction along its length, even if when end is freely revolved When turning.

The quantity of elastic rotary is preferably between every meter of 0.5 to 10 rotation, even more preferably still at 0.5 every meter To between 5 rotations or between 0.5 to 1 rotation.

The plasticity rotation applied and the direction of rotation of the elastic rotary along longitudinal axis can be with opposite each other.For example, Plasticity rotation can in the clockwise direction, and elastic rotary can apply in the counterclockwise direction.Such arrangement is possible But less preferably because rotation can eliminate each other.

It is preferred if plasticity direction of rotation is identical with elastic rotary direction.Like that, more improve in otch Porch rotates effe.

The summation of the quantity of quantity and the plasticity rotation of elastic rotary is preferably between 0.5 every meter and 20 rotation. In summation, it is contemplated that appropriate symbol, i.e. opposite direction is subtracted each other, similar direction is coupled with.If summation is small In every meter of 0.5 rotation, then the advantageous effects during sawing are will not notice that.Rotate, deposit if summation is more than 20 every meter In the risk of " skipping ".Generation is skipped when a groove for leaving it in the silk in silk screen and to be placed in adjacent during sawing When in groove.More specifically scope be 0.8 every meter and 10 rotation between or 0.8 every meter and 5 rotate between or Person is even between 0.8 and 2 rotation.

In preferred embodiment of the present utility model, the quantity of per unit length plasticity rotation is less than per unit length elasticity 3 rotations that are less than in the quantity of rotation, such as 10 rotations of silk are plasticity rotations, and remainder is elastic rotary.Same In sample preferred embodiment, the quantity of plasticity rotation is approximately equal to the quantity of elastic rotary.On being approximately equal to mean 10 The rotation between 3 and 7 in rotation is elastic rotary, and remainder is plasticity rotation.

In a preferred embodiment, the quantity of curl direction is equal to two.Two curl directions are preferably relative to each other at 70 ° To between 110 ° of angles.If angle is too small, longitudinal projection would indicate that the parallelogram for becoming flat.Such shape will The limitation saw silk in its rotation, the risk increase of sleek is sawed as a result.If angle is 90 °, longitudinal projection can show Rectangular shape.Pay attention to, the angle between curling must measure partly-i.e., for example in ten to 100 wavelength-because In the case where elastic rotary be present, the overall orientation of two curlings can rotate along the length of saw silk.

Each in Texturized will show curling wavelength in that Texturized parallel projection.For institute There is actual purpose, curling wavelength is the average axial distance between two peak values followed on the same side of axis.It is excellent Being averaged at least 30 wavelength is taken in choosing.It is highly preferred that curling wavelength is different each other and not mutual multiple. It is even more preferably if wavelength each other relatively prime (coprime).If wavelength is equal or mutual multiple, exist Two and crimp the risk for being agglomerated into single curling.

In two Texturized concrete conditions on two curl directions, the curling with larger wavelength can be become Shape be named as it is first Texturized, and by with compared with small wavelength Texturized, to be named as second Texturized.Preferably, first It is Texturized that wavelength is crimped strictly less than second with the wavelength that wavelength is crimped strictly larger than second and the first curling wavelength Twice.It is even furthermore preferable that first wave length is more than or equal to 1.1 times of second wave length and less than or equal to 1.5 times.

It is described two or more it is Texturized in each will have crimp amplitude.For the purpose of this application, volume Song deformation crimp amplitude be that curling central hair parallel projection low peak and peak value between-" peak value to peak Value "-distance.Crimp amplitude is equal to Texturized at that between the top and bottom on the side of shade projection Difference in the height of parallel shade projection.If the difference between crimp amplitude is too big, there is with maximum crimp amplitude It is Texturized by dominance and the risk that prevents silk from being rotated in otch.Therefore preferably two or more Texturized institutes There is crimp amplitude in +/- the 40% of two or more Texturized averages；Or two or more Texturized Average +/- 30% in it is more preferable, or in +/- 15% it is even better.

It is attributed to the presence of steel wire main body, the ratio of the diameter on curl direction will be cut down.For the purpose of this application, " the slide calliper rule diameter " measured in a direction in the plane perpendicular to the longitudinal axis of saw silk is two of contact saw silk flat The distance between row plane.Plane should at least cover twice of the maximum wavelength of curling.By determining the card for any direction Chi diameter, it may be determined that minimum and maximum slide calliper rule diameter.The difference sawed between the minimum and maximum slide calliper rule diameter of silk should keep low In the 10% of the average of minimum and maximum slide calliper rule diameter.If difference keeps below the 8% or even below 6% of average even more It is good.

Two or more Texturized presence in saw silk cause the steel wire with bending.There is connection between bending The section of subsequent continuous bending.In bending place, the radius of curvature ratio of center line is much smaller in section, i.e. the song of bending place Rate ratio is much higher in section.Therefore bending is characterized as the peak value of the curvature when the axial length along saw silk moves.With The average distance between bending afterwards can pass through the quantity of the bending in count measurement length " L " (for example, 100mm or longer) And the length is removed with the quantity of the bending counted to measure.Pay attention to, bending the distance between with Texturized wavelength not Unanimously, because a wavelength shows two bendings.

20 times of the silk diameter " d " of steel wire should be less than along average distance of the longitudinal axis between subsequent bending And more than three times of steel wire diameter.If the distance between bending is too big, the abrasive material carrying capacity at curling is damaged.If The distance between bending is too small, then carried together without enough abrasive materials and swarf and abrasive material chip will not filter it is logical Cross.It is even furthermore preferable that the average distance between bending is gauge of wire from three times to ten times.

In order that elastic distortion is maintained on spool, recommend the outer end of saw silk, i.e. at the available end in the outside of spool Portion is rotatably fixed to spool to prevent the release of elastic rotary.

Brief description of the drawings

Fig. 1 a, Fig. 1 b and Fig. 1 c show measured there is two Texturized existing skills in mutually orthogonal direction The saw silk track of art；

Fig. 2 a, Fig. 2 b and Fig. 2 c show the saw silk track of same prior art, are only now rotated so that first and Two is Texturized visible；

Fig. 3 a, Fig. 3 b and Fig. 3 c show the saw silk of the present utility model of flexible in silk is sawed and/or plasticity distortion；

Fig. 4 shows longitudinal shade projection of the saw silk of prior art；

Fig. 5 shows longitudinal shade projection of saw silk of the present utility model；

Fig. 6 illustrates how that elastic rotary can be measured on spool；

Fig. 7 illustrates how that the spool of the saw silk of plasticity and elastic rotary can be made.

Embodiment

The structuring saw silk of traditional prior art is by making 130 μm of fine high tensile steel silk guiding pass through then Two pairs crimp device wheels and make.Steel wire is formed in two subsequent crimp operations in mutually orthogonal direction.In the first volume In song operation, it is Texturized to give silk first, i.e. zigzag, wherein two bendings in straight section connection opposite direction.The first volume The direction of song deformation is in the plane formed by zigzag and perpendicular to the longitudinal axis of structuring sawing silk.Then The plane wave is upsweeped in the side of the plane perpendicular to wave in two crimp operations.First and second it is Texturized can be with With amplitude and wavelength different from each other.Caused structuring sawing silk is shown by the first curl direction and longitudinal axis shape Into plane on parallel projection in it is first Texturized and in the plane formed by the second curl direction and longitudinal axis Second in parallel projection is Texturized.

Structuring saw silk shape can by means of described in such as WO 95/16816 with KEYENCE LS 3100 Laser scanning systems of KEYENCE LS 3034 (be referred to as " track scanning device ") that machining cell combines measure.Within the system, The structuring of about 20cm length is sawed silk and keep tight under 1 ± 0.2N power.The sample is fixed on into two can synchronously to revolve Between the drill chuck turned.A bending or twisting deformation must not be carefully forced at when seated.Then diode laser head Silk is scanned along the longitudinal axis (z axis) of silk and records function of the upper and lower edge of silk as length " z ".Two value The average position to the center line of wire vent along the X-axis line perpendicular to " z axis " is as z function, i.e. x (z).Then will be fixed Point is rotated by 90 ° and multiple scanning.This forms position of the center line of silk along Y-axis line as the function of " z " coordinate, i.e. y (z). Therefore parametric function (x (z), y (z), z) defines the shape of the center line of saw silk in three dimensions.By the way that the array is loaded into , can be as needed in enlarged drawing when impression is fairly small in spreadsheet program or any other suitable data analysis program Middle observation track.Can be by virtually making it rotate or from any desired angle using rotation transformation track Projection.

Fig. 1 shows the track formed by the center line of the prior art saw silk measured.Fig. 1 a be in 0 ° of angle, i.e. try Sample is arranged on the direction observed during the angle freely chosen residing between drill chuck.Fig. 1 b are shown when carrying out the second scanning Same sample, be only now rotated by 90 °.Fig. 1 c show to saw the longitudinal projection of silk.Fig. 1 a and Fig. 1 b show not allow to identify Go out the track of any single curling.The mean wavelength of wave-like is 3.598mm (0.377mm respectively for Fig. 1 a and Fig. 1 b Standard deviation) and 3.542 (0.800mm standard deviations).Fig. 1 c provide the sign in the presence of two orthogonal curlings.Note Meaning, is expressed along the longitudinal length of z axis with millimeter, and vertical axis (X or Y) is expressed with micron, that is, is crimped small.

Now by virtually rotating silk, in 30.5 ° when find with 3.617mm wavelength and 0.098mm most The first of small standard deviation is Texturized：Fig. 2 a.Further rotation provide in 123 ° when wavelength with 3.078mm with The second of 0.048mm minimum sandards deviation is Texturized：Fig. 2 b.These are two Texturized two parallel projections.Two It is individual it is Texturized between angle be 123 ° to 30.5 ° or 92.5 °, this is very close vertical.The curling of silk can so be made in order Deformation.During in 30.5 ° and 123 ° of the anglec of rotation, longitudinal projection (Fig. 2 c) is shown by the curling side with the first and second curlings The figure for the Lissajous curves type delimited to the rectangle of alignment.First crimp amplitude is 38 μm, and the second crimp amplitude is 30 μm.

Fig. 4 shows longitudinal shade projection of the silk of prior art.The steel with 130 μm of diameter is considered in the projection 406 main bodys of silk.The external envelope of saw silk is indicated with 402.All steel wires are held in the envelope.Central hair longitudinal projection uses 404 indicate.Show different slide calliper rule diameter D0 and D1.The rectangular shape at center is reflected in the shape of envelope, envelope Shape show circumferential slide calliper rule diametrically big poor.D0 is 168.0 μm of minimum slide calliper rule diameter, D1 be 185.6 μm most Beam calliper diameter.The average value 10% of minimum and maximum diameter.Such silk (during sawing) is grown for a certain cutting Degree may be intermittently blocked in the preferred direction.The parameter of crystal sheets of total thickness variations and kerf etc. is by the phenomenon Adverse effect.

In order to overcome the defect, the present inventor makes a kind of spool for sawing silk, wherein in the saw silk on spool Contain elastic distortion or, elasticity and plasticity distortion.

In order to which elasticity or plasticity rotation are induced onto the saw silk on spool, inventors used as described in Fig. 7 Process.Fig. 7 shows to be built in firm stand 708 and including by 704 synchronously driven two rotary shafts 706 and 706 ' of motor Double twisters 700.Two rotary shafts 706,706 ' carry bracket 702, its be rotationally supported within rotary shaft 706,706 ' it Between and when rotary shaft on the direction of instruction (arrow) rotate when transfixion suspended on.Silk volume is put with raw silk rings 712 Axle 710 is mounted on bracket 702 and is directed to first pair of curling device wheel 714.Silk is obtained in the first curl direction there On it is first Texturized.Caused plane waveform silk is conducted through axis of the axis perpendicular to first pair of curling device wheel The second couple of installation crimps device wheel 714 '.Caused silk 712 ' shows two with the curl direction being mutually orthogonal to one another It is Texturized.

Silk 712 ' is then directed over angle pulley 715.Be attributed to the rotary motion of axle 706,706 ', silk by with equal to Every meter of rotation amount " RA " of the linear velocity of the 706,706 ' revolution per minute made of axle divided by silk is twisted around its first axle.Silk 712 " are moved through flier (flyer) or by air to the second angle pulley 715 '.There silk receive equal to the first amount and Every meter of second rotation amount RA on identical twist direction.Caused saw silk 712 " ' therefore receive every meter of 2RA rotation.

Optionally, silk is conducted through false twister device 716, and it can have not being rotated up with axle identical side Same rotation number per minute.Saw silk is used as 712 " ' separating device 716 and be wrapped around on spool 718, spool 718 have core and As according to the spool with saw silk of the present utility model.

In order to introduce a certain amount of elastic distortion on silk, the amount 2RA of the rotation induced on silk is far below the rotation of steel wire Turn elastic limit with regard to much of that." the turnable elastic limit " REL can be also flexibly discharged most from silk when being twisted on silk High rotation number.So being induced if greater than REL multipurpose rotary to silk, then in release, only REL rotations can be liberated from silk Out.As long as therefore 2RA<REL, saw the elastic rotary number for finding to return on silk and would is that 2RA.

Whether the spool with saw silk can easily confirm as illustrated in Figure 6 comprising elastic rotary.There to be saw The spool 610 of silk is arranged on and put in a stand.Tester 620 is remained fixed between thumb and forefinger making the end of silk In the case of exited from spool saw silk 612 length " L ".1 to 3 meter of length " L " provides enough precision.End to sawing silk Make hook 614.When finger grip discharges, the amount of the rotation 616 to being discharged is counted up to closest to a quarter circle.To prevent rotation Revolution amount is less than one, and the length " L " of measurement is increased until the quantity of rotation is more than 1.Revolution (including a quarter counted Circle) divided by saw silk length " L " to obtain every meter of rotation number.

When the rotation number 2RA applied is more than REL, REL rotations will be present in as elastic rotary in saw silk, and 2RA-REL rotations will be used as plasticity rotation to leave.However, for the very fine steel wire with high tensile, REL values are very high (exceeding every meter 90 rotation), cause to come out the elastic rotary more than 90 from saw silk.This is not for use It is acceptable.In order to cut down elastic residual torsions, scroll tube 716 is introduced.Scroll tube 716 is in plastic region with every meter of FT's Silk is twisted in false twisting, and hereafter identical quantity FT elastic rotary is removed.What is left is with the speed control by scroll tube Multiple plasticity rotation of system and the saw silk of multiple elastic rotaries.If the quantity FT for the false twisting added is equal to REL, produced There is no elastic rotary in raw saw silk.Also have what is applied on the direction identical direction rotated with plasticity when FT is less than REL Elastic rotary.The elastic rotary applied on the direction in opposite direction rotated with plasticity is also left when FT is higher than REL.

Fig. 3 a and Fig. 3 b show the projection for the silk being curled with Fig. 1 and Fig. 2 identicals, wherein inducing every meter of 3.5 plasticity Rotation.Projection is orthogonal each other X-Z and Y-Z projections.Measurement length of longitudinal projection's (on an x-y plane) in 100mm On do not show rectangular characteristic.100mm represents the length of the silk in otch.Longitudinal shade projection of this thread is illustrated in Fig. 5 In.Again indicate that out the envelope 502 of the longitudinal projection of central hair 504 and the shade projection of steel wire 506.Indicate 185.6 μm Maximum slide calliper rule diameter D1 and 175.3 μm of minimum slide calliper rule diameter D0.The difference of minimum and maximum slide calliper rule diameter is average diameter now 5.7%, i.e. workpiece is faced with more round saw silk.The influence that elastic rotary projects to shade is equal to plasticity and rotated to shade projection Influence.

The plasticity rotation whether saw silk is included shown in such as Fig. 3 a, Fig. 3 b and Fig. 3 c can also be based on being remembered by track scanning device The track of record confirms.Keep fixed by the end made at z=0 and the end at z=100mm is back rotated, can give Silk is given virtually to return sth. made by twisting, wherein equably rotating out of multiple plasticity rotations on the complete length of silk track.When make Fig. 3 a, Fig. 3 b and When Fig. 3 c track back rotates, there is Fig. 1 track.It is Texturized that first and second can be exported from that longitudinal projection Property.Therefore can confirm to give the quantity that the plasticity of saw silk rotates.Profile has to every meter back rotate in this case 1.26°。

It is bent to traditional two-fold of no elasticity and plasticity rotation in two different saws tests (" situation 1 ", " situation 2 ") Structuring sawing silk (" prior art ") and it is flexible rotation (every about meter Yi Zhuan) with plasticity rotation (0.25 turn every meter) Both silks (" invention ") be tested.Increase operating rate step by step during test until maximum.Maximum can allow Operating rate show in table 1.

Table 1

Can obtaining much higher sawing speed using silk of the present utility model, (operating rate corresponds to the speed of cutting Rate).Because silk no difference between the sawing carried out is sawed using the silk of prior art and utility model to transmission rate, with Being compared using the silk of prior art can be with the more chip of sawing using silk of the present utility model.Other time per unit sawing The quantity increase of chip, i.e. handling capacity increase.

It is in addition, more preferable using the parameter of crystal sheets of silk all wafers of the present utility model compared with prior art saws silk：

[21 μm from the silk for prior art of-maximum cutting mark depth scope；48 μm] drop to

For [16 μm to 27 μm] of saw silk of the present utility model.

The total thickness variations of-chip in the silk for prior art [2.8；31.5] between μm

With [3.1 for silk of the present utility model；13.6] change between μm.

As shown by data can obtain parameter of crystal sheets when using the spool for the saw silk for having elasticity and plasticity rotation Substantial improvements, increased handling capacity and less silk use.

Claims (15)

1. a kind of spool with saw silk,

The spool includes the core for being wound with saw silk above,

The saw silk has longitudinal axis,

The saw silk includes steel wire,

The steel wire is provided with two or more Texturized；

It is described two or more it is Texturized in each Texturized there is curl direction；

Each curl direction in the curl direction is perpendicular to the longitudinal axis；

The curl direction is different each other；

Characterized in that,

The saw silk includes multiple elasticity rotations of the per unit length applied around the longitudinal axis on elastic rotary direction Turn.

2. the spool with saw silk according to claim 1, it is characterised in that the quantity of the elastic rotary is at every meter 0.5 It is individual 10 rotation between.

3. the spool with saw silk according to any one of claim 1 to 2, it is characterised in that two of the saw silk Or more curl direction in all curl directions moulded with the rotation of per unit length multiple plasticity along the longitudinal axis Property rotates on direction of rotation.

4. the spool with saw silk according to claim 3, it is characterised in that the quantity of per unit length plasticity rotation exists Between 0.5 every meter and 10 rotation.

5. the spool with saw silk according to claim 3, it is characterised in that the plasticity direction of rotation and the elasticity Direction of rotation is opposite.

6. the spool with saw silk according to claim 3, it is characterised in that the plasticity direction of rotation and the elasticity Direction of rotation is identical.

7. the spool with saw silk according to claim 3, it is characterised in that the quantity and elastic rotary of plasticity rotation The summation of quantity is between 0.5 every meter and 20 rotation.

8. the spool with saw silk according to claim 1,2, any one of 4 to 7, it is characterised in that the curling becomes The quantity of shape is two.

9. the spool with saw silk according to claim 8, it is characterised in that two curl directions are relative to each other With the angle between 70 ° to 110 °.

10. the spool with saw silk according to claim 1,2,4-7, any one of 9, it is characterised in that described two Or more it is Texturized in each it is Texturized have curling wavelength, it is described curling wavelength in each curling wavelength It is different each other.

11. it is according to claim 10 have saw silk spool, it is characterised in that Texturized quantity be two and its In the first curling wavelength be more than the second curling wavelength and the first curling wavelength is less than the described second curling twice of wavelength.

12. the spool with saw silk according to claim 1,2,4-7,9, any one of 11, it is characterised in that described It is two or more it is Texturized in each it is Texturized there is crimp amplitude, each curling in the crimp amplitude Amplitude is in +/- the 40% of the average of described two or more Texturized crimp amplitudes.

13. the spool with saw silk according to claim 12, it is characterised in that the maximum and minimum slide calliper rule of the saw silk Difference between diameter is less than the 10% of the average of minimum and maximum slide calliper rule diameter.

14. the spool with saw silk according to claim 1,2,4-7,9, any one of 11, it is characterised in that described Steel wire has silk diameter, wherein it is described two or it is multiple it is Texturized show between have section bending, wherein described curved The average distance along the longitudinal axis between folding is between the three times of the silk diameter and 20 times.

15. the spool with saw silk according to claim 1,2,4-7,9,11, any one of 13, it is characterised in that institute Stating saw silk has outer end, and the outer end is rotatably fixed against the release of the elastic rotary.