CN108279247A - A kind of a wide range of direct detection imaging device of electron-beam excitation fluorescence and its method - Google Patents
A kind of a wide range of direct detection imaging device of electron-beam excitation fluorescence and its method Download PDFInfo
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Abstract
本发明公开了一种电子束激发荧光大范围直接探测成像装置及其方法。本发明的成像装置包括：扫描电子显微镜系统、扫描信号发生器、荧光收集耦合系统、半导体光探测器、扫描同步信号采集器、协同控制与数据处理输出系统；本发明采用模块化的构架，各模块的配置调整及后续升级非常灵活便利；通过引入半导体光探测器的大面积半导体光电探测芯片，使得在扫描电子显微镜系统在大成像视野范围内所激发的荧光均能够以相同的高收集效率会聚耦合至半导体光探测器，解决了大范围荧光扫描成像所得到的图像难以使用统一的标准来测算和比较不同位置处的荧光激发强度或荧光激发产率的问题，能够完成基于电子束激发荧光信号的大范围快速检测分析。
The invention discloses an electron beam excited fluorescence large-scale direct detection imaging device and a method thereof. The imaging device of the present invention includes: a scanning electron microscope system, a scanning signal generator, a fluorescent collection coupling system, a semiconductor photodetector, a scanning synchronous signal collector, a cooperative control and data processing output system; the present invention adopts a modular framework, each Module configuration adjustment and subsequent upgrades are very flexible and convenient; by introducing a large-area semiconductor photodetection chip of a semiconductor photodetector, the fluorescence excited by the scanning electron microscope system within a large imaging field of view can be converged with the same high collection efficiency Coupled to a semiconductor photodetector, it solves the problem that it is difficult to use a unified standard to measure and compare the fluorescence excitation intensity or fluorescence excitation yield at different positions in the images obtained by large-scale fluorescence scanning imaging, and can complete the fluorescence signal based on electron beam excitation. A wide range of rapid detection and analysis.
Description
技术领域technical field
本发明涉及电子束激发的荧光信号探测和处理技术，具体涉及一种电子束激发荧光大范围直接探测成像装置及其方法。The invention relates to the detection and processing technology of fluorescence signals excited by electron beams, in particular to an imaging device and method for direct detection and imaging of large-scale fluorescence excited by electron beams.
背景技术Background technique
电子束激发的荧光信号，是指当电子束轰击在材料表面，除了二次电子、背散射电子、俄歇电子和X射线外，所发射出的频率在紫外、红外或可见光波段的电磁波；其基本原理为材料内部的电子被入射电子激发至高能态，经过一定的弛豫时间跃迁回低能态并释放能量，其中一部分能量以电磁辐射形式发射出来。材料在电子束激发下产生荧光的物理过程由其电子结构决定，而电子结构同元素成分，晶格结构和缺陷，以及所处的力学、热学、电磁学环境等因素相关。因此，电子束激发荧光光谱能够通过材料电子结构反映材料本身物理特性。The fluorescent signal excited by the electron beam refers to the electromagnetic waves emitted by the electron beam in the ultraviolet, infrared or visible light band except for secondary electrons, backscattered electrons, Auger electrons and X-rays when the electron beam bombards the surface of the material; The basic principle is that the electrons inside the material are excited by the incident electrons to a high-energy state, and after a certain relaxation time, they transition back to a low-energy state and release energy, and part of the energy is emitted in the form of electromagnetic radiation. The physical process of a material producing fluorescence under electron beam excitation is determined by its electronic structure, and the electronic structure is related to elemental composition, lattice structure and defects, as well as the mechanical, thermal, electromagnetic environment and other factors. Therefore, the electron beam excited fluorescence spectrum can reflect the physical properties of the material itself through the electronic structure of the material.
电子束激发荧光信号的探测和处理通常与扫描或透射电子显微镜相结合，能够实现形貌观察、结构和成分分析同电子束激发荧光光谱的结合研究。电子束激发荧光所用的电子束束斑非常小，能量高；相比于光致发光，电子束激发荧光信号具有高空间分辨、高激发能量、宽光谱范围、大激发深度等特点，并能够实现全光谱或单光谱荧光扫描成像。电子束激发荧光信号可以应用于微米、纳米尺度的半导体量子点、量子线等荧光物质的发光性质的研究。The detection and processing of electron-beam-excited fluorescence signals are usually combined with scanning or transmission electron microscopy, which can realize the combined research of morphology observation, structure and composition analysis and electron-beam-excited fluorescence spectroscopy. The electron beam spot used for electron beam excitation fluorescence is very small and has high energy; compared with photoluminescence, electron beam excitation fluorescence signal has the characteristics of high spatial resolution, high excitation energy, wide spectral range, large excitation depth, etc., and can realize Full-spectrum or single-spectrum fluorescence scanning imaging. Fluorescent signals excited by electron beams can be applied to the study of the luminescent properties of fluorescent substances such as semiconductor quantum dots and quantum wires in the micron and nanometer scales.
通常电子束激发荧光采用反射面镜收集所激发的荧光，例如旋转抛物面凹面反射镜或旋转椭球凹面反射镜，荧光激发位置位于反射面镜及聚光系统的一个焦点位置处，而所激发荧光经过反射面镜及聚光系统后会聚于反射面镜及聚光系统的另一焦点处，两个焦点位置具有相互对应的共轭关系。若荧光激发位置偏离反射面镜及聚光系统的焦点位置，则所激发荧光在另一焦点处收集效率将非常低。通常，受机械加工和光学像差限制，焦点不是数学意义上的严格的点，而扩展为焦斑。对于一般的反射面镜及聚光系统，能够保证共轭关系的焦斑直径范围仅约50微米左右，当荧光激发位置偏离该50微米直径焦斑时，荧光收集效率将迅速降低。因此，电子束激发荧光信号的探测和处理应用于扫描电子显微镜，进行荧光扫描成像和光谱测量时，荧光收集效率均匀分布的范围仅在反射面镜及聚光系统的50微米直径焦斑范围内，无法实现更大范围(如500微米甚至1毫米直径范围)内的荧光均匀收集，使得大范围荧光扫描成像所得到的图像难以使用统一的标准来测算和比较不同位置处的荧光激发强度或荧光激发产率，以及荧光光谱信息。然而，对于特殊的材料分析，例如地质考古领域所需研究的锆石的荧光，半导体领域所需研究的发光薄膜的内部晶体位错分布等等，均需要大范围视场下高分辨率的荧光成像及光谱测量，以提高分析检测效率。若大范围视场下，也就是在扫描电子显微镜中的大范围电子束扫描成像下，各位置处荧光强度的收集效率不均一，便无法满足所需要的荧光成像分析要求。因此，需要增大电子束激发荧光信号的均匀收集范围是进行大范围快速荧光检测分析的关键之一。Usually electron beam excitation fluorescence is collected by reflective mirrors, such as rotating parabolic concave mirrors or rotating ellipsoid concave mirrors. After passing through the reflective mirror and the light concentrating system, they converge at the other focal point of the reflective mirror and the light concentrating system, and the two focal points have a corresponding conjugate relationship. If the excitation position of the fluorescence deviates from the focus position of the reflecting mirror and the light collecting system, the collection efficiency of the excited fluorescence at another focus will be very low. Usually, limited by mechanical processing and optical aberration, the focal point is not a strict point in the mathematical sense, but expanded into a focal spot. For general reflective mirrors and focusing systems, the diameter range of the focal spot that can guarantee the conjugate relationship is only about 50 microns. When the fluorescence excitation position deviates from the focal spot with a diameter of 50 microns, the fluorescence collection efficiency will decrease rapidly. Therefore, the detection and processing of electron beam-excited fluorescence signals are applied to scanning electron microscopes. When performing fluorescence scanning imaging and spectral measurement, the range of uniform distribution of fluorescence collection efficiency is only within the focal spot range of 50 microns in diameter of the reflective mirror and condenser system. , it is impossible to achieve uniform collection of fluorescence in a larger range (such as a diameter range of 500 microns or even 1 mm), which makes it difficult to use a unified standard to measure and compare the fluorescence excitation intensity or fluorescence at different positions in the images obtained by large-scale fluorescence scanning imaging Excitation yield, and fluorescence spectral information. However, for special material analysis, such as the fluorescence of zircon in the field of geology and archaeology, and the distribution of internal crystal dislocations in luminescent films in the field of semiconductors, etc., high-resolution fluorescence in a wide field of view is required. Imaging and spectral measurement to improve the efficiency of analysis and detection. If the collection efficiency of fluorescence intensity at each position is not uniform under a wide-range field of view, that is, under a large-scale electron beam scanning imaging in a scanning electron microscope, it cannot meet the required fluorescence imaging analysis requirements. Therefore, the need to increase the uniform collection range of electron beam-excited fluorescence signals is one of the keys to large-scale rapid fluorescence detection and analysis.
通常电子束激发荧光信号产生于真空样品室中，荧光信号需要从真空样品室内部传输至真空样品室外部的荧光强度或光谱探测系统，在荧光信号的传输过程中容易造成荧光强度的衰减以及光谱信号的失真，并且整体系统配置繁琐，操作使用相对繁杂。例如，在使用光电倍增管进行荧光强度探测时，由于光电倍增管外形尺寸通常大于10～30mm，且工作时需要约一千伏直流高压，因此受尺寸及电磁干扰影响难以集成至扫描电子显微镜系统的真空样品室中，只能通过窥通至真空样品室内部的荧光信号传输光路输入荧光信号进行荧光强度探测；通过荧光信号传输光路进行荧光信号传输时，由于耦合效率以及荧光信号在传输光路中的吸收效应，荧光信号强度将衰减20％以上，降低了荧光强度的探测效率；并且装载至扫描电子显微镜系统外部的光电倍增管及其探测电路又需要额外安装及配置，增加了系统的复杂程度和操作的便利性。Usually, the electron beam excited fluorescence signal is generated in the vacuum sample chamber. The fluorescence signal needs to be transmitted from the inside of the vacuum sample chamber to the fluorescence intensity or spectrum detection system outside the vacuum sample chamber. During the transmission of the fluorescence signal, it is easy to cause the attenuation of the fluorescence intensity and the The signal is distorted, and the overall system configuration is cumbersome, and the operation is relatively complicated. For example, when using a photomultiplier tube for fluorescence intensity detection, since the overall size of the photomultiplier tube is usually larger than 10-30 mm, and requires about 1,000 volts of DC high voltage to work, it is difficult to integrate into the scanning electron microscope system due to the influence of size and electromagnetic interference In the vacuum sample chamber, the fluorescence signal can only be detected through the fluorescence signal transmission optical path inside the vacuum sample chamber; when the fluorescence signal is transmitted through the fluorescence signal transmission optical path, due to the coupling efficiency and the Due to the absorption effect, the fluorescence signal intensity will be attenuated by more than 20%, which reduces the detection efficiency of the fluorescence intensity; and the photomultiplier tube and its detection circuit loaded outside the scanning electron microscope system need additional installation and configuration, which increases the complexity of the system and ease of operation.
发明内容Contents of the invention
为了实现电子束激发的荧光信号在真空样品室内的大范围直接探测以及荧光信号的处理和分析，本发明提供一种电子束激发荧光大范围直接探测成像装置及其方法；通过荧光收集和信号处理装置的巧妙设计来探测聚焦电子束在样品表面进行逐点扫描所激发的荧光信号，实现高效率荧光成像；通过大面积半导体光电探测芯片的使用和精确定位来实现大范围均匀荧光信号探测；并通过大面积半导体光电探测芯片在真空样品室内的直接固定连接来实现荧光信号在真空样品室内的直接探测。In order to realize the large-scale direct detection of the fluorescence signal excited by the electron beam in the vacuum sample chamber and the processing and analysis of the fluorescence signal, the present invention provides an electron beam-excited fluorescence large-scale direct detection imaging device and its method; through fluorescence collection and signal processing The ingenious design of the device detects the fluorescent signal excited by the point-by-point scanning of the focused electron beam on the sample surface to achieve high-efficiency fluorescence imaging; through the use of large-area semiconductor photodetection chips and precise positioning to achieve large-scale uniform fluorescence signal detection; and The direct detection of fluorescent signals in the vacuum sample chamber is realized through the direct fixed connection of the large-area semiconductor photodetection chip in the vacuum sample chamber.
本发明的一个目的在于提供一种电子束激发荧光大范围直接探测成像装置。An object of the present invention is to provide an electron beam excited fluorescence large-scale direct detection imaging device.
本发明的电子束激发荧光大范围直接探测成像装置包括：扫描电子显微镜系统、扫描信号发生器、荧光收集耦合系统、半导体光探测器、扫描同步信号采集器、协同控制与数据处理输出系统；其中，协同控制与数据处理输出系统作为同步控制和数据采集中心，与扫描电子显微镜系统、扫描信号发生器、半导体光探测器和扫描同步信号采集器相互连接；扫描信号发生器还连接至扫描电子显微镜系统的电子束外部扫描调控接口；荧光收集耦合系统安装在扫描电子显微镜系统的真空样品室内；半导体光探测器一部分位于扫描电子显微镜系统的真空样品室内，另一部分位于真空样品室外；扫描电子显微镜系统、扫描信号发生器和半导体光探测器还分别连接至扫描同步信号采集器；协同控制与数据处理输出系统发出电镜控制信号，传输至扫描电子显微镜系统的电子束外部扫描触发接口，控制扫描电子显微镜系统接收外部信号；协同控制与数据处理输出系统向扫描信号发生器发出同步扫描控制信号，扫描信号发生器产生数字的扫描控制信号，传输至扫描同步信号采集器，并将数字的扫描控制信号转变调理成模拟的扫描控制信号后，传输至扫描电子显微镜系统的电子束外部扫描调控接口，控制扫描电子显微镜系统的电子束扫描位置及扫描停留时间；扫描电子显微镜系统发射电子束，照射到扫描电子显微镜系统的真空样品室内的待分析检测的样品上，激发待分析检测的样品产生荧光；荧光收集耦合系统收集荧光，并在真空样品室内将大扫描范围内的荧光以相同的耦合效率传输至半导体光探测器；半导体光探测器在真空样品室内将荧光转换为光电流信号，并将光电流信号传输至真空样品室外，在协同控制与数据处理输出系统发出的同步采集触发信号控制下，将光电流信号转换为荧光强度信号，并将荧光强度信号分别传输至扫描同步信号采集器和扫描电子显微镜系统的外部信号采集接口；扫描同步信号采集器在协同控制与数据处理输出系统发出的同步采集控制信号控制下，分别接收扫描信号发生器的数字的扫描控制信号、半导体光探测器的荧光强度信号和扫描电子显微镜系统产生的二次电子或背散射电子信号，再将信号汇总处理后传输至协同控制与数据处理输出系统；由协同控制与数据处理输出系统发出的同步扫描控制信号、同步采集触发信号和同步采集控制信号具有同步的时序逻辑关系，发出一个同步扫描控制信号时，同步发出相应的同步采集触发信号和同步采集控制信号，实现在电子束扫描位置保持不变的扫描停留时间内，在大扫描范围内进行荧光强度信号的采集，最终由协同控制与数据处理输出系统进行实时同步的信号处理分析并显示输出。The electron beam excited fluorescence large-scale direct detection imaging device of the present invention comprises: a scanning electron microscope system, a scanning signal generator, a fluorescence collection and coupling system, a semiconductor photodetector, a scanning synchronous signal collector, and a cooperative control and data processing output system; , the collaborative control and data processing output system is used as a synchronous control and data acquisition center, and is connected to the scanning electron microscope system, scanning signal generator, semiconductor photodetector and scanning synchronous signal acquisition device; the scanning signal generator is also connected to the scanning electron microscope The external scanning control interface of the electron beam of the system; the fluorescence collection coupling system is installed in the vacuum sample chamber of the scanning electron microscope system; part of the semiconductor photodetector is located in the vacuum sample chamber of the scanning electron microscope system, and the other part is located outside the vacuum sample chamber; the scanning electron microscope system , the scanning signal generator and the semiconductor light detector are respectively connected to the scanning synchronous signal collector; the cooperative control and data processing output system sends out the electron microscope control signal, which is transmitted to the electron beam external scanning trigger interface of the scanning electron microscope system to control the scanning electron microscope The system receives external signals; the cooperative control and data processing output system sends a synchronous scanning control signal to the scanning signal generator, and the scanning signal generator generates a digital scanning control signal, transmits it to the scanning synchronous signal collector, and converts the digital scanning control signal After conditioning into an analog scanning control signal, it is transmitted to the electron beam external scanning control interface of the scanning electron microscope system to control the scanning electron beam scanning position and scanning residence time of the scanning electron microscope system; the scanning electron microscope system emits an electron beam and irradiates the scanning electron beam. On the sample to be analyzed and detected in the vacuum sample chamber of the microscope system, the sample to be analyzed and detected is excited to generate fluorescence; the fluorescence collection coupling system collects the fluorescence, and transmits the fluorescence within a large scanning range to the semiconductor with the same coupling efficiency in the vacuum sample chamber Photodetector: The semiconductor photodetector converts fluorescence into a photocurrent signal in the vacuum sample chamber, and transmits the photocurrent signal to the vacuum sample chamber. Under the control of the synchronous acquisition trigger signal issued by the cooperative control and data processing output system, the The current signal is converted into a fluorescence intensity signal, and the fluorescence intensity signal is respectively transmitted to the scanning synchronization signal collector and the external signal acquisition interface of the scanning electron microscope system; the synchronization acquisition control issued by the scanning synchronization signal collector in the collaborative control and data processing output system Under signal control, the digital scanning control signal of the scanning signal generator, the fluorescence intensity signal of the semiconductor photodetector and the secondary electron or backscattered electron signal generated by the scanning electron microscope system are respectively received, and then the signals are aggregated and processed and then transmitted to the collaborative Control and data processing output system; the synchronous scanning control signal, synchronous acquisition trigger signal and synchronous acquisition control signal issued by the cooperative control and data processing output system have a synchronous sequential logic relationship. When a synchronous scanning control signal is issued, the corresponding Synchronously collect the trigger signal and synchronously collect the control signal to realize the fluorescence in a large scanning range within the scanning dwell time when the scanning position of the electron beam remains unchanged. The collection of light intensity signals is finally carried out by the collaborative control and data processing output system for real-time synchronous signal processing analysis and display output.
扫描电子显微镜系统包括：电子枪、电子光学系统、真空样品室、信号探测系统、电气控制系统和用户操控系统；其中，电子枪发射电子束，经电子光学系统形成高质量的聚焦电子束，入射至位于真空样品室内的待分析检测的样品上，电子束与待分析检测的样品相互作用产生信号，产生的荧光由荧光收集耦合系统收集，其他信号由信号探测系统收集；电气控制系统提供电子束外部扫描触发接口、电子束外部扫描调控接口、外部信号采集接口和信号共享接口；电子束外部扫描触发接口接收协同控制与数据处理输出系统发出的电镜控制信号，电子束外部扫描调控接口接收扫描信号发生器发出的模拟的扫描控制信号，控制电子光学系统执行由扫描信号发生器的调控操作，外部信号采集接口同步接收半导体光探测器的荧光强度信号，最终由扫描电子显微镜系统的用户操控系统直接获取荧光强度分布的图像；信号探测系统同步读取电子束与待分析检测的样品相互作用所产生的除荧光以外的其他信号，并由用户操控系统呈现各信号扫描成像结果；信号探测系统对除荧光以外的其他信号进行调理，并通过电气控制系统提供的信号共享接口，传输至扫描同步信号采集器的同步数据采集单元。The scanning electron microscope system includes: electron gun, electron optical system, vacuum sample chamber, signal detection system, electrical control system and user control system; among them, the electron gun emits electron beams, forms high-quality focused electron beams through the electron optical system, and enters the On the sample to be analyzed and detected in the vacuum sample chamber, the electron beam interacts with the sample to be analyzed and detected to generate signals, the generated fluorescence is collected by the fluorescence collection coupling system, and other signals are collected by the signal detection system; the electrical control system provides external scanning of the electron beam Trigger interface, electron beam external scan control interface, external signal acquisition interface and signal sharing interface; electron beam external scan trigger interface receives the electron microscope control signal sent by the cooperative control and data processing output system, and electron beam external scan control interface receives the scan signal generator The analog scanning control signal sent out controls the electron optical system to perform the regulation and control operation by the scanning signal generator, and the external signal acquisition interface synchronously receives the fluorescence intensity signal of the semiconductor photodetector, and finally the user control system of the scanning electron microscope system directly acquires the fluorescence intensity The image of the intensity distribution; the signal detection system synchronously reads the signals other than the fluorescence generated by the interaction between the electron beam and the sample to be analyzed and detected, and the user controls the system to present the scanning imaging results of each signal; The other signals are conditioned and transmitted to the synchronous data acquisition unit of the scanning synchronous signal collector through the signal sharing interface provided by the electrical control system.
扫描信号发生器包括：扫描信号发生器电源、扫描控制单元、数模转换器和模拟信号调理输出单元；其中，扫描信号发生器电源分别连接至扫描控制单元、数模转换器和模拟信号调理输出单元；扫描控制单元接收协同控制与数据处理输出系统发出的同步扫描控制信号，同步扫描控制信号为数字信号；扫描控制单元将接收到的信号进行处理，转换为具有用户所设定的时序逻辑的数字的扫描控制信号，并将数字的扫描控制信号分别输出至数模转换器和扫描同步信号采集器的同步数据采集单元；数模转换器将数字的扫描控制信号转换并调制为扫描电子显微镜系统所能够接收的模拟的扫描控制信号，并按照用户所设定的时序逻辑依次输出至模拟信号调理输出单元；模拟信号调理输出单元对输入的模拟信号进行调理，并将调理后的模拟的扫描控制信号传输至扫描电子显微镜系统的电子束外部扫描调控接口。The scanning signal generator includes: a scanning signal generator power supply, a scanning control unit, a digital-to-analog converter and an analog signal conditioning output unit; wherein, the scanning signal generator power supply is respectively connected to the scanning control unit, the digital-to-analog converter and the analog signal conditioning output unit; the scanning control unit receives the synchronous scanning control signal sent by the cooperative control and data processing output system, and the synchronous scanning control signal is a digital signal; the scanning control unit processes the received signal and converts it into a sequential logic set by the user. digital scan control signal, and output the digital scan control signal to the synchronous data acquisition unit of the digital-to-analog converter and the scan synchronous signal collector; the digital-to-analog converter converts and modulates the digital scan control signal into a scanning electron microscope system The analog scanning control signal that can be received is output to the analog signal conditioning output unit in sequence according to the timing logic set by the user; the analog signal conditioning output unit conditions the input analog signal and controls the adjusted analog scanning The signal is transmitted to the electron beam external scan control interface of the scanning electron microscope system.
荧光收集耦合系统包括：反射面镜和反射面镜原位固定装置；其中，反射面镜采用为旋转椭球凹面反射镜或旋转抛物面凹面反射镜；反射面镜通过反射面镜原位固定装置固定在扫描电子显微镜系统的真空样品室中，反射面镜上开一通孔，使得扫描电子显微镜系统所产生的高质量聚焦的电子束穿过反射面镜，从而与待分析检测的样品相互作用；电子束与待分析检测的样品相互作用后产生荧光，荧光通过反射面镜耦合入射至半导体光探测器。The fluorescence collecting and coupling system includes: a reflective mirror and an in-situ fixing device for the reflecting mirror; wherein, the reflecting mirror is a rotating ellipsoidal concave mirror or a rotating parabolic concave reflecting mirror; the reflecting mirror is fixed by the reflecting mirror in-situ fixing device In the vacuum sample chamber of the scanning electron microscope system, a through hole is opened on the reflective mirror, so that the high-quality focused electron beam generated by the scanning electron microscope system passes through the reflective mirror, thereby interacting with the sample to be analyzed and detected; Fluorescence is generated after the beam interacts with the sample to be analyzed and detected, and the fluorescence is coupled to the semiconductor photodetector through the reflective mirror.
反射面镜的设定位置由反射面镜原位固定装置确定，并保证扫描电子显微镜系统的扫描范围中心处的电子束同反射面镜上所开通孔的轴线重合并穿过反射面镜的焦点；反射面镜通过反射面镜原位固定装置同扫描电子显微镜系统的电子光学系统的物镜刚性且近距离连接，能够使得反射面镜的设计焦点位于扫描电子显微镜系统的电子光学系统的物镜下表面下方6mm以内；扫描电子显微镜系统的真空样品室中的样品的表面同样调节至扫描电子显微镜系统的电子光学系统的物镜下表面下方6mm以内，保证反射面镜的设计焦点位于样品的表面；样品在扫描电子显微镜系统的电子光学系统的物镜下表面下方的6mm以内能够实现扫描电子显微镜的高分辨率成像；反射面镜具有大于1/4球面的荧光收集立体角，具有高荧光收集效率；反射面镜原位固定装置的一端固定在扫描电子显微镜系统的真空样品室上，另外一端位置灵活可调，通过定位装置固定于扫描电子显微镜系统的电子光学系统的物镜上，并以物镜为标准精确定位其位置。The setting position of the reflective mirror is determined by the in-situ fixing device of the reflective mirror, and it is ensured that the electron beam at the center of the scanning range of the scanning electron microscope system coincides with the axis of the hole opened on the reflective mirror and passes through the focal point of the reflective mirror The reflective mirror is rigidly and closely connected with the objective lens of the electron optical system of the scanning electron microscope system through the reflective mirror in-situ fixing device, so that the design focus of the reflective mirror is located on the lower surface of the objective lens of the electron optical system of the scanning electron microscope system within 6 mm below; the surface of the sample in the vacuum sample chamber of the scanning electron microscope system is also adjusted to within 6 mm below the lower surface of the objective lens of the electron optical system of the scanning electron microscope system, ensuring that the design focus of the reflecting mirror is on the surface of the sample; The electron optical system of the scanning electron microscope system can realize the high-resolution imaging of the scanning electron microscope within 6 mm below the lower surface of the objective lens; the reflective surface mirror has a fluorescence collection solid angle larger than 1/4 spherical surface, and has high fluorescence collection efficiency; the reflective surface One end of the mirror in-situ fixing device is fixed on the vacuum sample chamber of the scanning electron microscope system, and the other end is flexible and adjustable. its location.
半导体光探测器包括：大面积半导体光电探测芯片、半导体芯片引出电路板、电路板屏蔽封装外壳、电路板外壳定位连接装置、电信号传输电路、电信号传输电路真空窥通装置和光电流信号放大控制器；其中，电路板外壳定位连接装置定位安装在荧光收集耦合系统的反射面镜原位固定装置上；电路板屏蔽封装外壳定位安装在电路板外壳定位连接装置上；大面积半导体光电探测芯片焊接在半导体芯片引出电路板上，二者位于电路板屏蔽封装外壳内，半导体芯片引出电路板为半导体光电探测芯片提供供电电源、光电流信号和控制信号的连接引脚；在电路板屏蔽封装外壳的表面设置有光学窗口；扫描电子显微镜系统的真空样品室的室壁上设置有电信号传输电路真空窥通装置；电信号传输电路的一端连接大面积半导体光电探测芯片，另一端通过电信号传输电路真空窥通装置连接至真空样品室外的光电流信号放大控制器；光电流信号放大控制器集成有大面积半导体光电探测芯片工作所需要的供电电源，经电信号传输电路通过半导体芯片引出电路板的引脚为大面积半导体光电探测芯片提供供电；扫描电子显微镜系统的电子束激发样品所产生的荧光，透过电路板屏蔽封装外壳表面的光学窗口，入射至大面积半导体光电探测芯片上，将荧光转换为光电流信号，通过半导体芯片引出电路板上的引脚经电信号传输电路传输至光电流信号放大控制器，光电流信号放大控制器将大面积半导体光电探测芯片输出的光电流信号转换为能够被扫描同步信号采集器和扫描电子显微镜系统的外部信号探测接口接收的模拟的荧光强度信号；光电流信号放大控制器连接至扫描同步信号采集器的同步数据采集单元和协同控制与数据处理输出系统的协同控制单元；光电流信号放大控制器根据协同控制与数据处理输出系统发出的同步采集触发信号实现开始、暂停或者停止信号采集输出，并实时调整模拟的荧光强度信号的调理参数，将光电流信号放大控制器输出的模拟的荧光强度信号调理至扫描同步信号采集器和扫描电子显微镜系统的外部信号探测接口所能够接收的模拟的荧光强度信号，并将调理后的模拟的荧光强度信号传输至扫描同步信号采集器的同步数据采集单元和扫描电子显微镜系统的外部信号采集接口，或者将模拟的荧光强度信号转换为扫描同步信号采集器和扫描电子显微镜系统的外部信号探测接口所能够接收的数字的荧光强度信号，并进行数字信号调理，将调理后的数字信号传输至扫描同步信号采集器的同步数据采集单元。在真空样品室内，电子束在大范围内扫描样品时产生荧光；荧光由荧光收集耦合系统耦合入射至大面积半导体光电探测芯片过程中，各个扫描位置处的荧光损耗都是一致的，不同的扫描位置处收集荧光的效率相同，从而在大范围内实现无失真的荧光成像。Semiconductor photodetectors include: large-area semiconductor photodetection chips, semiconductor chip lead-out circuit boards, circuit board shielding packaging shells, circuit board shell positioning connection devices, electrical signal transmission circuits, electrical signal transmission circuit vacuum peeking devices, and photocurrent signal amplification control Among them, the positioning and connection device of the circuit board shell is positioned and installed on the in-situ fixing device of the reflection mirror of the fluorescence collection coupling system; the circuit board shielding package shell is positioned and installed on the positioning and connecting device of the circuit board shell; the large-area semiconductor photodetection chip is welded On the semiconductor chip lead-out circuit board, the two are located in the circuit board shielding package shell, and the semiconductor chip lead-out circuit board provides power supply, photocurrent signal and control signal connection pins for the semiconductor photodetection chip; The surface is provided with an optical window; the wall of the vacuum sample chamber of the scanning electron microscope system is provided with an electrical signal transmission circuit vacuum peeking device; one end of the electrical signal transmission circuit is connected to a large-area semiconductor photodetection chip, and the other end passes through the electrical signal transmission circuit. The vacuum peeping device is connected to the photocurrent signal amplification controller outside the vacuum sample chamber; the photocurrent signal amplification controller is integrated with the power supply required for the operation of the large-area semiconductor photodetection chip, and the electrical signal transmission circuit leads out the circuit board through the semiconductor chip. The pins provide power supply for the large-area semiconductor photodetection chip; the electron beam of the scanning electron microscope system excites the fluorescence generated by the sample, passes through the optical window on the surface of the package shielded by the circuit board, and is incident on the large-area semiconductor photodetection chip to convert the fluorescence Converted to a photocurrent signal, the semiconductor chip leads to the pin on the circuit board and transmits it to the photocurrent signal amplification controller through the electrical signal transmission circuit. The photocurrent signal amplification controller converts the photocurrent signal output by the large-area semiconductor photodetection chip into The simulated fluorescence intensity signal that can be received by the scanning synchronous signal collector and the external signal detection interface of the scanning electron microscope system; the photocurrent signal amplification controller is connected to the synchronous data acquisition unit and the cooperative control and data processing output of the scanning synchronous signal collector The cooperative control unit of the system; the photocurrent signal amplification controller realizes the start, pause or stop signal acquisition output according to the synchronous acquisition trigger signal sent by the cooperative control and data processing output system, and adjusts the conditioning parameters of the simulated fluorescence intensity signal in real time, and converts the light The analog fluorescence intensity signal output by the current signal amplification controller is adjusted to the analog fluorescence intensity signal that can be received by the scanning synchronization signal collector and the external signal detection interface of the scanning electron microscope system, and the adjusted analog fluorescence intensity signal is transmitted To the synchronous data acquisition unit of the scanning synchronous signal acquisition unit and the external signal acquisition interface of the scanning electron microscope system, or convert the simulated fluorescence intensity signal into a signal that can be received by the scanning synchronous signal acquisition unit and the external signal detection interface of the scanning electron microscope system The digital fluorescence intensity signal is processed, and the digital signal is adjusted, and the adjusted digital signal is transmitted to the synchronous data acquisition unit of the scanning synchronous signal acquisition device. In the vacuum sample chamber, the electron beam generates fluorescence when scanning the sample in a wide range; during the process of coupling the fluorescence to the large-area semiconductor photodetection chip by the fluorescence collection coupling system, the fluorescence loss at each scanning position is consistent, and different scanning Fluorescence is collected with the same efficiency at all positions, enabling distortion-free fluorescence imaging over a large area.
大面积半导体光电探测芯片将荧光转换为光电流信号，采用硅光电倍增管、雪崩光电二极管、光电二极管和微型光电倍增管等基于半导体芯片的光电探测器件中的一种，以及由上述光电探测器件组成的阵列结构光电探测器件；大面积半导体光电探测芯片的尺寸要求能够收集样品表面偏离反射面镜焦点0.5mm范围内由扫描电子显微镜系统的电子束激发样品所产生的荧光信号，反射面镜的焦点恰为扫描电子显微镜系统的扫描范围的中心处。光学窗口的荧光透过率在90％以上，使得由荧光收集耦合系统的反射面镜耦合入射的荧光能够入射至大面积半导体光电探测芯片上。电路板屏蔽封装外壳除光学窗口部分使用轻质金属材料；电路板屏蔽封装外壳为大面积半导体光电探测芯片的电源输入和光电流信号引出提供电磁屏蔽，一方面能够保证真空样品室内的电磁干扰不会影响大面积半导体光电探测芯片正常工作，另一方面能够保证大面积半导体光电探测芯片形成的电磁辐射不会传输至真空样品室中。电路板屏蔽封装外壳定位固定连接至电路板外壳定位连接装置上；电路板外壳定位连接装置一端定位连接至荧光收集耦合系统的反射面镜原位固定装置上，另外一端定位连接电路板屏蔽封装外壳并收纳固定电信号传输电路在真空样品室内的部分电缆；电路板外壳定位连接装置要求精确定位大面积半导体光电探测芯片的工作位置，三维空间定位精度要求低于0.1毫米。电信号传输电路采用柔性屏蔽电缆，用于传输大面积半导体光电探测芯片工作所需要的供电电源和控制信号，及其输出的光电流信号。The large-area semiconductor photodetection chip converts fluorescence into a photocurrent signal, using one of the photodetection devices based on semiconductor chips such as silicon photomultiplier tubes, avalanche photodiodes, photodiodes, and miniature photomultiplier tubes, and the above-mentioned photodetection devices An array structure photodetection device; the size of the large-area semiconductor photodetection chip requires the ability to collect the fluorescent signal generated by the sample surface from the focus of the reflective mirror within 0.5mm from the electron beam of the scanning electron microscope system. The focal point is exactly at the center of the scanning range of the scanning electron microscope system. The fluorescence transmittance of the optical window is above 90%, so that the fluorescence coupled by the reflective surface mirror of the fluorescence collection and coupling system can be incident on the large-area semiconductor photodetection chip. The circuit board shielding package shell is made of light metal materials except for the optical window; the circuit board shielding package shell provides electromagnetic shielding for the power input and photocurrent signal extraction of large-area semiconductor photodetection chips. On the one hand, it can ensure that the electromagnetic interference in the vacuum sample chamber will not It affects the normal operation of the large-area semiconductor photodetection chip, and on the other hand, it can ensure that the electromagnetic radiation formed by the large-area semiconductor photodetection chip will not be transmitted to the vacuum sample chamber. The circuit board shielding packaging shell is positioned and fixedly connected to the positioning and connecting device of the circuit board shell; one end of the positioning and connecting device of the circuit board shell is positioned and connected to the in-situ fixing device of the reflection mirror of the fluorescence collection coupling system, and the other end is positioned and connected to the circuit board shielding packaging shell It also accommodates part of the cables of the fixed electrical signal transmission circuit in the vacuum sample chamber; the positioning connection device of the circuit board shell requires precise positioning of the working position of the large-area semiconductor photodetection chip, and the three-dimensional space positioning accuracy requires less than 0.1 mm. The electrical signal transmission circuit adopts a flexible shielded cable, which is used to transmit the power supply and control signal required for the operation of the large-area semiconductor photodetection chip, and the output photocurrent signal.
扫描同步信号采集器包括：数据采集控制器、同步数据采集单元、数据暂存器和数据输出单元；其中，数据采集控制器与同步数据采集单元、数据暂存器和数据输出单元连接，并与协同控制与数据处理输出系统的协同控制单元连接；同步数据采集单元还与数据暂存器相连接，并分别与扫描信号发生器的模拟信号调理输出单元、半导体光探测器的光电流信号放大控制器以及扫描电子显微镜系统的电气控制系统的信号共享接口连接；数据暂存器还与数据输出单元连接；数据输出单元还连接至协同控制与数据处理输出系统的数据采集单元；数据采集控制器接收协同控制与数据处理输出系统发出的同步采集控制信号，并分别转换为数据采集指令传输至同步数据采集单元，转换为数据存储指令传输至数据暂存器，转换为数据输出指令传输至数据输出单元；同步数据采集单元接收数据采集控制器发出的数据采集指令，同步采集扫描信号发生器输出的数字的扫描控制信号、半导体光探测器调理输出的荧光强度信号、扫描电子显微镜系统调理输出的二次电子和背散射电子信号，数据采集指令控制同步数据采集单元开始和结束采集，并按照同步采集控制信号中用户所设定的时序逻辑向同步数据采集单元设定各路数据进行采集时的时序逻辑；同步数据采集单元采集得到单像素停留时间(即一个时序周期)内相应电子束扫描位置处的荧光强度信号和二次电子或背散射电子信号数据，电子束扫描位置同荧光强度信号和二次电子或背散射电子信号具有一一对应关系；同步数据采集单元最终将数据输出至数据暂存器；数据暂存器接收数据采集控制器发出的数据存储指令，以所设定的格式暂存所设定时间范围内同步数据采集单元所采集到的数据，数据存储指令按照同步采集控制信号中用户所设定的时序逻辑控制数据暂存器完成同步数据采集单元所采集数据的暂存；数据输出单元接收数据采集控制器发出的数据输出指令，读取数据暂存器中的数据，并按照所设定的格式和时序逻辑以数字信号转发输出至协同控制与数据处理输出系统，数据输出指令按照同步采集控制信号中用户所设定的时序逻辑控制数据输出单元完成数据暂存器输出数据的转发输出。The scanning synchronous signal collector includes: a data acquisition controller, a synchronous data acquisition unit, a data temporary register and a data output unit; wherein, the data acquisition controller is connected with the synchronous data acquisition unit, the data temporary register and the data output unit, and is connected with the The cooperative control is connected with the cooperative control unit of the data processing output system; the synchronous data acquisition unit is also connected with the data temporary register, and is respectively connected with the analog signal conditioning output unit of the scanning signal generator and the photocurrent signal amplification control of the semiconductor photodetector. connected to the signal sharing interface of the electrical control system of the device and the scanning electron microscope system; the data temporary register is also connected to the data output unit; the data output unit is also connected to the data acquisition unit of the collaborative control and data processing output system; the data acquisition controller receives The synchronous acquisition control signal issued by the cooperative control and data processing output system is converted into data acquisition instructions and transmitted to the synchronous data acquisition unit, converted into data storage instructions and transmitted to the data temporary register, converted into data output instructions and transmitted to the data output unit The synchronous data acquisition unit receives the data acquisition instruction sent by the data acquisition controller, and synchronously acquires the digital scanning control signal output by the scanning signal generator, the fluorescence intensity signal output by the semiconductor photodetector conditioning, and the secondary output signal output by the scanning electron microscope system conditioning. Electronic and backscattered electronic signals, data acquisition instructions control the synchronous data acquisition unit to start and end acquisition, and set the timing logic of each data acquisition unit to the synchronous data acquisition unit according to the timing logic set by the user in the synchronous acquisition control signal The synchronous data acquisition unit acquires the fluorescence intensity signal and the secondary electron or backscattered electron signal data at the corresponding electron beam scanning position in the single pixel dwell time (i.e. a timing cycle), and the electron beam scanning position is the same as the fluorescence intensity signal and the secondary The electronic or backscattered electronic signals have a one-to-one correspondence; the synchronous data acquisition unit finally outputs the data to the data temporary register; the data temporary register receives the data storage instruction issued by the data acquisition controller, and temporarily stores all The data collected by the synchronous data acquisition unit within the set time range, the data storage instruction controls the data temporary register according to the timing logic set by the user in the synchronous acquisition control signal to complete the temporary storage of the data collected by the synchronous data acquisition unit; data output The unit receives the data output instruction issued by the data acquisition controller, reads the data in the data temporary register, and forwards and outputs the digital signal to the collaborative control and data processing output system according to the set format and timing logic. The data output instruction follows The timing logic set by the user in the synchronous acquisition control signal controls the data output unit to complete the forwarding and output of the output data of the data temporary register.
协同控制与数据处理输出系统包括：一台计算机、协同控制单元和数据采集单元；其中，数据采集单元安装于协同控制与数据处理输出系统的计算机中，并与扫描同步信号采集器的数据输出单元、协同控制与数据处理输出系统的协同控制单元相连接；计算机提供用户操控接口及交互界面，并完成各类数据运算和信息的记录存储；协同控制单元根据用户操控命令，向扫描电子显微镜系统发出电镜控制信号、向扫描信号发生器的扫描控制单元发出同步扫描控制信号、向半导体光探测器的光电流信号放大控制器发出同步采集触发信号、向扫描同步信号采集器的数据采集控制器发出同步采集控制信号、向协同控制与数据处理输出系统的数据采集单元发出数据采集指令和时序逻辑控制信号，并完成与所连接各部分进行信号执行进度的反馈交互，实现测量装置各部分同步协同运行，最后向计算机的用户操控接口及交互界面反馈控制和参数信息；同步扫描控制信号、同步采集触发信号和同步采集控制信号具有同步的时序逻辑关系，发出一同步扫描控制信号时，同步发出同步采集触发信号和同步采集控制信号，实现在电子束扫描位置保持不变的扫描停留时间内，同时进行荧光强度信号的采集，最终由计算机进行实时同步的信号输出与显示，完成电子束激发荧光成像和测量功能；协同控制单元安装于协同控制与数据处理输出系统的计算机中，并同扫描电子显微镜系统的电子束外部扫描触发接口、扫描信号发生器的扫描控制单元、半导体光探测器的光电流信号放大控制器、扫描同步信号采集器的数据采集控制器、协同控制与数据处理输出系统的数据采集单元相连接；数据采集单元能够汇总采集由扫描同步信号采集器采集到的数据信号，再根据协同控制单元的数据采集指令和时序逻辑控制信号将数据信号传输至计算机进行汇总处理。The cooperative control and data processing output system includes: a computer, a cooperative control unit and a data acquisition unit; wherein, the data acquisition unit is installed in the computer of the cooperative control and data processing output system, and is synchronized with the data output unit of the scanning signal collector , collaborative control is connected with the collaborative control unit of the data processing output system; the computer provides the user control interface and interactive interface, and completes various data calculations and information record storage; The electron microscope control signal sends a synchronous scanning control signal to the scanning control unit of the scanning signal generator, sends a synchronous acquisition trigger signal to the photocurrent signal amplification controller of the semiconductor photodetector, and sends a synchronous acquisition trigger signal to the data acquisition controller of the scanning synchronous signal acquisition device. Acquire control signals, send data acquisition instructions and sequential logic control signals to the data acquisition unit of the collaborative control and data processing output system, and complete the feedback interaction with the connected parts of the signal execution progress, so as to realize the synchronous and coordinated operation of all parts of the measuring device. Finally, control and parameter information are fed back to the user interface and interactive interface of the computer; the synchronous scanning control signal, synchronous acquisition trigger signal and synchronous acquisition control signal have a synchronous sequential logic relationship, and when a synchronous scanning control signal is sent, the synchronous acquisition trigger is sent synchronously Signal and synchronous acquisition control signal, realize the acquisition of fluorescence intensity signal at the same time during the scanning dwell time when the scanning position of the electron beam remains unchanged, and finally the real-time synchronous signal output and display by the computer to complete the electron beam excited fluorescence imaging and measurement Function; the cooperative control unit is installed in the computer of the cooperative control and data processing output system, and is connected with the electron beam external scanning trigger interface of the scanning electron microscope system, the scanning control unit of the scanning signal generator, and the photocurrent signal amplification of the semiconductor photodetector The controller, the data acquisition controller of the scanning synchronous signal collector, and the cooperative control are connected with the data acquisition unit of the data processing output system; the data acquisition unit can collect and collect the data signals collected by the scanning synchronous signal The unit's data acquisition instructions and sequential logic control signals transmit the data signals to the computer for summary processing.
本发明的另一个目的在于提供一种电子束激发荧光大范围直接探测成像装置的控制方法。Another object of the present invention is to provide a control method for an electron beam excited fluorescence large-scale direct detection imaging device.
本发明的电子束激发荧光大范围直接探测成像装置的控制方法，包括以下步骤：The control method of the electron beam excited fluorescence large-scale direct detection imaging device of the present invention comprises the following steps:
1)协同控制与数据处理输出系统发出电镜控制信号，传输至扫描电子显微镜系统的电子束外部扫描触发接口，控制扫描电子显微镜系统接收外部信号；1) The coordinated control and data processing output system sends out electron microscope control signals, which are transmitted to the electron beam external scanning trigger interface of the scanning electron microscope system, and control the scanning electron microscope system to receive external signals;
2)协同控制与数据处理输出系统向扫描信号发生器发出同步扫描控制信号，扫描信号发生器产生数字的扫描控制信号，传输至扫描同步信号采集器，并将数字的扫描控制信号转变调理成模拟的扫描控制信号后，传输至扫描电子显微镜系统的电子束外部扫描调控接口，控制扫描电子显微镜系统的电子束扫描位置及扫描停留时间；2) The cooperative control and data processing output system sends a synchronous scanning control signal to the scanning signal generator, and the scanning signal generator generates a digital scanning control signal, transmits it to the scanning synchronous signal collector, and converts the digital scanning control signal into an analog After the scanning control signal of the scanning electron microscope system is transmitted to the electron beam external scanning control interface of the scanning electron microscope system, the electron beam scanning position and scanning residence time of the scanning electron microscope system are controlled;
3)扫描电子显微镜系统发射电子束，照射到扫描电子显微镜系统的真空样品室内的待分析检测的样品上，激发待分析检测的样品产生荧光；3) The scanning electron microscope system emits an electron beam, irradiates the sample to be analyzed and detected in the vacuum sample chamber of the scanning electron microscope system, and excites the sample to be analyzed and detected to generate fluorescence;
4)荧光收集耦合系统收集荧光，并在真空样品室内将大扫描范围内的荧光以相同传输耦合效率传输至半导体光探测器；4) The fluorescence collection coupling system collects the fluorescence, and transmits the fluorescence within a large scanning range to the semiconductor photodetector with the same transmission coupling efficiency in the vacuum sample chamber;
5)半导体光探测器在真空样品室内将荧光转换为光电流信号，并传输至真空样品室外，在协同控制与数据处理输出系统发出的同步采集触发信号控制下，将光电流信号转换为荧光强度信号，并将荧光强度信号分别传输至扫描同步信号采集器和扫描电子显微镜系统的外部信号采集接口；5) The semiconductor photodetector converts the fluorescence into a photocurrent signal in the vacuum sample chamber and transmits it to the vacuum sample chamber. Under the control of the synchronous acquisition trigger signal issued by the cooperative control and data processing output system, the photocurrent signal is converted into the fluorescence intensity signal, and transmit the fluorescence intensity signal to the scanning synchronization signal collector and the external signal acquisition interface of the scanning electron microscope system respectively;
6)扫描同步信号采集器在协同控制与数据处理输出系统发出的同步采集控制信号控制下，分别接收扫描信号发生器的数字的扫描控制信号、半导体光探测器的荧光强度信号和扫描电子显微镜系统产生的二次电子或背散射电子信号，再将信号汇总处理后传输至协同控制与数据处理输出系统；6) Under the control of the synchronous acquisition control signal issued by the cooperative control and data processing output system, the scanning synchronous signal collector receives the digital scanning control signal of the scanning signal generator, the fluorescence intensity signal of the semiconductor photodetector and the scanning electron microscope system respectively. The generated secondary electron or backscattered electronic signal is then aggregated and processed and then transmitted to the collaborative control and data processing output system;
7)由协同控制与数据处理输出系统发出的同步扫描控制信号、同步采集触发信号和同步采集控制信号具有同步的时序逻辑关系，发出一个同步扫描控制信号时，同步发出相应的同步采集触发信号和同步采集控制信号，实现在电子束扫描位置保持不变的扫描停留时间内，在大扫描范围内进行荧光强度信号的采集，最终由协同控制与数据处理输出系统进行实时同步的信号处理分析并显示输出。7) The synchronous scanning control signal, synchronous acquisition trigger signal and synchronous acquisition control signal issued by the cooperative control and data processing output system have a synchronous sequential logic relationship. When a synchronous scanning control signal is issued, the corresponding synchronous acquisition trigger signal and The control signal is collected synchronously to realize the collection of fluorescence intensity signals in a large scanning range during the scanning dwell time when the scanning position of the electron beam remains unchanged, and finally the synchronous signal processing, analysis and display are performed by the collaborative control and data processing output system output.
本发明的优点：Advantages of the present invention:
本发明的电子束激发荧光大范围直接探测成像装置采用模块化的构架，各模块的配置调整及后续升级非常灵活便利；各模块在协同控制与数据处理输出系统的统一同步协调控制下相互配合工作，保证严格的时序和逻辑顺序，并能够通过反馈交互信号检测各模块的运行情况，最终实现高精度的电子束激发荧光大范围直接探测成像；荧光收集耦合系统的反射面镜的焦点位于扫描电子显微镜系统的电子光学系统的物镜下表面下方6mm以内，能够实现扫描电子显微镜的高分辨率成像；反射面镜具有大于1/4球面的荧光收集立体角，具有高荧光收集效率；通过引入荧光收集耦合系统的反射面镜原位固定装置将反射面镜直接固定并精确定位于扫描电子显微镜系统中，在实际操作中无需做额外调整，极大提高了实验测试的效率；通过引入半导体光探测器的大面积半导体光电探测芯片，使得在扫描电子显微镜系统在大成像视野范围内所激发的荧光均能够以相同的高收集效率会聚耦合至半导体光探测器，解决了大范围荧光扫描成像所得到的图像难以使用统一的标准来测算和比较不同位置处的荧光激发强度或荧光激发产率的问题，能够完成基于电子束激发荧光信号的大范围快速检测分析；通过在扫描电子显微镜系统的真空样品室内直接引入半导体光探测器，减少了在传统荧光信号传输光路中荧光强度损耗，提高了荧光强度的探测效率，同时由于无需在扫描电子显微镜系统外部安装额外的荧光探测装置，仅通过电信号传输电路将代表荧光强度信号的光电流信号传输至光电流信号放大控制器，极大降低了系统的复杂程度，提高了操作和配置的便利性。The electron beam-excited fluorescence large-scale direct detection imaging device of the present invention adopts a modular framework, and the configuration adjustment and subsequent upgrade of each module are very flexible and convenient; each module cooperates with each other under the unified synchronous coordination control of the cooperative control and data processing output system , to ensure strict timing and logic sequence, and to detect the operation of each module through feedback interactive signals, and finally realize high-precision electron beam excited fluorescence large-scale direct detection and imaging; the focus of the reflective mirror of the fluorescence collection coupling system is located at the scanning electron The electron optical system of the microscope system is within 6 mm below the lower surface of the objective lens, which can realize high-resolution imaging of the scanning electron microscope; the reflective mirror has a fluorescence collection solid angle larger than 1/4 spherical surface, and has high fluorescence collection efficiency; by introducing fluorescence collection The reflective mirror in-situ fixing device of the coupling system directly fixes the reflective mirror and precisely locates it in the scanning electron microscope system, no additional adjustments are required in actual operation, which greatly improves the efficiency of experimental testing; by introducing a semiconductor photodetector The large-area semiconductor photodetection chip enables the fluorescence excited by the scanning electron microscope system in the large imaging field of view to be converged and coupled to the semiconductor photodetector with the same high collection efficiency, which solves the problem of large-scale fluorescence scanning imaging. It is difficult to use a unified standard to measure and compare the fluorescence excitation intensity or fluorescence excitation yield at different positions, and it is possible to complete a large-scale rapid detection and analysis of fluorescence signals based on electron beam excitation; through the vacuum sample chamber of the scanning electron microscope system The direct introduction of semiconductor photodetectors reduces the loss of fluorescence intensity in the traditional fluorescence signal transmission optical path and improves the detection efficiency of fluorescence intensity. The photocurrent signal representing the fluorescence intensity signal is transmitted to the photocurrent signal amplification controller, which greatly reduces the complexity of the system and improves the convenience of operation and configuration.
附图说明Description of drawings
图1为本发明的电子束激发荧光大范围直接探测成像装置的一个实施例的示意图；Fig. 1 is the schematic diagram of an embodiment of electron beam excited fluorescence large-scale direct detection imaging device of the present invention;
图2为本发明的电子束激发荧光大范围直接探测成像装置的荧光收集耦合系统的放大的示意图；2 is an enlarged schematic diagram of the fluorescence collection coupling system of the electron beam excited fluorescence large-scale direct detection imaging device of the present invention;
图3为本发明的电子束激发荧光大范围直接探测成像装置的半导体光探测器在真空样品是室内的放大的示意图。Fig. 3 is an enlarged schematic view of the semiconductor photodetector of the electron beam excited fluorescence large-scale direct detection imaging device of the present invention in a vacuum sample chamber.
具体实施方式Detailed ways
下面结合附图，通过实施例对本发明做进一步说明。The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.
如图1所示，本实施例的电子束激发荧光大范围直接探测成像装置包括：扫描电子显微镜系统、扫描信号发生器、荧光收集耦合系统、半导体光探测器、扫描同步信号采集器、协同控制与数据处理输出系统；其中，协同控制与数据处理输出系统作为同步控制和数据采集中心，与扫描电子显微镜系统、扫描信号发生器、半导体光探测器和扫描同步信号采集器相互连接；扫描信号发生器还连接至扫描电子显微镜系统的电子束外部扫描调控接口；荧光收集耦合系统安装在扫描电子显微镜系统的真空样品室内；半导体光探测器一部分位于扫描电子显微镜系统的真空样品室内，另一部分位于真空样品室外；扫描电子显微镜系统、扫描信号发生器和半导体光探测器还分别连接至扫描同步信号采集器。As shown in Figure 1, the electron beam excited fluorescence large-scale direct detection imaging device of this embodiment includes: a scanning electron microscope system, a scanning signal generator, a fluorescence collection and coupling system, a semiconductor photodetector, a scanning synchronization signal collector, a cooperative control and data processing output system; among them, the collaborative control and data processing output system is used as a synchronous control and data acquisition center, and is connected with the scanning electron microscope system, scanning signal generator, semiconductor photodetector and scanning synchronous signal collector; scanning signal generation The detector is also connected to the external scanning control interface of the electron beam of the scanning electron microscope system; the fluorescence collection coupling system is installed in the vacuum sample chamber of the scanning electron microscope system; Outside the sample chamber; the scanning electron microscope system, the scanning signal generator and the semiconductor photodetector are also respectively connected to the scanning synchronization signal collector.
扫描电子显微镜系统包括电子枪11、电子光学系统12、真空样品室17、信号探测系统13、电气控制系统14和用户操控系统；其中，电子枪11发射电子束15，经电子光学系统12形成高质量的聚焦电子束15，入射至位于真空样品室17内的待分析检测的样品16上，电子束15与待分析检测的样品16相互作用产生信号，产生的荧光由荧光收集耦合系统收集，其他信号由信号探测系统13收集；电气控制系统14提供电子束外部扫描触发接口19、电子束外部扫描调控接口110、外部信号采集接口111和信号共享接口112；电子束外部扫描触发接口19接收协同控制与数据处理输出系统发出的电镜控制信号，电子束外部扫描调控接口110接收扫描信号发生器发出的模拟的扫描控制信号，控制电子光学系统12执行由扫描信号发生器的调控操作，外部信号采集接口111同步接收半导体光探测器的荧光强度信号，可用于采集荧光强度信号，最终由扫描电子显微镜系统的用户操控系统直接获取荧光强度分布的图像；信号探测系统13同步读取电子束与待分析检测的样品16相互作用所产生的除荧光以外的其他信号，并由用户操控系统呈现各信号扫描成像结果；信号探测系统13对除荧光以外的其他信号进行调理，并通过电气控制系统14提供的信号共享接口112，传输至扫描同步信号采集器的同步数据采集单元。The scanning electron microscope system includes an electron gun 11, an electron optical system 12, a vacuum sample chamber 17, a signal detection system 13, an electrical control system 14, and a user control system; The focused electron beam 15 is incident on the sample 16 to be analyzed and detected in the vacuum sample chamber 17, the electron beam 15 interacts with the sample 16 to be analyzed and detected to generate signals, and the generated fluorescence is collected by the fluorescence collection coupling system, and other signals are collected by the fluorescence collection coupling system. Signal detection system 13 collects; electrical control system 14 provides electron beam external scan trigger interface 19, electron beam external scan control interface 110, external signal acquisition interface 111 and signal sharing interface 112; electron beam external scan trigger interface 19 receives cooperative control and data Process the electron microscope control signal sent by the output system, the electron beam external scan control interface 110 receives the analog scan control signal sent by the scan signal generator, controls the electron optical system 12 to perform the control operation by the scan signal generator, and the external signal acquisition interface 111 synchronizes Receive the fluorescence intensity signal of the semiconductor light detector, which can be used to collect the fluorescence intensity signal, and finally the user control system of the scanning electron microscope system directly obtains the image of the fluorescence intensity distribution; the signal detection system 13 reads the electron beam and the sample to be analyzed and detected synchronously 16 signals other than fluorescence generated by the interaction, and the user controls the system to present the scanning imaging results of each signal; the signal detection system 13 conditions the signals other than fluorescence, and through the signal sharing interface provided by the electrical control system 112. Transmit to the synchronous data acquisition unit of the scanning synchronous signal acquisition unit.
扫描电子显微镜系统具备下述功能：1.扫描电子显微镜系统中的电子光学系统、信号探测系统和电气控制系统能够协同提供电子束束流特性外部调控功能，分别由电气控制系统提供电子束外部扫描触发接口19和电子束外部扫描调控接口110，电子光学系统执行由外部扫描信号发生器产生的外部调控操作，信号探测系统完成信号同步读取以呈现电子束外部调控下的成像结果；2.扫描电子显微镜系统中的信号探测系统、电气控制系统和用户操控系统能够协同完成电子束同样品相互作用产生信号的同步接收、调理、显示功能，包括由扫描电子显微镜系统外部的半导体光探测器等探测到的荧光，分别由信号探测系统提供外部信号采集接口111并对信号进行调理，电气控制系统将调理后的信号协同扫描电子显微镜系统本身或者外部扫描信号发生器产生的电子束同步扫描信号传输至用户操控系统，用户操控系统将接收到的信号进行分析处理并完成显示和存储，该功能可以用于电子束激发的荧光成像；3.扫描电子显微镜系统中的信号探测系统和电气控制系统能够协同完成电子束同样品相互作用产生信号的输出共享功能，分别由信号探测系统采集信号并对信号进行调理，电气控制系统将调理后的信号通过信号共享接口112传输至外部设备，如扫描同步信号采集器，实现信号同外部设备的共享，由外部设备完成信号监测、处理和分析等，该功能可以用于二次电子和背散射电子等信号同外部设备的共享。The scanning electron microscope system has the following functions: 1. The electron optical system, signal detection system and electrical control system in the scanning electron microscope system can cooperate to provide the external control function of the electron beam current characteristics, and the electrical control system provides the external scanning of the electron beam respectively. The trigger interface 19 and the electron beam external scanning control interface 110, the electron optical system performs the external control operation generated by the external scanning signal generator, and the signal detection system completes the signal synchronous reading to present the imaging results under the external control of the electron beam; 2. scanning The signal detection system, electrical control system and user control system in the electron microscope system can cooperate to complete the synchronous reception, conditioning and display functions of the signal generated by the interaction between the electron beam and the sample, including the detection by the semiconductor photodetector outside the scanning electron microscope system. The detected fluorescence is respectively provided by the signal detection system with an external signal acquisition interface 111 and the signal is conditioned, and the electrical control system transmits the conditioned signal to the scanning electron microscope system itself or the electron beam synchronous scanning signal generated by the external scanning signal generator. The user controls the system, and the user controls the system to analyze and process the received signal and complete the display and storage. This function can be used for fluorescence imaging excited by electron beams; 3. The signal detection system and electrical control system in the scanning electron microscope system can cooperate Complete the output sharing function of the signal generated by the interaction between the electron beam and the sample, and the signal detection system collects and conditions the signal respectively, and the electrical control system transmits the conditioned signal to the external device through the signal sharing interface 112, such as scanning synchronization signal acquisition The device realizes the sharing of signals with external equipment, and the external equipment completes signal monitoring, processing and analysis, etc. This function can be used for sharing signals such as secondary electrons and backscattered electrons with external equipment.
扫描信号发生器包括扫描信号发生器电源21、扫描控制单元22、数模转换器23和模拟信号调理输出单元24；其中，扫描信号发生器电源21分别连接至扫描控制单元22、数模转换器23和模拟信号调理输出单元24，提供工作电压，以供电线路相互连接；扫描控制单元22接收协同控制与数据处理输出系统发出的同步扫描控制信号，同步扫描控制信号为数字信号，包括扫描位置信号(二维笛卡尔坐标系或极坐标系中的位置坐标信号)、单像素点停留时间信号及扫描控制方式信号(如横向扫描、纵向扫描、环形扫描、螺旋扫描或任意选定区域扫描等等)，扫描控制单元22将接收到的信号进行处理，转换为具有用户所设定的时序逻辑的数字的扫描控制信号，包含用户所设定扫描区域中各位置像素点的二维坐标信息，并将数字的扫描控制信号输出至数模转换器23和扫描同步信号采集器的同步数据采集单元；数模转换器23将数字的扫描控制信号转换并调制为扫描电子显微镜系统所能够接收的模拟的扫描控制信号，所得模拟信号包含用户所设定扫描区域中各位置像素点的二维坐标信息，并按照用户所设定的时序逻辑依次输出至模拟信号调理输出单元24；模拟信号调理输出单元24将对输入的模拟的扫描控制信号进行滤波、降噪、放大和限幅，并将调理后的模拟的扫描控制信号传输至扫描电子显微镜系统的电子束外部扫描调控接口110。Scanning signal generator comprises scanning signal generator power supply 21, scanning control unit 22, digital-to-analog converter 23 and analog signal conditioning output unit 24; Wherein, scanning signal generator power supply 21 is connected to scanning control unit 22, digital-to-analog converter respectively 23 and the analog signal conditioning output unit 24 provide operating voltage and are connected to each other with power supply lines; the scanning control unit 22 receives the synchronous scanning control signal sent by the cooperative control and data processing output system, and the synchronous scanning control signal is a digital signal, including the scanning position signal (Position coordinate signal in two-dimensional Cartesian coordinate system or polar coordinate system), single pixel point residence time signal and scanning control mode signal (such as horizontal scanning, vertical scanning, circular scanning, helical scanning or arbitrary selected area scanning, etc. ), the scan control unit 22 processes the received signal and converts it into a digital scan control signal with sequential logic set by the user, including the two-dimensional coordinate information of each pixel point in the scan area set by the user, and The digital scan control signal is output to the synchronous data acquisition unit of the digital-to-analog converter 23 and the scan synchronous signal collector; the digital-to-analog converter 23 converts and modulates the digital scan control signal into an analog signal that the scanning electron microscope system can receive. The scanning control signal, the obtained analog signal contains the two-dimensional coordinate information of each position pixel in the scanning area set by the user, and is sequentially output to the analog signal conditioning output unit 24 according to the timing logic set by the user; the analog signal conditioning output unit 24 The input analog scan control signal is filtered, denoised, amplified and clipped, and the conditioned analog scan control signal is transmitted to the electron beam external scan control interface 110 of the scanning electron microscope system.
如图2所示，荧光收集耦合系统包括反射面镜31和反射面镜原位固定装置32；其中，反射面镜31通过反射面镜原位固定装置32固定于扫描电子显微镜系统的真空样品室17中，反射面镜31上开一通孔，使得扫描电子显微镜系统所产生的高质量聚焦电子束穿过反射面镜31，从而同扫描电子显微镜系统的样品台所承载的样品相互作用；反射面镜31的设定位置由反射面镜原位固定装置32确定，并保证电子束同反射面镜31上所开通孔的轴线重合并穿过反射面镜31的焦点；反射面镜31通过反射面镜原位固定装置32同扫描电子显微镜系统的电子光学系统的物镜18刚性且近距离连接，能够使得反射面镜31的设计焦点位于扫描电子显微镜系统的电子光学系统的物镜18下表面下方6mm以内，能够实现扫描电子显微镜的高分辨率成像；反射面镜31具有大于1/4球面的荧光收集立体角，具有高荧光收集效率；反射面镜原位固定装置32的一端固定于扫描电子显微镜系统的真空样品室上，另外一端位置灵活可调，可通过定位装置固定于扫描电子显微镜系统的电子光学系统的物镜18上，并以物镜18为标准精确定位其位置；电子束与样品相互作用后产生荧光，荧光通过反射面镜31耦合入射至半导体光探测器的电路板屏蔽封装外壳上的光学窗口431，进而入射至大面积半导体光电探测芯片的表面。As shown in Figure 2, the fluorescence collection coupling system includes a reflective mirror 31 and a reflective mirror in-situ fixing device 32; wherein, the reflective mirror 31 is fixed in the vacuum sample chamber of the scanning electron microscope system through the reflective mirror in-situ fixing device 32 In 17, a through hole is opened on the reflective mirror 31, so that the high-quality focused electron beam produced by the scanning electron microscope system passes through the reflective mirror 31, thereby interacting with the sample carried by the sample stage of the scanning electron microscope system; the reflective mirror The set position of 31 is determined by the original position fixing device 32 of the reflecting mirror, and guarantees that the electron beam coincides with the axis of the opened hole on the reflecting mirror 31 and passes through the focal point of the reflecting mirror 31; the reflecting mirror 31 passes through the reflecting mirror The in-situ fixing device 32 is rigidly and closely connected with the objective lens 18 of the electron optical system of the scanning electron microscope system, so that the design focus of the reflective mirror 31 is located within 6 mm below the lower surface of the objective lens 18 of the electron optical system of the scanning electron microscope system, It can realize high-resolution imaging of the scanning electron microscope; the reflective mirror 31 has a solid angle of fluorescence collection larger than 1/4 sphere, and has high fluorescence collection efficiency; one end of the reflective mirror in-situ fixing device 32 is fixed on the scanning electron microscope system On the vacuum sample chamber, the position of the other end is flexible and adjustable. It can be fixed on the objective lens 18 of the electron optical system of the scanning electron microscope system through a positioning device, and its position can be precisely positioned based on the objective lens 18; after the interaction between the electron beam and the sample, a Fluorescence, the fluorescence is coupled and incident to the optical window 431 on the circuit board shielding package of the semiconductor photodetector through the reflective mirror 31, and then incident to the surface of the large-area semiconductor photodetection chip.
半导体光探测器包括：大面积半导体光电探测芯片41、半导体芯片引出电路板42、电路板屏蔽封装外壳43、电路板外壳定位连接装置44、电信号传输电路45、电信号传输电路真空窥通装置46和光电流信号放大控制器47；其中，电路板外壳定位连接装置44定位安装在荧光收集耦合系统的反射面镜原位固定装置32上；电路板屏蔽封装外壳43定位安装在电路板外壳定位连接装置44上；大面积半导体光电探测芯片41焊接在半导体芯片引出电路板42上，二者位于电路板屏蔽封装外壳43内，半导体芯片引出电路板为半导体光电探测芯片提供供电电源、光电流信号和控制信号的连接引脚；在电路板屏蔽封装外壳43的表面设置有光学窗口431；扫描电子显微镜系统的真空样品室的室壁上设置有电信号传输电路真空窥通装置46；电信号传输电路45的一端连接大面积半导体光电探测芯片41，另一端通过电信号传输电路真空窥通装置连接至真空样品室外的光电流信号放大控制器47；光电流信号放大控制器47集成有大面积半导体光电探测芯片工作所需要的供电电源，经电信号传输电路通过半导体芯片引出电路板的引脚为大面积半导体光电探测芯片提供供电。The semiconductor light detector includes: a large-area semiconductor photodetection chip 41, a semiconductor chip lead-out circuit board 42, a circuit board shielding packaging shell 43, a circuit board shell positioning connection device 44, an electrical signal transmission circuit 45, and a vacuum peeking device for the electrical signal transmission circuit 46 and a photocurrent signal amplification controller 47; wherein, the circuit board shell positioning connection device 44 is positioned and installed on the reflective mirror in-situ fixing device 32 of the fluorescence collection coupling system; the circuit board shielding packaging shell 43 is positioned and installed on the circuit board shell for positioning and connection On the device 44; the large-area semiconductor photodetection chip 41 is welded on the semiconductor chip lead-out circuit board 42, the two are located in the circuit board shielding package shell 43, the semiconductor chip lead-out circuit board provides power supply, photocurrent signal and The connecting pin of the control signal; the surface of the circuit board shielding package shell 43 is provided with an optical window 431; the chamber wall of the vacuum sample chamber of the scanning electron microscope system is provided with an electrical signal transmission circuit vacuum peeking device 46; the electrical signal transmission circuit One end of 45 is connected to the large-area semiconductor photodetection chip 41, and the other end is connected to the photocurrent signal amplification controller 47 outside the vacuum sample chamber through the vacuum peeking device of the electric signal transmission circuit; the photocurrent signal amplification controller 47 is integrated with a large-area semiconductor photoelectric detector. The power supply required for the work of the detection chip provides power for the large-area semiconductor photodetection chip through the electrical signal transmission circuit through the pins of the semiconductor chip leading out the circuit board.
光电流信号放大控制器根据协同控制与数据处理输出系统发出的同步采集触发信号实现开始、暂停或者停止信号采集输出，并实时调整模拟的荧光强度信号的调理参数，将光电流信号放大控制器输出的模拟的荧光强度信号调理至扫描同步信号采集器和扫描电子显微镜系统的外部信号探测接口所能够接收的模拟的荧光强度信号，并将调理后的模拟的荧光强度信号传输至扫描同步信号采集器的同步数据采集单元和扫描电子显微镜系统的外部信号采集接口，或者将模拟的荧光强度信号转换为扫描同步信号采集器和扫描电子显微镜系统的外部信号探测接口所能够接收的数字的荧光强度信号，并进行数字信号调理，将调理后的数字信号传输至扫描同步信号采集器的同步数据采集单元和扫描电子显微镜系统的外部信号采集接口。The photocurrent signal amplification controller realizes the start, pause or stop signal collection output according to the synchronous acquisition trigger signal sent by the cooperative control and data processing output system, and adjusts the conditioning parameters of the simulated fluorescence intensity signal in real time, and outputs the photocurrent signal amplification controller Condition the simulated fluorescence intensity signal to the simulated fluorescence intensity signal that can be received by the scanning synchronization signal collector and the external signal detection interface of the scanning electron microscope system, and transmit the adjusted simulated fluorescence intensity signal to the scanning synchronization signal collector The synchronous data acquisition unit and the external signal acquisition interface of the scanning electron microscope system, or convert the analog fluorescence intensity signal into a digital fluorescence intensity signal that can be received by the scanning synchronization signal acquisition unit and the external signal detection interface of the scanning electron microscope system, The digital signal is adjusted, and the adjusted digital signal is transmitted to the synchronous data acquisition unit of the scanning synchronous signal acquisition device and the external signal acquisition interface of the scanning electron microscope system.
扫描同步信号采集器包括数据采集控制器51、同步数据采集单元52、数据暂存器53和数据输出单元54；其中，数据采集控制器51与同步数据采集单元52、数据暂存器53和数据输出单元54连接，并与协同控制与数据处理输出系统的协同控制单元连接；同步数据采集单元52还与扫描同步信号采集器的数据暂存器53相连接，并分别与扫描信号发生器的模拟信号调理输出单元24、半导体光探测器的光电流信号放大控制器47以及扫描电子显微镜系统的电气控制系统的信号共享接口112连接；数据暂存器53还与数据输出单元54连接；数据输出单元54还连接至协同控制与数据处理输出系统的数据采集单元；数据采集控制器51接收协同控制与数据处理输出系统发出的同步采集控制信号，转换为数据采集指令传输至同步数据采集单元52，转换为数据存储指令传输至数据暂存器53，转换为数据输出指令传输至数据输出单元54；数据采集指令控制同步数据采集单元52开始和结束采集，并按照同步采集控制信号中用户所设定的时序逻辑向同步数据采集单元52设定各路数据进行采集时的时序逻辑；数据存储指令按照同步采集控制信号中用户所设定的时序逻辑控制数据暂存器53完成同步数据采集单元52所采集数据的暂存；数据输出指令按照同步采集控制信号中用户所设定的时序逻辑控制数据输出单元54完成数据暂存器53输出数据的转发输出；同步数据采集单元52根据数据采集控制器51发出的数据采集指令同步采集扫描信号发生器的输出的数字的扫描控制信号(按照用户所设定时序逻辑输出的用户设定扫描区域中各位置像素点的二维坐标信息)、半导体光探测器调理输出的荧光强度信号、扫描电子显微镜系统调理输出的二次电子和背散射电子信号，并将数据输出至数据暂存器53；同步数据采集单元52采集得到单像素停留时间(即一个时序周期)内相应电子束扫描位置处的荧光强度信号和二次电子或背散射电子信号数据，电子束扫描位置同荧光强度信号和二次电子或背散射电子信号具有一一对应关系；数据暂存器53接收数据采集控制器51发出的数据存储指令，以所设定的格式暂存所设定时间范围内同步数据采集单元所采集到的数据；数据输出单元54读取数据暂存器53中的数据，并按照所设定的格式和时序逻辑以数字信号转发输出至协同控制与数据处理输出系统。The scanning synchronous signal collector comprises data acquisition controller 51, synchronous data acquisition unit 52, data temporary register 53 and data output unit 54; Wherein, data acquisition controller 51 and synchronous data acquisition unit 52, data temporary register 53 and data Output unit 54 is connected, and is connected with the cooperative control unit of cooperative control and data processing output system; The signal conditioning output unit 24, the photocurrent signal amplification controller 47 of the semiconductor photodetector and the signal sharing interface 112 of the electrical control system of the scanning electron microscope system are connected; the data temporary register 53 is also connected with the data output unit 54; the data output unit 54 is also connected to the data acquisition unit of the cooperative control and data processing output system; the data acquisition controller 51 receives the synchronous acquisition control signal sent by the cooperative control and data processing output system, converts it into a data acquisition instruction and transmits it to the synchronous data acquisition unit 52, and converts The data storage instruction is transmitted to the data temporary register 53, converted into a data output instruction and transmitted to the data output unit 54; the data acquisition instruction controls the synchronous data acquisition unit 52 to start and end acquisition, and according to the user's setting in the synchronous acquisition control signal The timing logic sets the timing logic when each data is collected to the synchronous data acquisition unit 52; the data storage instruction controls the data temporary register 53 according to the timing logic set by the user in the synchronous acquisition control signal to complete the acquisition of the synchronous data acquisition unit 52. Temporary storage of data; the data output command controls the data output unit 54 according to the sequential logic set by the user in the synchronous acquisition control signal to complete the forwarding and output of the output data of the data temporary register 53; the synchronous data acquisition unit 52 sends out according to the data acquisition controller 51 The data acquisition command synchronously collects the digital scan control signal output by the scan signal generator (the two-dimensional coordinate information of each pixel point in the user-set scan area output according to the user-set timing logic), semiconductor photodetector conditioning The output fluorescence intensity signal, the secondary electron and backscattered electron signal output by the scanning electron microscope system conditioning, and output the data to the data temporary register 53; the synchronous data acquisition unit 52 acquires a single pixel dwell time (i.e. a timing cycle) The fluorescence intensity signal and the secondary electron or backscattered electron signal data at the corresponding electron beam scanning position in the interior, the electron beam scanning position has a one-to-one correspondence relationship with the fluorescence intensity signal and the secondary electron or backscattered electron signal; data temporary register 53 Receive the data storage instruction that data acquisition controller 51 sends, temporarily store the data that synchronous data acquisition unit gathers in the set time range with the format of setting; Data output unit 54 reads the data in data temporary register 53 , and forward and output digital signals to the collaborative control and data processing output system in accordance with the set format and timing logic.
协同控制与数据处理输出系统包括一台计算机61、协同控制单元62和数据采集单元63；其中，数据采集单元63安装于协同控制与数据处理输出系统的计算机61中，并同扫描同步信号采集器的数据输出单元54、协同控制与数据处理输出系统的协同控制单元62相连接；计算机61提供用户操控接口及交互界面，并完成各类数据运算和信息的记录存储；协同控制单元62根据用户操控命令，向扫描电子显微镜系统发出电镜控制信号、向扫描信号发生器的扫描控制单元22发出同步扫描控制信号、向半导体光探测器的光电流信号放大控制器47发出同步采集触发信号、向扫描同步信号采集器的数据采集控制器51发出同步采集控制信号、向协同控制与数据处理输出系统的数据采集单元63发出数据采集指令和时序逻辑控制信号，并完成同所连接各部分进行信号执行进度的反馈交互，实现测量装置各部分同步协同运行，最后向计算机61的用户操控接口及交互界面反馈控制和参数信息；同步扫描控制信号、同步采集触发信号和同步采集控制信号具有同步的时序逻辑关系，发出一同步扫描控制信号时，同步发出同步采集触发信号和同步采集控制信号，实现在电子束扫描位置保持不变的扫描停留时间内，同时进行荧光强度信号的采集，最终由计算机61进行实时同步的信号输出与显示，完成电子束激发荧光大范围直接探测成像功能；协同控制单元62安装于协同控制与数据处理输出系统的计算机61中，并同扫描电子显微镜系统的电子束外部扫描触发接口19、扫描信号发生器的扫描控制单元22、半导体光探测器的光电流信号放大控制器47、扫描同步信号采集器的数据采集控制器51、协同控制与数据处理输出系统的数据采集单元63相连接；数据采集单元63能够汇总采集由扫描同步信号采集器采集到的数据信号，再根据协同控制单元62的数据采集指令和时序逻辑控制信号将数据信号传输至计算机61进行汇总处理。The cooperative control and data processing output system includes a computer 61, a cooperative control unit 62 and a data acquisition unit 63; wherein, the data acquisition unit 63 is installed in the computer 61 of the cooperative control and data processing output system, and is connected with the scanning synchronization signal collector The data output unit 54 and the cooperative control are connected with the cooperative control unit 62 of the data processing output system; the computer 61 provides the user manipulation interface and the interactive interface, and completes various data calculations and information record storage; the cooperative control unit 62 controls command, send the electron microscope control signal to the scanning electron microscope system, send the synchronous scanning control signal to the scanning control unit 22 of the scanning signal generator, send the synchronous acquisition trigger signal to the photocurrent signal amplification controller 47 of the semiconductor photodetector, and send the scanning synchronous The data acquisition controller 51 of the signal collector sends out synchronous acquisition control signals, sends data acquisition instructions and sequential logic control signals to the data acquisition unit 63 of the cooperative control and data processing output system, and completes the progress of signal execution with each connected part. Feedback interaction realizes synchronous and cooperative operation of all parts of the measuring device, and finally feeds back control and parameter information to the user control interface and interactive interface of the computer 61; the synchronous scanning control signal, synchronous acquisition trigger signal and synchronous acquisition control signal have a synchronous time sequence logic relationship, When a synchronous scanning control signal is issued, a synchronous acquisition trigger signal and a synchronous acquisition control signal are synchronously issued to realize the acquisition of fluorescence intensity signals at the same time during the scanning dwell time when the scanning position of the electron beam remains unchanged, and finally the real-time synchronization is performed by the computer 61 The signal output and display of the electron beam can complete the large-scale direct detection and imaging function of the electron beam excited fluorescence; the cooperative control unit 62 is installed in the computer 61 of the cooperative control and data processing output system, and is connected with the electron beam external scanning trigger interface 19 of the scanning electron microscope system , the scan control unit 22 of the scan signal generator, the photocurrent signal amplification controller 47 of the semiconductor photodetector, the data acquisition controller 51 of the scan synchronous signal collector, and the data acquisition unit 63 of the collaborative control and data processing output system are connected The data collection unit 63 can collect and collect the data signals collected by the scanning synchronization signal collector, and then transmit the data signals to the computer 61 for summary processing according to the data collection instructions and the sequential logic control signals of the cooperative control unit 62 .
最后需要注意的是，公布实施方式的目的在于帮助进一步理解本发明，但是本领域的技术人员可以理解：在不脱离本发明及所附的权利要求的精神和范围内，各种替换和修改都是可能的。因此，本发明不应局限于实施例所公开的内容，本发明要求保护的范围以权利要求书界定的范围为准。Finally, it should be noted that the purpose of publishing the implementation is to help further understand the present invention, but those skilled in the art can understand that various replacements and modifications can be made without departing from the spirit and scope of the present invention and the appended claims. It is possible. Therefore, the present invention should not be limited to the content disclosed in the embodiments, and the protection scope of the present invention is subject to the scope defined in the claims.
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| EP3792952A1 (en) * | 2019-09-16 | 2021-03-17 | FEI Company | Light guide assembly for an electron microscope |
| US11335536B2 (en) | 2019-09-16 | 2022-05-17 | Fei Company | Light guide assembly for an electron microscope |
| CN111579064A (en) * | 2020-04-26 | 2020-08-25 | 东南大学 | Ultraviolet/visible light signal detection system and method based on quantum dot fluorescence time delay |
| CN111579064B (en) * | 2020-04-26 | 2022-06-10 | 东南大学 | Ultraviolet/visible light signal detection system and method based on quantum dot fluorescence time delay |
| CN113092374A (en) * | 2021-04-12 | 2021-07-09 | 青岛科技大学 | Small-sized vacuum photoelectric test system |
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| CN108279247B (en) | 2019-07-26 |
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