CN103245613B - The focusing system of diversity Terahertz light source optical beam path and method - Google Patents

The focusing system of diversity Terahertz light source optical beam path and method Download PDF

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CN103245613B
CN103245613B CN201310134504.8A CN201310134504A CN103245613B CN 103245613 B CN103245613 B CN 103245613B CN 201310134504 A CN201310134504 A CN 201310134504A CN 103245613 B CN103245613 B CN 103245613B
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terahertz
diversity
light
focusing
detector array
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CN103245613A (en
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曹俊诚
周涛
谭智勇
顾立
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Shanghai Institute of Microsystem and Information Technology of CAS
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Abstract

The present invention relates to focusing system and the method for diversity Terahertz light source optical beam path, it utilizes the Terahertz detector array with real-time detection function as Signal reception display end, the typical optical light path that two classes of having put up comprise diversity terahertz emission source is focused, according to different focus standard, complete the focus operation to diversity terahertz emission source.Two classes that focusing light path is mainly divided into parallel light path to focus and convergence light path is focused, the focusing of directional light light path mainly takes translation Terahertz detector array to regulate the method that hot spot is constant, the focusing of converged light light path for foundation, completes the focusing of diversity terahertz light source light path with spot size and intensity respectively.Instant invention overcomes the problem that in terahertz optics system, light source focusing is difficult.

Description

The focusing system of diversity Terahertz light source optical beam path and method
Technical field
The present invention relates to diversity Terahertz light source optical technical field, particularly relate to focusing system and the method for diversity Terahertz light source optical beam path.
Background technology
In recent years, along with the fast development of THz source and detector, the real application research of THz wave is also extensive all the more.In safety detection, Terahertz wave spectrum comprises a large amount of material characterization information, as drugs and TNT have its special Terahertz absorption peak; At biomedical aspect, Terahertz wave energy detects the pathology situation of epidermis biological cell, and as skin burn, skin canceration etc. can be characterized by the reflective information detecting THz wave; In material context of detection, THz wave can through some common infrared materials that cannot penetrate, as plastics, paper and semiconductor medium etc. are nonpolarity material, and can detect material internal structure, simultaneously to compare to microwave ultrasound technology higher for resolution, and this has benefited from its shorter wavelength.But no matter which kind of technology, all can relate to corresponding terahertz optics system, as near field optic microscopic system, far-field scanning imaging system and Real Time Image System etc.Due to the invisibility (different with visible ray from infrared) going out the large and THz wave of luminous emittance of THz source (Solid Source and gaseous source), make to exist when building terahertz optics system light source and to focus the problem of difficulty.
Optical system is combined by the light path of various function and is formed, light path constructing technology is basis, common visible and infrared light supply has high convergence property and observability, so focusing technology can not become difficult point (except high-accuracy optical system) when building the optical system of its correspondence; But for THz wave, Terahertz light path is built exists the difficult feature of focusing, and at this, we propose a kind of light path focusing method in conjunction with Terahertz detector array to make up this defect, and this technology belongs to optical application technical field.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of focusing system and method for diversity Terahertz light source optical beam path, and light source focusing in terahertz optics system is simplified.
The technical solution adopted for the present invention to solve the technical problems is: the focusing system providing a kind of diversity Terahertz light source optical beam path, comprise diversity terahertz emission source, directional light focusing system light path module, Terahertz detector array, terahertz signal demarcation display module, the terahertz signal that described diversity terahertz emission source is dispersed to described directional light focusing system module; Described directional light focusing system receives the terahertz signal that described diversity THz source is launched, and the terahertz signal received is transferred to parallel terahertz signal and be sent to described Terahertz detector array; The parallel terahertz signal received is demarcated display module by terahertz signal and is shown in real time by described Terahertz detector array, and translation Terahertz detector array regulates described diversity terahertz emission source according to the hot spot of display.
The emission angle in described diversity terahertz emission source is greater than 10 degree.
Described directional light focusing system light path module comprises odd number off axis paraboloidal mirror composition and has light path system diverging light being converted to directional light performance.
The technical solution adopted for the present invention to solve the technical problems is: the focusing system also providing a kind of diversity Terahertz light source optical beam path, comprise diversity terahertz emission source, converged light focusing system light path module, Terahertz detector array, terahertz signal demarcation display module, the terahertz signal that described diversity terahertz emission source is dispersed to described converged light focusing system module; The terahertz signal received is converged to described Terahertz detector array by described converged light focusing system light path module; The terahertz signal of the convergence received is demarcated display module by terahertz signal and is shown in real time by described Terahertz detector array, and the spot size according to display regulates described diversity terahertz emission source.
Described converged light focusing system light path module comprises even number off axis paraboloidal mirror composition and has light path system diverging light being converted to converged light performance.
The technical solution adopted for the present invention to solve the technical problems is: the focusing method also providing a kind of diversity Terahertz light source optical beam path, comprises the following steps:
(1) utilize visible light source to carry out pre-focusing, demarcate visible light source position, remove visible light source, described diversity terahertz emission source is placed in calibration position place;
(2) described diversity terahertz emission source sends the terahertz signal dispersed, and converts parallel terahertz signal to by directional light focusing system, and transfers to described Terahertz detector array;
(3) the parallel terahertz signal received is shown by terahertz signal demarcation display module by described Terahertz detector array in real time, and translation Terahertz detector array regulates the focusing position in described diversity terahertz emission source according to the hot spot of display.
Described step (3) comprises following sub-step: regulate the aperture of Terahertz detector array and position to demonstrate Terahertz hot spot until terahertz signal demarcates display module, Terahertz detector array is fixed on the two focus length place of distance directional light focusing system on photoconduction rail, the array center of described Terahertz detector array and the optical axis coincidence of directional light focusing system, three dimension fine settings are carried out to diversity terahertz emission source, until terahertz signal is demarcated on display module demonstrate Terahertz hot spot, make the stray light spots at edge minimum or disappear, then Terahertz detector array is moved forward and backward on photoconduction rail, repeat above-mentioned steps and demarcate size on display module and position remains unchanged substantially to hot spot at terahertz signal, then illustrate that the position in diversity terahertz emission source is successfully adjusted to the focus place of directional light focusing system, namely the object to the focusing of diversity THz source is reached.
Described amplitude of Terahertz detector array being carried out on photoconduction rail move forward and backward is 0.5 times of focal length of directional light focusing system.
The technical solution adopted for the present invention to solve the technical problems is: the focusing method also providing a kind of diversity Terahertz light source optical beam path, comprises the following steps:
(1) utilize visible light source to carry out pre-focusing, demarcate visible light source position, remove visible light source, described diversity terahertz emission source is placed in calibration position place;
(2) described diversity terahertz emission source sends the terahertz signal dispersed, and converges to described Terahertz detector array by converged light focusing system;
(3) terahertz signal received is shown by terahertz signal demarcation display module by described Terahertz detector array in real time, regulates the focusing position in described diversity terahertz emission source according to the spot size of display.
Described step (3) comprises following sub-step: removed by the camera lens of Terahertz detector array and be placed in the focal plane place of converged light focusing system, the array center of Terahertz detector array overlaps with the focus of converged light focusing system, three dimension fine settings are carried out to diversity terahertz emission source, until demonstrate convergence hot spot, and make convergence facula area minimum, edge is without obvious stray light spots simultaneously, now namely the position in diversity terahertz emission source is the focus of converging light focusing system, thus reaches the object to the focusing of diversity THz source.
Beneficial effect
Owing to have employed above-mentioned technical scheme, the present invention compared with prior art, there is following advantage and good effect: the present invention proposes to utilize the real-time Presentation Function of the regionally detecting of Terahertz detector array, characterize the emergent light spot of diversity THz source, the position of Terahertz light source is oppositely regulated according to hot spot situation, complete accurate focusing, thus simplify focus process.To conventional parallel light path spstem and convergence light path system, the method all can complete the focusing to diversity Terahertz light source, and effective elimination demarcates by visible ray pre-focusing the terahertz light source position error introduced.
Accompanying drawing explanation
Fig. 1 is the structural representation of the inventive method;
Fig. 2 is observability light source pre-focusing system light path schematic diagram;
Fig. 3 is directional light and converged light focusing system light path schematic diagram.
Embodiment
Below in conjunction with specific embodiment, set forth the present invention further.Should be understood that these embodiments are only not used in for illustration of the present invention to limit the scope of the invention.In addition should be understood that those skilled in the art can make various changes or modifications the present invention, and these equivalent form of values fall within the application's appended claims limited range equally after the content of having read the present invention's instruction.
Consult Fig. 1, a kind of focusing method about diversity Terahertz light source optical beam path that the present invention proposes, comprise: diversity terahertz emission source (solid state quantum cascade laser), directional light focusing light path system, converged light focusing light path system, terahertz signal detector array (thermoelectron microarray detector), terahertz signal demarcates display module.
The described diversity terahertz emission source apparatus that is positioned at, on a D translation platform, launches terahertz signal to described directional light focusing light path system or converged light focusing light path system; Described terahertz signal detector array receives the terahertz signal that described diversity terahertz emission source sends, and is then sent to described terahertz signal and demarcates display module; For directional light focusing system, as shown in Figure 3, along emergent light axis (z-axis direction) the mobile Terahertz detector array of off axis paraboloidal mirror PM1, demarcate the situation shown by display module according to described terahertz signal, regulate diversity terahertz emission source to PM1 focus place; For converged light focusing system, as shown in Figure 3, detector is placed in the focal plane place of off axis paraboloidal mirror PM2, makes array center be positioned at PM2 focus place, the situation according to display module, regulate diversity terahertz emission source to PM1 focus place.
Wherein, disperse terahertz emission source described in and be preferably Terahertz quantum cascaded laser in the present embodiment.
What described directional light focusing light path system was preferably that odd number off axis paraboloidal mirror builds has light path diverging light being converted to directional light performance, and this system is made up of 1 off axis paraboloidal mirror PM1, as shown in Figure 3.
Described converged light focusing light path system is preferably even number off axis paraboloidal mirror composition and has light path system diverging light being converted to converged light performance, the off axis paraboloidal mirror PM2 that this system comprises off axis paraboloidal mirror PM1 and coordinates with it, as shown in Figure 3.
Described Terahertz detector array is preferably thermoelectron microarray detector.Normal temperature works, and show in real time, speed is 8 frames/s, and the Terahertz frequency range of response is 1 ~ 7THz, at the noise equivalent power ~ 100pW at 4.2THz place.
Described terahertz signal is demarcated display module and is preferably intensity mode display, shows Terahertz light spot image by computer.
Further preferably, the angle of divergence of Terahertz emitting source is greater than 10 °.
Fig. 3 is directional light and converged light focusing light path system schematic diagram in the present embodiment, and the method specifically comprises the steps:
Step one, visible ray is utilized to carry out light path prealignment, as shown in Figure 2.
For directional light focusing light path system, regulate the optical axis of PM1, make PM1 optical axis parallel with Z-direction.The visible light source dispersed (adopting infrared laser+diaphragm to disperse acquisition) is placed in the focus place of off axis paraboloidal mirror PM1, collect through PM1 and convert directional light to, spot projection is in optical baffle.Fine setting visible light source position, makes on baffle plate, obtain uniform circular light spot; Demarcate the locus of visible light source with probe, then remove visible light source;
For converged light focusing light path system, first regulate the optical axis of PM1 and PM2, make PM1 and PM2 optical axis parallel with Z-direction, the visible light source dispersed (adopting infrared laser+diaphragm to disperse acquisition) is placed in the focus place of off axis paraboloidal mirror PM1, collect through PM1 and convert directional light to, focus different from directional light, adopt off axis paraboloidal mirror PM2 to converge directional light herein, and then presenting visible light spot by optical baffle, optical baffle is placed in PM2 focus place.Then visible light source position is finely tuned, simultaneously that baffle plate is movable along optical axis (Fig. 2 dot-dashed line direction) direction at focus place, make all rounded expansion of visible light spot on baffle plate or reduce change, the distortion (and occurring the situations such as oval change) in change procedure on amorphism; Demarcate the locus of visible light source with probe, then remove visible light source.
Wherein, off axis paraboloidal mirror PM1 and PM2 is all 90 degree of abaxiles, and corresponding parameter is focal length 101.6mm, and basal diameter is 50.8mm; The aperture of the diaphragm is set to 1mm, blocks to obtain diverging light effect with filter paper, demarcates pointer and will produce certain position error.
Step 2, Terahertz emitting source is placed in pointer position, removes pointer, light thz laser device, and in parallel light path, place Terahertz detector array.
For directional light focusing system, regulate detector array centre-height identical with PM1 focus height, in subsequent adjustment process, keep this highly constant, and PM1 optical axis overlaps with array center; For converged light focusing light path system, place terahertz signal detector array (removing camera lens) at PM2 focal plane place, and detector array center overlaps with PM2 focus.
Wherein, THz source is placed in the operation of demarcating locus and produces certain error, light source and PM1 focus are departed from; The working temperature of Terahertz quantum cascaded laser is 10K, and driving voltage is 14.67V, and electric current is 0.39A.For directional light focusing system, Terahertz detector array is placed on the photoconduction rail parallel with Z axis, is convenient to carry out front and back and regulates.The display frame rate of detector is 8 frames/second, and the Terahertz frequency range of response is 1 ~ 7THz, at the noise equivalent power ~ 100pW at 4.2THz place.
Step 3, to show in real time according to detector array hot spot and oppositely regulate diversity THz source to PM1 focal position.
For directional light focusing light path system, regulate detector aperture and position to demonstrating Terahertz hot spot, detector is fixed on distance axis paraboloidal mirror two focus length place on photoconduction rail, array center and off axis paraboloidal mirror optical axis coincidence, three dimension fine settings are carried out to Terahertz light source, until display demonstrates Terahertz hot spot, and the stray light spots at edge is minimum or disappear, and light spot shape is depending on concrete Terahertz light source.Then detector array is carried out on photoconduction rail moving forward and backward (amplitude is 0.5 times of focal length), repeat this step substantially to remain unchanged to hot spot size over the display and position, then illustrate that terahertz light source position is successfully adjusted to off axis paraboloid mirror mirror foci place, namely reaches the object to the focusing of diversity THz source;
For converged light focusing light path system, the camera lens of detector array is removed, and be placed in the focal plane place of off axis paraboloidal mirror, array center overlaps with focus, three dimension fine settings are carried out to Terahertz light source, hot spot and facula area is minimum is converged until demonstrate, edge is without obvious stray light spots (converged light shape of spot is depending on concrete Terahertz light source) simultaneously, now namely the position of THz source is the focus of off axis paraboloidal mirror, thus reaches the object to the focusing of diversity THz source.
Wherein, the calibration mode of Terahertz hot spot is intensity mode, the gray scale namely shown or pseudo color image corresponding be the terahertz signal strength information received; The style characteristic of Terahertz hot spot is depending on concrete THz source.
Be not difficult to find, the present invention proposes to utilize the real-time Presentation Function of the regionally detecting of Terahertz detector array, characterizes the emergent light spot of diversity THz source, oppositely regulates the position of Terahertz light source according to hot spot situation, complete accurate focusing, thus simplify focus process.To conventional parallel light path spstem and convergence light path system, the method all can complete the focusing to diversity Terahertz light source, and effective elimination demarcates by visible ray pre-focusing the terahertz light source position error introduced.

Claims (10)

1. the focusing system of a diversity Terahertz light source optical beam path, comprise diversity terahertz emission source, directional light focusing system light path module, Terahertz detector array, terahertz signal demarcation display module, it is characterized in that, the terahertz signal that described diversity terahertz emission source is dispersed to described directional light focusing system module; Described directional light focusing system receives the terahertz signal that described diversity THz source is launched, and the terahertz signal received is transferred to parallel terahertz signal and be sent to described Terahertz detector array; The parallel terahertz signal received is demarcated display module by terahertz signal and is shown in real time by described Terahertz detector array, and translation Terahertz detector array regulates described diversity terahertz emission source according to the hot spot of display.
2. the focusing system of diversity Terahertz light source optical beam path according to claim 1, is characterized in that, the emission angle in described diversity terahertz emission source is greater than 10 degree.
3. the focusing system of diversity Terahertz light source optical beam path according to claim 1, is characterized in that, described directional light focusing system light path module comprises odd number off axis paraboloidal mirror composition and has light path system diverging light being converted to directional light performance.
4. the focusing system of a diversity Terahertz light source optical beam path, comprise diversity terahertz emission source, converged light focusing system light path module, Terahertz detector array, terahertz signal demarcation display module, it is characterized in that, the terahertz signal that described diversity terahertz emission source is dispersed to described converged light focusing system module; The terahertz signal received is converged to described Terahertz detector array by described converged light focusing system light path module; The terahertz signal of the convergence received is demarcated display module by terahertz signal and is shown in real time by described Terahertz detector array, and the spot size according to display regulates described diversity terahertz emission source.
5. the focusing system of diversity Terahertz light source optical beam path according to claim 4, is characterized in that, described converged light focusing system light path module comprises even number off axis paraboloidal mirror composition and has light path system diverging light being converted to converged light performance.
6. a focusing method for diversity Terahertz light source optical beam path, is characterized in that, comprise the following steps:
(1) utilize visible light source to carry out pre-focusing, demarcate visible light source position, remove visible light source, described diversity terahertz emission source is placed in calibration position place;
(2) described diversity terahertz emission source sends the terahertz signal dispersed, and converts parallel terahertz signal to by directional light focusing system, and transfers to described Terahertz detector array;
(3) the parallel terahertz signal received is shown by terahertz signal demarcation display module by described Terahertz detector array in real time, and translation Terahertz detector array regulates the focusing position in described diversity terahertz emission source according to the hot spot of display.
7. the focusing method of diversity Terahertz light source optical beam path according to claim 6, it is characterized in that, described step (3) comprises following sub-step: regulate the aperture of Terahertz detector array and position to demonstrate Terahertz hot spot until terahertz signal demarcates display module, Terahertz detector array is fixed on the two focus length place of distance directional light focusing system on photoconduction rail, the array center of described Terahertz detector array and the optical axis coincidence of directional light focusing system, three dimension fine settings are carried out to diversity terahertz emission source, until terahertz signal is demarcated on display module demonstrate Terahertz hot spot, make the stray light spots at edge minimum or disappear, then Terahertz detector array is moved forward and backward on photoconduction rail, repeat above-mentioned steps and demarcate size on display module and position remains unchanged substantially to hot spot at terahertz signal, then illustrate that the position in diversity terahertz emission source is successfully adjusted to the focus place of directional light focusing system, namely the object to the focusing of diversity THz source is reached.
8. the focusing method of diversity Terahertz light source optical beam path according to claim 7, is characterized in that, described amplitude of Terahertz detector array being carried out on photoconduction rail move forward and backward is 0.5 times of focal length of directional light focusing system.
9. a focusing method for diversity Terahertz light source optical beam path, is characterized in that, comprise the following steps,
(1) utilize visible light source to carry out pre-focusing, demarcate visible light source position, remove visible light source, described diversity terahertz emission source is placed in calibration position place;
(2) described diversity terahertz emission source sends the terahertz signal dispersed, and converges to described Terahertz detector array by converged light focusing system;
(3) terahertz signal received is shown by terahertz signal demarcation display module by described Terahertz detector array in real time, regulates the focusing position in described diversity terahertz emission source according to the spot size of display.
10. the focusing method of diversity Terahertz light source optical beam path according to claim 9, it is characterized in that, described step (3) comprises following sub-step: removed by the camera lens of Terahertz detector array and be placed in the focal plane place of converged light focusing system, the array center of Terahertz detector array overlaps with the focus of converged light focusing system, three dimension fine settings are carried out to diversity terahertz emission source, until demonstrate convergence hot spot, and make convergence facula area minimum, edge is without obvious stray light spots simultaneously, now namely the position in diversity terahertz emission source is the focus of converging light focusing system, thus the object reached the focusing of diversity THz source.
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