CN108273363A - A kind of attached waste gas containing fluoride processing unit of double suction - Google Patents

A kind of attached waste gas containing fluoride processing unit of double suction Download PDF

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Publication number
CN108273363A
CN108273363A CN201810317382.9A CN201810317382A CN108273363A CN 108273363 A CN108273363 A CN 108273363A CN 201810317382 A CN201810317382 A CN 201810317382A CN 108273363 A CN108273363 A CN 108273363A
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China
Prior art keywords
adsorption chamber
adsorption
waste gas
chamber
gas containing
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CN201810317382.9A
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Chinese (zh)
Inventor
王德军
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Suzhou Shun Environmental Protection Technology Co Ltd
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Suzhou Shun Environmental Protection Technology Co Ltd
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Priority to CN201810317382.9A priority Critical patent/CN108273363A/en
Publication of CN108273363A publication Critical patent/CN108273363A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18Absorbing units; Liquid distributors therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2257/00Components to be removed
    • B01D2257/20Halogens or halogen compounds

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)

Abstract

Include the adsorption chamber positioned at upside being separated by partition board and the cooling chamber positioned at downside the invention discloses a kind of attached waste gas containing fluoride processing unit of double suction;It is staggeredly equipped with slotted plate in the cooling chamber;The adsorption chamber is divided into the first adsorption chamber and the second adsorption chamber by vertically disposed air flue;It is provided with the first air supporting valve between first adsorption chamber and partition board, the first rapid ball is provided in first adsorption chamber;Connect at the top of the air flue and first adsorption chamber, and connected by the second air supporting valve with second adsorption chamber bottom, the second rapid ball is provided in second adsorption chamber.The present invention provides a kind of efficient absorption processing unit suitable for high temperature waste gas containing fluoride, early period good cooling results, the later stage adsorbed using double suction alcove, absorbed more abundant.

Description

A kind of attached waste gas containing fluoride processing unit of double suction
Technical field
The invention belongs to environment protection treatment fields, and in particular to a kind of emission-control equipment more particularly to a kind of double suction is attached contains Fluorine emission-control equipment.
Background technology
Waste gas containing fluoride Treatment process is exactly to remove waste gas containing fluoride by the methods of absorption and sorption.Waste gas containing fluoride refers to containing fluorine The gas for changing hydrogen and ocratation, is mainly derived from industrial processes;The electrolytic aluminium and steelmaking process of metallurgical industry;Chemical work The phosphate fertilizer and fluoroplastics of industry produce;Cupola furnace of foundry industry etc. will discharge a large amount of waste gas containing fluoride.
The main method of purifying waste gas containing fluorine has wet absorption and Dry Adsorption.Dry cleaning processing, is straight with aluminium oxide Absorption hydrogen fluoride is connect, and obtains fluoro-containing alumina.Wet absorption technique system uses liquid absorption method, washes by liquid fluorine-containing useless Gas can reach the purpose of Recovery Purifying.Waste gas absorption in the prior art is mostly directly absorbed, however for the height of generation If warm exhaust gas is also directly absorbed, the problem of absorbing liquid being caused to overheat.When the temperature increases, adsorption effect is deteriorated.Together When, when high-temp waste gas is just contacted with absorbing liquid, or even absorbing liquid can be made to generate slightly boiling, common absorption equipment will produce not The influence of profit.On the other hand, the mass-transfer efficiency of single absorption means need to be improved.
Therefore, it is necessary to develop a kind of efficient absorption processing unit specifically for high temperature waste gas containing fluoride.
Invention content
In order to overcome the above problem, the present invention to provide a kind of efficient absorption processing unit suitable for high temperature waste gas containing fluoride, Early period good cooling results, the later stage adsorbed using double suction alcove, is absorbed more abundant.
The technical solution of the present invention is to provide a kind of attached waste gas containing fluoride processing units of double suction, include being separated by partition board Adsorption chamber positioned at upside and the cooling chamber positioned at downside;Air inlet, the cooling are provided in the lower wall of the cooling chamber Interior is staggeredly equipped with slotted plate, and the upper side wall of the cooling chamber is provided with cycle water inlet, the lower wall of the cooling chamber On be additionally provided with circulating water outlet;The adsorption chamber is divided into the first adsorption chamber and the second absorption by vertically disposed air flue Room;It is provided with the first air supporting valve between first adsorption chamber and partition board, the first rapid ball, institute are provided in first adsorption chamber It states and is provided with the first adsorption liquid entrance at the top of the first adsorption chamber, the first absorption is provided in the lower wall of first adsorption chamber Liquid exports;Connect at the top of the air flue and first adsorption chamber, the air flue passes through second with second adsorption chamber bottom Air supporting valve connects;It is provided with the second rapid ball in second adsorption chamber, the second absorption is provided at the top of second adsorption chamber Liquid entrance, the outlet of the second adsorption liquid is provided in the lower wall of second adsorption chamber, and the upper side wall of second adsorption chamber is set It is equipped with gas outlet.
In a preferred embodiment, the first adsorption liquid entrance and the second adsorption liquid entrance are connected separately with One spray head and the second spray head.First adsorption liquid can be the lower solution of alkalinity, for example, sodium bicarbonate, sodium carbonate, The adsorption liquids such as ammonium hydroxide, second adsorption liquid are the strong base solutions such as potassium hydroxide, sodium hydroxide.It is carried out just by the first adsorption liquid Step absorption, and adsorption effect is strengthened by the second adsorption liquid.
In a preferred embodiment, the bottom of first adsorption chamber is provided with the first rapid ball stand, and described the It is provided with the first filter between one rapid ball stand and first spray head, is set between first filter and the first rapid ball stand It is equipped with the first rapid ball;The bottom of second adsorption chamber is provided with the second rapid ball stand, the described second rapid ball stand and described the It is provided with the second filter between two spray heads, the second rapid ball is provided between second filter and the second rapid ball stand.Work as gas When body ascent rate reaches certain numerical value, bead suspends, and acutely rotation is seethed, and mutually collides, and reaches preferable mass transfer effect Fruit.Correspondingly, the size of the first rapid ball is more than the size of the second rapid ball so that better in the turbulent mass transfer of the second adsorption chamber Obviously.Preferably, the rapid ball is polytetrafluoroethylene (PTFE) rapids ball.Waste gas containing fluoride can be prevented to bead using polytetrafluoroethylene (PTFE) bead Erosion.
In a preferred embodiment, circulating water pipe, recirculated water are connected between the recirculated water entrance and exit Circulating pump is provided on pipe.Cooling water is endlessly passed through in cooling chamber by circulating pump, hot friendship is carried out to high-temp waste gas It changes, high-temp waste gas is made to cool down.
In a preferred embodiment, it is additionally provided with cold-trap on the outside of the circulating water pipe, the cooling after heat exchange Water can make its cooling, and be recycled into cooling chamber and cooled down to high-temp waste gas again again when passing through cold-trap.It is preferred that , the circulating water pipe is arranged by S-shaped or spiral is arranged, and above-mentioned setting can further increase heat transfer area, reinforces cooling Effect.
The beneficial effects of the invention are as follows:
1, the attached waste gas containing fluoride processing unit of double suction of the invention absorb handle when preposition cooling step, reduce high-temp waste gas Damage to absorption equipment.In cooling procedure, by the aperture on sieve plate, high-temp waste gas is dispersed into minute bubbles, with cooling Liquid comes into full contact with, and reaches liquid level across liquid layer, and heat transfer is fully, efficiently so that inputs the temperature of the waste gas containing fluoride of adsorption chamber It is greatly reduced.
2, the attached waste gas containing fluoride processing unit of double suction of the invention is by being arranged double suction alcove, first by big rapids ball and low The alkali adsorption liquid of concentration is tentatively adsorbed, and the effect of microparticle in certain sedimentation gas is also functioned to, and passes through small rapids again Ball and the adsorption liquid of high concentration carry out reinforcement absorption, incremental by dual suction-operated so that mass transfer effect more preferably, is inhaled It is attached more thorough.
3, the attached waste gas containing fluoride processing unit of double suction is simple in structure in the present invention, easy to use, is suitble to heavy industrialization high The processing of warm waste gas containing fluoride.
Description of the drawings
Fig. 1 is schematic structural view of the invention;
Wherein, 1- ontologies, 11- air inlets, the gas outlets 12-, 2- partition boards, 3- adsorption chambers, the first adsorption chambers of 31-, 311- first inhale Attached liquid entrance, the first spray heads of 312-, the first filters of 313-, the rapid balls of 314- first, the rapid ball stands of 315- first, 316- first inhale Attached liquid exports, 317- the first air supporting valves, the second adsorption chambers of 32-, 321- the second adsorption liquid entrances, the second nozzles of 322-, 323- the Two filters, the rapid balls of 324- second, the rapid ball stands of 325- second, the outlet of the second adsorption liquids of 326-, 327- the second air supporting valves, 33- gas Road, 4- cooling chambers, 41- slotted plates, 42- cycle water inlets, 43- circulating water outlets, 44- circulating water pipes, 45- cold-traps, 46- are followed Ring pumps.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, being a kind of attached waste gas containing fluoride processing unit of double suction of the present invention, wherein at the attached waste gas containing fluoride of double suction Reason device body 1 includes the adsorption chamber 3 positioned at upside being separated by partition board 2 and the cooling chamber 4 positioned at downside;Cooling chamber 4 Lower wall on be provided with air inlet 11, be horizontally staggered in cooling chamber 4 and be provided with 6 pieces of slotted plates 41, the upper side wall of cooling chamber 4 It is provided with cycle water inlet 42, circulating water outlet 43 is additionally provided in the lower wall of cooling chamber 4;
Adsorption chamber 3 is divided into the first adsorption chamber 31 and the second adsorption chamber 32 by vertically disposed air flue 33;
It is provided with the first air supporting valve 317 between first adsorption chamber 31 and partition board 2, the first rapid ball is provided in the first adsorption chamber 31 314, the top of the first adsorption chamber 31 is provided with the first adsorption liquid entrance 311, and is provided in the lower wall of the first adsorption chamber 31 One adsorption liquid outlet 316;Air flue 33 connects with 31 top of the first adsorption chamber, and passes through the second air supporting with 32 bottom of the second adsorption chamber Valve 327 connects;Second rapid ball 324 of the size less than the first rapid ball 314 is provided in second adsorption chamber 32, the second adsorption chamber 32 Top is provided with the second adsorption liquid entrance 321, and the second adsorption liquid outlet 326 is provided in the lower wall of the second adsorption chamber 32, the The upper side wall of two adsorption chambers 326 is provided with gas outlet 12.
Further, the first adsorption liquid entrance 311 and the second adsorption liquid entrance 312 are connected separately with the first spray head 312 With the second spray head 322.Further, the bottom of the first adsorption chamber 31 is provided with the first rapid ball stand 315, the first rapid ball branch It is provided with the first filter 313 between frame 315 and the first spray head 312, is set between the first filter 313 and the first rapid ball stand 315 It is equipped with the first rapid ball 314;The bottom of second adsorption chamber 32 is provided with the second rapid ball stand 325, the second rapid ball stand 325 and second It is provided with the second filter 323 between spray head 322, the second rapid ball is provided between the second filter 323 and the second rapid ball stand 325 324.Wherein, 314 and second rapid ball 324 of the first rapid ball is polytetrafluoroethylene (PTFE) rapids ball.
It is connected with circulating water pipe 44 between cycle water inlet 42 and circulating water outlet 43, cold-trap is provided on circulating water pipe 44 45, circulating pump 46 is provided between cold-trap 45 and circulating water outlet 43.
Further, the S-shaped distribution in cold-trap 45 of circulating water pipe 44.
The operation principle of the attached waste gas containing fluoride processing unit of double suction of the present invention is:High temperature waste gas containing fluoride is entered by air inlet Cooling chamber becomes minute bubbles to floating by the effect of slotted plate in cooling chamber, meanwhile, it will be through supercooling by circulating pump The cooling water of trap is passed through in cooling chamber, and heat exchange is completed with the minute bubbles that exhaust gas is formed.Exhaust gas is gathered at the top of cooling chamber, when When pressure reaches restriction numerical value, goes out the first air supporting valve and tentatively adsorbed into the first adsorption chamber, when the pressure drops, the One air supporting valve is closed immediately, prevents the first adsorption liquid from entering lower layer's cooling chamber.Gas into the first adsorption chamber floats upwards, with The the first adsorption liquid effect sprayed out, completes the initial absorption of fluorine, and then entering second by air flue and the second air supporting valve inhales Alcove carries out secondary hardening absorption in the second adsorption chamber, then is discharged by top gas outlet.The purifying processing device of the present invention It is suitable for high temperature waste gas containing fluoride, avoids injury of the high-temp waste gas to absorption tower, and adsorbed twice using double suction alcove, follow Sequence is progressive, increases the efficiency of absorption waste gas containing fluoride.
The above example only one such embodiment of the present invention, the description thereof is more specific and detailed, but can not Therefore it is interpreted as the limitation to the scope of the claims of the present invention.It should be pointed out that for those of ordinary skill in the art, Without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection model of the present invention It encloses.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (8)

1. a kind of attached waste gas containing fluoride processing unit of double suction, it is characterised in that:It include the suction positioned at upside being separated by partition board Alcove and cooling chamber positioned at downside;
It is provided with air inlet in the lower wall of the cooling chamber, slotted plate, the cooling are staggeredly equipped in the cooling chamber The upper side wall of room is provided with cycle water inlet, and circulating water outlet is additionally provided in the lower wall of the cooling chamber;
The adsorption chamber is divided into the first adsorption chamber and the second adsorption chamber by vertically disposed air flue;
It is provided with the first air supporting valve between first adsorption chamber and partition board, the first rapid ball is provided in first adsorption chamber, It is provided with the first adsorption liquid entrance at the top of first adsorption chamber, the first suction is provided in the lower wall of first adsorption chamber Attached liquid exports;
Connect at the top of the air flue and first adsorption chamber, the air flue passes through the second air supporting with second adsorption chamber bottom Valve connects;
It is provided with the second rapid ball in second adsorption chamber, the second adsorption liquid entrance is provided at the top of second adsorption chamber, The outlet of the second adsorption liquid is provided in the lower wall of second adsorption chamber, the upper side wall of second adsorption chamber is provided with outlet Mouthful.
2. the attached waste gas containing fluoride processing unit of double suction according to claim 1, it is characterised in that:The first adsorption liquid entrance It is connected separately with the first spray head and the second spray head with the second adsorption liquid entrance.
3. the attached waste gas containing fluoride processing unit of double suction according to claim 1, it is characterised in that:The size of described first rapid ball More than the size of the second rapid ball.
4. the attached waste gas containing fluoride processing unit of double suction according to claim 1, it is characterised in that:The bottom of first adsorption chamber Portion is provided with the first rapid ball stand, and the first filter is provided between the described first rapid ball stand and first spray head, described The first rapid ball is provided between first filter and the first rapid ball stand;The bottom of second adsorption chamber is provided with the second rapid ball branch Frame is provided with the second filter, second filter and the second rapid ball between the described second rapid ball stand and second spray head The second rapid ball is provided between holder.
5. the attached waste gas containing fluoride processing unit of double suction according to claim 1, it is characterised in that:The rapids ball is polytetrafluoroethyl-ne Alkene rapids ball.
6. the attached waste gas containing fluoride processing unit of double suction according to claim 1, it is characterised in that:The cycle water inlet and go out It is connected with circulating water pipe between mouthful, circulating pump is provided on circulating water pipe.
7. the attached waste gas containing fluoride processing unit of double suction according to claim 6, it is characterised in that:On the outside of the circulating water pipe also It is provided with cold-trap.
8. the attached waste gas containing fluoride processing unit of double suction according to claim 7, it is characterised in that:The circulating water pipe passes through S Shape is arranged or spiral setting.
CN201810317382.9A 2018-04-10 2018-04-10 A kind of attached waste gas containing fluoride processing unit of double suction Pending CN108273363A (en)

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Application Number Priority Date Filing Date Title
CN201810317382.9A CN108273363A (en) 2018-04-10 2018-04-10 A kind of attached waste gas containing fluoride processing unit of double suction

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Application Number Priority Date Filing Date Title
CN201810317382.9A CN108273363A (en) 2018-04-10 2018-04-10 A kind of attached waste gas containing fluoride processing unit of double suction

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CN108273363A true CN108273363A (en) 2018-07-13

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109435094A (en) * 2018-09-30 2019-03-08 淮阴工学院 A kind of environmental protection mixer system
CN110618237A (en) * 2019-09-23 2019-12-27 东北大学 Fluorine concentration measuring device, fluorine concentration measuring method, and method for measuring adsorption efficiency of adsorbent
CN112495167A (en) * 2020-11-11 2021-03-16 衡阳丰联精细化工有限公司 Turbulent ball tower convenient to desulfurization

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1299334A (en) * 1970-02-27 1972-12-13 Katashi Aoi Industrial waste gas purification system
CN2467168Y (en) * 2001-03-07 2001-12-26 陈绍安 Comprehensive waste gas purifying tower
CN203944281U (en) * 2014-07-08 2014-11-19 孙悦 Flue gas desulfur device
CN204027904U (en) * 2014-06-06 2014-12-17 上海中冶横天自动化工程有限公司 Water elution naphthalene device
CN205886531U (en) * 2016-06-30 2017-01-18 长沙赛恩斯环保工程技术有限公司 Acid mist absorption system device
CN106552467A (en) * 2015-09-30 2017-04-05 中国石油化工股份有限公司 A kind of processing method and processing device of butadiene-styrene rubber drying baker waste gas
CN208771139U (en) * 2018-04-10 2019-04-23 苏州舜沃环保科技有限公司 A kind of attached waste gas containing fluoride processing unit of double suction

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1299334A (en) * 1970-02-27 1972-12-13 Katashi Aoi Industrial waste gas purification system
CN2467168Y (en) * 2001-03-07 2001-12-26 陈绍安 Comprehensive waste gas purifying tower
CN204027904U (en) * 2014-06-06 2014-12-17 上海中冶横天自动化工程有限公司 Water elution naphthalene device
CN203944281U (en) * 2014-07-08 2014-11-19 孙悦 Flue gas desulfur device
CN106552467A (en) * 2015-09-30 2017-04-05 中国石油化工股份有限公司 A kind of processing method and processing device of butadiene-styrene rubber drying baker waste gas
CN205886531U (en) * 2016-06-30 2017-01-18 长沙赛恩斯环保工程技术有限公司 Acid mist absorption system device
CN208771139U (en) * 2018-04-10 2019-04-23 苏州舜沃环保科技有限公司 A kind of attached waste gas containing fluoride processing unit of double suction

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
上海第一医学院: "环境卫生学", 人民卫生出版社, pages: 288 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109435094A (en) * 2018-09-30 2019-03-08 淮阴工学院 A kind of environmental protection mixer system
CN110618237A (en) * 2019-09-23 2019-12-27 东北大学 Fluorine concentration measuring device, fluorine concentration measuring method, and method for measuring adsorption efficiency of adsorbent
CN112495167A (en) * 2020-11-11 2021-03-16 衡阳丰联精细化工有限公司 Turbulent ball tower convenient to desulfurization
CN112495167B (en) * 2020-11-11 2023-07-28 衡阳丰联精细化工有限公司 Turbulent ball tower convenient to desulfurization

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