CN108269656A - Meta Materials manufacturing method - Google Patents
Meta Materials manufacturing method Download PDFInfo
- Publication number
- CN108269656A CN108269656A CN201611270527.1A CN201611270527A CN108269656A CN 108269656 A CN108269656 A CN 108269656A CN 201611270527 A CN201611270527 A CN 201611270527A CN 108269656 A CN108269656 A CN 108269656A
- Authority
- CN
- China
- Prior art keywords
- composite substrate
- soft template
- meta materials
- ots
- assembled monolayers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Shaping Of Tube Ends By Bending Or Straightening (AREA)
Abstract
The present invention relates to a kind of Meta Materials manufacturing methods, include the following steps：A, the micro-structure of preparation and Meta Materials has the soft template of opposite pattern；B, the OTS self-assembled monolayers that there are case identical patterns with micro-structure are formed in the soft template；C, composite substrate is prepared, and to composite substrate put forward the process of high surface energy；D, the OTS self-assembled monolayers side of the soft template with OTS self-assembled monolayers formed in step b is closely attached into step c composite substrate on the surface after process, and kept for certain time, until OTS self-assembled monolayers are transferred to from soft template on composite substrate, then soft template is removed, patterning composite substrate is prepared；E, gold nano grain is deposited in the non-area of the pattern of patterning composite substrate, forms micro structured pattern.The manufacturing method exploitativeness of the Meta Materials is strong, and manufacture efficiency is high, and the micro-structure structure size obtained is accurate, has fabulous electromagnetism individual features.
Description
Technical field
The present invention relates to Meta Materials technical field, more particularly, to a kind of Meta Materials manufacturing method.
Background technology
Meta Materials processing at present mainly relies on photoetching technique and other tablet etching technics (such as ion beam etchings, electricity
Beamlet etching, X-ray etching etc.).Compared to these technologies, silk-screen printing, inkjet printing etc. prepare super material by solution processing
Material, can be more potential Meta Materials manufacturing process with roll-to-roll process compatibles.
Meta Materials are made of media substrate and micro-structure, and the key technology of Meta Materials manufacture is the processing of micro-structure, existing
Manufacturing process there are the defects of it is as follows：
(1) although photoetching and tablet etching technics high precision machining, cost is very high, and complex process.Except this it
Outside, offset printing is difficult to realize the processing of metamaterial microstructure on flexible parent metal, thus limits Meta Materials in specific area (such as
Curved surface and special surface) application.
(2) silk-screen printing and inkjet printing technology can realize prepared by large area Meta Materials, it also requires the instrument that cost is higher
Device (high-precision silk screen printing machine, high-precision ink-jet printer).
To sum up, there are processing charges is high, exploitativeness is poor and the low grade of machining accuracy lacks for existing Meta Materials manufacture craft
Point, it is impossible to meet the requirement of Meta Materials technology.
Invention content
In view of this, strong the purpose of the present invention is to provide exploitativeness, manufacture efficiency is high, and the micro-structure knot obtained
Structure size is accurate, has the Meta Materials manufacturing method of fabulous electromagnetism individual features.
A kind of Meta Materials manufacturing method is provided according to the present invention, is included the following steps：
A, the micro-structure of preparation and Meta Materials has the soft template of opposite pattern；
B, the OTS self-assembled monolayers that there is same microstructure pattern with the soft template are formed in the soft template；
C, composite substrate is prepared, and to the composite substrate put forward the process of high surface energy；
D, the OTS self-assembled monolayers side of the soft template with OTS self-assembled monolayers formed in step b is closely attached
Into step c, composite substrate is on the surface after process, and is kept for certain time, until the OTS self-assembled monolayers are certainly
The soft template is transferred on the composite substrate, then removes the soft template, and patterning composite substrate is prepared；
E, gold nano grain is deposited in the non-area of the pattern of the patterning composite substrate, forms the micro-structure figure
Case；Wherein,
Meet substrate described in after putting forward high surface energy process has higher surface energy with respect to the surface of soft template,
So that in step d, OTS self-assembled monolayers can be transferred to from the soft template on the composite substrate.
Preferably, the soft template is PDMS templates.
Preferably, the step b is further comprising the steps of：
Prepare OTS- hexane solutions；
The OTS- hexane solutions of preparation are applied in the soft template, and solvent composition is made to volatilize completely, thus
OTS self-assembled monolayers are formed in the soft template.
Preferably, when preparing OTS- hexane solutions, the volume ratio of OTS and n-hexane is 0.5：1000-2:1000.
Preferably, the step c is further comprising the steps of：
When preparing the composite substrate, epoxy resin and glass fibre prepreg are sequentially stacked multilayer, and adjacent
In 90 jiaos of layings between the epoxy resin of layer and glass fibre prepreg；
The multilayer epoxy resin laid and glass fibre prepreg are cured.
Preferably, when the multilayer epoxy resin laid and glass fibre prepreg being cured, at 100 DEG C -140 DEG C
At a temperature of, it is carried out continuously the curing of 3-7 hours.
Preferably, in the step c, when carrying out putting forward the process of high surface energy to the composite substrate, using etc.
The gas ions treatment technology surface to be patterned to the composite substrate is handled.
Preferably, in the step d,
The OTS self-assembled monolayers side of soft template with OTS self-assembled monolayers is closely attached into the composite substrate
After on surface after process, the attaching time of 3-5 minutes need to be kept, then removes the soft template.
Preferably, the step e is further comprising the steps of：
A certain amount of gold nano grain is weighed, is added into acetone, gold nano grain-acetone soln is made, and carry out one
The long ultrasonic disperse of timing；
By gold nano dispersed liquid coating obtained in the composite substrate surface, and solvent composition is made to volatilize completely, so as to
Gold nano grain is made to be deposited in the non-area of the pattern of the patterning composite substrate.
Preferably, the mass concentration of the gold nano grain-acetone soln is 0.05-3g/ml.
Preferably, by gold nano dispersed liquid coating obtained when the composite substrate surface, using spin coating or drop coating
Mode.
Meta Materials manufacturing method in the application, by technical process so that between soft template and composite substrate, with
It is and different with larger surface energy differential between OTS assembled layers and composite substrate so that the preparation process exploitativeness of Meta Materials is strong,
Manufacture efficiency is high, and the micro-structure structure size obtained is accurate, has fabulous electromagnetism individual features.
Description of the drawings
By referring to the drawings to the description of the embodiment of the present invention, above-mentioned and other purposes of the invention, feature and
Advantage will be apparent from.
Fig. 1 respectively illustrates Meta Materials according to embodiments of the present invention and prepares the structure of the soft template pre-mated of Meta Materials
Schematic diagram.
Fig. 2 shows the structure diagrams of Meta Materials according to embodiments of the present invention.
Fig. 3 shows the structure diagram of soft template according to embodiments of the present invention.
Fig. 4 shows the flow chart of Meta Materials manufacturing method according to embodiments of the present invention.
In figure：Meta Materials 1, soft template 2, substrate 11, microstructured layers 12, split ring resonator 131, groove 21.
Specific embodiment
Hereinafter reference will be made to the drawings is more fully described various embodiments of the present invention.In various figures, identical element
It is represented using same or similar reference numeral.For the sake of clarity, the various pieces in attached drawing are not necessarily to scale.
As shown in Figs. 1-3, which includes a substrate 11 and the microstructured layers 12 on the substrate 11.It is described micro-
Structure sheaf 12 includes metal micro structure pattern.The micro structured pattern includes multiple pattern units, and multiple pattern units are according to pre-
Determine regular array, form the structure with specific electromagnetic response characteristic.In this embodiment, the multiple pattern unit is respectively
Split ring resonator 131.
Fig. 4 shows the flow chart of Meta Materials manufacturing method according to embodiments of the present invention.As shown in figure 4, Meta Materials 1
Preparation process is as shown in step S01-S05.It please also refer to attached drawing 1-3, lower mask body 1 is carried out to embodiment 3 in conjunction with the embodiments
It is described in detail.
Embodiment 1：
In step S01, referring to Fig. 1, preparing with the soft template 2 with the micro-structure opposite pattern of Meta Materials 1.
Specifically, the soft template 2 is PDMS templates, by PDMS, i.e. polydimethyl siloxane material is made, and has preferable
Flexibility, and can with relatively low surface so that its surface has the materials such as such as octadecyl trichlorosilane alkane (OTS)
Smaller adhesive force.The preparation of the soft template 2 can be used photolithography method and be formed and micro-structure phase on a hard substrate surface
Anti- pattern, the pattern opposite with micro-structure of the present embodiment refer to set patterned photoresist on hard substrate surface,
Wherein leave blank with the corresponding part of micro-structure, and other parts are set as photoresist.As shown in figure 3, on hard substrate surface
The pattern of upper formation is the recessed of multiple open annulars limited by photoresist for matching with 131 geomery of split ring resonator
Slot 21.After obtaining the hard substrate with patterning photoresist, as the primary template of stamp transfer.Then in band
The hard substrate surface for having patterning photoresist applies organic PDMS material, can be made into after vacuum dried.
In step S02, the OTS that there is same microstructure pattern with the soft template is formed in the soft template 2 certainly
Assemble individual layer.
Specifically, the step includes the following steps again：
S021 it is), 0.5 according to the volume ratio of OTS and n-hexane：1000 ratio prepares OTS- hexane solutions；
S022), the OTS- hexane solutions of preparation are applied to, such as are instiled on the pattern of the soft template 2, at this
It is the other parts shown in Fig. 3 in addition to the groove 21 of open annular in embodiment.And solvent composition is made to volatilize completely, thus
OTS self-assembled monolayers are formed in the soft template 2.
In step S03, composite substrate 11 is prepared, and the composite substrate 11 carry at the technique of high surface energy
Reason.
Specifically, include the following steps again：
S031), when preparing the composite substrate 11, epoxy resin and glass fibre prepreg are alternately superimposed on multilayer,
And in 90 jiaos of layings, the i.e. epoxy resin and glass fibers of adjacent layer between the epoxy resin of adjacent layer and glass fibre prepreg
Laying crisscross each other between dimension prepreg；The multilayer epoxy resin laid and glass fibre prepreg are placed in vacuum
In environment, such as in vacuum bag, and at a temperature of 100 DEG C, the curing process of 3 hours is carried out；
S032), when carrying out putting forward the process of high surface energy to the composite substrate 11, using plasma processing skill
The art surface to be patterned to the composite substrate 11 is handled, to improve the surface of the composite substrate 11 energy, so as to
Improve the adhesive force on its surface, such as the adhesive force to OTS.After treatment, the surface of the composite substrate 11 can carry significantly
Height, relatively described soft template 2 have surface more can discrimination.
In step S04, by the OTS self assembly lists of the soft template 2 with OTS self-assembled monolayers formed in step S02
Layer side closely attaches in step S03 composite substrate 11 on the surface after process, and is kept for 3 minutes, until described
OTS self-assembled monolayers are transferred to from the soft template 2 on the composite substrate 11, are then removed the soft template 2, are prepared
Pattern composite substrate 11.
In this step, since soft template 2 is different with larger surface energy differential with composite substrate 11 so that the OTS is certainly
Individual layer is assembled from after being transferred on the composite substrate 11 soft template 2, is easier to be separated with the soft template 2, from
Without sticking together.
In step S05, gold nano grain is deposited in the non-area of the pattern of the patterning composite substrate 11, is formed
The micro structured pattern.
Specifically, the step includes the following steps again：
S051 a certain amount of gold nano grain), is weighed, is added into acetone, the gold that mass concentration is 0.05g/ml is made
Nano particle-acetone soln, and carry out the ultrasonic disperse of certain time length；
S052), by gold nano dispersed liquid coating obtained in 11 surface of composite substrate, and solvent composition is made to wave completely
Hair, so as to which gold nano grain be made to be deposited on 11 surface of composite substrate.The coated technique concretely spin coating or drop coating.
In this step, due to the larger difference of the composite substrate 11 and OTS self-assembled monolayers surface energy, gold particle meeting
Spontaneous deposition is in the surface of the patterning composite substrate 11 with stronger surface energy in patterned groove 21, i.e., by gold nano
After particle is deposited in the patterned groove 21 of the patterning composite substrate 11, formed in crystallizing field it is as shown in Figure 2 by
The microstructured layers 12 that golden material is formed.Patterning size is accurate, so that Meta Materials 1 have excellent electromagnetism individual features
Meta Materials 1.In this embodiment, the micro structured pattern is specially multiple 131 patterns of split ring resonator.
Embodiment 2：
In step S01, prepare with the soft template 2 with the micro-structure opposite pattern of Meta Materials 1.
Specifically, the soft template 2 is PDMS templates, by PDMS, i.e. polydimethyl siloxane material is made, and has preferable
Flexibility, and can with relatively low surface so that its surface has the materials such as such as octadecyl trichlorosilane alkane (OTS)
Smaller adhesive force.The preparation of the soft template 2 can be used photolithography method and be formed and micro-structure phase on a hard substrate surface
Anti- pattern, the pattern opposite with micro-structure of the present embodiment refer to set patterned photoresist on hard substrate surface,
Wherein leave blank with the corresponding part of micro-structure, and other parts are set as photoresist in this embodiment, in hard substrate table
The pattern formed on face is the multiple open annulars limited by photoresist to match with 131 geomery of split ring resonator
Groove 21.After obtaining the hard substrate with patterning photoresist, as the primary template of stamp transfer.Then
Organic PDMS material is applied on the hard substrate surface with patterning photoresist, can be made into after vacuum dried.
In step S02, the OTS that there is same microstructure pattern with the soft template is formed in the soft template 2 certainly
Assemble individual layer.
Specifically, the step includes the following steps again：
S021 it is), 1 according to the volume fraction of OTS and n-hexane：1000 ratio prepares OTS- hexane solutions；
S022), the OTS- hexane solutions of preparation are applied to, such as are instiled on 2 pattern of soft template.In the reality
Apply in example and be the other parts as shown in Figure 3 in addition to the groove 21 of open annular and solvent composition is made to volatilize completely, so as to
OTS self-assembled monolayers are formed in the soft template 2.
In step S03, composite substrate 11 is prepared, and the composite substrate 11 carry at the technique of high surface energy
Reason.
Specifically, include the following steps again：
S031), when preparing the composite substrate 11, epoxy resin and glass fibre prepreg are alternately superimposed on multilayer,
And in 90 jiaos of layings, the i.e. epoxy resin and glass fibers of adjacent layer between the epoxy resin of adjacent layer and glass fibre prepreg
Laying crisscross each other between dimension prepreg；The multilayer epoxy resin laid and glass fibre prepreg are placed in vacuum
In environment, such as in vacuum bag, and at a temperature of 125 DEG C, the curing process of 5 hours is carried out；
S032), when carrying out putting forward the process of high surface energy to the composite substrate 11, using plasma processing skill
The art surface to be patterned to the composite substrate 11 is handled, to improve the surface of the composite substrate 11 energy, so as to
Improve the adhesive force on its surface, such as the adhesive force to OTS.After treatment, the surface of the composite substrate 11 can carry significantly
Height, relatively described soft template 2 have surface more can discrimination.
In step S04, by the OTS self assembly lists of the soft template 2 with OTS self-assembled monolayers formed in step S02
Layer side closely attaches in step S03 composite substrate 11 on the surface after process, and is kept for 5 minutes, until described
OTS self-assembled monolayers are transferred to from the soft template 2 on the composite substrate 11, are then removed the soft template 2, are prepared
Pattern composite substrate 11.
In this step, since soft template 2 is different with larger surface energy differential with composite substrate 11 so that the OTS is certainly
Individual layer is assembled from after being transferred on the composite substrate 11 soft template 2, is easier to be separated with the soft template 2, from
Without sticking together.
In step S05, gold nano grain is deposited in the non-area of the pattern of the patterning composite substrate 11, is formed
The micro structured pattern.
Specifically, the step includes the following steps again：
S051 a certain amount of gold nano grain), is weighed, is added into acetone, the Jenner that mass concentration is 1.5g/ml is made
Rice grain-acetone soln, and carry out the ultrasonic disperse of certain time length；
S052), by gold nano dispersed liquid coating obtained in 11 surface of composite substrate, and solvent composition is made to wave completely
Hair, so as to which gold nano grain be made to be deposited on 11 surface of composite substrate.The coated technique concretely spin coating or drop coating.
In this step, due to the larger difference of the composite substrate 11 and OTS self-assembled monolayers surface energy, gold particle meeting
Spontaneous deposition, i.e., will be golden in the surface of the patterning composite substrate 11 with stronger surface energy in patterned 21 region of groove
Nanoparticle deposition is formed as shown in Figure 2 after in the patterned groove 21 of the patterning composite substrate 11 in crystallizing field
The microstructured layers 12 formed by golden material.Patterning size is accurate, so as to obtain with excellent electromagnetism individual features
Meta Materials 1.In this embodiment, the micro structured pattern is specially multiple 131 patterns of split ring resonator.
Embodiment 3：
In step S01, prepare with the soft template 2 with the micro-structure opposite pattern of Meta Materials 1.
Specifically, the soft template 2 is PDMS templates, by PDMS, i.e. polydimethyl siloxane material is made, and has preferable
Flexibility, and can with relatively low surface so that its surface has the materials such as such as octadecyl trichlorosilane alkane (OTS)
Smaller adhesive force.The preparation of the soft template 2 can be used photolithography method and be formed and micro-structure phase on a hard substrate surface
Anti- pattern, the pattern opposite with micro-structure of the present embodiment refer to set patterned photoresist on hard substrate surface,
Wherein leave blank with the corresponding part of micro-structure, and other parts are set as photoresist as shown in figure 3, on hard substrate surface
The pattern processed is the recessed of multiple open annulars limited by photoresist for matching with 131 geomery of split ring resonator
Slot 21.After obtaining the hard substrate with patterning photoresist, as the primary template of stamp transfer.Then in band
The hard substrate surface for having patterning photoresist applies organic PDMS material, can be made into after vacuum dried.
In step S02, the OTS that there is same microstructure pattern with the soft template is formed in the soft template from group
Fill individual layer.Specifically, the step includes the following steps again：
S021 it is), 2 according to the volume fraction of OTS and n-hexane：1000 ratio prepares OTS- hexane solutions；
S022), the OTS- hexane solutions of preparation are applied to, such as are instiled on the pattern of the soft template 2.At this
It is the other parts shown in Fig. 3 in addition to the groove 21 of open annular in embodiment.And solvent composition is made to volatilize completely, thus
OTS self-assembled monolayers are formed in the soft template 2.
In step S03, composite substrate 11 is prepared, and the composite substrate 11 carry at the technique of high surface energy
Reason.
Specifically, include the following steps again：
S031), when preparing the composite substrate 11, epoxy resin and glass fibre prepreg are alternately superimposed on multilayer,
And in 90 jiaos of layings, the i.e. epoxy resin and glass fibers of adjacent layer between the epoxy resin of adjacent layer and glass fibre prepreg
Laying crisscross each other between dimension prepreg；The multilayer epoxy resin laid and glass fibre prepreg are placed in vacuum
In environment, such as in vacuum bag, and at a temperature of 140 DEG C, the curing process of 7 hours is carried out；
S032), when carrying out putting forward the process of high surface energy to the composite substrate 11, using plasma processing skill
The art surface to be patterned to the composite substrate 11 is handled, to improve the surface of the composite substrate 11 energy, so as to
Improve the adhesive force on its surface, such as the adhesive force to OTS.After treatment, the surface of the composite substrate 11 can carry significantly
Height, relatively described soft template 2 have surface more can discrimination.
In step S04, by the OTS self assembly lists of the soft template 2 with OTS self-assembled monolayers formed in step S02
Layer side closely attaches in step S03 composite substrate 11 on the surface after process, and is kept for 7 minutes, until described
OTS self-assembled monolayers are transferred to from the soft template 2 on the composite substrate 11, are then removed the soft template 2, are prepared
Pattern composite substrate 11.
In this step, since soft template 2 is different with larger surface energy differential with composite substrate 11 so that the OTS is certainly
Individual layer is assembled from after being transferred on the composite substrate 11 soft template 2, is easier to be separated with the soft template 2, from
Without sticking together.
In step S05, gold nano grain is deposited in the non-area of the pattern of the patterning composite substrate 11, is formed
The micro structured pattern.
Specifically, the step includes the following steps again：
S051 a certain amount of gold nano grain), is weighed, is added into acetone, the gold nano that mass concentration is 2g/ml is made
Particle-acetone soln, and carry out the ultrasonic disperse of certain time length；
S052), by gold nano dispersed liquid coating obtained in 11 surface of composite substrate, and solvent composition is made to wave completely
Hair, so as to which gold nano grain be made to be deposited on 11 surface of composite substrate.The coated technique concretely spin coating or drop coating.
In this step, due to the larger difference of the composite substrate 11 and OTS self-assembled monolayers surface energy, gold particle meeting
Spontaneous deposition is in the surface of the patterning composite substrate 11 with stronger surface energy in patterned groove 21, i.e., by gold nano
After particle is deposited in the patterned groove 21 of the patterning composite substrate 11, formed in crystallizing field as shown in Figure 2 by gold
The microstructured layers 12 that material is formed.So as to obtain the Meta Materials 1 with excellent electromagnetism individual features.In this embodiment, institute
It is specially multiple 131 patterns of split ring resonator to state micro structured pattern.
Meta Materials manufacturing method in the application, by technical process so that soft template 2 and composite substrate 11 it
Between and OTS assembled layers and composite substrate 11 between have the larger surface energy differential different so that the preparation process of Meta Materials 1 can
Implementation is strong, and manufacture efficiency is high, and the micro-structure structure size obtained is accurate, has fabulous electromagnetism individual features.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any this practical relationship or sequence.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only will including those
Element, but also including other elements that are not explicitly listed or further include as this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
Also there are other identical elements in process, method, article or equipment including the element.
Finally it should be noted that：Obviously, the above embodiment is merely an example for clearly illustrating the present invention, and simultaneously
The non-restriction to embodiment.For those of ordinary skill in the art, it can also do on the basis of the above description
Go out other various forms of variations or variation.There is no necessity and possibility to exhaust all the enbodiments.And thus drawn
The obvious changes or variations that Shen goes out are still in the protection scope of this invention.
Claims (11)
1. a kind of Meta Materials manufacturing method, which is characterized in that include the following steps：
A, it prepares with the soft template with the micro-structure opposite pattern of Meta Materials；
B, the OTS self-assembled monolayers that there is same microstructure pattern with the soft template are formed in the soft template；
C, composite substrate is prepared, and to the composite substrate put forward the process of high surface energy；
D, the OTS self-assembled monolayers side of the soft template with OTS self-assembled monolayers formed in step b is closely attached into step
Composite substrate is on the surface after process in rapid c, and is kept for certain time, until the OTS self-assembled monolayers are described in
Soft template is transferred on the composite substrate, then removes the soft template, and patterning composite substrate is prepared；
E, gold nano grain is deposited in the non-area of the pattern of the patterning composite substrate, forms the micro structured pattern.
2. Meta Materials manufacturing method according to claim 1, which is characterized in that the soft template is PDMS templates.
3. Meta Materials manufacturing method according to claim 1, which is characterized in that the step b is further comprising the steps of：
Prepare OTS- hexane solutions；
The OTS- hexane solutions of preparation are applied in the soft template, and solvent composition is made to volatilize completely, so as to described
OTS self-assembled monolayers are formed in soft template.
4. Meta Materials manufacturing method according to claim 3, which is characterized in that when preparing OTS- hexane solutions, OTS
Volume ratio with n-hexane is 0.5：1000-2:1000.
5. Meta Materials manufacturing method according to claim 1, which is characterized in that the step c is further comprising the steps of：
When preparing the composite substrate, epoxy resin and glass fibre prepreg are alternately superimposed on multilayer, and adjacent layer
In 90 jiaos of layings between epoxy resin and glass fibre prepreg；
The multilayer epoxy resin laid and glass fibre prepreg are cured.
6. Meta Materials manufacturing method according to claim 5, which is characterized in that the multilayer epoxy resin and glass that will be laid
When glass fiber prepreg material is cured, at a temperature of 100 DEG C -140 DEG C, it is carried out continuously the curing of 3-7 hours.
7. Meta Materials manufacturing method according to claim 1, which is characterized in that in the step c, to the composite base
When plate carries out putting forward the process of high surface energy, the using plasma treatment technology surface to be patterned to the composite substrate
It is handled.
8. Meta Materials manufacturing method according to claim 1, which is characterized in that in the step d,
The OTS self-assembled monolayers side of soft template with OTS self-assembled monolayers is closely attached into the composite substrate through work
It after on skill treated surface, is kept for the attaching time of 3-5 minutes, then removes the soft template.
9. Meta Materials manufacturing method according to claim 1, which is characterized in that the step e is further comprising the steps of：
A certain amount of gold nano grain is weighed, is added into acetone, when gold nano grain-acetone soln is made, and carrying out certain
Long ultrasonic disperse；
By gold nano dispersed liquid coating obtained in the composite substrate surface, and solvent composition is made to volatilize completely, so as to make gold
Nanoparticle deposition is in the non-area of the pattern of the patterning composite substrate.
10. Meta Materials manufacturing method according to claim 9, which is characterized in that the gold nano grain-acetone soln
Mass concentration is 0.05-3g/ml.
11. Meta Materials manufacturing method according to claim 9, which is characterized in that by gold nano dispersed liquid coating obtained
When the composite substrate surface, using spin coating or drop coating mode.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611270527.1A CN108269656A (en) | 2016-12-30 | 2016-12-30 | Meta Materials manufacturing method |
| PCT/CN2017/092063 WO2018120743A1 (en) | 2016-12-30 | 2017-07-06 | Metamaterial manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611270527.1A CN108269656A (en) | 2016-12-30 | 2016-12-30 | Meta Materials manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108269656A true CN108269656A (en) | 2018-07-10 |
Family
ID=62706853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611270527.1A Pending CN108269656A (en) | 2016-12-30 | 2016-12-30 | Meta Materials manufacturing method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108269656A (en) |
| WO (1) | WO2018120743A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112261860A (en) * | 2020-10-23 | 2021-01-22 | 航天特种材料及工艺技术研究所 | Reusable micro-fluid wave-absorbing metamaterial and preparation method thereof |
| CN113587692A (en) * | 2021-06-25 | 2021-11-02 | 佛山华智新材料有限公司 | Micro-channel heat sink and manufacturing method thereof |
| CN113937243A (en) * | 2021-08-26 | 2022-01-14 | 福州大学 | Preparation method of high PPI quantum dot array based on hydrophilic and hydrophobic treatment of substrate surface |
| CN114084868A (en) * | 2021-11-23 | 2022-02-25 | 清华大学 | Large-area patterned micro-nano particle self-assembly structure and preparation method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1350659A (en) * | 1999-05-12 | 2002-05-22 | 薄膜电子有限公司 | Methods for patterning polymer films, and use of the methods |
| CN104238264A (en) * | 2014-09-10 | 2014-12-24 | 清华大学 | Solution-assisted soft imprinting method |
| CN104228087A (en) * | 2014-09-01 | 2014-12-24 | 机械科学研究总院先进制造技术研究中心 | Method for preparing composite material prepreg |
| WO2016210115A1 (en) * | 2015-06-23 | 2016-12-29 | The University Of North Carolina At Chapel Hill | Method for making an epoxy resin mold from a lithography patterned microstructure master |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6656398B2 (en) * | 2001-06-19 | 2003-12-02 | Corning Incorporated | Process of making a pattern in a film |
| CN1401685A (en) * | 2002-09-15 | 2003-03-12 | 中国科学院兰州化学物理研究所 | Method for mfg. patterned conductive polymer film |
| CN100456462C (en) * | 2003-10-09 | 2009-01-28 | 飞思卡尔半导体公司 | Amorphous carbon layer to improve photoresist adhesion |
| CN101321614B (en) * | 2005-09-30 | 2012-11-07 | 空中客车西班牙运营有限责任公司 | Method for surface treatment of composite material structure by using atmospheric plasma beam |
-
2016
- 2016-12-30 CN CN201611270527.1A patent/CN108269656A/en active Pending
-
2017
- 2017-07-06 WO PCT/CN2017/092063 patent/WO2018120743A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1350659A (en) * | 1999-05-12 | 2002-05-22 | 薄膜电子有限公司 | Methods for patterning polymer films, and use of the methods |
| CN104228087A (en) * | 2014-09-01 | 2014-12-24 | 机械科学研究总院先进制造技术研究中心 | Method for preparing composite material prepreg |
| CN104238264A (en) * | 2014-09-10 | 2014-12-24 | 清华大学 | Solution-assisted soft imprinting method |
| WO2016210115A1 (en) * | 2015-06-23 | 2016-12-29 | The University Of North Carolina At Chapel Hill | Method for making an epoxy resin mold from a lithography patterned microstructure master |
Non-Patent Citations (1)
| Title |
|---|
| 刘建平等: "基于微接触印刷法的PbS微图案的制备", 《材料导报：研究篇》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112261860A (en) * | 2020-10-23 | 2021-01-22 | 航天特种材料及工艺技术研究所 | Reusable micro-fluid wave-absorbing metamaterial and preparation method thereof |
| CN112261860B (en) * | 2020-10-23 | 2023-05-16 | 航天特种材料及工艺技术研究所 | Reusable micro-fluid wave-absorbing metamaterial and preparation method thereof |
| CN113587692A (en) * | 2021-06-25 | 2021-11-02 | 佛山华智新材料有限公司 | Micro-channel heat sink and manufacturing method thereof |
| CN113937243A (en) * | 2021-08-26 | 2022-01-14 | 福州大学 | Preparation method of high PPI quantum dot array based on hydrophilic and hydrophobic treatment of substrate surface |
| CN113937243B (en) * | 2021-08-26 | 2024-01-30 | 福州大学 | Preparation method of high PPI quantum dot array based on substrate surface hydrophilic and hydrophobic treatment |
| CN114084868A (en) * | 2021-11-23 | 2022-02-25 | 清华大学 | Large-area patterned micro-nano particle self-assembly structure and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018120743A1 (en) | 2018-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108269656A (en) | Meta Materials manufacturing method | |
| Yan et al. | Microcontact printing of colloidal crystals | |
| US20090264317A1 (en) | Functionalized nanostructure, methods of manufacture thereof and articles comprising the same | |
| Martínez-Crespiera et al. | Fabrication of silicon oxycarbide-based microcomponents via photolithographic and soft lithography approaches | |
| Rose et al. | Emergent soft lithographic tools for the fabrication of functional polymeric microstructures | |
| Han et al. | Fabrication of 3D nano-structures using reverse imprint lithography | |
| Penmatsa et al. | Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis | |
| KR101565835B1 (en) | Fabrication method of replication mold, fine structures using the same and its applications thereof. | |
| CN108089398A (en) | A kind of nanometer of through-hole array polymer template and preparation method thereof | |
| Duong et al. | Printed sub-100 nm polymer-derived ceramic structures | |
| Li | Microfabrication techniques for producing freestanding multi-dimensional microstructures | |
| Yu et al. | Ink-drop dynamics on chemically modified surfaces | |
| KR100837829B1 (en) | Fabrication of microstructures for micro/nano-fluidic devices and MEMS microdevices using inorganic polymers and hydrophilic polymers | |
| KR101042385B1 (en) | Forming method of high definition fine pattern | |
| TW201125815A (en) | Carbon nano tubes device and method of manufacturing same | |
| CN105636900B (en) | Carrier-substrate bonding system | |
| KR20140110397A (en) | Patterning method using reversal imprint process | |
| KR100836872B1 (en) | Fabrication of microstructures for micro/nano-fluidic devices and MEMS microdevices using inorganic polymers and hydrophilic polymers | |
| CN103503114B (en) | Transparent substrate having nano pattern and method of manufacturing same | |
| Xu et al. | Progress on 3D printing technology in the preparation of flexible tactile sensors | |
| Liu et al. | Parylene micropillars coated with thermally grown SiO2 | |
| Shin et al. | Nanoimprinting ultrasmall and high-aspect-ratio structures by using rubber-toughened UV cured epoxy resist | |
| KR100837806B1 (en) | Fabrication of microstructures for micro/nano-fluidic devices and MEMS microdevices using inorganic polymers and hydrophilic polymers | |
| Pina-Hernandez et al. | Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography | |
| WO2016068538A1 (en) | Nanotransfer printing method and sers substrate, sers vial, and sers patch manufactured using same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180710 |