CN108267423B - A kind of operating circuit of raster micro mirror near infrared spectrometer - Google Patents

A kind of operating circuit of raster micro mirror near infrared spectrometer Download PDF

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Publication number
CN108267423B
CN108267423B CN201810050396.9A CN201810050396A CN108267423B CN 108267423 B CN108267423 B CN 108267423B CN 201810050396 A CN201810050396 A CN 201810050396A CN 108267423 B CN108267423 B CN 108267423B
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signal
micro mirror
pga
adc
fpga
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CN108267423A (en
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温泉
唐杰
余龙华
温志渝
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Chongqing University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems

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  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention proposes a kind of operating circuit based on raster micro mirror near infrared spectrometer, including electric power management circuit and spectrometer control circuit.Wherein spectrometer control circuit includes the PGA and ADC channel that at least two-way is used for spectroscopic acquisition, the PGA for angle sensor acquisition is through filter and ADC channel all the way, DAC for the driving of raster micro mirror is through filter and the channel PGA, for the usb circuit of host computer communication, external cache and the FPGA as main control chip.In the present invention, PGA receives PGA by the I/O port of FPGA and controls signal, realizes detector input signal gain programmable, improves the flexibility of spectrometer control circuit.Control by FPGA synchronizing clock signals to ADC in system, realizes the synchronous acquisition of raster micro mirror angle sensor signal and spectral signal, is precisely accomplished Spectral Reconstruction convenient for host computer.

Description

A kind of operating circuit of raster micro mirror near infrared spectrometer
Technical field
The invention belongs to spectrometric instrument technical fields, are related to the work electricity of raster micro mirror near infrared spectrometer Road.
Background technique
Spectrometric instrument is a kind of important contemporary optics instrument, by realizing the structure to substance with light splitting principle With the quantification and qualification of component.Near-infrared spectral analysis technology can efficiently complete the frequency multiplication of the molecule containing hydrogen group with Sum of fundamental frequencies absorbs infomation detection, is widely used in the fields such as industrial production and substance detection.Near infrared spectrum refers to wavelength in 800nm Electromagnetic wave within the scope of ~ 2500nm, common near infrared spectrometer can be roughly divided into dispersion formula, filter type, Fourier formula, sound Magic eye formula etc..
Currently, being mentioned with the high speed development in the fields such as environmental monitoring, food safety detection, biological medicine for spectrometer Go out micromation, low cost, wide spectral range, high-precision requirement, and the near infrared spectrum based on the design of raster micro mirror Instrument cannot achieve single tube detector and cover full near infrared spectrum often because of the limitation of the corresponding spectral coverage of detector.Therefore, it is low at Realize that spectrometer detects the mode frequently with bis- (more) detectors in near-infrared all band to complete such scanning light on the basis of this The design of grid micro mirror spectrometer.This design method reduces the cost of spectrometer, is at the same time the light path design of spectrometer Challenge is all brought with circuit design in instrument.
Operating circuit based on raster micro mirror near infrared spectrometer is integrated scanning grating micro mirror near infrared spectrometer One of key components, main function is to based on the raster in raster micro mirror near-infrared micro spectrometer Micro mirror carries out drive control, and acquires the spectral signal that detector detects, and is transferred in host computer.Currently, common MEMS Raster micro mirror spectrometer generally uses simple detector cooperation, and AD acquires the acquisition for realizing spectral signal all the way, and simultaneously It is controlled using analog closed-loop and realizes that the amplitude of micro mirror in spectrometer, phase, frequency control, such lower cost solution is in control precision There are limitation, analog devices will receive larger impact in complicated working environment for aspect;In addition, being used for spectroscopic acquisition AD all the way can not achieve with closed loop command signal it is synchronous, in environment vibration etc. interference the working condition of micro mirror can be made to float It moves, it is very unfavorable for Spectral Reconstruction.
Summary of the invention
The present invention is directed to the problem above of existing integrated scanning grating micro mirror near infrared spectrometer operating circuit, proposes one The operating circuit of kind raster micro mirror near infrared spectrometer cooperates double by using bis- (more) road spectroscopic acquisition channels (more) detector provides the solution of all standing spectrometer of near infrared spectral range, spectral signal and angle sensor signal Synchronous acquisition and control so that designed spectrometer operating circuit is adapted to complicated use environment, and be spectrum Reconstruct and rear end exploitation provide reliable hardware supported.
The present invention specifically uses following technical scheme:
A kind of operating circuit of raster micro mirror near infrared spectrometer comprising power supply managing circuit and spectrometer Control circuit composition.
The power supply managing circuit includes DC-DC, LDO(low dropout regulator, and low pressure difference linearity is steady Depressor) and reference voltage source.Energy is provided for spectrometer control circuit component, and is spectrometer control circuit chip operation Reference voltage is provided.
The spectrometer control circuit includes the PGA and ADC channel that at least two-way is used for spectroscopic acquisition, is used for all the way PGA, filter and the ADC channel of angle sensor signal acquisition, all the way for raster micro mirror driving DAC, filter and The channel PGA, for realizing the usb circuit of control data communication, external cache and FPGA with host computer;
In the spectrometer control circuit, the input terminal of each PGA in spectroscopic acquisition channel is separately connected one Detector, output end are separately connected corresponding ADC, through ADC by simulating after the spectral signal amplification that detector is detected and exported Signal is converted to digital signal, and ADC passes through CH1 ..., and CHn data/address bus inputs a signal into FPGA is handled, wherein n >=2; The input terminal of the PGA of angle sensor signal sampling channel connects angular transducer, and output end connects corresponding ADC, angle is passed Sensor signal through ADC is converted into digital signal by analog signal after amplifying, and ADC is again by angle sensor data/address bus by signal Input FPGA is handled;FPGA is by signal cache bus by spectroscopic data information and angular transducer information cache to outside Caching, and exported spectroscopic data information to usb circuit by host computer communication bus, and will be in data through usb bus Reach host computer;Host computer also capable of emitting driving control signal is communicated by host computer through usb bus by usb circuit total Line inputs FPGA, drives the DAC in channel to be converted to through raster micro mirror by driving signal bus after FPGA circuitry is handled The analog signal of analog signal, DAC output is filtered by filter, keeps analog micromirror driving signal smooth, filter is defeated Signal is amplified into micro mirror driver, driving raster micro mirror vibration through PGA out.
In the present invention, each detection and angular transducer constitute stimulus part, input raster micro mirror reflection Spectral signal and raster micro mirror angular transducer angle and displacement signal.
In the present invention, PGA is programmable gain amplifier, and PGA can be controlled signal by I/O port and inputted in PGA by FPGA Its amplification factor to signal is controlled, to realize spectral detector amplification factor programmable, improves spectral information acquisition Flexibility.
In the present invention, FPGA is by I/O port to each road spectroscopic acquisition and all the way in angle sensor signal acquisition link ADC sends FPGA synchronous acquisition clock signal, synchronous to carry out the conversion of analog to digital signal, realizes synchronous acquisition, is convenient for spectrum Signal completes Spectral Reconstruction work in host computer.
In the present invention, angular transducer signal enters before FPGA by filter filtering, has filtered out outer signals interference, has mentioned Signal-to-noise ratio is risen, the driving control signal that FPGA is issued enters before micro mirror driver by filter filtering, it is ensured that driving letter The interference of radio-frequency component is not contained in number.
In the present invention, FPGA is believed collected spectral data signal and angle and displacement sensing by signal cache bus Number input external cache, and inputs a signal into usb circuit by host computer communication bus, is uploaded signal by usb bus To host computer, signal upload and communication task are completed.
The present invention has the characteristics that following technical scheme:
It can be not only spectrometer control circuit member 1. power supply managing circuit includes DC-DC, LDO, reference voltage source Device with energy, and reference voltage can be mentioned for spectrometer control circuit chip operation, improve spectrometer control circuit The accuracy and stability of work.
2. FPGA sends PGA by I/O port and controls signal control PGA, to realize that spectral detector amplification factor can be compiled Cheng Hua improves the flexibility of spectral information acquisition.
Before the driving control signal that 3. angular transducer signal enters before FPGA and FPGA is issued enters micro mirror driver Pass through filter filtering, filtered out outer signals interference, improves the pure property and spectrometer control circuit system of signal Run smooth degree.
4. FPGA can be connect by signal cache bus, host computer communication bus and usb bus by external cache and USB Mouth circuit is realized and the upload of the signal of host computer and communication function.
5. vibration frequency and amplitude of the capable of emitting micro mirror driving control signal of host computer through FPGA control raster micro mirror, Realize control of the host computer to raster micromirror movements parameter
6. FPGA passes through I/O port to two-way or multichannel spectroscopic acquisition ADC and all the way angle sensor signal acquisition ADC hair Synchronised clock controls signal out, realizes multiple signals synchronous acquisition, completes Spectral Reconstruction in host computer convenient for spectral signal Work.
Detailed description of the invention
Fig. 1 is the functional block diagram of this raster micro mirror near infrared spectrometer operating circuit.
Specific embodiment
Further details of the technical solution of the present invention with reference to the accompanying drawings of the specification.
It is as shown in Figure 1 the functional block diagram of raster micro mirror near infrared spectrometer operating circuit of the present invention.
The operating circuit of raster micro mirror near infrared spectrometer is by power supply managing circuit and spectrometer control circuit Composition.
Power supply managing circuit includes DC-DC, LDO, reference voltage source, and only spectrometer control circuit component does not mention For energy, and reference voltage can be provided for spectrometer control circuit chip operation.
In this example, spectrometer control circuit includes the PGA and ADC channel that two-way is used for spectroscopic acquisition, is used for all the way PGA, filter and the ADC channel of angle sensor signal acquisition, all the way for raster micro mirror driving DAC, filter and The channel PGA, usb circuit, external cache, FPGA.
In this example, the detector 1 and detector 2 in two-way spectroscopic acquisition channel are defeated by collected spectral signal respectively Enter respective PGA to amplify, amplified spectral signal is after respective ADC is converted to digital signal by analog signal through number It is handled according to bus input FPGA.The present invention is using double spectral detector designs so that integrated scanning grating micro mirror scanning range Whole near infrared bands can be covered, the design integrity of near infrared spectrometer is promoted.
Collected raster micro mirror angle and displacement signal are sent into corresponding PGA and amplified by angular transducer, Corresponding ADC is inputted after filter removes front end circuit noise and external interference, and digital signal is converted to by analog signal, by Angle sensor data/address bus input FPGA is further processed.Angular transducer signal will be filtered before entering FPGA through wave filter Wave filters out outer signals interference, promotes signal-to-noise ratio.
When FPGA is synchronous with the sending of angle sensor signal acquisition ADC all the way to two-way spectroscopic acquisition ADC by I/O port Clock signal realizes synchronous acquisition, and Spectral Reconstruction work is completed in host computer convenient for spectral signal.
FPGA is inputted collected spectral data signal and angle and displacement sensing signal by signal cache bus outer Portion's caching, and inputs a signal into usb circuit through communication bus by host computer, is uploaded to signal by usb bus upper Machine.FPGA completes to communicate by external cache and usb circuit and host computer.
Micro mirror driving signal also can be inputted usb circuit by host computer communication bus by host computer, then by upper Position machine communication bus handles micro mirror driving signal input FPGA, and micro mirror driving signal that treated is total by driving signal Line inputs DAC and is converted to analog signal by digital signal, and the analog signal of DAC output is filtered by filter, it is ensured that The interference that radio-frequency component is not contained in driving signal, keeps analog micromirror driving signal smooth, filter output signal amplifies through PGA Laggard mirror driver in a subtle way, driving raster micro mirror vibration.
More than, present invention applicant combines Figure of description to do detailed explanation and retouch embodiment of the invention It states, it should be appreciated by those skilled in the art that the above embodiment is only the preferred embodiments of the invention, explanation is in detail In order to help reader to more fully understand spirit of that invention, rather than limiting the scope of the invention, on the contrary, any be based on this hair Any improvement or modification made by bright spirit should all be fallen within the scope and spirit of the invention.

Claims (4)

1. a kind of operating circuit of raster micro mirror near infrared spectrometer, it is characterised in that: the operating circuit includes system Electric power management circuit and spectrometer control circuit;
The spectrometer control circuit includes the PGA and ADC channel that at least two-way is used for spectroscopic acquisition, is used for angle all the way PGA, filter and the ADC channel of transducing signal acquisition are logical for the DAC, filter and PGA of the driving of raster micro mirror all the way Road, for realizing the usb circuit of control data communication, external cache and FPGA with host computer;
In the spectrometer control circuit, the input terminal of each PGA in spectroscopic acquisition channel is separately connected a detection Device, output end are separately connected corresponding ADC, through ADC by analog signal after the spectral signal amplification that detector is detected and exported Digital signal is converted to, ADC passes through CH1 ..., and CHn data/address bus inputs a signal into FPGA is handled, wherein n >=2;Angle The input terminal of the PGA of transducing signal acquisition channel connects angular transducer, and output end connects corresponding ADC, by angular transducer Signal through ADC is converted into digital signal by analog signal after amplifying, and ADC is input a signal by angle sensor data/address bus again FPGA is handled;FPGA is slow to outside by spectroscopic data information and angular transducer information cache by signal cache bus It deposits, and is exported spectroscopic data information to usb circuit by host computer communication bus, and upload data through usb bus To host computer;Host computer also capable of emitting driving control signal passes through host computer communication bus by usb circuit through usb bus FPGA is inputted, drives the DAC in channel to be converted to mould through raster micro mirror by driving signal bus after FPGA circuitry is handled Quasi- signal, is smoothed signal by filter and the PGA through grating micro mirror driving channel is amplified into micro mirror driving Device drives raster micro mirror.
2. the operating circuit of raster micro mirror near infrared spectrometer according to claim 1, it is characterised in that: the system System electric power management circuit includes DC-DC, LDO and reference voltage source, provides energy for spectrometer control circuit component, and be Spectrometer control circuit chip operation provides reference voltage.
3. the operating circuit of raster micro mirror near infrared spectrometer according to claim 1, it is characterised in that: described FPGA sends PGA by I/O port and controls the PGA that signal controls grating micro mirror driving channel, realizes that spectral detector amplification factor can Programming.
4. the operating circuit of raster micro mirror near infrared spectrometer according to claim 1, it is characterised in that: described To two-way spectroscopic acquisition ADC and all the way, angle sensor signal acquisition ADC issues ADC configuration signal to the I/O port of FPGA, carries out Synchronised clock control, realizes synchronous acquisition, convenient for Spectral Reconstruction work of the spectral signal in host computer.
CN201810050396.9A 2018-01-18 2018-01-18 A kind of operating circuit of raster micro mirror near infrared spectrometer Active CN108267423B (en)

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CN113281361B (en) * 2021-05-12 2022-12-02 中国科学院高能物理研究所 Quick scanning XAFS system
CN114264629A (en) * 2021-12-22 2022-04-01 海南聚能科技创新研究院有限公司 Near-infrared sensing circuit and near-infrared spectrum detector

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EP1835304A2 (en) * 2006-03-15 2007-09-19 Omron Corporation Radar device and mems mirror device therefor
CN102589690B (en) * 2012-03-23 2014-04-23 重庆大学 Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer
CN102679971B (en) * 2012-05-08 2014-11-26 北京航空航天大学 Resonant mode optical gyroscope signal detection device and method based on virtual instrument
CN106404713B (en) * 2016-11-23 2018-12-11 重庆大学 A kind of miniature near infrared spectrometer of double detector of full spectral coverage 800nm-2500nm
CN107450178B (en) * 2017-09-06 2020-05-12 北京航天长征飞行器研究所 Two-dimensional MEMS micro-mirror driving control system and method

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