CN102589690B - Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer - Google Patents
Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer Download PDFInfo
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Abstract
The invention discloses an operating circuit for a micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer. The operating circuit mainly comprises three modules, namely an oscillation signal module, an MEMS micro-mirror drive control module and a spectroscopic data acquisition module, wherein the spectroscopic data acquisition module consists of a preamplification circuit, an analogue-to-digital (AD) conversion circuit, a first-in first-out (FIFO) storage, a field programmable gate array (FPGA) (or advanced RISC machine (ARM) and a singlechip) control circuit and a universal serial bus (USB) interface circuit. The MEMS micro-mirror drive control module performs closed-loop control over the MEMS scanning micro-mirror, so that the MEMS scanning micro-mirror vibrates at equal amplitude and equal frequency, the wavelength repeatability of the MEMS scanning micro-mirror spectrometer is improved; after periodic oscillation signals generated by the oscillation signal module are processed by the MEMS micromirror drive control module, periodic working signals are provided for the AD conversion circuit and the MEMS scanning micro-mirror at the same time, so that the AD conversion circuit and the MEMS scanning micro-mirror can work cooperatively; and therefore, periodic acquisition of spectroscopic data is realized. The operating circuit has the advantages that: the operating vibration of the MEMS scanning micro-mirror in the spectrometer is stable, the wavelength repeatability of the spectrometer is high, and the operating circuit is simple and is easy to realize.
Description
Technical field
The invention belongs to spectrometric instrument technical field, relate to a kind of MEMS(microelectromechanical systems) operating circuit of scanning micro-mirror spectrometer.
Background technology
Spectral instrument is applied optics technology and spectrum detection technique principle; the basic equipment that structure and composition to material is observed, analyzed and processes; the advantage such as have that analysis precision is high, measurement range is large, measuring speed is fast and amount of samples is few; can be used for the fields such as metallurgy, geology, petrochemical complex, medical and health, environmental protection, Aero-Space, universe exploration, resource and hydrology exploration; having very important using value and wide market outlook, is one of of paramount importance optical instrument.
MEMS technology is to merge multiple Micrometer-Nanometer Processing Technology, and applies a kind of high-tech cutting edge technology that modern information technologies design, process, manufacture, measure and control micrometer/nanometer material.Volume is little, low in energy consumption, highly sensitive, reproducible owing to having for various devices based on MEMS technology, stable processing technology, the advantage such as with low cost, by a large number for high-precision technical field.
Micro spectrometer based on MEMS technology is to using the optical detecting instrument of MEMS optical device as core key part.Due to the use of MEMS core devices, MEMS spectrometer has that volume is little, lightweight, stable performance, the advantage such as with low cost, therefore, utilizes MEMS technology development micro spectrometer to become current study hotspot.
MEMS scanning micro-mirror spectrometer, to adopt MEMS scanning micro-mirror and diffraction grating, replace the raster in traditional raster spectrometer, combine the optical instrument of realizing optics light splitting and spectral scan function, have that volume is little, lightweight, with low cost, the advantage such as spectrographic detection wide ranges, spectrum expansibility are good, be one of study hotspot of current spectrometer.
The operating circuit of MEMS scanning micro-mirror spectrometer, one of key components of MEMS scanning micro-mirror spectrometer, its Main Function is for to drive control to the MEMS scanning micro-mirror in MEMS scanning micro-mirror spectrometer, and gather the spectral signal that detector detects, be transported in PC (or notebook computer).Current, abroad, existing MEMS scanning micro-mirror spectrometer, for wavelength corresponding to Accurate Determining spectral signal, its mensuration to scanning micro-mirror pivot angle, mainly adopts the detection mode of laser scanning, not only improve the complexity of apparatus structure, and increased the design difficulty of operating circuit.
The operating circuit of MEMS scanning micro-mirror spectrometer in the present invention, MEMS micro mirror drive control module is not only for MEMS scanning micro-mirror provides working signal, realized the closed-loop control of micro mirror, improved the job stability of micro mirror, and provide periodic triggers signal for A/D convertor circuit, realize the concertedness work of spectral signal detecting periodically and AD conversion, simplified the system architecture of micro mirror spectrometer and the design difficulty of operating circuit.
Summary of the invention
For solving the above problem of prior art existence, the present invention is directed to the principle of work of MEMS scanning micro-mirror spectrometer, a kind of MEMS scanning micro-mirror spectrometer operating circuit is proposed.
The present invention specifically by the following technical solutions.
A MEMS scanning micro-mirror spectrometer operating circuit, is characterized in that: described operating circuit comprises oscillator signal module, MEMS micro mirror drive control module and spectrum data gathering module;
Wherein said spectrum data gathering module comprises pre-amplification circuit, the A/D convertor circuit of detector, FIFO storer, FPGA control circuit and usb circuit;
The output of described oscillator signal module is connected with the input end of MEMS micro mirror drive control module, the oscillator signal to described MEMS micro mirror drive control module input with characteristic frequency, this oscillator signal carries out being divided into two-way after signal processing through MEMS micro mirror drive control module, one tunnel provides driving signal for the work of MEMS micro mirror, and another road provides periodic triggers signal for A/D convertor circuit in spectrum data gathering module;
A/D convertor circuit in described spectrum data gathering module is started working after receiving the periodic triggers signal of described MEMS micro mirror drive control module output, the simulated spectra signal amplifying through pre-amplification circuit of being exported by detector is converted to digital spectrum signal, and is transported in FIFO storer;
The spectroscopic data that described FPGA control circuit is controlled in FIFO storer sends PC or notebook computer to by usb circuit, realizes the collection of spectroscopic data.
In the present invention, the major function of oscillator signal module is as signal source, for MEMS micro mirror drive control module provides constant amplitude, equifrequency, stable oscillator signal, is the basic assurance that operating circuit can normally be worked.
In the present invention, MEMS micro mirror drive control module, the oscillator signal that oscillator signal module is provided is exported two-way after processing, one tunnel provides driving signal for MEMS scanning micro-mirror, one tunnel provides periodic triggers signal for spectrum data gathering circuit module, make A/D convertor circuit and the MEMS scanning micro-mirror can collaborative work, realize the periodic data collection of spectrometer spectral signal.
Described MEMS micro mirror drive control module provides the periodic drive signal of frequency stabilization for MEMS scanning micro-mirror, simultaneously, the feedback signal producing in the MEMS scanning micro-mirror course of work inputs to described MEMS micro mirror drive control module, the driving signal that MEMS micro mirror drive control module is exported to MEMS scanning micro-mirror is adjusted, make MEMS scanning micro-mirror can be under specific vibration frequency continuous vibration, realize the closed-loop control to MEMS scanning micro-mirror.
In the present invention, spectrum data gathering circuit module is by A/D convertor circuit, FIFO storer, FPGA(or ARM, single-chip microcomputer) four parts such as control circuit, usb circuit form.After A/D convertor circuit receives trigger pip, start working, simulated spectra signal is converted to digital signal, and deliver to and in FIFO storer, carry out buffer memory.Finally, at FPGA(or ARM, single-chip microcomputer) control under, spectroscopic data is transferred in PC (or notebook computer) by usb circuit.
The present invention has following technical characterstic:
1. realized the integrated of oscillator signal module, MEMS micro mirror drive control module and spectrum data gathering module;
2. MEMS micro mirror driver module adopts the type of drive of closed-loop control to MEMS scanning micro-mirror, for the continuous vibration of MEMS scanning micro-mirror provides powerful guarantee, has improved the spectrum repeatability of MEMS scanning micro-mirror spectrometer;
3. the driving signal that MEMS micro mirror drive control module is exported is not only for the driving of MEMS scanning micro-mirror, and provide periodic trigger pip for A/D convertor circuit, like this, A/D convertor circuit and MEMS scanning micro-mirror carry out collaborative work, realized the data acquisition of operating circuit to periodicity spectrum, simplify the system architecture of spectrometer, reduced the design difficulty of operating circuit;
4. the operating circuit in the present invention not only can be used for adopting the micro spectrometer of MEMS scanning micro-mirror device development, and can be used for adopting the micro spectrometer of MEMS raster device.
Accompanying drawing explanation
Fig. 1 is the circuit theory diagrams of this MEMS scanning micro-mirror spectrometer operating circuit.
In figure, 1. oscillator signal module, 2.MEMS micro mirror drive control module, the 3. pre-amplification circuit of detector, 4.AD change-over circuit, 5.FIFO storer, 6.FPGA control circuit, 7.USB interface circuit.Wherein, 3,4,5,6, the 7 common spectrum data gathering modules that form.
Embodiment
Below in conjunction with Figure of description, technical scheme of the present invention is described in further details.
Be illustrated in figure 1 the circuit theory diagrams of MEMS scanning micro-mirror spectrometer operating circuit of the present invention.
MEMS scanning micro-mirror spectrometer operating circuit is mainly formed by oscillator signal module 1, MEMS micro mirror drive control module 2, three module collections of spectrum data gathering module, wherein, spectrum data gathering module is by pre-amplification circuit 3, the A/D convertor circuit 4 of detector, and FIFO storer 5, FPGA control circuit 6, usb circuit 7 form.Oscillator signal module 1 provides the oscillator signal with characteristic frequency for MEMS micro mirror drive control module 2, this oscillator signal carries out being divided into two-way after signal processing through MEMS micro mirror drive control module 2, one tunnel provides driving signal for the work of MEMS micro mirror, and another road provides periodic triggers signal for the A/D convertor circuit 4 in spectrum data gathering module; MEMS scanning micro-mirror is worked under MEMS micro mirror drive control module 2 drives, and parallel composite light beam is carried out to periodic scan, realizes the detecting periodically of detector to different wavelengths of light; In spectrum data gathering module, A/D convertor circuit 4 is started working after receiving trigger pip, and the simulated spectra signal that detector produces, after pre-amplification circuit 3 amplifies, is converted to digital spectrum signal by A/D convertor circuit 4, and is transported in FIFO storer 5.Finally, under the control of FPGA control circuit 6, the spectroscopic data in FIFO storer 5 sends PC (or notebook computer) to by usb circuit 7, thereby realizes the collection of spectroscopic data.
When MEMS scanning micro-mirror spectrometer is worked, oscillator signal module 1 provides the periodic swinging signal of equifrequency, constant amplitude, stable performance for MEMS scanning micro-mirror drive control module 2.
Oscillator signal carries out exporting two-way after signal processing through MEMS micro mirror drive control module 2, and a road is the driving signal of MEMS scanning micro-mirror, and another road provides periodic triggers signal for the A/D convertor circuit 4 in spectrum data gathering circuit module.In the present invention, 2 pairs of MEMS scanning micro-mirrors of MEMS micro mirror drive control module adopt the mode of closed-loop control to carry out work, and the scanning micro-mirror using in the embodiment of the present invention is the MEMS scanning micro-mirror with angle sensor function.When spectrometer is in running order, the angle sensor signal that scanning micro-mirror deflection produces exports the feedback signal as MEMS micro mirror drive control module to MEMS micro mirror drive control module 2, drive signal amplitude to 2 outputs of MEMS micro mirror drive control module is adjusted, thereby realize the closed-loop control of MEMS scanning micro-mirror, MEMS scanning micro-mirror can be worked under the stable oscillation state of constant amplitude, equifrequency, for the wavelength repeatability of MEMS scanning micro-mirror spectrometer is given security.
MEMS scanning micro-mirror is worked under the driving of MEMS micro mirror drive control module 2, parallel composite light beam is carried out to periodic scan, make parallel composite light beam after plane grating light splitting, the imaging of concave mirror focus focusing mirror, the light of different wave length is inswept from detector successively, realize detector to the detecting periodically of different wavelengths of light, and produce the corresponding spectral signal of periodically simulating.
The simulated spectra signal that detector produces, after the pre-amplification circuit 3 in spectrum data gathering module amplifies, is transported in A/D convertor circuit 4, and MEMS micro mirror drive control module 2 provides periodic triggers signal for A/D convertor circuit 4.After A/D convertor circuit is triggered at every turn, start working, the spectral signal amplifying through pre-amplification circuit 3 is converted to digital signal by simulating signal, and be transported in FIFO storer 5, finally, under FPGA control circuit 6 is controlled, spectral signal data are sent on PC (or notebook computer) through usb circuit 7.In the present invention, also available ARM or single-chip microcomputer replacement of FPGA control circuit in spectrum data gathering module.
The present patent application people has done detailed explanation and description in conjunction with Figure of description to embodiment of the present invention; those skilled in the art should understand that; above embodiment is only the preferred embodiments of the invention; detailed explanation is just in order to help reader to understand better spirit of the present invention; and be not limiting the scope of the invention; on the contrary, within any any improvement of doing based on spirit of the present invention or modification all should drop on protection scope of the present invention.
Claims (5)
1. a MEMS scanning micro-mirror spectrometer operating circuit, is characterized in that: described operating circuit comprises oscillator signal module, MEMS micro mirror drive control module and spectrum data gathering module;
Wherein said spectrum data gathering module comprises pre-amplification circuit, A/D convertor circuit, FIFO storer, FPGA control circuit and the usb circuit of detector;
The output terminal of described oscillator signal module is connected with the input end of MEMS micro mirror drive control module, the oscillator signal to described MEMS micro mirror drive control module input with characteristic frequency, this oscillator signal carries out being divided into two-way after signal processing through MEMS micro mirror drive control module, one tunnel provides driving signal for MEMS scanning micro-mirror, and another road provides periodic triggers signal for the A/D convertor circuit in spectrum data gathering module;
A/D convertor circuit in described spectrum data gathering module is started working after receiving the periodic triggers signal of described MEMS micro mirror drive control module output, the simulated spectra signal of being exported, being amplified through pre-amplification circuit by detector is converted to digital spectrum signal, and is transported in FIFO storer;
Described FPGA control circuit is controlled the spectroscopic data in FIFO storer, by usb circuit, sends PC or notebook computer to, realizes the collection of spectroscopic data.
2. MEMS scanning micro-mirror spectrometer operating circuit according to claim 1, is characterized in that: described oscillator signal module is as signal source, for MEMS micro mirror drive control module provides periodic swinging signal.
3. MEMS scanning micro-mirror spectrometer operating circuit according to claim 1, it is characterized in that: described MEMS micro mirror drive control module provides the periodic drive signal of frequency stabilization for MEMS scanning micro-mirror, simultaneously, the feedback signal producing in the MEMS scanning micro-mirror course of work inputs to described MEMS micro mirror drive control module, the driving signal that MEMS micro mirror drive control module is exported to MEMS scanning micro-mirror is adjusted, make MEMS scanning micro-mirror can be under specific vibration frequency continuous vibration, realize the closed-loop control to MEMS scanning micro-mirror.
4. MEMS scanning micro-mirror spectrometer operating circuit according to claim 1, is characterized in that: in spectrum data gathering module, FPGA control circuit is FPGA programmable logic controller (PLC) part.
5. MEMS scanning micro-mirror spectrometer operating circuit according to claim 4, is characterized in that: in spectrum data gathering module, FPGA control circuit replaces with single-chip microcomputer.
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| CN201210079028.XA CN102589690B (en) | 2012-03-23 | 2012-03-23 | Operating circuit for micro electronic mechanical system (MEMS) scanning micro-mirror spectrometer |
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| CN108267423B (en) * | 2018-01-18 | 2019-01-01 | 重庆大学 | A kind of operating circuit of raster micro mirror near infrared spectrometer |
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| CN202041287U (en) * | 2011-04-25 | 2011-11-16 | 苏州三值精密仪器有限公司 | Analysis circuit applied to spectral analysis equipment |
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