CN108261883A - Silane exhaust gas treating method containing chlorosilane - Google Patents
Silane exhaust gas treating method containing chlorosilane Download PDFInfo
- Publication number
- CN108261883A CN108261883A CN201611264686.0A CN201611264686A CN108261883A CN 108261883 A CN108261883 A CN 108261883A CN 201611264686 A CN201611264686 A CN 201611264686A CN 108261883 A CN108261883 A CN 108261883A
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- Prior art keywords
- silane
- tail gas
- chlorosilane
- gas
- steam
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 141
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 141
- 239000005046 Chlorosilane Substances 0.000 title claims abstract description 66
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 238000000034 method Methods 0.000 title claims abstract description 25
- 238000002485 combustion reaction Methods 0.000 claims abstract description 46
- 230000003471 anti-radiation Effects 0.000 claims abstract description 34
- 238000009413 insulation Methods 0.000 claims abstract description 34
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 18
- 238000009833 condensation Methods 0.000 claims abstract description 15
- 230000005494 condensation Effects 0.000 claims abstract description 15
- 238000004064 recycling Methods 0.000 claims abstract description 10
- 238000010926 purge Methods 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 21
- 239000002826 coolant Substances 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 6
- 150000004756 silanes Chemical class 0.000 claims description 6
- 150000001335 aliphatic alkanes Chemical class 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 5
- 238000000066 reactive distillation Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 158
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 206010020852 Hypertonia Diseases 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 150000004678 hydrides Chemical class 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 238000005496 tempering Methods 0.000 description 3
- -1 silicon Alkane Chemical class 0.000 description 2
- 238000010025 steaming Methods 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000005189 flocculation Methods 0.000 description 1
- 230000016615 flocculation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/556—Organic compounds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Silicon Compounds (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention discloses the silane exhaust gas treating methods containing chlorosilane, include the following steps：(1) chlorosilane level-one condenses；(2) chlorosilane B-grade condensation；(3) isolated silane gas；(4) gas vacuum tank voltage stabilizing；(5) silane gas burns.The advantage of the invention is that：The chlorosilane in silane tail gas is recycled, the chlorosilane of recycling can be back to production of silane system, reduce loss of material, reduce production cost；The combustion system of the present invention has multiple combustion heads, and system pressure is positive pressure, combustion head exposes in air, top is anti-radiation insulation cover, and by stack effect, the air around burner is accumulated to around burner, compared with conventional burners, silane tail gas is more fully mixed with air, therefore efficiency of combustion significantly improves, so as to improve the treating capacity of silane tail gas.
Description
Technical field
The present invention relates to a kind of silane exhaust gas treating method, more particularly to a kind of silane vent gas treatment containing chlorosilane
Method.
Background technology
At present, the exhaust gas that the relevant technologies of silane vent gas treatment generate in the process mainly for silane as products application,
Such as the exhaust gas generated during manufacture of solar cells, integrated circuit and production of electronic components.Conventional silanes vent gas treatment
System carries out generally in silicone hydride combustion tower, and silicone hydride combustion tower is a confined space, and silane tail gas, air pass through pipeline respectively
It is passed through in silicone hydride combustion tower, mixing after-combustion is carried out by the diffusion of molecule, if air supply occurs in combustion
Failure can cause silane gas that a large amount of accumulation occurs, will be discharged into air in a large amount of silane tail gas short time, and burning is violent,
It is quick-fried there may be dodging, there are security risk, meanwhile, efficiency of combustion is low.
And flare system is used to handle silane tail gas, although can ensure that factory safety produces, silane tail gas is at burning
During reason, solid particle can be generated, the small solid particle of a part of quality can be discharged into air as air-flow rises, cause
Environmental pollution；The big solid particle of another part quality can settle downwards, block burner port, burner is caused to block, torch system
It unites high failure rate, the silane tail gas in anti-radiation insulation cover can not fully burn and be directly discharged in air, pollute environment.
At present, for the exhaust gas that generates during silane is prepared, production of silane mistake is prepared especially with reaction rectification method
Cheng Zhong, the relevant technologies of the silane vent gas treatment containing chlorosilane of generation are less.
Invention content
The purpose of the present invention is to provide the silane exhaust gas treating method containing chlorosilane, mainly for the treatment of reactive distillation
During tower production silane, the silane tail gas containing a small amount of chlorosilane that is discharged.Pass through technical solution provided by the invention reality
The chlorosilane showed in silane tail gas fully recycles, the burner processing silicon safe efficient, steadily utilization is with multiple combustion heads
Alkane tail gas.
The purpose of the present invention is implemented by following technical solution：Silane exhaust gas treating method containing chlorosilane, including such as
Lower step：(1) chlorosilane level-one condenses；(2) chlorosilane B-grade condensation；(3) isolated silane gas；(4) gas vacuum tank is steady
Pressure；(5) silane gas burns；Wherein,
(1) chlorosilane level-one condenses：The silane tail gas that the reactive distillation column for producing silane is discharged is passed through level-one tail gas
Condenser carries out preliminary condensation process, and part chlorosilane condensate is made to get off recycling, isolates the level-one after the chlorosilane of part
Silane tail gas is passed through two level tail gas condenser, wherein, the cooling medium of the level-one tail gas condenser is 7 DEG C of cooling waters, described
The tail gas pressure of level-one tail gas condenser is controlled between 0.1-1.0MPaG；
(2) chlorosilane B-grade condensation：The one grade silane tail gas further condenses in the two level tail gas condenser, cold
The chlorosilane recycling got off is coagulated, two grade silane tail gas after the chlorosilane is isolated and is passed through knockout drum, wherein, institute
It is -20 DEG C of chilled brines to state two level tail gas condenser cooling medium, and the tail gas pressure control of the two level tail gas condenser exists
Between 0.1-1.0MPaG；Chlorosilane content in two grade silane tail gas is made to be less than 5wt%, so as to which silane gas key component be made to be silicon
Alkane (contains a small amount of hydrogen)；
(3) isolated silane gas：The two grade silanes tail gas isolates the two level silicon in the knockout drum
Silane gas is obtained after the micro liquid contained in alkane tail gas, wherein, the operating pressure of the knockout drum is controlled in 0.1-
Between 0.5MPaG；Burner is prevented liquid entry into, influences the combustion efficiency of silane gas and silane gas disposal amount；
(4) gas vacuum tank voltage stabilizing：The silane flow goes out the knockout drum and enters the gas vacuum tank voltage stabilizing,
Subsequently into liquid seal can, wherein, the gas voltage stabilizing pressure tank control is between 0.1-0.5MPaG, the fluid-tight pressure tank control
System is between 0.1-0.5MPaG；The main function of gas vacuum tank is to ensure entire silane exhaust treatment system pressure stability, from
And the silane vent gas treatment amount of burner is made to keep relative stability in a short time, it avoids fluctuating widely, so as to ensure silane
Tail gas can fully burn；Liquid seal can primarily serves the effect for preventing tempering.
(5) silane gas burns：The silane flow goes out liquid seal can, burns into combustion system, the institute of the combustion system
The control of silane gas admission pressure is stated between 0.02-0.2MPaG.
Because present invention is mainly used for the tail gas that processing silane reaction rectifying column is discharged.Silane reaction rectifying column itself is grasped
Make pressure in 0.2-1.2MPaG, level-one tail gas condenser, two level tail gas condenser, knockout drum, gas vacuum tank, fluid-tight
Tank, combustion system collectively constitute silane exhaust treatment system, and are flowed by pressure difference.Wherein, level-one tail gas condenser,
Two level tail gas condenser selects suitable pressure, convenient for control tail gas residence time within the condenser, conducive to the cold of chlorosilane
It is solidifying.Knockout drum and gas vacuum tank and liquid seal can are mainly used for the silane tail gas supply of combustion system, hypertonia, meeting
Cause silane flow velocity too fast, combustion system processing load is excessive.Hypotony can cause silane treatment amount to be substantially reduced.
Preferably, in the step (1), the control of the tail gas pressure of the level-one tail gas condenser 0.2-0.6MPaG it
Between.
Preferably, in the step (2), the tail gas pressure of the two level tail gas condenser is controlled in 0.15-0.55MPaG
Between.
Preferably, in the step (3), the operating pressure of the knockout drum is controlled between 0.2-0.4MpaG.
Preferably, in the step (4), the gas voltage stabilizing pressure tank control is between 0.2-0.4MPaG；The fluid-tight
Pressure tank is controlled between 0.2-0.4MPaG.
Preferably, in the step (5), the silane gas admission pressure of the combustion system is controlled in 0.05-
0.15MPaG。
Further, the combustion system includes anti-radiation insulation cover, windproof noise reduction wall, igniter, crotch formula burner
And Flame supervision and control system, the windproof noise reduction wall are arranged on outside the anti-radiation insulation cover, the crotch formula burner setting
Inside the anti-radiation insulation cover, the head of the igniter is stretched into inside the anti-radiation insulation cover, is placed in the tree
Below the transverse tube of wooden fork formula burner, the windproof noise reduction wall is equipped with to monitor the burning feelings inside the anti-radiation insulation cover
The Flame supervision and control system of condition；
The first steam setting up and down point is installed with inside the anti-radiation insulation cover above the crotch formula burner
Cloth device and the second steam distributor fill inside the anti-radiation insulation cover below the transverse tube of the crotch formula burner
Equipped with air purge set；The air purge set includes air endless tube and air lance, and the air ring pipe sleeve is located at institute
Crotch formula combustor external is stated, air intake duct is equipped in the air ring bottom of the tube, described in the crotch formula burner
The air endless tube inner horizontal below transverse tube left or right side is equipped with the air lance, the air lance and the horizontal stroke
Pipe one-to-one correspondence is arranged in parallel；It is connected on the inside of described air lance one end and the air endless tube, the air lance other end
For blind end, in the air lance top surface, the side adjacent with the corresponding transverse tube offers several purge holes；The purging
Hole from inside to outside, is obliquely installed, and the axis of the purge hole and the transverse tube top from bottom to top from inlet end to outlet side
Tangent, the angle α between the axis and horizontal plane of the purge hole is 30-60 °.
Specifically, the crotch formula burner includes air inlet pipe, the transverse tube and bend pipe, it is equipped in the air inlet pipe periphery
Several transverse tubes being distributed along diameter, described bend pipe one end connects with the air inlet tube side part, the bend pipe other end with it is described
It is connected in the middle part of transverse tube bottom surface, several burner ports is offered in the transverse tube top surface.
Specifically, first steam distributor is identical with the second steam distributor structure, second steam point
Cloth device includes steam loop and several distributor pipes；Steam steam inlet pipe is equipped in the steam loop bottom, the distributor pipe is horizontal
The lower section of the steam loop is arranged on, the distributor pipe both ends are connected respectively by the steam loop of communicating pipe and top
It is logical；Several steam fumaroles are equipped with below the every distributor pipe.
The advantage of the invention is that：(1) chlorosilane in silane tail gas is recycled, the chlorosilane of recycling can be back to silane life
Production system reduces loss of material, reduces production cost；(2) present invention is recycled using B-grade condensation mode contains in silane tail gas
A small amount of chlorosilane, it is easy to operate, it is pollution-free；(2) combustion system of the invention has multiple combustion heads, and system pressure is just
Pressure, combustion head expose in air, and top is anti-radiation insulation cover, and by stack effect, the air around burner is gathered
To around burner, compared with conventional burners, silane tail gas is more fully mixed with air, therefore efficiency of combustion significantly carries
Height, so as to improve the treating capacity of silane tail gas；(3) knockout drum and gas vacuum tank are employed in the present system, are ensured
Be passed through the silane gas of burner can fully burn and system overall operation stablize；(4) burner of the invention is exposed to sky
In gas, silane will not be caused to gather because of air supply failure, generation be avoided to dodge quick-fried, securely and reliably；(5) pass through twice steam point
The steam that cloth device sprays can be such that the small quality solid flocculation carried in air-flow is settled downwards by its own gravity into bulky grain,
Solid particle is prevented to be discharged in air with air-flow, it is more environmentally-friendly；(6) unique air purge set design, on the one hand can be to falling
It is purged in the solid particle that transverse tube shows, on the other hand, can make to form spiral air flow inside anti-radiation insulation cover, make solid
Particle is got rid of under the action of the centrifugal force to side wall, prevents solid particle from being settled downwards, and then avoid along anti-radiation insulation cover center
Burn hole plug；(7) silane exhaust treatment system of the invention is positive pressure operation, so as to which air be avoided to enter pipeline and equipment
It is interior, it explodes with the silane vigorous reaction in device, causes personal injury.
Description of the drawings
Fig. 1 is the overall structure diagram of combustion system of the present invention.
Fig. 2 is the second steam distributor bottom view.
Fig. 3 is burner and air purge set part-structure schematic diagram.
Fig. 4 is transverse tube and corresponding air lance position relationship schematic diagram.
Anti-radiation insulation cover 1, windproof noise reduction wall 2, igniter 3, burner 4, crotch formula burner 4, transverse tube 4.1, air inlet
Pipe 4.2, bend pipe 4.3, burner port 4.4, Flame supervision and control system 5, the first steam distributor 6, the second steam distributor 7, steam ring
Pipe 7.1, steam steam inlet pipe 7.1.2, distributor pipe 7.2, communicating pipe 7.3, steam fumarole 7.4, air purge set 8, air endless tube
8.1st, air lance 8.2, blind end 8.2.1, purge hole 8.2.2, air intake duct 8.3.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail, but following embodiment is not formed to the present invention's
Limitation.
Embodiment 1：Silane exhaust gas treating method containing chlorosilane, includes the following steps：(1) chlorosilane level-one is cold
It is solidifying；(2) chlorosilane B-grade condensation；(3) isolated silane gas；(4) gas vacuum tank voltage stabilizing；(5) silane gas burns；Wherein,
(1) chlorosilane level-one condenses：The silane tail gas that the reactive distillation column for producing silane is discharged is passed through level-one tail gas
Condenser carries out preliminary condensation process, and part chlorosilane condensate is made to get off recycling, isolates the level-one after the chlorosilane of part
Silane tail gas is passed through two level tail gas condenser, wherein, the cooling medium of the level-one tail gas condenser is 7 DEG C of cooling waters, described
The tail gas pressure of level-one tail gas condenser is controlled between 0.1-1.0MPaG；
(2) chlorosilane B-grade condensation：The one grade silane tail gas further condenses in the two level tail gas condenser, cold
The chlorosilane recycling got off is coagulated, two grade silane tail gas after the chlorosilane is isolated and is passed through knockout drum, wherein, institute
It is -20 DEG C of chilled brines to state two level tail gas condenser cooling medium, and the tail gas pressure control of the two level tail gas condenser exists
Between 0.1-1.0MPaG；Chlorosilane content in two grade silane tail gas is made to be less than 5wt%, so as to which silane gas key component be made to be silicon
Alkane (contains a small amount of hydrogen)；
(3) isolated silane gas：The two grade silanes tail gas isolates the two level silicon in the knockout drum
Silane gas is obtained after the micro liquid contained in alkane tail gas, wherein, the operating pressure of the knockout drum is controlled in 0.1-
Between 0.5MPaG；Burner is prevented liquid entry into, influences the combustion efficiency of silane gas and silane gas disposal amount；
(4) gas vacuum tank voltage stabilizing：The silane flow goes out the knockout drum and enters the gas vacuum tank voltage stabilizing,
Subsequently into liquid seal can, wherein, the gas voltage stabilizing pressure tank control is between 0.1-0.5MPaG, the fluid-tight pressure tank control
System is between 0.1-0.5MPaG；The main function of gas vacuum tank is to ensure entire silane exhaust treatment system pressure stability, from
And the silane vent gas treatment amount of burner is made to keep relative stability in a short time, it avoids fluctuating widely, so as to ensure silane
Tail gas can fully burn；Liquid seal can primarily serves the effect for preventing tempering.
(5) silane gas burns：The silane flow goes out liquid seal can, burns into combustion system, the institute of the combustion system
The control of silane gas admission pressure is stated between 0.02-0.2MPaG.
Because present invention is mainly used for the tail gas that processing silane reaction rectifying column is discharged.Silane reaction rectifying column itself is grasped
Make pressure in 0.2-1.2MPaG, level-one tail gas condenser, two level tail gas condenser, knockout drum, gas vacuum tank, fluid-tight
Tank, combustion system collectively constitute silane exhaust treatment system, and are flowed by pressure difference.Wherein, level-one tail gas condenser,
Two level tail gas condenser selects suitable pressure, convenient for control tail gas residence time within the condenser, conducive to the cold of chlorosilane
It is solidifying.Knockout drum and gas vacuum tank and liquid seal can are mainly used for the silane tail gas supply of combustion system, hypertonia, meeting
Cause silane flow velocity too fast, combustion system processing load is excessive.Hypotony can cause silane treatment amount to be substantially reduced.
Combustion system includes anti-radiation insulation cover 1, windproof noise reduction wall 2, igniter 3, crotch formula burner 4 and flame monitoring
System 5, windproof noise reduction wall 2 are arranged on outside anti-radiation insulation cover 1, and crotch formula burner 4 is arranged in anti-radiation insulation cover 1
Portion, the head of igniter 3 are stretched into inside anti-radiation insulation cover 1, are placed in 4.1 lower section of transverse tube of crotch formula burner 4, windproof to disappear
Sound wall 2 is equipped with the Flame supervision and control system 5 for monitoring the combustion case inside anti-radiation insulation cover 1；
6 He of the first steam distributor setting up and down is installed with inside the anti-radiation insulation cover 1 of 4 top of crotch formula burner
Second steam distributor 7 is installed with air purging inside the anti-radiation insulation cover 1 below the transverse tube 4.1 of crotch formula burner 4
Device 8；Air purge set 8 includes air endless tube 8.1 and air lance 8.2, and air endless tube 8.1 is set in crotch formula burner
Outside 4, air intake duct 8.3 is equipped in 8.1 bottom of air endless tube, under 4.1 left or right side of transverse tube of crotch formula burner 4
8.1 inner horizontal of air endless tube of side is equipped with air lance 8.2, and air lance 8.2 is arranged in parallel with the one-to-one correspondence of transverse tube 4.1；
8.2 one end of air lance is connected with 8.1 inside of air endless tube, and 8.2 other end of air lance is blind end, in air lance 8.2
The top surface side adjacent with corresponding transverse tube 4.1 offers several purge hole 8.2.2；Purge hole 8.2.2 from inlet end to outlet side,
From inside to outside, it is obliquely installed from bottom to top, and the axis of purge hole 8.2.2 and 4.1 top of transverse tube are tangent, purge hole 8.2.2's
Angle α between axis and horizontal plane is 53 °.
Crotch formula burner 4 includes air inlet pipe 4.2, transverse tube 4.1 and bend pipe 4.3, and several edges are equipped in 4.2 periphery of air inlet pipe
The transverse tube 4.1 of diameter distribution, 4.3 one end of bend pipe are connected with 4.2 side of air inlet pipe, 4.3 other end of bend pipe and 4.1 bottom surface of transverse tube middle part
Connection, several burner ports 4.4 are offered in 4.1 top surface of transverse tube.
First steam distributor 6 is identical with 7 structure of the second steam distributor, and the second steam distributor 7 includes steam loop
7.1 and several distributor pipes 7.2；Steam steam inlet pipe 7.1.2 is equipped in 7.1 bottom of steam loop, distributor pipe 7.2 is horizontally set on steaming
The lower section of vapour endless tube 7.1,7.2 both ends of distributor pipe are connected respectively by communicating pipe with the steam loop 7.1 of top；In every distribution
7.2 lower section of pipe is equipped with several steam fumaroles 7.4.
Embodiment 2：Silane exhaust gas treating method containing chlorosilane, includes the following steps：(1) chlorosilane level-one is cold
It is solidifying；(2) chlorosilane B-grade condensation；(3) isolated silane gas；(4) gas vacuum tank voltage stabilizing；(5) silane gas burns；Wherein,
(1) chlorosilane level-one condenses：The silane tail gas that the reactive distillation column for producing silane is discharged is passed through level-one tail gas
Condenser carries out preliminary condensation process, and part chlorosilane condensate is made to get off recycling, isolates the level-one after the chlorosilane of part
Silane tail gas is passed through two level tail gas condenser, wherein, the cooling medium of the level-one tail gas condenser is 7 DEG C of cooling waters, described
The tail gas pressure of level-one tail gas condenser is controlled between 0.2-0.6MPaG；
(2) chlorosilane B-grade condensation：The one grade silane tail gas further condenses in the two level tail gas condenser, cold
The chlorosilane recycling got off is coagulated, two grade silane tail gas after the chlorosilane is isolated and is passed through knockout drum, wherein, institute
It is -20 DEG C of chilled brines to state two level tail gas condenser cooling medium, and the tail gas pressure control of the two level tail gas condenser exists
Between 0.15-0.55MPaG；Chlorosilane content in two grade silane tail gas is made to be less than 5wt%, so as to which silane gas key component be made to be
Silane (contains a small amount of hydrogen)；
(3) isolated silane gas：The two grade silanes tail gas isolates the two level silicon in the knockout drum
Silane gas is obtained after the micro liquid contained in alkane tail gas, wherein, the operating pressure of the knockout drum is controlled in 0.2-
Between 0.4MpaG；Burner is prevented liquid entry into, influences the combustion efficiency of silane gas and silane gas disposal amount；
(4) gas vacuum tank voltage stabilizing：The silane flow goes out the knockout drum and enters the gas vacuum tank voltage stabilizing,
Subsequently into liquid seal can, wherein, the gas voltage stabilizing pressure tank control is between 0.2-0.4MPaG；The fluid-tight pressure tank control
System is between 0.2-0.4MPaG；The main function of gas vacuum tank is to ensure entire silane exhaust treatment system pressure stability, from
And the silane vent gas treatment amount of burner is made to keep relative stability in a short time, it avoids fluctuating widely, so as to ensure silane
Tail gas can fully burn；Liquid seal can primarily serves the effect for preventing tempering.
(5) silane gas burns：The silane flow goes out liquid seal can, burns into combustion system, the institute of the combustion system
The control of silane gas admission pressure is stated in 0.05-0.15MPaG.
Because present invention is mainly used for the tail gas that processing silane reaction rectifying column is discharged.Silane reaction rectifying column itself is grasped
Make pressure in 0.2-1.2MPaG, level-one tail gas condenser, two level tail gas condenser, knockout drum, gas vacuum tank, fluid-tight
Tank, combustion system collectively constitute silane exhaust treatment system, and are flowed by pressure difference.Wherein, level-one tail gas condenser,
Two level tail gas condenser selects suitable pressure, convenient for control tail gas residence time within the condenser, conducive to the cold of chlorosilane
It is solidifying.Knockout drum and gas vacuum tank and liquid seal can are mainly used for the silane tail gas supply of combustion system, hypertonia, meeting
Cause silane flow velocity too fast, combustion system processing load is excessive.Hypotony can cause silane treatment amount to be substantially reduced.
Combustion system includes anti-radiation insulation cover 1, windproof noise reduction wall 2, igniter 3, crotch formula burner 4 and flame monitoring
System 5, windproof noise reduction wall 2 are arranged on outside anti-radiation insulation cover 1, and crotch formula burner 4 is arranged in anti-radiation insulation cover 1
Portion, the head of igniter 3 are stretched into inside anti-radiation insulation cover 1, are placed in 4.1 lower section of transverse tube of crotch formula burner 4, windproof to disappear
Sound wall 2 is equipped with the Flame supervision and control system 5 for monitoring the combustion case inside anti-radiation insulation cover 1；
6 He of the first steam distributor setting up and down is installed with inside the anti-radiation insulation cover 1 of 4 top of crotch formula burner
Second steam distributor 7 is installed with air purging inside the anti-radiation insulation cover 1 below the transverse tube 4.1 of crotch formula burner 4
Device 8；Air purge set 8 includes air endless tube 8.1 and air lance 8.2, and air endless tube 8.1 is set in crotch formula burner
Outside 4, air intake duct 8.3 is equipped in 8.1 bottom of air endless tube, under 4.1 left or right side of transverse tube of crotch formula burner 4
8.1 inner horizontal of air endless tube of side is equipped with air lance 8.2, and air lance 8.2 is arranged in parallel with the one-to-one correspondence of transverse tube 4.1；
8.2 one end of air lance is connected with 8.1 inside of air endless tube, and 8.2 other end of air lance is blind end, in air lance 8.2
The top surface side adjacent with corresponding transverse tube 4.1 offers several purge hole 8.2.2；Purge hole 8.2.2 from inlet end to outlet side,
From inside to outside, it is obliquely installed from bottom to top, and the axis of purge hole 8.2.2 and 4.1 top of transverse tube are tangent, purge hole 8.2.2's
Angle α between axis and horizontal plane is 53 °.
Crotch formula burner 4 includes air inlet pipe 4.2, transverse tube 4.1 and bend pipe 4.3, and several edges are equipped in 4.2 periphery of air inlet pipe
The transverse tube 4.1 of diameter distribution, 4.3 one end of bend pipe are connected with 4.2 side of air inlet pipe, 4.3 other end of bend pipe and 4.1 bottom surface of transverse tube middle part
Connection, several burner ports 4.4 are offered in 4.1 top surface of transverse tube.
First steam distributor 6 is identical with 7 structure of the second steam distributor, and the second steam distributor 7 includes steam loop
7.1 and several distributor pipes 7.2；Steam steam inlet pipe 7.1.2 is equipped in 7.1 bottom of steam loop, distributor pipe 7.2 is horizontally set on steaming
The lower section of vapour endless tube 7.1,7.2 both ends of distributor pipe are connected respectively by communicating pipe with the steam loop 7.1 of top；In every distribution
7.2 lower section of pipe is equipped with several steam fumaroles 7.4.
Claims (10)
1. the silane exhaust gas treating method containing chlorosilane, which is characterized in that it includes the following steps：(1) chlorosilane level-one is cold
It is solidifying；(2) chlorosilane B-grade condensation；(3) isolated silane gas；(4) gas vacuum tank voltage stabilizing；(5) silane gas burns；Wherein,
(1) chlorosilane level-one condenses：The silane tail gas that the reactive distillation column for producing silane is discharged is passed through level-one tail gas condensing
Device carries out preliminary condensation process, and part chlorosilane condensate is made to get off recycling, isolates the grade silane after the chlorosilane of part
Tail gas is passed through two level tail gas condenser, wherein, the cooling medium of the level-one tail gas condenser is 7 DEG C of cooling waters, the level-one
The tail gas pressure of tail gas condenser is controlled between 0.1-1.0MPaG；
(2) chlorosilane B-grade condensation：The one grade silane tail gas further condenses in the two level tail gas condenser, under condensation
The chlorosilane recycling come, isolates two grade silane tail gas after the chlorosilane and is passed through knockout drum, wherein, described two
Grade tail gas condenser cooling medium is -20 DEG C of chilled brines, and the tail gas pressure of the two level tail gas condenser is controlled in 0.1-
Between 1.0MPaG；
(3) isolated silane gas：The two grade silanes tail gas isolates the two grade silanes tail in the knockout drum
Silane gas is obtained after the micro liquid contained in gas, wherein, the operating pressure of the knockout drum is controlled in 0.1-0.5MPaG
Between；
(4) gas vacuum tank voltage stabilizing：The silane flow goes out the knockout drum and enters the gas vacuum tank voltage stabilizing, then
Into liquid seal can, wherein, between 0.1-0.5MPaG, the fluid-tight pressure tank control exists for the gas voltage stabilizing pressure tank control
Between 0.1-0.5MPaG；
(5) silane gas burns：The silane flow goes out liquid seal can, burns into combustion system, the silicon of the combustion system
Alkane gas admission pressure is controlled between 0.02-0.2MPaG.
2. the silane exhaust gas treating method according to claim 1 containing chlorosilane, which is characterized in that the step (1)
In, the tail gas pressure of the level-one tail gas condenser is controlled between 0.2-0.6MPaG.
3. the silane exhaust gas treating method according to claim 1 containing chlorosilane, which is characterized in that the step (2)
In, the tail gas pressure of the two level tail gas condenser is controlled between 0.15-0.55MPaG.
4. the silane exhaust gas treating method according to claim 1 containing chlorosilane, which is characterized in that the step (3)
In, the operating pressure of the knockout drum is controlled between 0.2-0.4MpaG.
5. the silane exhaust gas treating method according to claim 1 containing chlorosilane, which is characterized in that the step (4)
In, the gas voltage stabilizing pressure tank control is between 0.2-0.4MPaG；Fluid-tight pressure tank control 0.2-0.4MPaG it
Between.
6. the silane exhaust gas treating method according to claim 1 containing chlorosilane, which is characterized in that the step (5)
In, the silane gas admission pressure of the combustion system is controlled in 0.05-0.15MPaG.
7. the silane exhaust gas treating method containing chlorosilane according to claim 1-6 any one, which is characterized in that institute
It states combustion system and includes anti-radiation insulation cover, windproof noise reduction wall, igniter, crotch formula burner and Flame supervision and control system, it is described
Windproof noise reduction wall is arranged on outside the anti-radiation insulation cover, and the crotch formula burner is arranged in the anti-radiation insulation cover
Portion, the head of the igniter are stretched into inside the anti-radiation insulation cover, are placed in below the transverse tube of the crotch formula burner,
The windproof noise reduction wall is equipped with the Flame supervision and control system for monitoring the combustion case inside the anti-radiation insulation cover；
The first steam distributor setting up and down is installed with inside the anti-radiation insulation cover above the crotch formula burner
With the second steam distributor, it is installed with inside the anti-radiation insulation cover below the transverse tube of the crotch formula burner
Air purge set；The air purge set includes air endless tube and air lance, and the air ring pipe sleeve is located at the tree
Wooden fork formula combustor external is equipped with air intake duct, in the transverse tube of the crotch formula burner in the air ring bottom of the tube
The air endless tube inner horizontal below left or right side is equipped with the air lance, the air lance and the transverse tube one
One correspondence is arranged in parallel；It is connected on the inside of described air lance one end and the air endless tube, the air lance other end is envelope
Closed end, in the air lance top surface, the side adjacent with the corresponding transverse tube offers several purge holes；The purge hole by
Inlet end from inside to outside, is obliquely installed, and the axis of the purge hole and transverse tube top phase from bottom to top to outlet side
It cuts, the angle α between the axis and horizontal plane of the purge hole is 30-60 °.
8. the silane exhaust gas treating method according to claim 7 containing chlorosilane, which is characterized in that the crotch formula combustion
Burner includes air inlet pipe, the transverse tube and bend pipe, and several transverse tubes being distributed along diameter are equipped in the air inlet pipe periphery, described
Bend pipe one end is connected with the air inlet tube side part, is connected in the middle part of the bend pipe other end and the transverse tube bottom surface, in the transverse tube
Top surface offers several burner ports.
9. the silane exhaust gas treating method according to claim 7 containing chlorosilane, which is characterized in that first steam
Distributor is identical with the second steam distributor structure, and second steam distributor includes steam loop and several distributions
Pipe；Steam steam inlet pipe is equipped in the steam loop bottom, the distributor pipe is horizontally set on the lower section of the steam loop, institute
Distributor pipe both ends are stated to connect with the steam loop of top by communicating pipe respectively；It is equipped with below the every distributor pipe
Several steam fumaroles.
10. the silane exhaust gas treating method according to claim 8 containing chlorosilane, which is characterized in that described first steams
Vapour distributor is identical with the second steam distributor structure, and second steam distributor includes steam loop and several distributions
Pipe；Steam steam inlet pipe is equipped in the steam loop bottom, the distributor pipe is horizontally set on the lower section of the steam loop, institute
Distributor pipe both ends are stated to connect with the steam loop of top by communicating pipe respectively；It is equipped with below the every distributor pipe
Several steam fumaroles.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611264686.0A CN108261883B (en) | 2016-12-30 | 2016-12-30 | Method for treating silane tail gas containing chlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611264686.0A CN108261883B (en) | 2016-12-30 | 2016-12-30 | Method for treating silane tail gas containing chlorosilane |
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| Publication Number | Publication Date |
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| CN108261883A true CN108261883A (en) | 2018-07-10 |
| CN108261883B CN108261883B (en) | 2020-11-10 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110017490A (en) * | 2019-02-28 | 2019-07-16 | 苏州巨联环保有限公司 | A kind of dimethylamine incinerator and dimethylamine incinerating method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2071237A1 (en) * | 2007-12-14 | 2009-06-17 | Doikos Investments, Ltd. | Method and equipment for thermal treatment of sewage sludge in an incinerator |
| CN201587864U (en) * | 2009-12-14 | 2010-09-22 | 乐山永祥硅业有限公司 | Recycling device for trichlorosilane synthetic tail gas return combustion |
| CN202766304U (en) * | 2012-09-18 | 2013-03-06 | 新特能源股份有限公司 | Polysilicon production tail gas recycling device |
-
2016
- 2016-12-30 CN CN201611264686.0A patent/CN108261883B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2071237A1 (en) * | 2007-12-14 | 2009-06-17 | Doikos Investments, Ltd. | Method and equipment for thermal treatment of sewage sludge in an incinerator |
| CN201587864U (en) * | 2009-12-14 | 2010-09-22 | 乐山永祥硅业有限公司 | Recycling device for trichlorosilane synthetic tail gas return combustion |
| CN202766304U (en) * | 2012-09-18 | 2013-03-06 | 新特能源股份有限公司 | Polysilicon production tail gas recycling device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110017490A (en) * | 2019-02-28 | 2019-07-16 | 苏州巨联环保有限公司 | A kind of dimethylamine incinerator and dimethylamine incinerating method |
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| CN108261883B (en) | 2020-11-10 |
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