CN108261883B - Method for treating silane tail gas containing chlorosilane - Google Patents
Method for treating silane tail gas containing chlorosilane Download PDFInfo
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- CN108261883B CN108261883B CN201611264686.0A CN201611264686A CN108261883B CN 108261883 B CN108261883 B CN 108261883B CN 201611264686 A CN201611264686 A CN 201611264686A CN 108261883 B CN108261883 B CN 108261883B
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- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
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- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
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Abstract
The invention discloses a method for treating silane tail gas containing chlorosilane, which comprises the following steps: (1) primary condensation of chlorosilane; (2) secondary condensation of chlorosilane; (3) separating to obtain silane gas; (4) stabilizing the pressure of the gas pressure stabilizing tank; (5) and (4) burning the silane gas. The invention has the advantages that: the chlorosilane in the silane tail gas is recovered, and the recovered chlorosilane can be reused in a silane production system, so that the material loss is reduced, and the production cost is reduced; the combustion system is provided with the plurality of combustion heads, the pressure of the system is positive pressure, the combustion heads are exposed in the air, the upper part of the combustion system is provided with the radiation-proof heat-insulating cover, and the air around the combustor is accumulated around the combustor by means of a chimney effect.
Description
Technical Field
The invention relates to a silane tail gas treatment method, in particular to a silane tail gas treatment method containing chlorosilane.
Background
Currently, the related art of silane tail gas treatment mainly aims at the waste gas generated in the process of applying silane as a product, such as the waste gas generated in the process of producing solar cells, integrated circuits and electronic components. Traditional silane tail gas processing system generally goes on in the silane combustion tower, the silane combustion tower is a confined space, silane tail gas, the air lets in the silane combustion tower through the pipeline respectively in, rely on the diffusion of molecule to mix the postcombustion, if air supply breaks down in the combustion process, can cause silane gas to take place a large amount of accumulations, discharge in the air in a large amount of silane tail gas short times, the burning is violent, probably produces the flash explosion, there is the potential safety hazard, simultaneously, combustion efficiency is low.
The torch system is adopted to treat the silane tail gas, so that the safe production of a factory can be ensured, solid particles can be generated in the silane tail gas in the combustion treatment process, and a part of solid particles with small mass can be discharged into the atmosphere along with the rising of the airflow, so that the environmental pollution is caused; the other part of solid particles with large mass can settle downwards to block combustion holes, so that the combustor is blocked, the failure rate of a torch system is high, silane tail gas in the radiation-proof heat shield cannot be sufficiently combusted and is directly discharged into the atmosphere, and the environment is polluted.
At present, the related technologies for treating silane tail gas containing chlorosilane generated in the process of preparing silane, particularly in the process of preparing silane by using a reactive distillation method, are less.
Disclosure of Invention
The invention aims to provide a method for treating silane tail gas containing chlorosilane, which is mainly used for treating the silane tail gas containing a small amount of chlorosilane discharged in the process of producing silane by a reactive distillation tower. The technical scheme provided by the invention realizes the full recovery of chlorosilane in the silane tail gas, and safely, efficiently and stably utilizes the burner with a plurality of burning heads to process the silane tail gas.
The purpose of the invention is implemented by the following technical scheme: the silane tail gas treatment method containing chlorosilane comprises the following steps: (1) primary condensation of chlorosilane; (2) secondary condensation of chlorosilane; (3) separating to obtain silane gas; (4) stabilizing the pressure of the gas pressure stabilizing tank; (5) burning silane gas; wherein the content of the first and second substances,
(1) primary condensation of chlorosilane: introducing silane tail gas discharged by a reaction rectifying tower for producing silane into a primary tail gas condenser for primary condensation treatment, condensing and recovering part of chlorosilane, and introducing the primary silane tail gas after separating part of the chlorosilane into a secondary tail gas condenser, wherein a cooling medium of the primary tail gas condenser is cooling water at 7 ℃, and the tail gas pressure of the primary tail gas condenser is controlled between 0.1 and 1.0 MPaG;
(2) secondary condensation of chlorosilane: the first-stage silane tail gas is further condensed in the second-stage tail gas condenser, the condensed chlorosilane is recovered, and the second-stage silane tail gas from which the chlorosilane is separated is introduced into a gas-liquid separation tank, wherein a cooling medium of the second-stage tail gas condenser is frozen brine at the temperature of-20 ℃, and the tail gas pressure of the second-stage tail gas condenser is controlled to be 0.1-1.0 MPaG; the content of chlorosilane in the secondary silane tail gas is less than 5 wt%, so that the main component of silane gas is silane (containing a small amount of hydrogen);
(3) separating to obtain silane gas: separating trace liquid contained in the secondary silane tail gas in the gas-liquid separation tank to obtain silane gas, wherein the operating pressure of the gas-liquid separation tank is controlled between 0.1 and 0.5 MPaG; liquid is prevented from entering a combustor to influence the combustion effect of the silane gas and the treatment capacity of the silane gas;
(4) pressure stabilization of the gas pressure stabilization tank: the silane gas flows out of the gas-liquid separation tank, enters the gas pressure stabilizing tank for pressure stabilization, and then enters the liquid seal tank, wherein the pressure of the gas pressure stabilizing tank is controlled to be between 0.1 and 0.5MPaG, and the pressure of the liquid seal tank is controlled to be between 0.1 and 0.5 MPaG; the gas pressure stabilizing tank has the main functions of ensuring the pressure stability of the whole silane tail gas treatment system, so that the silane tail gas treatment capacity of the combustor is kept relatively stable in a short time, and large-amplitude fluctuation is avoided, thereby ensuring that the silane tail gas can be fully combusted; the liquid-sealed tank mainly plays a role in preventing backfire.
(5) And (3) combustion of silane gas: and the silane gas flows out of the liquid seal tank and enters a combustion system for combustion, and the silane gas inlet pressure of the combustion system is controlled between 0.02 and 0.2 MPaG.
The method is mainly used for treating the tail gas discharged from the silane reaction rectifying tower. The self operating pressure of the silane reaction rectifying tower is 0.2-1.2MPaG, and the first-stage tail gas condenser, the second-stage tail gas condenser, the gas-liquid separation tank, the gas pressure stabilizing tank, the liquid seal tank and the combustion system form a silane tail gas treatment system and flow by means of pressure difference. Wherein, suitable pressure is selected for the first-stage tail gas condenser and the second-stage tail gas condenser, so that the residence time of tail gas in the condensers is convenient to control, and condensation of chlorosilane is facilitated. The gas-liquid separation tank, the gas pressure stabilizing tank and the liquid seal tank are mainly used for supplying silane tail gas of a combustion system, and the silane flow rate is too high due to too high pressure, so that the treatment load of the combustion system is too large. Too low a pressure results in a significant reduction in silane throughput.
Preferably, in the step (1), the tail gas pressure of the primary tail gas condenser is controlled to be between 0.2 and 0.6 MPaG.
Preferably, in the step (2), the tail gas pressure of the secondary tail gas condenser is controlled to be between 0.15 and 0.55 MPaG.
Preferably, in the step (3), the operation pressure of the gas-liquid separation tank is controlled to be between 0.2 and 0.4 MpaG.
Preferably, in the step (4), the pressure of the gas pressure stabilizing tank is controlled between 0.2 and 0.4 MPaG; the pressure of the liquid seal tank is controlled between 0.2 and 0.4 MPaG.
Preferably, in the step (5), the silane gas inlet pressure of the combustion system is controlled to be 0.05-0.15 MPaG.
Furthermore, the combustion system comprises a radiation-proof heat shield, a wind-proof noise reduction wall, an igniter, a crotch-type burner and a flame monitoring system, wherein the wind-proof noise reduction wall is arranged outside the radiation-proof heat shield, the crotch-type burner is arranged inside the radiation-proof heat shield, the head of the igniter extends into the radiation-proof heat shield and is arranged below a transverse pipe of the crotch-type burner, and the wind-proof noise reduction wall is provided with the flame monitoring system for monitoring the combustion condition inside the radiation-proof heat shield;
a first steam distributor and a second steam distributor which are arranged up and down are arranged in the radiation-proof heat-insulating cover above the crotch-type combustor, and an air blowing device is arranged in the radiation-proof heat-insulating cover below the transverse pipe of the crotch-type combustor; the air blowing device comprises an air ring pipe and air spray pipes, the air ring pipe is sleeved outside the crotch type combustor, an air inlet pipe is arranged at the bottom of the air ring pipe, the air spray pipes are horizontally arranged in the air ring pipe below the left side or the right side of the transverse pipe of the crotch type combustor, and the air spray pipes and the transverse pipes are arranged in parallel in a one-to-one correspondence mode; one end of the air spray pipe is communicated with the inner side of the air ring pipe, the other end of the air spray pipe is a closed end, and a plurality of blowing holes are formed in the top surface of the air spray pipe and one side, adjacent to the corresponding transverse pipe, of the air spray pipe; the blowing holes are obliquely arranged from the air inlet end to the air outlet end from inside to outside and from bottom to top, the axes of the blowing holes are tangent to the upper part of the transverse pipe, and the included angle alpha between the axes of the blowing holes and the horizontal plane is 30-60 degrees.
Specifically, crotch formula combustor includes the intake pipe violently manage and the return bend the intake pipe periphery is equipped with a plurality of along footpath distribution violently manage, return bend one end with the intake pipe lateral part intercommunication, the return bend other end with violently manage bottom surface middle part intercommunication violently the top surface of violently managing has seted up a plurality of burner ports.
Specifically, the first steam distributor and the second steam distributor have the same structure, and the second steam distributor comprises a steam ring pipe and a plurality of distribution pipes; a steam inlet pipe is arranged at the bottom of the steam ring pipe, the distribution pipe is horizontally arranged below the steam ring pipe, and two ends of the distribution pipe are respectively communicated with the steam ring pipe above the distribution pipe through communicating pipes; and a plurality of steam spray holes are formed below each distribution pipe.
The invention has the advantages that: (1) the chlorosilane in the silane tail gas is recovered, and the recovered chlorosilane can be reused in a silane production system, so that the material loss is reduced, and the production cost is reduced; (2) the invention adopts a secondary condensation mode to recover a small amount of chlorosilane contained in the silane tail gas, and has convenient operation and no pollution; (2) the combustion system is provided with the plurality of combustion heads, the pressure of the system is positive pressure, the combustion heads are exposed in the air, the upper part of the combustion system is provided with the radiation-proof heat-insulating cover, and the air around the combustor is accumulated around the combustor by means of a chimney effect; (3) the gas-liquid separation tank and the gas pressure stabilizing tank are adopted in the system, so that the silane gas introduced into the combustor can be fully combusted, and the overall operation of the system is stable; (4) the burner disclosed by the invention is exposed in air, so that silane accumulation caused by air supply failure can be avoided, flash explosion is avoided, and the burner is safe and reliable; (5) the steam sprayed by the two steam distributors can condense small-mass solid particles carried in the airflow into large particles, and the large-mass solid particles are settled downwards by the aid of self gravity, so that the solid particles are prevented from being discharged into the atmosphere along with the airflow, and the steam distributor is more environment-friendly; (6) the unique design of the air purging device can purge solid particles falling on the surface of the transverse pipe on one hand, and can enable the inside of the radiation-proof heat shield to form spiral airflow on the other hand, so that the solid particles are thrown to the side wall under the action of centrifugal force, the solid particles are prevented from settling downwards along the center of the radiation-proof heat shield, and further the blockage of a combustion hole is avoided; (7) the silane tail gas treatment system is operated at positive pressure, so that air is prevented from entering pipelines and equipment and violently reacting and exploding with silane in the device to cause personal injury.
Drawings
FIG. 1 is a schematic view of the overall structure of the combustion system of the present invention.
Fig. 2 is a bottom view of a second steam distributor.
FIG. 3 is a schematic view of a part of the structure of a burner and an air purge device.
FIG. 4 is a schematic view of the relationship between the position of the cross tube and the corresponding air nozzle.
The anti-radiation heat shield comprises a radiation-proof heat shield 1, a windproof silencing wall 2, an igniter 3, a combustor 4, a crotch-type combustor 4, a transverse pipe 4.1, an air inlet pipe 4.2, a bent pipe 4.3, combustion holes 4.4, a flame monitoring system 5, a first steam distributor 6, a second steam distributor 7, a steam ring pipe 7.1, a steam inlet pipe 7.1.2, a distribution pipe 7.2, a communicating pipe 7.3, steam spray holes 7.4, an air blowing device 8, an air ring pipe 8.1, an air spray pipe 8.2, a closed end 8.2.1, a blowing hole 8.2.2 and an air inlet pipe 8.3.
Detailed Description
The present invention will be described in detail with reference to specific examples, but the following examples are not intended to limit the present invention.
Example 1: the silane tail gas treatment method containing chlorosilane comprises the following steps: (1) primary condensation of chlorosilane; (2) secondary condensation of chlorosilane; (3) separating to obtain silane gas; (4) stabilizing the pressure of the gas pressure stabilizing tank; (5) burning silane gas; wherein the content of the first and second substances,
(1) primary condensation of chlorosilane: introducing silane tail gas discharged by a reaction rectifying tower for producing silane into a primary tail gas condenser for primary condensation treatment, condensing and recovering part of chlorosilane, and introducing the primary silane tail gas after separating part of the chlorosilane into a secondary tail gas condenser, wherein a cooling medium of the primary tail gas condenser is cooling water at 7 ℃, and the tail gas pressure of the primary tail gas condenser is controlled between 0.1 and 1.0 MPaG;
(2) secondary condensation of chlorosilane: the first-stage silane tail gas is further condensed in the second-stage tail gas condenser, the condensed chlorosilane is recovered, and the second-stage silane tail gas from which the chlorosilane is separated is introduced into a gas-liquid separation tank, wherein a cooling medium of the second-stage tail gas condenser is frozen brine at the temperature of-20 ℃, and the tail gas pressure of the second-stage tail gas condenser is controlled to be 0.1-1.0 MPaG; the content of chlorosilane in the secondary silane tail gas is less than 5 wt%, so that the main component of silane gas is silane (containing a small amount of hydrogen);
(3) separating to obtain silane gas: separating trace liquid contained in the secondary silane tail gas in the gas-liquid separation tank to obtain silane gas, wherein the operating pressure of the gas-liquid separation tank is controlled between 0.1 and 0.5 MPaG; liquid is prevented from entering a combustor to influence the combustion effect of the silane gas and the treatment capacity of the silane gas;
(4) pressure stabilization of the gas pressure stabilization tank: the silane gas flows out of the gas-liquid separation tank, enters the gas pressure stabilizing tank for pressure stabilization, and then enters the liquid seal tank, wherein the pressure of the gas pressure stabilizing tank is controlled to be between 0.1 and 0.5MPaG, and the pressure of the liquid seal tank is controlled to be between 0.1 and 0.5 MPaG; the gas pressure stabilizing tank has the main functions of ensuring the pressure stability of the whole silane tail gas treatment system, so that the silane tail gas treatment capacity of the combustor is kept relatively stable in a short time, and large-amplitude fluctuation is avoided, thereby ensuring that the silane tail gas can be fully combusted; the liquid-sealed tank mainly plays a role in preventing backfire.
(5) And (3) combustion of silane gas: and the silane gas flows out of the liquid seal tank and enters a combustion system for combustion, and the silane gas inlet pressure of the combustion system is controlled between 0.02 and 0.2 MPaG.
The method is mainly used for treating the tail gas discharged from the silane reaction rectifying tower. The self operating pressure of the silane reaction rectifying tower is 0.2-1.2MPaG, and the first-stage tail gas condenser, the second-stage tail gas condenser, the gas-liquid separation tank, the gas pressure stabilizing tank, the liquid seal tank and the combustion system form a silane tail gas treatment system and flow by means of pressure difference. Wherein, suitable pressure is selected for the first-stage tail gas condenser and the second-stage tail gas condenser, so that the residence time of tail gas in the condensers is convenient to control, and condensation of chlorosilane is facilitated. The gas-liquid separation tank, the gas pressure stabilizing tank and the liquid seal tank are mainly used for supplying silane tail gas of a combustion system, and the silane flow rate is too high due to too high pressure, so that the treatment load of the combustion system is too large. Too low a pressure results in a significant reduction in silane throughput.
The combustion system comprises a radiation-proof heat shield 1, a wind-proof noise reduction wall 2, an igniter 3, a crotch-type burner 4 and a flame monitoring system 5, wherein the wind-proof noise reduction wall 2 is arranged outside the radiation-proof heat shield 1, the crotch-type burner 4 is arranged inside the radiation-proof heat shield 1, the head of the igniter 3 extends into the radiation-proof heat shield 1 and is arranged below a transverse pipe 4.1 of the crotch-type burner 4, and the wind-proof noise reduction wall 2 is provided with the flame monitoring system 5 for monitoring the combustion condition inside the radiation-proof heat shield 1;
a first steam distributor 6 and a second steam distributor 7 which are arranged up and down are arranged in the radiation-proof heat-insulating cover 1 above the crotch-type combustor 4, and an air blowing device 8 is arranged in the radiation-proof heat-insulating cover 1 below a transverse pipe 4.1 of the crotch-type combustor 4; the air blowing device 8 comprises an air ring pipe 8.1 and air spray pipes 8.2, the air ring pipe 8.1 is sleeved outside the crotch type combustor 4, an air inlet pipe 8.3 is arranged at the bottom of the air ring pipe 8.1, the air spray pipes 8.2 are horizontally arranged in the air ring pipe 8.1 below the left side or the right side of the transverse pipe 4.1 of the crotch type combustor 4, and the air spray pipes 8.2 and the transverse pipes 4.1 are arranged in parallel in a one-to-one correspondence manner; one end of an air spray pipe 8.2 is communicated with the inner side of the air ring pipe 8.1, the other end of the air spray pipe 8.2 is a closed end, and a plurality of purge holes 8.2.2 are arranged on one side of the top surface of the air spray pipe 8.2 adjacent to the corresponding transverse pipe 4.1; the blowing holes 8.2.2 are obliquely arranged from the air inlet end to the air outlet end from inside to outside and from bottom to top, the axes of the blowing holes 8.2.2 are tangent with the upper part of the transverse pipe 4.1, and the included angle alpha between the axes of the blowing holes 8.2.2 and the horizontal plane is 53 degrees.
The crotch type combustor 4 comprises an air inlet pipe 4.2, a transverse pipe 4.1 and an elbow pipe 4.3, a plurality of transverse pipes 4.1 distributed along the diameter are arranged on the periphery of the air inlet pipe 4.2, one end of the elbow pipe 4.3 is communicated with the side portion of the air inlet pipe 4.2, the other end of the elbow pipe 4.3 is communicated with the middle of the bottom surface of the transverse pipe 4.1, and a plurality of combustion holes 4.4 are formed in the top surface of the transverse pipe 4.1.
The first steam distributor 6 and the second steam distributor 7 have the same structure, and the second steam distributor 7 comprises a steam ring pipe 7.1 and a plurality of distribution pipes 7.2; a steam inlet pipe 7.1.2 is arranged at the bottom of the steam ring pipe 7.1, a distribution pipe 7.2 is horizontally arranged below the steam ring pipe 7.1, and two ends of the distribution pipe 7.2 are respectively communicated with the steam ring pipe 7.1 above through communicating pipes; a plurality of steam spray holes 7.4 are arranged below each distribution pipe 7.2.
Example 2: the silane tail gas treatment method containing chlorosilane comprises the following steps: (1) primary condensation of chlorosilane; (2) secondary condensation of chlorosilane; (3) separating to obtain silane gas; (4) stabilizing the pressure of the gas pressure stabilizing tank; (5) burning silane gas; wherein the content of the first and second substances,
(1) primary condensation of chlorosilane: introducing silane tail gas discharged by a reaction rectifying tower for producing silane into a primary tail gas condenser for primary condensation treatment, condensing and recovering part of chlorosilane, and introducing the primary silane tail gas after separating part of the chlorosilane into a secondary tail gas condenser, wherein a cooling medium of the primary tail gas condenser is cooling water at 7 ℃, and the tail gas pressure of the primary tail gas condenser is controlled between 0.2 and 0.6 MPaG;
(2) secondary condensation of chlorosilane: the primary silane tail gas is further condensed in the secondary tail gas condenser, the condensed chlorosilane is recovered, and the secondary silane tail gas from which the chlorosilane is separated is introduced into a gas-liquid separation tank, wherein the cooling medium of the secondary tail gas condenser is frozen brine at the temperature of-20 ℃, and the tail gas pressure of the secondary tail gas condenser is controlled between 0.15 and 0.55 MPaG; the content of chlorosilane in the secondary silane tail gas is less than 5 wt%, so that the main component of silane gas is silane (containing a small amount of hydrogen);
(3) separating to obtain silane gas: separating trace liquid contained in the secondary silane tail gas in the gas-liquid separation tank to obtain silane gas, wherein the operating pressure of the gas-liquid separation tank is controlled between 0.2 and 0.4 MpaG; liquid is prevented from entering a combustor to influence the combustion effect of the silane gas and the treatment capacity of the silane gas;
(4) pressure stabilization of the gas pressure stabilization tank: the silane gas flows out of the gas-liquid separation tank, enters the gas pressure stabilizing tank for pressure stabilization, and then enters the liquid seal tank, wherein the pressure of the gas pressure stabilizing tank is controlled between 0.2 and 0.4 MPaG; the pressure of the liquid seal tank is controlled between 0.2 and 0.4 MPaG; the gas pressure stabilizing tank has the main functions of ensuring the pressure stability of the whole silane tail gas treatment system, so that the silane tail gas treatment capacity of the combustor is kept relatively stable in a short time, and large-amplitude fluctuation is avoided, thereby ensuring that the silane tail gas can be fully combusted; the liquid-sealed tank mainly plays a role in preventing backfire.
(5) And (3) combustion of silane gas: and the silane gas flows out of the liquid seal tank and enters a combustion system for combustion, and the silane gas inlet pressure of the combustion system is controlled to be 0.05-0.15 MPaG.
The method is mainly used for treating the tail gas discharged from the silane reaction rectifying tower. The self operating pressure of the silane reaction rectifying tower is 0.2-1.2MPaG, and the first-stage tail gas condenser, the second-stage tail gas condenser, the gas-liquid separation tank, the gas pressure stabilizing tank, the liquid seal tank and the combustion system form a silane tail gas treatment system and flow by means of pressure difference. Wherein, suitable pressure is selected for the first-stage tail gas condenser and the second-stage tail gas condenser, so that the residence time of tail gas in the condensers is convenient to control, and condensation of chlorosilane is facilitated. The gas-liquid separation tank, the gas pressure stabilizing tank and the liquid seal tank are mainly used for supplying silane tail gas of a combustion system, and the silane flow rate is too high due to too high pressure, so that the treatment load of the combustion system is too large. Too low a pressure results in a significant reduction in silane throughput.
The combustion system comprises a radiation-proof heat shield 1, a wind-proof noise reduction wall 2, an igniter 3, a crotch-type burner 4 and a flame monitoring system 5, wherein the wind-proof noise reduction wall 2 is arranged outside the radiation-proof heat shield 1, the crotch-type burner 4 is arranged inside the radiation-proof heat shield 1, the head of the igniter 3 extends into the radiation-proof heat shield 1 and is arranged below a transverse pipe 4.1 of the crotch-type burner 4, and the wind-proof noise reduction wall 2 is provided with the flame monitoring system 5 for monitoring the combustion condition inside the radiation-proof heat shield 1;
a first steam distributor 6 and a second steam distributor 7 which are arranged up and down are arranged in the radiation-proof heat-insulating cover 1 above the crotch-type combustor 4, and an air blowing device 8 is arranged in the radiation-proof heat-insulating cover 1 below a transverse pipe 4.1 of the crotch-type combustor 4; the air blowing device 8 comprises an air ring pipe 8.1 and air spray pipes 8.2, the air ring pipe 8.1 is sleeved outside the crotch type combustor 4, an air inlet pipe 8.3 is arranged at the bottom of the air ring pipe 8.1, the air spray pipes 8.2 are horizontally arranged in the air ring pipe 8.1 below the left side or the right side of the transverse pipe 4.1 of the crotch type combustor 4, and the air spray pipes 8.2 and the transverse pipes 4.1 are arranged in parallel in a one-to-one correspondence manner; one end of an air spray pipe 8.2 is communicated with the inner side of the air ring pipe 8.1, the other end of the air spray pipe 8.2 is a closed end, and a plurality of purge holes 8.2.2 are arranged on one side of the top surface of the air spray pipe 8.2 adjacent to the corresponding transverse pipe 4.1; the blowing holes 8.2.2 are obliquely arranged from the air inlet end to the air outlet end from inside to outside and from bottom to top, the axes of the blowing holes 8.2.2 are tangent with the upper part of the transverse pipe 4.1, and the included angle alpha between the axes of the blowing holes 8.2.2 and the horizontal plane is 53 degrees.
The crotch type combustor 4 comprises an air inlet pipe 4.2, a transverse pipe 4.1 and an elbow pipe 4.3, a plurality of transverse pipes 4.1 distributed along the diameter are arranged on the periphery of the air inlet pipe 4.2, one end of the elbow pipe 4.3 is communicated with the side portion of the air inlet pipe 4.2, the other end of the elbow pipe 4.3 is communicated with the middle of the bottom surface of the transverse pipe 4.1, and a plurality of combustion holes 4.4 are formed in the top surface of the transverse pipe 4.1.
The first steam distributor 6 and the second steam distributor 7 have the same structure, and the second steam distributor 7 comprises a steam ring pipe 7.1 and a plurality of distribution pipes 7.2; a steam inlet pipe 7.1.2 is arranged at the bottom of the steam ring pipe 7.1, a distribution pipe 7.2 is horizontally arranged below the steam ring pipe 7.1, and two ends of the distribution pipe 7.2 are respectively communicated with the steam ring pipe 7.1 above through communicating pipes; a plurality of steam spray holes 7.4 are arranged below each distribution pipe 7.2.
Claims (9)
1. The silane tail gas treatment method containing chlorosilane is characterized by comprising the following steps of: (1) primary condensation of chlorosilane; (2) secondary condensation of chlorosilane; (3) separating to obtain silane gas; (4) stabilizing the pressure of the gas pressure stabilizing tank; (5) burning silane gas; wherein the content of the first and second substances,
(1) primary condensation of chlorosilane: introducing silane tail gas discharged by a reaction rectifying tower for producing silane into a primary tail gas condenser for primary condensation treatment, condensing and recovering part of chlorosilane, and introducing the primary silane tail gas after separating part of the chlorosilane into a secondary tail gas condenser, wherein a cooling medium of the primary tail gas condenser is cooling water at 7 ℃, and the tail gas pressure of the primary tail gas condenser is controlled between 0.1 and 1.0 MPaG;
(2) secondary condensation of chlorosilane: the first-stage silane tail gas is further condensed in the second-stage tail gas condenser, the condensed chlorosilane is recovered, and the second-stage silane tail gas from which the chlorosilane is separated is introduced into a gas-liquid separation tank, wherein a cooling medium of the second-stage tail gas condenser is frozen brine at the temperature of-20 ℃, and the tail gas pressure of the second-stage tail gas condenser is controlled to be 0.1-1.0 MPaG;
(3) separating to obtain silane gas: separating trace liquid contained in the secondary silane tail gas in the gas-liquid separation tank to obtain silane gas, wherein the operating pressure of the gas-liquid separation tank is controlled between 0.1 and 0.5 MPaG;
(4) pressure stabilization of the gas pressure stabilization tank: the silane gas flows out of the gas-liquid separation tank, enters the gas pressure stabilizing tank for pressure stabilization, and then enters the liquid seal tank, wherein the pressure of the gas pressure stabilizing tank is controlled to be between 0.1 and 0.5MPaG, and the pressure of the liquid seal tank is controlled to be between 0.1 and 0.5 MPaG;
(5) and (3) combustion of silane gas: the silane gas flows out of the liquid seal tank and enters a combustion system for combustion, and the inlet pressure of the silane gas of the combustion system is controlled between 0.02 and 0.2 MPaG;
the combustion system comprises a radiation-proof heat shield, a wind-proof noise reduction wall, an igniter, a crotch-type burner and a flame monitoring system, wherein the wind-proof noise reduction wall is arranged outside the radiation-proof heat shield, the crotch-type burner is arranged inside the radiation-proof heat shield, the head of the igniter extends into the radiation-proof heat shield and is arranged below a transverse pipe of the crotch-type burner, and the wind-proof noise reduction wall is provided with the flame monitoring system for monitoring the combustion condition inside the radiation-proof heat shield;
a first steam distributor and a second steam distributor which are arranged up and down are arranged in the radiation-proof heat-insulating cover above the crotch-type combustor, and an air blowing device is arranged in the radiation-proof heat-insulating cover below the transverse pipe of the crotch-type combustor; the air blowing device comprises an air ring pipe and air spray pipes, the air ring pipe is sleeved outside the crotch type combustor, an air inlet pipe is arranged at the bottom of the air ring pipe, the air spray pipes are horizontally arranged in the air ring pipe below the left side or the right side of the transverse pipe of the crotch type combustor, and the air spray pipes and the transverse pipes are arranged in parallel in a one-to-one correspondence mode; one end of the air spray pipe is communicated with the inner side of the air ring pipe, the other end of the air spray pipe is a closed end, and a plurality of blowing holes are formed in the top surface of the air spray pipe and one side, adjacent to the corresponding transverse pipe, of the air spray pipe; the blowing holes are obliquely arranged from the air inlet end to the air outlet end from inside to outside and from bottom to top, the axes of the blowing holes are tangent to the upper part of the transverse pipe, and the included angle alpha between the axes of the blowing holes and the horizontal plane is 30-60 degrees.
2. The method for treating silane tail gas containing chlorosilane as claimed in claim 1, wherein in the step (1), the tail gas pressure of the primary tail gas condenser is controlled to be 0.2-0.6 MPaG.
3. The method for treating silane tail gas containing chlorosilane as claimed in claim 1, wherein in the step (2), the tail gas pressure of the secondary tail gas condenser is controlled to be between 0.15 and 0.55 MPaG.
4. The method for treating silane tail gas containing chlorosilane as claimed in claim 1, wherein in the step (3), the operation pressure of the gas-liquid separation tank is controlled to be 0.2-0.4 MpaG.
5. The method for treating silane tail gas containing chlorosilane as claimed in claim 1, wherein in the step (4), the pressure of the gas pressure stabilizing tank is controlled to be between 0.2 and 0.4 MPaG; the pressure of the liquid seal tank is controlled between 0.2 and 0.4 MPaG.
6. The method for treating silane tail gas containing chlorosilane as claimed in claim 1, wherein in the step (5), the silane gas inlet pressure of the combustion system is controlled to be 0.05-0.15 MPaG.
7. The method for treating silane-containing tail gas containing chlorosilane as claimed in claim 1, wherein the crotch-type burner comprises an air inlet pipe, transverse pipes and bent pipes, wherein the transverse pipes are distributed along the diameter of the air inlet pipe, one end of each bent pipe is communicated with the side part of the air inlet pipe, the other end of each bent pipe is communicated with the middle part of the bottom surface of the corresponding transverse pipe, and a plurality of combustion holes are formed in the top surface of each transverse pipe.
8. The method for treating silane tail gas containing chlorosilane as claimed in claim 1, wherein the first steam distributor and the second steam distributor are the same in structure, and the second steam distributor comprises a steam loop pipe and a plurality of distribution pipes; a steam inlet pipe is arranged at the bottom of the steam ring pipe, the distribution pipe is horizontally arranged below the steam ring pipe, and two ends of the distribution pipe are respectively communicated with the steam ring pipe above the distribution pipe through communicating pipes; and a plurality of steam spray holes are formed below each distribution pipe.
9. The method as claimed in claim 7, wherein the first steam distributor and the second steam distributor are the same in structure, and the second steam distributor comprises a steam loop pipe and a plurality of distribution pipes; a steam inlet pipe is arranged at the bottom of the steam ring pipe, the distribution pipe is horizontally arranged below the steam ring pipe, and two ends of the distribution pipe are respectively communicated with the steam ring pipe above the distribution pipe through communicating pipes; and a plurality of steam spray holes are formed below each distribution pipe.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2071237A1 (en) * | 2007-12-14 | 2009-06-17 | Doikos Investments, Ltd. | Method and equipment for thermal treatment of sewage sludge in an incinerator |
| CN201587864U (en) * | 2009-12-14 | 2010-09-22 | 乐山永祥硅业有限公司 | Recycling device for trichlorosilane synthetic tail gas return combustion |
| CN202766304U (en) * | 2012-09-18 | 2013-03-06 | 新特能源股份有限公司 | Polysilicon production tail gas recycling device |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2071237A1 (en) * | 2007-12-14 | 2009-06-17 | Doikos Investments, Ltd. | Method and equipment for thermal treatment of sewage sludge in an incinerator |
| CN201587864U (en) * | 2009-12-14 | 2010-09-22 | 乐山永祥硅业有限公司 | Recycling device for trichlorosilane synthetic tail gas return combustion |
| CN202766304U (en) * | 2012-09-18 | 2013-03-06 | 新特能源股份有限公司 | Polysilicon production tail gas recycling device |
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