CN108257892B - Vacuum chamber and method for locking vacuum chamber door - Google Patents
Vacuum chamber and method for locking vacuum chamber door Download PDFInfo
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- CN108257892B CN108257892B CN201711458470.2A CN201711458470A CN108257892B CN 108257892 B CN108257892 B CN 108257892B CN 201711458470 A CN201711458470 A CN 201711458470A CN 108257892 B CN108257892 B CN 108257892B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67236—Apparatus for manufacturing or treating in a plurality of work-stations the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a vacuum chamber and a method for locking a door of the vacuum chamber, which further improve the safety of an operator working in a manufacturing device such as an FPD. The transfer chamber (10) includes a container, a top plate (13), an exhaust device (41), a door (32), an electromagnetic lock, and a control device (51). The container has a space for accommodating a substrate to be processed and an upper opening. The top plate (13) opens and closes the upper opening. An air discharge device (41) discharges air from the container. A door (32) is provided on the side of the container and is opened when an operator enters the container. The electromagnetic lock locks and unlocks a door (32). The control device (51) controls the electromagnetic lock to unlock the door (32) on the condition that the top plate (13) is opened and a stopper for preventing the top plate (13) from closing the upper opening is mounted in the upper opening.
Description
Technical Field
Various aspects and embodiments of the present invention relate to a vacuum chamber and a method of locking a door of the vacuum chamber.
Background
There is known an apparatus for manufacturing a semiconductor device by performing a predetermined process on a target substrate disposed in a container by introducing a process gas or the like into the container while the interior of the container is kept in a vacuum state. In recent years, the size of a substrate to be processed tends to increase in order to reduce the manufacturing cost of a semiconductor device. Accordingly, the manufacturing apparatus of the semiconductor device is also becoming larger in size.
When a manufacturing apparatus for a semiconductor device is increased in size, an operator may enter the apparatus to perform work more efficiently when performing maintenance inside the apparatus. When an operator enters the apparatus and works, in order to ensure the safety of the operator, a technique is known in which a door for entering the apparatus is unlocked when the oxygen concentration in the apparatus becomes equal to or higher than a predetermined value.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2009-194358
Disclosure of Invention
Technical problem to be solved by the invention
In a semiconductor device manufacturing apparatus, an operator can enter the apparatus, but the operator in operation can often see the inside of the apparatus through an entrance. Thus, there are fewer instances where the operator is not noticed within the device and the door to the access port is closed. However, an apparatus for manufacturing a Flat Panel Display (FPD) substrate or the like is large in size compared to an apparatus for manufacturing a semiconductor device. In recent years, FPDs have been increasing in size, and FPD manufacturing apparatuses have been increasing in size. Therefore, an operator who works inside the FPD manufacturing apparatus may not be able to see the inside of the apparatus through the entrance. Thus, sometimes the operator is not noticed within the device and the door to the access port is closed. Therefore, in a large-sized device such as an FPD manufacturing device, further security measures are required.
One aspect of the invention includes a container, a lid, a vent, a door, an upper lock portion, and a control device. The container has a space for accommodating the substrate to be processed and an opening at the upper part. The cover opens and closes the opening. The exhaust device exhausts the container. The door is provided at the side of the container and is opened when an operator enters the container. The upper lock portion locks and unlocks the door. The control device controls the upper lock portion to unlock the door on the condition that the lid is opened and an intervening member that blocks the lid from closing the opening portion is attached to the opening portion.
Effects of the invention
According to the aspects and embodiments of the present invention, the safety of an operator who works inside a manufacturing apparatus for an FPD or the like can be further improved.
Drawings
Fig. 1 is a perspective view showing an example of a transfer chamber.
Fig. 2 is an exploded perspective view showing an example of the transfer chamber with the top plate opened.
Fig. 3 is an enlarged sectional view showing an example of a flange near a position where the stopper is attached.
Fig. 4 is an enlarged sectional view showing an example of a flange in a state where a stopper is attached.
Fig. 5 is an enlarged view showing an example of the case near the door.
Fig. 6 is a diagram showing a detailed example of the locking portion and the protruding portion.
Fig. 7 is a view showing an example of a state in which a lever of a door is locked.
Fig. 8 is a sectional view showing an example of a state where a lever of the door is locked.
Fig. 9 is a diagram showing an example of a door facing the outer side of the transfer chamber.
Fig. 10 is a diagram showing an example of a door facing the inner side of the transfer chamber.
Fig. 11 is an exploded perspective view showing an example of the door.
Fig. 12 is a flowchart showing an example of the door unlocking process when the operator enters the transfer chamber.
Fig. 13 is a flowchart showing an example of the door locking process when the operator withdraws from the transfer chamber.
Fig. 14 is a diagram showing an example of hardware of the control device.
Reference numerals
10 transfer chamber
11 case body
110 locking part
111 projection
112 roller
113 Padlock hasp
12 side wall
120 sensor
121 sensor
122 electromagnetic lock
123 start switch
124 reset switch
13 Top plate
14 bottom plate
15 side wall
16 side wall
17 upper opening
18 side wall
20 opening for conveying
21 opening for conveying
22 flange
220 concave part
23 lower opening
24 exhaust port
30 sensor
31 opening for maintenance
32 door
320 frame component
321 cover
322 open end
323 fixing member
324 handle
325 concave part
326 convex part
327 hole
328 nut
329 hole
33 stop piece
330 concave part
34 rod
35 opening
40 piping
41 air exhausting device
50 cable
51 control device
510 CPU
511 RAM
512 ROM
513 auxiliary storage device
514 communication I/F
515 input output I/F
516 medium I/F
517 recording medium
52 megaphone
53 light emitting device
60 sensor
61 actuator
The tab is locked 62.
Detailed Description
A vacuum chamber includes a container, a No. 1 cover, an exhaust device, a door, an upper lock portion, and a control device. The container has a space for accommodating a substrate to be processed and has a 1 st opening at an upper portion thereof. The 1 st cover is used for opening and closing the 1 st opening part. The exhaust device exhausts the container. The door is provided at the side of the container and is opened when an operator enters the container. The upper lock portion locks and unlocks the door. The control device controls the upper lock portion to unlock the door on the condition that the 1 st lid is opened and an intervening member that blocks the 1 st lid from closing the 1 st opening is attached to the 1 st opening.
In one embodiment of the vacuum chamber disclosed in the present invention, the number of the doors may be 2 or more on the side surface of the container.
The vacuum chamber disclosed in the present invention may further include an open/close detection unit, a fully open detection unit, and an alarm unit. The open/close detection unit detects the opening/closing of each door. The full-open detection unit detects a full-open state of each door. The alarm unit generates an alarm by using at least one of sound and light. The control device controls the alarm unit to give an alarm until the open state of all the doors is detected when the open/close detection unit detects the opening of at least one of the doors.
In one embodiment, the vacuum chamber disclosed in the present invention further includes a prohibition unit that prohibits removal of the intervention member, and the control device controls the prohibition unit to prohibit removal of the intervention member when detecting a fully open state of all the doors.
In one embodiment of the vacuum chamber disclosed in the present invention, the control device controls the prohibition unit to release the prohibition of removal of the intervention member when all the doors are closed.
In one embodiment of the vacuum chamber disclosed in the present invention, the control device controls the upper lock portion to lock the door on condition that the intervening member is removed from the 1 st opening portion and the 1 st lid is closed.
In one embodiment of the vacuum chamber disclosed in the present invention, the door includes: a frame member having a 2 nd opening; a 2 nd cover for closing the 2 nd opening of the frame member; and a fixing member for fixing the 2 nd lid to the frame member, wherein the fixing member releases the fixing of the 2 nd lid to the frame member by a manual operation of an operator from the side facing the inside of the container in a state where the door is closed.
In addition, according to the present invention, there is provided a method of locking a door of a vacuum chamber, the vacuum chamber including: a container having a space for accommodating a substrate to be processed and an opening at an upper portion; a cover for opening and closing the opening; an exhaust device for exhausting the inside of the container; and a plurality of doors which are more than 2 and used for operators to enter the container are arranged on the side surface of the container; the method for locking a door of a vacuum chamber includes: unlocking each door on the condition that the opening part is opened by the cover and the intervention part for preventing the cover from closing the opening part is installed on the opening part; a step of generating an alarm by using at least one of sound and light until all doors are in a fully opened state when at least one door is opened; a step of controlling a prohibition unit that prohibits the removal of the intervention member when all the doors are in the fully open state; a step of releasing the prohibition of the removal of the intervention member by the control prohibition portion when all the doors are closed; and a step of locking the door on the condition that the intervention member is removed from the opening portion and the cover is closed.
Hereinafter, embodiments of the disclosed vacuum chamber and method for locking a door of the vacuum chamber will be described in detail with reference to the drawings. The vacuum chamber and the method of locking the vacuum chamber door disclosed in the present application are not limited to the following embodiments.
[ constitution of conveying Chamber 10 ]
Fig. 1 is a perspective view showing an example of a transfer chamber 10. Fig. 2 is an exploded perspective view showing an example of the transfer chamber 10 in a state where the top plate is opened. The transfer chamber 10 in the present embodiment is used, for example, in a multi-chamber vacuum processing system for performing a process such as etching of a glass substrate for an FPD as a target substrate. The transfer chamber 10 is an example of a vacuum chamber. Examples of the FPD include a Liquid Crystal Display (LCD), a Light Emitting Diode (LED) Display, an Electro Luminescence (EL) Display, a Vacuum Fluorescent Display (VFD), a Plasma Display Panel (PDP), and the like.
As shown in fig. 1 and 2, for example, the transfer chamber 10 in the present embodiment includes: a box 11 having a conveying space therein for conveying a substrate to be processed; and a top plate 13 which is detachably engaged with an upper opening 17 of an upper portion of the case 11. The top plate 13 is an example of a first cover. Further, a conveying device such as a Robot arm (Robot arm) is provided in the box 11.
The case 11 is made of metal such as aluminum, stainless steel, or steel. The case 11 includes: a bottom plate 14 forming the bottom of the transfer chamber 10; a pair of side walls 15a and 15b formed perpendicularly to the bottom plate 14; and a pair of sidewalls 16a and 16b formed perpendicularly to the bottom plate 14.
The side wall 16a is formed with a conveyance opening 20 a. For example, a load lock chamber is joined to the side wall 16a, and an unprocessed substrate to be processed is carried into the transfer chamber 10 from the load lock chamber through the transfer opening 20a and delivered to a transfer device provided in the cassette 11. The processed substrate is carried out from the transfer chamber 10 to the load lock chamber through the transfer opening 20a by the transfer device.
Further, a conveying opening 20b is formed in a side wall 16b of the case 11 on the side opposite to the side wall 16 a. The side wall 16b is joined to a process chamber, for example, and an unprocessed substrate to be processed carried in from the load lock chamber is carried into the process chamber through the transfer opening 20b by the transfer device, and is subjected to a predetermined process such as etching by the process chamber. The substrate to be processed, which has been processed in the processing chamber, is carried out into the transfer chamber 10 by the transfer device through the transfer opening 20 b.
A flange 22 of the case 11 is provided near the upper end of the case 11, as shown in fig. 2, for example. When the top plate 13 closes the upper opening 17 of the box body 11, the flange 22 supports the top plate 13. Further, a seal member such as an O-ring is preferably disposed between the flange 22 and the top plate 13. This can improve the airtightness of the transfer chamber 10. The flange 22 is provided with a sensor 30 for detecting that the upper opening 17 is closed by the top plate 13. In the present embodiment, the sensor 30 is, for example, a Proximity sensor (Proximity sensor) which is a non-contact sensor. Further, the sensor 30 may also use a contact sensor. The detection result by the sensor 30 is output to a control device 51 described later.
A lower opening 23 for installing a conveying device and an exhaust port 24 are formed in the bottom plate 14 of the box 11. An exhaust device 41 is connected to the exhaust port 24 via a pipe 40. The conveying space in the conveying chamber 10 can be depressurized to a predetermined degree of vacuum by the exhaust device 41.
Further, conveyance openings 21 are formed in the side walls 15a and 15b of the case 11, respectively. The process chambers are joined to respective surfaces of the side walls 15a and 15b of the case 11. The unprocessed substrate to be processed carried in from the load lock chamber is carried into the processing chamber by the transfer device through the transfer opening 21, and the substrate to be processed is subjected to a predetermined process such as etching in the processing chamber. The substrate to be processed, which has been processed in the processing chamber, is carried out into the transfer chamber 10 by the transfer device through the transfer opening 21.
Further, maintenance openings 31 are provided in the side walls 12 at two positions of the casing 11, and the maintenance openings 31 are openings through which an operator enters the transfer chamber 10 to perform maintenance or the like in the transfer chamber 10. The maintenance opening 31 is provided with a door 32 for opening and closing the maintenance opening 31. The maintenance opening 31 is closed by the door 32, and the inside of the transfer chamber 10 is kept airtight. In the present embodiment, the maintenance opening 31 and the door 32 are provided in each side wall 12 of the case 11, but the maintenance opening 31 and the door 32 may be provided in another side wall of the case 11.
When the operator enters the transfer chamber 10, the top plate 13 is lifted upward by a crane or the like as shown in fig. 2, for example, to take in the outside air, and the upper opening 17 of the box 11 is opened. Further, a stopper 33 is attached to the flange 22 of the upper opening 17 of the case 11. By attaching the stopper 33 to the flange 22, even if the top plate 13 erroneously covers the upper opening 17, a gap is formed between the case 11 and the top plate 13. This can prevent suffocation of the operator in the transfer chamber 10. In order to clearly show that the stopper 33 is attached, the surface is preferably colored with a conspicuous color or pattern such as fluorescent color, and has a certain size. The stopper 33 is an example of an intervening component.
Fig. 3 is an enlarged sectional view showing an example of the flange 22 near a position for attaching the stopper 33. Fig. 4 is an enlarged sectional view showing an example of the flange 22 in a state where the stopper 33 is attached. As shown in fig. 3, for example, a recess 220 for attaching the stopper 33 is formed in the flange 22. At the bottom of the recess 220, a sensor 60 for detecting whether or not the stopper 33 is attached is provided in the recess 220. Further, an actuator 61 for locking the stopper 33 mounted in the recess 220 by moving the locking piece 62 is provided on the side wall of the recess 220.
A recess 330 for receiving the locking piece 62 is formed in a side surface of the stopper 33. For example, as shown in fig. 4, when the stopper 33 is mounted in the recess 220, the sensor 60 detects that the stopper 33 is mounted. The detection result of the sensor 60 is output to a control device 51 described later. Then, the actuator 61 moves the locking piece 62 toward the stopper 33. Thereby, for example, as shown in fig. 4, the locking piece 62 is inserted into the recess 330 of the stopper 33 to inhibit the removal of the stopper 33. The movement of the locking piece 62 by the actuator 61 is controlled by a control device 51 described later. The actuator 61 and the locking piece 62 are one example of the inhibiting portion.
In the present embodiment, as shown in fig. 2, for example, one door 32 is provided on each of the two side walls 12 of the casing 11 of the transfer chamber 10. As described above, by providing a plurality of doors 32 in the transfer chamber 10, even if one door 32 cannot be opened, the operator in the transfer chamber 10 cannot be closed in the transfer chamber 10, and can easily escape from the other doors 32.
In the present embodiment, two doors 32 are provided in the transfer chamber 10, and three or more doors 32 may be provided. Each door 32 is preferably provided at a position as far as possible from the position where another door 32 is provided, for example, at an opposite side wall among the side walls of the transfer chamber 10. Thus, even in a situation where it is difficult for an operator in the transfer chamber 10 to walk to one of the doors 32, the operator can easily and quickly escape from the other doors 32 to the outside of the transfer chamber 10.
Fig. 5 is an enlarged view showing an example of the case 11 in the vicinity of the door 32. Sensors 120 and 121 for detecting opening and closing of the door 32 are provided on the door 32 and the side wall 12 of the cabinet 11 where the door 32 is provided. The detection results by the sensors 120 and 121 are output to a control device 51 described later. The sensors 120 and 121 are examples of an open/close detection unit. Further, a start switch 123 and a reset switch 124 are provided on the side wall 12 of the case 11 where the door 32 is provided. The roles of the start switch 123 and the reset switch 124 will be described later. In addition, in the present embodiment, the start switch 123 and the reset switch 124 are provided on the side wall 12 of the housing 11, and as another mode, the start switch 123 and the reset switch 124 may be provided on the other side wall of the housing 11.
An electromagnetic lock 122 for locking and unlocking the door 32 is provided on the side wall 12 of the case 11 where the door 32 is provided. The locking and unlocking of the door 32 by the electromagnetic lock 122 is controlled by a control device 51 described later. The electromagnetic lock 122 is an example of the locking portion.
The door 32 is provided with a lever 34 that is operated by an operator when the door 32 is opened and closed. An opening 35 is formed in the rod 34. When the electromagnetic lock 122 is in the unlocked state, the operator rotates the lever 34 in the direction of arrow a in fig. 5, and the door 32 is opened in the direction of arrow B. The side wall 18 of the case 11 in the vicinity of the door 32 is provided with a lock portion 110 and a protrusion 111.
Fig. 6 is a diagram showing an example of details of the lock portion 110 and the protrusion 111. The lock portion 110 has two rollers 112a and 112b that are movable away from each other and urged in directions of contacting each other by a spring or the like. The door 32 is opened, and the rod 34 of the door 32 is jammed between the rollers 112a and 112b, whereby the rollers 112a and 112b are moved away from each other.
And, the lever 34 of the door 32 is jammed between the rollers 112a and 112b, whereby the lever 34 reaches between the rollers 112a and 112b and the side wall 18 of the case 11. At this time, the protrusion 111 provided on the side wall 18 of the case 11 penetrates the opening 35 of the rod 34. And, the rollers 112a and 112b are again brought into contact with each other by the urging force of a spring or the like, as shown in fig. 7, for example. Thereby, the lever 34 is locked, and the fully opened state of the door 32 is maintained. A sensor, not shown, is provided in the lock portion 110, and the lock state of the lever 34 can be detected. The detection result obtained based on the sensor in the lock unit 110 is output to a control device 51 described later. The sensor in the lock portion 110 is an example of a fully open detection portion. Further, by pulling the lever 34 or the door 32 away from the side wall 18 of the case 11, the locked state of the lever 34 by the lock portion 110 can be easily released.
For example, as shown in fig. 8, an opening is formed in the projection 111. In a state where the lever 34 is locked by the lock portion 110, a Padlock Hasp (Padlock Hasp)113 is attached to an opening of the projection 111. A padlock corresponding to a key managed by each of an operator working in the transfer chamber 10, a supervisor supervising the operator, and the like is hung on the padlock hasp 113. This can prevent the fully open state of the door 32 from being unintentionally released.
[ Structure of door 32 ]
Next, the structure of the door 32 will be described. Fig. 9 is a diagram showing an example of the door 32 facing the outer side of the transfer chamber 10. Fig. 10 is a diagram showing an example of the door 32 facing the inner side of the transfer chamber 10. Fig. 11 is an exploded perspective view showing an example of the door 32.
The door 32 has a frame member 320, a cover 321, and a fixing member 323. An opening 322 is formed in the frame member 320. The cover 321 has a larger area than the opening 322. The cap 321 is an example of the 2 nd cap. Further, a recess 325 for receiving the electromagnetic lock 122 is formed in a side surface of the frame member 320.
For example, as shown in fig. 11, a protrusion 326 having a thread formed substantially at the center is provided on the cap 321. The projection 326 penetrates a hole 327 formed in the substantially center of the fixing member 323 and a hole 329 formed in the substantially center of the handle 324 through the opening 322. A nut 328 is attached to the projection 326 penetrating the handle 324. Thus, the cover 321 is fixed to the frame member 320 by the fixing member 323, and the door 32 shown in fig. 9 and 10, for example, is configured. Further, a sealing member such as an O-ring is preferably disposed between frame member 320 and cover 321. This can improve the airtightness between frame member 320 and lid 321.
In door 32, when handle 324 is rotated, nut 328 is disengaged, and the fixing of lid 321 and frame member 320 by fixing member 323 is released. Thus, the cover 321 and the fixing member 323 can be separated, the cover 321 is pressed to the outside of the transfer chamber 10 from the gap between the frame member 320 and the fixing member 323, the projection 326 is disengaged from the hole 327 of the fixing member 323, and the cover 321 is detached from the frame member 320. Thereby, the opening 322 of the frame member 320 is opened.
In a state where the door 32 is closed, the handle 324 is located inside the carrying chamber 10. The handle 324 can be easily rotated even without using a hand of a person. By rotating the handle 324 from the inside of the transfer chamber 10, the operator in the transfer chamber 10 can pass through the door 32 without opening the door 32. Therefore, even when the operator in the transfer chamber 10 is confined in the transfer chamber 10 for some reason, the operator in the transfer chamber 10 can easily escape from the transfer chamber 10.
The description is continued with reference to fig. 1. The transfer chamber 10 is connected to a control device 51 via a cable 50. The control device 51 receives signals from various sensors provided in the transfer chamber 10 via the cable 50, and controls each part in the transfer chamber 10 via the cable 50.
Further, a microphone 52 and a light emitting device 53 are connected to the control device 51. For example, when any one of the doors 32 is opened, the controller 51 issues an alarm by sound from the microphone 52, light from the light emitting device 53, or both until all of the doors 32 are fully opened or all of the doors 32 are closed. Whether or not the door 32 is opened is determined based on the detection results output from the sensors 120 and 121 provided at the respective doors 32. Whether the doors 32 are in the fully open state is determined by whether the locking portions 110 provided in the vicinity of the respective doors 32 lock the rods 34 of the doors 32. The sound emitted from the microphone 52 is a buzzer sound, a melody, a sound for calling attention, or the like. The sound volume of the sound emitted from the microphone 52 is preferably 80dB or more, for example. The light emitting device 53 issues an alarm by flashing light, switching light of different colors, or the like. The microphone 52 and the light emitting device 53 are examples of the alarm portion.
[ operation of the transfer chamber 10 ]
Fig. 12 is a flowchart showing an example of the process of unlocking the door 32 when the operator enters the transfer chamber 10. Each process shown in fig. 12 is mainly performed by the control device 51. Before the operator enters the transfer chamber 10, the operator manually controls the cutoff of a current breaker that controls the supply of power to the transfer device, the closing of a valve that supplies gas into the transfer chamber 10, and the like. Then, the operator presses a start switch 123 provided near the door 32. Thereby, the controller 51 starts the operation shown in fig. 12 and fig. 13 described later.
First, the control device 51 monitors a signal sent from the start switch 123, and determines whether or not the start switch 123 is pressed (S100). When the start switch 123 is pressed (yes in S100), the control device 51 executes the energy supply stop control (S101). In step S101, the control device 51 shuts off the power supply to the transfer device, closes the electromagnetic valve that supplies gas into the transfer chamber 10, and the like. The above-described processing may be performed manually by an operator, but in step S101, the power supply to the conveying device, the closing of the gas supply valve, and the like may be performed again by electric control. This makes it possible to reliably perform the supply of electric power to the conveying device, the closing of the gas supply valve, and the like.
Next, the control device 51 determines whether or not the upper opening 17 is opened based on the detection result output from the sensor 30 (S102). When the top plate 13 is lifted upward by a crane or the like to open the upper opening 17, the sensor 30 detects the opening of the upper opening 17. When determining that the upper opening 17 is opened (yes in S102), the control device 51 determines whether or not the stopper 33 is attached to the upper opening 17 based on the detection result output from the sensor 60 (S103). When the stopper 33 is inserted into the recess 220 of the flange 22, it is detected by the sensor 60 that the stopper 33 is attached to the upper opening 17.
When the stopper 33 is attached to the upper opening 17 (yes in S103), the controller 51 controls the electromagnetic locks 122 of the doors 32 to unlock all the doors 32 (S104). As described above, the operator can be prevented from entering the transfer chamber 10 while the inside of the transfer chamber 10 is kept airtight by unlocking the door 32 on the condition that the upper opening 17 is opened and the stopper 33 is attached to the upper opening 17.
Subsequently, the control device 51 executes the energy supply stop control again (S105). In step S105, the control device 51 again interrupts the power supply to the transfer device, closes the electromagnetic valve that supplies gas into the transfer chamber 10, and the like. Although the supply of electric power to the conveying device, the closing of the gas supply valve, and the like have been already performed in the manual operation and step S101, the control device 51 is again performed in step S105 in order to ensure the reliability of the stop of the energy supply.
Next, the control device 51 refers to the detection results output from the sensors 120 and 121 provided in the respective doors 32, and determines whether any one of the doors 32 has been opened (S106). When any one of the doors 32 is opened (S106: YES), the controller 51 controls the actuator 61 provided in the flange 22 to lock the stopper 33 by the locking piece 62 (S107). This can prevent the stopper 33 from being removed from the flange 22 after the operator enters the conveyance chamber 10 through the opened door 32.
Next, the control device 51 starts an alarm by sound from the microphone 52, light from the light emitting device 53, or both (S108). Then, the control device 51 determines whether all the doors 32 are in the fully open state based on the detection result output from the lock portions 110 provided in the vicinity of the respective doors 32 (S109). If there is a door 32 that is not fully opened (no in S109), the control device 51 continues to give an alarm.
On the other hand, when all the doors 32 are in the fully open state (S109: YES), the control device 51 stops the alarm (S110). Then, the operator attaches the padlock hasp 113 to the projection 111 penetrating the opening of the locked recess 330. Further, the persons involved in the work mount padlocks on the padlock buckles 113, respectively. Then, the operator enters the transfer chamber 10 to start the work.
Fig. 13 is a flowchart showing an example of the locking process of the door 32 when the operator withdraws from the transfer chamber 10. Each process shown in fig. 13 is mainly performed by the control device 51. Further, before the door 32 is locked, the worker removes the padlocks respectively mounted to the padlock catches 113, and removes the padlock catches 113 from the protrusions 111. The recess 330 of the door 32 is removed from the lock 110, and the door 32 can be closed.
First, the control device 51 determines whether or not the fully opened state of any one of the doors 32 has been released, based on the detection result output from the lock section 110 provided in the vicinity of each door 32 (S200). When the fully open state of any one of the doors 32 is released (S200: YES), the control device 51 starts an alarm by sound from the microphone 52, light from the light emitting device 53, or both (S201). This makes it possible for other operators staying in the transfer chamber 10 to know that the door 32 is about to be closed.
Then, the control device 51 refers to the detection results output from the sensors 120 and 121 provided in the respective doors 32, and determines whether or not all the doors 32 are closed (S202). In the case where not all the doors 32 are closed (S202: no), the control device 51 continues the alarm.
In the case where all the doors 32 have been closed (S202: YES), the control device 51 stops the alarm (S203). Then, the controller 51 controls the actuator 61 provided in the flange 22 to unlock the stopper 33 by the lock piece 62 (S204). Thereby, the stopper 33 can be removed from the upper opening 17. The operator removes the stopper 33 from the upper opening 17.
Next, the control device 51 determines whether or not the stopper 33 has been removed from the upper opening 17 based on the detection result output from the sensor 60 (S205). When the stopper 33 is removed from the upper opening 17 (S205: yes), the control device 51 determines whether or not the upper opening 17 is closed based on the detection result output from the sensor 30 (S206). When the stopper 33 is removed, there is no obstacle in the upper opening 17, and therefore, the upper opening 17 can be closed by the top plate 13. The top plate 13 is placed on the upper opening 17 by a crane or the like to close the upper opening 17, and the closing of the upper opening 17 is detected by a sensor 30.
When it is determined that the upper opening 17 is closed (yes in S206), the control device 51 controls the electromagnetic locks 122 of the doors 32 to lock all the doors 32 (S207). This can prevent the operator from entering the transfer chamber 10 in a state where the upper opening 17 is closed.
Next, the operator presses a reset switch 124 provided near the door 32. The control device 51 monitors the signal output from the reset switch 124, and determines whether the reset switch 124 is pressed (S208). When the reset switch 124 has been pressed (S208: YES), the control device 51 executes the release of the energy supply stop control (S209). In step S209, the control device 51 releases the interruption of the power supply to the transfer device, the closing of the electromagnetic valve that supplies gas into the transfer chamber 10, and the like. The operator manually controls the release of the interruption of the current breaker for supplying power to the transfer device, the opening of the valve for supplying gas into the transfer chamber 10, and the like. This enables the processing of the target substrate to be resumed.
In step S207, when all the doors 32 are erroneously locked while the operator is staying in the transfer chamber 10, the operator in the transfer chamber 10 manually operates the handle 324 provided on any one of the doors 32. This releases the fixation between frame member 320 and cover 321 of door 32, and the operator can quickly escape through opening 322 of frame member 320.
[ hardware of the control device 51 ]
Fig. 14 is a diagram showing an example of hardware of the control device 51. As shown in fig. 14, for example, the control device 51 includes: a CPU (Central Processing Unit) 510, a RAM (Random Access Memory) 511, a ROM (Read Only Memory) 512, an auxiliary storage device 513, a communication interface (I/F)514, an input/output interface (I/F)515, and a media interface (I/F) 516.
The CPU510 operates based on a program stored in the ROM512 or the auxiliary storage device 513 to control each unit. The ROM512 stores a boot program executed by the CPU510 at the time of startup of the control device 51, a program dependent on hardware of the control device 51, and the like.
The auxiliary storage device 513 is, for example, an HDD (Hard Disk Drive) or an SSD (Solid State Drive), and stores programs executed by the CPU510, data used by the programs, and the like. The CPU510 reads a program stored in the auxiliary storage device 513 from, for example, the auxiliary storage device 513, loads the program onto the RAM511, and executes the loaded program. The communication I/F514 receives signals from the respective units of the transfer chamber 10, for example, the sensor 30, the sensor 60, and the like via the cable 50, transmits the signals to the CPU510, and transmits signals generated by the CPU510 to the respective units of the transfer chamber 10, for example, the actuator 61, the electromagnetic lock 122, and the like via the cable 50.
The CPU510 controls an output device such as a display and an input device such as a keyboard and a mouse via the input/output I/F515. The CPU510 obtains data from an input device via the input/output I/F515. Further, the CPU510 outputs the generated data to an output device via the input/output I/F515.
The medium (multimedia) I/F516 reads the program or data stored in the recording medium 517 and stores the read program or data in the auxiliary storage device 513. The recording medium 517 is, for example, an Optical recording medium such as a DVD (Digital Versatile Disc), a PD (Phase change rewritable Disc), an Magneto-Optical recording medium such as an MO (magnetic-Optical Disc), a magnetic tape medium, a magnetic recording medium, or a semiconductor memory. The control device 51 may acquire a program or the like stored in the auxiliary storage device 513 from another device via the cable 50 or the like, and store the acquired program or the like in the auxiliary storage device 513.
The embodiment of the transfer chamber 10 has been described above. As is clear from the above description, according to the transfer chamber 10 of the present embodiment, it is possible to further improve the safety of the operator who works inside the manufacturing apparatus for the FPD or the like.
[ others ]
In the above-described embodiment, the transfer chamber 10 has been described as an example of the vacuum chamber. The vacuum chamber in the disclosed technology is not limited to the transfer chamber 10, and may be a process chamber, a load lock chamber, or the like as long as the apparatus performs a process in a process space in a vacuum state. The processing chamber is not limited to an etching apparatus, and may be a film forming apparatus, a reforming apparatus, or the like.
In the above-described embodiment, the control device 51 is realized by a general-purpose computer as shown in fig. 14, for example, but the control device 51 may be realized by a Logic circuit such as a PLC (Programmable Logic Controller) or a relay as another embodiment.
In the above-described embodiment, the start switch 123 and the reset switch 124 are hardware switches, but the start switch 123 and the reset switch 124 may be software switches displayed on a touch panel display or the like connected to the control device 51 via the input/output I/F515 of the control device 51 as another embodiment.
Claims (8)
1. A vacuum chamber, comprising:
a container having a space for accommodating a substrate to be processed and having a 1 st opening at an upper portion thereof;
a 1 st cover for opening and closing the 1 st opening;
an air discharging device for discharging air from the container;
a door disposed at a side of the container for operator access into the container;
a locking unit for locking and unlocking the door;
a sensor for detecting whether an intervening member for preventing the 1 st lid from closing the 1 st opening is attached to the 1 st opening; and
and a control device that controls the upper lock portion to unlock the door on the condition that the 1 st cover is opened and the sensor detects that the intervention member is attached to the 1 st opening.
2. The vacuum chamber of claim 1, wherein:
the number of the doors is more than 2 on the side surface of the container.
3. A vacuum chamber, comprising:
a container having a space for accommodating a substrate to be processed and having a 1 st opening at an upper portion thereof;
a 1 st cover for opening and closing the 1 st opening;
an air discharging device for discharging air from the container;
a door disposed at a side of the container for operator access into the container;
a locking unit for locking and unlocking the door; and
a control device that controls the upper lock portion to unlock the door on condition that the 1 st lid is opened and an intervening member that blocks the 1 st lid from closing the 1 st opening portion is attached to the 1 st opening portion,
the side of the door on the container is provided with more than 2
The vacuum chamber further includes:
an opening/closing detection unit for detecting opening/closing of each of the doors;
a fully-open detection unit that detects a fully-open state of each of the doors; and
an alarm part for giving an alarm by using at least one of sound and light,
and a control device for controlling the alarm unit to give the alarm until all the doors are detected in a fully open state when the opening/closing detection unit detects that at least one of the doors is opened.
4. The vacuum chamber of claim 3, further comprising:
a prohibition portion that prohibits removal of the intervention member,
the control device controls the inhibiting portion to inhibit removal of the intervention member when the fully open state of all the doors is detected.
5. The vacuum chamber of claim 4, wherein:
the control device controls the prohibition portion to release the prohibition of removal of the intervention member when all the doors have been closed.
6. The vacuum chamber of claim 5, wherein:
the control device controls the upper lock portion so that the upper lock portion locks the door on condition that the intervention member has been removed from the 1 st opening portion and the 1 st cover is closed.
7. The vacuum chamber of any one of claims 1-6, wherein:
the door includes: a frame member having a 2 nd opening; a 2 nd cover for closing the 2 nd opening of the frame member; and a fixing member for fixing the 2 nd cover to the frame member,
the fixing member releases the 2 nd lid from the frame member by a manual operation of an operator from the side of the container facing inward in a state where the door is closed.
8. A method for locking a door of a vacuum chamber, comprising:
the vacuum chamber includes:
a container having a space for accommodating a substrate to be processed and an opening at an upper portion;
a cover for opening and closing the opening;
an air discharging device for discharging air from the container; and
the side surface of the container is provided with more than 2 doors for operators to enter the container;
the method for locking the door of the vacuum chamber comprises the following steps:
a step of unlocking each of the doors on condition that the lid opens the opening portion and an intervening member that blocks the lid from closing the opening portion is attached to the opening portion;
a step of generating an alarm by at least one of sound and light until all the doors are in a fully open state when at least one of the doors is open;
a step of controlling a prohibition unit that prohibits removal of the intervention member to prohibit removal of the intervention member when all the doors are in a fully open state;
a step of controlling the prohibiting portion to release the prohibition of removal of the intervention member when all the doors are closed; and
locking the door on condition that the intervention member is removed from the opening portion and the cover is closed.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-254685 | 2016-12-28 | ||
| JP2016254685 | 2016-12-28 | ||
| JP2017-238256 | 2017-12-13 | ||
| JP2017238256A JP7023097B2 (en) | 2016-12-28 | 2017-12-13 | How to lock the vacuum chamber and the door of the vacuum chamber |
Publications (2)
| Publication Number | Publication Date |
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| CN108257892A CN108257892A (en) | 2018-07-06 |
| CN108257892B true CN108257892B (en) | 2022-01-25 |
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| CN201711458470.2A Active CN108257892B (en) | 2016-12-28 | 2017-12-28 | Vacuum chamber and method for locking vacuum chamber door |
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|---|---|
| JP (1) | JP7023097B2 (en) |
| KR (1) | KR102100018B1 (en) |
| CN (1) | CN108257892B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1925111A (en) * | 2005-09-02 | 2007-03-07 | 东京毅力科创株式会社 | Vacuum cavity chamber and vacuum processing device |
| US20090186569A1 (en) * | 2008-01-18 | 2009-07-23 | Seiko Epson Corporation | Semiconductor device manufacturing apparatus and manufacturing method |
| US20150311042A1 (en) * | 2014-04-29 | 2015-10-29 | Psk Inc. | Substrate treating apparatus |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3044507B2 (en) * | 1992-05-11 | 2000-05-22 | 株式会社名機製作所 | Safety equipment for large vacuum presses |
| JP4049281B2 (en) * | 1997-10-28 | 2008-02-20 | 株式会社日立国際電気 | Substrate processing equipment |
| JP2001326162A (en) | 2000-05-17 | 2001-11-22 | Canon Inc | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device |
| JP2006093258A (en) | 2004-09-22 | 2006-04-06 | Hitachi Kokusai Electric Inc | Substrate treatment device |
| JP4518285B2 (en) | 2008-01-18 | 2010-08-04 | セイコーエプソン株式会社 | Semiconductor device manufacturing equipment |
| KR101598176B1 (en) * | 2010-03-30 | 2016-02-26 | 주식회사 원익아이피에스 | Vacuum chamber |
| JP6196890B2 (en) | 2013-11-21 | 2017-09-13 | 東京エレクトロン株式会社 | Lid member opening / closing mechanism and substrate inspection device |
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2017
- 2017-12-13 JP JP2017238256A patent/JP7023097B2/en active Active
- 2017-12-26 KR KR1020170179357A patent/KR102100018B1/en active IP Right Grant
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1925111A (en) * | 2005-09-02 | 2007-03-07 | 东京毅力科创株式会社 | Vacuum cavity chamber and vacuum processing device |
| US20090186569A1 (en) * | 2008-01-18 | 2009-07-23 | Seiko Epson Corporation | Semiconductor device manufacturing apparatus and manufacturing method |
| US20150311042A1 (en) * | 2014-04-29 | 2015-10-29 | Psk Inc. | Substrate treating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018110219A (en) | 2018-07-12 |
| CN108257892A (en) | 2018-07-06 |
| KR20180077056A (en) | 2018-07-06 |
| KR102100018B1 (en) | 2020-04-10 |
| JP7023097B2 (en) | 2022-02-21 |
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