CN108254309A - Towards the cohesive force automatic detection device and method of excimer laser micro Process device - Google Patents
Towards the cohesive force automatic detection device and method of excimer laser micro Process device Download PDFInfo
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- CN108254309A CN108254309A CN201810197403.8A CN201810197403A CN108254309A CN 108254309 A CN108254309 A CN 108254309A CN 201810197403 A CN201810197403 A CN 201810197403A CN 108254309 A CN108254309 A CN 108254309A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/04—Measuring adhesive force between materials, e.g. of sealing tape, of coating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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Abstract
The invention discloses the cohesive force automatic detection devices and method towards excimer laser micro Process device, belong to physics and mechanics detection field.The device utilizes electronics pulling force sensor technology and machine vision technique, and using embedded microcontroller, the adhesion strength test of material is carried out, is obtained using binding material separating distance as abscissa, using Mechanical Data as the pulling force of ordinate and the relation curve trend graph of displacement.When using transparent adhesive tape, the different micro-images under glue and material separation are obtained, the excimer laser pre-treatment to study a variety of materials provides the continuous process original data of experiment to the regularity of adhesion strength and Laser Micro-Machining mechanism.The present invention is mainly suitable for the various non-brittle binding materials after excimer laser process under identical or different adhesive bonds, the test that more physical quantity variation regularity are explained is made to its adhesion strength.
Description
Technical field
The present invention relates to a kind of cohesive force automatic detection analysis devices, belong to physics and mechanics detection field, especially relate to
And it bonds.
Background technology
Bonding phenomenon is related to many science and technology fields, has become an important field of research in recent years.It bonds
The appropriate surfaces processing method that material can be applied has great role to the quality of adhesive with quantity.Obtain various cohesive materials
Expect excellent durability and adhesion strength, bond front surface preparation (bonding piece pretreatment) and be necessary.Surface treatment removes weak
Marginal layer, clean surface, change surface can (mainly passing through oxidation), improve the feature of topographical microstructure.These become
The net effect of change is that enhancing surface combines, bonding piece is mechanical interlocked and resists moisture and humidity causes the ability of degradation.
Since excimer laser invention in 1975, with technological progress, excimer laser is widely used in industrial neck
Domain.Laser adapts to a variety of commercial Applications including adhesive property for changing the feature of material surface.Laser treatment is to being permitted
More materials are all efficient, and control is very accurate, and only surface is affected, and ontology is not adversely affected.Laser treatment
Polymer has very high locality and accuracy, and wherein bonding piece can place very long between handling and bonding or apply application
Time, and handled in room temperature and air, it is not required to particular surroundings.Excimer laser ultraviolet (UV) irradiation provides a kind of new
Front surface processing and process for modifying surface are bonded, a variety of materials and bonding piece can be handled, this technology is not alternative friendly to ecology
Good conventional chemical etching and grinding processing method.It is many experimental results showed that, ultraviolet laser surface treatment and modified great
Cohesive shearing, stretching and peel strength are improved, while also improves intensity, abrasion, conductive performance and appearance.
Far ultraviolet radiation is defined as from the electromagnetic wave of 200-150nm.Narrow band is that polymer is photochemical (from 200-180nm)
Learn modified feasible and efficient region；The energy of light is more than the intensity of most of typical Organic Polymer Chemistry keys, therefore energy
Effectively generate photochemical reaction.Nearly all organic compound (close by aliphatic hydrocarbon and the carbon fluorination of saturation
Except object) there is strong absorption in this region.It has been determined that this radiation absorbs by force when penetrating organic polymer about 300nm
Degree reaches 95%.Polymer abides by Beer law to the absorption of photon.The result shows that there is a large amount of chemical bond to break in irradiation range
It splits.Usually, organic molecule irradiation life is picosecond grade in this section of wave-length coverage.Polymer chain break is often adjoint
It in conjunction with process, therefore reflects that final result is to lose small gas molecule (CO, CO2, H2) and polymeric linear structure
It is broken the degradation generated.The surface of material is modified by UV laser, best cohesive force laser processing parameter is obtained, need
Targetedly cementing tensile test is carried out to it.
At present, tensile testing machine also known as universal testing machine are used when doing physics and mechanics pull test.
Universal testing machine is to carry out instrument and equipment static load, stretching, compression, bending, shearing, tear, stripping etc. for being directed to a variety of materials
The testing machine of the machinery reinforcing of mechanical property test, suitable for plastic plate, tubing, profile shapes, plastic film and rubber, electricity
The various physical mechanical properties test of line cable, steel, glass fiber and other material is developing material, is ground for physical testing, teaching
Study carefully and the indispensable detection device such as quality control.
But add micro- to adhesion strength affecting laws and laser is handled before the excimer laser to study a variety of materials
Under premised on work mechanism, when above-mentioned universal testing machine is tested, have the disadvantage that:
1. when above-mentioned universal testing machine is tested, time of releasing mechanics individual data can only be obtained, to process not
There is detailed data record.Particularly when binding material separating distance and disengaging time are abscissa, it can not obtain with mechanics
Data are the continuous process data of ordinate, and therefore, this seriously hinders the excimer laser pre-treatment of research a variety of materials
To adhesion strength affecting laws and Laser Micro-Machining mechanism.
2. cohesive force experiment is detected after the transparent gluing knot of materials'use, glue and material point micro- can not also can be visually seen
Difference and difference from state.This also hinders the excimer laser pre-treatment of research a variety of materials to viscous from the micro- angle of image
Knotting strength affecting laws and Laser Micro-Machining mechanism.
Best UV laser treatments processing parameter (intensity, cycle rate, number of pulses) and basis material and its chemical characteristic
It is related.In order to realize microexamination and the visual number of the qualitative analysis of UV laser processing parameters offer during bond damage
According to this experimental provision employs machine vision technique.
Machine vision is combined using computer image processing technology and modern sensitive technologies, at photosensitive micro-image
Reason technology is used for color recognition, contours extract, and position measurement and image are micro- etc. is that one kind in artificial intelligence field is first
Into technology.To solve the above problems, the present invention proposes a kind of completely new micro- cohesive force experimental provision based on machine vision.It should
Device, using machine vision technique, can overcome above-mentioned on the basis of electronics pulling force sensor and embedded microprocessor is used
The shortcomings that general tensile testing machine is that the excimer laser pre-treatment of a variety of materials is micro- to adhesion strength affecting laws and laser
Processing mechanism study, provide experiment continuous process initial data and rule linearity curve and bond clastotype micro-image
Data, so as to promote to have passed through the advanced sexual development of modernization of cohesive force experimental provision.
Invention content
Micro Process processing is carried out to device surface the purpose of the present invention is to solve excimer laser in an experiment, is needed
Pointedly detection and analysis is carried out to the cohesive force of device.The device utilizes electronics pulling force sensor technology and machine vision skill
Art, and using embedded microcontroller, carry out the adhesion strength test of material, obtain using binding material separating distance as horizontal seat
Mark, using Mechanical Data as the pulling force of ordinate and the relation curve trend graph of displacement.When using transparent adhesive tape, glue and material are obtained
Different micro-images under separation, to study the excimer laser pre-treatment of a variety of materials to the regular and sharp of adhesion strength
Light micro Process mechanism provides the continuous process original data of experiment.
The present invention is mainly suitable for the various non-brittle binding materials after excimer laser process in identical or different glue
Under stick bonds, the test that more physical quantity variation regularity are explained is made to its adhesion strength, is opened point including binding material
The detection of relation of interdependence, adhesion strength and its micro- mistake destroyed between displacement and pulling force from binding material in the process
Journey.
To achieve these goals, the technical solution adopted by the present invention is as follows.
Towards excimer laser micro Process device cohesive force automatic detection device, it is characterised in that：The device includes pulling force
Machine (3), stepper motor driver module (10), controller module (7), communication module (8) and the micro- module of image, stepper motor
Drive Module (10) includes stepper motor driver (4) and L298 drive modules (5).Stepper motor (the 2- of puller system (3)
13) supply lines and control line is connect with stepper motor driver (4)；The control line and L298 of stepper motor driver (4) drive
Dynamic model block (5) connects；Control line and L298 drive modules (5) connection of controller module (7)；The serial ports of controller module (7)
Communication line and communication module (8) connection；Communication module (8) is connected with 232 communication lines of PH tensiometers (2-4)；The micro- mould of image
Block includes computer (1) and CCD camera (2), and computer (1) is connected with CCD camera (2) by data line.CCD camera (2)
It is corresponding with speculum (2-17).The centre of controller module (7) is equipped with TFT liquid crystal displays (6).
Puller system (3) includes steel plate base (2-1), material fixture A (2-2), material fixture B (2-3) and PH tensiometers (2-
4)；Material fixture A (2-2) is in steel plate base (2-1), and material fixture B (2-3) is on PH tensiometers (2-4)；PH
For tensiometer (2-4) on fixed lateral beam (2-9), cylinder beam A (2-6) and cylinder beam B (2-8) are installed in steel plate base
On (2-1), cylinder beam A (2-6) and cylinder beam B (2-8) and fixed lateral beam (2-9) through-hole can be slided；Stepper motor (2-
13) connection shaft coupling (2-5) drives the leading screw rotation in screw set group (2-7)；Upper mounting plate steel plate A (2-12) passes through four ramuscules
Column (2-10) is fixed on upper mounting plate steel plate B (2-24), and upper mounting plate steel plate B (2-24) is fixed on head piece (2-11), head piece
(2-11) and cylinder beam A (2-6) and cylinder beam B (2-8) connections are fixed.When using the high-precision stepper motor rotation of large torque
When, the leading screw in screw set group (2-7) can be driven to rotate, leading screw rotation drives the movement of fixed lateral beam (2-9), and then band
Dynamic PH tensiometers (2-4) move integrally, and electronic at the uniform velocity power is provided for cohesive force separating experiment, can replace manpower and make up people
The unstability of power.Iron bar (2-14) is fixed on upper mounting plate steel plate B (2-24), up stroke limit switch (2-15) and down stroke
Limit switch (2-16) is placed on iron bar (2-14), and during preventing screw from turning to the stroke end, PH tensiometers (2-4) generate
Mechanical collision, it is ensured that bond the safe operation of force test device.
The PA8 pins output PWM of the MCU of controller module (7) is obtained by experiment when the parameter of PWM is accounted for for 8K frequencies
Separation speed effect is best when sky is than being 50% and can not go out the IN1 that existing Lost walks situation, PA8 pins and L298 drive modules (5)
Pin connects；Controller module (7) output control stepper motor (2-13) positive and negative rotaring signal is controlled by PA4 pins and PA5 pins,
PA4 pins are connected with IN2 with IN3 pins of the PA5 pins respectively with L298 drive modules (5)；L298 drive modules (5) realize electricity
Keep flat big and driving current amplification so that the control signal level of stepper motor driver (4) and controller module (7)
Match；The OUT1 pins of L298 drive modules (5) are connected with the PUL- pins of stepper motor driver (4), stepper motor driver
(4) PUL+ pins connect high level, the DIR+ pins of stepper motor driver (4) and the OUT2 pins of L298 drive modules (5)
Connection, the DIR- pins of stepper motor driver (4) are connected with the OUT3 pins of L298 drive modules (5)；Then again by stepping
Motor driver (4) controls signal and four phase signals lines to connect with stepper motor (2-13).
Stepper motor (3) is 86 closed-loop high speed constant torque step-servo motors.
The MCU of controller module (7) is STM32F103RCT6；
Stepper motor driver (4) is closed-loop drive HBS86H.
Communication module (8) turns TTL modules for RS232.
Communication module (8) can realize the two-way communication of controller module (7) and PH tensiometers (2-4), controller mould
The PA9 pins of the MCU of block (7) connect the RXD pins of communication module (8), and the TXD that the PA10 pins of MCU connect communication module (8) draws
Foot, another termination nine kinds of needles public affairs mouth of communication module (8), then connected with PH tensiometers (2-4).
The micro- module of image uses the continuous zoom object lens (2-18) of one, the adjustable range of continuous zoom object lens (2-18)
For 3~30 ×；Gear ring A (2-19) is fixed on continuous zoom object lens (2-18), and is turned in direct current micro control motor (2-22)
A gear B (2-23) is fixed on axis, by the way that direct current micro control motor (2-22) rotation is controlled to realize automatic zoom.Continuous zoom object
Mirror (2-18) and CCD camera (2-20) can be micro- by the speculum (2-17) of 45 degree of placements by the separation process of binding material
Imaging；CCD camera (2-20) and direct current micro control motor (2-22) are fixed on supporting plate (2-21).CCD camera (2-20) and straight
Stream micro control motor (2-22) is passed in computer (1) by data line show so as to observation analysis again, and computer (1) is by what is obtained
Information is analyzed, while focus information is fed back to controller module (7), controller module (7) control direct current micro control motor
(2-22) rotation focusing forms closed loop automatic focusing function.
The operating distance 293mm of continuous zoom object lens (2-18), amplification factor for 0.7 ×.
Towards excimer laser micro Process device cohesive force automatic testing method, it is characterised in that：
Embedded chip function is carried out to tensiometer first and carries out initial configuration, when carrying out tensile test, passes through hand
The dynamic rotation by key control screw is moved to starting position, and with material fixture A (2-2) and material fixture B, ((2-3) clamps tested
Material carries out tensile test；Then the Parameter of the laser treatment of input measured material includes the sweep speed of laser, standard point
The pulse number of sub- laser, laser irradiation energy intensity, according to the stepper motor rotating speed that information output is recommended, and the stepping is electric
Machine, which turns degree, to be modified according to test case, and best test effect is obtained with this.Then, reach limit switch or reach
Motor tensile test during crest value tension, i.e. Off Timer interrupt.Then it in main program cycle, is obtained with serial ports and calculates organ
In object lens focus information, then direct current micro control motor is controlled to focus, form closed loop and adjust zoom objective focusing.Then, in timer
Disconnected is the primary interrupt response services of 20ms.In interrupt response service, the work of progress is to complete embedded chip to PH
The reading that pulling force counts, and Content of Communication is carried out data format processing and value of thrust key message is extracted, then will extraction
Value of thrust and spaced out according to what driving frequency was calculated, into curve tendency figure on real-time rendering to TFT liquid crystal displays, then
The real-time no-load voltage ratio of pulling force and laser parameter is exported, reference is provided for cohesive force separating experiment.Finally in embedded chip
PWM is configured in STM32F103RCT6 allows pin PA8 to export PWM, and arteries and veins is provided for HBS86H full digital closed loop step actuators
Rush frequency, driving motor work.So cycle carries out each tensile test work.
Computer (1) using the separation process of CCD camera lenses acquisition measured material, obtains its process micro-image, so in real time
It is removed noise, enhancing, recovery, segmentation, extraction feature etc. to image by computer afterwards, finally obtains every inspection of needs
Measured data and micro-image provide analysis data for cohesive force test.
The device can overcome the shortcomings that general tensile testing machine, and the excimer laser pre-treatment for a variety of materials is to bonding
Intensity effect regularity and Laser Micro-Machining mechanism study, provide experiment continuous process initial data and rule linearity curve and
The micro-image data of clastotype is bonded, so as to promote the advanced sexual development of the modernization of cohesive force experimental provision.
Compared with prior art, 1. the design clearly have recorded the test process of adhesion strength and as a result, not only may be used
Moment photo is pulled open to observe and shoot, micro-variations when analysis of material is detached with glue, but also the process of pulling open can be recorded
The numerical value change of middle pulling force；
2. the present apparatus can be equally used for testing under adhesion strength or the different bonding surface treatment technologies of different adhesive
The adhesion strength of material, records experimentation, measures pulling force in real time and pulls open degree.
3. obtain the processing parameter (intensity, cycle rate, number of pulses) of best excimer laser surface treatment for analysis
Relationship corresponding with the modified cohesive force of basis material provides strong initial data.
Description of the drawings
Fig. 1 is the single unit system structure chart of the present invention.
Fig. 2 is the tensiometer of the present invention.
Fig. 3 is the work flow diagram of the present invention.
In figure：1st, computer, 2, CCD camera, 3, puller system, 4, stepper motor driver, 5, L298 drive modules, 6,
TFT liquid crystal displays, 7, controller module, 8, RS232 turn TTL modules, 9, tensiometer, 10, stepper motor driver module, 2-1, steel
Plate pedestal, 2-2, material fixture A, 2-3, material fixture B, 2-4, PH tensiometer, 2-5, shaft coupling, 2-6, cylinder beam A, 2-7, silk
Thick stick set group, 2-8, cylinder beam B, 2-9, fixed lateral beam, 2-10, small pillar, 2-11, head piece, 2-12, upper mounting plate steel plate A, 2-
13rd, stepper motor, 2-14, iron bar, 2-15, up stroke limit switch, 2-16, down stroke limit switch, 2-17, speculum, 2-
18th, continuous zoom object lens, 2-19, gear ring A, 2-20, CCD camera, 2-21, supporting plate, 2-22, direct current micro control motor, 2-23,
Gear B, 2-24, platform steel plate B.
Specific embodiment
Below in conjunction with attached drawing specific description embodiments of the present invention, Fig. 1 is puller system single unit system structure chart.
As depicted in figs. 1 and 2, towards excimer laser micro Process device cohesive force automatic detection device, which includes
Puller system (3), stepper motor driver module (10), controller module (7), communication module (8) and the micro- module of image, stepping
Motor driver module (10) includes stepper motor driver (4) and L298 drive modules (5).The stepper motor of puller system (3)
The supply lines and control line of (2-13) are connect with stepper motor driver (4)；The control line and L298 of stepper motor driver (4)
Drive module (5) connects；Control line and L298 drive modules (5) connection of controller module (7)；The string of controller module (7)
Port communications line and communication module (8) connection；Communication module (8) is connected with 232 communication lines of PH tensiometers (2-4)；Image is micro-
Module includes computer (1) and CCD camera (2), and computer (1) is connected with CCD camera (2) by data line.CCD camera
(2) it is corresponding with speculum (2-17).The centre of controller module (7) is equipped with TFT liquid crystal displays (6).
Puller system (3) includes steel plate base (2-1), material fixture A (2-2), material fixture B (2-3) and PH tensiometers (2-
4)；Material fixture A (2-2) is in steel plate base (2-1), and material fixture B (2-3) is on PH tensiometers (2-4)；PH
For tensiometer (2-4) on fixed lateral beam (2-9), cylinder beam A (2-6) and cylinder beam B (2-8) are installed in steel plate base
On (2-1), cylinder beam A (2-6) and cylinder beam B (2-8) and fixed lateral beam (2-9) through-hole can be slided；Stepper motor (2-
13) connection shaft coupling (2-5) drives the leading screw rotation in screw set group (2-7)；Upper mounting plate steel plate A (2-12) passes through four ramuscules
Column (2-10) is fixed on upper mounting plate steel plate B (2-24), and upper mounting plate steel plate B (2-24) is fixed on head piece (2-11), head piece
(2-11) and cylinder beam A (2-6) and cylinder beam B (2-8) connections are fixed.When using the high-precision stepper motor rotation of large torque
When, the leading screw in screw set group (2-7) can be driven to rotate, leading screw rotation drives the movement of fixed lateral beam (2-9), and then band
Dynamic PH tensiometers (2-4) move integrally, and electronic at the uniform velocity power is provided for cohesive force separating experiment, can replace manpower and make up people
The unstability of power.Iron bar (2-14) is fixed on upper mounting plate steel plate B (2-24), up stroke limit switch (2-15) and down stroke
Limit switch (2-16) is placed on iron bar (2-14), and during preventing screw from turning to the stroke end, PH tensiometers (2-4) generate
Mechanical collision, it is ensured that bond the safe operation of force test device.
The PA8 pins output PWM of the MCU of controller module (7) is obtained by experiment when the parameter of PWM is accounted for for 8K frequencies
Separation speed effect is best when sky is than being 50% and can not go out the IN1 that existing Lost walks situation, PA8 pins and L298 drive modules (5)
Pin connects；Controller module (7) output control stepper motor (2-13) positive and negative rotaring signal is controlled by PA4 pins and PA5 pins,
PA4 pins are connected with IN2 with IN3 pins of the PA5 pins respectively with L298 drive modules (5)；L298 drive modules (5) realize electricity
Keep flat big and driving current amplification so that the control signal level of stepper motor driver (4) and controller module (7)
Match；The OUT1 pins of L298 drive modules (5) are connected with the PUL- pins of stepper motor driver (4), stepper motor driver
(4) PUL+ pins connect high level, the DIR+ pins of stepper motor driver (4) and the OUT2 pins of L298 drive modules (5)
Connection, the DIR- pins of stepper motor driver (4) are connected with the OUT3 pins of L298 drive modules (5)；Then again by stepping
Motor driver (4) controls signal and four phase signals lines to connect with stepper motor (2-13).
Stepper motor (3) is 86 closed-loop high speed constant torque step-servo motors.
The MCU of controller module (7) is STM32F103RCT6；
Stepper motor driver (4) is closed-loop drive HBS86H.
Communication module (8) turns TTL modules for RS232.
Communication module (8) can realize the two-way communication of controller module (7) and PH tensiometers (2-4), controller mould
The PA9 pins of the MCU of block (7) connect the RXD pins of communication module (8), and the TXD that the PA10 pins of MCU connect communication module (8) draws
Foot, another termination nine kinds of needles public affairs mouth of communication module (8), then connected with PH tensiometers (2-4).
The micro- module of image uses the continuous zoom object lens (2-18) of one, the adjustable range of continuous zoom object lens (2-18)
For 3~30 ×；Gear ring A (2-19) is fixed on continuous zoom object lens (2-18), and is turned in direct current micro control motor (2-22)
A gear B (2-23) is fixed on axis, by the way that direct current micro control motor (2-22) rotation is controlled to realize automatic zoom.Continuous zoom object
Mirror (2-18) and CCD camera (2-20) can be micro- by the speculum (2-17) of 45 degree of placements by the separation process of binding material
Imaging；CCD camera (2-20) and direct current micro control motor (2-22) are fixed on supporting plate (2-21).CCD camera (2-20) and straight
Stream micro control motor (2-22) is passed in computer (1) by data line show so as to observation analysis again, and computer (1) is by what is obtained
Information is analyzed, while focus information is fed back to controller module (7), controller module (7) control direct current micro control motor
(2-22) rotation focusing forms closed loop automatic focusing function.
The operating distance 293mm of continuous zoom object lens (2-18), amplification factor for 0.7 ×.
As shown in figure 3, carrying out embedded chip function to tensiometer first carries out initial configuration, tensile test is carried out
When, the rotation of screw is controlled by manual key, starting position is moved to, with material fixture A (2-2) and material fixture B ((2-
3) it clamps measured material and carries out tensile test；Then the Parameter of the laser treatment of input measured material includes the scanning of laser
Speed, the pulse number of excimer laser, laser irradiation energy intensity, according to the stepper motor rotating speed that information output is recommended, and
And the stepper motor turns degree and can be modified according to test case, and best test effect is obtained with this.Then, reach limiting
Motor tensile test when switching or reaching crest value tension, i.e. Off Timer interrupt.Then it in main program cycle, is obtained with serial ports
Organ must be calculated in object lens focus information, then direct current micro control motor is controlled to focus, closed loop is formed and adjust zoom objective focusing.So
Afterwards, timer interruption is the primary interrupt response services of 20ms.In interrupt response service, the work of progress is to complete insertion
The reading that formula chip counts PH pulling force, and Content of Communication is carried out data format processing and value of thrust key message is carried
It takes, then spaces out by the value of thrust of extraction and according to what driving frequency was calculated, into song on real-time rendering to TFT liquid crystal displays
Line trend graph, then the real-time no-load voltage ratio of pulling force and laser parameter is exported, provide reference for cohesive force separating experiment.Finally embedded
PWM is configured in chip STM32F103RCT6 allows pin PA8 to export PWM, is carried for HBS86H full digital closed loop step actuators
For pulse frequency, driving motor work.So cycle carries out tensile test work.
Computer (1) using the separation process of CCD camera lenses acquisition measured material, obtains its process micro-image, so in real time
It is removed noise, enhancing, recovery, segmentation, extraction feature etc. to image by computer afterwards, finally obtains every inspection of needs
Measured data and micro-image provide analysis data for cohesive force test.
The device can overcome the shortcomings that general tensile testing machine, and the excimer laser pre-treatment for a variety of materials is to bonding
Intensity effect regularity and Laser Micro-Machining mechanism study, provide experiment continuous process initial data and rule linearity curve and
The micro-image data of clastotype is bonded, so as to promote the advanced sexual development of the modernization of cohesive force experimental provision.
Claims (9)
1. towards excimer laser micro Process device cohesive force automatic detection device, it is characterised in that：The device includes puller system
(3), stepper motor driver module (10), controller module (7), communication module (8) and the micro- module of image, stepper motor drive
Dynamic device module (10) includes stepper motor driver (4) and L298 drive modules (5)；The stepper motor (2-13) of puller system (3)
Supply lines and control line connect with stepper motor driver (4)；Control line and L298 the driving mould of stepper motor driver (4)
Block (5) connects；Control line and L298 drive modules (5) connection of controller module (7)；The serial communication of controller module (7)
Line and communication module (8) connection；Communication module (8) is connected with 232 communication lines of PH tensiometers (2-4)；The micro- module packet of image
Computer (1) and CCD camera (2) are included, computer (1) is connected with CCD camera (2) by data line；CCD camera (2) with it is anti-
It is corresponding to penetrate mirror (2-17)；The centre of controller module (7) is equipped with TFT liquid crystal displays (6)；
Puller system (3) includes steel plate base (2-1), material fixture A (2-2), material fixture B (2-3) and PH tensiometers (2-4)；
Material fixture A (2-2) is in steel plate base (2-1), and material fixture B (2-3) is on PH tensiometers (2-4)；PH is drawn
For power meter (2-4) on fixed lateral beam (2-9), cylinder beam A (2-6) and cylinder beam B (2-8) are installed in steel plate base
On (2-1), cylinder beam A (2-6) and cylinder beam B (2-8) and fixed lateral beam (2-9) through-hole can be slided；Stepper motor (2-
13) connection shaft coupling (2-5) drives the leading screw rotation in screw set group (2-7)；Upper mounting plate steel plate A (2-12) passes through four ramuscules
Column (2-10) is fixed on upper mounting plate steel plate B (2-24), and upper mounting plate steel plate B (2-24) is fixed on head piece (2-11), head piece
(2-11) and cylinder beam A (2-6) and cylinder beam B (2-8) connections are fixed；When using the high-precision stepper motor rotation of large torque
When, the leading screw in screw set group (2-7) can be driven to rotate, leading screw rotation drives the movement of fixed lateral beam (2-9), and then band
Dynamic PH tensiometers (2-4) move integrally, and electronic at the uniform velocity power is provided for cohesive force separating experiment, can replace manpower and make up people
The unstability of power；Iron bar (2-14) is fixed on upper mounting plate steel plate B (2-24), up stroke limit switch (2-15) and down stroke
Limit switch (2-16) is placed on iron bar (2-14), and during preventing screw from turning to the stroke end, PH tensiometers (2-4) generate
Mechanical collision, it is ensured that bond the safe operation of force test device；
The PA8 pins output PWM of the MCU of controller module (7) is obtained by experiment when the parameter of PWM is 8K frequency duty ratios
Speed effect is detached when being 50% most preferably and the IN1 pins of existing Lost steps situation, PA8 pins and L298 drive modules (5) can not be gone out
Connection；Controller module (7) output control stepper motor (2-13) positive and negative rotaring signal is controlled by PA4 pins and PA5 pins, PA4
Pin is connected with IN2 with IN3 pins of the PA5 pins respectively with L298 drive modules (5)；L298 drive modules (5) realize level
Amplification and the amplification of driving current so that the control signal level of stepper motor driver (4) and controller module (7) matches；
The OUT1 pins of L298 drive modules (5) are connected with the PUL- pins of stepper motor driver (4), stepper motor driver (4)
PUL+ pins connect high level, the DIR+ pins of stepper motor driver (4) and the OUT2 pins of L298 drive modules (5) connect
It connects, the DIR- pins of stepper motor driver (4) are connected with the OUT3 pins of L298 drive modules (5)；Then again by stepping electricity
Machine driver (4) controls signal and four phase signals lines to connect with stepper motor (2-13).
2. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：Stepper motor (3) is 86 closed-loop high speed constant torque step-servo motors.
3. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：The MCU of controller module (7) is STM32F103RCT6.
4. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：Stepper motor driver (4) is closed-loop drive HBS86H.
5. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：Communication module (8) turns TTL modules for RS232.
6. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：Communication module (8) can realize the two-way communication of controller module (7) and PH tensiometers (2-4), controller module (7)
The PA9 pins of MCU connect the RXD pins of communication module (8), the PA10 pins of MCU connect the TXD pins of communication module (8), communicate
Another termination nine kinds of needles public affairs mouth of module (8), then connected with PH tensiometers (2-4).
7. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：The micro- module of image uses the continuous zoom object lens (2-18) of one, the adjustable ranges of continuous zoom object lens (2-18) for 3~
30×；Gear ring A (2-19) is fixed on continuous zoom object lens (2-18), and solid in the shaft of direct current micro control motor (2-22)
A fixed gear B (2-23), by the way that direct current micro control motor (2-22) rotation is controlled to realize automatic zoom；Continuous zoom object lens (2-
18) and CCD camera (2-20) being capable of micro-imaging by the speculum (2-17) of 45 degree of placements by the separation process of binding material；
CCD camera (2-20) and direct current micro control motor (2-22) are fixed on supporting plate (2-21)；CCD camera (2-20) and direct current micro-control
Motor (2-22) passes in computer (1) display so as to observation analysis by data line again, computer (1) by obtained information into
Row analysis, while focus information is fed back into controller module (7), controller module (7) control direct current micro control motor (2-22)
Rotation focusing forms closed loop automatic focusing function.
8. according to claim 1 towards excimer laser micro Process device cohesive force automatic detection device, feature exists
In：The operating distance 293mm of continuous zoom object lens (2-18), amplification factor for 0.7 ×.
9. using claim 1 described device carry out towards excimer laser micro Process device cohesive force automatic testing method,
It is characterized in that：
Embedded chip function is carried out to tensiometer first and carries out initial configuration, when carrying out tensile test, by pressing manually
The rotation of key control screw, is moved to starting position, and with material fixture A (2-2) and material fixture B, ((2-3) clamps measured material
Carry out tensile test；Then the Parameter of the laser treatment of input measured material includes the sweep speed of laser, quasi-molecule swashs
The pulse number of light, laser irradiation energy intensity, according to the stepper motor rotating speed that information output is recommended, and the stepper motor turns
Degree can be modified according to test case, and best test effect is obtained with this；Then, reach limit switch or reach peak value
Motor tensile test during pulling force, i.e. Off Timer interrupt；Then in main program cycle, computer is obtained about object with serial ports
Mirror focus information, then direct current micro control motor is controlled to focus, it forms closed loop and adjusts zoom objective focusing；Then, timer interruption is
Interrupt response service primary 20ms；In interrupt response service, the work of progress is to complete embedded chip to PH pulling force
The reading counted, and Content of Communication is carried out data format processing and value of thrust key message is extracted, then the drawing by extraction
It force value and is spaced out according to what driving frequency was calculated, into curve tendency figure on real-time rendering to TFT liquid crystal displays, then exported
The real-time no-load voltage ratio of pulling force and laser parameter provides reference for cohesive force separating experiment；Finally in embedded chip
PWM is configured in STM32F103RCT6 allows pin PA8 to export PWM, and arteries and veins is provided for HBS86H full digital closed loop step actuators
Rush frequency, driving motor work；So cycle carries out tensile test work；
Computer (1) using the separation process of CCD camera lenses acquisition measured material, obtains its process micro-image, Ran Houtong in real time
It crosses computer and noise, enhancing, recovery, segmentation, extraction feature etc. is removed to image, finally obtain every testing number of needs
According to and micro-image, for cohesive force test analysis data are provided.
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