CN108238582A - A kind of minute yardstick MEMS energy applied to fuse dredges device and preparation method thereof - Google Patents
A kind of minute yardstick MEMS energy applied to fuse dredges device and preparation method thereof Download PDFInfo
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- CN108238582A CN108238582A CN201810021536.XA CN201810021536A CN108238582A CN 108238582 A CN108238582 A CN 108238582A CN 201810021536 A CN201810021536 A CN 201810021536A CN 108238582 A CN108238582 A CN 108238582A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
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Abstract
The invention discloses a kind of minute yardstick MEMS energy applied to fuse to dredge device and preparation method thereof.The present invention using a pair of of discharge plate is set on an insulating substrate, and distance is 1 μm~8 μm, is encapsulated in encapsulating shell, and the fluid media (medium) of air is formed on a pair of of discharge plate, and a pair of of discharge plate is connected in parallel on the both ends of priming system；In normal state, a pair of of discharge plate is not turned on priming system, is open circuit at the both ends of priming system；When having the electrostatic potential of noisy high impulse on priming system, puncture the fluid media (medium) of air so that a pair of of discharge plate conducting, priming system short circuit dredge on device so as to which the electrostatic potential of the high impulse of interference is dredged MEMS energy, ensure the safety of priming system；The present invention is small, low in energy consumption, at low cost；The present invention breaks through device dimensional effect itself, can realize in the case of relatively low energy input (will also result in protected device false triggering), structure breakdown dredging so as to fulfill electrostatic energy.
Description
Technical field
The present invention relates to the security systems of fuse, and in particular to a kind of minute yardstick MEMS energy smoothing devices applied to fuse
Part and preparation method thereof.
Background technology
In order to ensure fuze function is safe and reliable in all kinds of guided missiles, Fuze Safety System has obtained rapid development.Mainly
Fuze Safety System be broadly divided into two classes：Mechanical security systems, electronic safety and arming system.
The mechanism of action of mechanical security systems is isolation initiation energy.Traditional mechanical security systems volume is bigger, existing
Nowadays miniaturization is the main feature of Mordern Fuzes, this just drives security system also to develop towards this miniaturization, security system
Miniaturization drives priming system miniaturization, but priming system miniaturization can cause its sensitivity to enhance, once priming system detonation will draw
Quick-fried warhead.
Electronic safety and arming system：Initiation energy threshold value is improved, realizes security ability, but it is that he mainly faces to minimize
Problem.Cause the extraneous factor of fuse false triggering to have very much, including constant current factor, radio frequency factor, electrostatic considerations etc., wherein transient state
Electrostatic impact be most common fuse false triggering factor.In security system, electrostatic influences fuze control circuit main point
For two categories below：It is conductive mode that the first, which destroys conflicting mode, i.e., the electric current of ESD is directly by contacting on pcb board
Path, pin, equipment I/O Interface Terminals etc., cause equipment operation irregularity.
Second of destruction conflicting mode is the mode of radiativity, i.e., produces high current in short-term when ESD event occurs, this
Electric current can generate magnetic field and electric field, and the voltage generated due to changing magnetic field can be induced in the signal loop of neighbouring circuit, this
Voltage is disturbance voltage.Since the change rate of electric current is 20A/150ns, generated sensing disturbance voltage can cause logic circuit
False triggering, cause to delay work.In order to improve the reliability of security system, TVS (transient voltage suppressor diode) comes into being,
It can effectively absorb electrostatic energy, and a large amount of electric current of immediate leakage, realize that energy is dredged.But due to TVS pipe in itself
Impedance and processing problems, limit its absorb energy performance.
Invention content
For both the above type security system there are the problem of and TVS diode self performance limitation, the present invention carries
Go out a kind of minute yardstick MEMS energy applied to fuse and dredge device and preparation method thereof, by the realization pair of MEMS Anti-statics
The security protection of priming system；It is found compared with traditional Anti-static, is dredging structure spacing as in the range of minute yardstick, it is relatively low
Breakdown voltage, which can be realized, dredges the electric energy input energy of priming system.
An object of the present invention is to provide a kind of minute yardstick MEMS energy applied to fuse to dredge device.
The minute yardstick MEMS energy applied to fuse of the present invention is dredged device and is included：Substrate, metal discharge structure, fluid
Medium, encapsulating shell and electrode；Wherein, metal discharge structure is set on the substrate of insulation；It is provided with the lining of metal discharge structure
Bottom package is in encapsulating shell, full of air in encapsulating shell, so as to form the fluid media (medium) of air on the surface of metal discharge structure；
The both ends of metal discharge structure are connected to by lead outside encapsulating shell respectively；The end of two leads outside encapsulating shell is set respectively
Put electrode；The both ends of metal discharge structure are connected in parallel on the both ends of the priming system on fuse by electrode respectively；Metal discharge structure
Including a pair of of discharge plate, there is distance between a pair of of discharge plate；Priming system in normal state, has between a pair of of discharge plate
Distance is not turned on, and it is open circuit that MEMS energy, which dredges device at the both ends of priming system,；When priming system both ends have noisy high impulse
Electrostatic potential when, the electrostatic potential of high impulse causes the MEMS energy for being connected in parallel on priming system both ends is dredged in the encapsulating shell of device to seal
The small space closed generates the high temperature of transient state and forceful electric power coupling environment so that air fluid is excited, so as to puncture；Breakdown potential
Pressure is so that a pair of of discharge plate conducting, at this point, priming system is short-circuit, the electrostatic energy of high impulse is transferred to MEMS energy smoothing devices
On part, so as to ensure the safety of priming system.
The distance between a pair of of discharge plate is 1 μm~8 μm.
The metal discharge structure of the present invention uses tablet comb structure, point-to-point structure or point-to-area structure.
In tablet comb structure, a pair of of discharge plate is mirror-image structure, each discharge plate is tablet interdigitated electrode structure, each
A discharge plate includes parallel to each other and connection electric discharge broach, is connecting pin in the end of a discharge electric comb tooth, in connecting pin
Connecting lead wire is distinguished in upper setting contact, two contacts；Each electric discharge broach is rectangular metal structures, and the width for the broach that discharges is small
In the distance between adjacent two electric discharge broach；Electric discharge broach between two discharge plates intersects, and intersects
The distance between adjacent electric discharge broach between two discharge plates is 1 μm~8 μm.
In point-to-point structure, a pair of of discharge plate is identical structure；It is parallel to each other that each discharge plate includes a row
Needle point broach, the end of row's needle point broach be connecting pin, contact is set on connecting pin, and two contacts connect draw respectively
Line；Each needle point broach includes rectangular metal structures and tip, and triangle metal knot is set in the front end of rectangular metal structures
The tip of structure, the apex angle of triangle metal structure is 45~60 degree；The tip of the corresponding needle point broach of a pair of of discharge plate
Staggered relatively, the distance between tip of a pair of of discharge plate is 1 μm~8 μm.
Point-to-area structure includes the first discharge plate and the second discharge plate, and it is parallel to each other that the first discharge plate includes a row
Needle point broach, the end of row's needle point broach be connecting pin, contact is set on connecting pin；Each needle point broach includes
Rectangular metal structures and tip, at the tip of the front end of rectangular metal structures setting triangle metal structure, triangle metal knot
The apex angle of structure is 45~60 degree；Second discharge plate includes rectangular metal plate, the first discharge electrode of one side face of rectangular metal plate
The tip of one row's needle point broach of plate, opposite another side setting contact；Distinguish connecting lead wire in two contacts；First discharge plate
The distance between the rectangular metal plate of tip and the second discharge plate of needle point broach be 1 μm~8 μm.
Encapsulating shell is using anti-highfield and the material of high temperature.The form of encapsulating shell and the selection of material are to structure energy of the present invention
The amount ability of dredging has critically important influence, when the electrostatic potential input of the high impulse of transient state, can be generated in the small space of closing
High temperature and forceful electric power the coupling environment of transient state, by comparing all kinds of encapsulating materials, present invention selection polytetrafluoroethylene material realizes device
Part is encapsulated to be interconnected with external electric appliance, dielectric constant and dielectric loss very gas of the polytetrafluoroethylene material in wider frequency range,
And breakdown voltage, volume resistivity and arc resistance are very high, and under transient high temperature environment, 25 °~250 ° of the coefficient of expansion is very
It is low, and it is easier to resist the influence of all kinds of environment in laboratory environments, such as：Acid, alkali condition etc..
Metal discharge structure includes more metal layers, has adhesion layer between adjacent metal layer.Due in bulk silicon technological
Sense coupling technology DRIE the flatness of device surface can be made to reduce, and in etch areas, exist
Structure inflection point, these points can all cause electrostatic to be stacked in this region self-energy, can not be realized at the tip of metal discharge structure
Stable energy dredges function.Therefore the metal discharge structure that the present invention designs uses silicon substrate surface technique, due to different electrodes
Material has different energy to dredge ability under identical electrostatic environment, is emulated by multiple physical field, the present invention obtained with
Lower combination：First layer metal layer is aluminium or silver, and adhesion layer is germanium and second layer metal layer is nickel, tungsten W or gold Au.
It is another object of the present invention to provide the systems that a kind of minute yardstick MEMS energy applied to fuse dredges device
Preparation Method.
The minute yardstick MEMS energy applied to fuse of the present invention dredges the preparation method of device, includes the following steps：
1) substrate of insulation is provided；
2) splash-proofing sputtering metal on the substrate of insulation, and pass through wet method pattern, form metal discharge structure, metal discharge knot
There is distance between a pair of of discharge plate of structure, distance is 1 μm~8 μm；
3) pass through lead key closing process connecting lead wire respectively at the both ends of metal discharge structure；
4) by the metal discharge construction packages being formed on the substrate of insulation in encapsulating shell, the end of two leads is pierced by
Outside encapsulating shell；
5) end of be exposed at outside encapsulating shell two leads is prepared into electrode respectively；
6) two electrodes are connected in parallel on to the both ends of the priming system on fuse respectively, so as to which MEMS energy is dredged device parallel connection
The both ends of priming system on fuse；Priming system in normal state, has distance to be not turned between a pair of of discharge plate, MEMS energy
It is open circuit that amount, which dredges device at the both ends of priming system,；When priming system both ends have the electrostatic potential of noisy high impulse, high arteries and veins
The electrostatic potential of punching causes the small space that the MEMS energy for being connected in parallel on priming system both ends dredges the encapsulating shell inner sealing of device to generate wink
High temperature and forceful electric power the coupling environment of state so that air fluid is excited, so as to puncture；Breakdown voltage causes a pair of of discharge electrode
Plate is connected, at this point, priming system is short-circuit, the electrostatic energy of high impulse is transferred to MEMS energy and dredges on device, so as to ensure fire
The safety of work product.
In step 1), the substrate of insulation is provided, is included the following steps：
A) silicon (100) crystal orientation is provided as substrate；
B) by substrate in high-temperature oxydation diffusion furnace, growing silicon oxide, so as to form the substrate of insulation.
In step 2), metal discharge structure is formed on the substrate of insulation, specifically includes following steps：
A) first layer metal is sputtered on substrate；
B) wet method pattern first layer metal selects the inert positive photoresist of material as photoresist, it is ensured that selection photoresist is hard
Excessive horizontal brill will not be generated after film, leads to substrate adhesion, forms first layer metal layer；
C) adhesion layer is sputtered on first layer metal layer；
D) second layer metal is sputtered on adhesion layer；
E) using the graphical second layer metal of wet etching, second layer metal layer is formed.
Wherein, step 2) a) in, first layer metal use aluminium or silver.
In the c of step 2)) in, adhesion layer uses germanium.
In the d of step 2)) in, second layer metal uses one kind in nickel, tungsten W and gold Au.
Advantages of the present invention：
For the present invention using a pair of of discharge plate is set on an insulating substrate, distance is 1 μm~8 μm, is encapsulated in encapsulating shell,
The fluid media (medium) of air is formed on a pair of of discharge plate, a pair of of discharge plate is connected in parallel on the both ends of priming system；Priming system is just
Under normal state, a pair of of discharge plate is not turned on, and is open circuit at the both ends of priming system；When having noisy high impulse on priming system
During electrostatic potential, puncture the fluid media (medium) of air so that a pair of of discharge plate conducting, priming system short circuit, thus by the height interfered
The electrostatic potential of pulse is dredged MEMS energy and is dredged on device, ensures the safety of priming system；The present invention is based on MEMS bases
Energy dredge device, compared with other kinds of fuse security system：His is small, low in energy consumption, at low cost；Present invention knot
Structure is compared with other kinds of energy absorbing device (TVS Transient Suppression Diodes)：The purpose of this structure design is to pass through electric shock
It wears to form conducting circuit, to realize the structure of protected device short circuit, and the devices such as traditional TVS pipe are then easily to absorb energy to be
It is main, due to impedance of itself during this period etc., also limit the ability of its energy absorption；It structure of the present invention and has researched and developed
Energy is dredged structure and is compared, and breaks through device dimensional effect itself, can realize and (will also result in relatively low energy input by protector
Part false triggering) in the case of, structure breakdown dredging so as to fulfill electrostatic energy.
Description of the drawings
Fig. 1 is the schematic diagram that the minute yardstick MEMS energy applied to fuse of the present invention dredges one embodiment of device；
Fig. 2 is the metal discharge knot that the minute yardstick MEMS energy applied to fuse of the present invention dredges the embodiment one of device
The schematic diagram of structure；
Fig. 3 is the metal discharge knot that the minute yardstick MEMS energy applied to fuse of the present invention dredges the embodiment two of device
The schematic diagram of structure；
Fig. 4 is the metal discharge knot that the minute yardstick MEMS energy applied to fuse of the present invention dredges the embodiment three of device
The schematic diagram of structure.
Specific embodiment
Below in conjunction with the accompanying drawings, by specific embodiment, the present invention is further explained.
Embodiment one
As shown in Figure 1, the minute yardstick MEMS energy applied to fuse of the present embodiment is dredged device and is included：Substrate 1, metal
Discharging structure 2, fluid media (medium), encapsulating shell 3 and electrode 4；Wherein, metal discharge structure 2 is set on the substrate of insulation 1；Setting
The substrate for having metal discharge structure is encapsulated in encapsulating shell 3, full of air in encapsulating shell, so as on the surface of metal discharge structure
Form the fluid media (medium) of air；The both ends of metal discharge structure 2 are connected to by lead outside encapsulating shell respectively；Outside encapsulating shell
The end of two leads sets electrode 4 respectively；The both ends of metal discharge structure are connected in parallel on the firer on fuse by electrode respectively
The both ends of product.
In the present embodiment, substrate forms silica for high-temperature oxydation on silicon substrate；Metal discharge structure includes two layers of gold medal
Belong to layer, be adhesion layer between two metal layers, first layer metal layer is aluminium, adhesion layer is germanium and second layer metal layer is nickel
Ni；Encapsulating shell is polytetrafluoroethylene (PTFE).
As shown in Fig. 2, the metal discharge structure 2 in the present embodiment uses tablet comb structure, a pair of of discharge plate is mirror
As structure, each discharge plate is tablet interdigitated electrode structure, each discharge plate includes parallel to each other and connection electric discharge broach
21, it is connecting pin 22 in the end of a discharge electric comb tooth, contact 23 is set on connecting pin, connecting lead wire is distinguished in two contacts；
Each electric discharge broach 21 is rectangular metal structures, and the width for the broach that discharges is less than the distance between adjacent two electric discharge broach；Two
Electric discharge broach between a discharge plate intersects, the adjacent electric discharge broach between two to intersect discharge plate
The distance between be 1 μm~8 μm.
The minute yardstick MEMS energy applied to fuse of the present embodiment dredges the preparation method of device, includes the following steps：
1) substrate of insulation is provided：
A) silicon (100) is provided as substrate；
B) substrate is placed in high-temperature oxydation diffusion furnace, 500nm silica is grown, so as to form the substrate of insulation.
2) metal discharge structure is formed in the substrate of insulation：
A) the first layer metal aluminium of 1 μ m-thick is sputtered on substrate；
B) wet method pattern first layer metal selects the inert positive photoresist of material as photoresist, it is ensured that selection photoresist is hard
Excessive horizontal brill will not be generated after film, leads to substrate adhesion, forms first layer metal layer；
C) germanium of 50nm is sputtered on first layer metal layer, forms adhesion layer；
D) second layer metal nickel is sputtered on adhesion layer；
E) using the graphical second layer metal of wet etching, second layer metal layer is formed.
3) pass through lead key closing process connecting lead wire respectively at the both ends of metal discharge structure；
4) by the metal discharge construction packages being formed on the substrate of insulation in the encapsulating shell of polytetrafluoroethylene material, two
Root lead
End be pierced by outside encapsulating shell；
5) end of be exposed at outside encapsulating shell two leads is prepared into electrode respectively；
6) two electrodes are connected in parallel on to the both ends of the priming system on fuse respectively.
Embodiment two
As shown in figure 3, the metal discharge structure 2 in the present embodiment uses point-to-point structure, a pair of of discharge plate is identical
Structure；Each discharge plate includes row needle point broach 24 parallel to each other, is connection in the end of row's needle point broach
End 22, sets contact 23 on connecting pin, and connecting lead wire is distinguished in two contacts；Each needle point broach 24 includes rectangular metal knot
Structure and tip, at the tip of the front end of rectangular metal structures setting triangle metal structure, the apex angle of triangle metal structure
It is 45~60 degree；The tip of the corresponding needle point broach of a pair of of discharge plate is staggered relatively.Other are the same as embodiment one.
Embodiment three
As shown in figure 4, the metal discharge structure 2 in the present embodiment uses point-to-area structure, the first discharge plate includes one
Needle point broach 24 parallel to each other is arranged, is connecting pin 22 in the end of row's needle point broach, contact 23 is set on connecting pin；Often
One needle point broach 24 includes the tip of the triangle metal structure of rectangular metal structures and rectangular metal structures front end, triangle
The apex angle of shape metal structure is 45~60 degree；Second discharge plate includes rectangular metal plate 25, one side face of rectangular metal plate
The tip of the needle point broach 24 of one row of the first discharge plate；The another side setting contact 23 of rectangular metal plate 25；Two contacts
Connecting lead wire respectively.Other are the same as embodiment one.
It is finally noted that the purpose for publicizing and implementing example is to help to further understand the present invention, but this field
Technical staff be appreciated that：Without departing from the spirit and scope of the invention and the appended claims, it is various to replace and repair
It is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is to weigh
Subject to the range that sharp claim defines.
Claims (10)
1. a kind of minute yardstick MEMS energy applied to fuse dredges device, which is characterized in that the MEMS energy dredges device
Including：Substrate, metal discharge structure, fluid media (medium), encapsulating shell and electrode；Wherein, metal discharge is set on the substrate of insulation
Structure；The substrate for being provided with metal discharge structure is encapsulated in encapsulating shell, full of air in the encapsulating shell, so as to be put in metal
The surface of electric structure forms the fluid media (medium) of air；The both ends of the metal discharge structure are connected to encapsulating shell by lead respectively
Outside；The end of two leads outside encapsulating shell sets electrode respectively；The both ends of the metal discharge structure pass through electrode respectively
It is connected in parallel on the both ends of the priming system on fuse；The metal discharge structure includes a pair of of discharge plate, between a pair of of discharge plate
There is distance；Priming system in normal state, has distance to be not turned between a pair of of discharge plate, and MEMS energy dredges device in firer
The both ends of product are open circuit；When priming system both ends have the electrostatic potential of noisy high impulse, the electrostatic potential of high impulse causes
The small space of encapsulating shell inner sealing that the MEMS energy for being connected in parallel on priming system both ends dredges device generates the high temperature of transient state and forceful electric power coupling
Cyclization border so that air fluid is excited, so as to puncture；Breakdown voltage causes a pair of of discharge plate to be connected, at this point, firer
Product short circuit, the electrostatic energy of high impulse is transferred to MEMS energy and dredges on device, so as to ensure the safety of priming system.
2. MEMS energy as described in claim 1 dredges device, which is characterized in that the distance between the pair of discharge plate
It is 1 μm~8 μm.
3. MEMS energy as described in claim 1 dredges device, which is characterized in that the metal discharge structure is combed using tablet
Toothing, point-to-point structure or point-to-area structure.
4. MEMS energy as claimed in claim 3 dredges device, which is characterized in that in the tablet comb structure, Yi Duifang
Electrode plate is mirror-image structure, each discharge plate is tablet interdigitated electrode structure, each discharge plate includes parallel to each other and connects
Electric discharge broach, in the end of a discharge electric comb tooth for connecting pin, contact is set on connecting pin, and two contacts connect draw respectively
Line；Each electric discharge broach is rectangular metal structures, and the width for the broach that discharges is less than the distance between adjacent two electric discharge broach；Two
Electric discharge broach between a discharge plate intersects, the adjacent electric discharge broach between two to intersect discharge plate
The distance between be 1 μm~8 μm.
5. MEMS energy as claimed in claim 3 dredges device, which is characterized in that in the point-to-point structure, a pair of electric discharge
Pole plate is identical structure；Each discharge plate includes row needle point broach parallel to each other, at the end of row's needle point broach
It holds as connecting pin, contact is set on connecting pin, connecting lead wires are distinguished in two contacts；Each needle point broach includes rectangular metal
Structure and tip, at the tip of the front end of rectangular metal structures setting triangle metal structure, the apex angle of triangle metal structure
It is 45~60 degree；The tip of the corresponding needle point broach of a pair of of discharge plate is staggered relatively, the tip of a pair of of discharge plate it
Between distance be 1 μm~8 μm.
6. MEMS energy as claimed in claim 3 dredges device, which is characterized in that the point-to-area structure includes the first electric discharge
Pole plate and the second discharge plate, the first discharge plate includes row needle point broach parallel to each other, at the end of row's needle point broach
It holds as connecting pin, contact is set on connecting pin；Each needle point broach includes rectangular metal structures and tip, in rectangular metal
The tip of the front end setting triangle metal structure of structure, the apex angle of triangle metal structure is 45~60 degree；Second discharge electrode
Plate includes rectangular metal plate, and the tip of row's needle point broach of the first discharge plate of one side face of rectangular metal plate is opposite
Another side sets contact；Distinguish connecting lead wire in two contacts；The tip of the needle point broach of first discharge plate and the second discharge electrode
The distance between rectangular metal plate of plate is 1 μm~8 μm.
7. MEMS energy as described in claim 1 dredges device, which is characterized in that the encapsulating shell uses anti-highfield and height
The material of temperature.
8. MEMS energy as claimed in claim 7 dredges device, which is characterized in that the metal discharge structure includes multilayer gold
Belong to layer, there is adhesion layer between adjacent metal layer.
9. a kind of minute yardstick MEMS energy applied to fuse dredges the preparation method of device, which is characterized in that the preparation side
Method includes the following steps：
1) substrate of insulation is provided；
2) splash-proofing sputtering metal on the substrate of insulation, and pass through wet method pattern, metal discharge structure is formed, metal discharge structure
There is distance between a pair of of discharge plate, distance is 1 μm~8 μm；
3) pass through lead key closing process connecting lead wire respectively at the both ends of metal discharge structure；
4) by the metal discharge construction packages being formed on the substrate of insulation in encapsulating shell, the end of two leads is pierced by encapsulation
Outside shell；
5) end of be exposed at outside encapsulating shell two leads is prepared into electrode respectively；
6) two electrodes are connected in parallel on to the both ends of the priming system on fuse respectively, are drawn so as to dredge device and be connected in parallel on MEMS energy
The both ends of priming system on letter；Priming system in normal state, has distance to be not turned between a pair of of discharge plate, and MEMS energy is dredged
It is open circuit that device, which is led, at the both ends of priming system；When priming system both ends have the electrostatic potential of noisy high impulse, high impulse
Electrostatic potential causes the small space that the MEMS energy for being connected in parallel on priming system both ends dredges the encapsulating shell inner sealing of device to generate transient state
High temperature and forceful electric power coupling environment so that air fluid is excited, so as to puncture；Breakdown voltage causes a pair of of discharge plate to lead
Logical, at this point, priming system is short-circuit, the electrostatic energy of high impulse is transferred to MEMS energy and dredges on device, so as to ensure priming system
Safety.
10. preparation method as claimed in claim 9, which is characterized in that in step 2), metal is formed on the substrate of insulation
Discharging structure specifically includes following steps：
A) first layer metal is sputtered on substrate；
B) wet method pattern first layer metal selects the inert positive photoresist of material as photoresist, it is ensured that after selection photoresist post bake
Horizontal brill will not be generated, leads to substrate adhesion, forms first layer metal layer；
C) adhesion layer is sputtered on first layer metal layer；
D) second layer metal is sputtered on adhesion layer；
E) using the graphical second layer metal of wet etching, second layer metal layer is formed.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112526429A (en) * | 2020-12-01 | 2021-03-19 | 中国人民解放军陆军工程大学 | Fuse electrostatic discharge module voltage calibration system and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112526429A (en) * | 2020-12-01 | 2021-03-19 | 中国人民解放军陆军工程大学 | Fuse electrostatic discharge module voltage calibration system and method |
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