CN108235729A - A kind of spectrometer and light spectrum detecting apparatus - Google Patents
A kind of spectrometer and light spectrum detecting apparatus Download PDFInfo
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- CN108235729A CN108235729A CN201780002736.4A CN201780002736A CN108235729A CN 108235729 A CN108235729 A CN 108235729A CN 201780002736 A CN201780002736 A CN 201780002736A CN 108235729 A CN108235729 A CN 108235729A
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- 238000001228 spectrum Methods 0.000 title claims abstract description 29
- 238000001914 filtration Methods 0.000 claims abstract description 36
- 239000000523 sample Substances 0.000 claims description 29
- 230000005540 biological transmission Effects 0.000 claims description 6
- 230000005670 electromagnetic radiation Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 4
- 238000001069 Raman spectroscopy Methods 0.000 description 3
- 238000001237 Raman spectrum Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002189 fluorescence spectrum Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The embodiment of the present invention discloses a kind of spectrometer and light spectrum detecting apparatus, it is related to substance detection technique, it is more conducive to the miniaturization of spectrometer, in addition compared with prior art, smaller volume can either obtain same as the prior art or higher sensitivity, while improve spectral resolution and spectral measurement ranges.A kind of spectrometer includes:Space filtering device, light-splitting device, the collimator assembly being set on the light wave input light path of light-splitting device and the focus pack being set on the light wave output light path of light-splitting device, sensor;Collimator assembly is set between space filtering device and light-splitting device, and focus pack is set between light-splitting device and sensor;Collimator assembly is used for the focal length of the light wave in the light wave input path that light-splitting device is adjusted in the first focal range;And/or focus pack is additionally operable to the focal length of the light wave on the light wave emitting light path that light-splitting device is adjusted in the second focal range.
Description
Technical field
The embodiment of the present invention is related to substance detection technique more particularly to a kind of spectrometer and light spectrum detecting apparatus.
Background technology
Current light spectrum detecting apparatus is usually made of probe and spectrometer, wherein, spectrometer is substantially based on reflection
The transmittance structure of structure or ordinary lens group (camera lens) is formed, and the spectrometer realization principle based on catoptric arrangement is as follows:Spectrometer
It is handled as follows after carrying out space filtering to the light of probe transmission, collimating mirror, which collimates the light into, is then incident on grating progress
The separated spectrum of grating is focused on sensor surface by light splitting, focusing mirror;Light based on ordinary lens group (camera lens) structure
Spectrometer realization principle is as follows:Spectrometer is handled as follows after carrying out space filtering to the light of probe transmission, collimation transmission microscope group
(camera lens), which collimates the light into, to be then incident on grating and is divided, and focused transmission microscope group (camera lens) focuses on the separated spectrum of grating
Sensor surface.
For reflective structure spectrometer, main Optimal Parameters are the curvature and angle of speculum in entire spectral instrument,
5 parameters such as angle of grating, variable is very little, for aberration correction, can only sacrifice light energy, increase F numbers, general reflecting light
Spectrometer F numbers are F/4, and the problem of reflecting spectrograph is brought is:Adjustment mechanism is complicated, and light path intersects or has shared space, inconvenient
In modularized design, cause volume and weight that cannot reduce;In addition the bad adjusting of reflecting mirror focal length, causes low production efficiency;It is excellent
It is few to change variable, it is impossible to effective aberration correction, it is not easy to improve resolution ratio;F numbers are big, and light energy is small, and sensitivity of spectrograph is low, detection
Speed is slow.
For transmission-type ordinary lens group/camera lens, the focal length of lens group/camera lens is less than entire camera lens bucket length, by
In the volumetric constraint of spectrometer, the focal length of camera lens selection is smaller to cause resolution ratio is low, sensor is practised physiognomy cannot make full use of.
In short, the prior art is unfavorable for the miniaturization of spectrometer, sensitivity, spectral resolution and the spectrum of spectrometer are surveyed
It is serious by volumetric constraint to measure range.
Invention content
The embodiment of the present invention provides a kind of spectrometer and light spectrum detecting apparatus, is more conducive to the miniaturization of spectrometer,
In addition compared with prior art, smaller volume can either obtain same as the prior art or higher sensitivity, improve simultaneously
Spectral resolution and spectral measurement ranges.
In a first aspect, a kind of spectrometer is provided, including:
Space filtering device, light-splitting device, the collimator assembly being set on the light wave input light path of the light-splitting device, with
And it is set to focus pack, sensor on the light wave output light path of the light-splitting device;Wherein, the collimator assembly is set to
Between the space filtering device and the light-splitting device, the focus pack is set to the light-splitting device and the sensor
Between;The space filtering device for the light wave space filtering to probe output, and is projected with predetermined scattering angle;It is described
Collimator assembly, the light wave for being exported to the spatial filter collimate, and export;The spectrum groupware, for institute
The light wave for stating collimator assembly output carries out diffraction, and export according to wavelength;The focus pack, for the spectrum groupware is defeated
The focus light light splitting gone out, and export;The sensor is used to receive the light wave of the focus pack output, and generates corresponding
Spectrum;Wherein, the collimator assembly is additionally operable in the light wave input path that the light-splitting device is adjusted in the first focal range
Light wave focal length, the distance between the plane of incidence and exit facet of the collimator assembly are less than the minimum system of the collimator assembly
Focal length;And/or the focus pack is additionally operable on the light wave emitting light path that the light-splitting device is adjusted in the second focal range
Light wave focal length, the distance between the plane of incidence and exit facet of the focus pack are less than the minimum system of the focus pack
Focal length.
Second aspect provides a kind of light spectrum detecting apparatus and includes:Probe and any of the above-described spectrometer;It is described probe for
Electromagnetic radiation light wave is detected, and receives the reflecting light of the tested sample, and the reflecting light is emitted to described
Spectrometer.
In said program, spectrometer includes space filtering device, light-splitting device, the light wave for being set to the light-splitting device
Collimator assembly on input light path and focus pack, the sensor being set on the light wave output light path of the light-splitting device;
Wherein, collimator assembly is set between space filtering device and the light-splitting device, and focus pack is set to light-splitting device and biography
Between sensor;Space filtering device can be projected to the light wave space filtering of probe output, and with predetermined scattering angle;Collimation group
The light wave that part can export spatial filter collimates, and export;Spectrum groupware is capable of the light wave of collimation component output
Diffraction is carried out, and export according to wavelength;The focus light that focus pack can export collimator assembly, and export;Sensor energy
The light wave of enough collectiong focusing component output, and generate corresponding spectrum;In addition, collimator assembly is additionally operable in the first focal range
The focal length of the light wave in the light wave input path of light-splitting device is adjusted, the plane of incidence and the distance between exit facet of collimator assembly are small
In the minimum system focal length of collimator assembly;And/or focus pack is additionally operable to adjust the light of light-splitting device in the second focal range
The distance between the focal length of light wave on wave emitting light path, the plane of incidence and exit facet of focus pack is less than the minimum of focus pack
System focal length;In this way since the distance between the plane of incidence of collimator assembly and exit facet are less than the minimum system focal length of collimator assembly
And/or the distance between the plane of incidence of focus pack and exit facet be less than focus pack minimum system focal length, so more added with
Conducive to the miniaturization of spectrometer, in addition compared with prior art, smaller volume can either obtain same as the prior art or higher
Sensitivity, while improve spectral resolution and spectral measurement ranges.
Description of the drawings
It in order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be in embodiment or description of the prior art
Required attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some realities of the present invention
Example is applied, it for those of ordinary skill in the art, without creative efforts, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is a kind of structure chart of light spectrum detecting apparatus provided in an embodiment of the present invention;
Fig. 2 is the structure chart of a kind of light spectrum detecting apparatus that another embodiment of the present invention provides;
Fig. 3 is the structure chart of a kind of spectrometer that the embodiment of the present invention provides;
Fig. 4 is the structure of a kind of spectrometer that another embodiment of the present invention provides.
Specific embodiment
It should be noted that in the embodiment of the present invention, " illustrative " or " such as " etc. words for representing to make example, example
Card or explanation.Be described as in the embodiment of the present invention " illustrative " or " such as " any embodiment or designing scheme should
It is interpreted than other embodiments or designing scheme more preferably or more advantage.Specifically, " illustrative " or " example are used
Such as " word is intended to that related notion is presented in specific ways.
It should be noted that in the embodiment of the present invention, " (English:Of) ", " corresponding (English:Corresponding,
Relevant it is) " and " corresponding (English:Corresponding it) " can use with sometimes, it is noted that do not emphasizing it
During difference, meaning to be expressed is consistent." A and/or the B " that embodiments herein provides is interpreted as individually including
" A ", individually comprising " B " and simultaneously comprising " A and B " three kinds of situations.
The embodiment of the present invention provides a kind of light spectrum detecting apparatus, with reference to shown in Fig. 1, including:Probe 11 and spectrometer 12.
Probe 11 is used to emit light wave to tested sample 13, and receives the reflecting light of tested sample 13, and reflecting light is sent out
It is incident upon spectrometer 12.The light spectrum detecting apparatus that the embodiment of the present invention provides can be Raman spectrum detection device, infrared spectrum
Detection device, fluorescence spectrum detection device, LIBs (Laser-Induced Breakdown Spectroscopy, induced with laser
Breakdown spectral) one kind in light spectrum detecting apparatus etc..
With reference to shown in Fig. 2, the operation principle of structure and each structure to probe is described as follows:
Probe 11 includes:Light wave transmitter 111, dichroic piece 112, collimating element 113, filtering unit 113 and focusing
Device 115;
Light wave transmitter 11 is used for 112 emitting parallel light wave of dichroic piece.Wherein, light wave transmitter 11 can be laser
Device, infrared generator, fluorescence generator etc.;Wherein to generate the parallel light wave emitted to dichroic piece 112, if laser is adopted
With optical fiber laser when point light sources, the laser light wave sent out is transformed to parallel light wave by collimation lens.
Dichroic piece 112 is used for the parallel light wave reflection that light wave transmitter 11 emits to collimating element 113.Collimating element
113 are used for parallel focus light that dichroic piece 112 reflects and are transmitted through tested sample 13.Collimating element 113 is additionally operable to
The reflecting light of tested sample 13 is received, and dichroic piece 112 is transmitted through after reflecting light is collimated.Wherein, illustratively
If carrying out Raman spectrum detection, the reflecting light of tested sample 13 is the collected initial Raman signal of probe, is collimated
Device 113 allow by optical wavelength be more than light wave transmitter 111 emit parallel light wave minimum optical wavelength, in this way can be right
The light wave of the generation of light wave transmitter 111 filters out, and avoids generating interference to Raman signal.It is accurate that dichroic piece 112 is additionally operable to transmission
The light wave that straight device 113 transmits is to filtering unit 114.The light wave that filtering unit 114 is used to transmit dichroic piece 112 is filtered
Wave, and it is transmitted through focus device 115;The light wave that focus device 115 is used to transmit filtering unit is focused, and be transmitted through light
Spectrometer.Wherein, filtering unit 114 includes at least one filter plate.The minimum value of the bandpass range of filter plate emits more than light wave
The maximum wavelength of the parallel light wave of device transmitting.Filter plate only allows Raman signal to pass through in this way, further to light wave transmitter
The light wave of 111 generation filters out.Later, the reflecting light of tested sample 13 is sent to spectrometer 12 by probe 11.
With reference to shown in Fig. 3, the embodiment of the present invention provides a kind of spectrometer, including:
Space filtering device 31, light-splitting device 32, the collimator assembly being set on the light wave input light path of light-splitting device 32
33 and the focus pack 34, the sensor 35 that are set on the light wave output light path of light-splitting device 32;Wherein, collimator assembly 33
Be set between space filtering device 31 and light-splitting device 32, focus pack 34 be set to light-splitting device 32 and sensor 35 it
Between.
The function declaration of each structure included below to spectrometer is as follows:
Space filtering device 31 for the light wave space filtering to probe output, and is projected with predetermined scattering angle.The sky
Between filtering device 31 slit may be used.
Collimator assembly 33, the light wave for being exported to spatial filter 31 collimate, and export.
Spectrum groupware 32 carries out diffraction, and export for the light wave that collimation component 33 exports according to wavelength.The optical splitter
Part 32 includes grating.Such as:Plane grating, holographic body grating, wherein as shown in figure 3, during using plane grating, light-splitting device 32
Light wave input light path and output light path in the same side of plane grating;As shown in figure 4, when using holographic body grating, optical splitter
The light wave input light path and output light path of part 32 are located at the both sides of holographic body grating respectively.
Focus pack 34 for the focus light light splitting for exporting spectrum groupware 32, and exports.
Sensor 35 is used for the light wave of collectiong focusing component output, and generates corresponding spectrum, illustrative sensor 35
CCD (Charge-coupled Device, charge coupled cell) or CMOS may be used.
Wherein, collimator assembly 33 is additionally operable in the light wave input path that light-splitting device 32 is adjusted in the first focal range
The distance between the focal length of light wave, the plane of incidence and exit facet of collimator assembly 33 is less than the minimum system focal length of collimator assembly;With/
Or, focus pack 34 is additionally operable to the focal length of the light wave on the light wave emitting light path that light-splitting device is adjusted in the second focal range,
The distance between plane of incidence and exit facet of focus pack 34 are less than the minimum system focal length of focus pack.Illustratively, the standard
Collimation telephoto lens group or collimation telephoto lens may be used in straight component 33;Focus pack 34, which may be used, focuses on telephoto lens group
Or focus on telephoto lens.
Spectrometer such as using the above structure, under the premise of spectrometer constancy of volume, in a kind of illustrative scheme, light
Spectrometer system focal length can be increased to 35-50mm by the 25mm of the prior art, and the resolution ratio of spectrometer is increased to the prior art
1.5-2 times, CCD efficiently uses 1.5-2 times that area reaches original.
In said program, spectrometer includes space filtering device, light-splitting device, the light wave for being set to the light-splitting device
Collimator assembly on input light path and focus pack, the sensor being set on the light wave output light path of the light-splitting device;
Wherein, collimator assembly is set between space filtering device and the light-splitting device, and focus pack is set to light-splitting device and biography
Between sensor;Space filtering device can be projected to the light wave space filtering of probe output, and with predetermined scattering angle;Collimation group
The light wave that part can export spatial filter collimates, and export;Spectrum groupware is capable of the light wave of collimation component output
Diffraction is carried out, and export according to wavelength;The focus light that focus pack can export collimator assembly, and export;Sensor energy
The light wave of enough collectiong focusing component output, and generate corresponding spectrum;In addition, collimator assembly is additionally operable in the first focal range
The focal length of the light wave in the light wave input path of light-splitting device is adjusted, the plane of incidence and the distance between exit facet of collimator assembly are small
In the minimum system focal length of collimator assembly;And/or focus pack is additionally operable to adjust the light of light-splitting device in the second focal range
The distance between the focal length of light wave on wave emitting light path, the plane of incidence and exit facet of focus pack is less than the minimum of focus pack
System focal length;In this way since the distance between the plane of incidence of collimator assembly and exit facet are less than the minimum system focal length of collimator assembly
And/or the distance between the plane of incidence of focus pack and exit facet be less than focus pack minimum system focal length, so more added with
Conducive to the miniaturization of spectrometer, in addition compared with prior art, smaller volume can either obtain same as the prior art or higher
Sensitivity, while improve spectral resolution and spectral measurement ranges.
Above-described specific embodiment has carried out the purpose of the present invention, technical solution and advantageous effect further
It is described in detail, it should be understood that the foregoing is merely the specific embodiment of the present invention, is not intended to limit the present invention
Protection domain, all any modification, equivalent substitution, improvement and etc. on the basis of technical scheme of the present invention, done should all
Including within protection scope of the present invention.
Claims (10)
1. a kind of spectrometer, which is characterized in that including:
Space filtering device, light-splitting device, the collimator assembly being set on the light wave input light path of the light-splitting device, Yi Jishe
Focus pack, the sensor being placed on the light wave output light path of the light-splitting device;Wherein, the collimator assembly is set to described
Between space filtering device and the light-splitting device, the focus pack be set to the light-splitting device and the sensor it
Between;
The space filtering device for the light wave space filtering to probe output, and is projected with predetermined scattering angle;
The collimator assembly, the light wave for being exported to the spatial filter collimate, and export;
The spectrum groupware for carrying out diffraction according to wavelength to the light wave that the collimator assembly exports, and exports;
The focus pack for the focus light light splitting for exporting the spectrum groupware, and exports;
The sensor is used to receive the light wave of the focus pack output, and generates corresponding spectrum;
Wherein, the collimator assembly is additionally operable in the light wave input path that the light-splitting device is adjusted in the first focal range
The minimum system that the distance between the focal length of light wave, the plane of incidence and exit facet of the collimator assembly is less than the collimator assembly is burnt
Away from;And/or the focus pack is additionally operable on the light wave emitting light path that the light-splitting device is adjusted in the second focal range
The minimum system that the distance between the focal length of light wave, the plane of incidence and exit facet of the focus pack is less than the focus pack is burnt
Away from.
2. spectrometer according to claim 1, which is characterized in that the light-splitting device includes grating.
3. spectrometer according to claim 2, which is characterized in that the grating includes plane grating, holographic body grating.
4. spectrometer according to claim 1, which is characterized in that the collimator assembly includes:Collimate telephoto lens group or
Collimate telephoto lens.
5. spectrometer according to claim 1, which is characterized in that the focus pack includes:Focus on telephoto lens group or
Focus on telephoto lens.
6. spectrometer according to claim 1, which is characterized in that the space filtering device includes slit.
7. a kind of light spectrum detecting apparatus, which is characterized in that including:
Probe and such as claim 1-6 any one of them spectrometers;
The probe receives the reflecting light of the tested sample for detected electromagnetic radiation light wave, and will described in
Reflecting light emits to the spectrometer.
8. equipment according to claim 7, which is characterized in that the probe includes:Light wave transmitter, dichroic piece, standard
Straight device, filtering unit and focus device;
The light wave transmitter is used for the dichroic piece emitting parallel light wave;
The dichroic piece is used for the parallel light wave reflection that the light wave transmitter emits to the collimating element;
The collimating element is used for parallel focus light that the dichroic piece reflects and is transmitted through the tested sample;
The collimating element is additionally operable to receive the reflecting light of the tested sample, and is transmitted after the reflecting light is collimated
To the dichroic piece;
The dichroic piece is additionally operable to transmit the light wave of the collimating element transmission to the filtering unit;
The light wave that the filtering unit is used to transmit the dichroic piece is filtered, and be transmitted through the focus device;
The light wave that the focus device is used to transmit the filtering unit is focused, and be transmitted through the spectrometer.
9. equipment according to claim 8, which is characterized in that the filtering unit includes at least one filter plate.
10. equipment according to claim 9, which is characterized in that the minimum value of the bandpass range of the filter plate is more than institute
State the maximum wavelength of the parallel light wave of light wave transmitter transmitting.
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PCT/CN2017/117259 WO2019119274A1 (en) | 2017-12-19 | 2017-12-19 | Spectrometer and spectrum detecting apparatus |
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US20070222988A1 (en) * | 2006-03-21 | 2007-09-27 | Eric Jiang | Vibrational circular dichroism spectrometer using reflective optics |
CN203719769U (en) * | 2013-12-19 | 2014-07-16 | 南京邮电大学 | Acousto-optic modulation-based spectral measurement apparatus |
CN103954359A (en) * | 2014-05-13 | 2014-07-30 | 哈尔滨工业大学(威海) | Zoom spectrograph with spectral measuring range and resolution ratio adjustable |
CN106225926A (en) * | 2016-07-15 | 2016-12-14 | 中国科学院重庆绿色智能技术研究院 | A kind of miniaturization laser Raman spectrometer |
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CN103438999A (en) * | 2013-09-02 | 2013-12-11 | 南京理工大学 | Component-based transmission-type imaging spectrometer |
CN104568899A (en) * | 2014-12-25 | 2015-04-29 | 苏州优谱德精密仪器科技有限公司 | Portable raman spectrometer |
CN106404713B (en) * | 2016-11-23 | 2018-12-11 | 重庆大学 | A kind of miniature near infrared spectrometer of double detector of full spectral coverage 800nm-2500nm |
CN206656801U (en) * | 2017-03-09 | 2017-11-21 | 上海星必光电科技有限公司 | Compact ccd array spectrometer and Raman spectrum detection system |
CN107356331B (en) * | 2017-07-05 | 2019-02-26 | 中国科学院光电研究院 | Adjustable multimodal and realization spectral resolution light source measured directly |
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2017
- 2017-12-19 CN CN201780002736.4A patent/CN108235729A/en active Pending
- 2017-12-19 WO PCT/CN2017/117259 patent/WO2019119274A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070222988A1 (en) * | 2006-03-21 | 2007-09-27 | Eric Jiang | Vibrational circular dichroism spectrometer using reflective optics |
CN203719769U (en) * | 2013-12-19 | 2014-07-16 | 南京邮电大学 | Acousto-optic modulation-based spectral measurement apparatus |
CN103954359A (en) * | 2014-05-13 | 2014-07-30 | 哈尔滨工业大学(威海) | Zoom spectrograph with spectral measuring range and resolution ratio adjustable |
CN106225926A (en) * | 2016-07-15 | 2016-12-14 | 中国科学院重庆绿色智能技术研究院 | A kind of miniaturization laser Raman spectrometer |
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