CN108231996B - Foil resistance force-sensing sensor and preparation method thereof - Google Patents
Foil resistance force-sensing sensor and preparation method thereof Download PDFInfo
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- CN108231996B CN108231996B CN201810122660.5A CN201810122660A CN108231996B CN 108231996 B CN108231996 B CN 108231996B CN 201810122660 A CN201810122660 A CN 201810122660A CN 108231996 B CN108231996 B CN 108231996B
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- 239000011888 foil Substances 0.000 title claims abstract description 196
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 229920001721 polyimide Polymers 0.000 claims abstract description 83
- 239000003292 glue Substances 0.000 claims abstract description 22
- 239000000853 adhesive Substances 0.000 claims abstract description 21
- 230000001070 adhesive effect Effects 0.000 claims abstract description 21
- 230000002093 peripheral effect Effects 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 15
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002994 raw material Substances 0.000 claims description 44
- 238000010438 heat treatment Methods 0.000 claims description 12
- 229920002379 silicone rubber Polymers 0.000 claims description 12
- 238000005260 corrosion Methods 0.000 claims description 8
- 230000007797 corrosion Effects 0.000 claims description 8
- 238000001035 drying Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 229910001006 Constantan Inorganic materials 0.000 claims description 3
- 239000005030 aluminium foil Substances 0.000 claims description 3
- 238000004321 preservation Methods 0.000 claims description 3
- 238000001459 lithography Methods 0.000 claims description 2
- 238000010422 painting Methods 0.000 claims 1
- 238000003466 welding Methods 0.000 abstract description 4
- 241001391944 Commicarpus scandens Species 0.000 abstract description 3
- 238000003475 lamination Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
Abstract
The invention discloses a kind of foil resistance force-sensing sensors and preparation method thereof, the pressure sensor includes the first polyimide film, route foil with resistance value, foil piece without resistance value, second polyimide film and metal terminal, route foil includes peripheral foil line and horizontally-arranged foil line, route foil is connected to the inner surface of the first polyimide film, foil piece is connected to the inner surface of the second polyimide film, when the inner surface edge of the inner surface edge of the second polyimide film and the first polyimide film is bonded together by adhesive glue, clearance space is equipped between route foil and foil piece, metal terminal be riveted on the extension end the PIN position of the first polyimide film and be connected respectively with the both ends of peripheral foil line.The good linearity of weight and change in resistance of the invention, is not in the case where resistance value declines to a great extent suddenly, and stability is high, and foil is not easy to break, and using polyimide film as basilar memebrane, temperature tolerance with higher, when welding will not be burnt out.
Description
Technical field
The present invention relates to pressure sensor technique fields, are to be related to a kind of foil resistance force-sensing sensor more specifically
And preparation method thereof.
Background technique
Tested dynamic pressure acts on elastic sensing element, is deformed it, is pasted at the position of its deformation
Resistance strain gage (such as: wire form foil gauge, foil gage), resistance strain gage experiences the variation of dynamic pressure, by this principle
The scales of design are resistance pressure transmitter.
Existing resistance pressure transmitter has the disadvantage that 1, foil route is to be printed on basilar memebrane by mode of printing
On, although production cost is low, easy fracture is of poor quality；2, the temperature tolerance of basilar memebrane is poor, when welding, passes from metal terminal
The heat passed is easy to burn out basilar memebrane；3, weight and change in resistance is linear bad, resistance value can occur suddenly substantially under
Drop, stability do not reach requirement.
Summary of the invention
It is an object of the invention to overcome drawbacks described above in the prior art, provide a kind of foil resistance force-sensing sensor and
Preparation method.
To achieve the above object, the first aspect of the present invention provides a kind of foil resistance force-sensing sensor, including first
Polyimide film, the route foil with resistance value, the foil piece without resistance value, the second polyimide film and two metal terminals, institute
The inner surface that route foil is connected to the first polyimide film is stated, the route foil includes that peripheral foil line and several are horizontally-arranged
Foil line, the periphery foil line are centered around the periphery of horizontally-arranged foil line, and the head and the tail both ends of the periphery foil line are extend side by side
To the extension end the PIN position of the first polyimide film, the head and the tail both ends of the horizontally-arranged foil line are connected with peripheral foil line respectively
It connects, is arranged at equal intervals between adjacent two horizontally-arranged foil lines, the foil piece is connected to the inner surface of the second polyimide film, institute
The adhesive glue for being equipped at the inner surface edge of the second polyimide film and being arranged in foil piece periphery is stated, the height of the adhesive glue is big
In the height of foil piece, when the inner surface edge of second polyimide film and the inner surface edge of the first polyimide film are logical
When crossing adhesive glue and bonding together, clearance space is equipped between the route foil and foil piece, two metal terminals are riveted on
The extension end the PIN position of first polyimide film is simultaneously connected with the head and the tail both ends of peripheral foil line respectively.
Preferably, the route foil and foil piece are made of constantan foil respectively.
Preferably, it is oblong, institute that the periphery foil line, which is centered around the shape formed when horizontally-arranged foil line periphery,
State the foil piece that foil piece is set as oblong.
The second aspect of the present invention provides a kind of preparation method of foil resistance force-sensing sensor, comprising the following steps:
First polyimide film is laminated and is heated with the first foil raw material for preparing route foil, the two is connected
Together, photoetching, exposure, development, corrosion successively are carried out to the first foil raw material later, made needed for being formed on the first foil raw material
Line pattern, be made with route foil the first polyimide film；
Both second polyimide film and the second foil raw material of the preparation without resistance value foil piece are laminated and are heated, make
It links together, photoetching, exposure, development, corrosion successively is carried out to the second foil raw material later, the second foil raw material is made to form institute
The second polyimide film with no resistance value foil piece is made in the shape needed；
The adhesive glue for being arranged in foil piece periphery is coated at the inner surface edge of the second polyimide film, makes adhesive glue
Height is greater than the height of foil piece, and by the inner surface side of the inner surface edge of the second polyimide film and the first polyimide film
Edge is bonded together by adhesive glue alignment；
Two metal terminals are riveted on to the extension end the PIN position of the first polyimide film, and make its respectively with peripheral foil
The head and the tail both ends of material line are connected.
Preferably, pressure is set as 650~700Kg in lamination and heating stepses, heating temperature is 160~170
DEG C, room temperature taking-up is cooled to after keeping the temperature 2 hours.
Preferably, being painted respectively on the surface of the first foil raw material and the second foil raw material in lithography step
It is toasted after one layer photoresist, rises to 100 DEG C from room temperature, heat preservation 18~be cooled to room temperature after twenty minutes.
Preferably, the time for exposure is 18~20 seconds, the developing time is 18~22 seconds, after having developed
It rinses, drying.
Preferably, the etching time is 10~22 seconds, is neutralized, cleaned after corrosion, spin-drying.
Preferably, first polyimide film and preparing the first of route foil in lamination and heating stepses
Foil raw material, the second foil raw material of the second polyimide film and preparation without resistance value foil piece are individually positioned in corresponding folder
It in tool, and is laminated by press machine compressing fixture, all locks in fixture is tightened by spanner after press machine compressing fixture
Gu nut, stills remain in identical pressure state after removing fixture from press machine, finally remove fixture be transferred in baking oven into
Row heating.
Preferably, the fixture includes clamp bottom board, polytetrafluoro film, silicon rubber, fixture glass plate, fixture top
Plate, for the screw bolt and nut of locking fixture bottom plate and fixture top plate, the fixture assemble method are as follows: put two on clamp bottom board
Strata polytetrafluoroethylene membrane, then one piece of silicon rubber is put, then put two layers of polytetrafluoro film, then put first polyimide film and the first foil
Material raw material or the second polyimide film and the second foil raw material, then put one piece of two sides and post the fixture glass plate of aluminium foil, then put
Another first polyimide film and the first foil raw material or the second polyimide film and the second foil raw material, then put two stratas
Polytetrafluoroethylene membrane, then one piece of silicon rubber is put, then put two layers of polytetrafluoro film, according to this sequence, last edition needs are put
Two pieces of silicon rubbers are set, then installs fixture top plate, passes through screw bolt and nut locking fixture bottom plate and fixture top plate.
Compared with prior art, the beneficial effects of the present invention are:
1, the present invention is equipped with the first polyimide film, the route foil with resistance value, the foil piece without resistance value, the second polyamides
Imines film and two metal terminals, reasonable in design, the good linearity of weight and change in resistance are not in that resistance value is suddenly big
The case where width declines, stability is high, and foil is not easy to break, with higher resistance to using polyimide film as basilar memebrane
Warm nature, when welding, will not burn out basilar memebrane, substantially increase the quality of product.
2, preparation process advantages of simple of the invention, each link can guarantee the performance of pressure sensor, greatly improve
The quality of product.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the sectional view of foil resistance force-sensing sensor provided by the invention；
Fig. 2 is the installation diagram of the first polyimide film provided by the invention, route foil and metal terminal；
Fig. 3 is the installation diagram of foil piece provided by the invention, the second polyimide film and adhesive glue；
Fig. 4 is the installation diagram of the second polyimide film and adhesive glue provided by the invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
Please refer to figs. 1 to 4, the embodiment provides a kind of foil resistance force-sensing sensor, including first poly-
Acid imide film 1, the route foil 2 with resistance value, the foil piece 3 without resistance value, the second polyimide film 4 and two metal terminals 5,
Each component part of the present embodiment is described in detail with reference to the accompanying drawing.
Route foil 2 is connected to the inner surface of the first polyimide film 1 by laminar manner, and route foil 2 includes periphery
Foil line 21 and several horizontally-arranged foil lines 22, peripheral foil line 21 are centered around the periphery of horizontally-arranged foil line 22, peripheral foil line
21 head and the tail both ends are extend side by side to the extension end the PIN position 11 of the first polyimide film 1, the head and the tail both ends of horizontally-arranged foil line 22
It is connected respectively with peripheral foil line 21, is arranged at equal intervals between adjacent two horizontally-arranged foil lines 22.
Wherein, length, thickness and the quantity of peripheral foil line 21 and horizontally-arranged foil line 22 can determine the electricity of route foil
Hinder size.It, certainly according to actual needs can also be with when it is implemented, the resistance value of route foil 2 can be set to 4~20K Ω
Carry out adaptive change.
Foil piece 3 is connected to the inner surface of the second polyimide film 4 by laminar manner, the second polyimide film 4 it is interior
The adhesive glue 6 for being arranged in 3 periphery of foil piece is equipped at marginal surface, the height of adhesive glue 6 is greater than the height of foil piece 3.
When the inner surface edge of the second polyimide film 4 and the inner surface edge of the first polyimide film 1 pass through adhesive glue 6
When bonding together, since the height of adhesive glue 6 is greater than the height of foil piece 3, formd between route foil 2 and foil piece 3
Clearance space.When foil resistance force-sensing sensor is under pressure, route foil 2 can connect with the force part of foil piece 3
Touching.
Two metal terminals 5 be riveted on the extension end the PIN position 11 of the first polyimide film 1 and respectively with peripheral foil line
21 head and the tail both ends are connected.
In the present embodiment, route foil 2 and foil piece 3 can preferably be made of constantan foil, naturally it is also possible to use
Other kinds of foil.Wherein, it can be oval that peripheral foil line 21, which is centered around the shape formed when horizontally-arranged 22 periphery of foil line,
Shape, correspondingly, foil piece 3 can be set to the foil piece of oblong.
The preparation method of the foil resistance force-sensing sensor of the present embodiment, comprising the following steps:
(1) the first polyimide film is laminated with the first foil raw material for preparing route foil and is linked together, pressure is set
It is set to 650~700Kg, heating temperature is 160~170 DEG C, and room temperature taking-up is cooled to after keeping the temperature 2 hours；After laminating
A layer photoresist is painted on the surface of one foil raw material, is toasted after gluing, is risen to 100 DEG C from room temperature, is kept the temperature 18~20 points
It is cooled to room temperature after clock；Mask plate with line pattern is adjacent to the first foil raw material, is sent into exposure in exposure machine, when exposure
Between be 18~20 seconds；The the first foil raw material exposed to be put into developing machine and is developed, developing time is 18~22 seconds,
It is rinsed after having developed, drying；The first foil raw material that development has dried is put into etching machine and is corroded, etching time is
10~22 seconds, makes to form required line pattern (as shown in Figure 2) on the first foil raw material, neutralized, cleaned, got rid of after corrosion
The first polyimide film with route foil is made in dry-cure；
(2) the second foil raw material lamination by the second polyimide film with preparation without resistance value foil piece links together, and presses
Power is set as 650~700Kg, and heating temperature is 160~170 DEG C, and room temperature taking-up is cooled to after keeping the temperature 2 hours；After laminating
The second foil raw material surface on paint a layer photoresist, toasted after gluing, rise to 100 DEG C from room temperature, heat preservation 18~
It is cooled to room temperature after twenty minutes；Mask plate compatible with shape needed for foil piece is adjacent to the second foil raw material, is sent into exposure
Exposure in machine, time for exposure are 18~20 seconds；The the second foil raw material exposed is put into developing machine and is developed, is developed
Time is 18~22 seconds, is rinsed after having developed, drying；The the second foil raw material to have developed is put into etching machine and carries out corruption
Erosion, etching time are 10~22 seconds, and the second foil raw material is made to form required shape (as shown in Figure 3), neutralized after corrosion,
The second polyimide film with no resistance value foil piece is made in cleaning, spin-drying；
(3) adhesive glue for being arranged in foil piece periphery is coated at the inner surface edge of the second polyimide film, makes to bond
The height of glue is greater than the height of foil piece, and by the interior table of the inner surface edge of the second polyimide film and the first polyimide film
Face edge is bonded together by adhesive glue alignment；
(4) two metal terminals are riveted on to the extension end the PIN position of the first polyimide film, and make its respectively with periphery
The head and the tail both ends of foil line are connected.
Preferably, lamination and heating stepses in, the first polyimide film with prepare route foil the first foil raw material,
The the second foil raw material of second polyimide film and preparation without resistance value foil piece can be individually positioned in corresponding fixture,
And be laminated by press machine compressing fixture, all locking spiral shells in fixture are tightened by spanner after press machine compressing fixture
Mother, stills remain in identical pressure state after removing fixture from press machine, finally remove fixture and be transferred in baking oven and consolidated
Change heating.
Wherein, fixture may include clamp bottom board, polytetrafluoro film, silicon rubber, fixture glass plate, fixture top plate, be used for
The screw bolt and nut of locking fixture bottom plate and fixture top plate.
Fixture assemble method are as follows: put two layers of polytetrafluoro film on clamp bottom board, then put one piece of silicon rubber, then put two stratas
Polytetrafluoroethylene membrane, then put first polyimide film and the first foil raw material or the second polyimide film and the second foil original
Material, then puts one piece of two sides and posts the fixture glass plate of aluminium foil, then put another first polyimide film and the first foil raw material or
The second polyimide film of person and the second foil raw material, then two layers of polytetrafluoro film is put, then put one piece of silicon rubber, then put two stratas four
Fluorine film, according to this sequence, last version needs to place two pieces of silicon rubbers, and then installs fixture top plate, passes through spiral shell
Screw bolt and nut locking fixture bottom plate and fixture top plate.
By the lamination of above-mentioned fixture and baking oven heating means, it is put into when baking oven is heating and curing and still maintains when entire fixture
In identical pressure state, it can make to be laminated material mean forced, avoid the occurrence of and material is placed on layer in traditional handicraft
In press together lamination heating when because of bad problem caused by unbalance stress.It certainly, can also be directly in layer in order to simplify step
Press is laminated and is heated.
It should be noted that above-mentioned each control parameter can be changed according to actual needs, non-the present embodiment
It is limited.
In conclusion of the invention is reasonable in design, the good linearity of weight and change in resistance, be not in resistance value suddenly
The case where declining to a great extent, stability is high, and foil is not easy to break, with higher using polyimide film as basilar memebrane
Temperature tolerance, the heat that metal terminal passes over when welding will not burn out the extension end the PIN position of the first polyimide film, significantly
Improve the quality of product.In addition, preparation process advantages of simple of the invention, each link can guarantee the property of pressure sensor
Energy.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, other any changes, modifications, substitutions, combinations, simplifications made without departing from the spirit and principles of the present invention,
It should be equivalent substitute mode, be included within the scope of the present invention.
Claims (8)
1. a kind of foil resistance force-sensing sensor, which is characterized in that including the first polyimide film (1), with the route of resistance value
Foil (2), the foil piece (3) without resistance value, the second polyimide film (4) and two metal terminals (5), the route foil (2)
It is connected to the inner surface of the first polyimide film (1), the route foil (2) includes that peripheral foil line (21) and several are horizontally-arranged
Foil line (22), the periphery foil line (21) are centered around the periphery of horizontally-arranged foil line (22), the periphery foil line (21)
Head and the tail both ends are extend side by side to the extension end the PIN position (11) of the first polyimide film (1), the head of the horizontally-arranged foil line (22)
Tail both ends are connected with peripheral foil line (21) respectively, are arranged at equal intervals between adjacent two horizontally-arranged foil lines (22), the foil
Material piece (3) is connected to the inner surface of the second polyimide film (4), sets at the inner surface edge of second polyimide film (4)
There is the adhesive glue (6) for being arranged in foil piece (3) periphery, the height of the adhesive glue (6) is greater than the height of foil piece (3), works as institute
The inner surface edge of the inner surface edge and the first polyimide film (1) of stating the second polyimide film (4) is viscous by adhesive glue (6)
When being connected together, clearance space is equipped between the route foil (2) and foil piece (3), two metal terminals (5) are riveted on the
The extension end the PIN position (11) of one polyimide film (1) is simultaneously connected with the head and the tail both ends of peripheral foil line (21) respectively,
In, the route foil (2) and foil piece (3) are made of constantan foil respectively.
2. foil resistance force-sensing sensor according to claim 1, which is characterized in that the periphery foil line (21) surrounds
The shape formed when horizontally-arranged foil line (22) is peripheral is oblong, and the foil piece (3) is set as the foil piece of oblong.
3. the preparation method of foil resistance force-sensing sensor, feature described according to claim 1~any one of 2 exist
In, comprising the following steps:
First polyimide film is laminated and is heated with the first foil raw material for preparing route foil, the two is made to be connected to one
It rises, photoetching, exposure, development, corrosion successively is carried out to the first foil raw material later, make to form required line on the first foil raw material
The first polyimide film with route foil is made in road pattern；
By the second polyimide film and preparation, the second foil raw material without resistance value foil piece is laminated and is heated, and connects the two
Together, photoetching, exposure, development, corrosion successively are carried out to the second foil raw material later, forms the second foil raw material required
The second polyimide film with no resistance value foil piece is made in shape；
The adhesive glue for being arranged in foil piece periphery is coated at the inner surface edge of the second polyimide film, makes the height of adhesive glue
Lead to greater than the height of foil piece, and by the inner surface edge of the second polyimide film and the inner surface edge of the first polyimide film
Adhesive glue alignment is crossed to bond together；
Two metal terminals are riveted on to the extension end the PIN position of the first polyimide film, and make its respectively with peripheral foil line
Head and the tail both ends be connected.
4. the preparation method of foil resistance force-sensing sensor according to claim 3, which is characterized in that in lithography step
In, it is toasted after painting a layer photoresist respectively on the surface of the first foil raw material and the second foil raw material, from room temperature liter
To 100 DEG C, heat preservation 18~be cooled to room temperature after twenty minutes.
5. the preparation method of foil resistance force-sensing sensor according to claim 3, it is characterised in that: the time for exposure
It is 18~20 seconds, the developing time is 18~22 seconds, is rinsed after having developed, drying.
6. the preparation method of foil resistance force-sensing sensor according to claim 3, it is characterised in that: the etching time
It is 10~22 seconds, is neutralized, cleaned after corrosion, spin-drying.
7. the preparation method of foil resistance force-sensing sensor according to claim 3, which is characterized in that be laminated and heating
In step, first polyimide film and the first foil raw material, the second polyimide film and preparation nothing that prepare route foil
Second foil raw material of resistance value foil piece is individually positioned in corresponding fixture, and carries out layer by press machine compressing fixture
Pressure tightens all lock screws in fixture by spanner after press machine compressing fixture, make fixture from press machine remove after still
It is maintained at identical pressure state, fixture is finally removed and is transferred in baking oven and heated.
8. the preparation method of foil resistance force-sensing sensor according to claim 7, which is characterized in that the fixture includes
Clamp bottom board, polytetrafluoro film, silicon rubber, fixture glass plate, fixture top plate, for the spiral shell of locking fixture bottom plate and fixture top plate
Screw bolt and nut, the fixture assemble method are as follows: put two layers of polytetrafluoro film on clamp bottom board, then put one piece of silicon rubber, then put
Two layers of polytetrafluoro film, then put first polyimide film and the first foil raw material or the second polyimide film and the second foil
Material raw material, then put one piece of two sides and post the fixture glass plate of aluminium foil, then put another first polyimide film and the first foil original
Material or the second polyimide film and the second foil raw material, then two layers of polytetrafluoro film is put, then put one piece of silicon rubber, then put two layers
Polytetrafluoro film, according to this sequence, last version needs to place two pieces of silicon rubbers, then installs fixture top plate, leads to
Cross screw bolt and nut locking fixture bottom plate and fixture top plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810122660.5A CN108231996B (en) | 2018-02-07 | 2018-02-07 | Foil resistance force-sensing sensor and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810122660.5A CN108231996B (en) | 2018-02-07 | 2018-02-07 | Foil resistance force-sensing sensor and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108231996A CN108231996A (en) | 2018-06-29 |
| CN108231996B true CN108231996B (en) | 2019-05-17 |
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ID=62670803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201810122660.5A Active CN108231996B (en) | 2018-02-07 | 2018-02-07 | Foil resistance force-sensing sensor and preparation method thereof |
Country Status (1)
| Country | Link |
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| CN (1) | CN108231996B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2475804A1 (en) * | 1980-02-12 | 1981-08-14 | Lewiner Jacques | IMPROVEMENTS ON COMPOSITE SHEETS CONSTITUTING ELECTROMECHANICAL TRANSDUCERS AND TRANSDUCERS EQUIPPED WITH SUCH SHEETS |
| CN101490642A (en) * | 2006-07-18 | 2009-07-22 | Iee国际电子工程股份公司 | Input device |
| CN105092114A (en) * | 2015-04-28 | 2015-11-25 | 深圳市豪恩声学股份有限公司 | Pressure sensor, intelligent shoe pad, intelligent shoe, and manufacturing method of pressure sensor |
| CN205209473U (en) * | 2015-10-26 | 2016-05-04 | 范红中 | Even foil strain gauge of thickness |
| CN107246930A (en) * | 2017-06-20 | 2017-10-13 | 深圳市力合鑫源智能技术有限公司 | A kind of thin film flexible force-sensing sensor |
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2018
- 2018-02-07 CN CN201810122660.5A patent/CN108231996B/en active Active
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| Publication number | Publication date |
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| CN108231996A (en) | 2018-06-29 |
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