CN108231735A - Voltage controlled oscillator - Google Patents

Voltage controlled oscillator Download PDF

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Publication number
CN108231735A
CN108231735A CN201711393249.3A CN201711393249A CN108231735A CN 108231735 A CN108231735 A CN 108231735A CN 201711393249 A CN201711393249 A CN 201711393249A CN 108231735 A CN108231735 A CN 108231735A
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CN
China
Prior art keywords
circuit
inductance
combinational circuit
voltage controlled
controlled oscillator
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Granted
Application number
CN201711393249.3A
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Chinese (zh)
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CN108231735B (en
Inventor
冯春磊
吴悦
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Nanjing Sino Microelectronics Co Ltd
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Nanjing Sino Microelectronics Co Ltd
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Priority to CN201711393249.3A priority Critical patent/CN108231735B/en
Publication of CN108231735A publication Critical patent/CN108231735A/en
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Publication of CN108231735B publication Critical patent/CN108231735B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227Inductive arrangements or effects of, or between, wiring layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/2804Printed windings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • H01F27/288Shielding
    • H01F27/2885Shielding with shields or electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/34Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • H01F27/36Electric or magnetic shields or screens
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/10Inductors
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/08Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
    • H03B5/12Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F2017/0073Printed inductances with a special conductive pattern, e.g. flat spiral
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F2017/008Electric or magnetic shielding of printed inductances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F2017/0086Printed inductances on semiconductor substrate

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)

Abstract

The present invention provides a kind of voltage controlled oscillator, including:Inductance, it includes the first connecting pin, second connection end, intermediate node, the first line being connected between the first connecting pin and intermediate node, the second circuit being connected between intermediate node and second connection end, first line and the second circuit extend to form a circle or multiturn coil, positioned at the metal screen layer of inductance lower floor;Circuit structure under metal screen layer.Compared with prior art, other main circuits of voltage controlled oscillator are put into below inductance, can significantly reduce the area of entire voltage controlled oscillator in this way by the voltage controlled oscillator in the present invention, increase metal screen layer between inductance and other main circuits simultaneously, prevent interfering with each other for the two.

Description

Voltage controlled oscillator
【Technical field】
The present invention relates to radio frequency arts, more particularly to a kind of voltage controlled oscillator.
【Background technology】
With the ever-reduced transistor size of semiconductor technology, resistance, the size of capacitance are also less and less.And inductance is not It can accordingly be reduced with technique.So the proportion of the area in radio circuit shared by inductance is increasing, especially voltage controlled oscillation It can occupy very big chip area to the inductance of device, and the area for leading to entire voltage controlled oscillator is larger.
For more than present situation, the present invention proposes a kind of improved voltage controlled oscillator, can occupy smaller chip face Product.
【Invention content】
The purpose of the present invention is to provide a kind of improved voltage controlled oscillators, can occupy smaller chip area.
To solve the above-mentioned problems, the present invention provides a kind of voltage controlled oscillator, including:Inductance, including the first connection End, intermediate node, the first line being connected between the first connecting pin and intermediate node, is connected to middle node at second connection end The second circuit between point and second connection end, first line and the second circuit extend to form a circle or multiturn coil, positioned at electricity Feel the metal screen layer of lower floor;Circuit structure under metal screen layer.
Further, the zhou duicheng tuxing along a symmetry axis is integrally formed in the inductance, which passes through the coil Center, the first connecting pin is located at the side of the symmetry axis, and second connection end is located at the opposite side of the symmetry axis and connects with first End is connect along the symmetrical axial symmetry.
Further, the circuit structure under metal screen layer is symmetrical arranged along the symmetry axis.
Further, the voltage controlled oscillator further includes:First medium layer between inductance and metal screen layer; Second dielectric layer between metal screen layer and the circuit structure.
Further, the circuit structure under metal screen layer includes:Differential pair transistors combinational circuit;Two pole of transfiguration Pipe combinational circuit;Capacitor array combinational circuit;Common mode feedback circuit combinational circuit;The intermediate node of wherein described inductance passes through gold Belong to via with an input terminal of the operational amplifier in the common mode feedback circuit combinational circuit to be connected;The first of the inductance Connecting pin and second connection end are connected respectively with the first node in differential pair transistors combinational circuit and second node;Capacitance battle array The both ends of row combinational circuit are connected respectively with the first node in differential pair transistors combinational circuit and second node;Two pole of transfiguration The both ends of pipe combinational circuit are connected respectively with the first node in differential pair transistors combinational circuit and second node.
Further, differential pair transistors combinational circuit, varactor combinational circuit, capacitor array combinational circuit and altogether Cmfb circuit combinational circuit is from left to right arranged successively, and wherein differential pair transistors combinational circuit is close to the first of the inductance Connecting pin, second connection end, common mode feedback circuit combinational circuit is close to the intermediate node of the inductance.
Compared with prior art, the voltage controlled oscillator in the present invention, other main circuits of voltage controlled oscillator are put into Below inductance, can significantly reduce the area of entire voltage controlled oscillator in this way, at the same inductance and other main circuits it Between increase metal screen layer, what is both prevented interferes with each other.
【Description of the drawings】
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment Attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, for this For the those of ordinary skill of field, without having to pay creative labor, it can also be obtained according to these attached drawings other Attached drawing.Wherein:
Fig. 1 is the electrical block diagram of voltage controlled oscillator in one embodiment in the present invention;
Fig. 2 is the physical arrangement schematic top plan view of the voltage controlled oscillator in the present invention;
Fig. 3 is the physical arrangement schematic top plan view of the voltage controlled oscillator in the present invention, and wherein inductance has been not shown;
Fig. 4 is the physical arrangement schematic cross-section of the voltage controlled oscillator in the present invention.
【Specific embodiment】
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, it is below in conjunction with the accompanying drawings and specific real Applying mode, the present invention is described in further detail.
" one embodiment " or " embodiment " referred to herein refers to may be included at least one realization method of the present invention A particular feature, structure, or characteristic." in one embodiment " that different places occur in the present specification not refers both to same A embodiment, nor the individual or selective embodiment mutually exclusive with other embodiment.Unless stated otherwise, herein In the word of expression electric property coupling couple, be connected, connecting represent directly or indirectly to be electrical connected.
The present invention provides a kind of voltage controlled oscillator, by the way that other main circuits of voltage controlled oscillator are put under inductance Face can significantly reduce the area of entire voltage controlled oscillator, while increase gold between inductance and other main circuits in this way Belong to shielded layer, prevent interfering with each other for the two.
Fig. 1 is the electrical block diagram of voltage controlled oscillator in one embodiment in the present invention.Fig. 2 is in the present invention Voltage controlled oscillator physical arrangement schematic top plan view;Fig. 3 is that the physical arrangement of the voltage controlled oscillator in the present invention overlooks signal Figure, wherein inductance is are illustrated;Fig. 4 is the physical arrangement schematic cross-section of the voltage controlled oscillator in the present invention.
As described in Fig. 1-4, the voltage controlled oscillator include inductance L1, positioned at inductance L1 lower floors metal screen layer 150, Circuit structure under metal screen layer.Circuit structure under metal screen layer includes:Differential pair transistors combination electricity Road 140, varactor combinational circuit (varactor bank) 130;Capacitor array combinational circuit (capacitance bank) 120;Common mode feedback circuit combinational circuit 110.
On chip, inductance L1 usually requires to occupy very big area, in order to reduce the area of inductance L1, needs to inductance The structure of L1 carries out close arrangement.As shown in Figure 2, the inductance L1 includes the first connecting pin RP, second connection end RN, centre Node CT, the first line being connected between the first connecting pin RP and intermediate node CT are connected to the companies of intermediate node CT and second The second circuit between the RN of end is connect, first line and the second circuit extend to form a circle or multiturn coil.The inductance L1 is whole The zhou duicheng tuxing along a symmetry axis A1 is formed, which passes through the center of the coil, and it is right that the first connecting pin RP is located at this Claim the side of axis, second connection end RN is located at the opposite side of the symmetry axis and with the first connecting pin RP along the symmetrical axial symmetry. The part of first line and the second crossing elimination is located in different layers.
The common mode feedback circuit combinational circuit 110 includes operational amplifier OP1 and PMOS transistor M5.The inductance L1 Intermediate node CT pass through one of the operational amplifier OP1 in metallic vias 151 and the common mode feedback circuit combinational circuit 110 A input terminal is connected.
The differential pair transistors combinational circuit 140 include PMOS difference transistors M3, M4 and NMOS differential transistor M1, M2 is formed with first node A, second node B and third node C.The connections of the first connecting pin RP of the inductance L1 and second Hold RN by metallic vias (not shown) respectively with the first node A and second node B in differential pair transistors combinational circuit 140 It is connected.The drain electrode of PMOS transistor M5 is connected with third node.
The both ends of capacitor array combinational circuit 120 respectively with the first node A in differential pair transistors combinational circuit 140 and Second node B is connected.The both ends of varactor combinational circuit 130 respectively in differential pair transistors combinational circuit 140 One node A is connected with second node B.
In this embodiment, differential pair transistors combinational circuit 140, varactor combinational circuit 130, capacitor array Combinational circuit 120 and common mode feedback circuit combinational circuit 110 are from left to right arranged successively, wherein differential pair transistors combinational circuit 140 close to the first connecting pin of the inductance L1, second connection end, and common mode feedback circuit combinational circuit 110 is close to the inductance The intermediate node of L1 can design in this way in order to cabling.Preferably, the circuit structure under metal screen layer is along described symmetrical Axis A1 is symmetrical arranged, and can significantly reduce influence of the circuit structure to inductance L1 in this way.
As shown in Figure 4, voltage controlled oscillator further includes:First medium between inductance L1 and metal screen layer 150 Layer 160;Second dielectric layer 170 between metal screen layer 150 and the circuit structure.
In the present invention, the word that the expressions such as " coupling ", connected, " company ", " connecing " are electrical connected, unless otherwise instructed, then Represent direct or indirect electric property coupling.
It should be pointed out that any change that one skilled in the art does the specific embodiment of the present invention All without departing from the range of claims of the present invention.Correspondingly, the scope of the claims of the invention is also not merely limited to In previous embodiment.

Claims (6)

1. a kind of voltage controlled oscillator, which is characterized in that it includes:
Inductance including the first connecting pin, second connection end, intermediate node, is connected between the first connecting pin and intermediate node First line, the second circuit for being connected between intermediate node and second connection end, first line and the second circuit extension shape Into a circle or multiturn coil,
Positioned at the metal screen layer of inductance lower floor;
Circuit structure under metal screen layer.
2. voltage controlled oscillator according to claim 1, which is characterized in that
The zhou duicheng tuxing along a symmetry axis is integrally formed in the inductance, which passes through the center of the coil, and first connects Connect end positioned at the symmetry axis side, second connection end be located at the opposite side of the symmetry axis and with the first connecting pin along it is described symmetrically Axial symmetry.
3. voltage controlled oscillator according to claim 2, which is characterized in that
Circuit structure under metal screen layer is symmetrical arranged along the symmetry axis.
4. voltage controlled oscillator according to claim 1, which is characterized in that it is further included:
First medium layer between inductance and metal screen layer;
Second dielectric layer between metal screen layer and the circuit structure.
5. voltage controlled oscillator according to claim 4, which is characterized in that the circuit structure packet under metal screen layer It includes:
Differential pair transistors combinational circuit;
Varactor combinational circuit;
Capacitor array combinational circuit;
Common mode feedback circuit combinational circuit;
The intermediate node of wherein described inductance passes through the operation amplifier in metallic vias and the common mode feedback circuit combinational circuit One input terminal of device is connected;
First connecting pin of the inductance and second connection end respectively with the first node in differential pair transistors combinational circuit and Second node is connected;
The both ends of capacitor array combinational circuit respectively with the first node in differential pair transistors combinational circuit and second node phase Even;
The both ends of varactor combinational circuit respectively with the first node and second node in differential pair transistors combinational circuit It is connected.
6. voltage controlled oscillator according to claim 5, which is characterized in that
Differential pair transistors combinational circuit, varactor combinational circuit, capacitor array combinational circuit and common mode feedback circuit group It closes circuit from left to right to arrange successively, wherein differential pair transistors combinational circuit is close to the first connecting pin of the inductance, second Connecting pin,
Common mode feedback circuit combinational circuit is close to the intermediate node of the inductance.
CN201711393249.3A 2017-12-21 2017-12-21 Voltage controlled oscillator Active CN108231735B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN108231735B CN108231735B (en) 2020-01-14

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Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1259769A (en) * 1998-12-29 2000-07-12 皇家菲利浦电子有限公司 Integrated circuit of inductance element
US20020033741A1 (en) * 2000-09-15 2002-03-21 Alcatel Voltage controlled oscillator with automatic center frequency calibration
CN1450717A (en) * 2002-04-10 2003-10-22 络达科技股份有限公司 Voltage control oscillator with low phase noise
CN1622448A (en) * 2003-11-26 2005-06-01 阿尔卑斯电气株式会社 Voltage controlled oscillator small in reduction of inductance and Q
CN1777021A (en) * 2005-12-06 2006-05-24 东南大学 Voltage controlled oscillator
CN101064501A (en) * 2006-04-24 2007-10-31 中国科学院微电子研究所 Self-adaptive circuit of on-chip integrated low-noise active filter
US20080143446A1 (en) * 2006-12-15 2008-06-19 Chih-Wei Yao Low Phase-Noise Oscillator
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US8159308B1 (en) * 2009-04-20 2012-04-17 Marvell International Ltd. Low power voltage controlled oscillator (VCO)
CN102483984A (en) * 2009-08-31 2012-05-30 高通股份有限公司 Switchable inductor network
CN103166573A (en) * 2011-12-14 2013-06-19 台湾积体电路制造股份有限公司 Voltage-controlled oscillator
CN103501175A (en) * 2013-10-24 2014-01-08 清华大学 Millimeter-wave phase-locked loop
CN103518260A (en) * 2011-03-21 2014-01-15 吉林克斯公司 Symmmetrical center tap inductor structure
US20150200627A1 (en) * 2014-01-10 2015-07-16 International Business Machines Corporation Phase noise reduction in voltage controlled oscillators
CN105185769A (en) * 2014-03-11 2015-12-23 阿尔特拉公司 Inductor structures with improved quality factor
CN105529993A (en) * 2015-12-22 2016-04-27 江苏星宇芯联电子科技有限公司 Self-voltage stabilizing LC voltage-controlled oscillator
US9344036B1 (en) * 2015-02-06 2016-05-17 Qualcomm Incorporated Voltage-controlled oscillator (VCO) with amplitude control
CN106133632A (en) * 2014-04-03 2016-11-16 高通股份有限公司 Power-efficient, low noise and the actuator insensitive to technique/voltage/temperature (PVT) for voltage controlled oscillator (VCO)
US20170179884A1 (en) * 2015-12-16 2017-06-22 International Business Machines Corporation Vco selection and amplitude management using center tap inductor
CN107210707A (en) * 2014-12-16 2017-09-26 赛灵思公司 Voltage controlled oscillator including MuGFET
CN107425812A (en) * 2017-03-09 2017-12-01 中国科学院微电子研究所 Millimeter wave voltage-controlled oscillator based on dual-mode inductor

Patent Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1259769A (en) * 1998-12-29 2000-07-12 皇家菲利浦电子有限公司 Integrated circuit of inductance element
US20020033741A1 (en) * 2000-09-15 2002-03-21 Alcatel Voltage controlled oscillator with automatic center frequency calibration
CN1450717A (en) * 2002-04-10 2003-10-22 络达科技股份有限公司 Voltage control oscillator with low phase noise
CN1622448A (en) * 2003-11-26 2005-06-01 阿尔卑斯电气株式会社 Voltage controlled oscillator small in reduction of inductance and Q
CN1777021A (en) * 2005-12-06 2006-05-24 东南大学 Voltage controlled oscillator
CN101064501A (en) * 2006-04-24 2007-10-31 中国科学院微电子研究所 Self-adaptive circuit of on-chip integrated low-noise active filter
US20080143446A1 (en) * 2006-12-15 2008-06-19 Chih-Wei Yao Low Phase-Noise Oscillator
CN101409530A (en) * 2007-10-12 2009-04-15 瑞昱半导体股份有限公司 Voltage-controlled oscillator
US8159308B1 (en) * 2009-04-20 2012-04-17 Marvell International Ltd. Low power voltage controlled oscillator (VCO)
CN102483984A (en) * 2009-08-31 2012-05-30 高通股份有限公司 Switchable inductor network
CN103518260A (en) * 2011-03-21 2014-01-15 吉林克斯公司 Symmmetrical center tap inductor structure
CN102306642A (en) * 2011-09-22 2012-01-04 华东师范大学 On-chip integrated inductor with adjustable inductance value
CN103166573A (en) * 2011-12-14 2013-06-19 台湾积体电路制造股份有限公司 Voltage-controlled oscillator
CN103501175A (en) * 2013-10-24 2014-01-08 清华大学 Millimeter-wave phase-locked loop
US20150200627A1 (en) * 2014-01-10 2015-07-16 International Business Machines Corporation Phase noise reduction in voltage controlled oscillators
CN105185769A (en) * 2014-03-11 2015-12-23 阿尔特拉公司 Inductor structures with improved quality factor
CN106133632A (en) * 2014-04-03 2016-11-16 高通股份有限公司 Power-efficient, low noise and the actuator insensitive to technique/voltage/temperature (PVT) for voltage controlled oscillator (VCO)
CN107210707A (en) * 2014-12-16 2017-09-26 赛灵思公司 Voltage controlled oscillator including MuGFET
US9344036B1 (en) * 2015-02-06 2016-05-17 Qualcomm Incorporated Voltage-controlled oscillator (VCO) with amplitude control
US20170179884A1 (en) * 2015-12-16 2017-06-22 International Business Machines Corporation Vco selection and amplitude management using center tap inductor
CN105529993A (en) * 2015-12-22 2016-04-27 江苏星宇芯联电子科技有限公司 Self-voltage stabilizing LC voltage-controlled oscillator
CN107425812A (en) * 2017-03-09 2017-12-01 中国科学院微电子研究所 Millimeter wave voltage-controlled oscillator based on dual-mode inductor

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