CN108225420A - Vacuum capacitance tests system - Google Patents

Vacuum capacitance tests system Download PDF

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Publication number
CN108225420A
CN108225420A CN201711443963.9A CN201711443963A CN108225420A CN 108225420 A CN108225420 A CN 108225420A CN 201711443963 A CN201711443963 A CN 201711443963A CN 108225420 A CN108225420 A CN 108225420A
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CN
China
Prior art keywords
motor
capacitance
vacuum capacitance
vacuum
plc
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Pending
Application number
CN201711443963.9A
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Chinese (zh)
Inventor
刘锐
朱国俊
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Yangzhou Shenzhou Science And Technology Co Ltd
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Yangzhou Shenzhou Science And Technology Co Ltd
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Priority to CN201711443963.9A priority Critical patent/CN108225420A/en
Publication of CN108225420A publication Critical patent/CN108225420A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Control Of Stepping Motors (AREA)

Abstract

The present invention relates to a kind of vacuum capacitances to test system, including subscriber interface module and sequentially connected motor, encoder and PLC, subscriber interface module is connected with PLC, motor is connected with tested vacuum capacitance, encoder is connect on the same axis with vacuum capacitance and motor, and PLC controls the operation of motor.Vacuum capacitance provided by the invention tests system, systemization is high, pass through motor rotation vacuum capacitance, it does not need to manually rotate capacitance, simple to operate, the turnning circle of capacitance is accurate, torsional test is reliable, error is small, and the data of test are accurate, can meet the needs of practical application well.

Description

Vacuum capacitance tests system
Technical field
The present invention relates to a kind of vacuum capacitances to test system.
Background technology
Vacuum capacitance is commonly employed in RF application, is even more many especially in adaptation (MATCH).Due to true Empty capacitance under high-power and fever operating mode, be easy to cause damage, this requires we will carry out its performance for a long time Integration test.It just can ensure that vacuum capacitance can reliably work.
Vacuum capacitance test mode has Hi-pot test, capacitance test, torsional test etc. at present.
Hi-pot test commonly used in test vacuum capacitance maximum capacitance and voltage endurance during minimum capacitance, is mainly to look at Vacuum capacitance leakage current situation and clean surface degree, this test is currently manually to twist vacuum capacitance to the two Limit point acts on its both ends with high pressure generator.
Capacitance is tested, the appearance often enclosed with LCR Meter (being also LCR meter or avometer) tests Value, sensibility reciprocal, Q values etc..This test also manually one will enclose twisting capacitance, to judge that the capacitance of whole capacitance is linear.
Torsional test often encloses torsion during just rotation usually using torque spanner test, this torsion will be with every circle Variation and change, so test torque requiremnt must accomplish finely, it is not easy to the good exact test point of control, easily generation miss Difference, the data for leading to test are inaccurate.
The device of realization more than vacuum capacitance means of testing does not have systematization, and operating personnel is needed to rotate capacitance manually, this The turnning circle that sample will result in capacitance is inaccurate, and torsional test is unreliable, easily generates large error, and the data of test are not allowed Really.
Invention content
For the above-mentioned prior art the problem of, the purpose of the present invention is to provide one kind can avoid the occurrence of above-mentioned skill The vacuum capacitance test system of art defect.
In order to achieve the above-mentioned object of the invention, technical solution provided by the invention is as follows:
A kind of vacuum capacitance tests system, including subscriber interface module and sequentially connected motor, encoder and PLC, Subscriber interface module is connected with PLC, and motor is connected with tested vacuum capacitance, and encoder connects with vacuum capacitance and motor It connects on the same axis, PLC controls the operation of motor.
Further, the motor is stepper motor, and PLC is connected by motor driver with stepper motor.
Further, the motor is direct current generator, and PLC is connected by relay with direct current generator.
Further, the vacuum capacitance test system further includes the high voltage testing device being connected with vacuum capacitance.
Further, the vacuum capacitance test system further includes the LCR METER being connected with vacuum capacitance.
Further, encoder is fixed to made of terylene material with vacuum capacitance and direct current generator on fixed frame simultaneously.
Further, the encoder is R50T-8G24C-2000BM-2M optical rotary encoders.
Further, PLC FX1N-16T.
A kind of method using vacuum capacitance test system and test vacuum capacitance, including:
PLC control motors drive vacuum capacitance rotation, encoder feedback vacuum capacitance rotation information, according to the output of motor Displacement determines the pulse number of PLC outputs, realizes the step number control to motor.
Vacuum capacitance provided by the invention tests system, and systemization is high, by motor rotation vacuum capacitance, does not need to Capacitance is manually rotated, simple to operate, the turnning circle of capacitance is accurate, and torsional test is reliable, and error is small, the number of test According to accurate, the needs of practical application can be met well.
Description of the drawings
Fig. 1 is the structure diagram of embodiment 1;
Fig. 2 is the structure diagram of embodiment 2;
Fig. 3 is the pulse distribution oscillogram of stepper motor.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with the accompanying drawings and specific implementation The present invention will be further described for example.It should be appreciated that specific embodiment described herein is only to explain the present invention, and do not have to It is of the invention in limiting.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise Lower all other embodiments obtained, shall fall within the protection scope of the present invention.
Embodiment 1
As shown in Figure 1, a kind of vacuum capacitance test system, drives including sequentially connected subscriber interface module, PLC, motor Dynamic device, stepper motor and encoder, encoder are connected with PLC, and stepper motor is connected with tested vacuum capacitance, encode Device is connect on the same axis with vacuum capacitance and stepper motor, and for three simultaneously fixed on a fixed frame, fixed frame is terylene Made of material;It further includes current detection module, high voltage testing device, LCR METER and (is also LCR meter or three With table), wherein, current detection module is connected respectively with PLC and motor driver, high voltage testing device and LCR METER with Vacuum capacitance is connected, and motor driver is connected with Switching Power Supply.
Embodiment 2
As shown in Fig. 2, a kind of vacuum capacitance test system, including sequentially connected subscriber interface module, PLC, relay, Direct current generator and encoder, encoder are connected with PLC, and direct current generator is connected with tested vacuum capacitance, encoder with Vacuum capacitance connects on the same axis with direct current generator, and for three simultaneously fixed on a fixed frame, fixed frame is terylene material It is manufactured;It further includes current detection module, high voltage testing device, LCR METER and (is also LCR meter or three use Table), wherein, current detection module is connected respectively with PLC and relay, and high voltage testing device and LCR METER are and vacuum electric Appearance is connected, and relay is connected with Switching Power Supply.
In the above two embodiments:
The each circle control of vacuum capacitance is realized by the accurate feedback of encoder, and encoder uses R50T-8G24C- 2000BM-2M optical rotary encoders, the resolution ratio of the encoder is 2500 pulses.The higher explanation pair of resolution ratio of encoder The control of motor is more accurate, then the angular displacement of motor rotation is also just smaller, and the precision of control is also higher.Current sample electricity Resistance ensures the Numerical accuracy of detection in this way using 1 Ω, precision 0.1%, and the A/D module of PLC is 12, and minimum sample rate reaches To 2.5mv.The rotation of each circle of vacuum capacitance can be precisely controlled, so as to accurately test out the parameters of capacitance.
PLC uses FX1N-16T, and stepper motor or direct current generator are controlled, and drives the vacuum capacitance to rotate with this. User can carry out parameter setting on subscriber interface module, according to different the vacuum capacitance number of turns and rotating speed setup parameter. The high resolution of R50T-8G24C-2000BM-2M optical rotary encoders, the encoder are anti-as vacuum capacitance rotation information Feedback, connects with PLC step-by-step counting mouths, can realize precision data acquisition and control.
Stepper motor is a kind of executive component that pulse signal is converted into straight-line displacement or angular displacement.Stepper motor it is defeated Go out that displacement is directly proportional to input pulse number, speed is with the umber of pulse (i.e. pulse frequency) that is inputted in the unit interval into just Than turning to related with the phase sequence of each phase winding of pulse distribution to stepper motor.As long as so the quantity of control instruction pulse, The phase sequence that frequency and machine winding are powered can control the output shift quantity, speed and direction of stepper motor.Stepper motor has Preferable control performance, starting and stopping, reversion and the change of other any methods of operation can all be completed in a few pulses, And higher control accuracy can be obtained.Stepper motor can respond and out-of-step free highest step frequency is known as " initiation culture ";With This is similar, and " stop frequency " refers to that system control signal turns off suddenly, and stepper motor does not break through the highest Step Frequency of target location Rate.And initiation culture, stop frequency and the output torque of motor will be adapted with the rotary inertia of load.There are these to count According to, just can effectively to stepper motor carry out speed Control.Stepper motor, pulse equivalency, the arteries and veins of computing system are controlled using PLC Upper frequency limit and maximum impulse quantity are rushed, and then selects PLC and its corresponding function module.It can be determined according to pulse frequency Frequency, the quantity needed during PLC high-speed pulse outputs, it may be determined that the bit wide of PLC.The rotating speed of stepper motor depends on input Pulse frequency.When the period for changing input pulse, the width of tetra- phase winding low and high levels of ABCD will change, this is resulted in It is powered and the rate of power-off variation changes, motor speed is made to change, so adjusting the period of input pulse Control the movement velocity of stepper motor.
The forward and backward control of stepper motor can change its steering by changing the power-up sequence of each winding of stepper motor. By taking three-phase stepper motor as an example, rotated forward refering to what is shown in Fig. 3, being powered along motor when being A-B-C;When winding is powered by A-C-B sequences When motor reversal.Therefore, can by PLC export direction control signal change hardware ring distributor output sequence or The programmed sequence for changing output pulse is realized to change the power-up sequence of stepper motor winding.Stepper motor often inputs an electricity Pulse just takes a step forward, and the angular displacement of output is directly proportional to the umber of pulse inputted.It therefore can be according to the output of stepper motor Displacement determines the pulse number of PLC outputs, you can realizes the step number control to stepper motor:
The pulse number n=△ L/ δ of PLC outputs, △ L are the output shift quantity (mm) of stepper motor in formula, and δ is mechanism Pulse equivalency (mm/ pulses).The demand of control vacuum capacitance rotation has been reached to the accurate control of motor above, has been grasped for convenience Make with visualization control, subscriber interface module mainly realize rotating speed control, it is forward and reverse switching, the number of turns show, current detecting, setting The feature operations such as strike-machine duration.
Following several tests are included to the test of vacuum capacitance using this system:
1st, vacuum capacitance torsional test:Torsion is converted into electric current to measure, i.e., in driver power supply or relay power supply The current sampling resistor that 1 Ω is concatenated in circuit uses, precision 0.1%, and the AD converters of PLC can be by this resistance both ends electricity Pressure value operation is converted to visual numerical value and is shown on subscriber interface module, conveniently checks each circle torsion situation, while Alarm threshold value can be set, prevent vacuum capacitance is stuck from damaging;
2nd, vacuum capacitance voltage-withstand test:The fixed frame of fixed vacuum capacitance and motor is insulating properties made of terylene material Can be good, the injury to personnel is prevented, after high pressure generator acts on vacuum capacitance both ends, vacuum capacitance rotates under control, It thus can be with the dynamic voltage endurance of real-time testing vacuum capacitance;
3rd, vacuum capacitance capacitance is linearly tested:The corresponding capacitance of each circle is mainly tested, prevents capacitance from constantly drawing It is damaged during rising, LCR METER is fixed to capacitance both ends, each rotation capacitance of enclosing the land is shown according on subscriber interface module The number of turns shown records the capacitance of each circle.
In summary test function can also set the number of turns and the time of positive and negative rotation, and testing capacitor is stablized for a long time Performance achievees the purpose that efficient quick tests vacuum capacitance.
Vacuum capacitance provided by the invention tests system, and systemization is high, by motor rotation vacuum capacitance, does not need to Capacitance is manually rotated, simple to operate, the turnning circle of capacitance is accurate, and torsional test is reliable, and error is small, the number of test According to accurate, the needs of practical application can be met well.
Embodiment described above only expresses embodiments of the present invention, and description is more specific and detailed, but can not Therefore it is interpreted as the limitation to the scope of the claims of the present invention.It should be pointed out that for those of ordinary skill in the art, Without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection model of the present invention It encloses.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (9)

1. a kind of vacuum capacitance tests system, which is characterized in that including subscriber interface module and sequentially connected motor, coding Device and PLC, subscriber interface module are connected with PLC, and motor is connected with tested vacuum capacitance, encoder and vacuum capacitance It is connected with motor on the same axis, PLC controls the operation of motor.
2. vacuum capacitance according to claim 1 tests system, which is characterized in that the motor is stepper motor, and PLC leads to Motor drive device is crossed with step motor to be connected.
3. according to claim 1-2 vacuum capacitance test system, which is characterized in that the motor be direct current generator, PLC It is connected by relay with direct current generator.
4. the vacuum capacitance test system according to claim 1-3, which is characterized in that the vacuum capacitance system further includes The high voltage testing device being connected with vacuum capacitance.
5. the vacuum capacitance test system according to claim 1-3, which is characterized in that the vacuum capacitance system further includes The LCR METER being connected with vacuum capacitance.
6. the vacuum capacitance test system according to claim 1-3, which is characterized in that encoder and true capacitance and DC generator It is fixed to simultaneously made of terylene material on fixed frame.
7. the vacuum capacitance test system according to claim 1-3, which is characterized in that the encoder is R50T- 8G24C-2000BM-2M optical rotary encoders.
8. the vacuum capacitance test system according to claim 1-3, which is characterized in that PLC FX1N-16T.
9. a kind of method of vacuum capacitance test system and test vacuum capacitance using described in claim 2, which is characterized in that packet It includes:
PLC control motors drive vacuum capacitance rotation, encoder feedback vacuum capacitance rotation information, according to the output displacement of motor Amount determines the pulse number of PLC outputs, realizes the step number control to motor.
CN201711443963.9A 2017-12-27 2017-12-27 Vacuum capacitance tests system Pending CN108225420A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN201711443963.9A CN108225420A (en) 2017-12-27 2017-12-27 Vacuum capacitance tests system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112611988A (en) * 2020-12-11 2021-04-06 四川英杰电气股份有限公司 Method and device for detecting residual life of variable vacuum capacitor

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Publication number Priority date Publication date Assignee Title
DE202008012793U1 (en) * 2008-09-25 2008-11-27 Hüttinger Elektronik Gmbh + Co. Kg capacitor arrangement
CN101873110A (en) * 2010-05-28 2010-10-27 常州瑞思杰尔电子科技有限公司 Radio frequency matcher
CN103107793A (en) * 2011-11-09 2013-05-15 中国科学院微电子研究所 Transmission line automatic impedance matching system
CN206134507U (en) * 2016-11-05 2017-04-26 杨亮 Adjustable type vacuum capacitor actuating mechanism of large -scale electric capacity
CN107293466A (en) * 2016-04-13 2017-10-24 北京北方华创微电子装备有限公司 Impedance matching methods, impedance matching box and semiconductor processing equipment

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Publication number Priority date Publication date Assignee Title
DE202008012793U1 (en) * 2008-09-25 2008-11-27 Hüttinger Elektronik Gmbh + Co. Kg capacitor arrangement
CN101873110A (en) * 2010-05-28 2010-10-27 常州瑞思杰尔电子科技有限公司 Radio frequency matcher
CN103107793A (en) * 2011-11-09 2013-05-15 中国科学院微电子研究所 Transmission line automatic impedance matching system
CN107293466A (en) * 2016-04-13 2017-10-24 北京北方华创微电子装备有限公司 Impedance matching methods, impedance matching box and semiconductor processing equipment
CN206134507U (en) * 2016-11-05 2017-04-26 杨亮 Adjustable type vacuum capacitor actuating mechanism of large -scale electric capacity

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112611988A (en) * 2020-12-11 2021-04-06 四川英杰电气股份有限公司 Method and device for detecting residual life of variable vacuum capacitor
CN112611988B (en) * 2020-12-11 2024-03-12 四川英杰电气股份有限公司 Method and device for detecting residual life of variable vacuum capacitor

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Application publication date: 20180629

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