CN101719755B - Method and device for checking lost steps of stepping motor and impedance matching device - Google Patents
Method and device for checking lost steps of stepping motor and impedance matching device Download PDFInfo
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- CN101719755B CN101719755B CN2009102436368A CN200910243636A CN101719755B CN 101719755 B CN101719755 B CN 101719755B CN 2009102436368 A CN2009102436368 A CN 2009102436368A CN 200910243636 A CN200910243636 A CN 200910243636A CN 101719755 B CN101719755 B CN 101719755B
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Abstract
The invention provides a method and a device for checking the lost steps of a stepping motor and an impedance matching device, which aim to solve the problem of step losing of the motor. A feedback shaping circuit is added on the conventional impedance matching device structure, which is used for sampling and shaping the drive pulse output by the stepping motor and feeding back and inputting the shaped drive pulse to a controller; and the controller judges whether the pulse width accords with the preset condition or not by detecting the pulse width of the fed back drive pulse so as to judge whether the motor loses the steps or not. The method and the device for checking the lost steps of the stepping motor and the impedance matching device of the invention can monitor and prevent the step losing of the motor without changing the conventional motor structure, thereby saving cost.
Description
Technical field
The present invention relates to machine field, particularly relate to losing of a kind of stepping motor and go on foot the method for inspection, device and a kind of impedance matching box.
Background technology
Stepping motor is a kind of electric pulse to be converted into the actuator of angular displacement, and during stepping motor (hereinafter to be referred as stepping motor or motor) operate as normal, control impuls of every reception just moves a step angle, promptly takes a step forward.If import control impuls continuously, motor just correspondingly rotates continuously.But the step number of advancing when rotor just causes losing the step of stepping motor during less than umber of pulse, and the step pitch number of once losing the step usually equals to move the integral multiple of umber of beats.Lose the step when serious, will make rotor rest on the position or around a position vibration.
Stepping motor can be applicable in the impedance matching box.With reference to shown in Figure 1; At typical R F (RadioFrequency; Radio frequency) in the plasma producing apparatus; The RF generator of constant output impedance (being generally 50 Ω) (like the radio-frequency power supply among the figure) produces the RF ripple of fixed frequency (being generally 13.56MHz), to plasma chamber (like the etching cavity among the figure) RF is provided power, to excite the plasma that is used for etching or other technologies.Usually; The constant output impedance of the impedance of the nonlinear load of plasma chamber and RF generator is also unequal; Therefore between RF generator and plasma chamber, has serious impedance mismatching; Make to have bigger reflection power on the RF transmission line, the power that the RF generator produces can't all flow to plasma chamber.For addressing this problem, can between RF generator and plasma chamber, insert impedance matching box.
The schematic diagram of impedance matching box is as shown in Figure 1, and impedance matching box mainly is made up of voltage-current sensor 11, controller unit 12 and stepping motor 13.Wherein, controller unit 12 is controlled by microprocessor DSP (Digital Signal Processing), and according to the signal that DSP provides, stepping motor 13 is driven.Microprocessor DSP can provide switch on and off signal etc. usually; These signals are to IGBT (the Insulated Gate Bipolar Transistor of H bridge in the stepping motor 13; Insulated gate polar form power tube; The compound full-control type voltage driven type power electronic device of forming by BJT (double pole triode) and MOS (insulating gate type field effect tube)) carries out switch control, can just change, reverse, change rotating speed etc. to motor 13 and control (as shown in Figure 2).
Based on above-mentioned introduction, in the process of impedance matching, if the indoor condition of plasma chamber changes frequent; Rotating continually can appear in stepping motor, and start-stop action, the losing the step problem and can be exaggerated of stepping motor; Influence the rotation precision of motor, from influencing the precision of impedance matching.
Summary of the invention
Technical problem to be solved by this invention provides losing of a kind of stepping motor and goes on foot the method for inspection, device and a kind of impedance matching box, loses the step problem to solve motor.
In addition, the present invention also provides a kind of radio frequency plasma generating means, can lose the step check to motor wherein.
In order to address the above problem, what the invention discloses a kind of stepping motor loses the step method of inspection, comprising:
Detect the width of the driving pulse of motor output;
When the wide prerequisite of said driving pulse, judge that motor loses the step;
Wherein, detect the width of motor-driven pulse in the following manner: obtain the driving pulse rising edge of motor output and the interruption of trailing edge respectively; Write down the count value of rising edge interruption and the count value that trailing edge interrupts respectively; Calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of driving pulse;
Wherein, the wide prerequisite of said driving pulse is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
What the invention also discloses a kind of stepping motor loses the step method of inspection, comprising:
The driving pulse of stepping motor output is sampled and the shaping processing, and the driving pulse after then shaping being handled detects pulse duration;
During the wide prerequisite of the driving pulse after said shaping is handled, judge that motor loses the step;
The width of the driving pulse after wherein detecting shaping in the following manner and handling: obtain driving pulse rising edge and the interruption of trailing edge after shaping is handled respectively; Write down the count value of rising edge interruption and the count value that trailing edge interrupts respectively; Calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of the driving pulse after shaping is handled;
The wide prerequisite of the driving pulse after wherein said shaping is handled is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
What the present invention also provided a kind of stepping motor loses the step verifying attachment, comprising:
The pulse duration detection module is used to detect the width of the driving pulse of motor output;
Lose the step inspection module, when being used for the wide prerequisite when said driving pulse, judge that motor loses the step;
Said pulse duration detection module comprises: interrupt acquiring unit, be used for obtaining respectively the driving pulse rising edge of motor output and the interruption of trailing edge; The timer counter unit is used for writing down respectively the count value of rising edge interruption and the count value that trailing edge interrupts; The pulse duration computing unit is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of driving pulse;
The wide prerequisite of wherein said driving pulse is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
What the present invention also provided a kind of stepping motor loses the step verifying attachment, comprising: signal pre-processing module, be used for the driving pulse of stepping motor output is sampled and shaping is handled, and the driving pulse input pulse width detection module after shaping handled;
The pulse duration detection module is used for the driving pulse after the shaping processing is detected pulse duration;
Lose the step inspection module, when being used for the wide prerequisite of the driving pulse after said shaping is handled, the judgement motor is lost the step;
Said pulse duration detection module comprises: interrupt acquiring unit, be used for obtaining respectively driving pulse rising edge and the interruption of trailing edge after shaping is handled; The timer counter unit is used for writing down respectively the count value of rising edge interruption and the count value that trailing edge interrupts; The pulse duration computing unit is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of the driving pulse after shaping is handled;
The wide prerequisite of the driving pulse after wherein said shaping is handled is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
The present invention also provides a kind of impedance matching box, comprising:
Stepping motor is used to receive the driving pulse that controller sends, and under the control of driving pulse, rotates;
The feedback shaping circuit is used for the driving pulse of exporting through stepping motor is sampled and the shaping processing, and with the driving pulse input controller after the shaping processing;
Controller is used to detect the width of the driving pulse after shaping is handled, and when the wide prerequisite of said driving pulse, judges that motor loses the step;
Said controller comprises: catch pin, be used to catch driving pulse rising edge and the interruption of trailing edge after shaping is handled; Timer conter is used to write down rising edge count value of interrupting and the count value that rises the edge interruption down; Microprocessor is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of the driving pulse after shaping is handled; The wide prerequisite of the driving pulse after wherein said shaping is handled is: said difference is less than predetermined value.
The present invention also provides a kind of radio frequency plasma generating means, comprising: the described impedance matching box of radio-frequency power supply, claim 5 and the plasma chamber that connect successively.
Compared with prior art, the present invention has the following advantages:
The present invention proposes a kind of improved impedance matching box; On conventional impedance matching device structure, increased a feedback shaping circuit; Be used for the driving pulse of exporting through stepping motor is sampled and the shaping processing, and the driving pulse feedback after the shaping processing is inputed to controller; Controller passes through to detect pulse duration to the driving pulse of feedback, judges whether pulse duration meets prerequisite, thereby judges whether motor is lost the step.Pulse duration is wide more, and motor speed is slow more, when pulse duration reaches certain numerical value, just thinks that motor loses the step.
Therefore, the present invention can monitor and prevent motor to lose the step problem in real time, and the structure that needn't transform existing motor just can realize, has practiced thrift cost.
Fig. 1 .1 is the structural representation of RF plasma producing apparatus in the prior art;
Fig. 1 .2 is the sketch map of H bridge in the stepping motor in the prior art;
Fig. 2 is the sketch map of the said a kind of motor-drive circuit of the embodiment of the invention;
Fig. 3 is the internal structure sketch map of Fig. 2 embodiment middle controller;
Fig. 4 is the sketch map of driving pulse width among Fig. 2 embodiment;
Fig. 5 .1 and 5.2 is the method flow diagrams that pass through rising edge interruption and trailing edge interruption calculating pulse duration among Fig. 2 embodiment;
Description of drawings
Fig. 6 is the schematic internal view of feedback shaping circuit among Fig. 2 embodiment;
Fig. 7 is the structure chart of the said improved impedance matching box of the embodiment of the invention;
Fig. 8 is the structure chart of losing the step verifying attachment of the said a kind of stepping motor of the embodiment of the invention;
Fig. 9 is the flow chart of losing the step method of inspection of the said a kind of stepping motor of the embodiment of the invention.
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below in conjunction with accompanying drawing and embodiment the present invention done further detailed explanation.
The present invention has proposed a kind of verification motor automatically and has lost the impedance matching box in step on impedance matching box structure shown in Figure 1.Be elaborated through contrast below with Fig. 1.
With reference to Fig. 2, be the sketch map of the said a kind of motor-drive circuit of the embodiment of the invention.
Only show the partial circuit structure that is used for drive stepping motor in the impedance matching box among the figure, this part is the maximum difference part of the present invention and prior art.
Said motor-drive circuit comprises dsp controller 21, stepping motor 22 and feedback shaping circuit 23, and the three connects successively and constitutes closed loop.The driving pulse input stepping motor 22 that dsp controller 21 sends is used for motor 22 is driven; Driving pulse is after stepping motor 22 outputs, and directly shaping circuit 23 is fed back in input; Feedback shaping circuit 23 is used for driving pulse is sampled and shaping is handled, and the driving pulse feedback that will pass through shaping is input to dsp controller 21, and dsp controller 21 utilizes the pulse signal that feeds back to lose the step self checking.
With reference to Fig. 3, be the internal structure sketch map of dsp controller 21.
Embodiment
Said dsp controller mainly comprises catches pin 31, timer conter 32 and microprocessor 33, and each module in the dsp controller is all by microprocessor 33 unified controls.
The mode that dsp controller is lost the step self checking is following:
The rising edge of the feedback pulse of 31 pairs of input pins of seizure pin of dsp controller and trailing edge interrupt respectively catching; Be time standard with timer conter 32 simultaneously; The current count value of record writes down current count value again in trailing edge interrupts in rising edge interrupts; The count value that count value that 33 pairs of said rising edges of microprocessor interrupt and trailing edge interrupt is carried out difference calculating, and said difference can be weighed the width of driving pulse.The sketch map of pulse duration is as shown in Figure 4.
The width of the driving pulse of stepping motor is wide more, and rotating speed of motor is just slow more, and when pulse duration reaches certain numerical value, promptly motor speed when rotor can not take a step forward, the step phenomenon just occurred losing slowly.Briefly, losing the step is exactly because the too high motor that causes of pulse frequency does not respond.Therefore, whether whether microprocessor 33 can meet prerequisite through judging the count value difference of weighing pulse duration, check out motor to lose the step.For example, when said difference during, think that promptly motor does not rotate, and the step problem occurred losing less than certain numerical value (can obtain) according to practical experience or experimental data.
Usually, dsp controller inside all can carry timer conter 32, is used for the setting-up time standard certain operations of dsp controller inside is carried out timing, and timer conter 32 can utilize the inner register of dsp controller to come stored count value.
Above-mentioned motor is lost the idiographic flow that goes on foot self checking can be with reference to shown in Fig. 5 .1 and 5.2, and wherein Fig. 5 .1 is the counting that rising edge is interrupted, and Fig. 5 .2 is the counting that trailing edge is interrupted.
Among Fig. 5 .1, the rising edge that the seizure pin of dsp controller captures feedback pulse interrupts, and in register, writes down current count value a1, goes out to interrupt then.Among Fig. 5 .2, the trailing edge that the seizure pin of dsp controller captures feedback pulse interrupts, and in register, writes down current count value a2.Microprocessor calculates a2-a1, judges according to difference whether motor rotates, and goes out to interrupt then.
Among Fig. 2, feedback shaping circuit 23 can have the circuit structure of multiple realization feedback function, and present embodiment is not done qualification at this, and the circuit that only provides with Fig. 6 is that example describes.
With reference to Fig. 6, be the schematic internal view of feedback shaping circuit.
Said feedback shaping circuit mainly comprises sample circuit 61 and shaping circuit 62.The input termination drive signal Q (being the IGBT drive signal) of said sample circuit 61, sample circuit 61 are made up of sampling resistor, drive signal Q after the sampling resistor sampling, input shaper circuit 62.Said shaping circuit 62 comprises four voltage comparator LM339 and diodes, is used for that the drive signal of sampling is carried out shapings such as filtering, level conversion and handles, and the hash that initial sampled is obtained converts level and smooth high-low level signal into.Be directly inputted into the seizure pin of dsp controller through the signal of shaping circuit 62.
In addition, said sample circuit 61 can also directly be sampled to the grid leak utmost point of IGBT.
Whether in sum, above-mentioned motor-drive circuit is through adding feedback arrangement, can self-checking go out motor and lose the step, improved the rotation precision of motor, reduced because lose the error that the step brings.And the structure that needn't transform existing motor just can realize, has practiced thrift cost.
Based on above-mentioned motor-drive circuit, the embodiment of the invention also provides a kind of improved impedance matching box, is applied in the RF plasma producing apparatus.
With reference to shown in Figure 7, the input of said impedance matching box still connects radio-frequency power supply (being the RF generator), and output still connects etching cavity (being plasma chamber).The internal structure of impedance matching box is following:
Comprise voltage-current sensor 71, controller 72, stepping motor 73, also comprise feedback shaping circuit 74.One end of voltage-current sensor 71 is connected with radio-frequency power supply, and the other end is connected with stepping motor 73 with controller 72 respectively, and stepping motor 73 also is connected with etching cavity.Controller 72, stepping motor 73 and feedback shaping circuit 74 connect and compose feedback loop successively.
Said voltage-current sensor 71 is used to gather the electric current and voltage transducing signal of radio-frequency power supply, and exports to controller 72, and controller 72 produces the motor-driven pulse, and exports to stepping motor 73, and drive motors 73 rotates; Driving pulse gets into feedback shaping circuit 74 after stepping motor 73 outputs, 74 pairs of driving pulses of feedback shaping circuit carry out signals collecting and shaping is handled, and obtain level and smooth sampled signal and feed back to controller 72; Controller 72 utilizes feedback pulse to carry out motor to lose the step verification.
In the process of impedance matching,, and during the start-stop action, can real-time monitor losing the step of motor through above-mentioned feedback arrangement, thereby carry out Prevention Processing if the condition frequent variations in the etching cavity causes stepping motor 73 frequent rotating to occur.Therefore, said improved impedance matching box has improved the rotation precision of motor effectively, has reduced because lose the error that the step brings.And the structure that needn't transform existing motor just can realize losing the step and detect, and has practiced thrift cost.
Based on the explanation of the foregoing description, can further expand out a kind of stepping motor lose step verifying attachment and a kind of stepping motor lose the step method of inspection, explanation respectively below.
With reference to Fig. 8, be the structure chart of losing the step verifying attachment of the said a kind of stepping motor of the embodiment of the invention.
Said device mainly comprises:
Pulse duration detection module 81 is used to detect the width of motor-driven pulse;
Lose step inspection module 82, when being used for the wide prerequisite when said driving pulse, the judgement motor is lost the step.
Wherein, said pulse duration detection module 81 can comprise:
Interrupt acquiring unit 811, be used for obtaining respectively the interruption of motor-driven rising edge of a pulse and trailing edge;
Timer counter unit 812 is used for writing down respectively the count value of rising edge interruption and the count value that trailing edge interrupts;
Pulse duration computing unit 813 is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of driving pulse.
Based on this, the difference of the count value that said prerequisite can interrupt interrupting with trailing edge for rising edge is less than predetermined value.Promptly when said difference during, lose step inspection module 82 and judge that motors lose the step less than predetermined value.
Preferably, said device can also comprise:
Signal pre-processing module 83; Be used for the driving pulse of stepping motor output is sampled and the shaping processing; And the driving pulse after shaping handled imports said pulse duration detection module 81, and the driving pulse after 81 pairs of shapings of pulse duration detection module are handled detects pulse duration.
Said apparatus can combine practical application, is applied to need carry out motor and lose in the equipment or system of step verification, and is not limited to the described impedance matching box of the foregoing description.
With reference to Fig. 9, be the flow chart of losing the step method of inspection of the said a kind of stepping motor of the embodiment of the invention.
Step 901 is sampled and the shaping processing to the driving pulse of stepping motor output;
Said shaping is handled and promptly original sampled signal is carried out processing such as filtering, level conversion, and the hash that initial sampled is obtained converts level and smooth high-low level signal into.
The width of driving pulse is wide more, and rotating speed of motor is just slow more, just occurs losing the step problem more easily.Through detecting pulse duration, can detect and whether lose the step.
Detection method is following:
Obtain the interruption of motor-driven rising edge of a pulse and trailing edge respectively;
Write down the count value of rising edge interruption and the count value that trailing edge interrupts respectively;
Calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of driving pulse.
Step 903 when the wide prerequisite of said driving pulse, judges that motor loses the step.
For example, the difference of the count value of interrupting interrupting with trailing edge when said rising edge is during less than predetermined value, thinks that motor loses the step.
Equally, the said step method of inspection of losing also can not be limited to above-mentioned impedance matching process, can combine true extension to arrive other application.
Each embodiment in this specification all adopts the mode of going forward one by one to describe, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.For method embodiment, because it is similar basically with device embodiment, so description is fairly simple, relevant part gets final product referring to the part explanation of method embodiment.
More than to a kind of stepping motor provided by the present invention lose the step method of inspection, device and a kind of impedance matching box; Carried out detailed introduction; Used concrete example among this paper principle of the present invention and execution mode are set forth, the explanation of above embodiment just is used for helping to understand method of the present invention and core concept thereof; Simultaneously, for one of ordinary skill in the art, according to thought of the present invention, the part that on embodiment and range of application, all can change, in sum, this description should not be construed as limitation of the present invention.
Claims (6)
- A stepping motor lose the step method of inspection, it is characterized in that, comprising:Detect the width of the driving pulse of motor output;When the wide prerequisite of said driving pulse, judge that motor loses the step;Wherein detect the width of the driving pulse of motor output in the following manner: obtain the driving pulse rising edge of motor output and the interruption of trailing edge respectively; Write down the count value of rising edge interruption and the count value that trailing edge interrupts respectively; Calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of driving pulse;The wide prerequisite of wherein said driving pulse is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
- A stepping motor lose the step method of inspection, it is characterized in that, comprising:The driving pulse of stepping motor output is sampled and the shaping processing, and the driving pulse after then shaping being handled detects pulse duration;During the wide prerequisite of the driving pulse after said shaping is handled, judge that motor loses the step;The width of the driving pulse after wherein detecting shaping in the following manner and handling: obtain driving pulse rising edge and the interruption of trailing edge after shaping is handled respectively; Write down the count value of rising edge interruption and the count value that trailing edge interrupts respectively; Calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of the driving pulse after shaping is handled;The wide prerequisite of the driving pulse after wherein said shaping is handled is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
- A stepping motor lose the step verifying attachment, it is characterized in that, comprising:The pulse duration detection module is used to detect the width of the driving pulse of motor output;Lose the step inspection module, when being used for the wide prerequisite when said driving pulse, judge that motor loses the step;Said pulse duration detection module comprises: interrupt acquiring unit, be used for obtaining respectively the driving pulse rising edge of motor output and the interruption of trailing edge; The timer counter unit is used for writing down respectively the count value of rising edge interruption and the count value that trailing edge interrupts; The pulse duration computing unit is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of driving pulse;The wide prerequisite of wherein said driving pulse is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
- A stepping motor lose the step verifying attachment, it is characterized in that, comprising:Signal pre-processing module is used for the driving pulse of stepping motor output is sampled and the shaping processing, and with the driving pulse input pulse width detection module after the shaping processing;The pulse duration detection module is used for the driving pulse after the shaping processing is detected pulse duration;Lose the step inspection module, when being used for the wide prerequisite of the driving pulse after said shaping is handled, the judgement motor is lost the step;Said pulse duration detection module comprises: interrupt acquiring unit, be used for obtaining respectively driving pulse rising edge and the interruption of trailing edge after shaping is handled; The timer counter unit is used for writing down respectively the count value of rising edge interruption and the count value that trailing edge interrupts; The pulse duration computing unit is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of the driving pulse after shaping is handled;The wide prerequisite of the driving pulse after wherein said shaping is handled is: the difference of the count value that said rising edge interruption and trailing edge interrupt is less than predetermined value.
- 5. an impedance matching box is characterized in that, comprising:Stepping motor is used to receive the driving pulse that controller sends, and under the control of driving pulse, rotates;The feedback shaping circuit is used for the driving pulse of exporting through stepping motor is sampled and the shaping processing, and with the driving pulse input controller after the shaping processing;Controller is used to detect the width of the driving pulse after shaping is handled, and when the wide prerequisite of said driving pulse, judges that motor loses the step; Said controller comprises: catch pin, be used to catch driving pulse rising edge and the interruption of trailing edge after shaping is handled; Timer conter is used to write down rising edge count value of interrupting and the count value that rises the edge interruption down; Microprocessor is used to calculate the poor of count value that rising edge interrupts interrupting with trailing edge, said difference table is shown the width of the driving pulse after shaping is handled; The wide prerequisite of the driving pulse after wherein said shaping is handled is: said difference is less than predetermined value.
- 6. a radio frequency plasma generating means is characterized in that, comprising: the described impedance matching box of radio-frequency power supply, claim 5 and the plasma chamber that connect successively.
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| CN102611373B (en) * | 2011-01-19 | 2014-08-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method and device for controlling stepper motor and impedance matcher |
| CN104092419B (en) * | 2014-07-24 | 2017-02-01 | 重庆大学 | Method for detecting step omitting of stepping motor |
| CN107293466B (en) * | 2016-04-13 | 2019-05-31 | 北京北方华创微电子装备有限公司 | Impedance matching methods, impedance matching box and semiconductor processing equipment |
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Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016, building 2, block M5, East Jiuxianqiao Road, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |