CN108220908A - A kind of method that frictional interface is formed in situ graphene and onion realizes superslide - Google Patents
A kind of method that frictional interface is formed in situ graphene and onion realizes superslide Download PDFInfo
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- CN108220908A CN108220908A CN201711360852.1A CN201711360852A CN108220908A CN 108220908 A CN108220908 A CN 108220908A CN 201711360852 A CN201711360852 A CN 201711360852A CN 108220908 A CN108220908 A CN 108220908A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
Abstract
The present invention relates to a kind of methods that frictional interface is formed in situ graphene and onion realization superslide, fullerene carbon and class graphitic carbon nano structural membrane are deposited on the material surfaces such as metal, ceramics and polymer by this method, composition friction is secondary, and graphene and onion are formed in frictional interface；Its reason is that the graphene and onion formed on frictional interface can effectively be dropped low friction pair contact area by sphere-contact or non-commensurability plane-plane contact or reduce frictional interface active force, so as to significantly reduce friction coefficient and wear rate, service life, sensitivity and reliability are improved to reach；Its object is to solve service lifes, sensitivity and the reliabilities such as existing high-end equipment, aerospace components to meet the requirement of 10 15 years.
Description
Technical field
The fields such as lengthen the life the invention belongs to vacuum coating, surface treatment, moving component, be related to a kind of frictional interface original position shape
The method for realizing superslide into graphene and onion.
Background technology
China's manufacturing industry scale has leapt to the first in the world, but greatly without strong, not smart, key components and parts and core technology with
High-end equipment is due to a lack of stability and reliability, and so as to which external dependence degree is high, these, which become, restricts Hi-tech Industry Development
Bottleneck.Reduce mechanical moving element fretting wear be considered as effectively extending its working life and improved its reliability of operation,
Stablize one of sexual approach.For there is the contact interface of relative motion under actual working conditions, superslide will fundamentally solve to rub
Energy dissipation caused by abrasion and mechanical damage problem.Superslide film of the development with engineering application value is so as to extend movement portion
The working life of part simultaneously improves its reliability of operation, has important meaning to the realization of development and the energy-saving and emission-reduction of industrial technology
Justice.
In terms of solid superslide research, focus primarily upon using two-dimensional graphene as the non-commensurability structure superslide of representative and with carbon
Amorphous interface superslide based on film.
At present, the non-commensurability structure superslide using two-dimensional graphene as representative is concentrated mainly on micro/nano-scale, to realize macroscopic view
Structure superslide must then construct complicated micro-nano mechanical system, and spool or sphere are wrapped up to effectively reduce by forming graphene
Non- commensurability is presented in contact area under micro/nano-scale, so as to break through the bottlenecks of moisture sensitivity and scale effect.
Superslide material with engineering application value, it is necessary to realize the characteristics such as large scale, high-mechanic, that is, requiring can be big
Prepared by area, high rigidity performance.Hydrogeneous carbon-based solid lubricating film is most hopeful under actual working conditions（Atmospheric environment and
Engineering scale）Realize superslide characteristic.
Invention content
The purpose of the present invention is to provide a kind of methods that frictional interface is formed in situ graphene and onion realization superslide.
A kind of method that frictional interface is formed in situ graphene and onion realizes superslide, it is characterised in that the specific steps are：
1）Fullerene is carbon nano-structured to be obtained by methane or acetylene through plasma chemical vapor deposition technique；It is big to be passed through purity
In 99.99% CH4Or C2H2Gas, adjustment pulsed bias to 800-1200 V, conduction ratio 0.5-0.7, frequency 30-80 KHz,
Methane gas air pressure is maintained at 14-18 Pa, methane and hydrogen pressure ratio 1:1-1:3 is adjustable, prepares fullerene C film；Film
Hardness 18-32GPa, 1-5 microns of thickness, surface smoothness 0.1-0.5nm；
2）Class graphitic carbon nano structure is obtained by methane or acetylene through plasma chemical vapor deposition technique；Using accessory power supply
Heating is that base reservoir temperature is controlled at 150-350 DEG C, is passed through the CH that purity is more than 99.99%4Or C2H2Gas, adjustment pulsed bias is extremely
800-1000 V, conduction ratio 0.5-0.8, frequency 30-50 KHz, methane gas air pressure are maintained at 15-18 Pa, methane and hydrogen
Pressure ratio 1:0-1:1 is adjustable, prepares class graphite C film；Test result film hardness 7-14GPa, 1-5 microns of thickness, any surface finish
Spend 0.05-0.5nm.
Plasma activated chemical vapour deposition includes direct current, DC pulse, high power pulsed source, exchange or radio-frequency power supply.
Two kinds of carbon structure film pairings of the present invention, composition friction is secondary, and graphene and onion are formed in frictional interface.In air
Or it is adjusted between coefficient of internal friction 0.005-0.01 under condition of nitrogen gas.Fullerene carbon and class graphite C film can be used for metal,
Ceramics and the wear-resistant and reduction friction coefficient on polymerizable material surface.
Fullerene carbon and class graphitic carbon nano structural membrane are deposited on the materials such as metal, ceramics and polymer by the present invention
Surface, composition friction is secondary, and graphene and onion are formed in frictional interface.The graphene formed on frictional interface and onion can pass through
Sphere-contact or non-commensurability plane-plane contact effectively drop low friction pair contact area or reduce frictional interface active force, so as to significantly
Friction coefficient and wear rate are reduced, service life, sensitivity and reliability is improved to reach, solves existing high-end equipment, boat
The service lifes such as empty aerospace components, sensitivity and reliability cannot meet the requirement of 10-15.
Present invention incorporates the advantages of non-commensurability structure superslide and amorphous interface superslide, both ensure to realize large scale, height
The characteristics such as carrying form graphene package spool further through friction induction in situ or sphere are connect with effectively reducing under micro/nano-scale
Non- commensurability is presented in contacting surface product.
Description of the drawings
Fig. 1 is the Raman spectrogram of amorphous carbon, class graphite C film and fullerene C film.
Fig. 2 is high-resolution-ration transmission electric-lens figure of the class graphite C film with fullerene C film to formation onion after rubbing.
Fig. 3 is high-resolution-ration transmission electric-lens figure of the class graphite C film with fullerene C film to formation graphene after rubbing.
Fig. 4 is the secondary friction coefficient variation diagram that rubs under the conditions of different loads.
Fig. 5 is that class graphite C film leads to the signal of superslide with fullerene C film to forming graphene and onion after rubbing
Figure.
Specific embodiment
Embodiment 1 prepares deposition fullerene C film on silicon chip
（1）Conventional cleaning；
（2）When chamber house vacuum reaches 1 × 10-4When start plated film, argon gas control biases 800 V in 5 Pa, conduction ratio 0.8,
50 KHz of frequency is cleaned 30 minutes；
（3）Pulsed bias is set as -1000V, conduction ratio 0.4,70 Hz of frequency;, methane 17Pa；Deposition film is closed after 120 minutes
Machine cools down；
（4）Test, test result film hardness 30GPa, 1.5 microns of thickness, any surface finish are taken out after sample is cooled to room temperature
0.1nm is spent, film color is in black.
（5）As shown in Figure 1, fullerene C film typical case Raman spectrograms include a steamed bun peak（Peak position is in 1527cm-1）
With an acromion（About in 1200cm-1）.
Embodiment 2 prepares nitriding in situ and deposition class graphite C film on GCr15 balls
Specific implementation is as follows：
（1）Conventional cleaning：Vacuum chamber is put in oil removing, derusting, drying into；
（2）When chamber house vacuum reaches 1 × 10-4When start plated film, argon gas control biases 900 V in 5 Pa, conduction ratio 0.8,
50 KHz of frequency is cleaned 30 minutes；
（3）Pulsed bias is set as -800V, conduction ratio 0.6,80 Hz of frequency;, nitrogen 8Pa；Nitriding 30 minutes；
（4）Pulsed bias is set as -850V, conduction ratio 0.5, frequency 50Hz;, methane 15Pa；And 230 DEG C are heated to, deposition is thin
Film shuts down cooling after 120 minutes；
（5）Test, test result film hardness 27GPa, 1.3 microns of thickness, any surface finish are taken out after sample is cooled to room temperature
0.07nm is spent, film color is in black-and-blue.
As shown in Figure 1, class graphite C film typical case Raman spectrograms include a steamed bun peak（Peak position is in more than 1550cm-1）
With an acromion（About in 1380cm-1）.
Embodiment 3
Two kinds of film composition frictions are secondary, and onion is formed in frictional interface（Fig. 2）And graphene（Fig. 3）.Under the conditions of different loads
Friction coefficient is adjustable 0.005 ± 0.002（Fig. 4）.It reduces scraping mechanism and can be understood as the graphite formed on frictional interface
Alkene and onion can effectively be dropped low friction pair contact area by sphere-contact or non-commensurability plane-plane contact or reduce frictional interface
Active force, as shown in Figure 5.
Claims (2)
1. a kind of frictional interface is formed in situ the method that graphene and onion realize superslide, it is characterised in that by fullerene carbon and
Class graphitic carbon nano structural membrane is composed of friction pair, and graphene and onion are formed in frictional interface；
Fullerene is carbon nano-structured to be obtained by methane or acetylene through plasma chemical vapor deposition technique；Purity is passed through to be more than
99.99% CH4Or C2H2Gas, adjustment pulsed bias to 800-1200 V, conduction ratio 0.5-0.7, frequency 30-80 KHz, first
Alkane gas atmosphere is maintained at 14-18 Pa, methane and hydrogen pressure ratio 1:1-1:3 is adjustable, prepares fullerene C film；Film is hard
Spend 18-32GPa, 1-5 microns of thickness, surface smoothness 0.1-0.5nm；
Class graphitic carbon nano structure is obtained by methane or acetylene through plasma chemical vapor deposition technique；Using accessory power supply plus
Heat is that base reservoir temperature is controlled at 150-350 DEG C, is passed through the CH that purity is more than 99.99%4Or C2H2Gas, adjustment pulsed bias is extremely
800-1000 V, conduction ratio 0.5-0.8, frequency 30-50 KHz, methane gas air pressure are maintained at 15-18 Pa, methane and hydrogen
Pressure ratio 1:0-1:1 is adjustable, prepares class graphite C film；Test result film hardness 7-14GPa, 1-5 microns of thickness, any surface finish
Spend 0.05-0.5nm.
2. the method as described in claim 1, it is characterised in that the plasma activated chemical vapour deposition includes direct current, direct current arteries and veins
Punching, high power pulsed source, exchange or radio-frequency power supply.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109650380A (en) * | 2019-01-21 | 2019-04-19 | 中国科学院兰州化学物理研究所 | A kind of method that dry friction prepares carbon nano-onions under vacuum environment |
| CN109867275A (en) * | 2019-03-11 | 2019-06-11 | 西安石油大学 | A kind of method that vacuum sphere mill prepares carbon nano-onions |
| CN110387524A (en) * | 2019-07-25 | 2019-10-29 | 中国科学院兰州化学物理研究所 | A kind of solid-liquid superslide method for mixing silicon carbon film |
| CN110894593A (en) * | 2019-11-29 | 2020-03-20 | 岭南师范学院 | Steel collar containing graphite-like carbon coating and preparation method thereof |
| CN112375246A (en) * | 2020-11-27 | 2021-02-19 | 中国科学院兰州化学物理研究所 | Method for modifying polymer surface by carbon dioxide plasma discharge under atmospheric pressure |
| CN113880080A (en) * | 2021-11-15 | 2022-01-04 | 中国科学院兰州化学物理研究所 | Preparation method of ultra-smooth graphene molar structure coating |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030129119A1 (en) * | 2002-01-07 | 2003-07-10 | Hsin-Tien Chiu | Nanocarbon materials and process for producing the same |
| JP5649186B2 (en) * | 2009-03-11 | 2015-01-07 | 国立大学法人 熊本大学 | Onion-like carbon and method for producing the same |
| CN105695953A (en) * | 2016-01-19 | 2016-06-22 | 中国科学院化学研究所 | Manufacturing method and application of three-dimensional carbon negative electrode material |
| CN106191805A (en) * | 2016-06-06 | 2016-12-07 | 重庆大学 | A kind of preparation method of magnetic graphene laminated film |
-
2017
- 2017-12-18 CN CN201711360852.1A patent/CN108220908B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030129119A1 (en) * | 2002-01-07 | 2003-07-10 | Hsin-Tien Chiu | Nanocarbon materials and process for producing the same |
| JP5649186B2 (en) * | 2009-03-11 | 2015-01-07 | 国立大学法人 熊本大学 | Onion-like carbon and method for producing the same |
| CN105695953A (en) * | 2016-01-19 | 2016-06-22 | 中国科学院化学研究所 | Manufacturing method and application of three-dimensional carbon negative electrode material |
| CN106191805A (en) * | 2016-06-06 | 2016-12-07 | 重庆大学 | A kind of preparation method of magnetic graphene laminated film |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109650380A (en) * | 2019-01-21 | 2019-04-19 | 中国科学院兰州化学物理研究所 | A kind of method that dry friction prepares carbon nano-onions under vacuum environment |
| CN109650380B (en) * | 2019-01-21 | 2022-04-19 | 中国科学院兰州化学物理研究所 | Method for preparing carbon nano onion by dry friction in vacuum environment |
| CN109867275A (en) * | 2019-03-11 | 2019-06-11 | 西安石油大学 | A kind of method that vacuum sphere mill prepares carbon nano-onions |
| CN110387524A (en) * | 2019-07-25 | 2019-10-29 | 中国科学院兰州化学物理研究所 | A kind of solid-liquid superslide method for mixing silicon carbon film |
| CN110894593A (en) * | 2019-11-29 | 2020-03-20 | 岭南师范学院 | Steel collar containing graphite-like carbon coating and preparation method thereof |
| CN110894593B (en) * | 2019-11-29 | 2022-03-04 | 岭南师范学院 | Steel collar containing graphite-like carbon coating and preparation method thereof |
| CN112375246A (en) * | 2020-11-27 | 2021-02-19 | 中国科学院兰州化学物理研究所 | Method for modifying polymer surface by carbon dioxide plasma discharge under atmospheric pressure |
| CN112375246B (en) * | 2020-11-27 | 2021-07-13 | 中国科学院兰州化学物理研究所 | Method for modifying polymer surface by carbon dioxide plasma discharge under atmospheric pressure |
| CN113880080A (en) * | 2021-11-15 | 2022-01-04 | 中国科学院兰州化学物理研究所 | Preparation method of ultra-smooth graphene molar structure coating |
| CN113880080B (en) * | 2021-11-15 | 2022-12-02 | 中国科学院兰州化学物理研究所 | Preparation method of ultra-smooth graphene molar structure coating |
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