CN108220876A - A kind of mask plate - Google Patents
A kind of mask plate Download PDFInfo
- Publication number
- CN108220876A CN108220876A CN201711471181.6A CN201711471181A CN108220876A CN 108220876 A CN108220876 A CN 108220876A CN 201711471181 A CN201711471181 A CN 201711471181A CN 108220876 A CN108220876 A CN 108220876A
- Authority
- CN
- China
- Prior art keywords
- frame
- mask
- open slot
- connector
- mask plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture Or Reproduction Of Printing Formes (AREA)
Abstract
The present invention provides a kind of mask plate, which includes frame, connector and mask cell；Wherein, frame is equipped with open slot, and connector is set in open slot, and mask cell connect with connector and is stacked with frame, is used to form mask pattern.Pass through this mask plate, it is not directly connected to the invention enables mask cell with frame, so that when mask cell needs to dismantle and reinstall, by the way that connector out of open slot is split out and connector is relocated onto in open slot again, and then when mask cell is dismantled and is reinstalled, do not need to polish to frame, avoid frame because polishing causes thickness thinning, and the problem of reducing masking effect, improve the quality of product.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of mask plate.
Background technology
OLED as a new generation solid-state self-luminous display technology, compared to liquid crystal display have it is ultra-thin, responsiveness is high, right
The advantages such as higher than degree, low in energy consumption, in recent years industrialization speed advance by leaps and bounds.The technology of preparing of OLED mainstreams and method are to steam at present
Plating method heats organic small molecule material in vacuum cavity, make its distillation or fusion and gasification into material vapor, through metal
The trepanning deposition of mask plate is on the glass substrate.
In the prior art, mask cell is generally directly welded on frame by metal mask plate, is used when with mask plate
The increase of number, mask cell are needed replacing or are re-worked, at this time, it is necessary to mask cell is disassembled from frame,
Before mask cell is welded on frame again, need to polish to frame, and after being polished for a plurality of times, frame can be because thick
Spend it is thinning, and cause it is sagging in the middle part of frame so that after mask cell is welded on frame be used for mask when, mask cell with
Treat that there are a fixed gaps between mask substrate, so as to reduce masking effect, and then reduce the quality of OLED light-emitting components.
Invention content
The invention mainly solves the technical problem of providing a kind of mask plates, it is intended to solve mask cell and be directly welded at side
On frame so that when mask cell is dismantled and is reinstalled, the problem of causing seal ring thickness thinning and reduce masking effect.
In order to solve the above technical problems, one aspect of the present invention is：A kind of mask plate, the mask are provided
Plate includes frame, connector and mask cell；Wherein, the frame is equipped with open slot, and the connector is set to the opening
In slot, the mask cell connect with the connector and is stacked with the frame, is used to form mask pattern.
The beneficial effects of the invention are as follows：The situation of the prior art is different from, the present invention is set by the frame in mask plate
Open slot, mask cell is connect with the connector being arranged in open slot, so that mask cell is not directly connected to frame, from
And mask cell is caused to need to dismantle and when reinstalling, by connector is split out out of open slot and again by connector again
It is set in open slot, and then when mask cell is dismantled and is reinstalled, does not need to polish to frame, avoid
Frame improves the quality of product because polishing causes thickness thinning, and the problem of reduce masking effect.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, for
For those of ordinary skill in the art, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing, wherein：
Fig. 1 is the structure diagram of mask plate first embodiment provided by the invention；
Fig. 2 is the structure diagram of frame in Fig. 1；
Fig. 3 is the structure diagram of another embodiment of frame in Fig. 1；
Fig. 4 is the structure diagram that mask plate works in Fig. 1；
Fig. 5 is the structure diagram that mask plate works in Fig. 3；
Fig. 6 is the structure diagram of mask plate second embodiment provided by the invention；
Fig. 7 is the structure diagram of frame in Fig. 6；
Fig. 8 is the structure diagram that mask plate works in Fig. 6.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only the part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment shall fall within the protection scope of the present invention.
Refering to Fig. 1, Fig. 1 is the structure diagram of 10 first embodiment of mask plate provided by the invention, and the present embodiment is covered
Diaphragm plate 10 includes frame 11, connector 12 and mask cell 13.
It sets to form a mask space 101 referring to Fig.2, frame 11 encloses, and equipped with open slot 111.
Optionally, open slot 111 is on the direction of the opening from open slot 111 to the bottom of open slot 111, at least partly
Area of section gradually increase namely the direction in such as Fig. 2 from top to bottom on, at least part area of section of open slot 111 by
It is cumulative big.
Optionally, the section of open slot 111 in the aforementioned direction is trapezoidal, can also be in other in other embodiments
Shape, for example, polygon or part it is arc-shaped.
Optionally, in other embodiments open slot 111 in the aforementioned direction or area of section be gradually reduced or
It remains unchanged.
Refering to Fig. 3, in other embodiments, open slot 111 is set to opposite both sides of frame 11 namely as shown in Figure 3
The both sides up and down of frame 11 be equipped with open slot 111.
Fig. 1 and Fig. 2 are further regarded to, frame 11 is additionally provided with support portion 112, and the support portion 112 is in the present embodiment
Mask plate 10 into line mask work when, support mask plate 10.
It should be understood that in the actual use process, need through other equipment, for example, manipulator to mask plate 10 into
Row is carried, and the support portion 112 in the present embodiment can be also used in the handling process, by the support portion 112 to mask plate 10
It is carried, is in direct contact without haulage equipment and frame 11, avoided haulage equipment and frame 11 is caused to damage, improved
The service life of frame 11.
Fig. 3 is further regarded to, in other embodiments, support portion 112 is set to the opposite both sides of frame 11 namely as schemed
The both sides up and down of frame 11 shown in 3 are equipped with support portion 112.
Fig. 1 is further regarded to, connector 12 is set in open slot 111 and is correspondingly arranged with open slot 111, in practical peace
During dress, connector 12 can be embedded in open slot 111, and after insertion, led in side of the frame 11 far from open slot 111
Screw is crossed to connect connector 12 with frame 11.
Wherein, after connector 12 is set to open slot 111, connector 12 is close to the side of the opening of open slot 11 and side
Frame 11 is concordant.
Optionally, connector 12 is on the direction of the opening from open slot 111 to the bottom of open slot 111, at least partly
Section gradually increases, to increase the bonding strength of connector 12.
Optionally, connector 12 is metal connecting piece.
Further, when the opposite both sides of frame 11 are equipped with open slot 111, connector 12 may be disposed at frame 11 and appoint
It anticipates in the open slot 111 of side.
Mask cell 13 connect with connector 12 and is stacked with frame 11, is used to form mask pattern.
Wherein, mask cell 13 is correspondingly arranged with mask space 101.
Optionally, mask cell 13 can be connect, and upon connection with connector 12 by welding, due to connector
12 is concordant with frame 11 close to the side of the opening of open slot 11, and therefore, mask cell 13 can be carried on frame 11, avoid covering
Film unit 13, in vacant state, causes mask cell 13 risk deformed occur after being connect with connector 12.
Refering to Fig. 4, the mask plate 10 in the present embodiment is carried on base station 102 when working into line mask, by support portion 112
On, and will treat that mask substrate 103 is set on mask cell 13, you can by mask cell 13 on mask substrate 103 is treated shape
It,, directly will connection when needing to re-work or replacing and dismantle in mask cell 13 as access times increase into mask pattern
Part 12 is split out out of open slot 111 may be such that mask cell 13 is detached with frame 11, when reinstalling, then by connector 12
It is set in open slot 111, not to be directly connected to by mask cell with frame, so that mask cell needs
It when dismantling and reinstalling, does not need to polish to frame, avoids frame because polishing causes thickness thinning, and reduce mask
The problem of effect, improves the quality of product.
Refering to Fig. 5, in other embodiments, when the both sides of frame 11 are equipped with open slot 111, connector 12 is set
In in the open slot 111 of the wherein side of frame 11, after mask cell 13 is connect with connector 12, connect by the way that frame 11 is separate
The support portion 112 of 12 side of fitting is carried on base station 102, will treat that mask substrate 103 is set on mask cell 13, you can logical
It crosses mask cell 13 and forms mask pattern on mask substrate 103 is treated, in mask cell 13 as access times increase, need weight
When new processing or replacement, directly connector 12 out of 11 side of frame open slot 111 is split out and may be such that mask cell 13
It detaches with frame 11, is set in the open slot 111 of 11 side of frame when reinstalling, then by connector 12；Into one
Step, it, can will be by side if the open slot 111 of 11 side of frame is damaged when with the increase for dismantling and reinstalling number
Frame 11 is overturn, and connector 12 is set in the open slot 111 of 11 opposite side of frame, then mask cell 13 and connector 12 are connected
It connects, and the support portion 112 for passing through opposite side is carried on base station 102, equally can be set to mask cell 13 treating mask substrate 103
Mask work is completed after upper so that the opposite both sides of frame 11 are used equally for setting connector 12 into line mask, to improve side
The utilization rate of frame 11.
Refering to Fig. 6, Fig. 6 is the structure diagram of 20 second embodiment of mask plate provided by the invention, and the present embodiment is covered
Diaphragm plate 20 includes frame 21, connector 22 and mask cell 23.
Refering to Fig. 7, frame 21, which encloses, to be set to form a mask space 201, and equipped with open slot 211.
Wherein, open slot 211 through the opposite both sides of frame 21 namely open slot 211 it is as shown in Figure 7 run through frame 21
Both sides up and down.
Further, frame 21 is additionally provided with support portion 212, and the support portion 212 is for mask plate 20 in the present embodiment
When working into line mask, mask plate 20 is supported.
It should be understood that in the actual use process, need through other equipment, for example, manipulator to mask plate 20 into
Row is carried, and the support portion 212 in the present embodiment can be also used in the handling process, by the support portion 212 to mask plate 20
It is carried, is in direct contact without haulage equipment and frame 21, avoided haulage equipment and frame 21 is caused to damage, improved
The service life of frame 21.
Wherein, support portion 212 is set to the opposite both sides of frame 21 namely the both sides up and down of frame 21 as shown in Figure 7
It is equipped with support portion 212.
Fig. 6 is further regarded to, connector 22 is set in open slot 211, can be by connector in practical installation process
In 22 insertion open slots 211.
Wherein, after connector 22 is set to open slot 211, connector 22 is flat in the opposite both sides of frame 21 and frame 21
It is together namely concordant with frame 21 in the both sides up and down of frame 21 as shown in Figure 6.
Optionally, connector 22 is metal connecting piece.
Mask cell 23 connect with connector 22 and is stacked with frame 21, is used to form mask pattern.
Wherein, mask cell 23 is correspondingly arranged with mask space 201.
Optionally, mask cell 23 can be connect, and upon connection with connector 22 by welding, due to connector
22 is concordant with frame 21 in the opposite both sides of frame 21, and therefore, mask cell 23 can be carried on frame 21, avoid mask cell
23 after being connect with connector 22 in vacant state, mask cell 23 is caused the risk deformed occur.
Refering to Fig. 8, mask plate 20 in the present embodiment into line mask work when, can be by mask cell 23 in frame 21
Arbitrary side is connect, and support portion 212 of the frame 21 far from 23 side of mask cell is carried on base station 202 with connector 22
On, then will treat that mask substrate 203 is set on mask cell 23, you can by mask cell 23 on mask substrate 203 is treated shape
Into mask pattern, in mask cell 23 as access times increase, when needing to re-work or replace, directly by connector 22 from
It is split out in open slot 211 and may be such that mask cell 23 is detached with frame 21, be set to when reinstalling, then by connector 22
In open slot 211, not to be directly connected to by mask cell with frame, so that mask cell needs to dismantle simultaneously
It when reinstalling, does not need to polish to frame, avoids frame because polishing causes thickness thinning, and reduce masking effect
Problem improves the quality of product.
The prior art is different from, the present invention sets open slot by the frame in mask plate, and mask cell is with being arranged on out
Connector connection in mouth slot, so that mask cell is not directly connected to frame, so that mask cell needs to dismantle simultaneously
When reinstalling, by the way that connector out of open slot is split out and connector is relocated onto in open slot again, and then
It when mask cell is dismantled and is reinstalled, does not need to polish to frame, avoids frame because polishing causes thickness thinning,
And the problem of reducing masking effect, improve the quality of product.
The foregoing is merely the embodiment of the present invention, are not intended to limit the scope of the invention, every to utilize this hair
The equivalent structure or equivalent flow shift that bright specification and accompanying drawing content are made directly or indirectly is used in other relevant skills
Art field, is included within the scope of the present invention.
Claims (10)
1. a kind of mask plate, which is characterized in that the mask plate includes frame, connector and mask cell；
Wherein, the frame is equipped with open slot, and the connector is set in the open slot, the mask cell and the company
Fitting is connected and is stacked with the frame, is used to form mask pattern.
2. mask plate according to claim 1, which is characterized in that the connector is close to the one of the opening of the open slot
Side is concordant with the frame.
3. mask plate according to claim 1, which is characterized in that the open slot is set to opposite two of the frame
Side.
4. mask plate according to claim 1, which is characterized in that the open slot is in the opening from the open slot to institute
On the direction for stating the bottom of open slot, at least part area of section gradually increases.
5. mask plate according to claim 4, which is characterized in that the section of the open slot in said direction is in ladder
Shape.
6. mask plate according to claim 1, which is characterized in that the frame is additionally provided with support portion, and the support portion is used
In supporting the mask plate in the mask plate mask.
7. mask plate according to claim 6, which is characterized in that the support portion is set to opposite two of the frame
Side.
8. mask plate according to claim 1, which is characterized in that the open slot runs through the opposite both sides of the frame,
So that the mask cell can be connect in the arbitrary side in the opposite both sides of the frame with the connector.
9. mask plate according to claim 8, which is characterized in that the connector is in the opposite both sides of the frame and institute
It is concordant to state frame.
10. mask plate according to claim 1, which is characterized in that the frame, which encloses, to be set to form a mask space, described to cover
Film unit is correspondingly arranged with the mask space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711471181.6A CN108220876A (en) | 2017-12-28 | 2017-12-28 | A kind of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711471181.6A CN108220876A (en) | 2017-12-28 | 2017-12-28 | A kind of mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108220876A true CN108220876A (en) | 2018-06-29 |
Family
ID=62645925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711471181.6A Pending CN108220876A (en) | 2017-12-28 | 2017-12-28 | A kind of mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108220876A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006188752A (en) * | 2005-01-05 | 2006-07-20 | Samsung Sdi Co Ltd | Method for fixing mask frame and mask |
| CN101280411A (en) * | 2007-04-05 | 2008-10-08 | 三星Sdi株式会社 | Mask frame assembly for thin film deposition of flat panel display and depositing equipment of the same |
| CN105088135A (en) * | 2015-06-03 | 2015-11-25 | 深圳市华星光电技术有限公司 | Mask plate for vacuum thermal evaporation of organic light emitting diode (OLED) materials |
| CN205803576U (en) * | 2016-06-28 | 2016-12-14 | 鄂尔多斯市源盛光电有限责任公司 | Mask plate |
-
2017
- 2017-12-28 CN CN201711471181.6A patent/CN108220876A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006188752A (en) * | 2005-01-05 | 2006-07-20 | Samsung Sdi Co Ltd | Method for fixing mask frame and mask |
| CN101280411A (en) * | 2007-04-05 | 2008-10-08 | 三星Sdi株式会社 | Mask frame assembly for thin film deposition of flat panel display and depositing equipment of the same |
| CN105088135A (en) * | 2015-06-03 | 2015-11-25 | 深圳市华星光电技术有限公司 | Mask plate for vacuum thermal evaporation of organic light emitting diode (OLED) materials |
| CN205803576U (en) * | 2016-06-28 | 2016-12-14 | 鄂尔多斯市源盛光电有限责任公司 | Mask plate |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180629 |