CN108200675B - Insulating substrate with spiral heating electrode - Google Patents

Insulating substrate with spiral heating electrode Download PDF

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Publication number
CN108200675B
CN108200675B CN201711425576.2A CN201711425576A CN108200675B CN 108200675 B CN108200675 B CN 108200675B CN 201711425576 A CN201711425576 A CN 201711425576A CN 108200675 B CN108200675 B CN 108200675B
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parts
insulating substrate
groove
coil
cavity
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CN108200675A (en
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胡静
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Yancheng Lai'er Electric Heating Technology Co.,Ltd.
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Yancheng Lai'er Electric Heating Technology Co ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/06Control, e.g. of temperature, of power
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/02Induction heating
    • H05B6/36Coil arrangements

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Induction Heating (AREA)

Abstract

The invention provides an insulating substrate with a spiral heating electrode, which comprises two parts which can be independently separated and have the same structure, wherein the main materials of the two parts in the insulating substrate are insulating materials, each insulating material comprises a half-spiral metal ring, a spiral metal coil is formed between the half-spiral metal rings when the two parts are superposed, a cavity of the insulating substrate is formed between the two grooves, the spiral metal coil is used as a heating coil and is simultaneously used as an inductor of a circuit, the inductor is used for detecting a changing magnetic field and is connected with a controller, so that the control of devices in the cavity is realized through the changing magnetic field, the heating problem of the existing insulating substrate is solved, the substrate is heated through the coil, the heating coil is used as the inductor, the induction function and the heating function are realized simultaneously, and the two functions are combined to reduce the number of the parts, the miniaturization is realized.

Description

Insulating substrate with spiral heating electrode
Technical Field
The invention belongs to the technical field of device manufacturing, and particularly relates to an insulating substrate with a spiral heating electrode.
Background
The traditional gas sensor packaging technology mainly comprises TO packaging, DIP ceramic tube seat packaging and the like, but the packaging structure has the main problems that the substrates are made of metal and ceramic materials with high thermal conductivity, the heat for maintaining the chip TO work is dissipated through the substrates and various contact parts due TO the substrate materials with high thermal conductivity, the power consumption of the sensor is increased, the stable time required for heating TO the working temperature is long, and a plurality of problems are brought TO the practical application of the gas sensor. Therefore, the heating technique has an abnormally significant effect on the performance index of the hydrogen sensor.
The conventional heating technology is mainly realized by selecting a heat insulating material or a heating part, for example, a sensor chip is suspended above a base through a plurality of leads, so that the chip is isolated from the packaging base through air, but the packaging structure needs a large number of leads to ensure structural reliability, so that the volume of the sensor is increased, and on the other hand, a large amount of heat is dissipated through the leads. In practice, the heating effect of such an insulating structure is not significant.
In the field of gas sensing, a gas sensor needs to be heated in many cases, heating electrodes are usually arranged, but the electrodes are additionally arranged, and occupy a certain space in terms of volume, so that miniaturization of a device is hindered, and therefore how to reasonably distribute the heating electrodes is a constant matter for a person skilled in the art.
Disclosure of Invention
In order to solve the heating problem of the prior insulating substrate, the substrate is heated by a coil, a heating coil is used as an inductor, the induction function and the heating function are simultaneously realized, the two functions are combined, the number of parts is reduced, and the miniaturization is realized, the invention provides the insulating substrate with the spiral heating electrode, which comprises two parts which can be independently separated and have the same structure, the main body material of the two parts in the insulating substrate is insulating material, wherein each insulating material comprises a half-spiral metal ring, the main body of the insulating material comprises a groove, a spiral metal coil is formed between the half-spiral metal rings when the two parts are overlapped, a cavity of the insulating substrate is formed between the two grooves, the two parts are integrally overlapped by adopting a bonding method, leads extending towards two sides are arranged in the insulating material at the bottom of the groove, and the leads form contact contacts on the surface of the groove, the spiral metal coil is made of metal materials which generate heat when electrified, serves as a heating coil and an inductor of a circuit, is used for detecting a changing magnetic field and is connected with the controller, and therefore control over the devices in the cavity is achieved through the changing magnetic field.
Furthermore, through holes are formed in two sides of the insulating substrate after the two parts are stacked, and the through holes enable the cavities to be communicated with the outside.
Further, the groove is a rectangular groove, and a cubic cavity is formed when the two parts are overlapped.
Further, a gas sensor is arranged on the groove and connected with a lead in the bottom of the groove.
Further, the recess includes a plurality of contact contacts therein.
Further, a gas sensor is disposed on each contact point, electrodes of the gas sensor are connected to each contact point respectively, and connection to the gas sensor outside the insulating substrate is achieved through a lead.
Furthermore, one of the contact contacts is connected with a gas circulation device, and power is supplied to the gas circulation device through an external lead wire, so that gas in the cavity circulates.
Further, the method for forming the two parts of the insulating substrate comprises the steps of embedding the complete annular coil in a liquid insulating material, cutting the liquid insulating material along the central line of the annular coil after the liquid insulating material is solidified, forming the two parts after the cutting is finished, and respectively polishing the periphery of each part and etching to form a groove.
The invention has the beneficial effects that: the invention provides an insulating substrate with a spiral heating electrode, which comprises two parts which can be independently separated and have the same structure, wherein the main materials of the two parts in the insulating substrate are insulating materials, each insulating material comprises a half-spiral metal ring, a spiral metal coil is formed between the half-spiral metal rings when the two parts are superposed, a cavity of the insulating substrate is formed between the two grooves, the spiral metal coil is used as a heating coil and is simultaneously used as an inductor of a circuit, the inductor is used for detecting a changing magnetic field and is connected with a controller, so that the control of devices in the cavity is realized through the changing magnetic field, the heating problem of the existing insulating substrate is solved, the substrate is heated through the coil, the heating coil is used as the inductor, the induction function and the heating function are realized simultaneously, and the two functions are combined to reduce the number of the parts, the miniaturization is realized.
Drawings
FIG. 1 is a schematic transverse cross-sectional view of an insulating substrate having a spiral heater electrode according to the present invention;
FIG. 2 is a schematic longitudinal cross-sectional view of an insulating substrate having a spiral heater electrode according to the present invention.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
The invention will be described in further detail with reference to the following drawings and specific embodiments.
Referring to fig. 1, fig. 1 is a schematic transverse cross-sectional view of an insulating substrate with a spiral heating electrode according to the present invention, fig. 2 is a schematic longitudinal cross-sectional view of an insulating substrate with a spiral heating electrode according to the present invention, the present invention provides an insulating substrate with a spiral heating electrode, which comprises two parts which can be separated independently and have the same structure, the main material of the two parts in the insulating substrate is an insulating material 1, wherein each insulating material 1 comprises a half-spiral metal ring, the main body of the insulating material 1 comprises a groove 3, a spiral metal coil 2 is formed between the half-spiral metal rings when the two parts are stacked, a cavity of the insulating substrate is formed between the two grooves 3, the two parts are integrated by a bonding method when the two parts are stacked, leads extending to two sides are arranged in the insulating material 1 at the bottom of the groove 3, and the leads form contact points on the surface of the, the spiral metal coil 2 is made of metal materials which are electrified to generate heat, is used as a heating coil and is used as an inductor of a circuit, the inductor is used for detecting a changing magnetic field and is connected with a controller, and therefore control over the devices in the cavity is achieved through the changing magnetic field.
Furthermore, through holes are formed in two sides of the insulating substrate after the two parts are stacked, and the through holes enable the cavities to be communicated with the outside.
Further, the groove 3 is a rectangular groove 3, and two parts form a cubic cavity when being overlapped.
Further, a gas sensor is arranged on the groove 3, and the gas sensor is connected with a lead in the bottom of the groove 3.
Further, a plurality of contact points are included in the recess 3.
Further, a gas sensor is disposed on each contact point, electrodes of the gas sensor are connected to each contact point respectively, and connection to the gas sensor outside the insulating substrate is achieved through a lead.
Furthermore, one of the contact contacts is connected with a gas circulation device, and power is supplied to the gas circulation device through an external lead wire, so that gas in the cavity circulates.
Further, the method for forming the two parts of the insulating substrate comprises the steps of embedding a complete annular coil in a liquid insulating material 1, cutting the liquid insulating material 1 along the central line of the annular coil after curing, forming the two parts after cutting, and respectively polishing the periphery of each part and etching to form a groove 3.
The invention provides an insulating substrate with a spiral heating electrode, which comprises two parts which can be independently separated and have the same structure, wherein the main materials of the two parts in the insulating substrate are insulating materials, each insulating material comprises a half-spiral metal ring, a spiral metal coil is formed between the half-spiral metal rings when the two parts are superposed, a cavity of the insulating substrate is formed between the two grooves, the spiral metal coil is used as a heating coil and is simultaneously used as an inductor of a circuit, the inductor is used for detecting a changing magnetic field and is connected with a controller, so that the control of devices in the cavity is realized through the changing magnetic field, the heating problem of the existing insulating substrate is solved, the substrate is heated through the coil, the heating coil is used as the inductor, the induction function and the heating function are realized simultaneously, and the two functions are combined to reduce the number of the parts, the miniaturization is realized.
The relationships depicted in the drawings are for purposes of illustration only and are not to be construed as limitations of the present patent, and it should be understood that the above-described embodiments of the present invention are merely illustrative for clearly illustrating the present invention and are not limitations of the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims (1)

1. An insulating substrate with spiral heating electrode comprises two parts which can be separated independently and have the same structure, the method is characterized in that the main materials of the two parts in the insulating substrate are insulating materials, wherein each insulating material comprises a semi-spiral metal ring, the insulating material main body comprises a groove, a spiral metal coil is formed between the semi-spiral metal rings when the two parts are overlapped, a cavity of the insulating substrate is formed between the two grooves, the two parts are overlapped to form a whole by adopting a bonding method, leads extending towards two sides are arranged in the insulating material at the bottom of the groove, and the lead forms a contact point on the surface of the groove, the spiral metal coil is made of metal material which generates heat by electrifying, and is used as a heating coil and an inductor of a circuit at the same time, the inductor is used for detecting a changing magnetic field, and is connected with a controller so as to realize the control of the device in the cavity through the variable magnetic field;
through holes are formed in the two sides of the insulating substrate after the two parts are stacked, and the through holes are used for communicating the cavity with the outside;
the groove is a rectangular groove, and a cubic cavity is formed when the two parts are overlapped;
a gas sensor is arranged on the groove and is connected with a lead in the bottom of the groove;
the groove comprises a plurality of contact contacts;
arranging a gas sensor on each contact, wherein the electrode of the gas sensor is respectively connected to each contact, and the gas sensor is connected to the outside of the insulating substrate through a lead;
one of the contact contacts is connected with the gas circulation device, and power is supplied to the gas circulation device through an external lead wire, so that gas in the cavity is circulated;
the method for forming the two parts of the insulating substrate comprises the steps of embedding a complete annular coil in a liquid insulating material, cutting the cured liquid insulating material along the central line of the annular coil, forming the two parts after cutting, and respectively polishing the periphery of each part and etching to form a groove.
CN201711425576.2A 2017-12-25 2017-12-25 Insulating substrate with spiral heating electrode Active CN108200675B (en)

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Application Number Priority Date Filing Date Title
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CN108200675B true CN108200675B (en) 2021-01-15

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006056686B4 (en) * 2006-11-30 2008-12-04 Siemens Ag Electrochemical gas sensor and associated use
CN101599425A (en) * 2009-04-17 2009-12-09 北京交通大学 A kind of preparation method of MEMS (micro electro mechanical system) solenoid inductor
CN105021659A (en) * 2015-07-08 2015-11-04 中国科学院上海硅酸盐研究所 Passive wireless gas sensor based on low temperature co-fired ceramic substrate and manufacturing method thereof
CN105307524A (en) * 2014-05-21 2016-02-03 菲利普莫里斯生产公司 Inductive heating device, aerosol-delivery system comprising an inductive heating device, and method of operating same
CN106546644A (en) * 2015-09-17 2017-03-29 英飞凌科技股份有限公司 Gas sensitization Hall device
CN106596641A (en) * 2016-11-29 2017-04-26 梁结平 Gas sensor and encapsulating method thereof
CN107107766A (en) * 2014-12-30 2017-08-29 高通股份有限公司 System, method and apparatus for detecting ferromagnetism foreign body in space is predefined

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006056686B4 (en) * 2006-11-30 2008-12-04 Siemens Ag Electrochemical gas sensor and associated use
CN101599425A (en) * 2009-04-17 2009-12-09 北京交通大学 A kind of preparation method of MEMS (micro electro mechanical system) solenoid inductor
CN105307524A (en) * 2014-05-21 2016-02-03 菲利普莫里斯生产公司 Inductive heating device, aerosol-delivery system comprising an inductive heating device, and method of operating same
CN107107766A (en) * 2014-12-30 2017-08-29 高通股份有限公司 System, method and apparatus for detecting ferromagnetism foreign body in space is predefined
CN105021659A (en) * 2015-07-08 2015-11-04 中国科学院上海硅酸盐研究所 Passive wireless gas sensor based on low temperature co-fired ceramic substrate and manufacturing method thereof
CN106546644A (en) * 2015-09-17 2017-03-29 英飞凌科技股份有限公司 Gas sensitization Hall device
CN106596641A (en) * 2016-11-29 2017-04-26 梁结平 Gas sensor and encapsulating method thereof

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