CN108195468A - Micro spectrometer based on photonic crystal light-dividing principle - Google Patents

Micro spectrometer based on photonic crystal light-dividing principle Download PDF

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Publication number
CN108195468A
CN108195468A CN201711408653.3A CN201711408653A CN108195468A CN 108195468 A CN108195468 A CN 108195468A CN 201711408653 A CN201711408653 A CN 201711408653A CN 108195468 A CN108195468 A CN 108195468A
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China
Prior art keywords
module
photosensitive element
network communication
photonic crystal
spectrometer according
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CN201711408653.3A
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CN108195468B (en
Inventor
余劲松
郑臻荣
黄文标
盛晓鸣
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Hangzhou Light Technology Co., Ltd.
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Suzhou Bose Intelligent Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/10Arrangements of light sources specially adapted for spectrometry or colorimetry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a kind of micro spectrometer based on photonic crystal light-dividing principle, including:Receive camera lens, photonic crystal beam splitter module, photosensitive element, AD acquisitions, fpga core processor, network communication module, power module and light source module.Fpga core processor structure is used on hardware; high-efficiency operation network communication, center control, pulse sequence and algorithm calculating etc.; the each correlation unit circuit of processor high speed parallel control; timing sends specific time sequence to photosensitive element; Synchronization Control light source module and AD acquisition signal processings, it is ensured that obtain accuracy, stability, the real-time of spectrometer scan data.Simultaneous processor is also connected with network communication module to carry out controlling communication to the network data exchange of external equipment.

Description

Micro spectrometer based on photonic crystal light-dividing principle
Technical field
The present invention relates to spectral measurement methods field, more particularly to a kind of miniature light based on photonic crystal light-dividing principle Spectrometer.
Background technology
Micro spectrometer mainly has at present:Fiber spectrometer mode based on spectro-grating structure is filtered based on electric tunable The micro spectrometer mode of mating plate etc. is several, the former representative products:Marine optics USB2000 fiber spectrometers, the latter represent production Product:Meet scio hold spectrometer.The practical application of fiber spectrometer is very extensive, mainly there is high-precision, high-resolution, width The advantages that spectrum, while there is also the factors such as volume slightly larger, price is high, system complex, it is necessary to mating light source, host computer computer Or smart screen could use, complete set detecting system can be related to excess internal Light Electrical structure member, thus stability, Speed real-time, portability, cost performance etc. are not ideal enough, in terms of being typically employed in the desk-top spectral detection of industry;Meet Scio, which holds spectrometer, has many advantages, such as that small, low in energy consumption, cost performance is good, but its spectral region is small (700~1000nm), Also it is not ideal enough in terms of stability and repeatability, it is typically employed in the fields spectrum inspection such as handheld environment detection, food identification In terms of survey.
Invention content
Based on this, it is necessary to for above-mentioned technical problem, provide a kind of spectrometer, realize the spectral detection of fast and stable.
A kind of spectrometer, including:
Light source driver module, the light source driver module pass through sample to be tested for exporting horizontal survey light beam;
Camera lens is received, it is described to receive camera lens to receive the measuring beam across the sample to be tested, the reception camera lens Including the first planoconvex spotlight and the second planoconvex spotlight, the measuring beam across the sample to be tested is first in first planoconvex spotlight It focuses on, parallel light output is then become by the second planoconvex spotlight again;
Photonic crystal beam splitter module, the photonic crystal beam splitter module are used for second planoconvex spotlight is defeated The measuring beam gone out is dispersed into the hot spot arranged according to different wave length position;And
FPGA master control collecting units, the FPGA master controls collecting unit include:
Photosensitive element, the photosensitive element are used to the hot spot being converted into simulation potential array;
AD acquisition modules, the AD acquisition modules are used for the simulation potential is array switching for digital quantity array data;
Network communication module, the network communication module is used for and external device communication;
Fpga core processor, the fpga core processor are electrically connected the light source driver module, photosensitive element, AD and adopt Collect module and network communication module;And
Power module, the power module are used for the photosensitive element, the AD acquisition modules, the network communication mould Block and fpga core processor power supply.
In other one embodiment, the power module is electric using the isolation voltage stabilizing of golden rising Yang IB0503XT-1WR2 Source.
In other one embodiment, the spectral working range of the photonic crystal beam splitter module is:350~ 1024nm。
In other one embodiment, a diameter of 20cm of first planoconvex spotlight, second planoconvex spotlight A diameter of 6mm.
In other one embodiment, the photosensitive element uses the TSL1401 type line array CCDs of ASM companies of the U.S..
In other one embodiment, the AD acquisition modules use 12 AD conversion chips.
In other one embodiment, the fpga core processor uses the AGLN250FPGA cores of U.S. MICROSE Heart processor.
In other one embodiment, the network communication module uses RJ-45 standard network interfaces and external equipment Communication.
In other one embodiment, the light source driver module includes driving circuit and is driven by the driving circuit Halogen tungsten lamp.
In other one embodiment, the halogen tungsten lamp is using Germany's HLL55919 halogen tungsten lamps.
Above-mentioned spectrometer, light path system of the present invention are used based on photonic crystal light-dividing principle structure design, have it is low in energy consumption, The advantages that stability is high, speed is fast, cost-effective, spectral region is wide is conducive to miniaturization, integrated embedded design, wide Spectral working range is:350~1024nm.
Description of the drawings
Fig. 1 is a kind of structure schematic diagram of spectrometer provided by the embodiments of the present application.
Fig. 2 is that the operation principle of the photonic crystal beam splitter module in a kind of spectrometer provided by the embodiments of the present application is shown It is intended to.
Fig. 3 is a kind of operation principle flow chart of spectrometer provided by the embodiments of the present application.
Fig. 4 is a kind of typical case schematic diagram of spectrometer provided by the embodiments of the present application.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.
Refering to a kind of Fig. 1 structure schematic diagrams of spectrometer provided by the embodiments of the present application.
A kind of spectrometer, including:Light source driver module 100 receives camera lens 200,300 and of photonic crystal beam splitter module FPGA master controls collecting unit 400.
The light source driver module passes through sample to be tested for exporting horizontal survey light beam.More preferably, the horizontal survey The spectrum of light beam uses wide spectrum.
In other one embodiment, the light source driver module includes driving circuit and is driven by the driving circuit Halogen tungsten lamp.In other one embodiment, the halogen tungsten lamp is using Germany's HLL55919 halogen tungsten lamps.Driving circuit provides steady Determine constant-current source, light halogen tungsten lamp.Halogen tungsten lamp is 1.9*1.9mm square front lamps using German import halogen tungsten lamp rice bubble, internal structure Silk design has the features such as luminous efficiency is high, and hot spot is uniform.
For the reception camera lens to receive the measuring beam across the sample to be tested, it is flat that the reception camera lens includes first Convex lens and the second planoconvex spotlight, the measuring beam across the sample to be tested are first focused in first planoconvex spotlight, then Parallel light output is become by the second planoconvex spotlight again.
That is, receiving camera lens for receiving incident measuring beam, there is two panels planoconvex spotlight in inside, and specific diameter directly divides It Wei not 20mm, 6mm.(that is, a diameter of 20cm of first planoconvex spotlight, second planoconvex spotlight it is a diameter of 6mm.) measuring beam after sample first assembled by 20 lens of camera lens Φ, it is then small by being in the Φ 6 of lens focus Collimated irradiates the photosurface of photonic crystal beam splitter into parallel light output, output light.In present embodiment, planoconvex spotlight Using the anti-reflection film lens group of Daheng's photoelectricity.
The photonic crystal beam splitter module be used for by the measuring beam that second planoconvex spotlight exports be dispersed by According to the hot spot of different wave length position arrangement.
Fig. 2 is that the operation principle of the photonic crystal beam splitter module in a kind of spectrometer provided by the embodiments of the present application is shown It is intended to.Since incident beam is composite wavelength luminous point, according to optical principle different wave length complex light when by reflecting and reflecting Angle have a certain amount of offset, after incident beam enters photonic crystal beam splitter module, by speculum 1, speculum 2nd, a series of specific reflection such as speculum 3, speculum N-2, speculum N-1, speculum N, finally disperses different wave length Light arranges be radiated on photosensitive element according to a certain order.
In other one embodiment, the spectral working range of the photonic crystal beam splitter module is:350~ 1024nm。
Referring again to a kind of Fig. 1 structure schematic diagrams of spectrometer provided by the embodiments of the present application.The FPGA master controls are adopted Collection unit includes:Photosensitive element 410, AD acquisition modules 420, network communication module 430, fpga core processor 440 and power supply Module 450.
The photosensitive element is used to the hot spot being converted into simulation potential array.
Specifically, using the TSL1401 types line array CCD of ASM companies of the U.S. (1024 linear arrays can also be used in photosensitive element CCD), 128*1 linear photodiode is included.Illumination is mapped on photodiode, generates photoelectric current.Photoelectric current again by with this The related active integrating circuit integration of pixel.The quantity of electric charge of each pixel after integration just with the intensity of illumination and product of the point It is directly proportional between timesharing, therefore under the same time of integration, the potential that corresponding charge generates is with regard to that can reflect corresponding illumination Intensity.
The AD acquisition modules are used for the simulation potential is array switching for digital quantity array data.
Specifically, AD acquisition modules are realized quick steady using 12 AD conversion chips at a high speed, cooperation line array CCD specific time sequence Fixed AD acquisitions.
The network communication module is used for and external device communication.
That is, network communication module is used to control the network data exchange of external equipment.Network communication module is RJ45 standard network interfaces specifically may be used in the communication bridge that fpga core processor module is interacted with external equipment, real When receive external network data interacted with processor.It is appreciated that bluetooth can also be used, either wifi or 3G etc. is wirelessly passed Defeated mode carries out communication interaction with external equipment.It is appreciated that the external equipment can be host computer.
The fpga core processor is electrically connected the light source driver module, photosensitive element, AD acquisition modules and network and leads to Believe module.
Specifically, fpga core processor uses model AGLN250 (U.S. MICROSE) product.Processor high speed is simultaneously Row controls each correlation unit circuit, and timing sends specific time sequence to photosensitive element, and Synchronization Control light source driver module and AD are adopted Collect module by signal processing, it is ensured that obtain accuracy, stability, the real-time of spectral scan data.Fpga core processor simultaneously Also it is connected with network communication module into row data communication.
Power module, the power module are used for the photosensitive element, the AD acquisition modules, the network communication mould Block and fpga core processor power supply.
That is, power module is used to provide stable DC operating voltage to each function element in main control unit.This It is powered using the isolation regulated power supply of model gold rising Yang IB0503XT-1WR2 in embodiment, is isolated with the holding of extraneous power grid, Ensure that the power supply of each functional unit can be pure reliable.
In other one embodiment, above-mentioned spectrometer, light path system of the present invention uses former based on photonic crystal light splitting Manage structure design, have many advantages, such as that low in energy consumption, stability is high, speed is fast, cost-effective, spectral region is wide, be conducive to minimize, Integrated embedded design, wide spectrum working range are:350~1024nm.
Beneficial effects of the present invention are as follows:
(1) light path system of the present invention is used based on photonic crystal light-dividing principle structure design, has low in energy consumption, stability High, the advantages that speed is fast, cost-effective, spectral region is wide, be conducive to miniaturization, integrated embedded design, wide spectrum work Make ranging from:350~1024nm.
(2) photosensitive element of the present invention is designed using line array CCD, excellent with wide spectrum, wide dynamic range, high sensitivity etc. Point.
(3) main control unit of the present invention is used using on-site programmable gate array FPGA as core control processor structure design, High-speed parallel handles relevant control and acquisition sequential, to ensure accuracy, stability, the real-time of synchronous detection data.
(4) light source of the present invention is the rectangular filament designs of 1.9*1.9mm using German import halogen tungsten lamp rice bubble, structure, is had There is the features such as luminous efficiency is high, and hot spot is uniform.
Fig. 3 is a kind of operation principle flow chart of spectrometer provided by the embodiments of the present application.Software program is from upper electric-opening Enter initial configuration afterwards, open light source module, then wait for network interface order.Light intensity order is acquired when receiving, then fpga core Processor sends specific time sequence to photosensitive element, and light intensity is converted into corresponding simulation potential by photosensitive element, while opens AD and turn Change module, which is converted, simulates potential as digital quantity in photosensitive element, processor obtains digital quantity final finishing and exports a series of wavelength points And corresponding light intensity, subsequently into the state for waiting for network interface order.When receiving acquisition transmitance order, then fpga core is handled Device processor is equally acquired after light intensity acts to obtain digital quantity to be divided by and related operation with light intensity value before, is calculated Transmitance final finishing uploads output, subsequently into the state for waiting for network interface order.It (is exposed when receiving arrange parameter order as changed Value), then change corresponding parameter (as increased exposure value) inside processor and store, while reply command adapted thereto code to represent It is provided with, subsequently into waiting network interface coomand mode.Processor does not process if incongruent instruction is received, and continues Treat network interface coomand mode.
As shown in figure 4, for typical case schematic diagram of the present invention.Halogen tungsten lamp light source, will by fiber optic conduction to transmitting camera lens Illumination is mapped to tested glass sample.Spectrometer receives camera lens convergence through the scatterometry light beam after glass sample, by receiving It is transmitted on photonic crystal beam splitter after lens (the first planoconvex spotlight and the second planoconvex spotlight) collimation.Measuring beam is being divided Inside element the monochromatic hot spot to sort by specific wavelength is scattered by multiple reflections.The hot spot scattered out is irradiated to CCD On array photosensitive element, opto-electronic conversion is carried out by ccd array photosensitive element.Fpga core processor sends specific time sequence to CCD Array photosensitive element, and open AD acquisition modules and the simulation potential that opto-electronic conversion comes out is changed into digital quantity, then carry out data Network uploads host computer, while send I/O signal to exterior operator after processing analysis.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, it is all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the present invention, and description is more specific and detailed, but simultaneously It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that those of ordinary skill in the art are come It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (10)

1. a kind of spectrometer, which is characterized in that including:
Light source driver module, the light source driver module pass through sample to be tested for exporting horizontal survey light beam;
Camera lens is received, to receive the measuring beam across the sample to be tested, the reception camera lens includes the reception camera lens First planoconvex spotlight and the second planoconvex spotlight, the measuring beam across the sample to be tested first gather in first planoconvex spotlight Then coke becomes parallel light output again by the second planoconvex spotlight;
The photonic crystal beam splitter module, the photonic crystal beam splitter module are used for second planoconvex spotlight is defeated The measuring beam gone out is dispersed into the hot spot arranged according to different wave length position;And
FPGA master control collecting units, the FPGA master controls collecting unit include:
Photosensitive element, the photosensitive element are used to the hot spot being converted into simulation potential array;
AD acquisition modules, the AD acquisition modules are used for the simulation potential is array switching for digital quantity array data;
Network communication module, the network communication module is used for and external device communication;
Fpga core processor, the fpga core processor are electrically connected the light source driver module, photosensitive element, AD acquisition moulds Block and network communication module;And
Power module, the power module be used for the photosensitive element, the AD acquisition modules, the network communication module and The fpga core processor power supply.
2. spectrometer according to claim 1, which is characterized in that the power module is using golden rising Yang IB0503XT- The isolation regulated power supply of 1WR2.
3. spectrometer according to claim 1, which is characterized in that the spectrum work of the photonic crystal beam splitter module Ranging from:350~1024nm.
4. spectrometer according to claim 1, which is characterized in that a diameter of 20cm of first planoconvex spotlight, it is described A diameter of 6mm of second planoconvex spotlight.
5. spectrometer according to claim 1, which is characterized in that the photosensitive element is using ASM companies of the U.S. TSL1401 type line array CCDs.
6. spectrometer according to claim 1, which is characterized in that the AD acquisition modules use 12 AD conversion chips.
7. spectrometer according to claim 1, which is characterized in that the fpga core processor uses U.S. MICROSE AGLN250FPGA core processors.
8. spectrometer according to claim 1, which is characterized in that the network communication module uses RJ-45 standard networks Interface and external device communication.
9. spectrometer according to claim 1, which is characterized in that the light source driver module includes driving circuit and by institute State the halogen tungsten lamp of driving circuit driving.
10. spectrometer according to claim 9, which is characterized in that the halogen tungsten lamp is using Germany's HLL55919 halogen tungsten lamps.
CN201711408653.3A 2017-12-22 2017-12-22 Miniature spectrometer based on photonic crystal light splitting principle Active CN108195468B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109724959A (en) * 2019-01-17 2019-05-07 深圳市太赫兹科技创新研究院有限公司 A kind of spectrometer and its controller

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103575391A (en) * 2012-07-26 2014-02-12 睿励科学仪器(上海)有限公司 Spectrometer control circuit and spectrometer
CN105444885A (en) * 2014-07-22 2016-03-30 联想(北京)有限公司 Light detection method and electronic equipment
US20160245713A1 (en) * 2015-02-25 2016-08-25 Pukyong National University Industry-University Cooperation Foundation Optical fiber pressure sensor and pressure measuring method using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103575391A (en) * 2012-07-26 2014-02-12 睿励科学仪器(上海)有限公司 Spectrometer control circuit and spectrometer
CN105444885A (en) * 2014-07-22 2016-03-30 联想(北京)有限公司 Light detection method and electronic equipment
US20160245713A1 (en) * 2015-02-25 2016-08-25 Pukyong National University Industry-University Cooperation Foundation Optical fiber pressure sensor and pressure measuring method using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109724959A (en) * 2019-01-17 2019-05-07 深圳市太赫兹科技创新研究院有限公司 A kind of spectrometer and its controller

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