CN108161728A - Polish rotary table and burnishing device - Google Patents
Polish rotary table and burnishing device Download PDFInfo
- Publication number
- CN108161728A CN108161728A CN201711433259.5A CN201711433259A CN108161728A CN 108161728 A CN108161728 A CN 108161728A CN 201711433259 A CN201711433259 A CN 201711433259A CN 108161728 A CN108161728 A CN 108161728A
- Authority
- CN
- China
- Prior art keywords
- workbench
- rotary table
- bearing
- transmission shaft
- harmonic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Polishing rotary table and burnishing device provided by the invention, are related to polishing technology field.The polishing rotary table includes：Workbench, bearing and transmission shaft；Bearing is provided between the workbench and the bearing, the transmission shaft is driven by servo motor and rotated, so as to the workbench be driven to rotate by harmonic wave speed reducing machine.Transmission shaft described in polishing rotary table provided by the invention is driven by servo motor and rotated, so as to the workbench be driven to rotate by harmonic wave speed reducing machine, there is band-type brake by harmonic wave speed reducing machine, since external force leads to worktable rotary when preventing workbench static, wafer is caused to damage.Harmonic wave speed reducing machine has high torque (HT) and pinpoint performance, and with big reduction ratio range.There is good reliability and advantages of simple structure and simple using harmonic wave speed reducing machine.
Description
Technical field
The present invention relates to polishing technology field, more particularly, to a kind of polishing rotary table and burnishing device.
Background technology
With the fast development of microelectric technique, the requirement to electronic device is higher and higher, and traditional large-scale device is set
Meter cannot meet current micromation, an urgent demand of high speed, precise treatment, this is also just particularly integrated circuit (I C)
Large scale integrated circuit proposes higher requirement.Chip is less and less, and interconnection layer is more and more, to realize multilayer wiring, this
Higher requirement just is proposed to the flatness of crystal column surface, smoothness, cleanliness factor.Chemical-mechanical planarization technology (CMP) is
Degree of recognition highest, most effective wafer global planarizartion technology at present.High-precision rotary worktable is as CMP technique equipment
In core component, directly affect the final result of wafer surface flatness, smoothness, cleanliness factor, entirely rotate work
Make the influence of the precision, stability, efficiency of platform to entire CMP process to have some idea of.
CMP technique is different from common mechanical polishing, but the height that mechanical lapping and chemical attack are combined
Flatness, the global planarizartion technology of smoothness.Wherein chemical action can reduce object caused by simple mechanism possibility
Reason is damaged and improves polishing efficiency by the corrosiveness of polishing fluid and wafer, and mechanism can ensure entire material surface
The synchronous of polishing carries out, and flatness is high.
As shown in Figure 1, being connected in the prior art one using motor additional deceleration machine with transmission shaft 4, transmission shaft 4 drives work
Platform rotates.Using a pair of of circular cone roller bearing 16 for positioning axially and radially, in the structure due to support shaft 15 itself directly
Diameter is sufficiently large so the form for diameter being used to be increased stepwise in bearing above section.
In order to reduce deflection degree during stress in the program, not only to adjust each ladder section of bearing above section diameter and
Thickness also need the diameter (reduce the distance between constrained and forced position) of increase circular cone roller bearing 16 so as to cause
Overall dimensions are larger, and excessive occupies the useful space.The condition continuously to be worked long hours without locking measures due to round nut 18
Under, loosening may be caused, the clearance between bearing internal external circle is caused to increase, the rigidity of bearing is reduced, even slid.Due to branch
Support axis 15, the precision of babinet 17 and installation error are difficult to control and bearing internal external circle are caused to tilt.In order to ensure bearing by
Vibrations are not generated in load rotary course, and support shaft 15 and babinet 17 are caused to rub, need to ask bearing inner race and support shaft 15
Between and 17 inner wall of bearing outer ring and babinet between be both needed to interference fit installation, turn with difficulty it is larger.
As shown in Fig. 2, being connected in the prior art two using motor additional deceleration machine with transmission shaft 4, transmission shaft 4 drives work
Platform rotates.Equipped with thrust cylindrical roller bearing 19 between transmission shaft 4 and workbench, using circle between pedestal 20 and transmission shaft 4
Roller bearing 16 is bored for axially position, effectively reduces the influence factor of workbench end face axial bounce --- only justify with thrust
The axial runout of column roller bearing 19 is related.
In the program due to thrust cylindrical roller bearing 19 in rotary course since both ends linear velocity differs, roller is covering
Circle inevitably generates slip, therefore its effective rotating speed that can be born is restricted when rolling.For workbench and transmission shaft 4
Between connection and thrust cylindrical roller bearing 19 compression, among workbench must trepanning, lead to the whole ruler of workbench
Very little increasing.The structure is complex, which, which is sealed, and is lubricated certain difficulty.
Existing rotary table can not realize the rotary motion of low speed high rigidity, poor reliability.
Invention content
It is an object of the present invention to provide a kind of polishing rotary tables, cannot to solve existing rotary table
The technical issues of enough rotary motions of realization low speed high rigidity, poor reliability.
In order to solve the above technical problems, present invention employs following technical schemes；The polishing that first aspect present invention provides
Rotary table, wherein, including：Workbench, bearing and transmission shaft；Bearing is provided between the workbench and the bearing,
The transmission shaft is driven by servo motor and rotated, so as to the workbench be driven to rotate by harmonic wave speed reducing machine.
Transmission shaft described in polishing rotary table provided by the invention is driven by servo motor and rotated, so as to pass through harmonic wave
Speed reducer drives the workbench rotation, has the function of band-type brake by harmonic wave speed reducing machine, since external force is led when preventing workbench static
Worktable rotary is caused, wafer is caused to damage.Harmonic wave speed reducing machine has high torque (HT) and pinpoint performance, and with big deceleration
Compare range.There is good reliability and advantages of simple structure and simple using harmonic wave speed reducing machine.
In any of the above-described technical solution, further, the harmonic wave speed reducing machine includes the steel that ecto-entad is arranged successively
Wheel, flexbile gear and wave producer, the driving sleeve are set in the wave producer, and the flexbile gear is nibbled with the steel wheel by gear
It closes, the steel wheel is fixedly connected with the workbench.
In any of the above-described technical solution, further, the steel wheel include upper steel wheel and lower steel wheel, the upper steel wheel with
The workbench is fixedly connected.
In any of the above-described technical solution, further, the transmission shaft is occurred by speed reducer coupling and the wave
Device connects.
In any of the above-described technical solution, further, the bearing is crossed roller bearing.
In any of the above-described technical solution, further, the transmission shaft passes through transmission shaft shaft coupling and servo electricity
The shaft connection of machine.
In any of the above-described technical solution, further, the workbench is provided with block on the bearing.
In any of the above-described technical solution, further, angular transducer is provided on the block.Workbench can be achieved
The rotary stopper of certain angle.Workbench can be replaced according to need of work.
In any of the above-described technical solution, further, multiple stations are provided on the workbench.It is set on workbench
There are two, three or more stations.Multiple stations are evenly distributed with around the circumferential direction of workbench.
The present invention provides a kind of burnishing device, wherein, including polishing rotary table as described above.
Using above-mentioned technical proposal, the present invention has the advantages that：
Transmission shaft described in polishing rotary table provided by the invention is driven by servo motor and rotated, so as to pass through harmonic wave
Speed reducer drives the workbench rotation, has the function of band-type brake by harmonic wave speed reducing machine, since external force is led when preventing workbench static
Worktable rotary is caused, wafer is caused to damage.Harmonic wave speed reducing machine has high torque (HT) and pinpoint performance, and with big deceleration
Compare range.There is good reliability and advantages of simple structure and simple using harmonic wave speed reducing machine.
Further, the harmonic wave speed reducing machine includes steel wheel, flexbile gear and the wave producer that ecto-entad is arranged successively, described
Driving sleeve is set in the wave producer, and the flexbile gear is engaged with the steel wheel by gear, the steel wheel and the work
Platform is fixedly connected.
Further, the bearing is crossed roller bearing.
Further, the workbench is provided with block on the bearing.
The additional aspect and advantage of the present invention will become practice apparent or by the present invention in following description section
Recognize.
Description of the drawings
It below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution of the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in being described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the structure diagram of technical solution one that background of invention provides；
Fig. 2 is the structure diagram of technical solution two that background of invention provides；
Fig. 3 is the structure diagram of polishing rotary table that the embodiment of the present invention one provides；
Fig. 4 is the enlarged diagram of Fig. 3；
Fig. 5 is the structure diagram of workbench in polishing rotary table provided by Embodiment 2 of the present invention.
Reference numeral：
1：Workbench； 2：Speed reducer coupling； 3：Harmonic wave speed reducing machine；
4：Transmission shaft； 5：Bearing； 6：Servo motor；
7：Transmission shaft shaft coupling； 8：Block； 9：Crossed roller bearing；
10：Working position； 11：Upper steel wheel； 12：Lower steel wheel；
13：Flexbile gear； 14：Wave producer； 15：Support shaft；
16：Circular cone roller bearing； 17：Babinet； 18：Round nut；
19：Thrust cylindrical roller bearing； 20：Pedestal.
Specific embodiment
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's all other embodiments obtained without making creative work, shall fall within the protection scope of the present invention.
It should be noted that in the absence of conflict, the feature in embodiments herein and embodiment can be combined with each other.
In the description of the present invention, it should be noted that term " " center ", " on ", " under ", "left", "right", " vertical ",
The orientation or position relationship of the instructions such as " level ", " interior ", " outer " be based on orientation shown in the drawings or position relationship, merely to
Convenient for the description present invention and simplify description rather than instruction or imply signified device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is only used for description purpose, and it is not intended that instruction or hint relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected or be integrally connected；It can
To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
With reference to specific embodiment the present invention will be further explained explanation.
Embodiment one
As shown in Figure 3 and Figure 4, the polishing rotary table that the embodiment of first aspect present invention provides, including：Workbench
1st, bearing 5 and transmission shaft 4；Bearing is provided between the workbench 1 and the bearing 5, the transmission shaft 4 is by servo motor 6
Driving rotation, so as to the workbench 1 be driven to rotate by harmonic wave speed reducing machine 3.
Transmission shaft 4 drives rotation by servo motor 6 described in polishing rotary table 1 provided by the invention, so as to pass through
Harmonic wave speed reducing machine 3 drives the workbench 1 to rotate, and has the function of band-type brake by harmonic wave speed reducing machine 3, when preventing workbench 1 static by
Workbench 1 is caused to rotate in external force, wafer is caused to damage.Harmonic wave speed reducing machine 3 has high torque (HT) and pinpoint performance, and has
There is big reduction ratio range.There is good reliability and advantages of simple structure and simple using harmonic wave speed reducing machine 3.
Servo motor 6 can be fixed on bearing 5, and servo motor 6 drives transmission shaft 4 to rotate.
In any of the above-described technical solution, further, the harmonic wave speed reducing machine 3 includes the steel that ecto-entad is arranged successively
Wheel, flexbile gear 13 and wave producer 14, the transmission shaft 4 are sheathed in the wave producer 14, the flexbile gear 13 and the steel wheel
It is engaged by gear, the steel wheel is fixedly connected with the workbench 1.
In any of the above-described technical solution, further, the steel wheel includes upper steel wheel 11 and lower steel wheel 12, the upper steel
Wheel 11 is fixedly connected with the workbench 1.Upper steel wheel 11 can be connect by screw with workbench 1, and upper steel wheel 11 drives work
Platform 1 rotates, and lower steel wheel 12 is fixed with bearing 5.
In any of the above-described technical solution, further, the transmission shaft 4 is sent out by speed reducer coupling 2 and the wave
Raw device 14 connects.
In any of the above-described technical solution, further, the bearing is crossed roller bearing 9.
There are an introns to separate between roller and roller in crossed roller bearing 9, rubbing between roller and roller can be prevented
Wiping and the increase of rotation torque.It is contacted between roller and roller track for line, therefore has very big bearing load region, therefore
The flexible deformation of bearing is small, and service life is long.Roller is interlaced with 90 ° of angles in sized cross roller bearings, can bear axis simultaneously
To the load forces of the different directions such as load, radial load and moment load.
In any of the above-described technical solution, further, the transmission shaft 4 passes through transmission shaft shaft coupling 7 and the servo
The shaft connection of motor 6.
In any of the above-described technical solution, further, the workbench 1 is provided with block on the bearing 5
8。
In any of the above-described technical solution, further, angular transducer is provided on the block 8.Work can be achieved
The rotary stopper of 1 certain angle of platform.Workbench 1 can be replaced according to need of work.
The present invention provides a kind of burnishing device, wherein, including polishing rotary table 1 as described above.Burnishing device
Further include the rubbing head being set on polishing rotary table 1.
Embodiment two
As shown in figure 5, in polishing rotary table 1 provided in this embodiment, it is provided on the workbench 1 multiple
Station.Two, three or more station is provided on workbench 1.Multiple stations are evenly distributed with around the circumferential direction of workbench.
Preferably, working position 10 is four, and workbench 1 is cross, and working position 10 is set to the surrounding of workbench 1.Work
It can also be table roller structure to make position 10.Remaining is as in the first embodiment, details are not described herein again.
Servo motor 6 is connected by transmission shaft shaft coupling 7 with transmission shaft 4 in rotary table 1 provided by the invention, transmission
Axis 4 is connected by speed reducer coupling 2 with the wave wave producer 14 of harmonic wave speed reducing machine 3, and workbench 1 is upper with harmonic wave speed reducing machine 3
The fixation of steel wheel 11 is realized by crossed roller bearing 9 to rotate around bearing 5.
Using servo motor 6+ harmonic wave speed reducing machine 3+ sized cross roller bearings+1 face of replaceable workbench, belong to servo motor 6+
Speed reducer drives one kind of workbench 1.Relevant mechanical fastener is driven to drive by harmonic wave speed reducing machine 3 by servo motor 6 to throw
Light workbench 1 realizes low speed on crossed roller bearing 9, and (speed is determined by the rotating speed of motor and the reduction ratio of harmonic wave speed reducing machine 3
The rotary motion of high rigidity calmly).
In conclusion transmission shaft described in polishing rotary table provided by the invention is driven by servo motor and rotated, from
And the workbench is driven to rotate by harmonic wave speed reducing machine, there is band-type brake by harmonic wave speed reducing machine, when preventing workbench static
Since external force leads to worktable rotary, wafer is caused to damage.Harmonic wave speed reducing machine has high torque (HT) and pinpoint performance, and has
There is big reduction ratio range.There is good reliability and advantages of simple structure and simple using harmonic wave speed reducing machine.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe is described in detail the present invention with reference to foregoing embodiments, it will be understood by those of ordinary skill in the art that：Its according to
Can so modify to the technical solution recorded in foregoing embodiments either to which part or all technical features into
Row equivalent replacement；And these modifications or replacement, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.In addition, it will be appreciated by those of skill in the art that although some embodiments described herein include other implementations
Included certain features rather than other feature in example, but the combination of the feature of different embodiments means in the present invention
Within the scope of and form different embodiments.For example, in claims above, embodiment claimed
It is one of arbitrary mode to use in any combination.The information for being disclosed in the background technology part is merely intended to intensification pair
The understanding of the general background technology of the present invention, and be not construed as recognizing or imply that information composition has been this in any form
The prior art well known to field technology personnel.
Claims (10)
1. a kind of polishing rotary table, which is characterized in that including：Workbench, bearing and transmission shaft；The workbench with it is described
Bearing is provided between bearing, the transmission shaft is driven by servo motor and rotated, so as to drive the work by harmonic wave speed reducing machine
Make platform rotation.
2. polishing rotary table according to claim 1, which is characterized in that the harmonic wave speed reducing machine includes ecto-entad
Steel wheel, flexbile gear and the wave producer being arranged successively, the driving sleeve are set in the wave producer, the flexbile gear and the steel
Wheel is engaged by gear, and the steel wheel is fixedly connected with the workbench.
3. polishing rotary table according to claim 2, which is characterized in that the steel wheel includes upper steel wheel and lower steel
Wheel, the upper steel wheel are fixedly connected with the workbench.
4. polishing rotary table according to claim 2, which is characterized in that the transmission shaft passes through speed reducer coupling
It is connect with the wave producer.
5. polishing rotary table according to claim 1, which is characterized in that the bearing is crossed roller bearing.
6. polishing rotary table according to claim 1, which is characterized in that the transmission shaft passes through transmission shaft shaft coupling
It is connect with the shaft of the servo motor.
7. polishing rotary table according to claim 1, which is characterized in that correspond to the workbench on the bearing
It is provided with block.
8. polishing rotary table according to claim 7, which is characterized in that be provided with angle sensor on the block
Device.
9. polishing rotary table according to claim 1, which is characterized in that multiple works are provided on the workbench
Position.
10. a kind of burnishing device, which is characterized in that including polishing rotary table as described in any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711433259.5A CN108161728A (en) | 2017-12-26 | 2017-12-26 | Polish rotary table and burnishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711433259.5A CN108161728A (en) | 2017-12-26 | 2017-12-26 | Polish rotary table and burnishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108161728A true CN108161728A (en) | 2018-06-15 |
Family
ID=62521164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711433259.5A Pending CN108161728A (en) | 2017-12-26 | 2017-12-26 | Polish rotary table and burnishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108161728A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687469A (en) * | 2021-01-20 | 2021-04-20 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Stacking table and stacking device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112687469A (en) * | 2021-01-20 | 2021-04-20 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Stacking table and stacking device |
| CN112687469B (en) * | 2021-01-20 | 2022-10-04 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Stacking table and stacking device |
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Application publication date: 20180615 |