CN108161487B - Micro-nano structure machining tool - Google Patents

Micro-nano structure machining tool Download PDF

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Publication number
CN108161487B
CN108161487B CN201711203260.9A CN201711203260A CN108161487B CN 108161487 B CN108161487 B CN 108161487B CN 201711203260 A CN201711203260 A CN 201711203260A CN 108161487 B CN108161487 B CN 108161487B
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China
Prior art keywords
flying disc
cutter
platform
installation
micro
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CN108161487A (en
Inventor
张国庆
伍晓宇
黄鹏
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Shenzhen University
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Shenzhen University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/30Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members controlled in conjunction with the feed mechanism
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/44Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/48Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs
    • B23Q1/4804Movable or adjustable work or tool supports using particular mechanisms with sliding pairs and rotating pairs a single rotating pair followed perpendicularly by a single sliding pair

Abstract

The present invention provides a kind of micro-nano structure machining tool, it include: tool apron, cutter carrier and the cutter that workseat and workseat are oppositely arranged, tool apron includes the shaft that axis extends along machine Z-axis direction, cutter carrier is loaded on roller end, workseat can be moved along machine Z-axis direction, and tool apron can be moved along lathe X-direction;The cutter carrier includes chassis and flying disc, and chassis, which is loaded on tool apron and passes through tool apron, realizes rotation;The flying disc is removably laminated on chassis and coaxial with chassis;The disk of flying disc is towards workseat;The disk of the flying disc is equipped at least two installation and adjustment slots, and two installation and adjustment slots are centrosymmetric about the axle center of flying disc, and the cutter is interior loaded on an installation and adjustment slot and protrudes the disk of flying disc.The micro-nano structure machining tool can be realized the ultraprecise fly cutter machining of micro-nano structure, to realize the processing of certain complicated micro-nano structure surfaces.

Description

Micro-nano structure machining tool
Technical field
The present invention relates to machine processing field, in particular to a kind of micro-nano structure machining tool.
Background technique
Optical articles with micro-nano structure have usually required that higher surface precision and lower surface roughness, therefore It needs with the processing needs for being just able to satisfy such product compared with the lathe of high manufacturing accuracy.In traditional ultra-precise cutting processing, Workpiece is fixed on vacuum chuck, and diamond cutter is placed on knife rest, and rotation and the machine of workpiece are driven by vacuum chuck The movement of bed cooperates processing.Since the processing of some complicated micro-nano structure surfaces needs fly cutter to process, but the lathe mechanism can not Realize ultraprecise fly cutter Milling Process.
Summary of the invention
The purpose of the present invention is to provide a kind of micro-nano structure machining tools, can satisfy adding for complicated micro-nano structure surface Work demand, to realize the machining to the ultraprecise micro-nano structure of workpiece.
A kind of micro-nano structure machining tool, comprising: workseat, the tool apron being oppositely arranged with the workseat, cutter carry Disk and cutter, the tool apron include the shaft that axis extends along machine Z-axis direction, and the cutter carrier is loaded on the shaft end Portion, the workseat can be moved along machine Z-axis direction, and the tool apron can be moved along lathe X-direction;
The cutter carrier includes chassis and flying disc, and the chassis, which is loaded on the tool apron and passes through tool apron, realizes rotation Turn;The flying disc is removably laminated on the chassis and coaxial with the chassis;The disk of the flying disc is towards institute State workseat;
The disk of the flying disc is equipped at least two installation and adjustment slots, and two installation and adjustment slots fly about described The axle center of cutterhead is centrosymmetric, and the cutter is interior loaded on an installation and adjustment slot and protrudes the disk of the flying disc.
Wherein, at least two installation and adjustment geosynclinal concave is set to the disk of the flying disc and is arranged in described in a process The straight line in flying disc axle center.
Wherein, multiple installation and adjustment slot intervals are arranged and are at least arranged in one by the straight of the flying disc axle center Line, the cutter is interior loaded on an installation and adjustment slot and protrudes the disk.
Wherein, the disk of the flying disc is equipped with first and carries knife platform and the first counterweight platform, and described first carries knife platform and institute It states the first counterweight platform to be extended outwardly by the flying disc axle center and symmetrical about the eccentric axial, described first carries knife platform Surface and the surface of the first counterweight platform are vertical with the disk of the flying disc, and several installation and adjustment slots are distributed in described First carries on the surface of knife platform and the surface of the first counterweight platform.
Wherein, the disk of the flying disc is equipped with second and carries knife platform and the second counterweight platform, and described second carries knife platform and institute It states the second counterweight platform to be extended outwardly by the flying disc axle center and symmetrical about the eccentric axial, described second carries knife platform Surface and the surface of the second counterweight platform are vertical with the disk of the flying disc, and described second, which carries knife platform and described first, carries knife Platform is vertically arranged, and the second counterweight platform is vertically arranged with the first counterweight platform;It is described second carry knife platform surface and The installation and adjustment slot of several installation cutters is placed on the surface of the second counterweight platform.
Wherein, the flying disc further includes counterweight, and the counterweight described is matched loaded in the installation and adjustment slot The product of heavy mail to the distance in axle center and the quality of counterweight is equal at a distance from cutter to axle center and the product of the quality of cutter.
Wherein, recessed there are two symmetrical about the flying disc eccentric axial and fly through described for the disk of the flying disc The open slot of cutterhead periphery, described first, which carries knife platform and described second, carries the vertical groove sidewall that knife platform is the same open slot, The second counterweight platform is the vertical groove sidewall of another open slot with the first counterweight platform.
Wherein, all sides on the chassis are equidistantly equipped with multiple balance elements, each balance element to the flying disc The distance of all sides is adjustable.
Wherein, the chassis is fixedly connected with the flying disc by screw, or is fixed by vacuum suction.
Wherein, the cutter includes knife handle and the cutting portion for being connected to the knife handle;The cutting portion is stacked at the knife One end of handle, the cutting portion have backwards to the knife handle the first cutting face and the second cutting face, first cutting face and Second cutting face is arranged in angle.
Wherein, the disk of the flying disc is equipped with groove, and the groove is the strip groove by the axle center, and is traversed The disk of the flying disc, multiple installation and adjustment slots are set on the cell wall of the groove.
Beneficial effects of the present invention are as follows: by the way that cutter is arranged on the surface of flying disc, and in position opposite with tool apron Workseat is installed, to design the micro-nano structure machining tool for meeting micro-nano structure process requirements.Using cutter in flying disc Under rotation and along the x axis translation drive, and workseat is cooperated to move in the Z-axis direction to realize the ultra precision cutting to workpiece Processing, to meet the process requirements of complicated micro-nano structure and promote the machining accuracy of product.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of micro-nano structure machining tool of the invention.
Fig. 2 is the cutter structure schematic diagram of Fig. 1.
Fig. 3 is the planar structure schematic diagram of the flying disc of the first embodiment of the invention.
Fig. 4 is the planar structure schematic diagram of the flying disc of the first embodiment of second of embodiment of the invention.
Fig. 5 is the planar structure schematic diagram of the flying disc of second of embodiment of second of embodiment of the invention.
Fig. 6 is the planar structure schematic diagram of the flying disc of the third embodiment of the invention.
Fig. 7 is the structural schematic diagram of the flying disc of the 4th kind of embodiment of the invention.
Fig. 8 is the planar structure schematic diagram of the flying disc of the 4th kind of embodiment of the invention.
Fig. 9 is the planar structure schematic diagram of the flying disc of the 5th kind of embodiment of the invention.
Figure 10 is the structural schematic diagram on the chassis Fig. 1.
Figure 11 is the structural schematic diagram of the plummer of Fig. 1.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, embodiment of the present invention provides a kind of micro-nano structure machining tool 100, the micro-nano structure processing Lathe 100 is mainly used for the micro-nano structure in the surface of workpiece processing array arrangement.The micro-nano structure be size in the micron-scale Or nanoscale has the micro-structure of certain geometrical shape, triangular pyramid, the rectangular pyramid such as surrounded by several cross linear slots Equal polygonal pyramids structure or other micro-nano structures convexed to form with certain geometrical shape.Micro-nano structure machining tool 100 It include: tool apron 20, cutter carrier 30 and the cutter 40 that workseat 10 and the workseat 10 are oppositely arranged.Workseat 10 can It is moved along machine Z-axis direction, tool apron 20 can be moved along lathe X-direction, and tool apron 20 includes that axis prolongs along machine Z-axis direction The shaft stretched, cutter carrier 30 are loaded on the roller end.Cutter carrier 30 includes chassis 31 and flying disc 32, chassis 31 Loaded on tool apron 20 and by tool apron 20 realize rotation.Flying disc 32 is removably laminated in the disk on chassis 31, and with bottom Disk 31 is coaxial.The disk of flying disc 32 is towards workseat 10.The disk of flying disc 32 is equipped at least two installation and adjustment slots 322, two installation and adjustment slots 322 are centrosymmetric about the axle center of flying disc 32, and cutter 40 is loaded on an installation and adjustment slot 322 The disk of projecting inward flying disc 32.
Micro-nano structure machining tool 100 of the invention is by the way that cutter 40 to be mounted on installation and adjustment slot 322, and in cutter Under the rotation of carrier 30 drives, and cooperation cutter carrier 30 is in the workpiece that X-direction is mobile and is mounted on workseat 10 Under the movement of Z-direction, the micro-nano structure machining to workpiece is realized.Since cutter 40 is in the rotation of cutter carrier 30 It drives lower rotation and knife is mended to realize cutting workpiece by linear movement, overcome cutter in the vibration frequency of fast tool servo to adding The limitation of work workpiece size, so that the range of work of the cutter 40 of micro-nano structure machining tool 100 expands.In addition, micro-nano structure Machining tool 100 passes through the machining path for being implemented in combination with cutter 40 of three kinds of motion modes, and then realizes the micro-nano knot of ultraprecise Structure machining.
The first embodiment of the invention, the disk of flying disc 32 is recessed at least two installation and adjustment slots, and arranges At a straight line by 32 axle center of flying disc.As shown in Figures 2 and 3, the disk of the flying disc 32 it is recessed there are two installation Regulating tank 322.Two installation and adjustment slots 322 are centrosymmetric about the axle center of flying disc 32.One of installation and adjustment slot 322 For installing the cutter 40.In the present embodiment, cutter 40 includes knife handle 41 and the cutting portion 42 for being connected to knife handle 41.Cutter 40 Cutting portion 42 be stacked at one end of knife handle 41, cutting portion 42 has backwards to the first cutting face 421 of knife handle 41 and the second cutting Face 422, the first cutting face 421 and the second cutting face 422 are arranged in angle.By being arranged first on the cutting portion 42 of cutter 40 Cutting face 421 and the second cutting face 422, and be arranged in angle, so that the cutting portion 42 of cutter 40 is more fine, it is advantageous in this way Micro-nano structure processing is carried out to workpiece in micro-nano structure machining tool 100, improves the machining accuracy of workpiece.The knife handle 41 is fixed In in the installation and adjustment slot 322.The cutting portion of cutter 40 stretches out installation and adjustment towards the workpiece being fixed on workseat 10 The outside of slot 322.Realize cutter 40 to the rotary cutting of workpiece by the way that cutter 40 to be fixed on flying disc 32.
In the present embodiment, another installation and adjustment slot 322 is used for the weight of balance adjustment cutter 40.Specifically, flying disc 32 further include counterweight 50, and the counterweight 50 is loaded in the installation and adjustment slot 322, and the counterweight 50 arrives axle center The product of distance and the quality of counterweight 50 is equal to the product at a distance from cutter 40 to axle center with the quality of cutter 40.The present invention is real It applies in example, counterweight 50 is counterweight screws, and the weight of counterweight 50 and cutter 40 are equal in weight.Counterweight screws are conducive to work Make the weight of personnel's adjustment cutter 40 and facilitates installation.Installation and adjustment cutter 40 being fixed on cutter carrier 30 Slot 322.Since cutter 40 has weight, and according to the increase of 40 cutting rate of 30 revolving speed of cutter carrier and cutter, it is easy to make The center of gravity for obtaining cutter carrier 30 shifts, and influences machining accuracy.Therefore, by the fixed position of cutter 40 about axle center A counterweight screws are locked on symmetrical 322 position of installation and adjustment slot, so that the center of gravity of cutter carrier 30 keeps balance and and axis The heart is overlapped or close coincidence.In this way, the cutter of micro-nano structure machining tool 100 is in dynamic equilibrium during the cutting process, from And guarantee the precision of the micro-nano structure machining of ultraprecise.In other embodiments, counterweight 50 or counterweight screw Deng, and the weight of counterweight 50 is not necessarily equal in weight with cutter 40, as long as guarantee the weight balancing in cutter carrier 30 In adjustment process, the distance of counterweight 50 to axle center and the product of the quality of counterweight 50 be equal to cutter 40 at a distance from axle center and The product of the quality of cutter 40, so that cutter carrier 30 keeps balance.
Further, in order to preferably adjust the dynamic balancing of cutting system, all sides on chassis 31 are equipped with multiple at equal intervals The distance of balance element 34, each balance element 34 to the 31 weeks sides in chassis is adjustable.In the present embodiment, the side on chassis 31 is equipped with Multiple mass screws of one circle spaced set, mass screw are overlapped to the center of gravity on balance adjustment chassis 31 with axle center.Specifically , when cutter 40 is fixed on installation and adjustment slot 322 on cutter carrier 30, and by about the symmetrical installation and adjustment in axle center When locking a counterweight 50 on 322 position of slot, in order to pass through further such that the center of gravity of cutter carrier 30 is overlapped with axle center Lever principle adjusts each mass screw at a distance from all sides of cutter carrier 30.For example, working as the weight of cutter carrier 30 When the heart is deviated along the underface of tool apron 20, can symmetrically it be put down by adjusting and deviation post about the eccentric axial of flying disc 32 The screw that weighs stretches out the distance of 30 side of cutter carrier, be overlapped the center of gravity of cutter carrier 30 with axle center.Just make in this way Micro-nano structure machining tool 100 is in dynamic equilibrium during the cutting process, to guarantee the Ultra-precision machining of micro-nano structure Precision.
Second of embodiment of the invention, multiple installation and adjustment slot intervals are arranged and are at least arranged in one by institute The straight line in 32 axle center of flying disc is stated, the cutter is interior loaded on an installation and adjustment slot and protrudes the disk.The present embodiment The first embodiment in, as shown in figure 4, the disk of the flying disc 32 be equipped with off-axis heart different distance multiple installations Regulating tank 322, and it is arranged in a straight line by 32 axle center of flying disc.When the installation that cutter 40 is fixed on to different location When regulating tank 322, cutter 40 has different linear speeds in same rotational speed also by the distance different with the off-axis heart Degree.When cutter carrier 30 live spindle rotation drive under rotate, cutter 40 also correspondingly rotates, at this moment from Different size of work piece cut may be implemented in the cutter 40 of axle center different distance, to expand the cutting range of fly cutter.It is comparing In by securing the workpiece against on chassis 31, cutter 40 is fixed on workseat 10, and micro-nano structure machining tool 100 can more be kept away Exempt from the model that cutter 40 reduces work pieces process when being fixed on workseat 10 because of the limitation by fast tool servo device vibration frequency It encloses.In addition, cutter 40 also can be as cutter carrier 30 be along lathe X when cutter carrier 30 is rotated with cutter 40 Axis direction is translated and is translated, so that the cutting path of cutter 40 changes, realizes the machining path of arbitrary curve, is expanded The application range of micro-nano structure machining tool 100.
Second of embodiment of second of embodiment of the invention, with the first embodiment the difference is that: such as Shown in Fig. 5, multiple installation and adjustment slots 322 are arranged in two vertically disposed straight lines by 32 axle center of flying disc.Every straight line It is equipped with multiple installation and adjustment slots 322.Cutter 40 can be according to workpieces processing design requirement loaded on an installation on straight line In regulating tank 322, in order to keep balance of the flying disc 32 in rotary course, the installation and adjustment slot being located on the same line 322 are installed with cutter 40 through the symmetrical counterweight 50 in axle center.Further, in order to guarantee flying disc 32 center of gravity (disk Center) it is overlapped with axle center, at a distance from 30 weeks sides of adjustment part 34 and cutter carrier.
The third embodiment of the invention, multiple installation and adjustment slot intervals are arranged and are at least arranged in one by institute The straight line in flying disc axle center is stated, the cutter is interior loaded on an installation and adjustment slot and protrudes the disk.With last implementation The disk of the flying disc unlike example is equipped with first and carries knife platform and the first counterweight platform, and described first carries knife platform and described the One counterweight platform is extended outwardly and symmetrical about the eccentric axial by flying disc axle center, and described first carries the surface of knife platform and the The surface of one counterweight platform is vertical with the disk of flying disc, and several installation and adjustment slots are distributed in the described first surface for carrying knife platform On the surface of the first counterweight platform.Specifically, as shown in fig. 6, the disk of flying disc 32, which is equipped with first, carries knife platform 323 and first Counterweight platform 324, it is described first load knife platform 323 and the first counterweight platform 324 extended outwardly by 32 axle center of flying disc and about The eccentric axial is symmetrical, and the surface and the surface of the first counterweight platform 324 of the first load knife platform 323 and the disk of flying disc 32 are hung down Directly.The surface of first load knife platform 323 is contrary with the surface of the first counterweight platform 324.Several installation and adjustment slots 322 are distributed in First carries on the surface of knife platform 323 and the surface of the first counterweight platform 324.In other embodiments, the surface of the first load knife platform 323 On installation and adjustment slot can be used for installation counterweight 50, the installation and adjustment slot 322 on the surface of the first counterweight platform 324 can also For installation into cutter 40.
Specifically, the first surface for carrying knife platform 323 is equipped with equidistant installation and adjustment slot 322, and each installation and adjustment slot The distance of the 322 off-axis hearts increases in same.In other embodiments, the position of installation and adjustment slot 322 with no restriction can be according to reality Border situation flexible design.The installation and adjustment that the position of the installation and adjustment slot 322 of first counterweight platform 324 carries knife platform 323 for first The position of slot 322 is centrosymmetric setting about the axle center of flying disc 32.It is helped by designing equidistant installation and adjustment slot 322 In the speed for facilitating staff to precisely adjust cutter 40 in carrying out workpiece cutting process, staff can also assist in The quickly and easily center of gravity of balance adjustment flying disc.
Wherein, the first surface for carrying knife platform 323 is equipped with equidistant installation and adjustment slot 322, and each installation and adjustment slot 322 The distance of the off-axis heart increases in same.Specifically, cutter 40 is detachably secured in one of installation and adjustment slot 322.The The position for the installation and adjustment slot 322 that the position of the installation and adjustment slot 322 of one counterweight platform carries knife platform 323 for first is about flying disc 32 eccentric axial is symmetrical arranged.When cutter 40 is fixed on the first load knife 323 installation and adjustment slot 322 of platform by fastener, A counterweight 50 is locked on 322 position of installation and adjustment slot of the first counterweight platform 324 symmetrical about axle center, so that cutter carries The center of gravity of disk 30 is located near axle center.In order to which lever can be passed through further such that the center of gravity of cutter carrier 30 is overlapped with axle center Principle adjusts each mass screw at a distance from all sides of cutter carrier 30.
The surface for carrying knife platform 323 due to first is equipped with equidistant installation and adjustment slot 322, and cutter 40 also has the off-axis heart not Same distance.When cutter carrier 30 is rotated in the case where the rotation of live spindle drives, cutter 40 is also correspondingly rotated, At this moment work piece cut of different sizes may be implemented in the cutter 40 of off-axis heart different distance, thus expand the cutting range of fly cutter, Also the linear velocity of cutter 40 can be controlled by adjusting the off-axis heart different distance of cutter 40, realizes accurately cutting to micro-nano structure It cuts.Compared to by securing the workpiece against on chassis 31, cutter 40 is fixed on workseat 10, micro-nano structure machining tool 100 more can be avoided the model that cutter 40 reduces work pieces process when being fixed on workseat 10 because being vibrated the limitation of frequency It encloses.In addition, cutter 40 also can be as cutter carrier 30 be along X-axis side when cutter carrier 30 is rotated with cutter 40 It is translated to translation.Therefore by the way that the rotary motion of cutter 40 be combined with each other with along X-direction translation, to increase cutter 40 cutting path realizes curve machining path, expands the application range of micro-nano structure machining tool 100.
4th kind of embodiment of the invention, with the third embodiment of the invention the difference is that: such as Fig. 7 and Fig. 8 institute Show, the disk of flying disc 32 is equipped with second and carries knife platform 325 and the second counterweight platform 326, and second carries knife platform 325 and the second counterweight platform 326 are extended outwardly by 32 axle center of flying disc and are centrosymmetric about the axle center, and second carries the surface and second of knife platform 325 The surface of counterweight platform 326 is vertical with the disk of flying disc 32, and the second load knife platform 325 is vertically arranged with the first load knife platform 323, and Second counterweight platform 326 is vertically arranged with the first counterweight platform 324;Second carries the table of the surface of knife platform 325 and the second counterweight platform The installation and adjustment slot 322 of several installation cutters 40 is placed on face 326.Wherein, second knife platform 325 and the first counterweight platform 324 are carried Surface it is at right angles opposite.The surface of second counterweight platform 326 and the first load knife platform 323 is at right angles opposite.
Specifically, the second surface for carrying knife platform 325 is equipped with equidistant installation and adjustment slot 322, and each installation and adjustment slot The distance of the 322 off-axis hearts increases in same.In other embodiments, the position of installation and adjustment slot 322 with no restriction can be according to reality Border situation flexible design.The installation and adjustment that the position of the installation and adjustment slot 322 of second counterweight platform 326 carries knife platform 325 for second The position of slot 322 is centrosymmetric setting about the axle center of flying disc 32.It is helped by designing equidistant installation and adjustment slot 322 In the speed for facilitating staff to precisely adjust cutter 40 in carrying out workpiece cutting process, staff can also assist in The quickly and easily center of gravity of balance adjustment flying disc.
In the present embodiment, the disk of flying disc 32 is recessed, and there are two be centrosymmetric and run through to fly about 32 axle center of flying disc The open slot of 32 periphery of cutterhead, first, which carries knife platform 323 and second, carries the vertical groove sidewall that knife platform 325 is the same open slot, Second counterweight platform 324 is the vertical groove sidewall of another open slot with the first counterweight platform 326.Specifically, the flying disc 32 Disk be four right angle fan regions, two of them form sector open slot, other two region with the symmetrical region in axle center For protrusion.It, can by the way that the first load knife platform 323 and the second load knife platform 325 to be designed as to the vertical groove sidewall of the same open slot To provide sufficient space for installation cutter 40, facilitate to facilitate staff that cutter 40 quickly and is easily installed in this way, It is capable of the center of gravity of active balance adjusting flying disc 32.In addition, by the way that the second counterweight platform 324 and the first counterweight platform 326 are designed as The vertical groove sidewall of the same open slot can provide sufficient space for installation counterweight 50, facilitate to facilitate work in this way Make personnel and cutter 40 quickly and is easily installed, is also capable of the center of gravity of active balance adjusting flying disc 32.
The installation and adjustment slot 322 of second load knife platform 325 is equipped with cutter 40.Screw hole 411 and second on cutter 40 carry knife Alignment connection may be implemented in the installation and adjustment slot 322 of platform 325.The tip direction of cutter 40 is fixed on the workpiece on workseat 10, And stretch out the outside of flying disc 32.When cutter 40 is fixed on the second load knife 325 installation and adjustment slot 322 of platform by fastener, A counterweight 50 is locked on 322 position of installation and adjustment slot of the second counterweight platform 326 symmetrical about axle center, so that cutter carries The center of gravity of disk 30 keeps balance and is overlapped or approaches with axle center to be overlapped.In order to further such that cutter carrier 30 center of gravity with Axle center is overlapped, and each mass screw can be adjusted by lever principle at a distance from all sides of cutter carrier 30.
5th kind of embodiment of the invention, with the 4th kind of embodiment of the invention the difference is that: as shown in figure 9, fly The disk of cutterhead 32 is equipped with groove 33, and groove 33 is the strip groove by the axle center, and traverses the disk of flying disc 32, more A installation and adjustment slot 322 is on the cell wall of the groove 33.Specifically, strip groove includes first carrying knife platform 323, the One counterweight platform 324, second carries knife platform 325 and the second counterweight platform 326.First carries the surface of knife platform 323, the first counterweight platform 324 The surface on surface, the second load 325 surface of knife platform and the second counterweight platform 326 is vertical with the disk of flying disc 32, and first carries knife platform 323 are arranged in parallel relatively with the second load knife platform 325, and the first counterweight platform 324 is arranged in parallel relatively with the second counterweight platform 326. In other embodiments, boss can also be equipped in the disk of flying disc 32, boss is the bar shaped boss by the axle center, and horizontal The disk of flying disc 32 is passed through, multiple installation and adjustment slots 322 are on the side wall of the boss.It specifically can be according to reality Situation flexible setting.
First carries the surface of knife platform 323 and the second load knife platform 325 equipped with equidistant installation and adjustment slot 322.In other realities It applies in example, the position of installation and adjustment slot 322 with no restriction can flexible design according to the actual situation.First counterweight platform 324 and second The position of the installation and adjustment slot 322 of counterweight platform 326 carries the installation and adjustment slot of knife platform 323 and the second load knife platform 325 with first respectively 322 position is centrosymmetric setting about the axle center of flying disc 32.Facilitated by designing equidistant installation and adjustment slot 322 Facilitate staff to precisely adjust the linear velocity of cutter 40 in carrying out workpiece cutting process, can also assist in staff The quickly and easily center of gravity of balance adjustment flying disc.
The installation and adjustment slot 322 of first load knife platform 323 and the second load knife platform 325 can be used for assembling cutter 40.On cutter 40 Screw hole 411 with second load knife platform 325 installation and adjustment slot 322 may be implemented to be directed at connection.The tip direction of cutter 40 is fixed Workpiece on workseat 10, and stretch out the outside of flying disc 32.When cutter 40 is fixed on the second load knife platform by fastener When 325 installation and adjustment slot 322, and consider when counterweight 50 is consistent with the weight of cutter 40, about axle center symmetrical second Lock a counterweight 50 on 322 position of installation and adjustment slot of counterweight platform 326 so that cutter carrier 30 center of gravity keep balance and It is overlapped or approaches with axle center and be overlapped.In order to which lever can be passed through further such that the center of gravity of cutter carrier 30 is overlapped with axle center Principle adjusts each mass screw at a distance from all sides of cutter carrier 30.
The present embodiment traverses the strip groove of the disk of flying disc 32 by being equipped in the disk of flying disc 32.And in bar shaped Cutter 40 is mounted in different installation and adjustment slots 322 at equal intervals in slot, different size of workpiece is cut to realize Processing, to expand the cutting range of fly cutter.Compared to by securing the workpiece against on chassis 31, cutter 40 is fixed on workpiece On seat 10, micro-nano structure machining tool 100 more can be avoided cutter 40 when being fixed on workseat 10 because being shaken by fast tool servo The limitation of dynamic frequency and the range for reducing work pieces process.In addition, when cutter carrier 30 is rotated with cutter 40, cutter 40 It can be translated as cutter carrier 30 is translated along lathe X-direction, so that the cutting path of cutter 40 changes, it is real Existing curved surface cutting processing, expands the application range of micro-nano structure machining tool 100.
As shown in Figure 10, in the present embodiment, cutter carrier 30 includes chassis 31 and flying disc 32, chassis 31 and flying disc 32 are detachably connected, and chassis 31, which matches to merge with tool apron 20, can drive flying disc 32 to rotate.Flying disc 32 and it is fixed on plummer 12 Workpiece be oppositely arranged.When chassis 31 or the long-time service of flying disc 32 so that chassis 31 or the surface of flying disc 32 generate defect, Or cannot run, it can be convenient staff and be replaced, to effectively improve the performance dimension of micro-nano structure machining tool 100 Shield.In the present embodiment, the surface periphery of flying disc 32 is equipped with equidistant second screw hole 321 of circle, the surface periphery on chassis 31 It also is provided with a circle equidistant third screw hole 311 corresponding with the second screw hole 321, the second screw hole 321 and third screw hole 311 are right Standard, and chassis 31 made by screw or screw and flying disc 32 is parallel to each other locking.In addition, equidistant by one circle of setting Second screw hole 321 can shift to avoid the center of gravity of cutter carrier 30.In other embodiments, chassis 31 and flying disc 32 On the position of the second screw hole 321 and third screw hole 311 be not construed as limiting.For example, the surface periphery of flying disc 32 is equipped with 4 second Screw hole 321, the second screw hole 321 is centered on axle center, square distribution.
Multiple fixation holes 312 that the axial face on chassis 31 is equipped with multiple connectors and equidistantly arranges, multiple connectors It is arranged in multiple fixation holes 312 one to one, by the assembly of chassis 31 on tool apron 20.In the present embodiment, the table on chassis 31 Face is equipped with one and encloses multiple fixation holes 312 at equal intervals, and each fixation hole 312 can be equipped with a connector, be used for chassis 31 It is assemblied on tool apron 20.The connector can be screw, screw, pin or holding part.In this way, cutter carrier 30 is just tight It is thickly fixed on tool apron 20.Therefore, it when tool apron 20 translates in lathe X-direction, also will accurately band cutter carry Disk 30 along lathe X-direction translation.When live spindle is in the case where the rotation of motor drives, cutter carrier 30 can also revolve Turn accurately to rotate under the rotation drive of main shaft.The cutter carrier 30 can rotate clockwise by live spindle of Z axis It can also rotate counterclockwise, to meet the process requirements of different workpieces.The position of fixation hole 312 on 31 surface of chassis can be with Flexible design according to the actual situation, the present invention is with no restriction.In other embodiments, chassis 31 can also pass through with flying disc 32 Vacuum suction, which is realized, fixes.In cutting process, since chassis 31 and flying disc 32 are tightly fastened by vacuum suction It can be convenient the disassembly of cutter carrier 30 and guarantee that cutter 40 is more stable during the cutting process, further increase processing essence Degree, to realize that micro-nano structure is processed.
As shown in Fig. 1 and Figure 11, workseat 10 can realize in the Z-axis direction automatically accurate translation.Workseat 10 wraps Include first movement platform 11 and the plummer 12 for being fixed on first movement platform 11.First movement platform 11 is in the Z-direction Upper translation simultaneously drives the accurate translation in the Z-direction of plummer 12.Plummer 12 is for fixing workpiece.In the present embodiment, Plummer 12 includes a supporting surface 121, and the workpiece is placed on supporting surface 121, and solid by screw, screw or fixed glue Due on loading end 121, avoiding workpiece that mobile or shaking occurs in cutting process, to influence the face of work pieces process Type precision.In other embodiments, plummer 12 further includes clamping piece and the height adjustment device that moves along lathe Y direction. When needing to process workpiece, by controlling the translation of clamping piece, so that the side of workpiece is held on clamping piece.When right When workpiece completes processing, by controlling the translation of clamping piece, the clamping piece being held on workpiece is unclamped.Utilize the folder of plummer 12 Gripping member can make workpiece be fixed on plummer 12 strongerly, workpiece is avoided to move in cutting process Or shake, to influence the machining accuracy of workpiece.When needing to carry out the cutting of different height to workpiece, height can also be passed through Regulating device accurately adjusts the height of workpiece, to improve the machining accuracy of workpiece.
As shown in Figure 1, the tool apron 20 can be moved along lathe X-direction (front-rear direction shown in figure).Institute Stating X-direction includes X-axis positive direction and X-axis negative direction.In the present embodiment, the X-axis positive direction is side facing forward shown in FIG. 1 To the X-axis negative direction is direction backwards shown in FIG. 1.The workseat 10 can be moved along machine Z-axis direction, the Z Axis direction includes Z axis positive direction and Z axis negative direction.In the present embodiment, the Z axis positive direction is the direction shown in FIG. 1 towards the right side, The Z axis negative direction is shown in FIG. 1 towards left direction.
The tool apron 20 being oppositely arranged with workseat 10 can realize in the X-axis direction automatically accurate translation.The present embodiment In, X-direction is orthogonal with Z-direction.It is convenient to the mobile accuracy that staff accurately controls tool apron 20 Yu workseat 10 in this way, Ensure that the workpiece for meeting micro-nano structure required precision can be cut during the cutting process.Tool apron 20 includes the second mobile platform 21 With the cutter carrier 22 for being fixed on the second mobile platform 21.Second mobile platform 21 is translated and is driven in the X-direction The accurate translation in the X-direction of cutter carrier 22.Since the X-direction and the Z-direction are in the same level On face, micro-nano structure machining tool 100 is allowed to realize micro-nano structure processing in Z-direction and X-direction to workpiece.This reality It applies in example, cutter carrier 22 includes a live spindle and the motor for driving live spindle rotation.The direction of the live spindle It is vertical and parallel with Z axis with the X-direction.The motor rotation can drive live spindle to rotate.Live spindle can be suitable Hour hands, which rotate, to be rotated counterclockwise, to meet the process requirements of different workpieces.It, can also be in other embodiments The live spindle rotation is driven by drive motor or other driving devices.The motor passes through setting rotational time and rotation Tarnsition velocity accurately drives live spindle to rotate.Tool apron 20 not only may be implemented to move in the X-axis direction in this way, but also can be with It drives live spindle to rotate by driving device, arbitrary curve cutter path out can be cooperated.
The micro-nano structure machining tool 100 of the embodiment of the present invention as a result, is fixed a cutting tool by being rotatably coupled in tool apron 20 Carrier 30, and cutter 40 is set on the surface of cutter carrier 30, and on the workseat 10 that is oppositely arranged with tool apron 20 Clamping workpiece, so that cutter 40 translates under drive in the rotation of cutter carrier 30 and along X-direction and cooperates workpiece in Z axis The movement in direction, which is got off, carries out fly cutting to workpiece, to realize the micro-nano structure processing of workpiece surface.Since cutter 40 exists The rotation of cutter carrier 30 drives lower rotation cutting workpiece, overcomes cutter in the vibration frequency of fast tool servo to workpieces processing The limitation of range, so that the range of work of the cutter 40 of micro-nano structure machining tool 100 expands, and micro-nano structure machining tool 100 pass through the Ultra-precision machining for being implemented in combination with large area complexity micro-nano structure of three kinds of motion modes.
The above disclosure is only the preferred embodiments of the present invention, cannot limit the right model of the present invention with this certainly It encloses, those skilled in the art can understand all or part of the processes for realizing the above embodiment, and wants according to right of the present invention Made equivalent variations is sought, is still belonged to the scope covered by the invention.

Claims (10)

1. a kind of micro-nano structure machining tool characterized by comprising workseat, the tool apron being oppositely arranged with the workseat, Cutter carrier and cutter, the tool apron include the shaft that axis extends along machine Z-axis direction, and the cutter carrier is loaded on institute Roller end is stated, the workseat can be moved along machine Z-axis direction, and the tool apron can be moved along lathe X-direction;
The cutter carrier includes chassis and flying disc, and the chassis, which is loaded on the tool apron and passes through tool apron, realizes rotation; The flying disc is removably laminated on the chassis and coaxial with the chassis;The disk of the flying disc is towards the work Part seat;
The disk of the flying disc is equipped at least two installation and adjustment slots, and two installation and adjustment slots are about the flying disc Axle center be centrosymmetric, the cutter is described loaded in installation and adjustment slot and the disk of the protrusion flying disc Cutter cooperates the tool apron to move and the workseat along lathe X-direction in the case where cutter carrying disc spins drive It is moved along machine Z-axis direction, to realize the micro-nano structure machining to workpiece.
2. micro-nano structure machining tool according to claim 1, which is characterized in that at least two installation and adjustment geosynclinal concave Set on the flying disc disk and be arranged in a straight line by the flying disc axle center.
3. micro-nano structure machining tool according to claim 1, which is characterized in that multiple installation and adjustment slot intervals are set Set and be at least arranged in a straight line by the flying disc axle center, the cutter loaded in an installation and adjustment slot and Protrude the disk.
4. micro-nano structure machining tool according to claim 3, which is characterized in that the disk of the flying disc is equipped with the One carries knife platform and the first counterweight platform, and the first load knife platform and the first counterweight platform are extended outwardly simultaneously by the flying disc axle center And it is symmetrical about the eccentric axial, described first carries the surface on the surface of knife platform and the first counterweight platform and the flying disc Disk it is vertical, several installation and adjustment slots be distributed in it is described first carry knife platform surface and the first counterweight platform surface On.
5. micro-nano structure machining tool according to claim 4, which is characterized in that the disk of the flying disc is equipped with the Two carry knife platform and the second counterweight platform, and the second load knife platform and the second counterweight platform are extended outwardly simultaneously by the flying disc axle center And it is symmetrical about the eccentric axial, described second carries the surface on the surface of knife platform and the second counterweight platform and the flying disc Disk it is vertical, the second load knife platform and the first load knife platform are vertically arranged, and the second counterweight platform and described the One counterweight platform is vertically arranged;Several installation institutes are placed on the surface of the second load knife platform and the surface of the second counterweight platform State the installation and adjustment slot of cutter.
6. micro-nano structure machining tool according to claim 1-5, which is characterized in that the flying disc further includes Counterweight, the counterweight is loaded in the installation and adjustment slot, and the counterweight is to the distance in axle center and the matter of counterweight The product of amount is equal to cutter to the product of the distance in axle center and the quality of cutter.
7. micro-nano structure machining tool according to claim 5, which is characterized in that the disk of the flying disc is recessed with two Open slot that is a symmetrical about the flying disc eccentric axial and running through the flying disc periphery, described first carries knife platform and described Second carries the vertical groove sidewall that knife platform is the same open slot, and the second counterweight platform and the first counterweight platform are another The vertical groove sidewall of open slot.
8. micro-nano structure machining tool according to claim 1-5, which is characterized in that all sides on the chassis Multiple balance elements are equidistantly equipped with, the distance of each balance element to flying disc week side is adjustable.
9. micro-nano structure machining tool according to claim 6, which is characterized in that the cutter includes knife handle and is connected to The cutting portion of the knife handle;The cutting portion is stacked at one end of the knife handle, and the cutting portion has backwards to the knife handle First cutting face and the second cutting face, first cutting face and second cutting face are arranged in angle.
10. micro-nano structure machining tool according to claim 1, which is characterized in that the disk of the flying disc is equipped with Groove, the groove is the strip groove by the axle center, and traverses the disk of the flying disc, multiple installation and adjustment slots On the cell wall of the groove.
CN201711203260.9A 2017-11-27 2017-11-27 Micro-nano structure machining tool Active CN108161487B (en)

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CN109366745A (en) * 2018-11-29 2019-02-22 上海运韩光电科技有限公司 A kind of fast tool servo device for the processing of optical prism roller
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