CN104932426B - Sound emission fly cutting micro-structure tool setting device and method - Google Patents
Sound emission fly cutting micro-structure tool setting device and method Download PDFInfo
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- CN104932426B CN104932426B CN201510329975.3A CN201510329975A CN104932426B CN 104932426 B CN104932426 B CN 104932426B CN 201510329975 A CN201510329975 A CN 201510329975A CN 104932426 B CN104932426 B CN 104932426B
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
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- G01N29/04—Analysing solids
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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- G—PHYSICS
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Abstract
Sound emission fly cutting micro-structure tool setting device and method, present invention relates particularly to be that diamond fly cutting carries out submicron order precision to the experimental provision and method of knife.The purpose of the present invention is to solve the problem of the linear three-dimensional microstructures of diamond sharp knife fly cutting high accuracy micron order are low to knife precision, the degree of automation is low, there is provided a kind of sound emission fly cutting micro-structure tool setting device and method.It includes acoustic emission sensor, signal amplifier, signal acquisition process device, computer, the live signal monitoring program independently write, workpiece are loaded platform, diamond fly cutter, flying disc.The present invention by acoustic emission detection cutting signal, can reach sub-micron to knife precision, ensure that feasibility of the diamond sharp knife fly-cutting physical dimension for less than 10 μm high-precision linear three-dimensional microstructures.Suitable for the linear three-dimensional microstructures surface problem of cutting tool of fly cutting high accuracy micron order.
Description
Technical field
The present invention is suitable for the solution of the linear three-dimensional microstructures surface problem of cutting tool of fly cutting high accuracy micron order, specifically
Refer to diamond fly cutting and carry out experimental provision and method of the submicron order precision to knife.
Background technology
The high-precision linear three-dimensional microstructures surface of micron order refers to rule periodic array and high-aspect-ratio geometry,
And it can realize the micro-structure surface of the specific functions such as optics, machinery, physics, biology.Optics with micro-structure surface
The advantages that element is respectively provided with small, low-power consumption, easy to carry and integration is good, has become the small photoelectricity of manufacture and leads at present
Interrogate the key components of product.
It is usually that 10 μm of manufacture methods with lower linear three-dimensional microstructures are mainly MEMS generally for high-precision micron order
Technology photoetching technique, etching technique, deposition and image etching technique etc. and the processing of energy secondary process technology laser beam, ion beam
Processing, electron beam process etc..But above-mentioned technology is in the prevalence of machining accuracy is poor, low production efficiency, manufacture is of high cost asks
Topic；Limited at the same time by processed baseplate material, majority can only all carry out periodic micro structure array on semi-conducting material
Processing, therefore limit the high performance new diseases such as new polymers, metal alloy.Add with MEMS technology and energy auxiliary
Work technology is compared, and ultraprecise diamond fly cutting technology has many advantages with its deterministic machining feature, such as can
Real three-dimensional structure is processed, the formed precision for processing part reaches submicron order, and surface roughness Ra reaches nm magnitudes, Neng Goujia
The structure of the big depth-to-width ratio of work and it is suitable for processing of multiple material etc..
Complete less than 1 μm precision to knife, be linear three-dimensional micro- using diamond fly cutting machining high-precision micron order
Necessary task before body structure surface, its precision directly have decided on whether that the processing of micron order scale three-dimensional microstructures can be completed,
Therefore seek suitable cutter presetting cutter method, improve heap high accuracy, reduce tool-setting error, be to ensure that diamond fly cutting is high-precision
Degree three-dimensional microstructures array is smoothed out, and improves machining accuracy, economic benefit, reduces the effective ways of cost.
In ultraprecise mechanical processing, common presetting cutter method is included manually to knife, automatic tool preset, optics to knife etc..Hand
Dynamic simple to knife principle, easily operated and widely applicable, e.g., Test-cut met, clearance gauge is to the skill in using a kitchen knife in cookery, and amesdial is to the skill in using a kitchen knife in cookery, switching pair
Skill in using a kitchen knife in cookery etc., but it is relatively low to knife precision, can not meet the linear three-dimensional microstructures of fly cutting high accuracy micron order.Current is automatic
Change presetting cutter method, e.g., tool setting gauge is complicated, it is also difficult to reach Ultra-precision Turning although higher to knife efficiency to skill in using a kitchen knife in cookery etc.
Requirement.Optics presetting cutter method, e.g., double CCD tool setting devices based on image procossing, system complex, device is flexible poor, cost compared with
Height, can not meet the processing request of the linear three-dimensional microstructures of diamond fly cutter fly-cutting high accuracy micron order.
The content of the invention
The purpose of the present invention is to solve the diamond linear three-dimensional microstructures of fly cutting high accuracy micron order to knife essence
Spend the problem of low, the degree of automation is low, there is provided a kind of sound emission fly cutting micro-structure tool setting device and method.
Sound emission fly cutting micro-structure tool setting device and method, including：Acoustic emission sensor, signal amplifier, signal
Acquisition Processor, computer and display, workpiece are loaded platform, rotary axis of machine tool, diamond fly cutter and flying disc.
Workpiece is fixed by the platform that is loaded.Acoustic emission sensor is installed on workpiece bottom or side, to ensure that signal passes
Efficiency is passed, vaseline is smeared between sensor and workpiece.Acoustic emission sensor successively with signal amplifier, built-in signal capture card
Computer be connected, by the software program independently write, real-time display acoustic emission signal, detects diamond over the display
Fly cutter contacts situation with workpiece.Diamond fly cutter is connected by flying disc with rotary axis of machine tool.
Collection, analysis and storage work to acoustic emission signal are completed on computers, and are shown in real time by display
Acoustic emission signal, while signal can also be stored.
The present invention has the advantages that relative to the prior art：
The present invention by acoustic emission detection cutting signal, can reach sub-micron to knife precision, be other methods institute not
It can complete, ensure that feasibility of the diamond fly cutter fly-cutting physical dimension for less than 10 μm high-precision linear three-dimensional microstructures；
Of low cost with quick and easy for installation, constructional device is flexible strong, high to knife precision, the advantage such as the degree of automation height；The present invention
While submicron order precision is completed to knife, by acoustic emission monitor(ing) signal, fly cutting state and Buddha's warrior attendant can also be analyzed
Stone fly cutter corner wear situation.
Brief description of the drawings
Fig. 1 is the sound emission fly cutting micro-structure tool setting device of the present invention and the structure diagram of method.
Embodiment
Embodiment one, illustrate present embodiment with reference to Fig. 1, and the sound emission fly cutting described in present embodiment is micro-
Structure tool setting device, it includes：Lathe Y-direction guide rail 1, rotary axis of machine tool 2, clump weight 3, flying disc 4, diamond fly cutter 5, sound hair
Penetrate sensor 7, workpiece is loaded platform 8, lathe Z-direction guide rail 9, signal amplifier 10, the computer of built-in signal capture card
11 and display.
The computer 11 and display of built-in signal capture card, the display letter of the computer 11 of the built-in signal capture card
The display signal input part of number output terminal and display connects；
The handle of a knife of diamond fly cutter 5 is fixed on the lower surface of flying disc 4；The side of flying disc 4 is fixed on rotary axis of machine tool 2
One end；The other end of rotary axis of machine tool 2 is fixed on the side of lathe Y-direction guide rail 1, and rotary axis of machine tool 2 is in lathe Y-direction guide rail 1
It is above vertical to move up and down；1 lower end of lathe Y-direction guide rail is fixed on lathe Z-direction guide rail 9, and lathe Y-direction guide rail 1 can be in lathe Z
Horizontal back-and-forth motion on direction guiding rail 9, lathe Z-direction guide rail 9 and lathe Y-direction guide rail 1, which coordinate, drives rotation axis to complete Z-direction, Y-direction shifting
It is dynamic；
The workpiece platform 8 that is loaded is located at the lower section of diamond fly cutter 5；Workpiece is loaded platform 8 for placing workpiece 6；Sound emission
Sensor 7 is embedded in and is fixed on workpiece and is loaded on platform 8, the audio signal output terminal connection signal of the acoustic emission sensor 7
The audio signal input of amplifier 10；The meter of the amplified signal output terminal connection built-in signal capture card of signal amplifier 10
The audio signal input of calculation machine 11.Computer-internal is equipped with data acquisition card and processor, while by computer program, it is complete
Real-time collection, record and the storage of paired acoustic emission signal, and the live signal of amplification is shown over the display.
Embodiment two, present embodiment are to the sound emission fly cutting micro-structure described in embodiment one
Tool setting device further limits, and in present embodiment, it further includes clump weight 3, and the clump weight 3 is fixed on the upper of flying disc 4
Surface, clump weight 3 are used for the dynamic balancing for adjusting rotary system.
Embodiment three, present embodiment are to the sound emission fly cutting micro-structure described in embodiment one
Tool setting device further limits, and in present embodiment, acoustic emission sensor 7 is mounted in workpiece by vaseline and is loaded on platform 8,
But process is not influenced.
Embodiment four, based on the sound emission fly cutting micro-structure tool setting device described in embodiment one
Method, it is realized by following steps：
It is loaded Step 1: workpiece 6 is placed on workpiece on platform 8, manual rotation rotary axis of machine tool 2 makes diamond fly cutter 5
Point of a knife is vertical with 6 surface of workpiece, after manual vertical direction is fed to the observation limit, stops vertical direction feeding, and it is accurate right to carry out
Knife；
Step 2: 2 rotary speed of rotary axis of machine tool is set to working status, while monitored in real time with acoustic emission sensor 7；
Continue the feeding of manual vertical direction, every time 10 μm of feeding, observation monitor signal change, stops 5 seconds after often completing primary feed
Clock, eliminates the signal delay of acoustic emission sensor 7, continuous feed M times, M is positive integer；Then 1 μm of feeding every time is changed to, is completed
Stopped 5 seconds after primary feed, such as no signal continues to feed, and such as finds signal amplitude rise, or there are periodic spikes after rise
Signal produces, then judges that diamond fly cutter 5 is contacted with workpiece 6, completes micron accuracies to knife；By many experiments and measurement,
Cutting depth can be proved at 1 μm, signal is obvious.
Step 3: micron order is completed to after, after 1 μm of the anteroposterior direction withdrawing of horizontal plane, changing tool setting position, every time
The front and rear feeding 100nm of horizontal direction, stops 5 seconds after completing primary feed, and such as no signal continues to feed, and such as finds signal width
Value rise, or have the generation of periodic spikes signal after rise, then it can be determined that diamond fly cutter 5 is contacted with workpiece 6, complete sub-micron
Class precision is to knife.Repeatedly knife experimental measurements are analyzed, the present invention three-dimensional micro- knot linear to fly cutting high accuracy micron order
During structure surface to knife precision below 1 μm, ensure workpiece surface quality, acoustic emission signal can identify the amount of feeding of 100nm, complete
Into submicron order to knife precision, at the same it is related to Material Physics mechanical property, point of a knife shape to knife precision, to the higher material of hardness
Material, the larger point of a knife of blunt round radius, can complete higher precision to knife.
Embodiment five, present embodiment are to the sound emission fly cutting micro-structure described in embodiment four
The method of tool setting device further limits, and in present embodiment, the signal acquisition rate of the acoustic emission sensor 7 is 0.1-
10MHz。
Embodiment six, present embodiment are to the sound emission fly cutting micro-structure described in embodiment four
The method of tool setting device further limits, and in present embodiment, the signal acquisition rate of acoustic emission sensor 7 is 1MHz.
Embodiment seven, present embodiment are to the sound emission fly cutting micro-structure described in embodiment four
The method of tool setting device further limits, and in present embodiment, 2 rotary speed of rotary axis of machine tool is 600-2000r/min.
Embodiment eight, present embodiment are to the sound emission fly cutting micro-structure described in embodiment four
The method of tool setting device further limits, and in present embodiment, 2 rotary speed of rotary axis of machine tool is 800r/min.
Above content is that a further detailed description of the present invention in conjunction with specific preferred embodiments, it is impossible to is assert
The specific implementation of the present invention is confined to these explanations.For this person of an ordinary skill in the technical field, do not taking off
On the premise of from present inventive concept, some simple deduction or replace can also be made, the present invention should be all considered as belonging to and be submitted
The scope of patent protection that determines of claims.
Claims (7)
1. the presetting cutter method of sound emission fly cutting micro-structure tool setting device, it is characterised in that：The sound emission fly cutting is micro-
Structure tool setting device includes the computer (11) and display of built-in signal capture card, the computer of the built-in signal capture card
(11) display signal output part and the display signal input part of display connects；It is characterized in that：It further includes voice sending sensor
Device (7), signal amplifier (10), lathe Y-direction guide rail (1), lathe Z-direction guide rail (9), workpiece are loaded platform (8), diamond fly cutter
(5), flying disc (4) and rotary axis of machine tool (2)；
The handle of a knife of diamond fly cutter (5) is fixed on the lower surface of flying disc (4)；The side of flying disc (4) is fixed on lathe rotation
One end of axis (2)；The other end of rotary axis of machine tool (2) is fixed on the side of lathe Y-direction guide rail (1), and rotary axis of machine tool (2) is in machine
It is vertical in bed Y-direction guide rail (1) to move up and down；Lathe Y-direction guide rail (1) lower end is fixed on lathe Z-direction guide rail (9), lathe Y-direction
Guide rail (1) can be horizontal on lathe Z-direction guide rail (9) back-and-forth motion；
The workpiece platform (8) that is loaded is located at the lower section of diamond fly cutter (5)；Workpiece is loaded platform (8) for placing workpiece (6)；Sound
Emission sensor (7) is embedded in and is fixed on workpiece and is loaded on platform (8), the voice signal output of the acoustic emission sensor (7)
The audio signal input of end connection signal amplifier (10)；Built in the amplified signal output terminal connection of signal amplifier (10)
The audio signal input of the computer (11) of data acquisition card；
This method specifically comprises the following steps：
It is loaded Step 1: workpiece (6) is placed on workpiece on platform (8), manual rotation rotary axis of machine tool (2) makes diamond fly cutter
(5) point of a knife is vertical with workpiece (6) upper surface, after manual vertical direction is fed to the observation limit, stops vertical direction feeding, carries out
Accurately to knife；
Step 2: rotary axis of machine tool (2) rotary speed is set to working status, while monitored in real time with acoustic emission sensor (7)；
Continue the feeding of manual vertical direction, every time 10 μm of feeding, observation monitor signal change, stops 5 seconds after often completing primary feed
Clock, eliminates the signal delay of acoustic emission sensor (7), continuous feed M times, M is positive integer；Then 1 μm of feeding every time is changed to, it is complete
Stopped 5 seconds after into primary feed, such as no signal continues to feed, and such as finds signal amplitude rise, or has the cycle sharp after rise
Peak-to-peak signal produces, then judges that diamond fly cutter (5) is contacted with workpiece (6), completes micron accuracies to knife；
Step 3: after completing micron order to knife, after 1 μm of the anteroposterior direction withdrawing of horizontal plane, tool setting position is changed, per sub-level
The front and rear feeding 100nm in direction, stops 5 seconds after completing primary feed, and such as no signal continues to feed, and such as finds signal amplitude liter
There is the generation of periodic spikes signal after height, or rise, then can be determined that diamond fly cutter (5) is contacted with workpiece (6), complete sub-micron
Class precision is to knife.
2. the presetting cutter method of sound emission fly cutting micro-structure tool setting device according to claim 1, it is characterised in that：Institute
State sound emission fly cutting micro-structure tool setting device and further include clump weight (3), the clump weight (3) is fixed on flying disc (4)
Upper surface, clump weight (3) are used for the dynamic balancing for adjusting rotary system.
3. the presetting cutter method method of sound emission fly cutting micro-structure tool setting device according to claim 1 or 2, its feature exist
In：Acoustic emission sensor (7) is mounted in workpiece by vaseline and is loaded on platform (8).
4. the presetting cutter method of sound emission fly cutting micro-structure tool setting device according to claim 1, it is characterised in that：Institute
The signal acquisition rate for stating acoustic emission sensor (7) is 0.1MHz-10MHz.
5. the presetting cutter method of sound emission fly cutting micro-structure tool setting device according to claim 1, it is characterised in that：Sound
The signal acquisition rate of emission sensor (7) is 1MHz.
6. the presetting cutter method of the sound emission fly cutting micro-structure tool setting device according to claim 1 or 4, its feature exist
In：Rotary axis of machine tool (2) rotary speed is 600r/min-2000r/min.
7. the presetting cutter method of the sound emission fly cutting micro-structure tool setting device according to claim 1 or 4, its feature exist
In：Rotary axis of machine tool (2) rotary speed is 800r/min.
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| CN108161487B (en) * | 2017-11-27 | 2019-10-22 | 深圳大学 | Micro-nano structure machining tool |
| CN108372322B (en) * | 2018-02-26 | 2019-07-05 | 长春理工大学 | Pyramid micro-structure fly cutter milling and cutting-up combined machine and processing method |
| CN112059402B (en) * | 2020-08-24 | 2022-06-03 | 长春理工大学 | Laser in-situ auxiliary single-point diamond fly-cutting device |
| CN114778699A (en) * | 2022-03-29 | 2022-07-22 | 哈尔滨工业大学 | Micro-grinding online nondestructive monitoring method based on acoustic emission technology |
| CN115635366A (en) * | 2022-10-12 | 2023-01-24 | 哈尔滨工程大学 | Large machine tool blade acoustic emission online monitoring system and method |
| CN117020245B (en) * | 2023-10-08 | 2024-01-12 | 中国工程物理研究院激光聚变研究中心 | Tool setting method based on longitudinal cutting depth of small relief angle sharp edge diamond lathe tool |
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| US8397572B2 (en) * | 2010-04-06 | 2013-03-19 | Varel Europe S.A.S. | Acoustic emission toughness testing for PDC, PCBN, or other hard or superhard materials |
| CN103419101A (en) * | 2012-05-21 | 2013-12-04 | 昆山华辰重机有限公司 | Working table movable type numerical control roll grinder grinding wheel automatic tool setting system |
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| 基于声发射技术的磨削监控系统开发与试验研究;柏航州等;《现代制造工程》;20080531(第5期);第121页右栏、第124页左栏、图1、7 * |
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Effective date of registration: 20191219 Address after: No.88 Jiangyan Avenue, Jiangyan Economic Development Zone Management Committee, Taizhou City, Jiangsu Province 225599 Patentee after: Jiangyan Economic Development Zone Chuang Chuang Center Address before: 150001 Harbin, Nangang, West District, large straight street, No. 92 Patentee before: Harbin Institute of Technology |