CN104932426A - Acoustic emission fly-cutter cutting microstructure cutter setting device and method - Google Patents
Acoustic emission fly-cutter cutting microstructure cutter setting device and method Download PDFInfo
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- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
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- G—PHYSICS
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- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
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Abstract
The invention discloses an acoustic emission fly-cutter cutting microstructure cutter setting device and method. The invention particularly relates to a diamond fly-cutter cutting submicron precision cutter setting experiment device and method. The problems of low cutter setting precision and low automation degree of a diamond sticker fly-cutter cutting high-precision micron linear three-dimensional microstructure are solved. The invention provides the acoustic emission fly-cutter cutting microstructure cutter setting device and method. The device comprises an acoustic emission sensor, a signal amplifier, a signal acquisition processor, a computer, a self-written real-time signal monitoring procedure, a special workpiece chucking platform, a diamond fly-cutter and a fly-cutter disc. According to the invention, acoustic emission is used to detect a cutting signal; submicron cutter setting precision can be realized; when the diamond sticker fly-cutting geometry size is below 10 microns, the high-precision linear three-dimensional microstructure is feasible; and the device and the method are suitable for fly-cutter cutting high-precision micron linear three-dimensional microstructure surface cutter setting problems.
Description
Technical field
The present invention is applicable to the solution of fly cutting high precision micron order linear three-dimensional microstructures surface problem of cutting tool, and what be specifically related to is experimental provision and the method that adamas fly cutting carries out the tool setting of submicron order precision.
Background technology
The linear three-dimensional microstructures surface of high precision micron order refers to have rule periodic array and high-aspect-ratio geometric configuration, and can realize the micro-structure surface of the specific functions such as optics, machinery, physics, biology.The advantages such as the optical element with micro-structure surface all has that volume is little, low-power consumption, easy to carry and integration are good, have become the key components manufacturing small photoelectricity and communication product at present.
Usually 10 μm are generally for high precision micron order and are mainly MEMS technology photoetching technique, etching technique, deposition and image etching technique etc. and the processing of power assist process technology laser beam, I.B.M., electron beam process etc. with the manufacture method of lower linear three-dimensional microstructures.But machining precision is poor, production efficiency is low, manufacturing cost is high problem that above-mentioned technology ubiquity; Simultaneously by the restriction of processed baseplate material, most all can only in the processing of the enterprising line period micro structure array of semiconductor material, because which limit new polymers, the contour performance new diseases of metal alloy.Compare with power assist process technology with MEMS technology, ultraprecise adamas fly cutting technology has a lot of advantage with its deterministic machining feature, ratio is if process real three-dimensional structure, the formed precision of processing parts reaches submicron order, surface roughness Ra reaches nm magnitude, can process the structure of large depth-to-width ratio and be suitable for the processing etc. of multiple material.
Complete the tool setting of less than 1 μm precision, it is the necessary task before application adamas fly cutting machining high-precision micron order linear three-dimensional microstructures surface, its precision directly determines the processing that whether can complete micron order yardstick three-dimensional microstructures, therefore suitable cutter presetting cutter method is sought, improve heap high precision, reducing tool-setting error, is that guaranty money's hard rock fly cutting high-precision three-dimensional micro structure array carries out smoothly, improve machining precision, economic benefit, the effective ways reduced costs.
In ultraprecise machining, conventional presetting cutter method comprises manual tool setting, automatic tool preset, optics tool setting etc.Manual tool setting principle is simple, be easy to operation and widely applicable, and e.g., Test-cut met, clearance gauge is to the skill in using a kitchen knife in cookery, and clock gauge, to the skill in using a kitchen knife in cookery, is transferred to the skill in using a kitchen knife in cookery etc., but its tool setting precision is lower, cannot meet the linear three-dimensional microstructures of fly cutting high precision micron order.Current robotization presetting cutter method, e.g., tool setting gauge is to the skill in using a kitchen knife in cookery etc., although tool setting efficiency is higher, complex structure, is also difficult to the requirement reaching Ultra-precision Turning.Optics presetting cutter method, e.g., based on two CCD tool setting devices of image procossing, system complex, device is flexible poor, and cost is higher, can not meet the processing request that adamas fly cutter flies to cut the linear three-dimensional microstructures of high precision micron order.
Summary of the invention
The object of the invention is, in order to solve the problem that adamas fly cutting high precision micron order linear three-dimensional microstructures tool setting precision is low, automaticity is low, to provide a kind of acoustic emission fly cutting microstructure tool setting device and method.
Acoustic emission fly cutting microstructure tool setting device and method, comprising: calibrate AE sensor, signal amplifier, signal acquisition process device, computing machine and display, workpiece are installed platform, rotary axis of machine tool, adamas fly cutter and flying disc.
Workpiece is fixed by the platform that is installed.Calibrate AE sensor is arranged on bottom workpiece or side, for ensureing signal transmission efficiency, between sensor and workpiece, smears vaseline.Calibrate AE sensor is connected with the computing machine of signal amplifier, built-in signal capture card successively, by the software program independently write, shows acoustic emission signal in real time over the display, detects adamas fly cutter and absorption surface situation.Adamas fly cutter is connected with rotary axis of machine tool by flying disc.
The collection of acoustic emission signal, analysis and storage work are completed on computers, and shows real-time acoustic emission signal by display, can also store signal simultaneously.
The present invention has following beneficial effect relative to prior art:
The present invention is by acoustic emission detection cutting signal, and can reach the tool setting precision of sub-micron, be that additive method can not complete, and ensure that adamas fly cutter flies to cut the feasibility that physical dimension is less than 10 μm high-precision linear three-dimensional microstructures; Have quick and easy for installation, with low cost, the advantages such as constructional device is flexible strong, and tool setting precision is high, and automaticity is high; The present invention, while completing the tool setting of submicron order precision, by acoustic emission monitor(ing) signal, can also analyze fly cutting state and adamas fly cutter corner wear situation.
Accompanying drawing explanation
Fig. 1 is the structural representation of acoustic emission fly cutting microstructure tool setting device of the present invention and method.
Embodiment
Embodiment one, composition graphs 1 illustrate present embodiment, acoustic emission fly cutting microstructure tool setting device described in present embodiment, it comprises: lathe Y-direction guide rail 1, rotary axis of machine tool 2, balancing weight 3, flying disc 4, adamas fly cutter 5, calibrate AE sensor 7, workpiece is installed platform 8, lathe Z-direction guide rail 9, signal amplifier 10, the computing machine 11 of built-in signal capture card and display.
The computing machine 11 of built-in signal capture card and display, the display output terminal of the computing machine 11 of described built-in signal capture card is connected with the display input end of display;
The handle of a knife of adamas fly cutter 5 is fixed on the lower surface of flying disc 4; The side of flying disc 4 is fixed on one end of rotary axis of machine tool 2; The other end of rotary axis of machine tool 2 is fixed on the side of lathe Y-direction guide rail 1, rotary axis of machine tool 2 vertical moving up and down on lathe Y-direction guide rail 1; Lathe Y-direction guide rail 1 lower end is fixed on lathe Z-direction guide rail 9, lathe Y-direction guide rail 1 can on lathe Z-direction guide rail 9 level movable, lathe Z-direction guide rail 9 and lathe Y-direction guide rail 1 coordinate and drive that turning axle completes Z-direction, Y-direction moves;
The workpiece platform 8 that is installed is positioned at the below of adamas fly cutter 5; Workpiece is installed platform 8 for place work piece 6; Calibrate AE sensor 7 embeds and is fixed on workpiece and is installed on platform 8, the voice signal input end of the audio signal output terminal connection signal amplifier 10 of described calibrate AE sensor 7; The amplified signal output terminal of signal amplifier 10 connects the voice signal input end of the computing machine 11 of built-in signal capture card.Computer-internal is equipped with data acquisition card and processor, simultaneously by computer program, completes the Real-time Collection to acoustic emission signal, record and storage, and shows the live signal of amplification over the display.
Embodiment two, present embodiment limit further the acoustic emission fly cutting microstructure tool setting device described in embodiment one, in present embodiment, it also comprises balancing weight 3, described balancing weight 3 is fixed on the upper surface of flying disc 4, and balancing weight 3 is for adjusting the transient equilibrium of rotary system.
Embodiment three, present embodiment limit further the acoustic emission fly cutting microstructure tool setting device described in embodiment one, in present embodiment, calibrate AE sensor 7 is mounted in workpiece by vaseline and is installed on platform 8, but does not affect process.
Embodiment four, method based on the acoustic emission fly cutting microstructure tool setting device described in embodiment one, it is realized by following steps:
Step one, workpiece 6 is placed on workpiece is installed on platform 8, manual rotation rotary axis of machine tool 2 makes adamas fly cutter 5 point of a knife vertical with workpiece 6 surface, and after manual vertical direction is fed to and observes the limit, the feeding of stopping vertical direction, carries out accurate tool setting;
Step 2, rotary axis of machine tool 2 rotational speed is set to duty, uses calibrate AE sensor 7 Real-Time Monitoring simultaneously; Continue the feeding of manual vertical direction, each feeding 10 μm, observation display signal intensity, stopped for 5 seconds after often completing primary feed, and eliminate the signal delay of calibrate AE sensor 7, continuous feed M time, M is positive integer; Then change each feeding 1 μm into, stopped for 5 seconds after completing primary feed, as not having signal to continue feeding, as found, signal amplitude raises, or has periodic spikes signal to produce after raising, then judge that adamas fly cutter 5 contacts with workpiece 6, complete micron accuracies tool setting; Through many experiments and measurement, can prove that cutting depth is 1 μm time, signal is obvious.
Step 3, complete micron order to after arriving, after the fore-and-aft direction withdrawing 1 μm of surface level, change is to cutter position, feeding 100nm before and after each horizontal direction, stopped for 5 seconds after completing primary feed, continue feeding as not having signal, as found, signal amplitude raises, or have periodic spikes signal to produce after raising, then can judge that adamas fly cutter 5 contacts with workpiece 6, complete the tool setting of submicron order precision.Repeatedly tool setting experimental measurements is analyzed, when the present invention is surperficial to the linear three-dimensional microstructures of fly cutting high precision micron order, tool setting precision is below 1 μm, ensure workpiece surface quality, acoustic emission signal can identify the amount of feeding of 100nm, complete submicron order tool setting precision, simultaneously tool setting precision and Material Physics mechanical property, point of a knife shape are relevant, to hardness higher material, the larger point of a knife of blunt round radius, can complete more high precision tool setting.
Embodiment five, present embodiment limit further the method for the acoustic emission fly cutting microstructure tool setting device described in embodiment four, and in present embodiment, the signal acquisition rate of described calibrate AE sensor 7 is 0.1-10MHz.
Embodiment six, present embodiment limit further the method for the acoustic emission fly cutting microstructure tool setting device described in embodiment four, and in present embodiment, the signal acquisition rate of calibrate AE sensor 7 is 1MHz.
Embodiment seven, present embodiment limit further the method for the acoustic emission fly cutting microstructure tool setting device described in embodiment four, and in present embodiment, described rotary axis of machine tool 2 rotational speed is 600-2000r/min.
Embodiment eight, present embodiment limit further the method for the acoustic emission fly cutting microstructure tool setting device described in embodiment four, and in present embodiment, described rotary axis of machine tool 2 rotational speed is 800r/min.
Above content is in conjunction with concrete preferred implementation further description made for the present invention, can not assert that specific embodiment of the invention is confined to these explanations.For this person of an ordinary skill in the technical field, without departing from the inventive concept of the premise, some simple deduction or replace can also be made, all should be considered as belonging to the scope of patent protection that claims that the present invention submits to are determined.
Claims (8)
1. acoustic emission fly cutting microstructure tool setting device, it comprises computing machine (11) and the display of built-in signal capture card, and the display output terminal of computing machine (11) of described built-in signal capture card is connected with the display input end of display; It is characterized in that: further comprising calibrate AE sensor (7), signal amplifier (10), lathe Y-direction guide rail (1), lathe Z-direction guide rail (9), workpiece are installed platform (8), adamas fly cutter (5), flying disc (4) and rotary axis of machine tool (2);
The handle of a knife of adamas fly cutter (5) is fixed on the lower surface of flying disc (4); The side of flying disc (4) is fixed on one end of rotary axis of machine tool (2); The other end of rotary axis of machine tool (2) is fixed on the side of lathe Y-direction guide rail (1), and rotary axis of machine tool (2) is in upper vertical the moving up and down of lathe Y-direction guide rail (1); Lathe Y-direction guide rail (1) lower end is fixed on lathe Z-direction guide rail (9), and lathe Y-direction guide rail (1) can go up the movable of level at lathe Z-direction guide rail (9);
The workpiece platform (8) that is installed is positioned at the below of adamas fly cutter (5); Workpiece is installed platform (8) for place work piece (6); Calibrate AE sensor (7) embeds and is fixed on workpiece and is installed on platform (8), the voice signal input end of the audio signal output terminal connection signal amplifier (10) of described calibrate AE sensor (7); The amplified signal output terminal of signal amplifier (10) connects the voice signal input end of the computing machine (11) of built-in signal capture card.
2. acoustic emission fly cutting microstructure tool setting device according to claim 1, it is characterized in that: it also comprises balancing weight (3), described balancing weight (3) is fixed on the upper surface of flying disc (4), and balancing weight (3) is for adjusting the transient equilibrium of rotary system.
3. acoustic emission fly cutting microstructure tool setting device according to claim 1 and 2, is characterized in that: calibrate AE sensor (7) is mounted in workpiece by vaseline and is installed on platform (8).
4., based on the method for acoustic emission fly cutting microstructure tool setting device according to claim 1, it is characterized in that: it is realized by following steps:
Step one, workpiece (6) is placed on workpiece is installed on platform (8), manual rotation rotary axis of machine tool (2) makes adamas fly cutter (5) point of a knife vertical with workpiece (6) upper surface, after manual vertical direction is fed to and observes the limit, stop vertical direction feeding, carry out accurate tool setting;
Step 2, rotary axis of machine tool (2) rotational speed is set to duty, uses calibrate AE sensor (7) Real-Time Monitoring simultaneously; Continue the feeding of manual vertical direction, each feeding 10 μm, observation display signal intensity, stopped for 5 seconds after often completing primary feed, and eliminate the signal delay of calibrate AE sensor (7), continuous feed M time, M is positive integer; Then each feeding 1 μm is changed into, stopped for 5 seconds after completing primary feed, feeding is continued as there is no signal, as found, signal amplitude raises, or have periodic spikes signal to produce after raising, then judge that adamas fly cutter (5) contacts with workpiece (6), completes micron accuracies tool setting;
Step 3, complete micron order to after arriving, after the fore-and-aft direction withdrawing 1 μm of surface level, change is to cutter position, feeding 100nm before and after each horizontal direction, stopped for 5 seconds after completing primary feed, continue feeding as not having signal, as found, signal amplitude raises, or have periodic spikes signal to produce after raising, then can judge that adamas fly cutter (5) contacts with workpiece (6), complete the tool setting of submicron order precision.
5. acoustic emission fly cutting microstructure presetting cutter method according to claim 4, is characterized in that: the signal acquisition rate of described calibrate AE sensor (7) is 0.1MHz-10MHz.
6. acoustic emission fly cutting microstructure presetting cutter method according to claim 4, is characterized in that: the signal acquisition rate of calibrate AE sensor (7) is 1MHz.
7. the acoustic emission fly cutting microstructure presetting cutter method according to claim 4 or 5, is characterized in that: described rotary axis of machine tool (2) rotational speed is 600r/min-2000r/min.
8. the acoustic emission fly cutting microstructure presetting cutter method according to claim 4 or 5, is characterized in that: described rotary axis of machine tool (2) rotational speed is 800r/min.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108161487A (en) * | 2017-11-27 | 2018-06-15 | 深圳大学 | Micro-nano structure machining tool |
| CN108372322A (en) * | 2018-02-26 | 2018-08-07 | 长春理工大学 | Pyramid micro-structure fly cutter milling and cutting-up combined machine and processing method |
| CN112059402A (en) * | 2020-08-24 | 2020-12-11 | 长春理工大学 | Laser in-situ auxiliary single-point diamond fly-cutting device |
| CN115586262A (en) * | 2022-03-29 | 2023-01-10 | 哈尔滨工业大学 | Micro-grinding online nondestructive monitoring method based on acoustic emission technology |
| CN115635366A (en) * | 2022-10-12 | 2023-01-24 | 哈尔滨工程大学 | Large machine tool blade acoustic emission online monitoring system and method |
| CN117020245A (en) * | 2023-10-08 | 2023-11-10 | 中国工程物理研究院激光聚变研究中心 | Tool setting method based on longitudinal cutting depth of small relief angle sharp edge diamond lathe tool |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108161487A (en) * | 2017-11-27 | 2018-06-15 | 深圳大学 | Micro-nano structure machining tool |
| CN108372322A (en) * | 2018-02-26 | 2018-08-07 | 长春理工大学 | Pyramid micro-structure fly cutter milling and cutting-up combined machine and processing method |
| CN108372322B (en) * | 2018-02-26 | 2019-07-05 | 长春理工大学 | Pyramid micro-structure fly cutter milling and cutting-up combined machine and processing method |
| CN112059402A (en) * | 2020-08-24 | 2020-12-11 | 长春理工大学 | Laser in-situ auxiliary single-point diamond fly-cutting device |
| CN115586262A (en) * | 2022-03-29 | 2023-01-10 | 哈尔滨工业大学 | Micro-grinding online nondestructive monitoring method based on acoustic emission technology |
| CN115635366A (en) * | 2022-10-12 | 2023-01-24 | 哈尔滨工程大学 | Large machine tool blade acoustic emission online monitoring system and method |
| CN117020245A (en) * | 2023-10-08 | 2023-11-10 | 中国工程物理研究院激光聚变研究中心 | Tool setting method based on longitudinal cutting depth of small relief angle sharp edge diamond lathe tool |
| CN117020245B (en) * | 2023-10-08 | 2024-01-12 | 中国工程物理研究院激光聚变研究中心 | Tool setting method based on longitudinal cutting depth of small relief angle sharp edge diamond lathe tool |
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