CN108126960A - A kind of exhaust gas processing device of magnetic control removal silicide particle - Google Patents
A kind of exhaust gas processing device of magnetic control removal silicide particle Download PDFInfo
- Publication number
- CN108126960A CN108126960A CN201611091074.6A CN201611091074A CN108126960A CN 108126960 A CN108126960 A CN 108126960A CN 201611091074 A CN201611091074 A CN 201611091074A CN 108126960 A CN108126960 A CN 108126960A
- Authority
- CN
- China
- Prior art keywords
- scraper
- receiving cavity
- processing device
- exhaust gas
- gas processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/043—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
- B08B9/045—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes the cleaning devices being rotated while moved, e.g. flexible rotating shaft or "snake"
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/04—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes
- B08B9/043—Cleaning the internal surfaces; Removal of blockages using cleaning devices introduced into and moved along the pipes moved by externally powered mechanical linkage, e.g. pushed or drawn through the pipes
Abstract
The present invention provides a kind of exhaust gas processing device of magnetic control removal silicide particle, including：First receiving cavity；Second receiving cavity, is connected to below the first receiving cavity, and is connected with the first receiving cavity；Air inlet pipe is connected to the first receiving cavity, for inputting tail gas into the first host cavity body；Scraper, in the first host cavity body；By moving magnet, it is embedded in scraper；Active magnet, it is external set on the first host cavity, for driving by moving magnet, move scraper side wall along the first host cavity body, to strike off the silicide particle being attached in the first host cavity body on side wall；Spray head in the second host cavity body, is discharged for spraying.The exhaust gas processing device of the present invention controls the movement of scraper by magnetic force, possesses good sealing performance, active magnet can be fully placed pipeline exterior, not interfere with the leakproofness of pipeline.Meanwhile active magnet is easy to be motor driven, and without using high pure nitrogen, advantageously reduces cost.
Description
Technical field
The invention belongs to field of semiconductor manufacture, are related to a kind of exhaust gas processing device of magnetic control removal silicide particle.
Background technology
Wet exhaust processor (Wet scrubber) is widely used in extension (EPI) system, for removing reaction gas
Body, such as TCS (trichlorosilane), HCl (hydrogen chloride) and dopant.Fig. 1 is shown as a kind of existing wet exhaust processor,
Including admission line, airflow direction is shown using arrow in figure.TCS will react generation silica dioxide granule, reaction with water
Formula is as follows：TCS(SiHCl3)+H2O->SiO2+H2+Cl-.Silica dioxide granule is usually produced when TCS molecules are in direct contact with water
It is raw, and complete humid region is flushed by the flow of spray head.
But there are a humidities between absolutely dry region (admittance area) and complete wet area (since spray head)
Transitional region, in this region, SiO2Particle is tended to adhere on the inner wall of admission line.These silica dioxide granule meetings
Blocking pipeline influences negative regulation.Therefore, it is necessary to take steps to remove the silica dioxide granule of these accumulations.
A kind of existing improved technology scheme as shown in Fig. 2, be increase a scraper, scraper motor drive under rotate,
Silicon oxide residues are removed.Its advantage is simple in structure, greatly prolongs preventive maintenance (PM) period, and shortcoming is due to scraping
Knife is rotary part, and the sealing between scraper and pipeline is not fine, so as to increase the risk of protrusion leakage.
Existing another kind improved technology scheme is as shown in figure 3, it is provided with two nitrogen (N2) air inlet.When on cylinder
The nitrogen inlet in portion is opened, and piston moves downward, removal residual silica dioxide granule；When the nitrogen inlet of cylinder lower part is opened
It opens, piston upwards allow process gas flow easily to pass through pipeline.Its advantage is to possess good leakproofness, will not be revealed, and same
Sample can greatly prolong the preventive maintenance period, and shortcoming is to need to expend a large amount of high pure nitrogen, and when TCS, doping and oxygen
When gas reacts, compressed air (CDA) may result in explosion.
Therefore, how the exhaust gas processing device that a kind of air-tightness is good, can safely remove silicide particle is provided, is become
Those skilled in the art's important technological problems urgently to be resolved hurrily.
Invention content
In view of the foregoing deficiencies of prior art, the purpose of the present invention is to provide a kind of magnetic controls to remove silicide particle
Exhaust gas processing device, for solving in the prior art, exhaust gas processing device maintenance period is short, poor sealing, to there is safety hidden
The problems such as suffering from.
In order to achieve the above objects and other related objects, the present invention is provided at a kind of tail gas of magnetic control removal silicide particle
Device is managed, including：
First receiving cavity；
Second receiving cavity is connected to below the first receiving cavity, and is connected with the described first receiving cavity；
Air inlet pipe is connected to the first receiving cavity, for inputting tail gas into the first host cavity body；
Scraper, in the first host cavity body；
By moving magnet, it is embedded in the scraper；
Active magnet, it is external set on first host cavity, it is described by moving magnet for driving, make the scraper along first
Side wall moves in host cavity body, to strike off the silicide particle being attached in the first host cavity body on side wall；
Spray head in the second host cavity body, is discharged for spraying, and makes to be entered by the described first receiving cavity body
The tail gas of the second receiving cavity is reacted with water, and the silicide particle for reacting generation is poured the second receiving cavity.
Optionally, the scraper is bar shaped, is longitudinally disposed in the first host cavity body；The scraper upper end passes through one
Bending part is connect with the bearing being set at the top of the first receiving cavity.
Optionally, the first receiving cavity is cylinder, and the bearing is set in the top of the described first receiving cavity
The heart, the transverse width of the bending part are substantially equal to the radius of the first receiving cavity.
Optionally, the length of the scraper is more than the half of the described first receiving housing depth.
Optionally, the air inlet pipe is set on the first receiving cavity wall.
Optionally, the scraper is end to end, is horizontally placed in the first host cavity body, in the active magnet
It is moved up and down under drive.
Optionally, the first receiving cavity is cylinder；The scraper is circular ring shape, may be used also while moving up and down
To be rotated horizontally under the drive of the active magnet.
Optionally, first gradually increase is gradually reduced the longitudinal section width of the scraper again from top to bottom.
Optionally, the air inlet pipe is set at the top of the first receiving cavity.
Optionally, the material of the scraper includes polytetrafluoroethylene (PTFE).
As described above, the exhaust gas processing device of the kind magnetic control removal silicide particle of the present invention, has the advantages that：
The exhaust gas processing device of the magnetic control removal silicide particle of the present invention controls the movement of scraper by magnetic force, wherein, active magnet
Control controls the movement of scraper by moving magnet.The exhaust gas processing device of the magnetic control removal silicide particle of the present invention possesses
Good sealing performance, active magnet can be fully placed pipeline exterior, not interfere with the leakproofness of pipeline.It is meanwhile main
Moving magnet is easy to be motor driven, and without using high pure nitrogen, advantageously reduces cost.
Description of the drawings
Fig. 1 is shown as a kind of structure diagram of existing wet exhaust processor.
Fig. 2 is shown as a kind of structure diagram of existing wet exhaust processor with revolving scraper.
Fig. 3 be shown as it is existing it is a kind of with nitrogen flooding take offence cylinder wet exhaust processor structure diagram.
Fig. 4 is shown as structure of the exhaust gas processing device of the magnetic control removal silicide particle of the present invention in embodiment one and shows
It is intended to.
Fig. 5 is shown as the vertical view of exhaust gas processing device shown in Fig. 4.
Fig. 6 is shown as structure of the exhaust gas processing device of the magnetic control removal silicide particle of the present invention in embodiment two and shows
It is intended to.
Fig. 7 is shown as the vertical view of exhaust gas processing device shown in Fig. 6.
The A-A1 of structure shown in Fig. 8 Fig. 7 is to sectional view.
Component label instructions
1 first receiving cavity
2 second receiving cavitys
3 air inlet pipe
4 scrapers
5 by moving magnet
6 active magnet
7 silicide particles
8 spray heads
9 bending parts
10 bearings
Specific embodiment
Illustrate embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this specification
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.
Fig. 4 is please referred to Fig. 8.It should be noted that the diagram provided in the present embodiment only illustrates this in a schematic way
The basic conception of invention, package count when only display is with related component in the present invention rather than according to actual implementation in schema then
Mesh, shape and size are drawn, and kenel, quantity and the ratio of each component can be a kind of random change during actual implementation, and its
Assembly layout kenel may also be increasingly complex.
Embodiment one
The present invention provides a kind of exhaust gas processing device of magnetic control removal silicide particle, referring to Fig. 4, being shown as the tail gas
The structure diagram of processing unit, including：
First receiving cavity 1；
Second receiving cavity 2 is connected to 1 lower section of the first receiving cavity, and is connected with the described first receiving cavity 1；
Air inlet pipe 3 is connected to the first receiving cavity 1, for inputting tail gas into the described first receiving cavity 1；
Scraper 4, in the described first receiving cavity 1；
By moving magnet 5, it is embedded in the scraper 4；
Active magnet 6, it is described by moving magnet 5 for driving outside the described first receiving cavity 1, make 4 edge of scraper
First receiving cavity 1 madial wall movement, to strike off the silicide particle 7 being attached on the first receiving 1 madial wall of cavity；
Spray head 8 in the described second receiving cavity 2, is discharged for spraying, and makes by the described first receiving cavity body 1
Tail gas into the described second receiving cavity 2 is reacted with water, and the silicide particle for reacting generation is poured second receiving
Cavity 2.
Specifically, the tail gas is the tail gas that epitaxy technique generates, including TCS (trichlorosilane), HCl (hydrogen chloride), mix
Miscellaneous dose etc..
In the present embodiment, the air inlet pipe 3 is set on the first receiving 1 side wall of cavity, and thicker arrow is used in Fig. 2
Head shows the airflow direction of tail gas.The spray head 8 is fixed by the bracket in the described second receiving cavity 2, is used in Fig. 2
Thinner arrow shows the water (flow) direction of spray.Wherein, the silicide being attached on the first receiving 1 madial wall of cavity
Grain 7 is from the reaction product of TCS and water.Although theoretically silicide particle is only in the second receiving cavity 2 equipped with spray head 8
Interior generation, but connected since the described first receiving cavity 1 accommodates cavity 2 with described second, in the first receiving cavity 1
There can be moist steam, and due to there is no the effect of the shower of flow, the silicide being created in the first receiving cavity 1
Grain can be assembled on the described first receiving 1 madial wall of cavity.The present invention be set to it is described first receiving cavity 1 in scraper 4 just
It is for striking off the silicide particle 7 being attached on the first receiving 1 madial wall of cavity.
As an example, the scraper 4 is bar shaped, it is longitudinally disposed in the first receiving cavity 1；4 upper end of scraper
It is connect by a bending part 9 with being set to the bearing 10 at 1 top of the first receiving cavity.Wherein, the first receiving cavity 1
For cylinder, the bearing 10 is set on the top center of the described first receiving cavity 1, and the transverse width of the bending part 9 is substantially
Equal to the radius of the described first receiving cavity 1.
Herein, the transverse width of the bending part 9 be substantially equal to it is described first receiving cavity 1 radius refer to the scraper
4 blade is theoretically close to the described first receiving 1 inner wall of cavity, but is not excluded for receiving with described first due to error etc.
There is small gap between 1 inside of reservoir body.In the present embodiment, which is not more than 5mm.
In order to reach larger stripping areas, in the present embodiment, the length of the scraper 4 is preferably greater than described first to receive
The half of 1 height of reservoir body.The material of the scraper 4 includes but not limited to polytetrafluoroethylene (PTFE).
Particularly, the scraper 4 is to pass through magnetic drive.Fig. 5 is shown as the vertical view of the exhaust gas processing device, wherein
The active magnet 6 and the direction of motion by moving magnet 5 are shown using arrow.The active magnet 6 and both may be used by moving magnet 5
Think clockwise, or counterclockwise.
Specifically, the active magnet 6 is driven by being set on the external motor of first, second host cavity, work as institute
State active magnet 6 around described first, second receiving cavity movement when, be embedded in the scraper by moving magnet by magnetic force band
It is dynamic, so that the scraper 4 is moved along the first receiving 1 madial wall of cavity, strike off and be attached to 1 inside of the first receiving cavity
Silicide particle 7 on wall.The exhaust gas processing device of the magnetic control removal silicide particle of the present invention possesses good sealing performance,
Active magnet can be fully placed pipeline exterior, not interfere with the leakproofness of pipeline.Meanwhile active magnet be easy to it is electric
Machine drives, and without using high pure nitrogen, advantageously reduces cost.
Embodiment two
The difference lies in the structure of scraper is different from movement locus with embodiment one for the present embodiment.
Referring to Fig. 6, it is shown as the structure diagram of exhaust gas processing device described in the present embodiment.Wherein, the scraper 4
It is end to end, it is horizontally placed in the first receiving cavity 1, can be moved up and down under the drive of the active magnet.
Specifically, the first receiving cavity 1 can be but be not limited to cylinder, the outer margin contour of the scraper 4 and institute
The cross section inner edge profile for stating the first receiving cavity 1 is adapted, in favor of moving up and down for the scraper 4.
In the present embodiment, the first receiving cavity 1 is preferably cylindrical, and the scraper 4 is circular ring shape so that described to scrape
Knife 4 can also rotate horizontally while moving up and down under the drive of the active magnet, be conducive to improve removal silicide
The efficiency of particle.
In the present embodiment, the air inlet pipe 3 is set to 1 top of the first receiving cavity.The material of the scraper 4 includes
But it is not limited to polytetrafluoroethylene (PTFE).
Referring to Fig. 7, the vertical view of exhaust gas processing device described in the present embodiment is shown as, wherein being shown using arrow
The active magnet 6 and the direction of motion by moving magnet 5.The active magnet 6 and by moving magnet 5 both can be it is clockwise,
Can be counterclockwise.
Referring to Fig. 8, be shown as the A-A1 of structure shown in Fig. 7 to sectional view, it is seen that the longitudinal section width of the scraper 4 from
Gradually increase is gradually reduced again for upper and lower elder generation.The blade edge of width gradual change can more effectively shovel down silicide particle 7.This
In embodiment, it is described it is gradual increase or be gradually decreased as linear change, in other embodiments, or nonlinear change,
Protection scope of the present invention should not be excessively shown herein.
In conclusion the exhaust gas processing device of the magnetic control removal silicide particle of the present invention controls the fortune of scraper by magnetic force
It is dynamic, wherein, the control of active magnet controls the movement of scraper by moving magnet.The magnetic control removal silicide particle of the present invention
Exhaust gas processing device possesses good sealing performance, and active magnet can be fully placed pipeline exterior, not interfere with pipeline
Leakproofness.Meanwhile active magnet is easy to be motor driven, and without using high pure nitrogen, advantageously reduces cost.So
The present invention effectively overcomes various shortcoming of the prior art and has high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all can carry out modifications and changes under the spirit and scope without prejudice to the present invention to above-described embodiment.Cause
This, those of ordinary skill in the art is complete without departing from disclosed spirit and institute under technological thought such as
Into all equivalent modifications or change, should by the present invention claim be covered.
Claims (10)
1. a kind of exhaust gas processing device of magnetic control removal silicide particle, which is characterized in that including：
First receiving cavity；
Second receiving cavity is connected to below the first receiving cavity, and is connected with the described first receiving cavity；
Air inlet pipe is connected to the first receiving cavity, for inputting tail gas into the first host cavity body；
Scraper, in the first host cavity body；
By moving magnet, it is embedded in the scraper；
Active magnet, it is external set on first host cavity, it is described by moving magnet for driving, make the scraper along the first receiving
Inside cavities wall moves, to strike off the silicide particle being attached in the first host cavity body on side wall；
Spray head in the second host cavity body, is discharged for spraying, and makes as described in entering the described first receiving cavity body
The tail gas of second receiving cavity is reacted with water, and the silicide particle for reacting generation is poured the second receiving cavity.
2. the exhaust gas processing device of magnetic control removal silicide particle according to claim 1, it is characterised in that：The scraper
For bar shaped, it is longitudinally disposed in the first host cavity body；The scraper upper end is by a bending part and is set to described first
Accommodate the bearing connection at the top of cavity.
3. the exhaust gas processing device of magnetic control removal silicide particle according to claim 2, it is characterised in that：Described first
Cavity is accommodated as cylinder, the bearing is set on the top center of the described first receiving cavity, the transverse width of the bending part
It is substantially equal to the radius of the first receiving cavity.
4. the exhaust gas processing device of magnetic control removal silicide particle according to claim 2, it is characterised in that：The scraper
Length be more than described first receiving housing depth half.
5. the exhaust gas processing device of magnetic control removal silicide particle according to claim 2, it is characterised in that：The air inlet
Pipe is set on the first receiving cavity wall.
6. the exhaust gas processing device of magnetic control removal silicide particle according to claim 1, it is characterised in that：The scraper
It is end to end, it is horizontally placed in the first host cavity body, is moved up and down under the drive of the active magnet.
7. the exhaust gas processing device of magnetic control removal silicide particle according to claim 6, it is characterised in that：Described first
Cavity is accommodated as cylinder；The scraper is circular ring shape, can also be in the drive of the active magnet while moving up and down
Lower horizontal rotation.
8. the exhaust gas processing device of magnetic control removal silicide particle according to claim 6, it is characterised in that：The scraper
Longitudinal section width from top to bottom first gradually increase be gradually reduced again.
9. the exhaust gas processing device of magnetic control removal silicide particle according to claim 6, it is characterised in that：The air inlet
Pipe is set at the top of the first receiving cavity.
10. the exhaust gas processing device of magnetic control removal silicide particle according to claim 1, it is characterised in that：It is described to scrape
The material of knife includes polytetrafluoroethylene (PTFE).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611091074.6A CN108126960A (en) | 2016-12-01 | 2016-12-01 | A kind of exhaust gas processing device of magnetic control removal silicide particle |
| TW106116181A TWI656921B (en) | 2016-12-01 | 2017-05-16 | Sio2 particle remover controlled by magnets |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611091074.6A CN108126960A (en) | 2016-12-01 | 2016-12-01 | A kind of exhaust gas processing device of magnetic control removal silicide particle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108126960A true CN108126960A (en) | 2018-06-08 |
Family
ID=62387664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611091074.6A Pending CN108126960A (en) | 2016-12-01 | 2016-12-01 | A kind of exhaust gas processing device of magnetic control removal silicide particle |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108126960A (en) |
| TW (1) | TWI656921B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108816990A (en) * | 2018-08-23 | 2018-11-16 | 芜湖职业技术学院 | Magnetic cleaning device and clean method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6759018B1 (en) * | 1997-05-16 | 2004-07-06 | Advanced Technology Materials, Inc. | Method for point-of-use treatment of effluent gas streams |
| CN1882398A (en) * | 2003-11-17 | 2006-12-20 | 英国氧气集团有限公司 | Exhaust gas treatment |
| CN201644459U (en) * | 2010-04-02 | 2010-11-24 | 上海晶盟硅材料有限公司 | Pipeline cleaning device and pipeline system for tail gas treatment during producing epitaxial wafers |
| US20130168317A1 (en) * | 2011-12-30 | 2013-07-04 | Vanderbeken Enterprises Ltd. Dba Drycake | Method and apparatus for removal of tars, resins, chars or volatiles from a liquid |
| CN103624014A (en) * | 2013-11-06 | 2014-03-12 | 江苏君鑫谊石油机械有限公司 | Descaling wax-removing device for oil field equipment |
| CN104154773A (en) * | 2014-05-15 | 2014-11-19 | 东南大学常州研究院 | Liquid removing device used outside water cooling type vertical condenser pipes |
| CN204114967U (en) * | 2014-09-30 | 2015-01-21 | 昆山国显光电有限公司 | Tail gas treatment device |
| CN204851387U (en) * | 2015-06-12 | 2015-12-09 | 天津北洋净达科技有限责任公司 | Environmental protection tail gas treatment ware |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0176659B1 (en) * | 1996-08-08 | 1999-03-20 | 김광호 | Apparatus for treating harmful components in waste gases |
| TWM353050U (en) * | 2008-10-29 | 2009-03-21 | Univ Far East | Water tower cleaning apparatus |
-
2016
- 2016-12-01 CN CN201611091074.6A patent/CN108126960A/en active Pending
-
2017
- 2017-05-16 TW TW106116181A patent/TWI656921B/en active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6759018B1 (en) * | 1997-05-16 | 2004-07-06 | Advanced Technology Materials, Inc. | Method for point-of-use treatment of effluent gas streams |
| CN1882398A (en) * | 2003-11-17 | 2006-12-20 | 英国氧气集团有限公司 | Exhaust gas treatment |
| CN201644459U (en) * | 2010-04-02 | 2010-11-24 | 上海晶盟硅材料有限公司 | Pipeline cleaning device and pipeline system for tail gas treatment during producing epitaxial wafers |
| US20130168317A1 (en) * | 2011-12-30 | 2013-07-04 | Vanderbeken Enterprises Ltd. Dba Drycake | Method and apparatus for removal of tars, resins, chars or volatiles from a liquid |
| CN103624014A (en) * | 2013-11-06 | 2014-03-12 | 江苏君鑫谊石油机械有限公司 | Descaling wax-removing device for oil field equipment |
| CN104154773A (en) * | 2014-05-15 | 2014-11-19 | 东南大学常州研究院 | Liquid removing device used outside water cooling type vertical condenser pipes |
| CN204114967U (en) * | 2014-09-30 | 2015-01-21 | 昆山国显光电有限公司 | Tail gas treatment device |
| CN204851387U (en) * | 2015-06-12 | 2015-12-09 | 天津北洋净达科技有限责任公司 | Environmental protection tail gas treatment ware |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108816990A (en) * | 2018-08-23 | 2018-11-16 | 芜湖职业技术学院 | Magnetic cleaning device and clean method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI656921B (en) | 2019-04-21 |
| TW201832838A (en) | 2018-09-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104517870A (en) | Liquid processing apparatus | |
| KR20200016271A (en) | Cleaning apparatus and cleaning method | |
| CN102513301A (en) | Megasonic cleaning device for wafer | |
| CN108126960A (en) | A kind of exhaust gas processing device of magnetic control removal silicide particle | |
| CN212236479U (en) | Building construction working face sprays dust fall heat sink | |
| CN110694415A (en) | Environment-friendly electric dust removal equipment for building site | |
| CN206997169U (en) | A kind of aluminum products surface cleaning apparatus | |
| CN103047839A (en) | Device and method for drying semiconductor silicon wafer | |
| CN101797714B (en) | Wafer online cleaning device of polishing machine | |
| CN205796834U (en) | Spray equipment | |
| CN207254052U (en) | A kind of environmental protection purifies absorption plant with chemical industry tail gas | |
| CN209487480U (en) | A kind of protective device and the wet-method etching equipment using the protective device | |
| CN112474524A (en) | Wafer QDR groove for semiconductor | |
| CN204637857U (en) | A kind of Water-fog dusting apparatus | |
| CN211051759U (en) | Spray gun assembly and powder spraying device | |
| CN111570367B (en) | Storage battery automatic cleaning and blow-drying equipment based on scroll support bars | |
| CN202138878U (en) | Fruit precooling and drying machine | |
| CN208526289U (en) | A kind of efficient oxidation blower fan system | |
| CN215744354U (en) | Cleaning device for electrostatic spraying equipment | |
| CN213511404U (en) | Gas purifying blower for producing coke | |
| CN217527007U (en) | Semiconductor waste gas treatment equipment | |
| CN212262803U (en) | Waste gas treatment device for chemical production | |
| CN110201925A (en) | A kind of Gear Processing blowing device | |
| CN209205003U (en) | A kind of fine de-sulfur device reducing analysis carbon blocking | |
| CN217376289U (en) | Power plant three-station telescopic-head funnel sealing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180608 |