CN108123358A - The linear damped system of Larger Dynamic scope laser and attenuator - Google Patents
The linear damped system of Larger Dynamic scope laser and attenuator Download PDFInfo
- Publication number
- CN108123358A CN108123358A CN201711452043.3A CN201711452043A CN108123358A CN 108123358 A CN108123358 A CN 108123358A CN 201711452043 A CN201711452043 A CN 201711452043A CN 108123358 A CN108123358 A CN 108123358A
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- Prior art keywords
- wedge
- shaped beam
- beam splitter
- laser
- larger dynamic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
- H01S3/10015—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by monitoring or controlling, e.g. attenuating, the input signal
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention proposes a kind of linear damped system of Larger Dynamic scope laser and attenuator, including the first wedge-shaped beam splitter, the second wedge-shaped beam splitter, the 3rd wedge-shaped beam splitter and translation stage；First wedge-shaped beam splitter is placed in parallel with the second wedge-shaped beam splitter, and the base plane of two wedge-shaped beam splitters is made to be mutually parallel；3rd wedge-shaped beam splitter is in one end of the second wedge-shaped beam splitter, and the laser after attenuation is reflected away from the 3rd wedge-shaped beam splitter；3rd wedge-shaped beam splitter and the second wedge-shaped beam splitter are mounted on translation stage, and the moving direction of translation stage is perpendicular to the normal direction of the second wedge-shaped beam splitter base plane.The present invention changes the attenuation multiple of laser by changing the relative positions of two wedge-shaped beam splitters.Laser is not only reflected by other media on wedge-shaped beam splitter surface, you can is decayed to light beam.There are mainly two types of advantages：1st, when decaying to high power laser, attenuator will not be caused to damage.2nd, reflecting surface machining accuracy is controlled, it is possible to the very convenient influence that must control attenuation to beam shape.
Description
Technical field
The invention belongs to optical metrology field, the laser power linear attenuation method of Larger Dynamic scope is related generally to.
Background technology
With the development of laser, laser energy develops to extremely strong extremely weak direction.
Existing laser attenuator assembly mostly realizes that this method attenuation multiple is limited using the method for neutral filter, and
The linearity is poor, and in the different position of same attenuator, its attenuation multiple also has certain variation to laser light incident, to realize big times
The attenuation of rate needs multi-disc attenuator to combine.It, should in the laser attenuation of power energy since the damage threshold of neutral filter is low
With there is sizable limitation in the middle.Due to the difference of the attenuation multiple on its different position, in large-caliber laser power energy
The application aspect of amount attenuation also has sizable restriction.
The content of the invention
Existing in the prior art to solve the problems, such as, the present invention proposes a kind of linear damped system of Larger Dynamic scope laser and declines
Subtract device.
The characteristics of the principle of the present invention is to utilize prism wedge high transmittance, antiradar reflectivity, it is right using two pieces of wedge type prisms
Light beam carries out the purpose that multiple reflections realize a wide range of laser power energy attenuation.Wedge type prism is a kind of common optics device
The characteristics of part, the present invention utilizes its antiradar reflectivity, is made into as Larger Dynamic scope laser line pad.The attenuator is only
Optical surface smooth and clean is wanted, attenuation multiple is just unrelated with the incoming position of hot spot.Since laser power energy only has seldom portion
Divide and absorbed, so its damage threshold is high, be can be applied to high-power (at least 1000W), bigbore laser power energy declines
Subtract, and the adjusting of attenuation multiple can be realized by adjusting the relative position of two pieces of prisms, it is easy to use.
Based on above-mentioned principle, the technical scheme is that：
A kind of linear damped system of Larger Dynamic scope laser, it is characterised in that：By two wedge shapes, beam splitter is parallel puts
It puts, the base plane of two wedge-shaped beam splitters is made to be mutually parallel；Need the bottom of the second wedge-shaped beam splitter of the laser decayed irradiation
Plane, reflected light after multiple reflections, are divided between the second wedge-shaped beam splitter and the first wedge-shaped beam splitter via the 3rd wedge shape
Shu Jing is reflected away.
Further preferred embodiment, a kind of linear damped system of Larger Dynamic scope laser, it is characterised in that：It needs to decline
The incident direction of the second wedge-shaped beam splitter of laser irradiation subtracted and the angle of the second wedge-shaped beam splitter base plane normal direction be (0 °,
10°]。
Further preferred embodiment, a kind of linear damped system of Larger Dynamic scope laser, it is characterised in that：Pass through tune
Relative position between the wedge-shaped beam splitter of two, section can adjust laser reflection number, realize attenuation adjustment.
Further preferred embodiment, a kind of linear damped system of Larger Dynamic scope laser, it is characterised in that：Laser is every
By primary event attenuation at least 90%.
A kind of Larger Dynamic scope laser line pad, it is characterised in that：Including the first wedge-shaped beam splitter, the second wedge shape point
Shu Jing, the 3rd wedge-shaped beam splitter and translation stage；
First wedge-shaped beam splitter is placed in parallel with the second wedge-shaped beam splitter, and the base plane for making two wedge-shaped beam splitters is mutual
It is parallel；3rd wedge-shaped beam splitter is in one end of the second wedge-shaped beam splitter, and the laser after attenuation is reflected from the 3rd wedge-shaped beam splitter
It goes out；3rd wedge-shaped beam splitter and the second wedge-shaped beam splitter are mounted on translation stage, and the moving direction of translation stage is perpendicular to second
The normal direction of wedge-shaped beam splitter base plane.
Further preferred embodiment, a kind of linear damped system of Larger Dynamic scope laser, it is characterised in that：From the 3rd
The laser direction of wedge-shaped beam splitter outgoing is parallel to the moving direction of translation stage.
Advantageous effect
The present invention changes the attenuation multiple of laser by changing the relative positions of two wedge-shaped beam splitters.Laser does not pass through
Other media only reflect on wedge-shaped beam splitter surface, you can decay to light beam.There are mainly two types of advantages：1st, to high-power
During laser attenuation, attenuator will not be caused to damage.2nd, reflecting surface machining accuracy is controlled, it is possible to very convenient to control attenuation pair
The influence of beam shape.
Description of the drawings
The linear damped system schematic diagram of Fig. 1 Larger Dynamic scope laser.
Specific embodiment
The present invention is described with reference to specific embodiment：
As shown in Figure 1, Larger Dynamic scope laser line pad in the present embodiment includes the first wedge-shaped beam splitter 1, the
Two wedge-shaped the 2, the 3rd wedge shape beam splitters 3 of beam splitter, translation stage.
First wedge-shaped beam splitter is placed in parallel with the second wedge-shaped beam splitter, and the base plane for making two wedge-shaped beam splitters is mutual
It is parallel, spacing 10mm；3rd wedge-shaped beam splitter is in one end of the second wedge-shaped beam splitter, and the laser after attenuation divides from the 3rd wedge shape
Shu Jing is reflected away；3rd wedge-shaped beam splitter and the second wedge-shaped beam splitter are mounted on translation stage, and the moving direction of translation stage hangs down
Directly in the normal direction of the first wedge-shaped beam splitter base plane, and the laser direction of the 3rd wedge-shaped beam splitter outgoing is parallel to translation stage
Moving direction.The relative position of the mobile whole wedge-shaped wedge-shaped beam splitter 2 of beam splitter 1, second of translation stage tune first can change sharp
The attenuation multiple of light.
Need the base plane of the second wedge-shaped beam splitter 2 of the laser decayed irradiation, reflected light the second wedge-shaped beam splitter 2 with
Between first wedge-shaped beam splitter 1 after multiple reflections, reflected away via the 3rd wedge-shaped beam splitter 3；Wherein need what is decayed
The angle of the incident direction and the second 2 base plane normal direction of wedge-shaped beam splitter of the second wedge-shaped beam splitter 2 of laser irradiation is 5 °.
The present invention realizes optical power attenuation using multiple reflections of the light beam between two wedge-shaped beam splitters.This method has
The advantages that variation of beam quality after attenuation is small, and attenuation multiple is adjustable, and attenuation multiple is big.
Claims (6)
1. a kind of linear damped system of Larger Dynamic scope laser, it is characterised in that：Two wedge-shaped beam splitters are placed in parallel, make two
The base plane of a wedge shape beam splitter is mutually parallel；The base plane of the second wedge-shaped beam splitter of the laser decayed irradiation is needed, instead
Light is penetrated between the second wedge-shaped beam splitter and the first wedge-shaped beam splitter after multiple reflections, via the 3rd wedge-shaped beam splitter reflection
It goes out.
2. a kind of linear damped system of Larger Dynamic scope laser according to claim 1, it is characterised in that：Need to decay swashs
The angle of the incident direction of the second wedge-shaped beam splitter of light irradiation and the second wedge-shaped beam splitter base plane normal direction be (0 °, 10 °].
3. a kind of linear damped system of Larger Dynamic scope laser according to claim 1, it is characterised in that：By adjusting two
Relative position between wedge-shaped beam splitter can adjust laser reflection number, realize attenuation adjustment.
4. a kind of linear damped system of Larger Dynamic scope laser according to claim 1, it is characterised in that：Laser often passes through one
Secondary reflection attenuation at least 90%.
5. a kind of Larger Dynamic scope laser line pad, it is characterised in that：Including the first wedge-shaped beam splitter, the second wedge-shaped beam splitting
Mirror, the 3rd wedge-shaped beam splitter and translation stage；
First wedge-shaped beam splitter is placed in parallel with the second wedge-shaped beam splitter, and the base plane for making two wedge-shaped beam splitters is mutually flat
Row；3rd wedge-shaped beam splitter is in one end of the second wedge-shaped beam splitter, and the laser after attenuation is reflected from the 3rd wedge-shaped beam splitter
It goes；3rd wedge-shaped beam splitter and the second wedge-shaped beam splitter are mounted on translation stage, and the moving direction of translation stage is perpendicular to the second wedge
The normal direction of shape beam splitter base plane.
6. a kind of linear damped system of Larger Dynamic scope laser according to claim 1, it is characterised in that：From the 3rd wedge shape point
The laser direction of beam mirror outgoing is parallel to the moving direction of translation stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711452043.3A CN108123358A (en) | 2017-12-28 | 2017-12-28 | The linear damped system of Larger Dynamic scope laser and attenuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711452043.3A CN108123358A (en) | 2017-12-28 | 2017-12-28 | The linear damped system of Larger Dynamic scope laser and attenuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108123358A true CN108123358A (en) | 2018-06-05 |
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ID=62231989
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711452043.3A Pending CN108123358A (en) | 2017-12-28 | 2017-12-28 | The linear damped system of Larger Dynamic scope laser and attenuator |
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| Country | Link |
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| CN (1) | CN108123358A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111555111A (en) * | 2020-05-19 | 2020-08-18 | 上海科技大学 | Hard X-ray free electron laser solid attenuator and attenuation control method |
| CN112436371A (en) * | 2020-11-19 | 2021-03-02 | 中国科学院西安光学精密机械研究所 | Large-magnification and magnification continuously adjustable laser attenuator |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2259622Y (en) * | 1995-12-14 | 1997-08-13 | 中国计量科学研究院 | Continuously-variable laser attenuator |
| US6497490B1 (en) * | 1999-12-14 | 2002-12-24 | Silicon Light Machines | Laser beam attenuator and method of attenuating a laser beam |
| CN102564611A (en) * | 2012-01-04 | 2012-07-11 | 西安电子科技大学 | High-power laser wave front measuring instrument and wave front measuring method |
| CN102591007A (en) * | 2012-03-29 | 2012-07-18 | 中国科学院上海光学精密机械研究所 | Optical attenuator with invariable continuous adjustable optical path |
| CN204269863U (en) * | 2014-12-26 | 2015-04-15 | 福州高意通讯有限公司 | A kind of adjustable optical attenuator based on thermo-optic effect |
-
2017
- 2017-12-28 CN CN201711452043.3A patent/CN108123358A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2259622Y (en) * | 1995-12-14 | 1997-08-13 | 中国计量科学研究院 | Continuously-variable laser attenuator |
| US6497490B1 (en) * | 1999-12-14 | 2002-12-24 | Silicon Light Machines | Laser beam attenuator and method of attenuating a laser beam |
| CN102564611A (en) * | 2012-01-04 | 2012-07-11 | 西安电子科技大学 | High-power laser wave front measuring instrument and wave front measuring method |
| CN102591007A (en) * | 2012-03-29 | 2012-07-18 | 中国科学院上海光学精密机械研究所 | Optical attenuator with invariable continuous adjustable optical path |
| CN204269863U (en) * | 2014-12-26 | 2015-04-15 | 福州高意通讯有限公司 | A kind of adjustable optical attenuator based on thermo-optic effect |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111555111A (en) * | 2020-05-19 | 2020-08-18 | 上海科技大学 | Hard X-ray free electron laser solid attenuator and attenuation control method |
| CN111555111B (en) * | 2020-05-19 | 2021-10-08 | 上海科技大学 | Hard X-ray free electron laser solid attenuator and attenuation control method |
| CN112436371A (en) * | 2020-11-19 | 2021-03-02 | 中国科学院西安光学精密机械研究所 | Large-magnification and magnification continuously adjustable laser attenuator |
| CN112436371B (en) * | 2020-11-19 | 2022-05-10 | 中国科学院西安光学精密机械研究所 | Large-magnification and magnification continuously adjustable laser attenuator |
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