A kind of light beam adjusting gear and method thereof of CO2 laser instrument
[technical field]
The present invention relates to a kind of light beam adjusting gear and method thereof of CO2 laser instrument.
[background technology]
The CO2 laser instrument is owing to himself characteristic, and its light beam presents oval hot spot many times, when being used for the machine work of CO2 laser marking, tend to make that line thickness is inconsistent like this; The beam quality that need get well during Laser Processing in addition could reach better machining effect with the point of laser focusing Cheng Gengxiao.
[summary of the invention]
The present invention provides a kind of light beam adjusting gear and method thereof of CO2 laser instrument, can CO2 laser instrument script ovalize hot spot be become non-oval hot spot, improve the laser ovality thereby reach, and the squeezed light spot size improves the purpose of beam quality.
The present invention provides a kind of light beam adjusting gear of CO2 laser instrument; Comprise: a CO2 laser instrument, at first reflecting optics of 1 on the light path, one second reflecting optics, one the 3rd reflecting optics, a polarization apparatus and a polarization light combination mirror sheet between second reflecting optics and the 3rd reflecting optics; This polarization light combination mirror sheet has the bundle plated film face that closes; Wherein, The reflecting surface of the reflecting surface of the reflecting surface of second reflecting optics and first reflecting optics and second reflecting optics is parallel relation; The reflecting surface of the reflecting surface of the 3rd reflecting optics and second reflecting optics is vertical relation, and the bundle plated film face that closes of the reflecting surface of the 3rd reflecting optics and polarization light combination mirror sheet is parallel relation.
The present invention also provides a kind of light beam method of adjustment of CO2 laser instrument, and it comprises the steps:
A, CO2 laser instrument output laser;
The laser incident of b, the output of CO2 laser instrument is through first reflecting optics, and first reflecting optics is divided into two bundle laser with incident laser;
C, via the two bundle laser that first reflecting optics is divided into, be respectively the first bundle laser and the second bundle laser, the first bundle laser continues along former road to propagate, and directly gets into incident polarization light combination mirror sheet; The second bundle laser-bounce gets into second reflecting optics;
D, the second bundle laser are selected 90 ° through polarization apparatus rear polarizer direction under the guiding of second reflecting optics, through the guiding of the 3rd reflecting optics, incide in the polarization light combination mirror sheet again;
E, polarization light combination mirror sheet are with the first bundle laser and the synthetic beam of laser of the second bundle laser.
The laser beam that the CO2 laser instrument sends through method of the present invention, can become non-oval hot spot with CO2 laser instrument script ovalize hot spot, improve the laser ovality thereby reach, and the squeezed light spot size improves the purpose of beam quality.
[description of drawings]
Combine embodiment that the utility model is done further to describe with reference to the accompanying drawings.
Fig. 1 is the synoptic diagram of the light beam adjustment of CO2 laser instrument of the present invention;
Fig. 2 is another synoptic diagram of the light beam adjustment of CO2 laser instrument of the present invention.
[embodiment]
Below in conjunction with description of drawings and embodiment the present invention is further specified.
Of Fig. 1 is CO2 laser beam synoptic diagram of the present invention; It comprises: the CO2 laser instrument 10 of input laser beam 100, at first, second, third reflecting optics 20,30,40 on the beam path, at the second and the 3rd reflecting optics 30, a polarization apparatus 50 and a polarization light combination mirror sheet 60 between 40, polarization light combination mirror sheet 60 has the bundle plated film face that closes that penetrates laser.
Wherein, the reflecting surface of the reflecting surface of first reflecting optics 20 and second reflecting optics 30 is parallel relation; The reflecting surface of the reflecting surface of the 3rd reflecting optics 40 and second reflecting optics 30 is 90 ° of vertical relations; The bundle plated film face that closes of the reflecting surface of the 3rd reflecting optics 40 and polarization light combination mirror sheet 60 is parallel relation.
Like Fig. 1; The laser beam 100 of CO2 laser instrument 10 output ovalizes; This oval-shaped laser beam 100 is at first through first reflecting optics 20; First reflecting optics 20 is separated into laser beam 101,102 liang of bundles of first, second laser beam half elliptic light beam, also simultaneously the guiding of first laser beam, 101 light paths is propagated along former road, and directly gets into incident polarization light combination mirror sheet 60.
Second laser beam 102 is spent to second reflecting optics 30 by 20 reflections 90 of first reflecting optics; Second laser beam 102 is passed through polarization apparatus 50 rear polarizer direction half-twists under the guiding of second reflecting optics 30; Be mapped to polarization light combination mirror sheet 60 through being guided into of the 3rd reflecting optics 3 again; This polarization light combination mirror sheet 60 in the polarization direction orthogonal two bundle half elliptic laser beams synthetic a branch of, improve the laser ovality thereby reach, and the squeezed light spot size improves the purpose of beam quality.
Like Fig. 2, polarization light combination mirror sheet 60 is a kind of eyeglasses with the design of special film system, can make the orthogonal laser in two bundle polarization directions synthetic a branch of; And this kind polarized lenses can only be directed against the orthogonal laser in two bundle polarization directions; Can't realize closing Shu Zuoyong to other like the laser that is parallel to each other, Here it is, and why the present invention needs polarization apparatus 50 to make the laser polarization direction half-twist, and A promptly as shown in Figure 2 representes the parallel plane of incidence light path in p10.6um polarization direction; I.e. first laser beam 101; B shown in Figure 2 representes the vertical as absolution light path in s10.6um polarization direction, and promptly second laser beam 102 is synthesized beam of laser through polarization light combination mirror sheet 60.
The laser beam that the CO2 laser instrument sends through method of the present invention, can become non-oval hot spot with CO2 laser instrument script ovalize hot spot, improve the laser ovality thereby reach, and the squeezed light spot size improves the purpose of beam quality.