CN108091729A - A kind of production method of solar cell and the implementation method of point contact - Google Patents

A kind of production method of solar cell and the implementation method of point contact Download PDF

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Publication number
CN108091729A
CN108091729A CN201711396358.0A CN201711396358A CN108091729A CN 108091729 A CN108091729 A CN 108091729A CN 201711396358 A CN201711396358 A CN 201711396358A CN 108091729 A CN108091729 A CN 108091729A
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CN
China
Prior art keywords
hole
point contact
implementation method
passivating film
solar cell
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Pending
Application number
CN201711396358.0A
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Chinese (zh)
Inventor
徐冠群
包健
张昕宇
金浩
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Zhejiang Jinko Solar Co Ltd
Jinko Solar Co Ltd
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Zhejiang Jinko Solar Co Ltd
Jinko Solar Co Ltd
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Priority to CN201711396358.0A priority Critical patent/CN108091729A/en
Publication of CN108091729A publication Critical patent/CN108091729A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022433Particular geometry of the grid contacts
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Photovoltaic Devices (AREA)

Abstract

This application discloses a kind of production method of solar cell and the implementation method of point contact, wherein, the implementation method of the point contact is included in the surface making diffusion layer and passivating film of silicon substrate;The passivating film is opened up out to dotted through hole, the through hole is corresponding with the position of emitter and/or back of the body electric field;Non- burn-through type slurry is printed in the through hole, dry and is sintered the non-burn-through type slurry.The production method of above-mentioned solar cell and the implementation method of point contact, since slurry does not burn the passivating film, only outputing the dotted region of through hole in advance can just be in contact with silicon substrate, therefore metallic region and the contact area of silicon substrate can be reduced, so as to reduce the compound of metallic region, the open-circuit voltage of solar cell is promoted, so as to promote the transfer efficiency of solar cell.

Description

A kind of production method of solar cell and the implementation method of point contact
Technical field
The invention belongs to photovoltaic apparatus manufacturing technology field, production method and point more particularly to a kind of solar cell The implementation method of contact.
Background technology
With the quick development of photovoltaic industry, efficiency of solar cell, which promotes speed, becomes slower and slower, before main next Coming from the battery efficiency gain that Si wafer quality is promoted and slurry optimization is brought becomes less and less, nowadays limits efficiency of solar cell The principal element of promotion comes from the compound of metal area.Present PERC (Passivated Emitter and Rear Cell) electricity Pond obtains fast development by feat of compared to conventional batteries (BSF) higher efficiency, and PERC batteries are able to fast lifting Thinking is still to reduce the size of metallic region area, and the conventional batteries back side is entirely Metal contact regions, which answers Conjunction is very serious, but PERC cell backsides, by the way of the contact of local metal, metallic region area only accounts for the back side gross area Less than 10%, nonmetallic contact area is by good passivation, therefore total compound in the back side has obtained greatly compared to conventional batteries Width declines, and the open-circuit voltage and transfer efficiency of PERC batteries are also so as to significantly being promoted.But PERC battery front side metals connect It is still the scheme contacted using line to touch, and so further includes N-type double-side cell, IBC electricity using the solar cell of line contact scheme The almost all of solar cell such as pond, and the compound of line contact area is limitation solar cell open-circuit voltage and battery now Where the main bottleneck that efficiency is further promoted.
The compound reduction of metal area mainly realizes that the first is exactly the continuous progress of metal paste by two ways, Bottleneck period is come into now;Another be exactly it is continuous reduce metallization area, but according to existing technical solution, just The back side is still very big using the pattern metal area of grid line formula.
The content of the invention
To solve the above problems, the present invention provides a kind of production method of solar cell and the realization sides of point contact Method, since slurry does not burn the passivating film, only outputing the dotted region of through hole in advance can just be in contact with silicon substrate, therefore Metallic region and the contact area of silicon substrate can be reduced, so as to reduce the compound of metallic region, promotes opening for solar cell Road voltage, so as to promote the transfer efficiency of solar cell.
A kind of implementation method of point contact provided by the invention, including:
Diffusion layer and passivating film are made on the surface of silicon substrate;
The passivating film is opened up out to dotted through hole, the through hole is corresponding with the position of emitter and/or back of the body electric field;
Non- burn-through type slurry is printed in the through hole, dry and is sintered the non-burn-through type slurry.
Preferably, in the implementation method of above-mentioned point contact, the shape by the through hole is circular, square or water chestnut Shape.
Preferably, it is described the passivating film is opened up out to dotted through hole to be in the implementation method of above-mentioned point contact:
The passivating film is opened up out to dotted through hole using laser, photoetching or slurry etching mode.
Preferably, in the implementation method of above-mentioned point contact, the mode using laser opens up out the passivating film Dotted through hole is:
Using the laser that frequency is 20KHz to 40KHz, power is 20W to 40W, speed is 10m/s to 50m/s by described in Passivating film opens up out dotted through hole.
Preferably, it is described non-burn-through type slurry is printed in the through hole to be in the implementation method of above-mentioned point contact:
Using the silk screen that spacing is 1100 μm to 1400 μm under the pressure of 55N to 65N, in the through hole described in printing Non- burn-through type slurry.
Preferably, it is described to make diffusion layer and passivating film on the surface of silicon substrate in the implementation method of above-mentioned point contact For:
Diffusion layer and passivating film are made in the front and back of the silicon substrate.
The production method of a kind of solar cell provided by the invention, using such as any one of them method system above Make point contact.
By foregoing description, the production method of above-mentioned solar cell provided by the invention and the realization side of point contact Method, since the surface that the implementation method of the point contact is included in silicon substrate makes diffusion layer and passivating film;The passivating film is opened Dotted through hole is set out, the through hole is corresponding with the position of emitter and/or back of the body electric field;Non- burn-through is printed in the through hole Type slurry dries and is sintered the non-burn-through type slurry, since slurry does not burn the passivating film, only outputs through hole in advance Dotted region can just be in contact with silicon substrate, therefore can reduce metallic region and the contact area of silicon substrate, so as to reduce gold Belong to the compound of region, the open-circuit voltage of solar cell is promoted, so as to promote the transfer efficiency of solar cell.
Description of the drawings
It in order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the schematic diagram of the implementation method of the first point contact provided by the embodiments of the present application;
Fig. 2 is the front schematic view of solar cell provided by the embodiments of the present application;
Fig. 3 is the schematic cross-section of non-burn-through type slurry along its length.
Specific embodiment
The core concept of the present invention is to provide a kind of production method of solar cell and the implementation method of point contact, energy Metallic region and the contact area of silicon substrate are enough reduced, so as to reduce the compound of metallic region, promotes the open circuit of solar cell Voltage, so as to promote the transfer efficiency of solar cell.
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work Embodiment belongs to the scope of protection of the invention.
The implementation method of the first point contact provided by the embodiments of the present application is as shown in Figure 1, Fig. 1 carries for the embodiment of the present application The schematic diagram of the implementation method of the first point contact supplied, this method comprises the following steps:
S1:Diffusion layer and passivating film are made on the surface of silicon substrate;
It should be noted that surface mentioned here can be front, it can be the back side, can also be front and back, It is not intended to limit, by taking Fig. 2 and Fig. 3 as an example, the situation for only realizing point contact in front is illustrated herein, wherein, Fig. 2 is this Shen Please the front schematic view of solar cell that provides of embodiment, including in the front of solar cell body 1 with dotted line circle The schematic diagram of non-burn-through type slurry out, and Fig. 3 is the schematic cross-section of non-burn-through type slurry along its length, it is seen that this The lower part of the non-burn-through type slurry 203 of kind is passivation film 202 and diffusion layer 201.
S2:The passivating film is opened up out to dotted through hole, the through hole is opposite with the position of emitter and/or back of the body electric field It should;
Illustrate that through hole described here, which is meant that, penetrates passivation film 202, and does not penetrate continuing with Fig. 2 and Fig. 3 Diffusion layer 201, here focus on having abandoned existing linear structure, but using dots structure, these through holes are respectively positioned on On one rule straight line, on the whole similar to a rule dotted line, and the shape and size of the through hole used here are not intended to limit, can be with Corresponding shape and size are selected according to actual demand, and are in emitter accordingly when opening up through hole in front Position opens up through hole, is to open up through hole in the position of back of the body electric field accordingly when overleaf opening up through hole, and works as on two sides simultaneously When opening up through hole, with regard to it is corresponding while emitter and carry on the back electric field position all open up through hole.
S3:Non- burn-through type slurry is printed in the through hole, dry and is sintered the non-burn-through type slurry.
It should be noted that as shown in figure 3, the generally linear of this non-burn-through type slurry 203 of printing, but only There is the diffusion layer 201 that can be just connected in the position of the through hole slurry on silicon substrate, and contact is there will be no at other positions, So as to reduce the compound of metallic region.
By foregoing description, the implementation method of the first point contact provided by the embodiments of the present application, due to being included in The surface of silicon substrate makes diffusion layer and passivating film;The passivating film is opened up out to dotted through hole, the through hole and emitter And/or the position of back of the body electric field is corresponding;Non- burn-through type slurry is printed in the through hole, dry and is sintered the non-burn-through type slurry Material, since slurry does not burn the passivating film, only outputing the dotted region of through hole in advance can just be in contact with silicon substrate, therefore Metallic region and the contact area of silicon substrate can be reduced, so as to reduce the compound of metallic region, promotes opening for solar cell Road voltage, so as to promote the transfer efficiency of solar cell.
The implementation method of second of point contact provided by the embodiments of the present application is in the realization side of the first above-mentioned point contact On the basis of method, following technical characteristic is further included:
The shape by the through hole is circular, square or diamond shape.
It should be noted that these shapes are also only a part of preferred embodiment, it actually can also be according to actual needs Corresponding shape of through holes is selected, can also be subsection line.
The implementation method of the third point contact provided by the embodiments of the present application is in the realization side of the first above-mentioned point contact On the basis of method, following technical characteristic is further included:
It is described the passivating film is opened up out to dotted through hole to be:
The passivating film is opened up out to dotted through hole using laser, photoetching or slurry etching mode.
Through hole can be more accurately made using these three modes, but production method is not limited to that three kinds of methods, Other modes can also be selected to make through hole according to actual needs.
The implementation method of 4th kind of point contact provided by the embodiments of the present application, is in the realization side of the third above-mentioned point contact On the basis of method, following technical characteristic is further included:
The passivating film is opened up out dotted through hole by the mode using laser:
Using the laser that frequency is 20KHz to 40KHz, power is 20W to 40W, speed is 10m/s to 50m/s by described in Passivating film opens up out dotted through hole.
The implementation method of 5th kind of point contact provided by the embodiments of the present application, be it is above-mentioned the first to the 4th kind of point contact Implementation method in it is any on the basis of, further include following technical characteristic:
It is described non-burn-through type slurry is printed in the through hole to be:
Using the silk screen that spacing is 1100 μm to 1400 μm under the pressure of 55N to 65N, in the through hole described in printing Non- burn-through type slurry.
The speed of this silk-screen printing can in 180mm/s to 200m/s, scraper be highly arranged on 650 microns to 1000 it is micro- Between rice, the non-burn-through type slurry so printed out is more secured.
The implementation method of 6th kind of point contact provided by the embodiments of the present application is in the realization side of above-mentioned 5th kind of point contact On the basis of method, following technical characteristic is further included:
It is described to be in the surface of silicon substrate making diffusion layer and passivating film:
Diffusion layer and passivating film are made in the front and back of the silicon substrate.
In this case, it becomes possible to while reduce compound between the metallic region of front and back and silicon substrate, it reaches To the better effect for promoting battery conversion efficiency.
The production method of a kind of solar cell provided by the embodiments of the present application, using such as any one of them above Method makes point contact.
This production method due to make use of the above method make point contact, avoid line contact in the case of metallic region with The problem of silicon substrate contact area is excessive, therefore metallic region and the contact area of silicon substrate can be reduced, so as to reduce metal Region it is compound, the open-circuit voltage of solar cell is promoted, so as to promote the transfer efficiency of solar cell.
The foregoing description of the disclosed embodiments enables professional and technical personnel in the field to realize or use the present invention. A variety of modifications of these embodiments will be apparent for those skilled in the art, it is as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention The embodiments shown herein is not intended to be limited to, and is to fit to and the principles and novel features disclosed herein phase one The most wide scope caused.

Claims (7)

1. a kind of implementation method of point contact, which is characterized in that including:
Diffusion layer and passivating film are made on the surface of silicon substrate;
The passivating film is opened up out to dotted through hole, the through hole is corresponding with the position of emitter and/or back of the body electric field;
Non- burn-through type slurry is printed in the through hole, dry and is sintered the non-burn-through type slurry.
2. the implementation method of point contact according to claim 1, which is characterized in that the shape by the through hole is circle Shape, square or diamond shape.
3. the implementation method of point contact according to claim 1, which is characterized in that described that the passivating film is opened up into out point The through hole of shape is:
The passivating film is opened up out to dotted through hole using laser, photoetching or slurry etching mode.
4. the implementation method of point contact according to claim 3, which is characterized in that the mode using laser is by described in Passivating film opens up out dotted through hole:
Using the laser that frequency is 20KHz to 40KHz, power is 20W to 40W, speed is 10m/s to 50m/s by the passivation Film opens up out dotted through hole.
5. according to the implementation method of claim 1-4 any one of them point contacts, which is characterized in that described in the through hole Printing non-burn-through type slurry is:
Using the silk screen that spacing is 1100 μm to 1400 μm under the pressure of 55N to 65N, the non-burning is printed in the through hole Wear type slurry.
6. the implementation method of point contact according to claim 5, which is characterized in that described made on the surface of silicon substrate is expanded It dissipates layer and passivating film is:
Diffusion layer and passivating film are made in the front and back of the silicon substrate.
7. a kind of production method of solar cell, which is characterized in that using such as claim 1-6 any one of them sides Legal system makees point contact.
CN201711396358.0A 2017-12-21 2017-12-21 A kind of production method of solar cell and the implementation method of point contact Pending CN108091729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711396358.0A CN108091729A (en) 2017-12-21 2017-12-21 A kind of production method of solar cell and the implementation method of point contact

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711396358.0A CN108091729A (en) 2017-12-21 2017-12-21 A kind of production method of solar cell and the implementation method of point contact

Publications (1)

Publication Number Publication Date
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104966761A (en) * 2015-07-08 2015-10-07 四川银河星源科技有限公司 Manufacturing method of crystalline silicon solar cell
CN205970348U (en) * 2016-08-26 2017-02-22 奥特斯维能源(太仓)有限公司 Solar cell prints half tone with vein form grid line

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104966761A (en) * 2015-07-08 2015-10-07 四川银河星源科技有限公司 Manufacturing method of crystalline silicon solar cell
CN205970348U (en) * 2016-08-26 2017-02-22 奥特斯维能源(太仓)有限公司 Solar cell prints half tone with vein form grid line

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Application publication date: 20180529

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