CN108088955A - A kind of anti-interference gas sensor - Google Patents
A kind of anti-interference gas sensor Download PDFInfo
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- CN108088955A CN108088955A CN201711242427.2A CN201711242427A CN108088955A CN 108088955 A CN108088955 A CN 108088955A CN 201711242427 A CN201711242427 A CN 201711242427A CN 108088955 A CN108088955 A CN 108088955A
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- 238000005538 encapsulation Methods 0.000 claims abstract description 39
- 230000004044 response Effects 0.000 claims abstract description 23
- 238000012360 testing method Methods 0.000 claims abstract description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 48
- 235000019441 ethanol Nutrition 0.000 claims description 32
- 239000002086 nanomaterial Substances 0.000 claims description 21
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 7
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 claims description 5
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 17
- 238000005259 measurement Methods 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 282
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 22
- 239000000463 material Substances 0.000 description 14
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 6
- 244000247747 Coptis groenlandica Species 0.000 description 5
- 235000002991 Coptis groenlandica Nutrition 0.000 description 5
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- 229910052751 metal Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005265 energy consumption Methods 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- -1 SnO2 metal oxides Chemical class 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 2
- 238000007084 catalytic combustion reaction Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 238000012544 monitoring process Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 125000005909 ethyl alcohol group Chemical group 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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- 239000002048 multi walled nanotube Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002866 paraformaldehyde Polymers 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 230000026683 transduction Effects 0.000 description 1
- 238000010361 transduction Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0059—Avoiding interference of a gas with the gas to be measured
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
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- Chemical Kinetics & Catalysis (AREA)
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Abstract
The present invention provides a kind of anti-interference gas sensors, are related to gas sensor domain.The anti-interference gas sensor of the present invention, at least one set of array sensor chip is provided in encapsulation base plate, include at least one object gas gas sensor that the first response is respectively provided with to object gas and interference gas and at least one interference gas gas sensor to interference gas with the second response per group pattern sensor chip, wherein, it is arranged to per group pattern sensor chip when there is interference gas corresponding with a certain object gas under test gas, for distinguishing object gas and interference gas, interference of the exclusive PCR gas to measurement result, it prevents to report by mistake, improve the detection resolution and accuracy of object gas.
Description
Technical field
The present invention relates to gas sensor domain, more particularly to a kind of anti-interference gas sensor.
Background technology
How accurately the concentration of monitoring objective gas becomes the one very big of current gas sensor application field
Challenge, in the past few decades in, the gas sensor based on a variety of sensitive materials and various transduction mechanisms is increasingly becoming
Gesture.
At present, most commonly used gas sensor is probably divided into following a few classes in the market：Electrochemical sensor, semiconductor gas
Body sensor, infrared sensor, catalytic combustion type gas sensor.Electrochemical sensor is extensive due to the advantages of its high sensitivity
It is not highly desirable applied to the gas-monitorings such as formaldehyde, TVOC, ozone field, but in its selectivity and precision identification, and
For the integrability of sensors with auxiliary electrode than relatively low, the sensor integration field for high speed development is not a selection well.
Catalytic combustion type sensor is suitable for the detection of imflammable gas such as H2, CO, CH4.The wide application of this kind of sensor, volume
It is small, simple in structure, stability is good, shortcoming is that poor selectivity, detection gas are single.Infrared gas sensor is typical absorption
Optical gas sensor is to be respectively provided with each intrinsic spectral absorption according to gas to compose detection gas ingredient, due to such biography
The cost of sensor is higher, therefore is difficult in commonly used life.Metal oxide semiconductor is because of its low consumption, easily productionization, small
Many advantages, such as size, simple measurement, is widely used for detecting harmful and toxic gas (H2S, CO, H2 and NO2 etc.).
The sensor of most of traditional metal oxide semiconductor gas sensor material based on SnO2, feature
It is that sensitive material air-sensitive performance is single, high sensitivity, therefore, many micro semiconductor gas sensors based on micro-processing technology
It comes into being, they are to integrate micromation, low-power consumption, be easily assembled, easily batch production, the device of many advantages such as at low cost
Part.But since the selectivity of semiconductor transducer is poor, for object gas highly selective and anti-interference test in terms of still
It needs to improve.
The content of the invention
It is an object of the present invention to provide a kind of anti-interference gas sensor, to solve gas sensing in the prior art
Device is unable to effective district partial objectives for gas and interference gas and often leads to the problem of wrong report.
The present invention one is further objective is that will enable anti-interference gas sensor to be directed to plurality of target gas simultaneously
Body carries out anti-interference detection.
Another object of the present invention is that the volume for solving anti-interference gas sensor in the prior art is big, it is easy of integration not allow
The problem of change.
Particularly, the present invention provides a kind of anti-interference gas sensor, for distinguishing object gas and interference gas, prevent
Only generate wrong report, which is characterized in that including encapsulation base plate and at least one set of sensor array being installed in the encapsulation base plate
Chip, wherein,
Array sensor chip described in every group includes at least one object gas gas sensor and at least one interference gas
Body gas sensor, the object gas gas sensor are configured to be respectively provided with the first sound to the object gas and the interference gas
Should, the interference gas gas sensor is configured to only have the second response to the interference gas, in only described first response
During generation, the anti-interference gas sensor judges to contain object gas in the under test gas；And
The object gas gas sensor is MEMS gas sensors or nano material gas sensor.
Optionally, when the quantity of the array sensor chip is multigroup, multigroup array sensor chip is used for
At least one object gas of detection.
Optionally, when the quantity of the array sensor chip is multigroup, array sensor chip described in every group is examined
The object gas that the object gas of survey is detected with array sensor chip described in other any group differs.
Optionally, it is one or more with a kind of corresponding interference gas of object gas.
Optionally, the interference gas gas sensor is MEMS gas sensors or nano material gas sensor.
Optionally, the object gas is CO, and the interference gas is ethyl alcohol.
Optionally, the object gas is formaldehyde, and the interference gas is ethyl alcohol.
Optionally, the object gas is ethyl alcohol, and the interference gas is ammonia.
Optionally, the object gas is CH4, and the interference gas is CO.
Optionally, the encapsulation base plate is provided with pad.
Optionally, the substrate of the nano material gas sensor is silicon base, PCB substrates, ceramic bases etc..
Optionally, the object gas gas sensor is electrically connected by conductor wire line and the pad, the interference gas
Body gas sensor is electrically connected by conductor wire and the pad.
Optionally, the object gas gas sensor and/or the interference gas gas sensor pass through gluing or welding
Mode is fixed in the encapsulation base plate.
Optionally, the encapsulation base plate runs through the encapsulation base plate including at least one along the encapsulation base plate thickness direction
First passage mark point.
The anti-interference gas sensor of the present invention, is provided at least one set of array sensor chip, often in encapsulation base plate
Group pattern sensor chip includes at least one object gas gas that the first response is respectively provided with to object gas and interference gas
Quick element and at least one interference gas gas sensor to interference gas with the second response, wherein, per group pattern sensor
Chip is arranged to when there is interference gas corresponding with a certain object gas under test gas, for distinguishing object gas
And interference gas, interference of the exclusive PCR gas to measurement result prevent to report by mistake, improve the detection resolution of object gas
And accuracy.
Further, multigroup array sensor chip, different battle arrays are provided in anti-interference gas sensor of the invention
Sensor chip can carry out anti-interference detection to different object gas, to realize that a sensor can be to plurality of target
Gas carries out anti-interference detection, reduces volume, reduces cost.
The gas sensor of the present invention uses MEMS gas sensors and nano material gas sensor.MEMS gas sensors and tradition
Sensor compare, it has the characteristics that, and small, reliability is high, suitable for mass production, be easily integrated and realize intelligentized.
Meanwhile in the characteristic size of micron dimension it is allowd to complete the irrealizable function of some tradition machinery sensor institutes.It receives
Rice material gas sensor not only increases sensitivity, and greatly reduces senor operating temperature, the ruler for reducing sensor
It is very little.Therefore, the array sensor chip that above two gas sensor forms is encapsulated into ceramic cartridge and is integrated into an encapsulation
In pedestal, not only sensitivity is good, low in energy consumption but also small, can preferably adapt to integrated trend.
According to the accompanying drawings to the detailed description of the specific embodiment of the invention, those skilled in the art will be brighter
The above and other objects, advantages and features of the present invention.
Description of the drawings
Some specific embodiments of detailed description of the present invention by way of example, and not by way of limitation with reference to the accompanying drawings hereinafter.
Identical reference numeral denotes same or similar component or part in attached drawing.It should be appreciated by those skilled in the art that these
What attached drawing was not necessarily drawn to scale.In attached drawing：
Fig. 1 is the schematic plan structure chart of anti-interference gas sensor according to an embodiment of the invention；
Fig. 2 is the schematic plan structure chart of anti-interference gas sensor in accordance with another embodiment of the present invention；
Fig. 3 is the schematic plan structure chart of the anti-interference gas sensor of another embodiment according to the present invention；
Fig. 4 is the schematic plan structure diagram of anti-interference gas sensor according to an embodiment of the invention；
Fig. 5 is the schematic plan structure diagram of anti-interference gas sensor in accordance with another embodiment of the present invention.
Reference numeral in figure is：
1- encapsulation base plates, 11- metal pads, 12- first passage mark points；
2- array sensor chips, 21- object gas gas sensors, 22- interference gas gas sensors, 211- gas sensitives
Point sample area, 221- ceramic bases, 222- nano material point samples area；
3- gold threads, 4- wire bonding points；
The anti-interference gas sensors of 100-.
Specific embodiment
Since the sensibility of the gas sensor of semiconductor type is strong, so it has many gases obvious sound
Should, therefore anti-interference is poor, is frequently present of wrong report.For example the CO fuel gas alarms of family expenses can also have ethyl alcohol well simultaneously
Sensitivity, but ethyl alcohol is not belonging to pernicious gas, this has resulted in adding the alcoholic tune such as cooking wine in actual use
It is present with wrong report during material, unnecessary trouble is caused to many users.In view of the above-mentioned problems, inventor develop it is a kind of new
Sensor with anti-interference function.
Fig. 1 is the schematic plan structure chart of anti-interference gas sensor according to an embodiment of the invention.Such as Fig. 1 institutes
Show, a kind of anti-interference gas sensor 100, for detecting with the presence or absence of at least one object gas under test gas, including one
A encapsulation base plate 1 and array sensor chip 2.Encapsulation base plate 1 is used to provide installation foundation for array sensor chip 2.Encapsulation
Pedestal 1 can be ceramic package pedestal, and the size of size is selected according to actual demand.The quantity of array sensor chip 2 is at least
For one group, it is installed in encapsulation base plate 1, wherein, include at least one object gas gas sensitive element per group pattern sensor chip 2
Part 21 and at least one interference gas gas sensor 22.Object gas gas sensor 21 is MEMS gas sensors or nano material gas
Quick element, is respectively provided with object gas and interference gas the first response, and interference gas gas sensor 22 only has interference gas
Second response.When the only first response occurs, anti-interference gas sensor 100 judges to contain object gas under test gas；
When the first response and the second response occur simultaneously or the only second response occurs, anti-interference gas sensor 100 judges to be measured
Contain interference gas in gas.Above-mentioned object gas gas sensor is MEMS gas sensors or nano material gas sensor
Above-mentioned first response and the second response refer both to：When there are (object gas or interference during special component under test gas
Gas), gas sensor can be converted into electric signal by the special component and its with concentration dependent information, according to these electric signals
Power be obtained with the information related there are situation with special component in the environment.
The Anti-interference sensor of the present invention is respectively provided with the first response including at least one to object gas and interference gas
Object gas gas sensor and at least one interference gas gas sensor to interference gas with the second response are encapsulated into together
In one encapsulation base plate, when under test gas in the presence of the interference gas that can influence object gas measurement result, object gas gas
Quick element cooperates with interference gas gas sensor, distinguishes object gas and interference gas, when the only first response occurs,
Anti-interference gas sensor judges to contain object gas under test gas, with interference of the exclusive PCR gas to measurement result, prevent
Wrong report is only generated, improves the detection resolution and accuracy of object gas.
In one embodiment of the invention, when the quantity of the array sensor chip is multigroup, multigroup battle array
Sensor chip is used to detect at least one object gas.For example, when Anti-interference sensor includes three group pattern sensor cores
During piece, wherein two groups are used for the anti-interference detections of CO, another set is used for the anti-interference detection of formaldehyde.
Further, multigroup array sensor chip, every group of battle array are provided in anti-interference gas sensor 100 of the invention
The object gas that the object gas that sensor chip is detected is detected with other any group pattern sensor chips not phase
Together, to realize that a sensor can carry out anti-interference detection to plurality of target gas, cost is reduced.
In some embodiments, it is one or more with a kind of corresponding interference gas of object gas.For example, work as target
When gas is formaldehyde, the possible PARA FORMALDEHYDE PRILLS(91,95) of some formaldehyde gas sensors, methanol and ethyl alcohol are respectively provided with response, at this point, interference gas is
Methanol and ethyl alcohol, then interference gas gas sensor should be respectively provided with response to methanol and ethyl alcohol.
In order to preferably explain the present invention, some specific embodiments introduced below：
Embodiment one
Anti-interference sensor 100 as shown in Figure 1, includes 1 and one group pattern sensor chip 2 of encapsulation base plate.Array
Sensor chip 2 includes an object gas gas sensor 21 and an interference gas gas sensor 22.Object gas gas sensitive element
Part is CO gas sensors, and CO gas sensors are MEMS gas sensors, with accuracy of detection is high, small, light-weight, cost
The features such as low, low in energy consumption.One interference gas gas sensor 22 is Alcohol Gas Sensor.Alcohol Gas Sensor uses nano material
Gas sensor, not only sensitivity is good, low in energy consumption, and its is small.Anti-interference sensor in the present embodiment is mainly used for kitchen,
For detecting in kitchen with the presence or absence of CO, avoid damaging the person.
MEMS gas sensors generally comprise micro-heater and the gas sensitive being arranged on micro-heater.In the present embodiment
In, gas sensitive is the SnO2 metal oxides of doping, and CO and ethyl alcohol are responded.Gas sensitive is uniformly applied by machine
It is overlying in the gas sensitive point sample area 211 on CO gas sensors 21.
Nano material gas sensor generally comprises substrate and the nano material being arranged in substrate, wherein, nano material by
In at normal temperatures just with preferable sensitivity, therefore micro-heater need not be set.In the present embodiment, nano material is gold
Belong to the carbon nanotubes of doping or the graphene of functionalization, by machine coated on the nano material point sample area on Alcohol Gas Sensor 22
In 222, above-mentioned nano material then has relatively good sensitivity for ethyl alcohol, is not responded to but for CO, and above-mentioned nanometer
The sensor's stability and uniformity of material are all relatively good, can reach jamproof purpose.In addition, nano material gas sensitive element
Part can also work under normal temperature condition, and size is also smaller.The substrate of nano material gas sensor is ceramic bases 221, with ceramics
Encapsulation base plate is engaged, and uniformity is good.
In this embodiment, CO gas sensors and Alcohol Gas Sensor are fixed to ceramic package pedestal by way of gluing
Interior, in other embodiments, gas sensor can also be fixed in encapsulation base plate by welding.
Referring to Fig. 1, since CO gas sensors are MEMS gas sensors, including micro- heating plate and in micro- heating plate
Gas sensitive.Micro- heating plate needs to be electrical connected with two heating electrodes, and gas sensitive needs and two electrical phases of detecting electrode
Even, therefore, CO gas sensors are electrically connected by four gold threads and the metal pad 11 on encapsulation base plate 1 in the present embodiment.Second
The nano material used in alcohol gas sensor only needs to be electrically connected with two detecting electrodes, can work, be not required at normal temperatures
Additional heating electrode is wanted, therefore, Alcohol Gas Sensor is only needed through the metal pad 11 on two gold threads and encapsulation base plate 1
It is electrically connected.Together with above two gas sensor is bonded to metal pad 11 by gold thread 3, gold thread 3 and gas sensor, gold
Line 3 and the tie point of metal pad 11 are wire bonding point 4.
For the ease of the positioning of encapsulation base plate 1 and gas sensor, encapsulation base plate 1 further includes at least one along substrate thickness side
To the first passage mark point 12 through encapsulation base plate 1.
In above-described embodiment, a CO gas sensor and an Alcohol Gas Sensor are encapsulated in a ceramic package simultaneously
In pedestal, interference of the alcohol gas to CO can be solved, while reduces size sensor, reduces energy consumption.It preferably adapts to integrated
Change trend.
When anti-interference gas sensor 100 works, when there is ethyl alcohol under test gas, CO gas sensors and ethyl alcohol air-sensitive
Element can respond, at this point, anti-interference gas sensor 100 judges to contain ethyl alcohol under test gas；When under test gas
During containing CO, only CO gas sensors send response, and anti-interference gas sensor 100 judges to contain CO under test gas.
Embodiment two
Unlike above-mentioned specific embodiment, object gas gas sensor 21 be formaldehyde gas sensor, interference gas gas
Quick element 22 is Alcohol Gas Sensor.Formaldehyde gas sensor can be nano material gas sensor, and gas sensitive is Pt-RGO materials
Material.Alcohol Gas Sensor can be MEMS gas sensors, and gas sensitive is Pd-SnO2 materials.In the present embodiment, on encapsulation
The concrete structure and gas sensor of pedestal 1 and the connection relation of encapsulation base plate 1 etc. may be referred to embodiment one, not do herein superfluous
It states.
Embodiment three
Fig. 2 is the schematic plan structure chart of anti-interference gas sensor in accordance with another embodiment of the present invention.Such as Fig. 2
Shown, unlike above-mentioned specific embodiment, object gas gas sensor 21 and interference gas gas sensor 22 are MEMS
Gas sensor, gas sensitive are Pt-SnO2 materials and Pd-SnO2 materials respectively.Object gas gas sensor 21 is CH4 gas sensitive elements
Part, interference gas gas sensor 22 are CO gas sensors.In the present embodiment, the concrete structure and air-sensitive on encapsulation base plate 1
Connection relation of element and encapsulation base plate 1 etc. may be referred to embodiment one, and this will not be repeated here.
Example IV
Fig. 3 is the schematic plan structure chart of the anti-interference gas sensor of another embodiment according to the present invention.Such as Fig. 3
Shown, unlike above-mentioned specific embodiment, object gas gas sensor 21 and interference gas gas sensor 22 are nanometer
Material gas sensor, nano material are respectively Pt-MWCNT materials and CoNi-CNT materials.Object gas gas sensor 21 is second
Alcohol gas sensor, interference gas gas sensor 22 are ammonia gas sensor.In the present embodiment, on the specific of encapsulation base plate 1
Structure and the connection relation of gas sensor and encapsulation base plate 1 etc. may be referred to embodiment one, and this will not be repeated here.
Embodiment five
Fig. 4 is the schematic plan structure diagram of anti-interference gas sensor according to an embodiment of the invention.Such as Fig. 4
Shown, Anti-interference sensor 100 includes a 1 and two group pattern sensor chip 2 of encapsulation base plate.One group pattern sensor chip
2 include a CO gas sensor 21 and an Alcohol Gas Sensor 22, which is used to detect CO；It is another
Group pattern sensor chip 2 includes a formaldehyde gas sensor 21 and an Alcohol Gas Sensor 22, the group pattern sensor core
Piece 2 is used to detect formaldehyde.It in the present embodiment, can also be by a CO gas sensor, an Alcohol Gas Sensor and a first
Aldehyde gas sensor is encapsulated in simultaneously in a ceramic package encapsulation base plate, can not only be detected CO and formaldehyde respectively, but also can be reached
Jamproof purpose.In the present embodiment, the connection on the concrete structure and gas sensor and encapsulation base plate of encapsulation base plate is closed
System etc. may be referred to embodiment one, and this will not be repeated here.
Embodiment six
Fig. 5 is the schematic plan structure diagram of anti-interference gas sensor in accordance with another embodiment of the present invention.Such as
Shown in Fig. 5, Anti-interference sensor 100 includes a 1 and three group pattern sensor chip 2 of encapsulation base plate.Per group pattern sensor
Chip 2 includes an object gas gas sensor 21 and an interference gas gas sensor 22.Arbitrary two group patterns sensor
The object gas that chip 2 is detected differs.For example, the first group pattern sensor chip 2 detects CO, the second group pattern sensing
Device chip 2 detects formaldehyde, and the 3rd group pattern sensor chip 2 detection ethyl alcohol, interference gas corresponding with alcohol gas is ammonia.
In the present embodiment, anti-interference gas sensor using different array sensor chips 2 can to different object gas into
The anti-interference detection of row to realize that a sensor can carry out anti-interference detection to plurality of target gas, reduces cost.In this reality
It applies in example, embodiment is may be referred on the concrete structure and gas sensor of encapsulation base plate and the connection relation etc. of encapsulation base plate
One, this will not be repeated here.
So far, although those skilled in the art will appreciate that detailed herein have shown and described multiple showing for the present invention
Example property embodiment, still, without departing from the spirit and scope of the present invention, still can according to the present disclosure directly
Determine or derive many other variations or modifications consistent with the principles of the invention.Therefore, the scope of the present invention is understood that and recognizes
It is set to and covers other all these variations or modifications.
Claims (9)
1. a kind of anti-interference gas sensor for distinguishing object gas and interference gas, prevents to report by mistake, feature exists
In, including encapsulation base plate and at least one set of array sensor chip being installed in the encapsulation base plate, wherein,
Array sensor chip described in every group includes at least one object gas gas sensor and at least one interference gas gas
Quick element, the object gas gas sensor are configured to be respectively provided with the first response to the object gas and the interference gas,
The interference gas gas sensor is configured to only have the second response to the interference gas, occurs in only described first response
When, the anti-interference gas sensor judges to contain object gas under test gas；And
The object gas gas sensor is MEMS gas sensors or nano material gas sensor.
2. anti-interference gas sensor according to claim 1, which is characterized in that when the number of the array sensor chip
Measure for it is multigroup when, multigroup array sensor chip is for detecting at least one object gas.
3. anti-interference gas sensor according to claim 1 or 2, which is characterized in that when the array sensor chip
Quantity for it is multigroup when, object gas that array sensor chip described in every group is detected and array sensing described in other any group
The object gas that device chip is detected differs.
4. anti-interference gas sensor according to claim 1, which is characterized in that corresponding dry with a kind of object gas
Gas is disturbed as one or more.
5. anti-interference gas sensor according to claim 1, which is characterized in that the interference gas gas sensor is
MEMS gas sensors or nano material gas sensor.
6. anti-interference gas sensor according to claim 1, which is characterized in that the object gas is CO, described dry
Gas is disturbed as ethyl alcohol.
7. anti-interference gas sensor according to claim 1, which is characterized in that the object gas is formaldehyde, described
Interference gas is ethyl alcohol.
8. anti-interference gas sensor according to claim 1, which is characterized in that the object gas is ethyl alcohol, described
Interference gas is ammonia.
9. anti-interference gas sensor according to claim 1, which is characterized in that the object gas is CH4, described dry
Gas is disturbed as CO.
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