CN108088877A - 一种多功能半导体器件 - Google Patents
一种多功能半导体器件 Download PDFInfo
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- CN108088877A CN108088877A CN201711422166.2A CN201711422166A CN108088877A CN 108088877 A CN108088877 A CN 108088877A CN 201711422166 A CN201711422166 A CN 201711422166A CN 108088877 A CN108088877 A CN 108088877A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
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CN201711422166.2A CN108088877B (zh) | 2017-12-25 | 2017-12-25 | 一种多功能半导体器件 |
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CN201711422166.2A CN108088877B (zh) | 2017-12-25 | 2017-12-25 | 一种多功能半导体器件 |
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CN108088877A true CN108088877A (zh) | 2018-05-29 |
CN108088877B CN108088877B (zh) | 2020-05-01 |
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19544303A1 (de) * | 1994-11-29 | 1997-06-05 | Martin Hausner | Vorrichtung und Verfahren zur Steuerung der Selektivität von gassensitiven chemischen Verbindungen über exteren Potentiale |
US20020027086A1 (en) * | 2000-05-13 | 2002-03-07 | Saffell John R. | Electrochemical sensor for determining analyte in the presence of interferent |
CN101825511A (zh) * | 2010-05-04 | 2010-09-08 | 电子科技大学 | 一种微型电容式气体传感器及其制备方法 |
CN102768230A (zh) * | 2012-08-09 | 2012-11-07 | 电子科技大学 | 一种竖直平板电容式气体传感器及其制备方法 |
CN204681590U (zh) * | 2015-05-29 | 2015-09-30 | 歌尔声学股份有限公司 | Mems麦克风、压力传感器集成结构 |
CN105264365A (zh) * | 2013-01-11 | 2016-01-20 | 精量电子(法国)公司 | 集成到半导体电路上的电容性传感器 |
US20160209344A1 (en) * | 2015-01-15 | 2016-07-21 | Samsung Electro-Mechanics Co., Ltd. | Complex sensor and method of manufacturing the same |
CN106365105A (zh) * | 2016-09-24 | 2017-02-01 | 苏州捷研芯纳米科技有限公司 | 基于mems技术的气体传感器封装件及其批量加工方法 |
CN206033221U (zh) * | 2016-09-24 | 2017-03-22 | 苏州捷研芯纳米科技有限公司 | 基于mems技术的气体传感器封装件 |
WO2017055806A1 (en) * | 2015-09-30 | 2017-04-06 | Cambridge Cmos Sensors Limited | Gas sensor with a gas permeable region |
CN206362480U (zh) * | 2016-12-20 | 2017-07-28 | 歌尔科技有限公司 | 一种压力传感器与气体传感器的集成装置及封装结构 |
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2017
- 2017-12-25 CN CN201711422166.2A patent/CN108088877B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19544303A1 (de) * | 1994-11-29 | 1997-06-05 | Martin Hausner | Vorrichtung und Verfahren zur Steuerung der Selektivität von gassensitiven chemischen Verbindungen über exteren Potentiale |
US20020027086A1 (en) * | 2000-05-13 | 2002-03-07 | Saffell John R. | Electrochemical sensor for determining analyte in the presence of interferent |
CN101825511A (zh) * | 2010-05-04 | 2010-09-08 | 电子科技大学 | 一种微型电容式气体传感器及其制备方法 |
CN102768230A (zh) * | 2012-08-09 | 2012-11-07 | 电子科技大学 | 一种竖直平板电容式气体传感器及其制备方法 |
CN105264365A (zh) * | 2013-01-11 | 2016-01-20 | 精量电子(法国)公司 | 集成到半导体电路上的电容性传感器 |
US20160209344A1 (en) * | 2015-01-15 | 2016-07-21 | Samsung Electro-Mechanics Co., Ltd. | Complex sensor and method of manufacturing the same |
CN204681590U (zh) * | 2015-05-29 | 2015-09-30 | 歌尔声学股份有限公司 | Mems麦克风、压力传感器集成结构 |
WO2017055806A1 (en) * | 2015-09-30 | 2017-04-06 | Cambridge Cmos Sensors Limited | Gas sensor with a gas permeable region |
CN106365105A (zh) * | 2016-09-24 | 2017-02-01 | 苏州捷研芯纳米科技有限公司 | 基于mems技术的气体传感器封装件及其批量加工方法 |
CN206033221U (zh) * | 2016-09-24 | 2017-03-22 | 苏州捷研芯纳米科技有限公司 | 基于mems技术的气体传感器封装件 |
CN206362480U (zh) * | 2016-12-20 | 2017-07-28 | 歌尔科技有限公司 | 一种压力传感器与气体传感器的集成装置及封装结构 |
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CN108088877B (zh) | 2020-05-01 |
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Effective date of registration: 20190701 Address after: 610000 Xinzhai Village, Jinniu Town, Wusheng County, Guang'an City, Sichuan Province, 2 Groups 36 Applicant after: Gao Kexin Address before: 528000 No. 107 Yucai Road, Southwest Street, Sanshui District, Foshan City, Guangdong Province Applicant before: Foshan carpenter carpenter automobile articles Co., Ltd. |
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Effective date of registration: 20200403 Address after: 343000 factory building 6, No. 268, Nantang Road, Jinggangshan economic and Technological Development Zone, Ji'an City, Jiangxi Province Applicant after: Jiangxi Jijing Microelectronics Co., Ltd Address before: 610000 Xinzhai Village, Jinniu Town, Wusheng County, Guang'an City, Sichuan Province, 2 Groups 36 Applicant before: Gao Kexin |
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