CN108063607B - Miniature high-power ceramic substrate filter - Google Patents
Miniature high-power ceramic substrate filter Download PDFInfo
- Publication number
- CN108063607B CN108063607B CN201711304526.9A CN201711304526A CN108063607B CN 108063607 B CN108063607 B CN 108063607B CN 201711304526 A CN201711304526 A CN 201711304526A CN 108063607 B CN108063607 B CN 108063607B
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- Prior art keywords
- spiral inductor
- capacitor
- metal strip
- ceramic substrate
- pass
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- 239000000758 substrate Substances 0.000 title claims abstract description 27
- 239000000919 ceramic Substances 0.000 title claims abstract description 15
- 239000003990 capacitor Substances 0.000 claims abstract description 38
- 229920002492 poly(sulfone) Polymers 0.000 claims abstract description 7
- 239000011224 oxide ceramic Substances 0.000 claims abstract description 6
- 229910052574 oxide ceramic Inorganic materials 0.000 claims abstract description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 34
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- 229910052802 copper Inorganic materials 0.000 claims description 13
- 239000010949 copper Substances 0.000 claims description 13
- 238000003466 welding Methods 0.000 claims description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 238000004806 packaging method and process Methods 0.000 abstract description 11
- 238000001914 filtration Methods 0.000 abstract description 8
- 238000001816 cooling Methods 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 230000010354 integration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Filters And Equalizers (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
The invention discloses a miniature high-power ceramic substrate filter, which comprises a signal input port IN, a signal output port OUT and a ground terminal GND, wherein the signal input port IN is connected with a third-order low-pass LC filter circuit A and a second-order low-pass LC filter circuit B; the third-order low-pass LC filter circuit A comprises a spiral inductor L1, a capacitor C1 and a capacitor C2, and the second-order low-pass LC filter circuit B comprises a spiral inductor L2 and a capacitor C3; the spiral inductor L1 and the spiral inductor L2 are printed on a rectangular aluminum oxide ceramic substrate, and the aluminum oxide ceramic substrate is packaged by a polysulfone shell. The layout design of the components is strictly symmetrical, so that the interference among the components can be effectively reduced; the packaging size is 92mm 78mm 10mm, the volume is less than one tenth of that of the traditional filtering equipment, the packaging structure can be installed inside a radio frequency power supply, and the packaging structure can be directly installed on a water cooling plate.
Description
Technical Field
The invention relates to the field of radio frequency power supplies, in particular to a miniature high-power ceramic substrate filter.
Background
Radio frequency power supply is mostly used in semiconductor industry, its output power varies from tens of watts to tens of kilowatts, and the radio frequency power supply has higher and higher requirements for the spectral purity of the output power, especially for the suppression of higher harmonics, so that it is necessary to install filtering equipment at the output end. The traditional filtering equipment is arranged at the external output end of the radio frequency power supply, for the output power level of the radio frequency power supply of 1.5 kW-5.5 kW, the size of components in the filtering equipment is larger according to the skin effect of high-frequency current, a metal shielding shell is generally arranged outside the filtering equipment, and the whole volume of the filtering equipment is also larger.
High integration is the main development trend of the current semiconductor industry devices, wherein the radio frequency power supply tends to be standardized for the packaging size, the space inside the body cannot be easily changed, the filter device needs to be installed inside the body, and the packaging size must be effectively reduced. As the integration level increases, heat dissipation issues must be considered.
Disclosure of Invention
The invention aims to design a miniature high-power ceramic substrate filter.
In order to achieve the purpose, the technical scheme of the invention is as follows: a miniature high-power ceramic substrate filter comprises a signal input port IN, a signal output port OUT and a ground terminal GND, wherein the signal input port IN is connected with the input end of a third-order low-pass LC filter circuit A, the output end of the third-order low-pass LC filter circuit A is connected with the input end of a second-order low-pass LC filter circuit B, and the output end of the second-order low-pass LC filter circuit B is connected with the signal output port OUT;
the third-order low-pass LC filter circuit A comprises a spiral inductor L1, a capacitor C1 and a capacitor C2, and the second-order low-pass LC filter circuit B comprises a spiral inductor L2 and a capacitor C3; the spiral inductor L1 and the spiral inductor L2 are printed on a rectangular alumina ceramic substrate, and the spiral inductor L1 and the spiral inductor L2 are symmetrically printed in opposite rotating directions; a signal input port IN is welded on an external welding point of the spiral inductor L1, an internal welding point of the spiral inductor L1 is connected to a first printed metal strip through a first jumper copper sheet, and the first printed metal strip is connected with a second printed metal strip through a capacitor C2; the signal output terminal OUT is welded at an external welding point of the spiral inductor L2, and an internal welding point of the spiral inductor L2 is connected to the first printed metal strip through a second jumper copper sheet; the external pad of the spiral inductor L1 is further connected to a third printed metal strip through a capacitor C1, and the external pad of the spiral inductor L2 is further connected to the third printed metal strip through a capacitor C3;
the first printed metal strip and the second printed metal strip are arranged at one end of the alumina ceramic substrate, and the third printed metal strip is arranged at the opposite end; grounding ends GND are welded on the second printed metal strip and the third printed metal strip respectively; and the aluminum oxide ceramic substrate is encapsulated by a polysulfone shell.
Furthermore, the signal input port IN, the signal output port OUT and the ground end GND are all connecting copper sheets, and the connecting copper sheets extend OUT of the polysulfone shell.
Further, the capacitor C1, the capacitor C2 and the capacitor C3 are all formed by connecting one or more capacitors in parallel.
Further, the size of the filter after packaging is 92mm 78mm 10 mm.
The invention has the beneficial effects that:
the layout design of the components is strictly symmetrical, so that the interference among the components can be effectively reduced; the packaging size is 92mm 78mm 10mm, the volume is less than one tenth of that of the traditional filtering equipment, the packaging structure can be installed inside a radio frequency power supply, and the packaging structure can be directly installed on a water cooling plate. The invention provides a low-pass filter which can be arranged in a radio frequency power supply and has small volume, high power and strong heat dissipation performance.
Drawings
FIG. 1 is a circuit topology of the present invention;
fig. 2 is a schematic structural diagram of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
The technical scheme adopted by the invention comprises that the radio frequency power supply is packaged in a modularized way, and the packaging structure is conveniently arranged in the radio frequency power supply body; the aluminum oxide ceramic substrate has excellent electrical insulation performance and high heat conduction property, the surface adhesion strength is high, a copper layer on the surface can be etched into various patterns like a PCB (printed circuit board), and the current carrying capacity is high; in the circuit topology design, a symmetrical design scheme is adopted, so that the interference among components is reduced; for the need of suppressing higher harmonics, a low-pass filtering scheme is employed.
As shown IN fig. 1 and 2, the miniature high-power ceramic substrate filter comprises a signal input port IN, a signal output port OUT and a ground terminal GND, wherein the signal input port IN is connected with an input end of a third-order low-pass LC filter circuit a, an output end of the third-order low-pass LC filter circuit a is connected with an input end of a second-order low-pass LC filter circuit B, and an output end of the second-order low-pass LC filter circuit B is connected with the signal output port OUT.
The third-order low-pass LC filter circuit A comprises a spiral inductor L1, a capacitor C1 and a capacitor C2, and the second-order low-pass LC filter circuit B comprises a spiral inductor L2 and a capacitor C3; the spiral inductor L1 and the spiral inductor L2 are printed on the rectangular alumina ceramic substrate 1, and the spiral inductor L1 and the spiral inductor L2 are symmetrically printed in opposite rotating directions; a signal input port IN is welded on an external welding point of the spiral inductor L1, an internal welding point of the spiral inductor L1 is connected to a first printed metal strip 3 through a first jumper copper sheet 2, and the first printed metal strip 3 is connected with a second printed metal strip 4 through a capacitor C2; the signal output terminal OUT is welded at the external welding point of the spiral inductor L2, and the internal welding point of the spiral inductor L2 is connected to the first printed metal strip 3 through the second jumper copper sheet 5; the outer pad of the spiral inductor L1 is further connected to a third printed metal strip 7 via a capacitor C1 and the outer pad of the spiral inductor L2 is further connected to the third printed metal strip 7 via a capacitor C3.
The layout design of the components is strictly symmetrical, so that the interference among the components can be effectively reduced; because the size of the bonding pad of the capacitor is designed to have a certain length, one or more capacitors can be installed in later debugging; the capacitor C1, the capacitor C2 and the capacitor C3 are formed by one or more capacitors in parallel. The pad sizes of the capacitor C1 and the capacitor C3 are designed to have certain widths, and capacitors with different package sizes can be installed.
The first printed metal strip 3, the second printed metal strip 4 are arranged at one end of the alumina ceramic substrate 1, and the third printed metal strip 7 is arranged at the opposite end; the second printed metal strip 4 and the third printed metal strip 7 are respectively welded with grounding ends GND; the aluminum oxide ceramic substrate 1 is externally packaged by a polysulfone shell 6.
The signal input port IN, the signal output port OUT and the ground end GND are all connecting copper sheets, and the connecting copper sheets extend OUT of the polysulfone shell 6.
The packaging size of the miniature high-power ceramic substrate filter is 92mm × 78mm × 10mm, the volume of the miniature high-power ceramic substrate filter is less than one tenth of that of traditional filter equipment, the miniature high-power ceramic substrate filter can be installed inside a radio frequency power supply, and the miniature high-power ceramic substrate filter can be directly installed on a water cooling plate and has heat dissipation performance of the filter. Through experimental tests, the working frequency of the filter is 13.56MHz, the cut-off frequency is 20MHz, the upper limit of power is 5KW, the four-time and above harmonic suppression degree is more than 30dB, the input-output standing wave ratio is less than 1.05, and the input-output impedance is 50 omega.
The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (4)
1. A miniature high-power ceramic substrate filter is characterized by comprising a signal input port IN, a signal output port OUT and a ground terminal GND, wherein the signal input port IN is connected with the input end of a third-order low-pass LC filter circuit A, the output end of the third-order low-pass LC filter circuit A is connected with the input end of a second-order low-pass LC filter circuit B, and the output end of the second-order low-pass LC filter circuit B is connected with the signal output port OUT;
the third-order low-pass LC filter circuit A comprises a spiral inductor L1, a capacitor C1 and a capacitor C2, and the second-order low-pass LC filter circuit B comprises a spiral inductor L2 and a capacitor C3; the spiral inductor L1 and the spiral inductor L2 are printed on a rectangular alumina ceramic substrate, and the spiral inductor L1 and the spiral inductor L2 are symmetrically printed in opposite rotation directions; a signal input port IN is welded on an external welding point of the spiral inductor L1, an internal welding point of the spiral inductor L1 is connected to a first printed metal strip through a first jumper copper sheet, and the first printed metal strip is connected with a second printed metal strip through a capacitor C2; the signal output terminal OUT is welded at an external welding point of the spiral inductor L2, and an internal welding point of the spiral inductor L2 is connected to the first printed metal strip through a second jumper copper sheet; the external pad of the spiral inductor L1 is further connected to a third printed metal strip through a capacitor C1, and the external pad of the spiral inductor L2 is further connected to the third printed metal strip through a capacitor C3;
the first printed metal strip and the second printed metal strip are arranged at one end of the alumina ceramic substrate, and the third printed metal strip is arranged at the opposite end; grounding ends GND are welded on the second printed metal strip and the third printed metal strip respectively; and the aluminum oxide ceramic substrate is encapsulated by a polysulfone shell.
2. The micro high-power ceramic substrate filter according to claim 1, wherein the signal input port IN, the signal output port OUT and the ground terminal GND are all copper connection sheets, and the copper connection sheets extend OUT of the polysulfone shell.
3. The miniature high-power ceramic substrate filter according to claim 1, wherein the capacitor C1, the capacitor C2 and the capacitor C3 are formed by one or more capacitors connected in parallel.
4. The miniature high power ceramic substrate filter according to claim 1, wherein the filter has a post-package dimension of 92mm x 78mm x 10 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711304526.9A CN108063607B (en) | 2017-12-11 | 2017-12-11 | Miniature high-power ceramic substrate filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711304526.9A CN108063607B (en) | 2017-12-11 | 2017-12-11 | Miniature high-power ceramic substrate filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108063607A CN108063607A (en) | 2018-05-22 |
| CN108063607B true CN108063607B (en) | 2021-01-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711304526.9A Active CN108063607B (en) | 2017-12-11 | 2017-12-11 | Miniature high-power ceramic substrate filter |
Country Status (1)
| Country | Link |
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| CN (1) | CN108063607B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108649915A (en) * | 2018-06-20 | 2018-10-12 | 中国电子科技集团公司第十三研究所 | 3D integrates LC filters and electronic system |
| CN114400128A (en) * | 2021-12-27 | 2022-04-26 | 北京遥感设备研究所 | Planar spiral inductor |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11122070A (en) * | 1997-10-09 | 1999-04-30 | Toyo Commun Equip Co Ltd | Ceramics package for piezoelectric filter |
| JP3949976B2 (en) * | 2001-04-04 | 2007-07-25 | 株式会社村田製作所 | Lumped constant filter, antenna duplexer, and communication device |
| CN2737067Y (en) * | 2004-01-06 | 2005-10-26 | 达方电子股份有限公司 | Low pass filter and multi-layer low pass filter with broadband suppression |
| CN103943923B (en) * | 2014-04-30 | 2016-01-06 | 南通大学 | Based on band-pass filter with harmonic suppression and the manufacture method thereof of LTCC technology |
| CN206281903U (en) * | 2016-11-23 | 2017-06-27 | 北京金自天正智能控制股份有限公司 | A kind of inductance detection device for cold rolling correction |
| CN107181030A (en) * | 2017-06-07 | 2017-09-19 | 孙超 | A kind of miniature T-shaped staircase resonant impedance capacitance loaded type triplexer |
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2017
- 2017-12-11 CN CN201711304526.9A patent/CN108063607B/en active Active
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| CN108063607A (en) | 2018-05-22 |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20200421 Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing, Daxing District Applicant after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 101318 No. 26, A District, Tianzhu Road, Tianzhu Airport Industrial Zone, Beijing, Shunyi District Applicant before: Beijing BBEF Science & Technology Co.,Ltd. |
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