CN108061601A - The Wavelength calibration method and device of hollow cathode lamp - Google Patents
The Wavelength calibration method and device of hollow cathode lamp Download PDFInfo
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- CN108061601A CN108061601A CN201711249595.4A CN201711249595A CN108061601A CN 108061601 A CN108061601 A CN 108061601A CN 201711249595 A CN201711249595 A CN 201711249595A CN 108061601 A CN108061601 A CN 108061601A
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000001228 spectrum Methods 0.000 claims abstract description 64
- 230000003287 optical effect Effects 0.000 claims abstract description 31
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 68
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 34
- 239000001569 carbon dioxide Substances 0.000 claims description 34
- 238000012937 correction Methods 0.000 claims description 16
- 230000003595 spectral effect Effects 0.000 claims description 4
- 230000006641 stabilisation Effects 0.000 claims description 4
- 238000011105 stabilization Methods 0.000 claims description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000010406 cathode material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 241000931526 Acer campestre Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000000505 pernicious effect Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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Abstract
The present invention provides the Wavelength calibration method and device of a kind of hollow cathode lamp, including：S1 based on revised Michelson's interferometer, gathers first curve of spectrum of the optical signal that hollow cathode lamp to be calibrated is sent, and the first peak wavelength is extracted from first curve of spectrum, and the Michelson's interferometer has the bore of pre-set dimension；S2 based on the fair curve of the revised Michelson's interferometer, determines the exact value of first peak wavelength, to complete the Wavelength calibration to the hollow cathode lamp.Method and device provided by the invention can be used for the wavelength for demarcating hollow cathode lamp.Moreover, because employing bigbore Michelson's interferometer, two kinds of wavelength of difference micromicron (pm) magnitude can be told, make calibration result more accurate.
Description
Technical field
The present invention relates to field of optical measuring technologies, more particularly, to the Wavelength calibration method and dress of hollow cathode lamp
It puts.
Background technology
Hollow cathode lamp (Hollow Cathode Lamp, HCL) is a kind of low pressure glow discharge light source of special shape.
Most of cathode material is simple metal or alloy, and cathode is empty barrel shape in centre.The tungsten that anode is welded with tantalum piece or titanium silk for one
Stick, tantalum piece or titanium silk play an important role of absorption gas, can absorb a small amount of pernicious gas (such as H2) at high temperature.To prevent the moon
The breakdown at positive the two poles of the earth is additionally provided with shielded layer between negative and positive the two poles of the earth.When applying 200V-500V voltages between the two poles of the earth, just produce
Raw glow discharge.Under electric field action, electronics, with carrier gas atomic collision and being allowed to ionize, releases two in the way for flying to anode
Secondary electronics makes electronics increase with cation number, to maintain to discharge.
Hollow cathode lamp is mainly used in most physics or the spectrometer of chemical classes, is sent by hollow cathode lamp
The spectral line optical signal calibrating to the wavelength of spectrometer or sent by hollow cathode lamp of optical signal irradiate determinand
Matter determines the species of test substance according to the absorption line of test substance.
At present, usually using the spectral line of hollow cathode lamp as natural reference, to be corrected to other devices.But
Since the spectral line of hollow cathode lamp depends primarily upon cathode material, the purity of cathode material is not high, for example is present with other spectrums
Line, it will cause error or erroneous judgement in timing.Now it is badly in need of providing a kind of Wavelength calibration method of hollow cathode lamp, to realize
The wavelength of hollow cathode lamp is demarcated.
The content of the invention
It solves the above problems in order to overcome the problems referred above or at least partly, the present invention provides a kind of hollow cathode lamps
Wavelength calibration method and device.
On the one hand, the present invention provides a kind of Wavelength calibration method of hollow cathode lamp, including：
S1 based on revised Michelson's interferometer, gathers the of the optical signal that hollow cathode lamp to be calibrated is sent
One curve of spectrum, and the first peak wavelength is extracted from first curve of spectrum, the Michelson's interferometer has default
The bore of size；
S2 based on the fair curve of the revised Michelson's interferometer, determines the standard of first peak wavelength
Really value, to complete the Wavelength calibration to the hollow cathode lamp.
Preferably, the Michelson's interferometer includes：
Stationary mirror, moving reflector and the beam splitter of bore with the pre-set dimension.
Preferably, the pre-set dimension is at least 100mm.
Preferably, the method further includes：
Based on the Michelson's interferometer, gather that the default quantity frequency stabilized carbon dioxide lasers of different peak wavelengths sends swashs
Second curve of spectrum of light, and respectively the second peak wavelength is extracted from each second curve of spectrum；
According to the difference between every one second peak wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser, described step is determined
Correction factor of the Ke Erxun interferometers on entire service band at arbitrary wavelength.
Preferably, optical filter is provided with before the frequency stabilized carbon dioxide laser, the optical filter is used to reduce the Frequency Stabilized Lasers
The intensity for the laser that device is sent.
Preferably, the default quantity is 3,3 different peak wavelengths be respectively 530.649nm, 632.817nm and
1063.854nm。
Preferably, the difference according between every one second peak wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser
Value, determines correction factor of the Michelson's interferometer on entire service band at arbitrary wavelength, specifically includes：
The difference of the default quantity is subjected to multiple curve matching, the Michael is determined according to obtained fitting function
Correction factor of the inferior interferometer on entire service band at arbitrary wavelength.
Preferably, the method further includes：
The revised Michelson's interferometer corresponding 3rd curve of spectrum under light-blocking state is obtained, and by described in
3rd curve of spectrum is as first curve of spectrum described in N Reference Alignment.
On the other hand, the present invention also provides a kind of Wavelength calibration device of hollow cathode lamp, including：First peak wavelength
Acquisition module and exact value determining module.Wherein,
First peak wavelength acquisition module is used to, based on revised Michelson's interferometer, gather hollow the moon to be calibrated
First curve of spectrum of the optical signal that pole lamp is sent, and the first peak wavelength is extracted from first curve of spectrum, it is described to step
Ke Erxun interferometers have the bore of pre-set dimension；
Exact value determining module is used for the fair curve based on the revised Michelson's interferometer, determines described the
The exact value of one peak wavelength, to complete the calibration to the hollow cathode lamp.
Preferably, the Wavelength calibration device of hollow cathode lamp further includes：Correcting module, the correcting module are used for：
Based on the Michelson's interferometer, gather that the default quantity frequency stabilized carbon dioxide lasers of different peak wavelengths sends swashs
Second curve of spectrum of light, and respectively the second peak wavelength is extracted from each second curve of spectrum；
According to the difference between every one second peak wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser, described step is determined
Correction factor of the Ke Erxun interferometers on entire service band at arbitrary wavelength.
The Wavelength calibration method and device of hollow cathode lamp provided by the invention, pass through revised Michelson's interferometer
Corresponding first curve of spectrum of hollow cathode lamp is gathered, and extracts the first peak wavelength.Michelson's interferometer has default ruler
Very little bore.According to the fair curve of revised Michelson's interferometer, the exact value of the first peak wavelength is determined, realize pair
The Wavelength calibration of hollow cathode lamp.Method provided in this embodiment can be used for the wavelength for demarcating hollow cathode lamp.Moreover, by
In employing bigbore Michelson's interferometer, two kinds of wavelength of difference micromicron (pm) magnitude can be told, tie calibration
Fruit is more accurate.
Description of the drawings
Fig. 1 is a kind of flow diagram of the Wavelength calibration method of hollow cathode lamp provided in an embodiment of the present invention；
Fig. 2 is the structure diagram of wavemeter of the prior art；
Fig. 3 is a kind of structure diagram of the Wavelength calibration device of hollow cathode lamp provided in an embodiment of the present invention.
Specific embodiment
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.Implement below
Example is not limited to the scope of the present invention for illustrating the present invention.
As shown in Figure 1, one embodiment of the invention provides a kind of Wavelength calibration method of hollow cathode lamp, including：
S1 based on revised Michelson's interferometer, gathers the of the optical signal that hollow cathode lamp to be calibrated is sent
One curve of spectrum, and the first peak wavelength is extracted from first curve of spectrum, the Michelson's interferometer has default
The bore of size；
S2 based on the fair curve of the revised Michelson's interferometer, determines the standard of first peak wavelength
Really value, to complete the Wavelength calibration to the hollow cathode lamp.
Specifically, due to be typically the curve of spectrum of optical signal that sends hollow cathode lamp as natural reference, to it
He is corrected device.At this point, if the curve of spectrum for the optical signal that hollow cathode lamp is sent is inaccurate, it is impossible to enough accurate schools
Just other devices so that other devices error occur when being operated, and may cause serious consequence.For this purpose, the present invention provides
A kind of Wavelength calibration method of hollow cathode lamp, is realized to the Wavelength calibration of hollow cathode lamp namely by hollow cathode
The Wavelength calibration of lamp can make the peak wavelength in the corresponding curve of spectrum of hollow cathode lamp equal with standard wave length or infinitely connect
Closely, the error between peak wavelength and standard wave length can be contracted to 10-7Near magnitude.For the ease of with Frequency Stabilized Lasers below
The curve of spectrum for the laser that device is sent distinguishes, and the curve of spectrum for the optical signal for sending hollow cathode lamp in the present invention is denoted as
First curve of spectrum, the peak wavelength of the hollow cathode lamp extracted from first curve of spectrum is the first peak wavelength.Accordingly
Ground, the curve of spectrum for the laser that frequency stabilized carbon dioxide laser is sent are denoted as second curve of spectrum, are extracted from second curve of spectrum
The peak wavelength of frequency stabilized carbon dioxide laser is the second peak wavelength.
Generally use wavemeter obtains the curve of spectrum in the prior art, and the structure chart of wavemeter is as shown in Figure 2.In Fig. 2,
Wavemeter is realized by core of Michelson's interferometer.Specifically included in wavemeter built-in reference light source 21, moving reflector 22,
Stationary mirror 23, beam splitter 24, the first detector 25, the second detector 26, FFT transform device 27 and A/D conversion equipments 28.
The optical signal that built-in reference light source 21 is sent is with coming from device under test (Device Under Test, DUT) 29 optical signals sent
It gets to respectively on beam splitter 24, the angle of beam splitter 24 and light path is 45 degree, each optical signal is respectively in two optical signals
After being reflected by moving reflector 22 and stationary mirror 23, beam splitter is again passed by, the light letter that built-in reference light source 21 is sent
It number is received by the first detector 25, the optical signal that DUT29 is sent is received by the second detector 26.It will by A/D conversion equipments 28
Optical signal, which is converted into, is converted to digital signal, and by FFT transform device 27 obtain the light intensity value of different wave length to get to
The corresponding curves of spectrum of DUT29.
Explanation is needed exist for, the curve of spectrum is the relation curve between wavelength and corresponding light intensity value.Second visits
It surveys device 26 and can obtain interference image of the moving reflector 22 between the optical signal before and after shift position, i.e. wavelength and interference signal
Relation curve between intensity value.
But due to wavemeter can only by optical fiber input different wave length optical signal, and can only measuring signal intensity it is higher
Optical maser wavelength.Since the light signal strength that hollow cathode lamp generates is weaker, so wavemeter can not be used for obtaining hollow the moon
Corresponding first curve of spectrum of pole lamp.Since national wavelength standard device is also merely able to the higher laser of demarcation signal intensity
Wavelength for the weaker hollow cathode lamp of signal strength, since the noise of signal is poor, and then can not demarcate hollow cathode lamp
Wavelength.
Since the light signal strength that hollow cathode lamp generates is weaker, the minimum error occurred in each step, each device will
The wavelength for causing the hollow cathode lamp finally demarcated is inaccurate.So revised Michelson interference utilized in the present embodiment
Instrument, and use bigbore Michelson's interferometer.The caliber size of Michelson's interferometer is pre-set dimension, to ensure sky
The optical signal that heart cathode modulation is sent can be as much as possible into Michelson's interferometer, and then improves the optical signal collected
Light intensity value, while signal-to-noise ratio can be increased, the resolution ratio of Michelson's interferometer is improved, makes up to micromicron (pm) magnitude.
Revised Michelson's interferometer has a fair curve, and the abscissa of fair curve is wavelength, ordinate
For the difference between the peak wavelength and exact wavelengths of Michelson's interferometer acquisition.It should be noted that this exact wavelengths
It is national standard wavelength.Ordinate (i.e. difference) corresponding with the first peak wavelength is found on fair curve, according to ordinate
First peak wavelength is corrected, you can obtain the exact value of the first peak wavelength, and then realize the ripple to hollow cathode lamp
Long calibration.
In the present embodiment, it is bent that corresponding first spectrum of hollow cathode lamp is gathered by revised Michelson's interferometer
Line, and extract the first peak wavelength.Michelson's interferometer has the bore of pre-set dimension.It is done according to revised Michelson
The fair curve of interferometer determines the exact value of the first peak wavelength, realizes the Wavelength calibration to hollow cathode lamp.The present embodiment carries
The method of confession can be used for the wavelength for demarcating hollow cathode lamp.Moreover, because bigbore Michelson's interferometer is employed,
Two kinds of wavelength of difference micromicron (pm) magnitude can be told, make calibration result more accurate.
On the basis of above-described embodiment, the Michelson's interferometer includes：
Stationary mirror, moving reflector and the beam splitter of bore with the pre-set dimension.
Specifically, as shown in Figure 1, the Michelson's interferometer of the bore with pre-set dimension refers to Michelson's interferometer
In moving reflector 22, stationary mirror 23, beam splitter 24 be respectively provided with the bore of pre-set dimension.Preferably, preset
Size needs at least 100mm.
On the basis of above-described embodiment, the method further includes：
Based on the Michelson's interferometer, gather that the default quantity frequency stabilized carbon dioxide lasers of different peak wavelengths sends swashs
Second curve of spectrum of light, and respectively the second peak wavelength is extracted from each second curve of spectrum；
According to the difference between every one second peak wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser, described step is determined
Correction factor of the Ke Erxun interferometers on entire service band at arbitrary wavelength.
Specifically, the laser sent by frequency stabilized carbon dioxide laser is modified Michelson's interferometer, that is, corrects Michael
It is that inferior interferometer obtains as a result, determine Michelson's interferometer acquisition peak wavelength peak wavelength corresponding with frequency stabilized carbon dioxide laser
Between difference.The difference is finally based on, obtains the exact value of the first peak wavelength of Michelson's interferometer acquisition.It needs
It is bright, due to also can be there are error, so this reality between the peak wavelength of frequency stabilized carbon dioxide laser and state specified standards wavelength
Calibrated frequency stabilized carbon dioxide laser can also be used by applying in example, preferably, country's wavelength standard device can be selected to frequency stabilization
Laser is demarcated, and the peak wavelength of frequency stabilized carbon dioxide laser is corrected to standard wave length.For example, pass through national wavelength standard device
After being demarcated to the frequency stabilized carbon dioxide laser of three different peak wavelengths, the peak wavelength of obtained frequency stabilized carbon dioxide laser is respectively standard
Wavelength 530.649nm, 632.817nm and 1063.854nm.It should be noted that default quantity mentioned here refer to be more than or
Integer equal to three.Below to be swashed using the frequency stabilization that peak wavelength is respectively 530.649nm, 632.817nm and 1063.854nm
Exemplified by light device.
First, second curve of spectrum of the laser that the frequency stabilized carbon dioxide laser of the different peak wavelengths of three kinds of acquisition is sent, from three
The second peak wavelength of corresponding frequency stabilized carbon dioxide laser is extracted in second curve of spectrum respectively.According to every one second peak wavelength with it is corresponding
Frequency stabilized carbon dioxide laser peak wavelength between difference, determine Michelson's interferometer on entire service band at arbitrary wavelength
Correction factor.Correction factor is obtained to be modified Michelson's interferometer according to correction factor.
It is described according to every one second peak wavelength and the peak value of corresponding frequency stabilized carbon dioxide laser on the basis of above-described embodiment
Difference between wavelength determines correction factor of the Michelson's interferometer on entire service band at arbitrary wavelength, tool
Body includes：
The difference of the default quantity is subjected to multiple curve matching, the Michael is determined according to obtained fitting function
Correction factor of the inferior interferometer on entire service band at arbitrary wavelength.
Specifically, when the frequency stabilized carbon dioxide laser using three different peak wavelengths demarcates Michelson's interferometer, it is corresponding with
Obtain three differences are carried out multiple curve matchings by three differences, the number specifically to carry out curve fitting can as needed into
Row is set, and curve matching number is more, and obtained fitting function is more accurate.Finally, mikey is determined according to obtained fitting function
Correction factor of the inferior interferometer of that on entire service band at arbitrary wavelength.
On the basis of above-described embodiment, optical filter is provided with before the frequency stabilized carbon dioxide laser, for reducing the frequency stabilization
The intensity for the laser that laser is sent.
Specifically, the light intensity for the optical signal that the luminous intensity of the laser sent due to frequency stabilized carbon dioxide laser is sent with hollow cathode lamp
Degree differs larger in magnitude, to reduce the Acquisition Error of Michelson's interferometer, can be all provided with before each frequency stabilized carbon dioxide laser
Optical filter is equipped with, to reduce the intensity for the laser that frequency stabilized carbon dioxide laser is sent.
On the basis of above-described embodiment, to avoid instrument itself, there are the problems such as measurement reproducibility, measurement uniformity pairs
Calibration result has an impact, and it is bent that corresponding second spectrum of steady frequency laser need to be first gathered when being demarcated to hollow cathode lamp
Line under conditions of any state is not changed, gathers corresponding first curve of spectrum of hollow cathode lamp at once.
On the basis of above-described embodiment, the method further includes：
The revised Michelson's interferometer corresponding 3rd curve of spectrum under light-blocking state is obtained, and by described in
3rd curve of spectrum is as first curve of spectrum described in N Reference Alignment.
Specifically, for the built-in reference light source of Michelson's interferometer is avoided to generate shadow to first curve of spectrum of acquisition
It rings, before first curve of spectrum is gathered, it is also necessary to obtain revised Michelson's interferometer corresponding the under light-blocking state
Three curves of spectrum, and using the 3rd curve of spectrum as first curve of spectrum described in N Reference Alignment.Obtaining the first spectrum
After curve, the light intensity value in first curve of spectrum needs to subtract the light intensity value in the 3rd curve of spectrum at corresponding wavelength.
As shown in figure 3, providing a kind of Wavelength calibration device of hollow cathode lamp in another embodiment of the present invention, wrap
It includes：First peak wavelength acquisition module 31 and exact value determining module 32.Wherein,
First peak wavelength acquisition module 31 is used for based on revised Michelson's interferometer, is gathered to be calibrated hollow
First curve of spectrum of the optical signal that cathode modulation is sent, and the first peak wavelength is extracted from first curve of spectrum, it is described
Michelson's interferometer has the bore of pre-set dimension；
Exact value determining module 32 is used for the fair curve based on the revised Michelson's interferometer, determines described
The exact value of first peak wavelength, to complete the calibration to the hollow cathode lamp.
On the basis of above-described embodiment, the Wavelength calibration device of hollow cathode lamp further includes：Correcting module, the amendment
Module is used for：Based on the Michelson's interferometer, gather what the default quantity frequency stabilized carbon dioxide lasers of different peak wavelengths was sent
Second curve of spectrum of laser, and respectively the second peak wavelength is extracted from each second curve of spectrum；According to every one second peak
The difference being worth between wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser, determines that the Michelson's interferometer is entirely working
Correction factor on wave band at arbitrary wavelength.
Specifically, the effect of each module and concrete operations flow and above method class embodiment are one a pair of in the present embodiment
It answers, details are not described herein.
In the present embodiment, hollow the moon is gathered by revised Michelson's interferometer by the first peak wavelength acquisition module
Corresponding first curve of spectrum of pole lamp, and extract the first peak wavelength.Michelson's interferometer has the bore of pre-set dimension.It is accurate
Really value determining module determines the exact value of the first peak wavelength according to the fair curve of revised Michelson's interferometer, complete
The Wavelength calibration of paired hollow cathode lamp.Device provided in this embodiment can be used for the wavelength for demarcating hollow cathode lamp.And
And as a result of bigbore Michelson's interferometer, two kinds of wavelength of difference micromicron (pm) magnitude can be told, make mark
It is more accurate to determine result.
Finally, method of the invention is only preferable embodiment, is not intended to limit the scope of the present invention.It is all
Within the spirit and principles in the present invention, any modifications, equivalent replacements and improvements are made should be included in the protection of the present invention
Within the scope of.
Claims (10)
1. a kind of Wavelength calibration method of hollow cathode lamp, which is characterized in that including：
S1 based on revised Michelson's interferometer, gathers the first light of the optical signal that hollow cathode lamp to be calibrated is sent
Spectral curve, and the first peak wavelength is extracted from first curve of spectrum, the Michelson's interferometer has pre-set dimension
Bore；
S2 based on the fair curve of the revised Michelson's interferometer, determines the exact value of first peak wavelength,
To complete the Wavelength calibration to the hollow cathode lamp.
2. according to the method described in claim 1, it is characterized in that, the Michelson's interferometer includes：
Stationary mirror, moving reflector and the beam splitter of bore with the pre-set dimension.
3. according to the method described in claim 1, it is characterized in that, the pre-set dimension is at least 100mm.
4. according to the method described in claim 1, it is characterized in that, the method further includes：
Based on the Michelson's interferometer, the laser that the default quantity frequency stabilized carbon dioxide lasers of different peak wavelengths is sent is gathered
Second curve of spectrum, and respectively the second peak wavelength is extracted from each second curve of spectrum；
According to the difference between every one second peak wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser, the Michael is determined
Correction factor of the inferior interferometer on entire service band at arbitrary wavelength.
It is 5. described according to the method described in claim 4, it is characterized in that, be provided with optical filter before the frequency stabilized carbon dioxide laser
Optical filter is used to reduce the intensity for the laser that the frequency stabilized carbon dioxide laser is sent.
6. according to the method described in claim 4, it is characterized in that, the default quantity is 3,3 different peak wavelengths
Respectively 530.649nm, 632.817nm and 1063.854nm.
It is 7. according to the method described in claim 4, it is characterized in that, described according to every one second peak wavelength and corresponding frequency stabilization
Difference between the peak wavelength of laser determines the Michelson's interferometer on entire service band at arbitrary wavelength
Correction factor specifically includes：
The difference of the default quantity is subjected to multiple curve matching, determines that the Michelson is done according to obtained fitting function
Correction factor of the interferometer on entire service band at arbitrary wavelength.
8. method according to any one of claim 1 to 7, which is characterized in that the method further includes：
Obtain the revised Michelson's interferometer corresponding 3rd curve of spectrum under light-blocking state, and by the described 3rd
The curve of spectrum is as first curve of spectrum described in N Reference Alignment.
9. a kind of Wavelength calibration device of hollow cathode lamp, which is characterized in that including：
First peak wavelength acquisition module for being based on revised Michelson's interferometer, gathers hollow cathode to be calibrated
First curve of spectrum of the optical signal that lamp is sent, and the first peak wavelength, the mikey are extracted from first curve of spectrum
Your inferior interferometer has the bore of pre-set dimension；
Exact value determining module for the fair curve based on the revised Michelson's interferometer, determines described first
The exact value of peak wavelength, to complete the calibration to the hollow cathode lamp.
10. device according to claim 9, which is characterized in that further include：Correcting module, the correcting module are used for：
Based on the Michelson's interferometer, the laser that the default quantity frequency stabilized carbon dioxide lasers of different peak wavelengths is sent is gathered
Second curve of spectrum, and respectively the second peak wavelength is extracted from each second curve of spectrum；
According to the difference between every one second peak wavelength and the peak wavelength of corresponding frequency stabilized carbon dioxide laser, the Michael is determined
Correction factor of the inferior interferometer on entire service band at arbitrary wavelength.
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| CN201711249595.4A CN108061601B (en) | 2017-12-01 | 2017-12-01 | Wavelength calibration method and device for hollow cathode lamp |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113471804A (en) * | 2020-03-31 | 2021-10-01 | 北京科益虹源光电技术有限公司 | Laser absolute wavelength online calibration method and device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5757488A (en) * | 1996-10-10 | 1998-05-26 | Itt Industries, Inc. | Optical frequency stability controller |
| CN105355124A (en) * | 2015-11-17 | 2016-02-24 | 云南民族大学 | Michelson interference experiment integrated light source device |
-
2017
- 2017-12-01 CN CN201711249595.4A patent/CN108061601B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5757488A (en) * | 1996-10-10 | 1998-05-26 | Itt Industries, Inc. | Optical frequency stability controller |
| CN105355124A (en) * | 2015-11-17 | 2016-02-24 | 云南民族大学 | Michelson interference experiment integrated light source device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113471804A (en) * | 2020-03-31 | 2021-10-01 | 北京科益虹源光电技术有限公司 | Laser absolute wavelength online calibration method and device |
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| CN108061601B (en) | 2020-05-12 |
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