CN110926621A - Calibration device and method for Fourier transform type terahertz source wavelength measuring instrument - Google Patents
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- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained
Abstract
The invention provides a calibration device and a calibration method for a Fourier transform type terahertz source wavelength measuring instrument, wherein the calibration method is used for calibrating the terahertz source wavelength measuring instrument based on a terahertz characteristic wavelength standard method, so that the calibration of the Fourier transform type terahertz source wavelength measuring instrument is realized; in the calibration process, three calibration points are selected at (0-1/3), (1/3-2/3) and (2/3-1) of the measurement range according to the wavelength measurement range of the calibrated terahertz source wavelength measuring instrument, so that the calibration accuracy of the terahertz source wavelength measuring instrument is improved.
Description
Technical Field
The invention belongs to the technical field of optical measurement, mainly relates to the technical field of terahertz measurement, and particularly relates to a calibration device and method for a Fourier transform terahertz source wavelength measuring instrument.
Background
The terahertz wave band is located between infrared and microwave, and the terahertz technology is a cross leading-edge technology of key research in the world and is widely applied to the fields of communication, anti-terrorism, medicine, security inspection, astronomical observation and the like. The terahertz source is a foundation and a premise of terahertz technology research, and the wavelength of the terahertz source is a key factor for restricting the performance of a system. The terahertz source wavelength measuring instrument is an instrument for measuring the wavelength or frequency parameters of the terahertz source, and the accuracy of the terahertz source wavelength measuring instrument directly influences the performance of the terahertz source, so that the terahertz source wavelength measuring instrument is urgently required to be calibrated, and the accuracy of the terahertz source wavelength measurement is improved.
At present, a wavelength measuring instrument for measuring the wavelength of a terahertz source can be mainly divided into the following parts according to the measurement principle: the wavelength measuring instruments adopt different principles to realize the measurement of the terahertz source wavelength, but the measurement accuracy cannot be evaluated due to the lack of a calibration method of the terahertz source wavelength measuring instrument. Therefore, the invention provides a corresponding terahertz source wavelength measuring instrument calibration method for the terahertz source wavelength measuring instrument of the Fourier transform type, and realizes calibration of the terahertz source wavelength measuring instrument of the Fourier transform type.
The spectrum calibrator is developed by the English NPL aiming at the spectrum and the frequency of the terahertz time-domain spectrometer. The spectral calibrator is divided into two types, including a silicon wafer etalon and a carbon monoxide gas chamber. The silicon wafer etalon consists of a high-resistivity silicon wafer with two adjustable surfaces, and the calibration spectral range is as follows: (0.1-4) THz, maximum spectral resolution: 1 GHz. During calibration, the silicon wafer etalon is placed at the focus position of the optical system of the time domain spectrometer, and the terahertz light source inside the time domain spectrometer forms spectral bands with different wavelengths after being reflected or transmitted by the silicon wafer etalon. A polytetrafluoroethylene window is adopted in the carbon monoxide gas chamber, carbon monoxide gas is filled in the carbon monoxide gas chamber, and the terahertz absorption line of the carbon monoxide gas is utilized to measure the spectrum of the terahertz time-domain spectrometer, and the method is characterized in that: the method has a uniform peak curve in a (0.5-2.5) THz range, and the spectral resolution is less than 1 GHz; the relative peak spectral intensities may vary. However, the terahertz time-domain spectrometer is an instrument for measuring characteristic wavelength parameters of materials and cannot be used for measuring the wavelength of a terahertz source.
At present, no public report of a calibration method for a terahertz source wavelength measuring instrument aiming at different measuring principles is seen.
Disclosure of Invention
Aiming at the Fourier transform type terahertz source wavelength measuring instrument, the invention provides a calibration device and a calibration method for the terahertz source wavelength measuring instrument, and the calibration device and the calibration method are adopted to calibrate the terahertz source wavelength measuring instrument so as to realize the calibration of the Fourier transform type terahertz source wavelength measuring instrument.
The technical scheme of the invention is as follows:
the calibration device for the Fourier transform terahertz source wavelength measuring instrument is characterized in that: aiming at a Fourier transform type terahertz source wavelength measuring instrument, a terahertz transmittance standard, a terahertz characteristic wavelength standard and a computer are adopted to realize the calibration of spectral resolution and wavelength parameters; the calibration of wavelength parameters is realized by adopting a terahertz characteristic wavelength standard device and a computer, and the calibration of spectral resolution is realized by adopting a terahertz transmittance standard device, a terahertz characteristic wavelength standard device and a computer;
the corrected Fourier transform type terahertz source wavelength measuring instrument consists of a broadband terahertz source, a beam splitter, a fixed mirror, a movable mirror, a collimating optical system, a sample chamber, a convergence system, a terahertz detector and a signal processing system; generating terahertz radiation by a broadband terahertz source; the beam splitter divides the terahertz radiation into two beams, wherein one beam is incident to the fixed mirror, and the other beam is incident to the movable mirror; the fixed mirror and the movable mirror form an interference type measuring light path and return the terahertz radiation to the beam splitter; the beam splitter transmits and reflects the terahertz radiation returned by the fixed mirror and the movable mirror to the collimating optical system, and the collimating optical system collimates and focuses the terahertz radiation to the sample chamber; a terahertz transmittance standard or a terahertz characteristic wavelength standard is placed in the sample chamber; the terahertz detector and the signal processing system receive terahertz radiation signals and transmit the terahertz radiation signals to the computer for data processing to obtain a wavelength or spectral resolution measurement value; the beam splitter, the fixed mirror, the collimating optical system, the sample chamber, the converging system and the terahertz detector are centrally positioned on the same optical axis and form a main optical axis.
Further preferably, the calibration apparatus for a terahertz source wavelength measuring instrument of the fourier transform type is characterized in that: the wavelength range covered by the terahertz transmittance standard is 60-3000 microns; the wavelength value lambda of the terahertz characteristic wavelength standard devicegIt is known that the wavelength range covered is 60 μm to 3000 μm.
The method for calibrating the terahertz source wavelength measuring instrument for Fourier transform by using the calibration device is characterized by comprising the following steps: the method for calibrating the wavelength and spectral resolution parameters of the Fourier transform terahertz source wavelength measuring instrument comprises the following steps:
step 1: opening the corrected Fourier transform type terahertz source wavelength measuring instrument and measuring the relative spectral transmittance curve tau thereofs,λ；
Step 2: moving the terahertz spectral transmittance standard into a sample chamber of a corrected Fourier transform type terahertz source wavelength measuring instrument and positioning the standard on a main optical axis;
and step 3: starting a corrected Fourier transform type terahertz source wavelength measuring instrument, irradiating a terahertz spectral transmittance standard by terahertz radiation, and transmitting a measuring result to a computer after the terahertz radiation irradiates the terahertz spectral transmittance standard and passes through a convergence system, a terahertz detector and a signal processing system; obtaining the relative spectral transmittance curve T at the momentd,λ(ii) a Calculating a relative spectral power correction factor k of the corrected Fourier transform type terahertz source wavelength measuring instrument according to the following formulaλ；
kλ＝τd,λ/τs,λ
And 4, step 4: moving the terahertz spectral transmittance standard out of a sample chamber of a corrected Fourier transform type terahertz source wavelength measuring instrument, and moving the terahertz characteristic wavelength standard into the sample chamber and positioning the terahertz characteristic wavelength standard on a main optical axis;
and 5: after irradiating the terahertz spectral transmittance standard device by terahertz radiation, transmitting a measurement result to a computer through a convergence system, a terahertz detector and a signal processing system; the obtained measurement result is the wavelength measurement value of the corrected Fourier transform type terahertz source wavelength measuring instrument
And an original relative spectral power curve;
step 6: calculating and obtaining a wavelength relative indication value error c 'of the corrected Fourier transform type terahertz source wavelength measuring instrument according to the following formula'λ：
In the formula ofgFor the wavelength standard value of the known terahertz characteristic wavelength standard,
the measured value is the wavelength measured value of a corrected Fourier transform type terahertz source wavelength measuring instrument;
and 7: correcting the original relative spectral power curve to obtain a corrected relative spectral power curve, wherein the corresponding corrected power value is P'λ：
P′λ＝Pλ×kλ
Wherein the original power value corresponding to the original relative spectral power curve is Pλ(ii) a Reading a corrected power value P 'in the corrected relative spectral power curve'λ1/2, respectively denoted as λ1And λ2The following formula is used for calculating the wavelength measurement of the Fourier transform terahertz sourceSpectral resolution Δ λ of the meter:
Δλ＝λ1-λ2。
in a further preferred aspect, the method for calibrating a fourier transform type terahertz source wavelength measuring instrument is characterized in that: three typical calibration wavelength points are selected for calibration, and the three typical calibration wavelength points are respectively located at 0-1/3, 1/3-2/3 and 2/3-1 of the wavelength measurement range.
Advantageous effects
The whole technical effects of the invention are as follows: 1) the calibration of the Fourier transform terahertz source wavelength measuring instrument is realized; 2) according to the calibration method, three calibration points are selected at (0-1/3), (1/3-2/3) and (2/3-1) positions of the measurement range according to the wavelength measurement range of the calibrated terahertz source wavelength measuring instrument in calibration, so that the calibration accuracy of the terahertz source wavelength measuring instrument is improved.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
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The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic diagram of a terahertz characteristic wavelength standard calibration method according to the invention.
Detailed Description
The following detailed description of embodiments of the invention is intended to be illustrative, and not to be construed as limiting the invention.
The invention adopts a terahertz characteristic wavelength standard to calibrate a corrected Fourier transform type terahertz source wavelength measuring instrument, and is called a terahertz characteristic wavelength standard method.
As shown in fig. 1, a preferred example of the terahertz characteristic wavelength standard method mainly includes a terahertz transmittance standard 5, a terahertz characteristic wavelength standard 6, a corrected fourier transform type terahertz source wavelength measuring instrument 7, and a computer 4.
The terahertz transmittance standard 5 is made of silicon chips, covers a wavelength range of (60-3000) mu m, namely a frequency range of (0.1-5) THz, and has a transmittance of 0.71.
The terahertz characteristic wavelength standard 6 can adopt a CO gas chamber standard or SO2A gas cell etalon. The CO gas chamber standard has a characteristic absorption spectrum in (0.1-5) THz, and common calibration wavelength points are as follows: 0.115THz, 0.576THz, 0.922THz, 1.497THz, 2.071THz, 2.525THz, 2.984THz, 3.552THz, 4.003THz, 4.564THz, 5.009THz, etc.; SO (SO)2Typical characteristic wavelengths used for gas cell standards are: 0.426THz, 0.659THz, 0.760THz, 0.860THz, 0.961THz, 1.060THz, 1.160THz, etc.; one or two types of standard devices are selected according to requirements in actual calibration.
The corrected Fourier transform type terahertz source wavelength measuring instrument 7 consists of a broadband terahertz source 7-1, a beam splitter 7-2, a fixed mirror 7-7, a movable mirror 7-4, a collimating optical system 7-5, a sample chamber 7-6, a convergence system 7-7, a terahertz detector 7-8 and a signal processing system 7-9; the broadband terahertz source 7-1 generates terahertz radiation; the beam splitter 7-2 splits the terahertz radiation into two beams, wherein one beam is incident to the fixed mirror 7-7, and the other beam is incident to the movable mirror 7-4; the fixed mirror 7-7 and the movable mirror 7-4 form an interference type measuring light path, and the terahertz radiation is returned to the beam splitter 7-2; the beam splitter 7-2 transmits and reflects the terahertz radiation returned by the fixed mirror 7-7 and the movable mirror 7-4 to the collimating optical system 7-5, and the collimating optical system 7-5 collimates and focuses the terahertz radiation to the sample chamber 7-6; a terahertz transmittance standard 5 or a terahertz characteristic wavelength standard 6 is placed in the sample chamber 7-6; the convergence system 7-7 converges the terahertz radiation to the terahertz detector 7-8, and the terahertz detector 7-8 and the signal processing system 7-9 receive the terahertz radiation signal and transmit the terahertz radiation signal to the computer 4 for data processing to obtain a wavelength or spectral resolution measurement value; the beam splitter 7-2, the fixed mirror 7-7, the collimating optical system 7-5, the sample chamber 7-6, the convergence system 7-7 and the terahertz detector 7-8 are centrally positioned on the same optical axis and form a main optical axis.
The calibration method of the terahertz characteristic wavelength standard method for the wavelength and the spectral resolution parameters comprises the following steps:
step 1: opening the corrected Fourier transform type terahertz source wavelength measuring instrument 7, and measuring the relative spectral transmittance curve tau thereofs,λ；
Step 2: moving the terahertz spectral transmittance standard 5 into a sample chamber of a corrected Fourier transform type terahertz source wavelength measuring instrument 7 and locating on a main optical axis;
and 3, step 3: starting a corrected Fourier transform type terahertz source wavelength measuring instrument 7, irradiating the terahertz spectral transmittance standard 5 by terahertz radiation, and transmitting a measuring result to the computer 4 after the terahertz radiation passes through a convergence system 7-7, a terahertz detector 7-8 and a signal processing system 7-9; obtaining the relative spectral transmittance curve T at the momentd,λ(ii) a Calculating a relative spectral power correction factor k of the corrected Fourier transform type terahertz source wavelength measuring instrument 7 according to the following formulaλ；
kλ＝τd,λ/τs,λ
And 4, step 4: moving the terahertz spectral transmittance standard 5 out of a sample chamber of a corrected Fourier transform type terahertz source wavelength measuring instrument 7, and moving the terahertz characteristic wavelength standard 6 into the sample chamber and positioning the terahertz characteristic wavelength standard on a main optical axis;
and 5, step 5: after the terahertz radiation irradiates the terahertz spectral transmittance standard 5, the measurement result is transmitted to the computer 4 through the convergence system 7-7, the terahertz detector 7-8 and the signal processing system 7-9; the obtained measurement result is the wavelength measurement value of the corrected Fourier transform type terahertz source wavelength measuring instrument 7
And an original relative spectral power curve;
and 6, step 6: the wavelength relative indication value error c 'of the corrected Fourier transform type terahertz source wavelength measuring instrument 7 is calculated according to the following formula'λ：
In the formula ofgIs a wavelength standard of a known terahertz characteristic wavelength standard 6The value of the standard value is adjusted,
is the wavelength measurement value of the corrected Fourier transform type terahertz source wavelength measuring instrument 7.
And 7, step 7: the original power value corresponding to the original relative spectral power curve is Pλ(ii) a Correcting the original relative spectral power curve to obtain a corrected relative spectral power curve, wherein the corresponding corrected power value is P'λ；
P′λ＝Pλ×kλ
Reading a corrected power value P 'in the corrected relative spectral power curve'λ1/2, respectively denoted as λ1And λ2The spectral resolution Δ λ of the fourier transform type terahertz source wavelength measuring instrument 7 is calculated by the following formula.
Δλ＝λ1-λ2
And 8, step 8: the measurement range of the corrected Fourier transform type terahertz source wavelength measuring instrument 7 is (0.1-5) THz, and three calibration points are selected at (0-1/3), (1/3-2/3) and (2/3-1) positions of the wavelength measurement range.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made in the above embodiments by those of ordinary skill in the art without departing from the principle and spirit of the present invention.
Claims (4)
1. A calibration device for a Fourier transform type terahertz source wavelength measuring instrument is characterized in that: the method comprises the following steps of (1) realizing spectral resolution and wavelength parameter calibration by adopting a terahertz transmittance standard, a terahertz characteristic wavelength standard and a computer; the calibration of wavelength parameters is realized by adopting a terahertz characteristic wavelength standard device and a computer, and the calibration of spectral resolution is realized by adopting a terahertz transmittance standard device, a terahertz characteristic wavelength standard device and a computer;
the corrected Fourier transform type terahertz source wavelength measuring instrument consists of a broadband terahertz source, a beam splitter, a fixed mirror, a movable mirror, a collimating optical system, a sample chamber, a convergence system, a terahertz detector and a signal processing system; generating terahertz radiation by a broadband terahertz source; the beam splitter divides the terahertz radiation into two beams, wherein one beam is incident to the fixed mirror, and the other beam is incident to the movable mirror; the fixed mirror and the movable mirror form an interference type measuring light path and return the terahertz radiation to the beam splitter; the beam splitter transmits and reflects the terahertz radiation returned by the fixed mirror and the movable mirror to the collimating optical system, and the collimating optical system collimates and focuses the terahertz radiation to the sample chamber; a terahertz transmittance standard or a terahertz characteristic wavelength standard is placed in the sample chamber; the terahertz detector and the signal processing system receive terahertz radiation signals and transmit the terahertz radiation signals to the computer for data processing to obtain a wavelength or spectral resolution measurement value; the beam splitter, the fixed mirror, the collimating optical system, the sample chamber, the converging system and the terahertz detector are centrally positioned on the same optical axis and form a main optical axis.
2. The calibration apparatus for the terahertz source wavelength measuring instrument of the fourier transform type according to claim 1, wherein: the wavelength range covered by the terahertz transmittance standard is 60-3000 microns; the wavelength value lambda of the terahertz characteristic wavelength standard devicegIt is known that the wavelength range covered is 60 μm to 3000 μm.
3. A method for calibrating a terahertz source wavelength measuring instrument of the fourier transform type using the calibration apparatus of claim 1, wherein: the method for calibrating the wavelength and spectral resolution parameters of the Fourier transform terahertz source wavelength measuring instrument comprises the following steps:
step 1: opening the corrected Fourier transform type terahertz source wavelength measuring instrument and measuring the relative spectral transmittance curve tau thereofs,λ；
Step 2: moving the terahertz spectral transmittance standard into a sample chamber of a corrected Fourier transform type terahertz source wavelength measuring instrument and positioning the standard on a main optical axis;
and step 3: starting a corrected Fourier transform type terahertz source wavelength measuring instrument, irradiating a terahertz spectral transmittance standard by terahertz radiation, and transmitting a measuring result to a computer after the terahertz radiation irradiates the terahertz spectral transmittance standard and passes through a convergence system, a terahertz detector and a signal processing system; obtaining the relative spectral transmittance curve T at the momentd,λ(ii) a Calculating a relative spectral power correction factor k of the corrected Fourier transform type terahertz source wavelength measuring instrument according to the following formulaλ；
kλ＝τd,λ/τs,λ
And 4, step 4: moving the terahertz spectral transmittance standard out of a sample chamber of a corrected Fourier transform type terahertz source wavelength measuring instrument, and moving the terahertz characteristic wavelength standard into the sample chamber and positioning the terahertz characteristic wavelength standard on a main optical axis;
and 5: after irradiating the terahertz spectral transmittance standard device by terahertz radiation, transmitting a measurement result to a computer through a convergence system, a terahertz detector and a signal processing system; the obtained measurement result is the wavelength measurement value of the corrected Fourier transform type terahertz source wavelength measuring instrument
And an original relative spectral power curve;
step 6: calculating and obtaining a wavelength relative indication value error c 'of the corrected Fourier transform type terahertz source wavelength measuring instrument according to the following formula'λ：
In the formula ofgFor the wavelength standard value of the known terahertz characteristic wavelength standard,
the measured value is the wavelength measured value of a corrected Fourier transform type terahertz source wavelength measuring instrument;
and 7: correcting the original relative spectral power curve to obtain a corrected relative spectral power curveLine, the corresponding corrected power value is P'λ：
P′λ＝Pλ×kλ
Wherein the original power value corresponding to the original relative spectral power curve is Pλ(ii) a Reading a corrected power value P 'in the corrected relative spectral power curve'λ1/2, respectively denoted as λ1And λ2Calculating the spectral resolution delta lambda of the Fourier transform terahertz source wavelength measuring instrument by using the following formula:
Δλ＝λ1-λ2。
4. the method for calibrating a terahertz source wavelength measuring instrument of the fourier transform type according to claim 3, wherein: three typical calibration wavelength points are selected for calibration, and the three typical calibration wavelength points are respectively located at 0-1/3, 1/3-2/3 and 2/3-1 of the wavelength measurement range.
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