CN1080394A - Lattice measurement method of parameters and measuring instrument - Google Patents
Lattice measurement method of parameters and measuring instrument Download PDFInfo
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- CN1080394A CN1080394A CN 93105072 CN93105072A CN1080394A CN 1080394 A CN1080394 A CN 1080394A CN 93105072 CN93105072 CN 93105072 CN 93105072 A CN93105072 A CN 93105072A CN 1080394 A CN1080394 A CN 1080394A
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- 230000003287 optical effect Effects 0.000 claims abstract description 19
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- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
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Abstract
A kind of lattice measurement method of parameters and measuring instrument, belong to optical gauge, this measuring method can measure lattice parameter and the net between distance, adopt Liar that two (many) aperture plates are repeatedly focused, write down the object lens position numerical value of each imaging after clear, the difference of two position numerical value is the spacing between these two aperture plates.This aperture plate parameter measurement instrument is made up of precision mechanical system, optical system, stepper motor and drive system thereof, grating positioning measurment system, signal acquisition system five parts.Can automatic focusing and the aperture plate parameter value that records of printout by software processing, the precision height that this aperture plate parameter measurement instrument records can improve the performance of travelling-wave tube.
Description
The present invention relates to surveying instrument, optical gauge
Travelling-wave tube is as a kind of power component, in radar navigation set, obtained using widely, for example in radar as the signal source of scanning system etc.
In grid-control TWT, not having the effect of intercepting and capturing grid is vitals that the electronics that electron gun is emitted quickened, focuses on, also eliminated the influence of roaming ion, and its manufacturing accuracy and installation accuracy directly influence the quality of travelling-wave tube.Do not have intercepting and capturing grid is lattice, needs parameter such as, radius-of-curvature wide to it to carry out strictness in manufacture process and monitors, to guarantee having good interchangeability between each aperture plate; In the travelling-wave tube installation process, guarantee to cooperate the alignment precision between the aperture plate, and make in the batch process spacing unanimity between the aperture plate, with the trajectory of electron motion that guarantees to be accelerated.
At present domestic be used to detect do not have the instrumentation of intercepting and capturing each parameter of grid and still belong to blank, can only adopt that tool microscope carries out visual measurement, measuring accuracy is low, labour intensity is big.Especially the distance between two (many) aperture plates, so measure indirectly because of the overlapping arrangement (see figure 1) of aperture plate can only be used in the method for clogging cushion block between two aperture plates, its precision is very poor.
The purpose of this invention is to provide a kind of measuring method and measuring instrument of measuring parameter between lattice and the installation thereof, especially measure the measuring method and the measuring instrument of the spacing between two (many) aperture plates.
Content of the present invention is to adopt Liar that two (many) aperture plates are repeatedly focused, and writes down the object lens position numerical value of each imaging after clear, and the difference of two position numerical value is the spacing between these two aperture plates.Its detailed process is as follows: will be placed on the worktable after two (a plurality of) aperture plate assemblings, shine aperture plate with reflection source, receive reflected light in the aperture plate upper end by object lens, adjust objective focal length and make first grid focusing clear, with the position numerical value of optical grating measuring system record object lens.And then the adjustment objective focal length, make second grid focusing clear, write down the positional number of object lens again and put.The difference of two object lens position numerical value is two distances between the aperture plate.Then adjust objective focal length successively if any a plurality of aperture plates, can draw the spacing between each aperture plate.
Illustrate that accompanying drawing is as follows:
Fig. 1 is the lattice synoptic diagram
Fig. 2 is a lattice parameter measurement process block diagram of the present invention
Fig. 3 is a lattice parameter measurement instrument structural representation of the present invention
Fig. 4 is a lattice parameter measurement instrument optical system schematic diagram of the present invention
Fig. 5 is for measuring the flow chart of aperture plate spacing
Fig. 6 is the focusing flow chart
The structure and the measuring process of accompanying drawings lattice parameter measurement instrument of the present invention are as follows
Aperture plate (is seen Fig. 1,2) (1,2) is placed on and can makes X-Y on the precision stage that moves, and objective lens receives aperture plate (1 by indirect illumination, 2) imaging behind the reflected light is absorbed the image of aperture plate (1) after send into the picture frame storage after the opto-electronic conversion by the CCD gamma camera.Drive focusing by stepper motor and make object lens make Z to adjust objective focal length to motion, simultaneous computer is judged the sharpness of image automatically, is that stop is adjusted objective focal length behind clear image, this moment by optical grating measuring system read the position readings Z of object lens
1Adjust objective focal length then and make aperture plate (2) imaging,,, make clear image, read the position numerical value Z of object lens this moment again by the action of computer controlled automatic focusing system with aforementioned process
2, Z
1-Z
2Be the spacing between the aperture plate 1,2.
The invention provides the lattice parameter measurement instrument in order to finish above-mentioned functions.This aperture plate parameter measurement instrument by precision mechanical system, optical system, stepper motor and drive system thereof, grating positioning measurment system, signal obtains and disposal system five parts are formed.Precision mechanical system is made up of to coarse motion, micro displacement workbench X-Y direction precision stage and Z.Optical system is made up of transillumination system, reflecting light illuminating system, microcobjective and eyepiece.Stepper motor and drive system thereof are made up of stepper motor driving circuit and interface.Driving circuit is by computer control.The grating positioning measurment system is made up of grating reading head, grating digital display instrument and computer interface circuit.All is furnished with optical grating measuring system in X, Y, three directions of Z.Signal obtains and disposal system is made up of CCD gamma camera, image collection card, computing machine, monitor and printer.Above-mentioned five parts are except that computing machine, monitor, printer and grating digital display instrument are placed separately, and remainder is all installed concentratedly on the main frame of aperture plate parameter measurement instrument.It is as follows to narrate this aperture plate parameter measurement instrument main machine structure: (see figure 3)
This aperture plate parameter measurement instrument main frame on support (3), be provided with X to mobile platform (4) and Y to mobile platform (5), at X objective table (6) is set on mobile platform (4), can lay tested aperture plate (7) on the objective table (6), Z is set to column (8) at Y on mobile platform (5), Z is set to coarse motion worktable (9) at Z on column (8), go up installation Z to micro displacement workbench (10) at Z to coarse motion worktable (9), go up installation optical system (11) and gamma camera (12) at Z to micro displacement workbench (10), at Z stepper motor (13) is set on coarse motion worktable (9) and does the fine setting motion to micromotion platform (10) to drive Z.X to mobile platform (4) and Y to mobile platform (5) by manual adjustment mechanism (14), (15) drive.X is housed to optical grating measuring system (16) at X on mobile platform (4), Y is equipped with Y to optical grating measuring system (17) on mobile platform (5), and Z is equipped with Z to optical grating measuring system (18) on micro displacement workbench (10).
Optical system schematic diagram such as Fig. 4 of this aperture plate parameter measurement instrument illustrate that in conjunction with Fig. 4 measuring process is as follows:
The measured piece (20) that is placed on the X-Y precision stage (19) throws light on through transmission illumination system (21) or reflective illumination system (22).Light process lens (24), grating (25), catoptron (26), lens (27) directive measured pieces (20) that transmission illumination system is sent by light source (23).(two kinds of illuminators are selected for use respectively by the measured parameter difference).The light that sees through the reflection of measured piece or measured piece is through microcobjective (29) and compensating glass, beam divider is divided into two-way after (30), one tunnel imaging is on graticule (31), and for observing usefulness, another road images on the target surface of CCD gamma camera (33) through eyepiece (32).The figure optical signalling that is exaggerated converts the vision signal with different gray scales to through gamma camera, gathers the view picture image by image collection card and sends in the buffer zone in the computing machine.The various parameters of aperture plate can obtain by Computer Processing by different software, and show and printout on monitor.
Adopt the aperture plate parameter measurement instrument of the present invention can be with the contactless spacing that records between lattice parameter and the aperture plate, the measuring accuracy height can improve the performance of travelling-wave tube.
Claims (2)
1, a kind of lattice measurement method of parameters, adopt Liar that two (many) aperture plates are repeatedly focused when it is characterized in that measuring the aperture plate spacing, write down the object lens position numerical value of each imaging after clear, the difference of two position numerical value is the spacing between these two aperture plates.
2, a kind of lattice parameter measurement instrument, it is characterized in that by precision mechanical system, optical system, stepper motor and drive system thereof, the grating positioning measurment system, signal is got and is obtained and the disposal system composition, said precision mechanical system by X-Y direction precision stage and Z to coarse motion, micro displacement workbench is formed, said optical system is by the transillumination system, reflecting light illuminating system, microcobjective and eyepiece are formed, said stepper motor and drive system thereof are by stepper motor, driving circuit and interface thereof are formed, said grating positioning measurment system is by grating reading head, grating digital display instrument and computer interface circuit are formed, said signal obtain and disposal system by the CCD gamma camera, image collection card, computing machine, monitor and printer are formed, above-mentioned five parts are removed computing machine, monitor, printer, outside grating digital display instrument is placed separately, remainder is all installed concentratedly on the main frame of aperture plate parameter measurement instrument, the main frame of said aperture plate parameter measurement instrument on support, be provided with X to mobile platform and Y to mobile platform, at X objective table is set on mobile platform, Z is set to column at Y on mobile platform, Z is set to travelling table at Z on column, at Z optical system and gamma camera are installed on travelling table, at Z stepper motor is set on travelling table, to mobile platform and Y manual adjustment mechanism is arranged on mobile platform at X, to mobile platform, Y respectively adorns optical grating measuring system to mobile platform and Z on travelling table at X.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93105072 CN1080394A (en) | 1993-05-20 | 1993-05-20 | Lattice measurement method of parameters and measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 93105072 CN1080394A (en) | 1993-05-20 | 1993-05-20 | Lattice measurement method of parameters and measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1080394A true CN1080394A (en) | 1994-01-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 93105072 Pending CN1080394A (en) | 1993-05-20 | 1993-05-20 | Lattice measurement method of parameters and measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1080394A (en) |
-
1993
- 1993-05-20 CN CN 93105072 patent/CN1080394A/en active Pending
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