CN108020937B - 光学移相器、光学相控装置、调节方法、LiDAR系统 - Google Patents
光学移相器、光学相控装置、调节方法、LiDAR系统 Download PDFInfo
- Publication number
- CN108020937B CN108020937B CN201711033176.7A CN201711033176A CN108020937B CN 108020937 B CN108020937 B CN 108020937B CN 201711033176 A CN201711033176 A CN 201711033176A CN 108020937 B CN108020937 B CN 108020937B
- Authority
- CN
- China
- Prior art keywords
- optical phase
- waveguide
- phase shifter
- electromagnetic radiation
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 141
- 238000000034 method Methods 0.000 title claims abstract description 23
- 230000005670 electromagnetic radiation Effects 0.000 claims abstract description 67
- 230000000737 periodic effect Effects 0.000 claims 3
- 230000001105 regulatory effect Effects 0.000 description 16
- 230000005855 radiation Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 239000004020 conductor Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/42—Simultaneous measurement of distance and other co-ordinates
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
- G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/50—Phase-only modulation
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016221388.1 | 2016-10-31 | ||
DE102016221388.1A DE102016221388A1 (de) | 2016-10-31 | 2016-10-31 | Optischer Phasenschieber, optische phasengesteuerte Anordnung, Verfahren zur Einstellung einer Phase elektromagnetischer Strahlung, Verfahren zur Einstellung eines Strahlenverlaufs, LiDAR-System |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108020937A CN108020937A (zh) | 2018-05-11 |
CN108020937B true CN108020937B (zh) | 2023-09-19 |
Family
ID=61912860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711033176.7A Active CN108020937B (zh) | 2016-10-31 | 2017-10-30 | 光学移相器、光学相控装置、调节方法、LiDAR系统 |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN108020937B (fr) |
DE (1) | DE102016221388A1 (fr) |
FR (1) | FR3058235B1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018216142A1 (de) * | 2018-09-21 | 2020-03-26 | Robert Bosch Gmbh | Optische Anordnung |
ES2694249B2 (es) | 2018-10-31 | 2019-05-16 | Univ Valencia Politecnica | Acoplador direccional fotonico con sintonizacion independiente de factor de acoplo y desfase |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1227979A (zh) * | 1997-12-02 | 1999-09-08 | 日本电气株式会社 | 波导相控阵天线装置 |
DE19858148A1 (de) * | 1998-12-16 | 2000-12-07 | Siemens Ag | Driftfreier Polarisationstransformator |
CN1784842A (zh) * | 2003-05-08 | 2006-06-07 | 斯欧普迪克尔股份有限公司 | 高速、硅基电-光调制器 |
CN102804033A (zh) * | 2010-03-19 | 2012-11-28 | 日本电信电话株式会社 | 光调制器 |
CN105514541A (zh) * | 2015-12-25 | 2016-04-20 | 清华大学 | 铁氧体型移相器和加速器 |
CN105527733A (zh) * | 2014-10-15 | 2016-04-27 | 埃艾克斯布鲁公司 | 电光相位调制器及调制方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005089332A2 (fr) * | 2004-03-12 | 2005-09-29 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Electrodes a faibles pertes pour modulateur electro-optique |
-
2016
- 2016-10-31 DE DE102016221388.1A patent/DE102016221388A1/de active Pending
-
2017
- 2017-10-27 FR FR1760125A patent/FR3058235B1/fr active Active
- 2017-10-30 CN CN201711033176.7A patent/CN108020937B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1227979A (zh) * | 1997-12-02 | 1999-09-08 | 日本电气株式会社 | 波导相控阵天线装置 |
DE19858148A1 (de) * | 1998-12-16 | 2000-12-07 | Siemens Ag | Driftfreier Polarisationstransformator |
CN1784842A (zh) * | 2003-05-08 | 2006-06-07 | 斯欧普迪克尔股份有限公司 | 高速、硅基电-光调制器 |
CN102804033A (zh) * | 2010-03-19 | 2012-11-28 | 日本电信电话株式会社 | 光调制器 |
CN105527733A (zh) * | 2014-10-15 | 2016-04-27 | 埃艾克斯布鲁公司 | 电光相位调制器及调制方法 |
CN105514541A (zh) * | 2015-12-25 | 2016-04-20 | 清华大学 | 铁氧体型移相器和加速器 |
Also Published As
Publication number | Publication date |
---|---|
FR3058235B1 (fr) | 2021-07-16 |
CN108020937A (zh) | 2018-05-11 |
FR3058235A1 (fr) | 2018-05-04 |
DE102016221388A1 (de) | 2018-05-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10261388B2 (en) | Chip-scale two-dimensional optical phased array with simplified controls | |
US10386489B2 (en) | Beam scanner for autonomous vehicles | |
US20190361096A1 (en) | Holographic Waveguide LIDAR | |
CA2341424C (fr) | Deflecteur de faisceau et detecteur a balayage | |
CN111458776B (zh) | 一种飞秒光丝干涉直写啁啾体光栅制备方法及装置 | |
US10564441B2 (en) | Method of forming an optical device by laser scanning | |
US7898668B2 (en) | Terahertz spectrometer | |
US20090225311A1 (en) | Probe apparatus and terahertz spectrometer | |
CN108020937B (zh) | 光学移相器、光学相控装置、调节方法、LiDAR系统 | |
Li et al. | Solid-state FMCW LiDAR with two-dimensional spectral scanning using a virtually imaged phased array | |
CN106442335B (zh) | 一种显微可视化抽运探测热反射系统 | |
Li et al. | Quasi-4D laser diagnostics using an acousto-optic deflector scanning system | |
CN104392914A (zh) | 双波长激光退火装置及其方法 | |
CN105990195A (zh) | 减少激光退火的脉冲激光束轮廓的非均匀性的系统及方法 | |
CN108225885B (zh) | 一种微区激光加热装置及加热方法 | |
Yoon et al. | Demonstration of high-accuracy 3D imaging using a Si optical phased array with a tunable radiator | |
CN111492279B (zh) | 用于调节光学光子集成电路中的制造差异的装置和方法 | |
Tang et al. | Sub-aperture coherence method to realize ultra-high resolution laser beam deflection | |
CN102950382A (zh) | 用于刻蚀电控衍射光学器件的激光直写刻蚀系统及其方法 | |
Zhang et al. | A Tri-Layer Si₃N₄-on-Si Optical Phased Array With High Angular Resolution | |
US8724111B2 (en) | Flash photolysis system | |
Xing et al. | A 2-GHz discrete-spectrum waveband-division microscopic imaging system | |
US20190302568A1 (en) | Apparatus and Method for Beam Scanner | |
US20030174314A1 (en) | Digital optical beam profiler | |
CN202649600U (zh) | 时域光脉冲整形装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |