CN108020355B - Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor - Google Patents
Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor Download PDFInfo
- Publication number
- CN108020355B CN108020355B CN201711191111.5A CN201711191111A CN108020355B CN 108020355 B CN108020355 B CN 108020355B CN 201711191111 A CN201711191111 A CN 201711191111A CN 108020355 B CN108020355 B CN 108020355B
- Authority
- CN
- China
- Prior art keywords
- force
- upper cover
- lower cover
- central hole
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 10
- 235000012431 wafers Nutrition 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 17
- 230000000694 effects Effects 0.000 claims description 16
- 238000007906 compression Methods 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 3
- 230000003750 conditioning effect Effects 0.000 claims description 3
- 238000010008 shearing Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a small-size large-range integrated piezoelectric six-dimensional force sensor and a measuring method thereof, wherein the small-size large-range integrated piezoelectric six-dimensional force sensor comprises an upper cover, a lower cover and a load dividing ring, a first circular central hole and four first threaded holes distributed in the same circle are formed in the upper surface of the upper cover, a second mounting threaded hole distributed in the same circle is formed in the lower cover, a circular annular groove and a second circular central hole are formed in the upper surface of the lower cover, a force sensitive element is placed on the second central hole, the upper surface of the force sensitive element is in contact with the lower surface of the circular central hole, the load dividing ring is provided with a circular wire guide hole, and the upper cover, the load dividing ring, the force sensitive element and the lower cover are mounted together through bolts.
Description
Technical Field
The invention relates to the field of sensors and monitoring thereof, in particular to a measuring method of a small-size large-range integrated piezoelectric six-dimensional force sensor.
Background
At present, piezoelectric sensors are a dynamic measurement form using intelligent piezoelectric materials as force-sensitive elements. The fundamental research of the theory and application of the piezoelectric effect is always the core problem of the research of the piezoelectric science. The piezoelectric sensor has the main characteristics of wide frequency band, high sensitivity and high signal-to-noise ratio, and is particularly suitable for dynamic measurement. The traditional six-dimensional force sensor has various types, such as a cross-structure six-dimensional force sensor, a stewart structure six-dimensional force sensor, a cylindrical six-dimensional force sensor and the like, wherein the traditional piezoelectric six-dimensional force sensor generally needs a plurality of crystal groups to respectively detect generalized six-dimensional force, generally causes the defects of complex structure, large volume, heavy weight, difficult decoupling and the like, and the key point of the development of the piezoelectric six-dimensional force sensor in the future is how to overcome the problem of large volume caused by the layout of the crystal groups.
The piezoelectric six-dimensional force large-force sensor disclosed in patent CN101149300 can realize large-range six-dimensional force dynamic measurement, but its own mechanism adopts a stewart structure, which causes the problems of difficult decoupling and large volume, and has high requirement on installation accuracy. Patent CN101149299 discloses a six dimension force cell of three-dimensional power integral assembly formula, and the sensor of this structure has adopted integral assembly formula, and easy to assemble maintenance can measure space six dimension power equally, but the structure is complicated for the integral assembly formula, and work occupation space is big.
Patent 202153166U "a parallel piezoelectricity six-dimensional heavy force sensor" has adopted four groups of piezoelectricity quartz wafers to do as the force sensing element, patent CN103196594A "a spoke formula parallel piezoelectricity six-dimensional force sensor and measuring method" has adopted eight groups of quartz wafers to do as the force sensing element, and these two sensors all can realize the dynamic measurement of wide range load through respective special layout, but have bulky, weight is big, defect with high costs.
Patent CN1005651460 discloses a flat piezoelectric six-dimensional force sensor, which adopts a flat plate structure, and measures a generalized six-dimensional force in a mode of six-group crystal group layout, and in order to limit the volume of the sensor, the sensor of the structure does not use an elastic body, so that the measurement range of the sensor is small, and most of the use requirements cannot be met.
Disclosure of Invention
The invention aims to solve the technical problem of providing a measuring method of a small-size large-range integrated piezoelectric six-dimensional force sensor, which has the advantages of large measuring range, good technical performance, reliable work and easy installation and maintenance.
The invention achieves the purpose by the following technical means:
the small-size large-range integrated piezoelectric six-dimensional force sensor comprises an upper cover (1), a load sharing ring (2) and a lower cover (3), wherein a circular central hole (h) is formed in the upper surface (d) of the upper cover (1), a circular annular groove (f) is formed in the upper surface (a) of the lower cover (3), a circular central hole (e) is formed in the lower cover (3), a force sensitive element (4) is placed on the central hole (e), the upper surface (b) of the force sensitive element (4) is in mutual contact with the lower surface (c) of the upper cover (1), and the upper cover (1), the load sharing ring (2), the lower cover (3) and the force sensitive element (4) are installed together through a bolt (6) and a nut (5).
As a further limitation of the technical scheme, the central hole (h) of the upper cover (1) and the central hole (e) of the lower cover (3) apply pre-tightening force to the force sensitive element (4) through a bolt (6).
As a further limitation to the technical scheme, the lower cover (3) is provided with four threaded holes (g) distributed in the same circle and used for mounting and fixing the sensor, and different load sharing ratios can be realized by adjusting the thickness of the load sharing ring (2).
As a further limitation of the present solution, the force-sensitive element (4) is composed of three X0 ° cut wafers (10) subjected to a pull-press effect, three Y0 ° cut wafers (11) subjected to a shear effect, eight quarter electrode plates (Q5), (Q6), (Q7), (Q8), (Q13), (Q14), (Q15), (Q16), eight half electrode plates (Q1), (Q2), (Q3), (Q4), (Q9), (Q10), (Q10), two full electrode plates (Q10), three insulating plates (12), and two adjustment shims (7), wherein the electrode plate (Q10) is used for grounding, the electrode plate (Q10), (Q10) is used for outputting a measurement signal of Fx, the electrode plate (Q10), (Q10) is used for outputting a measurement signal of Fy, the electrode plate (Q10), (Q10) is used for outputting a measurement signal of Mz, electrode pieces (Q13), (Q14), (Q15), and (Q16) are used to output the measurement signal of Fz, electrode pieces (Q9) and (Q10) are used to output the measurement signal of Mx, and electrode pieces (Q11) and (Q12) are used to output the measurement signal of My.
When the upper cover (1) bears force, the force is transmitted to the force-sensitive element (4) through the load-sharing effect of the upper cover (1) and the load-sharing ring (2), the force-sensitive element (4) in the sensor automatically decomposes the acting force through three groups of tension-compression effects and three groups of shearing effects and generates corresponding electric charge quantity, the electric charge quantity is changed into corresponding voltage output [ V1, V2, V3, V4, V5, V6, V7, V8, V9, V10, V11, V12, V13, V14, V15 and V16] through a charge amplifier, the output signal is converted into a digital signal through signal conditioning and an A/D data acquisition card, and the digital signal is input into a vector computer to obtain each main parameter of the space force through the following formula:
in the formula, K1，K2，K3Is the distance between the center of the electrode area to the center of the coordinates.
Compared with the prior art, the invention has the advantages and positive effects that: the measuring method of the small-size large-range integrated piezoelectric six-dimensional force sensor has good static and state characteristics, the small-size large-range integrated piezoelectric six-dimensional force sensor is low in manufacturing cost, high in rigidity and the like, and due to the design idea of crystal group surface domain charge distribution of the sensor, the sensor can obtain an output result without decoupling operation on an output signal; different load sharing ratios can be realized by changing the thickness of the load sharing ring, and the measuring device has good use effect aiming at different measuring ranges; the sensor has the advantages of simple structure, good symmetry, high stability, high sensitivity, simple manufacture, easy production and long service life.
Drawings
FIG. 1 is a schematic view of a small-size large-range integrated piezoelectric six-dimensional force sensor
FIG. 2 is a top and bottom isometric view of the upper cover
FIG. 3 is a top and bottom isometric view of the lower cover
FIG. 4 is an isometric view of the load-sharing ring from top to bottom
FIG. 5 is a schematic view of a force sensor
FIG. 6 is an assembly view of a small-sized large-range integrated piezoelectric six-dimensional force sensor
In the figure: 1-upper cover, 2-load sharing ring, 3-lower cover, 4-force sensitive element, 5-nut, 6-bolt, 7-adjusting gasket, 8-wire hole, 9-wire, 10-X0 degree cutting wafer, 11-Y0 degree cutting wafer 12-insulation resistance sheet, a-lower cover upper surface, b-force sensitive element upper surface, c-upper cover lower surface, d-upper cover upper surface, e-lower cover central hole, f-lower cover annular groove, g-lower cover threaded hole, h-upper cover central hole, i-upper cover mounting threaded hole, Q0, Q1, Q2, Q3, Q4, Q5, Q6, Q7, Q8, Q9, Q10, Q11, Q12, Q13, Q14, Q15, Q16-electrode sheet.
Detailed Description
The implementation of the present invention is specifically described below with reference to the accompanying drawings, and referring to fig. 1 to 5, the small-size large-range integrated piezoelectric six-dimensional force sensor according to the present invention includes an upper cover (1), a load-sharing ring (2), and a lower cover (3), wherein an upper surface (d) of the upper cover (1) is provided with a circular central hole (h), an upper surface (a) of the lower cover (3) is provided with a circular groove (f), the lower cover (3) is provided with a circular central hole (e), a force-sensitive element (4) is placed on the central hole (e), an upper surface (b) of the force-sensitive element (4) and a lower surface (c) of the upper cover (1) are in contact with each other, and the upper cover (1), the load-sharing ring (2), the lower cover (3), and the force-sensitive element (4) are mounted together through a bolt (6) and a nut (5).
The force-sensitive element (4) is applied with pretightening force by a central hole (h) of the upper cover (1) and a central hole (e) of the lower cover (3) through a bolt (6).
The lower cover (3) is provided with four threaded holes (g) distributed in the same circle and used for mounting and fixing the sensor, and different load sharing ratios can be realized by adjusting the thickness of the load sharing ring (2).
The force-sensitive element (4) consists of three X0 DEG cut wafers (10) bearing a tension and compression effect, three Y0 DEG cut wafers (11) bearing a shear effect, eight quarter-electrode plates (Q5), (Q6), (Q7), (Q8), (Q13), (Q14), (Q15), (Q16), eight half-electrode plates (Q1), (Q2), (Q3), (Q4), (Q9), (Q10), Q11), (Q12), two complete electrode plates (Q0), three insulating resistance plates (12) and two adjusting gaskets (7). Wherein, the lower surface of an X0 degree cutting wafer is connected with the upper surface of an adjusting shim and is directly grounded, the upper surface of a quartz wafer is connected with the lower surfaces of two half electrode plates (Q11) and (Q12) for outputting a MY measuring signal, the upper surfaces of the two half electrode plates (Q11) and (Q12) are connected with the lower surface of an insulation resistance sheet (12) for preventing charge leakage, the upper surface of the insulation resistance sheet (12) is connected with the lower surfaces of the two half electrode plates (Q9) and (Q10), the upper surfaces of the two half electrode plates (Q9) and (Q10) are mutually contacted with a second X0 degree cutting wafer for outputting an MX measuring signal, the second quartz wafer is connected with a Y0 degree cutting wafer in parallel and is grounded through a complete electrode plate (Q0), the upper surface of the Y0 degree cutting wafer is connected with four quarter electrode plates (Q5), (Q6) and (Q7) and (Q8) for outputting an Mz measuring signal, and then the charge leakage is prevented by an insulating resistance sheet, four quarter electrode plates (Q13), (Q14), (Q15) and (Q16) are connected to the upper surface of the insulating resistance sheet to output FX signals measured by a third X0-degree cut-type wafer, the third X0-degree cut-type wafer is connected with a second Y0-degree cut-type wafer in parallel and grounded through a complete electrode plate (Q0), the upper surface of the second Y0-degree cut-type wafer is connected with two half electrode plates (Q3) and (Q4) to output measurement signals of FY, the charge leakage is prevented by an insulating resistance sheet (12), the lower surface of the third Y0-degree cut-type wafer is connected with the two half electrode plates (Q1) and (Q2) to output measurement signals of FX, and the upper surface of the third Y0-degree cut-type wafer is connected with an.
The upper cover (1) and the lower cover (3) are both made of 304 stainless steel. During installation, a crystal group is placed on the lower cover (3) according to the sensitivity direction, a lead (9) of the force sensitive element (4) is led out through a lead hole (8), then the load sharing ring (2) is placed in an annular groove (f) of the lower cover (3), the upper cover (1) is covered and connected together through a bolt (6) and a nut (5) and simultaneously applies 1000N-3000N pretightening force to the force sensitive element, the upper surface (b) of the force sensitive element (4) is ensured to be contacted with the lower surface (c) of the upper cover (1), the upper cover (1) is provided with four threaded holes (i) distributed in the same circle and the lower cover (3) is provided with four threaded holes (g) distributed in the same circle, and the four threaded holes (g) are used for installation and fixation of the sensor. Different load sharing ratios of the parallel structure can be realized by adjusting the wall thickness of the load sharing ring (2), and the load sharing ring is used for different measurement range requirements.
When the sensor upper cover (1) bears force, the force is transmitted to the force-sensitive element (4) through the load sharing effect of the sensor upper cover (1) and the load sharing ring (2), the force-sensitive element (4) in the sensor automatically decomposes the acting force through three groups of tension and compression effects and three groups of shearing effects and generates corresponding electric charge quantity, and the electric charge quantity is changed into corresponding voltage output [ V1, V2, V3, V4, V5, V6, V7, V8, V9, V10, V11, V12, V13, V14, V15 and V16] output through a charge amplifier; the output signal is converted into a digital signal by a signal conditioning and A/D data acquisition card and then is input into a computer to obtain each main parameter of the space vector force by the following formula:
in the formula, K1，K2，K3Is the distance between the center of the electrode area and the coordinate center
The measuring method of the small-size large-range integrated piezoelectric six-dimensional force sensor has good static and dynamic characteristics, and the small-size large-range integrated piezoelectric six-dimensional force sensor has the advantages of low manufacturing cost, high rigidity, simple structure, good symmetry, high stability, high sensitivity, simplicity in manufacturing, easiness in production, long service life and the like.
The above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and the present invention uses a square wafer as the force sensor, and a round wafer also belongs to the protection scope of the present invention.
Claims (1)
1. The measuring method of the small-size large-range integrated piezoelectric six-dimensional force sensor comprises the steps that the small-size large-range integrated piezoelectric six-dimensional force sensor comprises an upper cover (1), a load sharing ring (2) and a lower cover (3); the upper cover is characterized in that a circular central hole (h) is formed in the upper surface (d) of the upper cover (1), a circular groove (f) is formed in the upper surface (a) of the lower cover (3), a circular central hole (e) is formed in the lower cover (3), a force sensing element (4) is placed on the central hole (e), the upper surface (b) of the force sensing element (4) is in mutual contact with the lower surface (c) of the upper cover (1), and the upper cover (1), the load sharing ring (2), the lower cover (3) and the force sensing element (4) are mounted together through a bolt (6) and a nut (5); the force-sensitive element (4) is applied with pretightening force by a central hole (h) of the upper cover (1) and a central hole (e) of the lower cover (3) through a bolt (6); the lower cover (3) is provided with four threaded holes (g) distributed in the same circle and used for mounting and fixing the sensor, and different load sharing ratios can be realized by adjusting the thickness of the load sharing ring (2); the force-sensitive element (4) consists of three X0 DEG cut wafers (10) which are subjected to a tension-compression effect, three Y0 DEG cut wafers (11) which are subjected to a shear effect, eight quarter electrode plates (Q5), (Q6), (Q7), (Q8), (Q13), (Q14), (Q15), (Q16), eight half electrode plates (Q16), (Q16), (Q16), (Q16), (Q16), two full electrode plates (Q16), three insulating resistive plates (12) and two adjusting shims (7), wherein the electrode plate (Q16) is used for grounding, the electrode plate (Q16), (Q16) is used for outputting a measuring signal of Fx, the electrode plate (Q16), (Q16) is used for outputting a measuring signal of Fy, the electrode plate (Q16), (Q16) is used for outputting a measuring signal of Mz, the electrode plate (Q16), (Q15), (Q16) for outputting a measurement signal of Fz, electrode pad (Q9), (Q10) for outputting a measurement signal of Mx, electrode pad (Q11), (Q12) for outputting a measurement signal of My; the measuring method comprises the following steps, and is characterized in that when the sensor upper cover (1) bears force, the force is transmitted to the force-sensitive element (4) through the load sharing action of the sensor upper cover (1) and the load sharing ring (2); the force sensitive element (4) in the sensor automatically decomposes the acting force through three groups of tension and compression effects and three groups of shearing effects and generates corresponding charge quantity, and the corresponding charge quantity becomes corresponding voltage output [ V1, V2, V3, V4, V5, V6, V7, V8, V9, V10, V11, V12, V13, V14, V15 and V16] output through a charge amplifier; the output signal is converted into a digital signal by a signal conditioning and A/D data acquisition card and then is input into a computer to obtain each main parameter of the space vector force by the following formula:
in the formula, K1，K2，K3Is the distance between the center of the electrode area to the center of the coordinates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711191111.5A CN108020355B (en) | 2017-11-24 | 2017-11-24 | Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711191111.5A CN108020355B (en) | 2017-11-24 | 2017-11-24 | Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108020355A CN108020355A (en) | 2018-05-11 |
| CN108020355B true CN108020355B (en) | 2020-03-10 |
Family
ID=62080138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711191111.5A Active CN108020355B (en) | 2017-11-24 | 2017-11-24 | Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108020355B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110174205B (en) * | 2019-04-02 | 2021-01-12 | 济南大学 | Measuring method of piezoelectric six-dimensional force sensor for robot joint |
| CN112611498B (en) * | 2019-09-18 | 2022-02-01 | 马洪文 | Multi-dimensional force acquisition method based on multi-dimensional force sensor of parallel rod system |
| CN110887587B (en) * | 2019-12-30 | 2024-05-14 | 济南大学 | Large-range piezoelectric film three-dimensional force sensor and measuring method thereof |
| CN111397788B (en) * | 2020-04-30 | 2021-07-16 | 大连理工大学 | Integrated five-dimensional force measuring method |
| CN113237578B (en) * | 2021-05-08 | 2022-09-30 | 大连理工大学 | Multi-dimensional force/moment measuring method based on full-shear effect quartz wafer |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101793574B (en) * | 2010-03-17 | 2011-09-14 | 大连理工大学 | Piezoelectric type six-dimensional force sensor with adjustable load sharing ratio and test method thereof |
| CN202153166U (en) * | 2011-07-28 | 2012-02-29 | 济南大学 | Parallel piezoelectric six-dimensional powerful force sensor |
| CN102519634B (en) * | 2011-12-12 | 2014-04-09 | 济南大学 | Piezoelectric film force sensor |
| CN202485840U (en) * | 2011-12-12 | 2012-10-10 | 济南大学 | Force transducer based on piezoelectric film |
| CN103196594B (en) * | 2013-04-10 | 2015-09-09 | 济南大学 | A kind of spoke type parallel piezoelectricity six-dimensional force sensor and measuring method |
| JP2016211950A (en) * | 2015-05-08 | 2016-12-15 | セイコーエプソン株式会社 | Force detection device and robot |
-
2017
- 2017-11-24 CN CN201711191111.5A patent/CN108020355B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108020355A (en) | 2018-05-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108020355B (en) | Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor | |
| EP3454032B1 (en) | Six-dimensional force and torque sensor | |
| CN101793574B (en) | Piezoelectric type six-dimensional force sensor with adjustable load sharing ratio and test method thereof | |
| CN103196594B (en) | A kind of spoke type parallel piezoelectricity six-dimensional force sensor and measuring method | |
| CN100480653C (en) | Large value piezoelectric quartz multi-component force sensor | |
| CN202153166U (en) | Parallel piezoelectric six-dimensional powerful force sensor | |
| CN102288334B (en) | Parallel piezoelectric six-dimensional large force sensor | |
| CN101524818A (en) | Piezoelectric-type four-dimensional cutting force-measuring platform | |
| CN104677543B (en) | Using piezoelectric six-dimension power/torque sensor of 6 groups of dynamometry sensing units | |
| CN101750173B (en) | Piezoelectric type six-dimensional force sensor | |
| WO2014190932A1 (en) | Elastomer structure of multi-range weighing sensor | |
| CN203191135U (en) | Spoke-type parallel piezoelectric six-dimensional force sensor | |
| CN110174205B (en) | Measuring method of piezoelectric six-dimensional force sensor for robot joint | |
| CN109282922A (en) | A kind of piezoelectricity drilling dynamometer based on sensor cross Unequal distance arrangement | |
| CN100487400C (en) | Differential type piezo-electric six-dimensional sensing unit | |
| CN112697107A (en) | Low-power consumption tilt sensor based on NB-IOT thing networking | |
| CN104457966A (en) | Piezoelectric type decoupling micro-vibration measurement system | |
| CN203216659U (en) | Three-dimensional force measurement apparatus | |
| CN100429520C (en) | Piezoelectric three dimension acceleration sensor | |
| CN106092498B (en) | A kind of five component piezoelectric types " double balances " | |
| CN203519152U (en) | Ultra-low frequency six-component micro-vibration measurement system | |
| CN112304483A (en) | Combined self-decoupling piezoelectric film three-dimensional force sensor and measuring method thereof | |
| CN204893721U (en) | Silicon chip grinding force dynamic signal detection device | |
| CN107063519B (en) | A kind of adjustable piezoelectric type hexa-dimensional force sensor of load sharing | |
| CN104034474A (en) | Parallel-connection 3-SPU six-dimension force transducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |