CN108020355A - Small size wide range integrated form piezoelectric six-dimensional force sensor and its measuring method - Google Patents
Small size wide range integrated form piezoelectric six-dimensional force sensor and its measuring method Download PDFInfo
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- CN108020355A CN108020355A CN201711191111.5A CN201711191111A CN108020355A CN 108020355 A CN108020355 A CN 108020355A CN 201711191111 A CN201711191111 A CN 201711191111A CN 108020355 A CN108020355 A CN 108020355A
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- 238000000034 method Methods 0.000 title claims abstract description 8
- 238000009434 installation Methods 0.000 claims abstract description 9
- 230000000694 effects Effects 0.000 claims description 17
- 238000009413 insulation Methods 0.000 claims description 9
- 238000010008 shearing Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
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- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
The invention discloses a kind of small size wide range integrated form piezoelectric six-dimensional force sensor and its measuring method, including upper cover, lower cover and load sharing ring, the upper surface of the upper cover is provided with round center hole one and four threaded holes one with circle distribution, the lower cover is provided with the installation threaded hole two with circle distribution, the lower cap upper surface is provided with toroidal cavity and round center hole two, force sensing element is placed on the centre bore two, the force sensing element upper surface is contacted with round center hole a lower surface, the load sharing ring is provided with round conductor hole, the upper cover, load sharing ring, force sensing element and lower cover are installed together by bolt, the present invention is small, range is big, good manufacturability, measuring accuracy is high, service life is grown, it is easy to operate, cost is low.
Description
Technical field
The present invention relates to sensor and its monitoring field, more particularly to small size wide range integrated form piezoelectric six-dimensional power senses
Device and its measuring method.
Background technology
At present, piezoelectric transducer is a kind of dynamic measurement form by the use of intelligent piezo material as force sensing element.Pressure
Electrical effect theory and the key problem that applied basic research is always piezoelectricity disciplinary study.Piezoelectric transducer is mainly characterized by
Bandwidth, high sensitivity, signal-to-noise ratio are high, are particularly suitable for dynamic measures.Traditional six-dimension force sensor species is various, such as cross
Structure six-dimension force snesor, Stewart structure six-dimension force snesor, tubular six-dimension force sensor etc., wherein, traditional piezoelectricity
Formula six-dimension force sensor generally requires multigroup brilliant group and detects broad sense six-dimensional force respectively, generally causes complicated, and volume is big, weight
How the shortcomings of amount is big, and decoupling is difficult, be following piezoelectric six-dimension the problem of large volume caused by the layout that will overcome polycrystalline group
The key point of the development of force snesor.
A kind of piezoelectric six-dimension power heavy force sensor disclosed in patent CN101149300, which can be real
Existing wide range six-dimensional force dynamic measures, but its own mechanism employs Stewart structure, and it is big to cause decoupling difficulty, volume
The problem of, and the requirement to installation accuracy is very high.A kind of three-dimensional force integrally assembled type six is disclosed in patent CN101149299
Force cell is tieed up, the sensor of the structure employs integrally assembled type, easy to installation and maintenance, equally can be sextuple with measurement space
Power, but assembly type cause it is complicated, work occupied space it is big.
Patent 202153166U " a kind of parallel piezoelectric six-dimensional powerful force sensor " employs four groups of piezoelectric quartz crystal plates and does
For force sensing element, patent CN103196594A " a kind of spoke type parallel piezoelectricity six-dimensional force sensor and its measuring method " is employed
For eight groups of quartz wafers as force sensing element, the two sensors can realize the dynamic of wide range load by respective particular topology
Measurement, but big there are volume, weight is big, it is of high cost the defects of.
A kind of flat type piezoelectric six-dimensional force sensor is disclosed in patent CN1005651460, the sensor is using flat
Structure, measures broad sense six-dimensional force by way of six groups of brilliant group layouts, causes the structure to limit the volume of the sensor
Sensor does not use elastomer, so as to cause the smaller of sensor measuring range, can not meet most requirement.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of small size wide range integrated form piezoelectric six-dimensional force sensor and
Its measuring method, measurement range is big, technological performance, reliable operation, is easily installed the small size wide range from decoupling of maintenance
Integrated form piezoelectric six-dimensional force sensor.
The present invention realizes goal of the invention by following technological means：
A kind of small size wide range integrated form piezoelectric six-dimensional force sensor, including including upper cover（1）, load sharing ring（2）And lower cover
（3）, it is characterized in that：The upper cover（1）Upper surface（d）It is provided with round center hole（h）, the lower cover（3）Upper surface（a）Open
There is toroidal cavity（f）, the lower cover（3）It is provided with round center hole（e）, the centre bore（e）Upper placement force sensing element（4）,
The force sensing element（4）Upper surface（b）With upper cover（1）Lower surface（c）Contact with each other, the upper cover（1）, load sharing ring（2）、
Lower cover（3）And force sensing element（4）Pass through bolt（6）And nut（5）It is installed together.
Limited as to the further of the technical program, the upper cover（1）Centre bore（h）With the lower cover（3）
Centre bore（e）Pass through bolt（6）By force sensing element（4）Apply pretightning force.
Limited as to the further of the technical program, the lower cover（3）It is provided with four threaded holes with circle distribution（g）,
Installation for sensor is fixed, by adjusting load sharing ring（2）Thickness can realize different load sharing ratios.
Limited as to the further of the technical program, the force sensing element（4）Bear pulling and pressed effect by three pieces X0 ° is cut
Type chip（10）, three pieces bear Y0 ° of cut type chip of shearing effect（11）, eight pieces a quarter electrode slices（Q5）,（Q6）,
（Q7）,（Q8）,（Q13）,（Q14）,（Q15）,（Q16）, eight pieces half electrode slices（Q1）,（Q2）,（Q3）,（Q4）,（Q9）,
（Q10）, Q11）,（Q12）, two panels full electrode piece（Q0）, three pieces insulation resistance piece（12）With two adjust pads（7）Composition,
Wherein, electrode slice（Q0）For being grounded, electrode slice（Q1）,（Q2）For exporting the measuring signal of Fx, electrode slice（Q3）,（Q4）With
In the measuring signal of output Fy, electrode slice（Q5）,（Q6）,（Q7）,（Q8）For exporting the measuring signal of Mz, electrode slice（Q13）,
（Q14）,（Q15）,（Q16）For exporting the measuring signal of Fz, electrode slice（Q9）,（Q10）For exporting the measuring signal of Mx, electricity
Pole piece（Q11）,（Q12）For exporting the measuring signal of My.
When sensor upper cover is withstood forces, force sensing element is delivered to by the effect of the load sharing of sensor upper cover and load sharing ring
On, the force sensing element in sensor by active force automatic classifying and produces corresponding by three groups of pulling and pressed effects and three groups of shearing effects
The quantity of electric charge, by charge amplifier become corresponding voltage output [V1, V2, V3, V4, V5, V6, V7, V8, V9, V10, V11,
V12, V13, V14, V15, V16] export, the signal of output is changed analog signal by signal condition and A/D data collecting cards
Calculation machine being inputted for digital signal each major parameter of space vector power being obtained by equation below, specific formula is as follows：
The distance between in formula, K1, K2, K3 is electrode surface domain center to coordinate center.
Compared with prior art, the advantages and positive effects of the present invention are：Small size wide range of the present invention integrates
Formula piezoelectric six-dimensional force sensor has the advantages that static and step response is good, and manufacture cost is low, and rigidity is high, due to the crystalline substance of this sensor
The mentality of designing of group face domain distribution of charges so that sensor need not carry out output signal decoupling computing and can be obtained by output
As a result；By varying the thickness of load sharing ring, it is possible to achieve different load sharing ratios, have for different measurement ranges makes well
Use effect；The sensor construction is simple, and symmetry is good, and stability is high, and high sensitivity, is simple to manufacture and is readily produced, service life
It is long.
Brief description of the drawings
Fig. 1 is small size wide range integrated form piezoelectric six-dimensional force sensor structure diagram
Fig. 2 is two view of isometric above and below upper cover
Fig. 3 is two view of isometric above and below lower cover
Fig. 4 is isometric view above and below load sharing ring
Fig. 5 is force sensing element structure diagram
Fig. 6 small size wide range integrated form piezoelectric six-dimensional force sensor assembling schematic diagrams
In figure：1- upper covers, 2- load sharing rings, 3- lower covers, 4- force sensing elements, 5- nuts, 6- bolts, 7- adjust pads, 8- wire guides,
9- conducting wires, 10-X0 ° of cut type chip, 11-Y0 ° of cut type chip 12- insulation resistance piece, cap upper surface under a-, b- force sensing element upper tables
Face, c- upper covers lower surface, the upper cap upper surfaces of d-, e- lower cover centre bores, f- lower cover annular grooves, g- lower cover threaded holes, h- upper covers
Centre bore, i- upper covers installation threaded hole, Q0, Q1, Q2, Q3, Q4, Q5, Q6, Q7, Q8, Q9, Q10, Q11, Q12, Q13, Q14,
Q15, Q16- electrode slice.
Embodiment
The implementation of the present invention is illustrated below in conjunction with the accompanying drawings, and referring to Fig. 1-5, the present invention includes upper cover（1）, load sharing ring
（2）And lower cover（3）, it is characterized in that：The upper cover（1）Upper surface（d）It is provided with round center hole（h）, the lower cover（3）It is upper
Surface（a）It is provided with toroidal cavity（f）, the lower cover（3）It is provided with round center hole（e）, the centre bore（e）Upper placement power is quick
Element（4）, the force sensing element（4）Upper surface（b）With upper cover（1）Lower surface（c）Contact with each other, the upper cover（1）, point
Carry ring（2）, lower cover（3）And force sensing element（4）Pass through bolt（6）And nut（5）It is installed together.
The upper cover（1）Centre bore（h）With the lower cover（3）Centre bore（e）Pass through bolt（6）By the quick member of power
Part（4）Apply pretightning force.
The lower cover（3）It is provided with four threaded holes with circle distribution（g）, the installation for sensor fixes, and passes through adjusting
Load sharing ring（2）Thickness can realize different load sharing ratios.
The force sensing element（4）X0 ° of cut type chip of pulling and pressed effect is born by three pieces（10）, three pieces bear shearing effect
Y0 ° of cut type chip（11）, eight pieces a quarter electrode slices（Q5）,（Q6）,（Q7）,（Q8）,（Q13）,（Q14）,（Q15）,
（Q16）, eight pieces half electrode slices（Q1）,（Q2）,（Q3）,（Q4）,（Q9）,（Q10）, Q11）,（Q12）, two panels it is completely electric
Pole piece（Q0）, three pieces insulation resistance piece（12）With two adjust pads（7）Composition.Wherein, a piece of X0 ° of cut type chip lower surface with
The upper surface of a piece of adjust pad, which is connected, to be directly grounded, the upper surface of quartz wafer and two half block electrode slices（Q11）、（Q12）
Lower surface be connected for the measuring signal for exporting MY, two half block electrode slices（Q11）、（Q12）Upper surface and insulation resistance
Piece（12）Lower surface, which is connected, prevents charge leakage, insulation resistance piece（12）Upper surface and two half block electrode slices（Q9）、（Q10）
Lower surface is connected, two half block electrode slices（Q9）、（Q10）Upper surface contact with each other with second X0 ° of cut type chip for defeated
Go out the measuring signal of MX, the second bauerite chip passes through full electrode piece（Q0）With a piece of Y0 ° of cut type chip earth, Y0 °
Cut type upper wafer surface connects four a quarter block electrode slices（Q5）、（Q6）、（Q7）、（Q8）The measuring signal of Mz is exported, then
Charge leakage is prevented by insulation resistance piece, insulation resistance piece upper surface connects four a quarter block electrode slices（Q13）、
（Q14）、（Q15）、（Q16）The FX signals of X0 ° of cut type chip measurement of three pieces are exported, X0 ° of cut type chip of three pieces passes through complete
Electrode slice（Q0）With second Y0 ° of cut type chip and with being connected, second Y0 ° of cut type upper surface connects two half block electrode slices
（Q3）、（Q4）The measuring signal of FY is exported, then passes through insulation resistance piece（12）Prevent charge leakage, Y0 ° of cut type chip of three pieces
Lower surface and two half block electrode slices（Q1）、（Q2）It is connected and exports the measuring signal of FX, upper surface is connected directly with adjust pad
Ground connection.
Upper cover（1）, lower cover（3）Material be 304 stainless steels.Brilliant group is placed on down according to sensitive direction during installation
Lid（3）On, force sensing element（4）Conducting wire（9）Pass through wire guide（8）Export, then by load sharing ring（2）It is placed on lower cover（3）'s
Annular groove（f）It is interior, then cover upper cover（1）Pass through bolt（6）And nut（5）Link together while force sensing element is applied
The pretightning force of 1000N-3000N, ensures force sensing element（4）Upper surface（b）With upper cover（1）Lower surface（c）Contact with each other, on
Lid（1）It is provided with four threaded holes with circle distribution（i）And lower cover（3）It is provided with four threaded holes with circle distribution（g）, for passing
The installation of sensor is fixed.By adjusting load sharing ring（2）Wall thickness can realize the different load sharing ratios of parallel-connection structure, for different
Measurement range requirement.
When sensor upper cover is withstood forces, force sensing element is delivered to by the effect of the load sharing of sensor upper cover and load sharing ring
On, the force sensing element in sensor by active force automatic classifying and produces corresponding by three groups of pulling and pressed effects and three groups of shearing effects
The quantity of electric charge, by charge amplifier become corresponding voltage output [V1, V2, V3, V4, V5, V6, V7, V8, V9, V10, V11,
V12, V13, V14, V15, V16] output；The signal of output is changed analog signal by signal condition and A/D data collecting cards
Calculation machine being inputted for digital signal each major parameter of space vector power being obtained by equation below, specific formula is as follows：
The distance between in formula, K1, K2, K3 is electrode surface domain center to coordinate center
Small size wide range integrated form piezoelectric six-dimensional force sensor of the present invention and its measuring method have static and state spy
Property it is good, manufacture cost is low, and rigidity is high, and simple in structure, symmetry is good, and stability is high, and high sensitivity is simple to manufacture and is readily produced,
The advantages that service life is long.
Described above is not limitation of the present invention, and present invention is also not necessarily limited to the example above, and present invention employs square crystalline substance
Piece falls within protection scope of the present invention as force sensing element, Circular wafer.
Claims (2)
1. small size wide range integrated form piezoelectric six-dimensional force sensor, including including upper cover（1）, load sharing ring（2）And lower cover（3）,
It is characterized in that：The upper cover（1）Upper surface（d）It is provided with round center hole（h）, the lower cover（3）Upper surface（a）It is provided with circle
Annular groove（f）, the lower cover（3）It is provided with round center hole（e）, the centre bore（e）Upper placement force sensing element（4）, it is described
Force sensing element（4）Upper surface（b）With upper cover（1）Lower surface（c）Contact with each other, the upper cover（1）, load sharing ring（2）, lower cover
（3）And force sensing element（4）Pass through bolt（6）And nut（5）It is installed together；The upper cover（1）Centre bore（h）And institute
State lower cover（3）Centre bore（e）Pass through bolt（6）By force sensing element（4）Apply pretightning force；The lower cover（3）It is provided with four together
The threaded hole of circle distribution（g）, the installation for sensor is fixed, by adjusting load sharing ring（2）Thickness can realize it is different
Load sharing ratio；The force sensing element（4）X0 ° of cut type chip of pulling and pressed effect is born by three pieces（10）, three pieces bear shearing effect
Y0 ° of cut type chip（11）, eight pieces a quarter electrode slices（Q5）,（Q6）,（Q7）,（Q8）,（Q13）,（Q14）,（Q15）,
（Q16）, eight pieces half electrode slices（Q1）,（Q2）,（Q3）,（Q4）,（Q9）,（Q10）, Q11）,（Q12）, two panels it is completely electric
Pole piece（Q0）, three pieces insulation resistance piece（12）With two adjust pads（7）Composition, wherein, electrode slice（Q0）For being grounded, electrode
Piece（Q1）,（Q2）For exporting the measuring signal of Fx, electrode slice（Q3）,（Q4）For exporting the measuring signal of Fy, electrode slice
（Q5）,（Q6）,（Q7）,（Q8）For exporting the measuring signal of Mz, electrode slice（Q13）,（Q14）,（Q15）,（Q16）For exporting
The measuring signal of Fz, electrode slice（Q9）,（Q10）For exporting the measuring signal of Mx, electrode slice（Q11）,（Q12）For exporting My
Measuring signal.
2. the measuring method of small size wide range integrated form piezoelectric six-dimensional force sensor, it is characterised in that include the following steps：When
When sensor upper cover is withstood forces, it is delivered to by the effect of the load sharing of sensor upper cover and load sharing ring on force sensing element；In sensor
Force sensing element by active force automatic classifying and produce the corresponding quantity of electric charge by three groups of pulling and pressed effects and three groups of shearing effects, pass through
Cross charge amplifier become corresponding voltage output [V1, V2, V3, V4, V5, V6, V7, V8, V9, V10, V11, V12, V13,
V14, V15, V16] output；The signal of output converts analog signals into digital letter by signal condition and A/D data collecting cards
Number input computer obtains each major parameter of space vector power by equation below, and specific formula is as follows：
The distance between in formula, K1, K2, K3 is electrode surface domain center to coordinate center.
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| CN201711191111.5A CN108020355B (en) | 2017-11-24 | 2017-11-24 | Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor |
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| CN201711191111.5A CN108020355B (en) | 2017-11-24 | 2017-11-24 | Measuring method of small-size large-range integrated piezoelectric six-dimensional force sensor |
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| CN108020355B CN108020355B (en) | 2020-03-10 |
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Cited By (5)
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|---|---|---|---|---|
| CN110174205A (en) * | 2019-04-02 | 2019-08-27 | 济南大学 | A kind of joint of robot piezoelectric six-dimensional force sensor and its measurement method |
| CN110887587A (en) * | 2019-12-30 | 2020-03-17 | 济南大学 | Wide-range piezoelectric film three-dimensional force sensor and measuring method thereof |
| CN111397788A (en) * | 2020-04-30 | 2020-07-10 | 大连理工大学 | Integrated five-dimensional force measuring method |
| CN112611498A (en) * | 2019-09-18 | 2021-04-06 | 马洪文 | Multi-dimensional force acquisition method based on multi-dimensional force sensor of parallel rod system |
| CN113237578A (en) * | 2021-05-08 | 2021-08-10 | 大连理工大学 | Multi-dimensional force/moment measuring method based on full-shear effect quartz wafer |
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| CN111397788A (en) * | 2020-04-30 | 2020-07-10 | 大连理工大学 | Integrated five-dimensional force measuring method |
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| CN113237578B (en) * | 2021-05-08 | 2022-09-30 | 大连理工大学 | Multi-dimensional force/moment measuring method based on full-shear effect quartz wafer |
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