CN108020194B - Plane parallelism measuring method - Google Patents
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- CN108020194B CN108020194B CN201610970778.4A CN201610970778A CN108020194B CN 108020194 B CN108020194 B CN 108020194B CN 201610970778 A CN201610970778 A CN 201610970778A CN 108020194 B CN108020194 B CN 108020194B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention relates to a plane parallelism measuring method, which comprises the following steps: assembling a first part with a transition plane and a second part with a plane to be measured to obtain an assembly part, measuring the flatness of the transition plane and the flatness of the plane to be measured, and obtaining the parallelism between the transition plane and the plane to be measured according to the first flatness of the transition plane and the flatness of the plane to be measured; measuring the flatness of the reference plane, assembling the assembly part with a third part with the reference plane, and measuring the flatness of the transition plane again to obtain a second flatness of the transition plane; obtaining the parallelism between the transition plane and the reference plane according to the second flatness of the transition plane and the flatness of the reference plane; and obtaining the maximum value of the parallelism between the reference plane and the plane to be measured according to the parallelism between the transition plane and the plane to be measured and the parallelism between the transition plane and the reference plane. The measuring method can realize the measurement of plane parallelism when the distance between two planes is too small.
Description
Technical Field
The invention relates to the technical field of high-precision mechanical adjustment and detection, in particular to a plane parallelism measuring method.
Background
In the process of fine mechanical adjustment and detection, in order to ensure the performance of equipment, some occasions exist in which the parallelism between two planes with small spacing needs to be measured. For example, in a pump and a valve with precise flow control, after the micro flow channel is assembled, the inner walls of the flow channel need to have higher parallelism so as to reduce the variation of the flow along the way. For example, in the application of a micro-displacement sensor, in order to obtain higher measurement accuracy and measurement linearity of the micro-displacement sensor, it is necessary to have higher parallelism between the sensing surface and the measurement surface of the micro-displacement sensor, for example, the parallelism between the sensing surface and the measurement surface of a capacitance sensor needs to be less than 5 μm, and the parallelism between the grating scale reading head and the grating scale needs to be less than 20 μm. That is to say, when the interval between two planes that have the depth of parallelism requirement is very little, for example the interval of microchannel inner wall is the millimeter level, capacitance sensor's sensing face is less than 1mm with the distance of measuring between the face, the distance between high accuracy grating ruler reading head and the grating ruler is about 2mm, adopt micrometer or three coordinate measuring machine commonly used to measure, because the probe diameter all is more than 3mm, can't stretch into direct measurement between two planes, consequently when the interval between two planes is too little, planar depth of parallelism is difficult to direct detection.
Disclosure of Invention
The invention aims to solve the technical problem that the parallelism of planes is difficult to directly detect when the distance between the two planes is too small in the prior art, and provides a plane parallelism measuring method capable of measuring the parallelism of the planes when the distance between the two planes is too small.
The embodiment of the invention provides a plane parallelism measuring method, which comprises the following steps:
assembling a first part with a transition plane and a second part with a plane to be measured to obtain an assembly part, wherein the transition plane is parallel to the plane to be measured, and the normal direction of the transition plane is opposite to the normal direction of the plane to be measured;
measuring the flatness of the transition plane and the flatness of the plane to be detected to obtain a first flatness of the transition plane and the flatness of the plane to be detected, and obtaining the parallelism between the transition plane and the plane to be detected according to the first flatness of the transition plane and the flatness of the plane to be detected;
measuring the flatness of the reference plane, assembling the assembly part with a third part with the reference plane, and measuring the flatness of the transition plane again to obtain a second flatness of the transition plane;
obtaining the parallelism between the transition plane and the reference plane according to the second flatness of the transition plane and the flatness of the reference plane;
and obtaining the maximum value of the parallelism between the reference plane and the plane to be measured according to the parallelism between the transition plane and the plane to be measured and the parallelism between the transition plane and the reference plane.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that: through setting up a transition plane, realized the depth of parallelism measurement between two planes to little spacing.
Drawings
FIG. 1 is a flowchart of an embodiment of a plane parallelism measuring method according to the invention;
FIG. 2 is a flow chart of another embodiment of the plane parallelism measuring method according to the invention;
FIG. 3 is a schematic structural diagram of an embodiment of a plane parallelism measuring method for measuring an object according to the present invention;
FIG. 4 is a schematic structural diagram of a chip capacitance sensor implementing the plane parallelism measuring method of the present invention;
fig. 5 is a schematic structural diagram of a cylindrical capacitive sensor implementing the method for measuring plane parallelism according to the present invention.
In the figure, P11, a transition plane, P12, a plane to be measured, P13, a reference plane, 11, a first part containing the transition plane P11, 12, a second part containing the plane to be measured P12, 13, a third part containing the transition plane P13, 14 and a first assembling component; p41, a transition plane, P42, a plane to be measured, P43, a reference plane, 41, a first part containing the transition plane P41, 42, a chip-shaped capacitive sensor, 43, a third part containing the reference plane P43, 44 and a second assembling part; p51, a transition plane, P52, a plane to be measured, P53, a reference plane, 51, a first part containing the transition plane P51, 52, a columnar capacitance sensor, 53, a third part containing the reference plane P53, 54 and a third assembling component.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1, the present invention provides a plane parallelism measuring method of an embodiment, including the steps of:
step S1, assembling a first part with a transition plane and a second part with a plane to be measured to obtain an assembly part, wherein the transition plane is parallel to the plane to be measured, and the normal direction of the transition plane is opposite to the normal direction of the plane to be measured;
step S2, measuring the flatness of the transition plane and the flatness of the plane to be measured to obtain a first flatness beta 1 of the transition plane and a flatness beta 2 of the plane to be measured, and obtaining the parallelism alpha 12 between the transition plane and the plane to be measured according to the first flatness beta 1 of the transition plane and the flatness beta 2 of the plane to be measured;
step S3, measuring the flatness of the reference plane, assembling the assembly component with a third part with the reference plane, and measuring the flatness of the transition plane again to obtain a second flatness beta 11 of the transition plane;
step S4, obtaining the parallelism alpha 13 between the transition plane and the reference plane according to the second flatness beta 1 of the transition plane and the flatness beta 3 of the reference plane;
step S5, obtaining a maximum value alpha 23max of the parallelism between the reference plane and the plane to be measured according to the parallelism alpha 12 between the transition plane and the plane to be measured and the parallelism alpha 13 between the transition plane and the reference plane.
Specifically, the normal direction of the transition plane is opposite to the normal direction of the reference plane.
The plane parallelism measuring method comprises the steps of arranging a first part with a transition plane, assembling the first part with the transition plane and a second part with a plane to be measured to obtain an assembly part to obtain the parallelism between the transition plane and the plane to be measured, assembling the assembly part and a third part with a reference plane to obtain the parallelism between the transition plane and the reference plane, and finally obtaining the maximum parallelism between the reference plane and the plane to be measured according to the parallelism between the transition plane and the plane to be measured and the parallelism between the transition plane and the reference plane, namely realizing the measurement of the parallelism between two planes with a small spacing.
In a specific implementation, the step of measuring the flatness β 3 of the reference plane may precede step S1, step S2, step S3, or step S4. The flatness β 3 of the reference plane is measured in step S3, that is, after the position of the third part is determined, the flatness of the reference plane is measured, facilitating the measurement step after the fitting component is fitted with the third part having the reference plane.
In step S3, after the fitting part is fitted with the third part having the reference plane, the flatness of the transition plane is measured again so that the parallelism between the transition plane and the reference plane is more accurate.
In a specific implementation, before general assembly, a target value of parallelism assembly exists between the reference plane and the plane to be measured. According to the definition of flatness and parallelism, the parallelism value between two planes is not higher than that of any plane. As shown in fig. 2, before the step S1, the measuring method further includes:
and step S01, setting the first flatness beta 1 and the second flatness beta 11 of the transition plane to be less than or equal to one half of the target value alpha 230 of the parallelism between the reference plane and the plane to be measured.
Specifically, the maximum value α 23max of the parallelism between the reference plane and the plane to be measured is less than or equal to the target value α 230 of the parallelism between the reference plane and the plane to be measured.
In a specific implementation, the step of measuring the first flatness of the transition plane and the flatness of the plane to be measured specifically includes:
measuring the first flatness of the transition plane and the flatness of the plane to be measured by a three-coordinate measuring machine;
the step of measuring the flatness of the reference plane specifically includes:
the flatness of the reference plane is measured by a three-coordinate measuring machine.
In other words, the measuring method can carry out measurement by adopting the three-coordinate measuring machine without additionally adding equipment, the measuring process is simple and visual, and the distance between two planes can be measured at any small distance.
In specific implementation, the maximum parallelism between the reference plane and the plane to be measured is obtained according to the parallelism between the transition plane and the plane to be measured and the parallelism between the transition plane and the reference plane, and specifically:
α23max＝α13+α12；
wherein α 23max is the maximum value of the parallelism between the reference plane and the plane to be measured, α 12 is the parallelism between the plane to be measured and the transition plane, and α 13 is the parallelism between the reference plane and the transition plane.
In a specific implementation, the first part may be a fixed part of the second part, the second part is a micro displacement sensor, and the third part is a detection object of the micro displacement sensor.
In addition, in the measuring process, the influence of the size of the distance between the reference plane and the plane to be measured is avoided, so that the distance between the reference plane and the plane to be measured is small at will, and the parallelism between the reference plane and the plane to be measured can be measured by adopting the method.
Fig. 3 is a schematic structural diagram of an embodiment of a plane parallelism measuring method of a measuring object according to the present invention.
In the implementation, after the first part 13 having the reference plane P13 is mounted, the second part 12 having the plane to be measured P12 (not shown in the figure) is mounted, and the parallelism between the plane to be measured P12 and the reference plane P13 is ensured. The reference plane P13 is arranged opposite to the plane P12 to be measured, the distance between two plane fingers is small, and a probe of the conventional measuring device cannot extend into the space between the two planes for direct measurement. Even if the distance between the reference plane P13 and the plane P12 to be measured is large enough to extend into a probe of the existing measuring device, the length of the probe of the three-coordinate measuring machine is limited, the depth of a gap between the extensible reference plane P11 and the plane P12 to be measured is limited, the region between the measurable reference plane P13 and the plane P12 is limited, and even if direct measurement is available, the parallelism between the reference plane P13 and the plane P12 to be measured cannot be completely measured. As shown in FIG. 3, the plane parallelism measuring method of the present invention measures the plane between the third part 13 and the second part 12, the third part 11 having the reference plane P13 is provided, that is, in order to measure the parallelism between the plane P12 to be measured and the reference plane P13, one first part 11 is selected among the parts connected to the second part 12, the first part 11 has the transition plane P11 parallel to the plane P12, and the normal direction of the transition plane P11 is the same as the normal direction of the reference plane P13 and opposite to the normal direction of the plane P12, and the first part 11 and the second part 12 are assembled to obtain an assembled part for measurement.
The specific measurement procedure is followed by assembling the second part 12, which contains the plane P12 to be measured, and the third part 11, which contains the transition plane P11, together to form the first assembled part 14. And measuring the plane P12 to be measured and the transition plane P11 by using a three-coordinate measuring machine to obtain the planeness beta 2 of the plane P12 to be measured and the first planeness beta 1 of the transition plane P11. According to the flatness data of the plane P12 to be measured and the transition plane P11, the parallelism alpha 12 between the plane P12 to be measured and the transition plane P11 can be calculated by adopting three-coordinate measuring machine analysis software. And measuring a reference plane P13 on the third part 3 by using a three-coordinate measuring machine to obtain the planeness beta 3 of the reference plane P13. The first fitting part 14 is fitted with the part 13 having the reference plane, and the transition plane P11 on the first part 11 is measured again using the three-coordinate measuring machine, resulting in the second flatness β 11 of the transition plane P11. From the data of the flatness β 3 of the reference plane P13 and the second flatness β 11 of the transition plane P11, the parallelism α 13 between the reference plane P13 and the transition plane P11 can be calculated using the coordinate measuring machine analysis software. According to the parallelism data α 13 between the reference plane P13 and the transition plane P11 and the parallelism data α 12 between the plane to be measured P12 and the transition plane P11, the parallelism α 23 between the reference plane P13 and the plane to be measured P12 can be calculated: α 23max ═ α 12+ α 13. Through step assembly and measurement, the measurement of the parallelism between the reference plane P13 with a tiny distance and the plane P23 to be measured can be realized.
In order to realize the above measuring method, in the mechanical assembly sequence, the second part 12 having the plane P12 to be measured and the first part 11 having the transition plane P11 are assembled, and one of the first part 11 and the second part 12 is assembled with the third part 13 having the reference plane P13, so that the first assembly part 14 composed of the first part 11 and the second part 12 can be independently placed on the three-coordinate measuring machine for measurement.
Fig. 4 is a schematic structural diagram of a chip capacitance sensor implementing the plane parallelism measuring method of the present invention.
In a specific implementation, the micro-displacement sensor may be a chip-type capacitance sensor 42, and when the chip-type capacitance sensor 42 is installed, in order to ensure the measurement accuracy and the measurement linearity of the capacitance sensor, it is required that the parallelism between the sensing surface and the measured surface of the capacitance sensor is less than 5 μm, and the distance between the sensing surface and the measured surface of the capacitance sensor is less than 1mm, so that the parallelism between the sensing surface and the measured surface cannot be directly measured by using a three-coordinate measuring machine. The sensing surface of the capacitance sensor is a to-be-measured plane P42, and the to-be-measured plane is a reference plane P43. The plane of the first part 41 connected with the chip capacitive sensor 42, which is opposite to the plane P42 to be measured, is selected as the transition plane P41. When the chip capacitive sensor 42 is mounted, the chip capacitive sensor is first connected to the first part 41 to form a second assembly 44. The parallelism α 12 between the plane to be measured P42 on the second fitting part 44 and the transition plane P41 is measured using a three-coordinate measuring machine. For example, by using a three-coordinate measuring machine of Carl Zeiss company, the parallelism between the plane P42 to be measured and the transition plane P41 can be calculated by using the callposo software. And measuring the flatness of the measured surface, namely the reference plane P43 by using a three-coordinate measuring machine, then mounting the second assembling component 44 on the third part 43, measuring the flatness of the transition plane P41 by using the three-coordinate measuring machine again, and calculating the parallelism alpha 13 between the measured surface and the transition plane P41 according to the flatness data of the measured surface and the flatness data of the transition plane P41 in Calypso software. Finally, the parallelism alpha 23 between the measured surface and the sensing surface, namely the parallelism alpha 23 between the plane P42 to be measured and the reference plane P43 is calculated: α 23max ═ α 12+ α 13.
During installation, in order to ensure that the parallelism α 23max between the measured surface and the sensing surface is less than 5 μm, it is generally required that the parallelism α 13 between the measured surface and the transition plane P41 and the parallelism α 12 between the sensing surface and the transition plane P41 are less than 2.5 μm, and the flatness of the transition plane P41 is selected to be less than 2.5 μm. If the parallelism α 13 between the measured surface and the transition plane P41 and the parallelism α 12 between the sensing surface and the transition plane P41 exceed 2.5 μm during the mounting process, the contact surface between the mounted bodies can be trimmed and mounted a plurality of times while connecting the chip capacitance sensor 42 and the first part 41 or the second mounting member 44 and the third part 43 until the parallelism α 13 and the parallelism α 12 are satisfied. In order to ensure that the parallelism alpha 23 between the measured surface and the sensing surface is less than or equal to 5 mu m, the measurement precision of the adopted three-coordinate measuring machine is less than or equal to 2 mu m.
Fig. 5 is a schematic structural diagram of a cylindrical capacitive sensor implementing the method for measuring plane parallelism according to the present invention.
In a specific implementation, the micro-displacement sensor may be a cylindrical capacitive sensor 52, and when the cylindrical capacitive sensor 52 is installed, in order to ensure the measurement accuracy and the measurement linearity of the capacitive sensor, it is required that the parallelism between the sensing surface and the measured surface of the capacitive sensor is less than 5 μm, and the distance between the sensing surface and the measured surface of the capacitive sensor is less than 1mm, so that the parallelism between the sensing surface and the measured surface cannot be directly measured by using a three-coordinate measuring machine. The sensing surface of the cylindrical capacitive sensor 52 is a to-be-measured plane P52, and the measured surface is a reference plane P53. The plane of the first part 51 connected with the columnar capacitive sensor 52, which is opposite to the plane P52 to be measured, is selected as a transition plane P51. When mounting, the cylindrical capacitive sensor 52 and the first part 51 are first connected together to form the third assembly 54. The parallelism α 12 between the plane to be measured P52 and the transition plane P51 on the third assembling member 54 is measured using a three-coordinate measuring machine, and then the parallelism between the plane to be measured P52 and the transition plane P51 is calculated. And measuring the flatness of the measured surface, namely the reference plane P53 by using a three-coordinate measuring machine, assembling the third assembling component 54 and the third part 53, measuring the flatness of the transition plane P51 by using the three-coordinate measuring machine again, and calculating the parallelism alpha 13 between the measured surface and the transition plane P51 according to the flatness data of the measured surface and the flatness data of the transition plane P51. Finally, the parallelism alpha 23 between the measured surface and the sensing surface, namely the parallelism alpha 23 between the plane P52 to be measured and the reference plane P53 is calculated: α 23max ═ α 12+ α 13.
During installation, in order to ensure that the parallelism α 23max between the measured surface and the sensing surface is less than 5 μm, it is generally required that the parallelism α 13 between the measured surface and the transition plane P51 and the parallelism α 12 between the sensing surface and the transition plane P51 are less than 2.5 μm, and the flatness of the transition plane P51 is selected to be less than 2.5 μm. If the parallelism α 13 between the measured surface and the transition plane P51 and the parallelism α 12 between the sensing surface and the transition plane P51 exceed 2.5 μm during the mounting process, the contact surface between the mounting bodies can be trimmed and mounted for a plurality of times when the cylindrical capacitance sensor 52 is connected to the first part 51 or the third mounting member 54 is connected to the third part 53 until the parallelism α 13 and the parallelism α 12 are satisfied. In order to ensure that the parallelism alpha 23 between the measured surface and the sensing surface is less than or equal to 5 mu m, the measurement precision of the adopted three-coordinate measuring machine is less than or equal to 2 mu m.
The foregoing embodiments and description have been presented only to illustrate the principles and preferred embodiments of the invention, and various changes and modifications may be made therein without departing from the spirit and scope of the invention as hereinafter claimed.
Claims (7)
1. A plane parallelism measuring method is characterized in that: the measuring method comprises the following steps:
assembling a first part with a transition plane and a second part with a plane to be measured to obtain an assembly part, wherein the transition plane is parallel to the plane to be measured, and the normal direction of the transition plane is opposite to the normal direction of the plane to be measured;
measuring the flatness of the transition plane and the flatness of the plane to be detected to obtain a first flatness of the transition plane and the flatness of the plane to be detected, and obtaining the parallelism between the transition plane and the plane to be detected according to the first flatness of the transition plane and the flatness of the plane to be detected;
measuring the flatness of the reference plane, assembling the assembly part with a third part with the reference plane, and measuring the flatness of the transition plane again to obtain a second flatness of the transition plane;
obtaining the parallelism between the transition plane and the reference plane according to the second flatness of the transition plane and the flatness of the reference plane;
and obtaining the maximum value of the parallelism between the reference plane and the plane to be measured according to the parallelism between the transition plane and the plane to be measured and the parallelism between the transition plane and the reference plane.
2. The measurement method according to claim 1, characterized in that: according to the parallelism between the transition plane and the plane to be measured and the parallelism between the transition plane and the reference plane, the maximum value of the parallelism between the reference plane and the plane to be measured is obtained, and the method specifically comprises the following steps:
α23max＝α13+α12；
wherein α 23max is the maximum value of the parallelism between the reference plane and the plane to be measured, α 12 is the parallelism between the plane to be measured and the transition plane, and α 13 is the parallelism between the reference plane and the transition plane.
3. The measurement method according to claim 1, characterized in that: before the step of assembling the first part with the transition plane and the second part with the plane to be measured to obtain the assembled component, the measuring method further comprises the following steps:
and setting the first flatness and the second flatness of the transition plane to be less than or equal to one half of the target value of the parallelism between the reference plane and the plane to be measured.
4. A measuring method according to claim 3, characterized in that: and the maximum value of the parallelism between the reference plane and the plane to be measured is less than or equal to the target value of the parallelism between the reference plane and the plane to be measured.
5. The measurement method according to claim 1, characterized in that: the normal direction of the transition plane is opposite to the normal direction of the reference plane.
6. The measurement method according to claim 2, characterized in that: the step of measuring the first flatness of the transition plane and the flatness of the plane to be measured specifically comprises the following steps:
measuring the first flatness of the transition plane and the flatness of the plane to be measured by a three-coordinate measuring machine;
the step of measuring the flatness of the reference plane specifically includes:
the flatness of the reference plane is measured by a three-coordinate measuring machine.
7. The measurement method according to any one of claims 1 to 6, characterized in that: the first part is a fixed part of the second part, the second part is a micro-displacement sensor, and the third part is a detection object of the micro-displacement sensor.
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