CN100538255C - A kind of method and system that apply to the fine sizes airborne measurements of element - Google Patents
A kind of method and system that apply to the fine sizes airborne measurements of element Download PDFInfo
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- CN100538255C CN100538255C CNB2006101563771A CN200610156377A CN100538255C CN 100538255 C CN100538255 C CN 100538255C CN B2006101563771 A CNB2006101563771 A CN B2006101563771A CN 200610156377 A CN200610156377 A CN 200610156377A CN 100538255 C CN100538255 C CN 100538255C
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Abstract
The present invention relates to a kind of method of measuring on the fine sizes machine of element of applying to, comprising provides the airborne measurements of fine sizes system step, one element under test step is provided, utilization control module output one measuring route job step, the one measuring-signal operation of utilization signal element output, and transmit measuring-signal to fine measuring sonde step, carry out fine measuring sonde displacement with the fine sizes job step of electrical metering system measuring sensor and carry out analysis to measure size signal job step, when the invention process is used, do not need off-line measurement, and can improve the fine sizes precision of element finished product and more small measurement range scale is provided, in addition, the present invention also comprises a kind of system that applies to the fine sizes airborne measurements of element.
Description
Technical field
The present invention relates to a kind of method and system that apply to the fine sizes airborne measurements of element, particularly relate to a kind of off-line measurement that do not need, and the method and system of the fine sizes airborne measurements that applies to element of more small measurement range scale can be provided.
Background technology
At present before operation personnel desire is measured the size of an object; roughly all can be according to the range scale under the object of institute's desire measurement and the demand of measuring accuracy; dimension measurement method and survey instrument that thinking decision institute desire is used; size with the coincidence measurement object is required; for example with several millimeters to tens of centimeters object; no matter be the measurement of length or diameter; the survey instrument that uses through regular meeting is nothing more than vernier caliper; micrometer and height gage etc.; but, then must select for use three-dimensional measuring instrument to carry out the size of Measuring Object when desiring the range scale of the affiliated range scale of Measuring Object greater than survey instrument.
Again when even the small extremely millimeter of range scale of object is inferior millimeter, the then survey instrument that must select for use and measuring method, measure for utilizing the image two-dimensional silhouette, the principle of this kind image two-dimensional measurement method roughly is to utilize the industrial photography machine to take an element to be measured, analyze the length of this size to be measured on image again, and according to the resulting camera parameters of adjustment of image, calculate the size of above-mentioned element under test, but when the range scale of above-mentioned object under test is healed when small, then Size Measuring System must possess higher size analytic ability, to keep the measuring accuracy of certain level, therefore aforementioned image two-dimensional silhouette is measured and will be produced great measurement shortcoming problem, this image two-dimensional silhouette measuring system is subject to optics diffraction phenomenon (promptly being to depend on optical source wavelength because of resolution) because of meeting, its measuring accuracy can only reach the micro-meter scale grade, yet, when being subjected to the surface of the work profile, the detected part of workpiece blocks, and optical measurement light is also blocked, can't penetrate the surface of the work profile, just can't obtain size to be measured, for example the profile of a surface of the work is for stopping that mutually spread pattern is as the arranged form, perhaps as measure a workpiece have stepped or the tapering shrinkage pool, blocked and be of a size of the restriction that the optical measurement mode can't be measured, and for the microminiaturized day by day relevant zero element of various digital electronic product with it, above-mentioned optical image measuring system and traditional measurement method can't satisfy the measuring accuracy demand, thereby the measurement solution that must seek other, in the hope of the more small range scale of energy measurement.
In addition, fine sizes precision in order to ensure element, can be before manufacturing with manufacture process in, measure the process tool or the abrasion value of mould and processed size of component, but the measurement of this class component and process tool all can only be adopted off-line measurement at present, promptly be on machine tool, to measure in real time, but because of after the shortcoming problem of off-line measurement maximum is to reinstall work piece and cutter, can cause both mutual position relation to be different from dismounting relative position before, therefore must position correction once more again, but thereby cause the finished size precision that originally improved by the off-line measurement mode, can be relocated correction error and offset, and then lose the finished size precision that has originally improved.
Therefore, existing measuring technique needs off-line measurement, therefore cause effectively to improve the precision of element finished product fine sizes, and the measurement yardstick of existing measuring technique is range limited, more small measurement range scale can't be provided, so how to redesign a kind of fine sizes airborne measurements ground method and system that apply to element, the fine sizes precision that it can effectively improve the element finished product is purpose of the present invention.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of fine sizes airborne measurements ground method and system that apply to element, to solve existing measuring technique is to need off-line measurement, therefore can't effectively improve the shortcoming of the fine sizes precision of element finished product, the measurement yardstick that also overcomes simultaneously existing measuring technique is range limited, and the shortcoming of more small measurement range scale can't be provided.
To achieve these goals, the invention provides a kind of method that applies to the fine sizes airborne measurements of element, its characteristics are, comprise following steps: the airborne measurements system that a fine sizes is provided, this airborne measurements system is set up on the facility, and this airborne measurements system comprises a control module, a signal element is connected in this control module and a mobile platform is connected in this control module, and this mobile platform installs a fine measuring sonde and this fine measuring sonde is connected in this signal element; One element under test is provided, and this element has fine sizes, and is fixedly arranged on these facility and is connected in this signal element; Use this control module output one measuring route operation; Use this signal element output one measuring-signal operation, and transmit this measuring-signal to this fine measuring sonde; Carry out this fine measuring sonde displacement and measure this fine sizes operation of this element with electrical metering system, this fine measuring sonde carries out displacement according to this measuring route, and this measuring-signal is sent to this element, obtains the measurement size signal of this element by electrical metering system; And analyze this measurement size signal operation, and this signal element obtains this measurement size signal, and carries out this measurement size signal analysis and processing by this control module, and computing draws the measurement size of this element.
The above-mentioned method that applies to the fine sizes airborne measurements of element, its characteristics are that this measurement size signal comprises a fine measuring sonde mobile data and a dimensional measurement signal, carries out analyzing and processing for this control module, obtains this measurement size of this element.
The above-mentioned method that applies to the fine sizes airborne measurements of element, its characteristics are, external form or size that the measuring point tool of the external form of this fine measuring sonde or corresponding this element of size is different.
The above-mentioned method that applies to the fine sizes airborne measurements of element, its characteristics are that the side view of this fine measuring sonde is cylindrical or spheroidal.
The above-mentioned method that applies to the fine sizes airborne measurements of element, its characteristics are that this fine measuring sonde is of a size of 10 μ m～1mm.
The present invention also provides a kind of system that applies to the fine sizes airborne measurements of element, its characteristics are, comprise: control module, and this control module produces a measuring route, and the measuring-signal of analyzing a measurement size is handled, to obtain the measurement size of this element fine sizes; Signal element, this signal element are connected in this control module and produce a measuring-signal, and obtain this measurement size signal of this element; Mobile platform, this mobile platform is connected in this control module; And fine measuring sonde, this fine measuring sonde is arranged on this mobile platform, and this fine measuring sonde is connected in this signal element, carries out element by this fine measuring sonde displacement with electrical metering system and measures operation.
The above-mentioned system that applies to the fine sizes airborne measurements of element, its characteristics are, the measuring-signal of this measurement size comprises a fine measuring sonde mobile data and a dimensional measurement signal, carries out analyzing and processing for this control module, obtains this measurement size of this element.
The above-mentioned system that applies to the fine sizes airborne measurements of element, its characteristics are that the external form of this fine measuring sonde or size are different external form or sizes of the measuring point tool of corresponding this element.
The above-mentioned system that applies to the fine sizes airborne measurements of element, its characteristics are that the side view of this fine measuring sonde is cylindrical or spheroidal.
The above-mentioned system that applies to the fine sizes airborne measurements of element, its characteristics are that this fine measuring sonde is of a size of 10 μ m～1mm.
Effect of the present invention is as follows:
1. implement utilization by these method and system that apply to the fine sizes airborne measurements of element, when applying to measure the trickle element of high-aspect-ratio, dimension measurement method can be avoided the problem of covering and measurement dead angle on the optical image measuring method on this kind machine.
2. implement utilization by these method and system that apply to the fine sizes airborne measurements of element, the method and system of dimensional measurement are also applicable to the measuring point of various geometric configuratioies on the machine of the present invention, to produce suitable measurement spacing and efficient measuring route, to obtain preferable measurement result.
3. implement utilization by these method and system that apply to the fine sizes airborne measurements of element, can be at the measuring point of various different geometries, the trickle probe of different how much external forms of collocation and size, to obtain preferable measurement result, certainly also can be applicable to the element of various sizes and material behavior, and the changing pattern of using different mathematical algorithms to come the analysis to measure signal, judge the contact condition of trickle probe and element fine sizes whereby, to obtain preferable measurement result.
4. implement utilization by these method and system that apply to the fine sizes airborne measurements of element, the measurement section potential energy of workpiece is not subjected to the restriction that the surface of the work profile blocks, and measuring sonde is stretched into to obtain the size to be measured of workpiece.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 applies to the method flow diagram of the fine sizes airborne measurements of element for the present invention;
Fig. 2 applies to the system schematic of the fine sizes airborne measurements of element for the present invention;
Fig. 3 applies to the measuring route synoptic diagram of system of the fine sizes airborne measurements of element for the present invention;
Fig. 4 A applies to the fine measuring sonde side view first aspect synoptic diagram of system of the fine sizes airborne measurements of element for the present invention;
Fig. 4 B applies to the fine measuring sonde side view second aspect synoptic diagram of system of the fine sizes airborne measurements of element for the present invention;
Fig. 5 A is that reality of the present invention is made the element synoptic diagram; And
Fig. 5 B is the actual experimental data table that records element of the present invention.
Wherein, Reference numeral:
S1 applies to the method for the fine sizes airborne measurements of element
Step S10 provides the airborne measurements system of a fine sizes
Step S20 provides an element under test
The one measuring route operation of step S30 utilization control module output
The one measuring-signal operation of step S40 utilization signal element output, and transmit measuring-signal to fine measuring sonde
Step S50 carries out the fine sizes operation of fine measuring sonde displacement with electrical metering system measuring sensor
Step S60 carries out the operation of analysis to measure size signal
1 applies to the system of the fine sizes airborne measurements of element
10 control modules
20 signal elements
30 mobile platforms
40 fine measuring sondes
2 elements
The R measuring route
The Q nominal diameter
Embodiment
At first, see also Fig. 1, the present invention is a kind of method that applies to the fine sizes airborne measurements of element, and this method S1 one preferred embodiment that applies to the fine sizes airborne measurements of element comprises, and step S10 provides the airborne measurements system of a fine sizes; Step S20 provides an element under test; Step S30, the one measuring route operation of utilization control module output; Step S40, the one measuring-signal operation of utilization signal element output; Step S40, and transmit measuring-signal to fine measuring sonde; Step S50 carries out the fine sizes operation of fine measuring sonde displacement with electrical metering system measuring sensor; Step S60 carries out the operation of analysis to measure size signal.
See also Fig. 2, the present invention is a kind of system that applies to the fine sizes airborne measurements of element, this preferred embodiment of system 1 that applies to the fine sizes airborne measurements of element is to comprise, one control module 10, a signal element 20, a mobile platform 30 and a fine measuring sonde 40 are arranged on the mobile platform 30 and are connected in signal element 20, this signal element 20 is connected in control module 10, and above-mentioned mobile platform 30 is connected in control module 10.
See also Fig. 1, Fig. 2 and Fig. 3, the present invention is a kind of method and system that apply to the fine sizes airborne measurements of element, this method S1 and system 1 that applies to the fine sizes airborne measurements of element carries out earlier, step S10, the airborne measurements system of one fine sizes is provided, this airborne measurements system 1 is set up on the facility, and this airborne measurements system 1 comprises a control module 10, one signal element 20, be connected in control module 10 and a mobile platform 30 is connected in control module 10, this mobile platform 30 is equiped with a fine measuring sonde 40, and it is connected in signal element 20 fine measuring sonde 40, moreover, step S20, one element under test is provided, this element 2 has fine sizes, and be fixedly arranged on facility (not being shown among the figure) upward for processing operation, and element 2 also is connected in signal element 20, and the fine sizes of this element 2 is 10cm～10-2 μ m, and, step S30, the one measuring route operation of utilization control module output, follow-up, step S40, the one measuring-signal operation of utilization signal element output, and transmit measuring-signal to fine measuring sonde, carry out step S50 again, fine measuring sonde displacement is with the fine sizes operation of electrical metering system measuring sensor, this fine measuring sonde 40 carries out displacement according to measuring route R, and measuring-signal is sent to element 2, obtains the measurement size signal of element 2 by electrical metering system, at last, step S60 carries out the operation of analysis to measure size signal, and this signal element 20 obtains the measurement size signal, and carry out above-mentioned measurement size signal analysis and processing by control module 10, computing draw element 2 desire measurement size.
Moreover, the present invention is a kind of method and system that apply to the fine sizes airborne measurements of element, this applies to the method S1 and the system 1 of the fine sizes airborne measurements of element, the measurement size signal comprises a fine measuring sonde 40 and moves a data and a dimensional measurement signal, carry out analyzing and processing for control module 10, obtain the measurement size of said elements 2, and, the external form of above-mentioned fine measuring sonde 40 or size are different external form or sizes of the measuring point tool of corresponding element 2, see also Fig. 4 A and Fig. 4 B, the side view of this fine measuring sonde 40 can be cylindrical or spheroidal respectively, this fine measuring sonde 40 is of a size of 10 μ m～1mm, at last, see also Fig. 5 A and Fig. 5 B, for reality of the present invention is made the experiments of measuring data, by learning among the figure, the nominal diameter Q of this element 2 is 80 μ m, and selects columniform fine measuring sonde 40 for use, and three experiments of measuring data of gained are respectively 80.09 μ m, 80.48 μ m and 79.97 μ m.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art ought make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of claim of the present invention.
Claims (10)
1, a kind of method that applies to the fine sizes airborne measurements of element is characterized in that, comprises following steps:
The airborne measurements system of one fine sizes is provided, this airborne measurements system is set up on the facility, and this airborne measurements system comprises a control module, a signal element is connected in this control module and a mobile platform is connected in this control module, and this mobile platform installs a fine measuring sonde and this fine measuring sonde is connected in this signal element;
One element under test is provided, and this element has fine sizes, and is fixedly arranged on these facility and is connected in this signal element;
Use this control module output one measuring route;
Use this signal element output one measuring-signal, and transmit this measuring-signal to this fine measuring sonde;
Carry out this fine measuring sonde displacement and measure this fine sizes of this element with electrical metering system, this fine measuring sonde carries out displacement according to this measuring route, and this measuring-signal is sent to this element, obtains the measurement size signal of this element by electrical metering system; And
Analyze this measurement size signal, this signal element obtains this measurement size signal, and carries out this measurement size signal analysis and processing by this control module, and computing draws the measurement size of this element.
2, the method that applies to the fine sizes airborne measurements of element according to claim 1, wherein this measurement size signal comprises a fine measuring sonde mobile data and a dimensional measurement signal, carry out analyzing and processing for this control module, obtain this measurement size of this element.
3, the method that applies to the fine sizes airborne measurements of element according to claim 1 is characterized in that, and is corresponding with the measuring point of this element, and this fine measuring sonde has different external forms or size.
4, the method that applies to the fine sizes airborne measurements of element according to claim 1 is characterized in that, the side view of this fine measuring sonde is cylindrical or spheroidal.
5, according to claim 1 or the 3 described methods that apply to the fine sizes airborne measurements of element, it is characterized in that this fine measuring sonde is of a size of 10 μ m～1mm.
6, a kind of system that applies to the fine sizes airborne measurements of element is characterized in that, comprises:
One control module, this control module produces a measuring route, and analyzes the measuring-signal processing of a measurement size, to obtain the measurement size of this element fine sizes;
One signal element, this signal element are connected in this control module and produce a measuring-signal, and obtain this measurement size signal of this element;
One mobile platform, this mobile platform is connected in this control module; And
One fine measuring sonde, this fine measuring sonde is arranged on this mobile platform, and this fine measuring sonde is connected in this signal element, carries out element by this fine measuring sonde displacement with electrical metering system and measures operation.
7, the system that applies to the fine sizes airborne measurements of element according to claim 6, it is characterized in that, the measuring-signal of this measurement size comprises a fine measuring sonde mobile data and a dimensional measurement signal, carry out analyzing and processing for this control module, obtain this measurement size of this element.
8, the system that applies to the fine sizes airborne measurements of element according to claim 6 is characterized in that, and is corresponding with the measuring point of this element, and this fine measuring sonde has different external forms or size.
9, the system that applies to the fine sizes airborne measurements of element according to claim 6 is characterized in that, the side view of this fine measuring sonde is cylindrical or spheroidal.
10, according to claim 6 or the 8 described systems that apply to the fine sizes airborne measurements of element, it is characterized in that this fine measuring sonde is of a size of 10 μ m～1mm.
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| CN112985318B (en) * | 2019-12-17 | 2022-11-22 | 财团法人金属工业研究发展中心 | Method and system for on-line prediction of fastener size |
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