CN108004520A - A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus - Google Patents
A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus Download PDFInfo
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- CN108004520A CN108004520A CN201810019624.6A CN201810019624A CN108004520A CN 108004520 A CN108004520 A CN 108004520A CN 201810019624 A CN201810019624 A CN 201810019624A CN 108004520 A CN108004520 A CN 108004520A
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- loading area
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- 239000011248 coating agent Substances 0.000 title claims abstract description 48
- 238000000576 coating method Methods 0.000 title claims abstract description 48
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 44
- 239000005357 flat glass Substances 0.000 title claims abstract description 39
- 238000004544 sputter deposition Methods 0.000 claims abstract description 34
- 230000005693 optoelectronics Effects 0.000 claims description 64
- 230000033001 locomotion Effects 0.000 claims description 26
- 238000007747 plating Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 10
- 238000001771 vacuum deposition Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 17
- 230000000694 effects Effects 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 5
- 230000001960 triggered effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000005622 photoelectricity Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000010257 thawing Methods 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus, including：Loading area, plated film area and unloading area；The loading area, the plated film area and the unloading area are arranged in vacuum chamber；The loading area and the unloading area are symmetrical arranged on the plated film area；Multiple magnetic control sputtering cathode structures are used in plated film area, and arrange multiple vacuum laser rangefinders, it is corresponding with multiple sputter cathodes, the distance that coated surface and magnetic control sputtering cathode are measured by vacuum laser rangefinder feeds back to sputter cathode, control sputtering power, so as to control the amount of diverse location plasma sputter, to ensure that a plated film can reach film thickness uniformity requirement.The present invention provides a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus, vacuum coating equipment is not only simplify, while magnetron sputtering power can be automatically adjusted, ensures the uniformity of the glass surface coating film thickness with curvature.
Description
Technical field
The present invention relates to vacuum magnetron sputtering coating film technical field, more particularly to a kind of automobile window glass are true
Empty continuous magnetron sputtering coating apparatus.
Background technology
Vacuum coating technology in modern industry using relatively broad, including electronics, aerospace, packaging, decoration, gold stamping printing
Deng industry.Vacuum coating refers under vacuum conditions, certain metal or metallic compound are deposited to material in the form of gas phase
Surface, belongs to physical gas-phase deposition.
At present, automobile window glass defrosting, demisting, the side for melting the blowing of ice and snow generally use air-conditioning or electric-heating-wire-heating
Formula, speed is slow, and effect is undesirable.Electrically conducting transparent heating film is a kind of semi-conducting material, have high conductivity, it is high can
See light transmission rate, high mechanical hardness and good chemical stability.Using vacuum sputtering coating technology in automobile window glass
Electrically conducting transparent heating film is plated on surface, can be made the windscreen after plated film by conductive heater quickly defrosting, demisting and be melted ice
Snow, and the in-car visual field is not influenced, obtain preferable effect.
Existing vacuum coating equipment, it usually needs multiple vacuum chambers could realize continuous coating, equipment bulky complex.For
Similar to this part there are greater curvature of windscreen, since part coated surface is different apart from the distance of sputter cathode,
The uniformity of plated film thickness is poor.Reach film thickness uniformity, during carrying out sputter coating using existing coating technique,
Multiple plated film repeatedly just is needed, or shelters from some regions and carries out gradation plated film, the uniformity of thickness is improved with this.This
The cost that plated film not only increases plated film is planted repeatedly, and it is time-consuming and laborious.
Therefore, how a kind of not only small-sized, but also the continuous magnetic control of automobile window glass vacuum that film thickness uniformity is good is provided
The problem of Sputting film-plating apparatus is those skilled in the art's urgent need to resolve.
The content of the invention
In view of this, it is not only simple the present invention provides a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus
Vacuum coating equipment is changed, while has automatically adjusted magnetron sputtering power and ensure the glass surface deposited film thickness with curvature
Uniformity.
To achieve these goals, the present invention adopts the following technical scheme that：
A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus, including：Loading area, plated film area and unloading area；
The loading area, the plated film area and the unloading area are arranged in vacuum chamber；The loading area and the unloading area pass through
The plated film area connection.
The technique effect of the present invention：The present invention uses single vacuum room, realizes continuous coating, simplifies vacuum coating and set
It is standby.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the loading area
It is arranged symmetrically with the unloading area on the plated film area.
The technique effect of the present invention：The present invention by loading area and unloading area be symmetrical arranged on plated film area, make small carrier vehicle from
Load wagon enters on unloading machine, realizes the automation of plated film.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the loading area
Including：Load wagon, small carrier vehicle, loading area guide rail, loading area driving motor, loading area driving pinion differential side gear, loading area drive lead screw, dress
Carry area's optoelectronic switch and loading area travelling gear；The loading area guide rail is longitudinally laid with least provided with 2, and the load wagon
The lengthwise movement on the loading area guide rail；The small carrier vehicle is loaded on the load wagon；Indulged between the loading area guide rail
To at least 3 loading area drive lead screws are provided with, the loading area turn-screw is connected with loading area driving motor；
The loading area driving pinion differential side gear is installed on the loading area turn-screw away from the plated film area, close to the plated film area
The loading area travelling gear is installed on the loading area turn-screw；The loading area optoelectronic switch is arranged close to described
The side in plated film area；The loading area optoelectronic switch be arranged on the loading area driving pinion differential side gear and the loading area travelling gear it
Between, and close to the side of the loading area travelling gear.
Technical scheme：Using the kind of drive of driving pinion differential side gear, facilitate the movement of load wagon and unloading machine, when small
Carrier vehicle triggers optoelectronic switch, is rotated by driving pinion differential side gear and drives the driving of motor that small carrier vehicle is rapidly feeding plated film area automatically
Realize plated film.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the plated film area
Including：Magnetic control sputtering cathode, vacuum laser rangefinder, plated film area driving motor, plated film area drive lead screw, plated film area photoelectricity are opened
Pass and plated film area travelling gear；The plated film area is horizontally arranged with described plated film area optoelectronic switch at least two；The plated film area
Plated film area travelling gear is installed between optoelectronic switch；Plated film area travelling gear passes through plated film area turn-screw
It is connected with plated film area driving motor；The transverse axis side in the plated film area is provided with multiple magnetic control sputtering cathodes, another
Side is provided with multiple vacuum laser rangefinders.
The technique effect of the present invention：Windscreen surface distance magnetic control sputtering cathode is measured using vacuum laser rangefinder
Distance, automatically adjust magnetron sputtering power, ensure with curvature glass surface coating film thickness uniformity.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, described load is driven
Dynamic motor includes：First loading area driving motor, the second loading area driving motor and the 3rd loading area driving motor；Described first
Loading area drive motor with away from the plated film area the loading area turn-screw with the loading area driving pinion differential side gear into
Row connection；The 3rd loading area driving motor and the dress with the loading area travelling gear close to the plated film area
Area's turn-screw is carried to be attached；The second loading area driving motor is attached with the middle loading area drive lead screw.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the plated film area
Optoelectronic switch is denoted as the first filming area optoelectronic switch and the second plated film area optoelectronic switch；The small carrier vehicle is divided into small along the direction of motion
Carrier vehicle head and small carrier vehicle afterbody；The small carrier vehicle head triggering the first filming area optoelectronic switch, the fortune of the small carrier vehicle
Dynamic speed starts to be converted to coating speed, while gives the load wagon forward delay interval signal, small carrier vehicle afterbody is left dress completely
After carrier vehicle, the second loading area driving motor is further triggered, the load wagon is continued lengthwise movement, while the small load
Car starts plated film with coating speed into the plated film area, is opened when the small carrier vehicle afterbody leaves the second plated film area photoelectricity
Close, plated film terminates.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the unloading area
Including：Unloading machine, unloading area's guide rail, unloading area driving motor, unloading area's driving pinion differential side gear, unloading area's drive lead screw, unloading area's light
Electric switch and unloading area's travelling gear；The guide rail is longitudinally laid with least provided with 2, and the unloading machine is on the guide rail
Lengthwise movement；Be vertically arranged between the guide rail at least 3 it is described unloading area's drive lead screws, it is described unloading area's turn-screw with
The unloading area driving motor connection；The unloading area half is installed on the unloading area turn-screw away from the plated film area
Wheel gear, is provided with unloading area's travelling gear on the unloading area turn-screw in the plated film area；The unloading
Area's optoelectronic switch is arranged close to the side in the plated film area；Unloading area's optoelectronic switch is arranged on unloading half gear teeth of area
Between wheel and unloading area's travelling gear, and close to the side of unloading area's travelling gear.
The technique effect of the present invention：After the completion of plated film, small carrier vehicle is by driving the transmission of motor and driving pinion differential side gear to enter
On unloading machine, the automation of unloading is realized.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the small carrier vehicle
Partly or entirely blocking the loading area optoelectronic switch, unloading area's optoelectronic switch and plated film area optoelectronic switch can touch
Send out loading area optoelectronic switch described, unloading area's optoelectronic switch and plated film area optoelectronic switch.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the unloading area
Driving motor includes：First unloading area driving motor, the second unloading area driving motor and the 3rd unloading area driving motor；Described
One unloading area driving motor and the unloading area turn-screw with unloading area's driving pinion differential side gear away from the plated film area
It is attached；The 3rd unloading area driving motor close to the plated film area with having the described of unloading area's travelling gear
Unloading area's turn-screw is attached；The second unloading area driving motor is connected with middle unloading area's drive lead screw
Connect.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the unloading machine
Bottom is provided with the groove to match with the guide rail.
The technique effect of the present invention：Guide rail and groove match, realize the lengthwise movement of load wagon and unloading machine, into one
Walk and prepare for continuous sputter coating.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the loading area
Driving pinion differential side gear, the loading area travelling gear, plated film area travelling gear, unloading area's travelling gear, the unloading area
Driving pinion differential side gear is conllinear.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the small carrier vehicle
Bottom is provided with rack, and the rack respectively with the loading area driving pinion differential side gear, the loading area travelling gear, the unloading
Area's driving pinion differential side gear, unloading area's travelling gear and the engagement of plated film area travelling gear are driven.
The technique effect of the present invention：Engaging for rack and loading area driving pinion differential side gear and loading area travelling gear, aids in small load
Car, which is realized from loading area, enters plated film area, and rack is further real with unloading area's travelling gear and unloading engaging for area's driving pinion differential side gear
The now unloading from plated film area to unloading area.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the small carrier vehicle
At least provided with 1, and it is loaded on the load wagon.
The technique effect of the present invention：Multiple small carrier vehicles are loaded on load wagon, realize continuous magnetron sputtering plated film.
Preferably, it is multiple described true in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus
Empty laser range finder arranges that it is cloudy that each vacuum laser rangefinder corresponds to a magnetron sputtering along vertical direction
Pole.
The technique effect of the present invention：Vacuum laser rangefinder measures windscreen surface a little apart from magnetic control sputtering cathode
Distance, sputtering power is controlled by computer control system, so as to control deposition, one-to-one vacuum laser rangefinder with
Magnetic control sputtering cathode cooperates, and realizes multiparty control, ensures a plated film with regard to that can reach uniformity requirement.
Preferably, in a kind of above-mentioned automobile window glass vacuum continuous magnetron sputtering coating apparatus, the vacuum swashs
Protective device is installed on optar.
The technique effect of the present invention：Protective device is set, and vacuum laser rangefinder is subject to the shadow of plasma sputter in order to prevent
Ring, so as to influence the precision of rangefinder.
A kind of automobile window glass vacuum continuous magnetron sputtering film plating process includes：Multiple small carrier vehicles are loaded in described
On load wagon, the load wagon is placed on the loading area guide rail of the loading area, and second loading area drives motor
The load wagon lengthwise movement is driven, when the small carrier vehicle of front end triggers the loading area optoelectronic switch, the loading
Car stop motion, the loading area driving pinion differential side gear are rotated one week, the small carrier vehicle engaged with the loading area travelling gear, institute
State the 3rd loading area driving motor and the small carrier vehicle is quickly advanced into the plated film area, trigger and plate when small carrier vehicle head
During the first optoelectronic switch of film area, the movement velocity of small carrier vehicle is changed into coating speed, while delay is sent to the drive of the second load wagon
One signal of dynamic motor, after small carrier vehicle afterbody is left load wagon completely, load wagon along lengthwise movement, is moved described in two again
The spacing of small carrier vehicle, at this time the small carrier vehicle of foremost move to the loading area optoelectronic switch, trigger the loading again
Area's optoelectronic switch, makes load wagon stop motion, and another small carrier vehicle repeats above-mentioned motion process；Trigger the first filming
Area's optoelectronic switch, the plated film area driving motor drive the small carrier vehicle to continue to move, start plated film, the vacuum laser ranging
Instrument controls sputtering power, the plated film area drives motor by measuring the distance of coated surface point and the magnetic control sputtering cathode
The small carrier vehicle is driven to continue to move to；When the small carrier vehicle leaves the second plated film area optoelectronic switch, the 3rd unloading area
Drive the unloading area travelling gear on the unloading area turn-screw of motor connection and the rack of the small carrier vehicle bottom
It is meshed, drives the small carrier vehicle to start quickly to move, when running into unloading area's optoelectronic switch, with the described first unloading area driving
The unloading area driving pinion differential side gear driving small carrier vehicle that motor is connected is reached on the unloading machine, then second unloading
Area's driving motor stops after driving the spacing of two small carrier vehicles of the unloading machine advance, vacates the position of a small carrier vehicle,
Wait the small carrier vehicle after loading next plated film.
The technique effect of the present invention：In loading area and unloading area, there are load wagon and unloading machine respectively, quilt is carried for loading
The small carrier vehicle of windscreen is plated, and employs the transmission mechanisms such as turn-screw, guide rail, driving pinion differential side gear to control the movement of carrier vehicle,
Windscreen is set quickly to arrive and depart from plated film area.In addition, in order to obtain homogeneous film thickness, multiple magnetic are used in plated film area
Sputter cathode structure is controlled, and arranges multiple vacuum laser rangefinders, it is corresponding with multiple sputter cathodes, pass through vacuum laser ranging
Instrument measures coated surface and the distance of magnetic control sputtering cathode feeds back to sputter cathode, sputtering power is controlled, so as to control different positions
The amount of plasma sputter is put, to ensure that a plated film can reach film thickness uniformity requirement.
It can be seen via above technical scheme that compared with prior art, the present disclosure provides a kind of automobile air window glass
Glass vacuum continuous magnetron sputtering coating apparatus, not only simplify vacuum coating equipment, while automatically adjust magnetron sputtering power guarantor
The uniformity of glass surface plated film thickness of the card with curvature.In loading area and unloading area, there are load wagon and unloading machine respectively, use
To load the small carrier vehicle for carrying plated windscreen, and the transmission mechanisms such as turn-screw, guide rail, driving pinion differential side gear are employed to control
The movement of carrier vehicle, enables windscreen quickly to arrive and depart from plated film area.In addition, in order to obtain homogeneous film thickness, in plated film
Area uses multiple magnetic control sputtering cathodes, and arranges multiple vacuum laser rangefinders, corresponding with multiple sputter cathodes, passes through vacuum
Laser range finder measures coated surface and the distance of magnetic control sputtering cathode feeds back to sputter cathode, sputtering power is controlled, so as to control
The amount of diverse location plasma sputter processed, to ensure that a plated film can reach film thickness uniformity requirement；At the same time using single true
Empty room, realizes continuous coating, simplifies vacuum coating equipment.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 attached drawings are structure diagram of the invention；
Fig. 2 attached drawings are load wagon stereogram of the present invention；
Fig. 3 attached drawings are load wagon front view of the present invention；
Fig. 4 attached drawings are unloading machine front view of the present invention；
Fig. 5 attached drawings are driving pinion differential side gear front view of the present invention；
Fig. 6 attached drawings are driving pinion differential side gear side view of the present invention；
Fig. 7 attached drawings are homogeneous film thickness depositional control schematic diagram of the present invention.
In figure：1 loading area, 11 load wagons, 12 small carrier vehicles, 13 loading area guide rails, 141 first loading areas driving motor,
142 second loading areas driving motor, 143 the 3rd loading areas driving motor, 15 loading area driving pinion differential side gears, 16 loading area driving wires
Thick stick, 17 loading area optoelectronic switches, 18 loading area travelling gears, 2 plated film areas, 21 magnetic control sputtering cathodes, 22 vacuum laser rangefinders,
23 plated film areas driving motor, 24 plated film area drive lead screws, 251 the first filming area optoelectronic switches, 252 second plated film area photoelectricity are opened
Pass, 26 plated film area travelling gears, 3 unloading areas, 31 unloading machines, 33 unloading area's guide rails, 341 first unloading areas driving motors, 342 the
Two unloading area driving motors, 343 the 3rd unloading area driving motors, 35 unloading area's driving pinion differential side gears, 36 unloading area's drive lead screws, 37 are unloaded
Carry area's optoelectronic switch, 38 unloading area's travelling gears.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment, belongs to the scope of protection of the invention.
The embodiment of the invention discloses a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus, not only simplify
Vacuum coating equipment, while automatically adjust the uniformity that magnetron sputtering power ensures the glass surface plated film thickness with curvature.
Embodiment
Refer to attached drawing 1-7 be the present invention provides a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus,
Including：Loading area 1, plated film area 2 and unloading area 3；Loading area 1, plated film area 2 and unloading area 3 are arranged in vacuum chamber；Loading area
1 is located in same vacuum chamber with unloading area 3 by the connection in plated film area 2.
In order to further optimize above-mentioned technical proposal, loading area 1 and unloading area 3 are arranged symmetrically on plated film area 2, wherein filling
Connection relation and the position relationship for carrying each component in area 1 and unloading area 3 are symmetrical.
In order to further optimize above-mentioned technical proposal, loading area 1 includes：Load wagon 11, small carrier vehicle 12, loading area guide rail
13rd, loading area driving motor, loading area driving pinion differential side gear 15, loading area drive lead screw 16, loading area optoelectronic switch 17 and loading area
Travelling gear 18；The longitudinal direction of loading area guide rail 13 is equipped with 2, and the lengthwise movement on loading area guide rail 13 of load wagon 11；Small load
Car 12 is loaded on load wagon 11；3 loading area drive lead screws 16, loading area transmission are vertically arranged between loading area guide rail 13
Leading screw 16 is connected with loading area driving motor；Half gear teeth of loading area are installed on loading area turn-screw 16 away from plated film area 2
Wheel 15, loading area travelling gear 18 is provided with the loading area turn-screw 16 in plated film area 2；Loading area optoelectronic switch 17 is pacified
It is installed adjacent to the side in plated film area 2；Loading area optoelectronic switch 17 is arranged on loading area driving pinion differential side gear 15 and loading area travelling gear
Between 18, and close to the side of loading area travelling gear 18.
In order to further optimize above-mentioned technical proposal, loading area driving motor includes：First loading area driving motor 141,
Second loading area driving motor 142 and the 3rd loading area driving motor 143；First loading area drives motor 141 and remote plated film
The loading area turn-screw 16 with loading area driving pinion differential side gear 15 in area 2 is attached；3rd loading area drives motor 143 with leaning on
The loading area turn-screw 16 with loading area travelling gear 18 in nearly plated film area 2 is attached；Second loading area drives motor
142 are attached with middle loading area drive lead screw 16.
In order to further optimize above-mentioned technical proposal, plated film area optoelectronic switch includes 251 He of the first filming area optoelectronic switch
Second plated film area optoelectronic switch 252；The first filming area optoelectronic switch 251 is triggered, the movement velocity of small carrier vehicle 12 is changed into plated film
Speed moves on, and starts plated film, while gives the second loading area driving 142 forward delay interval signal of motor, when small 12 afterbody of carrier vehicle
After leaving load wagon 11 completely, the second loading area driving motor 142 is further triggered, load wagon 11 is continued lengthwise movement, when
Small 12 afterbody of carrier vehicle leaves the second plated film area optoelectronic switch 252, and plated film terminates.
In order to further optimize above-mentioned technical proposal, plated film area 2 includes：Magnetic control sputtering cathode 21, vacuum laser rangefinder
22nd, plated film area driving motor 23, plated film area drive lead screw 24, plated film area optoelectronic switch and plated film area travelling gear 26；Plated film area
2 laterally set 2 plated film area optoelectronic switches；Plated film area travelling gear 26 is installed between plated film area optoelectronic switch；Plated film area passes
Moving gear 26 drives motor to be connected by plated film area turn-screw 24 with plated film area；The transverse axis side in plated film area 2 is provided with multiple
Magnetic control sputtering cathode 21, opposite side are provided with multiple vacuum laser rangefinders 22.
In order to further optimize above-mentioned technical proposal, unloading area 3 includes：Unloading machine 31, unloading area's guide rail 33, unloading area drive
Dynamic motor, unloading area's driving pinion differential side gear 35, unloading area's drive lead screw 36, unloading area's optoelectronic switch 37 and unloading area's travelling gear 38；
The longitudinal direction of guide rail 33 is laid with 2, and the lengthwise movement on guide rail 33 of unloading machine 31；3 unloading areas are vertically arranged between guide rail 33
Drive lead screw 36, unloading area's turn-screw 36 are connected with unloading area driving motor；Unloading area turn-screw 36 away from plated film area 2
On be provided with unloading area's driving pinion differential side gear 35, close to plated film area 2 unloading area turn-screw 36 on be provided with unloading area's travelling gear
38；Unloading area's optoelectronic switch 37 is arranged close to the side in plated film area 2；Unloading area's optoelectronic switch 37 is arranged on unloading half gear teeth of area
Between wheel 35 and unloading area's travelling gear 38, and close to the side of unloading area's travelling gear 38.
In order to further optimize above-mentioned technical proposal, small carrier vehicle partly or entirely blocks loading area optoelectronic switch, unloading area
Optoelectronic switch and plated film area optoelectronic switch can trigger loading area optoelectronic switch, unloading area's optoelectronic switch and plated film area photoelectricity and open
Close.
In order to further optimize above-mentioned technical proposal, driving motor in unloading area includes：First unloading area driving motor 341,
Second unloading area driving motor 342 and the 3rd unloads area's driving motor 343；First unloading area driving motor 341 and remote plated film
The loading area turn-screw 36 with unloading area's driving pinion differential side gear 35 in area 2 is attached；3rd unloading area drives motor 343 with leaning on
The unloading area turn-screw 36 with unloading area's travelling gear 38 in nearly plated film area 2 is attached；Second unloading area driving motor
342 are attached with middle unloading area drive lead screw 36.
In order to further optimize above-mentioned technical proposal, 11 bottom of load wagon is provided with the groove to match with guide rail 13.
In order to further optimize above-mentioned technical proposal, small 12 bottom of carrier vehicle is provided with rack, and rack respectively with loading area
Driving pinion differential side gear 15, loading area travelling gear 18, unloading area's driving pinion differential side gear 35, unloading area's travelling gear 38 and plated film area travelling gear
26 engagements are driven.
In order to further optimize above-mentioned technical proposal, small carrier vehicle 12 is provided with multiple, and is loaded on load wagon 11.
In order to further optimize above-mentioned technical proposal, multiple vacuum laser rangefinders 22 are along direction cloth perpendicular to the ground
Put, each vacuum laser rangefinder 22 corresponds to a magnetic control sputtering cathode 21.
In order to further optimize above-mentioned technical proposal, protective device is installed on vacuum laser rangefinder 22.
A kind of automobile window glass vacuum continuous magnetron sputtering film plating process includes：Multiple small carrier vehicles 12 are loaded in load wagon
On 11, load wagon 11 is placed on the loading area guide rail 13 of loading area 1, and the second loading area driving motor 142 drives load wagon 11
Lengthwise movement, when the small carrier vehicle 12 of front end triggers loading area optoelectronic switch 17,11 stop motion of load wagon, loading area half is taken turns
Gear 15 rotates one week, and small carrier vehicle 12 is engaged with loading area travelling gear 18, and the 3rd loading area driving motor 143 drives small load
Car 12 moves quickly into plated film area 2, when the first filming area's optoelectronic switch 251 is triggered on small 12 head of carrier vehicle, the fortune of small carrier vehicle 12
Dynamic speed, which starts to be converted to coating speed, to be moved on, while gives the second loading area driving 142 forward delay interval signal of motor, when small
After 12 afterbody of carrier vehicle leaves load wagon 11 completely, it is vertical that the second loading area driving motor 142 drives load wagon 11 to continue on again
To movement, the spacing of two small carrier vehicle 12 is moved, the small carrier vehicle 12 of foremost moves to loading area optoelectronic switch 17 at this time, again
Loading area optoelectronic switch 17 is triggered, makes 11 stop motion of load wagon, when small 12 afterbody of carrier vehicle leaves the first filming area optoelectronic switch
When 251, another small carrier vehicle 12 repeats above-mentioned motion process；Small 12 head of carrier vehicle triggering the first filming area optoelectronic switch 251, plating
Film area driving motor 23 drives small carrier vehicle 12 to continue to move, and starts plated film, vacuum laser rangefinder 22 is by measuring coated surface
The distance of point and magnetic control sputtering cathode 21, controls sputtering power, and plated film area driving motor 23 drives small carrier vehicle 12 to continue to move to；It is small
When carrier vehicle 12 leaves the second plated film area optoelectronic switch 252, plated film terminates, the unloading area that the 3rd unloading area driving motor 343 connects
Unloading area travelling gear 38 on turn-screw 36 is meshed with the rack of small 12 bottom of carrier vehicle, drives small carrier vehicle 12 to start quickly
Movement, when running into unloading area's optoelectronic switch 37, the unloading area driving pinion differential side gear 35 being connected with the first unloading area driving motor 341 drives
Dynamic small carrier vehicle 12 is reached on unloading machine 31, after small carrier vehicle 12 is completely disposed on unloading machine 31, the second unloading area driving motor 342
Stop after the spacing of the two small carrier vehicle 12 of the driving advance of unloading machine 31, vacate the position of one small carrier vehicle 12, wait loading next
Small carrier vehicle 12 after a plated film.
As shown in Figure 7, coating film on glass face is vertically divided into multiple regions, it is true that each region corresponds to arrangement one
Empty magnetic control sputtering cathode, while the opposite side in coating film on glass face arranges multiple vacuum laser rangefinders, and swash each vacuum
Optar and vacuum magnetic-control sputtering cathode correspond, and are so placed in multiple vacuum laser rangefinders and multiple true by glass plating
The centre position of empty magnetic control sputtering cathode.All vacuum laser rangefinders are permanent with the distance of corresponding vacuum magnetic-control sputtering cathode
It is fixed and equal, when the distance of vacuum laser range finder measurement glass surface some region point is closer, illustrate sputter cathode
The plated surface of distance is distant, it is necessary to increase sputtering power, conversely, then needing to reduce sputtering power, so sends signal, passes through
Signal amplifies, A/D conversions, is transferred to computer, and computer controls shielding power supply power, so as to control cathode to splash by calculating
The amount of penetrating, obtains deposition film in uniform thickness.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.For device disclosed in embodiment
For, since it is corresponded to the methods disclosed in the examples, so description is fairly simple, related part is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or use the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and the principles and novel features disclosed herein phase one
The most wide scope caused.
Claims (10)
- A kind of 1. automobile window glass vacuum continuous magnetron sputtering coating apparatus, it is characterised in that including：Loading area (1), plated film Area (2) and unloading area (3)；The loading area (1), the plated film area (2) and unloading area (3) are arranged in vacuum chamber； The loading area (1) and unloading area (3) are located in same vacuum chamber by the connection of the plated film area (2).
- A kind of 2. automobile window glass vacuum continuous magnetron sputtering coating apparatus according to claim 1, it is characterised in that The loading area (1) and unloading area (3) are arranged symmetrically on the plated film area (2).
- A kind of 3. automobile window glass vacuum continuous magnetron sputtering coating apparatus according to claim 2, it is characterised in that The loading area (1) includes：Load wagon (11), small carrier vehicle (12), loading area guide rail (13), loading area driving motor, loading area Driving pinion differential side gear (15), loading area drive lead screw (16), loading area optoelectronic switch (17) and loading area travelling gear (18)；The dress The longitudinal direction for carrying area's guide rail (13) along the load wagon (11) is at least equipped with 2, and the load wagon (11) is in the loading area Lengthwise movement on guide rail (13)；The small carrier vehicle (12) is loaded on the load wagon (11)；The loading area guide rail (13) it Between be vertically arranged with least 3 loading area drive lead screws (16), the loading area turn-screw (16) and the loading area Drive motor connection；The loading area half is installed on the loading area turn-screw (16) away from the plated film area (2) to take turns Gear (15), the loading area travelling gear is provided with the loading area turn-screw (16) of the plated film area (2) (18)；The loading area optoelectronic switch (17) is arranged close to the side of the plated film area (2)；The loading area optoelectronic switch (17) it is arranged between the loading area driving pinion differential side gear (15) and the loading area travelling gear (18), and close to the loading area The side of travelling gear (18).
- A kind of 4. automobile window glass vacuum continuous magnetron sputtering coating apparatus according to claim 2, it is characterised in that The plated film area (2) includes：Magnetic control sputtering cathode (21), vacuum laser rangefinder (22), plated film area driving motor (23), plated film Area's drive lead screw (24), plated film area optoelectronic switch and plated film area travelling gear (26)；The plated film area (2) is laterally at least set There are 2 plated film area optoelectronic switches；Plated film area travelling gear is installed between plated film area optoelectronic switch described in each two (26)；Plated film area travelling gear (26) drives motor to connect by plated film area turn-screw (24) and the plated film area Connect；Plated film area (2) the transverse axis side is provided with multiple magnetic control sputtering cathodes (21)；Opposite side is provided with multiple described true Empty laser range finder (22).
- A kind of 5. automobile window glass vacuum continuous magnetron sputtering coating apparatus according to claim 2, it is characterised in that Unloading area (3) includes：Unloading machine (31), unloading area's guide rail (33), unloading area driving motor, unloading area's driving pinion differential side gear (35), area's drive lead screw (36), unloading area's optoelectronic switch (37) and unloading area's travelling gear (38) are unloaded；The guide rail (33) is vertical To being laid with least 2, and the unloading machine (31) lengthwise movement on the guide rail (33)；Longitudinally set between the guide rail (33) It is equipped with least 3 unloading area's drive lead screws (36), unloading area's turn-screw (36) and the unloading area driving motor Connection；Unloading area's driving pinion differential side gear (35) is installed on the unloading area turn-screw (36) away from the plated film area (2), Unloading area's travelling gear (38) is installed on the unloading area turn-screw (36) of the plated film area (2)；It is described Unloading area's optoelectronic switch (37) is arranged close to the side of the plated film area (2)；Unloading area's optoelectronic switch (37) is arranged on Between unloading area's driving pinion differential side gear (35) and unloading area's travelling gear (38), and close to unloading area's travelling gear (38) side.
- 6. according to a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus of claim 3-5 any one of them, its It is characterized in that, load wagon (11) bottom is provided with the groove to match with the guide rail (13).
- 7. according to a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus of claim 3-5 any one of them, its Be characterized in that, small carrier vehicle (12) bottom is provided with rack, and the rack respectively with the loading area driving pinion differential side gear (15), The loading area travelling gear (18), unloading area's driving pinion differential side gear (35), unloading area's travelling gear (38) and the plating Film area travelling gear (26) engagement is driven.
- 8. according to a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus of claim 3-5 any one of them, its It is characterized in that, the small carrier vehicle (12) is loaded on the load wagon (11) at least provided with 1.
- A kind of 9. automobile window glass vacuum continuous magnetron sputtering coating apparatus according to claim 4, it is characterised in that Multiple vacuum laser rangefinders (22) arrange that each vacuum laser rangefinder (22) is right along direction perpendicular to the ground Answer a magnetic control sputtering cathode (21).
- 10. a kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus according to claim 4, its feature exist In being provided with protective device on the vacuum laser rangefinder (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810019624.6A CN108004520A (en) | 2018-01-09 | 2018-01-09 | A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810019624.6A CN108004520A (en) | 2018-01-09 | 2018-01-09 | A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus |
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| CN108004520A true CN108004520A (en) | 2018-05-08 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003229468A (en) * | 2002-02-06 | 2003-08-15 | Mitsubishi Heavy Ind Ltd | Cluster type vacuum processor |
| KR20100044606A (en) * | 2008-10-22 | 2010-04-30 | 주식회사 아이피에스 | In-line type semiconductor manufacturing device |
| KR20120122820A (en) * | 2011-04-30 | 2012-11-07 | 한국생산기술연구원 | Coating apparatus for uniform coating |
| US20130108792A1 (en) * | 2011-10-26 | 2013-05-02 | Pinecone Material Inc. | Loading and unloading system for thin film formation and method thereof |
| CN207811862U (en) * | 2018-01-09 | 2018-09-04 | 吉林大学 | A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus |
-
2018
- 2018-01-09 CN CN201810019624.6A patent/CN108004520A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003229468A (en) * | 2002-02-06 | 2003-08-15 | Mitsubishi Heavy Ind Ltd | Cluster type vacuum processor |
| KR20100044606A (en) * | 2008-10-22 | 2010-04-30 | 주식회사 아이피에스 | In-line type semiconductor manufacturing device |
| KR20120122820A (en) * | 2011-04-30 | 2012-11-07 | 한국생산기술연구원 | Coating apparatus for uniform coating |
| US20130108792A1 (en) * | 2011-10-26 | 2013-05-02 | Pinecone Material Inc. | Loading and unloading system for thin film formation and method thereof |
| CN207811862U (en) * | 2018-01-09 | 2018-09-04 | 吉林大学 | A kind of automobile window glass vacuum continuous magnetron sputtering coating apparatus |
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