CN107966121A - A kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW - Google Patents
A kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW Download PDFInfo
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- CN107966121A CN107966121A CN201710974646.3A CN201710974646A CN107966121A CN 107966121 A CN107966121 A CN 107966121A CN 201710974646 A CN201710974646 A CN 201710974646A CN 107966121 A CN107966121 A CN 107966121A
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- micropositioner
- microballoon
- labview
- tuning fork
- precision
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/06—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring contours or curvatures
Abstract
The invention discloses a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW, using two tuning fork probes left and right difference structure is formed in X-direction, then two tuning fork probes are encouraged to produce resonance using two signal generators, the signal of tuning fork probe vibration is read after being handled by amplitude feedback circuit by data collecting card by the LabVIEW in industrial computer, LabVIEW determines the distance of tuning fork probe and tested ball by the tuning fork vibration amplitude size of reading, industrial computer sends to micropositioner controller and instructs, two X are controlled to drive the differential microballoon that approaches of tuning fork probe to measure at the same time to nano-precision micropositioner by micropositioner controller, micropositioner controller control Y-direction nano-precision micropositioner feeding microballoon position after the completion of single approaches.The present invention develops microballoon sphericity Measurement and Control System using LabVIEW virtual instrument softwares, can realize the high-acruracy survey of microballoon sphericity, and control accuracy can reach nanoscale.
Description
Technical field
The present invention relates to high-precision micro-nano field of measuring technique, more particularly to a kind of microballoon sphericity based on LabVIEW are high
Precision measure control system.
Background technology
In recent years, it is higher and higher for the dimension precision requirement of microballoon with the fast development of minute manufacturing technology, such as
For the Nano Coordinate Measuring Machine of microdevice accurate measurement, its gauge head microsphere diameter is within tens of to hundreds of microns, ball
Degree will be generally controlled in the even lower nanometer scale of tens nanometer.High-precision roundness measuring equipment on the market, such as Japan Mitutoyo are public
The RA-H5200 roundness measuring equipments of department, the minimum 1.6mm of its spheric head probe diameter, so its measuring head diameter is bigger than normal, are less than for diameter
The microballoon of 1mm can not carry out high-acruracy survey.So a kind of new microballoon sphericity measuring method of design, design is a kind of high-precision
Measurement and Control System is very necessary.
The content of the invention
The defects of the object of the invention is exactly to make up prior art, there is provided a kind of microballoon sphericity based on LabVIEW is high
Precision measure control system.
The present invention is achieved by the following technical solutions：
A kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW, including two differential tuning fork tungsten tipped probes, control respectively
Make the Y-direction nano-precision micropositioner, micro- that two X of two tuning fork probes are moved to nano-precision micropositioner and control microballoon
Dynamic platform controller, signal generator, amplitude feedback circuit, data collecting card and the industrial computer for being provided with LabVIEW；First
Left and right difference structure is formed in X-direction using two tuning fork probes, then encourages two tuning forks to visit using two signal generators
Pin produce resonance, tuning fork probe vibration signal by amplitude feedback circuit handle after by data collecting card by industrial computer
Interior LabVIEW is read, and LabVIEW determines the distance of tuning fork probe and tested ball by the tuning fork vibration amplitude size of reading,
Industrial computer give micropositioner controller send instruction, by micropositioner controller control two X to nano-precision micropositioner at the same time
The driving differential microballoon that approaches of tuning fork probe measures, and micropositioner controller control Y-direction nano-precision is micro- after the completion of single approaches
Dynamic platform feeding microballoon position, it is that microballoon sphericity high-acruracy survey can be achieved to change microballoon direction and repeat above-mentioned measuring process.
Two tuning fork tungsten tipped probes and the micropositioner of microballoon movement possess nanometer measurement resolving power, control two differences
The X of dynamic tuning fork tungsten tipped probe movement is the same to nano-precision micropositioner stroke and is not less than microsphere radius, the Y-direction of control microballoon movement
Nano-precision micropositioner stroke is not less than microsphere diameter.
Two X choose linear micropositioner to nano-precision micropositioner and a Y-direction nano-precision micropositioner, its
In two X to 250 μm of nano-precision micropositioner linear course, driving resolution ratio be 0.5nm, Y-direction nano-precision micropositioner is linear
500 μm of stroke, driving resolution ratio are 0.9nm.Selected micropositioner stroke disclosure satisfy that to microballoon of the diameter no more than 500 μm
Sphericity measures, and the driving resolution ratio less than 1nm can ensure that micropositioner realizes nanometer stepping, ensures the high accuracy survey of microballoon sphericity
Amount.
Two X quickly approach survey ball at the same time to nano-precision micropositioner, if a micropositioner first approaches arrival measurement position, need
To wait another micropositioner in situ, two micropositioners measure when reaching measurement position, after being measured at the same it is quick after
Move back.
The data collecting card is NI PCI-6259 high-speed collection cards, there is 32 tunnel simulation inputs, 16 countings, single-pass
Road picking rate reaches 1.25MS/s, and picking rate reaches 1MS/s to multichannel at the same time, and the high speed of capture card ensures collected signal
The integrality of information.
The amplitude feedback circuit is made of amplification, rectification and filter module, and the original signal of tuning fork vibration is first amplified,
Then RMS conversion is realized by rectification chip, the processing of filtered complete pair signals after the completion of rectification.
The micropositioner controller chooses Ensemble micropositioner controllers, and LabVIEW is read by .net communication modes
Take Ensemble built-in functions realize with the data exchange of micropositioner, Ensemble built-in functions are arranged on LabVIEW's during use
Under user.lib read paths, LabVIEW complete Library function recognition after i.e. can be achieved Initialize installation, console state control and
Data read operation.
It is an advantage of the invention that：The present invention develops microballoon sphericity Measurement and Control System using LabVIEW virtual instrument softwares,
It can realize the high-acruracy survey of microballoon sphericity, control accuracy can reach nanoscale.LabVIEW graphical programming languages are relatively other
Control language greatly reduces programming difficulty, shortens the construction cycle, the friendly interface write, easy to operation and maintenance.
Brief description of the drawings
Fig. 1 is the microballoon sphericity Measurement and Control System flow chart based on LabVIEW.
Fig. 2 is amplitude feedback circuit schematic diagram.
Fig. 3 measure-retreats flow chart for X to double micropositioner auto-feedings.
Fig. 4 is X to double micropositioner auto-feeding process of measurement figures.
Fig. 5 is X to double micropositioner automatic backing programme diagrams.
Fig. 6 controls programme diagram for Y-direction nano-precision micropositioner.
Fig. 7 is the microballoon sphericity Measurement and Control System interface based on LabVIEW.
Embodiment
As shown in Figure 1, a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW, including two differential sounds
Fork tungsten tipped probe 1, a Y for controlling two X of two tuning fork probes 1 to be moved to nano-precision micropositioner 2 and control microballoon respectively
To nano-precision micropositioner 3, micropositioner controller 8, signal generator 4, amplitude feedback circuit 5, data collecting card 6 and it is provided with
The industrial computer 7 of LabVIEW；Left and right difference structure is formed in X-direction first with two tuning fork probes 1, then utilizes two
A signal generator 4 encourages two tuning fork probes 1 to produce resonance, the signal that tuning fork probe 1 vibrates by amplitude feedback circuit 5 at
Read after reason by data collecting card 6 by the LabVIEW in industrial computer 7, the tuning fork vibration amplitude that LabVIEW passes through reading
Size determines the distance of tuning fork probe and tested ball 9, and industrial computer 7 sends instruction to micropositioner controller 8, passes through micropositioner
Controller 8 controls two X to drive the differential microballoon that approaches of tuning fork probe 1 to measure at the same time to nano-precision micropositioner, and single approaches
After the completion of micropositioner controller 8 control Y-direction nano-precision micropositioner 3 to feed microballoon position, change microballoon direction simultaneously repeat it is above-mentioned
Microballoon sphericity high-acruracy survey can be achieved in measuring process.
Two tuning fork tungsten tipped probes 1 and the micropositioner of microballoon movement possess nanometer measurement resolving power, control two
The X of differential tuning fork tungsten tipped probe movement is the same to nano-precision micropositioner stroke and is not less than microsphere radius, the Y of control microballoon movement
It is not less than microsphere diameter to nano-precision micropositioner stroke.
Two X choose linear micropositioner to nano-precision micropositioner 2 and a Y-direction nano-precision micropositioner 3,
Two of which X is to 250 μm of 2 linear course of nano-precision micropositioner, and driving resolution ratio is 0.5nm, Y-direction nano-precision micropositioner 3
500 μm of linear course, driving resolution ratio are 0.9nm.Selected micropositioner stroke disclosure satisfy that micro- no more than 500 μm to diameter
The sphericity measurement of ball, the driving resolution ratio less than 1nm can ensure that micropositioner realizes nanometer stepping, ensure the high-precision of microballoon sphericity
Degree measurement.
Two X quickly approach survey ball at the same time to nano-precision micropositioner 2, if a micropositioner first approaches arrival measurement position,
Need to wait another micropositioner in situ, two micropositioners measure when reaching measurement position, after being measured while quick
Retreat.
The data collecting card is NI PCI-6259 high-speed collection cards, there is 32 tunnel simulation inputs, 16 countings, single-pass
Road picking rate reaches 1.25MS/s, and picking rate reaches 1MS/s to multichannel at the same time, and the high speed of capture card ensures collected signal
The integrality of information.
As shown in Fig. 2, the amplitude feedback circuit 5 is made of amplification, rectification and filter module, tuning fork vibration it is original
Signal first amplifies, and then realizes RMS conversion by rectification chip, the place of filtered complete pair signals after the completion of rectification
Reason.
The micropositioner controller 8 chooses Ensemble micropositioner controllers, and LabVIEW passes through .net communication modes
Read Ensemble built-in functions and realize data exchange with micropositioner, Ensemble built-in functions are arranged on LabVIEW during use
User.lib read paths under, LabVIEW complete Library function recognition after i.e. can be achieved Initialize installation, console state control
And data read operation.
Fig. 3 show double probe automatic measurements and retreats flow chart, and probe motion is controlled by LabVIEW by micropositioner.
After the completion of initialization, micropositioner X1 and X2 is opposite at the same time to be approached to microballoon, judges whether micropositioner is corresponding by micropositioner in place
The amplitude signal of probe vibrational feedback determines that amplitude signal, which is reduced to corresponding micropositioner during the 80% of its free vibration amplitude, to be stopped.
If one of X micropositioners first reach measurement position, another X micropositioner is waited its assignment original place, and two X are smart to nanometer
Degree micropositioner measures when all reaching designated position, records measurement data, after controlling dual stage quick at the same time after being measured again
Move back.
Fig. 4 show X to double micropositioner auto-feeding process of measurement figures.X is gathered to double-tone by NI DAQ assistants first
The amplitude feedback signal of probe is pitched, by it compared with the 80% of tuning fork free vibration amplitude, is controlled if not reaching 80%
Dual stage continues to approach forward.
Approximate procedure control is as follows：Complete laggard by Connect functional links micropositioner and LabVIEW, connection first
Enter Move Inc functions, Move Inc functions realize linear relative translational movement control, set micropositioner title, stepping rate with
Single step value, step value represent to advance, are retreated for negative indication to be positive.Action executing is waited by wait functions after being provided with,
All state parameters for being controlled micropositioner are fed back after having performed action, which is exported with cluster functional form, by indexing cluster letter
Micropositioner displacement element in number, finally output show for curve.If wherein a micropositioner first reaches measurement position, pass through
Single step value in Move Inc functions is set to 0 by Case structures, remaining flow can be achieved to wait work(as above-mentioned steps
Energy.
Fig. 5 show X to double micropositioner automatic backing programme diagrams, by Case structures by the Move Inc letters of double micropositioners
Single step value in number is set to negative value, and fallback function can be achieved in remaining flow as above-mentioned steps.
Fig. 6 show Y-direction nano-precision micropositioner control programme diagram, its basic ideas is with consistent described in Fig. 4, Y-direction work
The function of platform is to control microballoon to advance or retreat after two X complete one group of measurement to workbench to realize multigroup measurement.
Fig. 7 show the microballoon sphericity Measurement and Control System interface based on LabVIEW, mainly includes two sounds of real-time display
Pitch the force curve window of probe vibration amplitude, each micropositioner control parameter input window and micropositioner displacement real-time display curve.
Accurate control can be realized with the change of each experiment parameter in accurate observation sphericity measurement process by this interface.
Claims (7)
- A kind of 1. microballoon sphericity high-accuracy measurement control system based on LabVIEW, it is characterised in that：Including two differential tuning forks Tungsten tipped probe, a Y-direction nanometer for controlling two X of two tuning fork probes to be moved to nano-precision micropositioner and control microballoon respectively Precision micropositioner, micropositioner controller, signal generator, amplitude feedback circuit, data collecting card and the work for being provided with LabVIEW Industry computer；Left and right difference structure is formed in X-direction first with two tuning fork probes, is then swashed using two signal generators Encourage two tuning fork probes and produce resonance, the signal of tuning fork probe vibration handled by amplitude feedback circuit after by data collecting card Read by the LabVIEW in industrial computer, LabVIEW determines tuning fork probe and quilt by the tuning fork vibration amplitude size of reading The distance of ball is surveyed, industrial computer sends to micropositioner controller and instructs, and two X are controlled to nano-precision by micropositioner controller Micropositioner drives the differential microballoon that approaches of tuning fork probe to measure at the same time, and micropositioner controller controls Y-direction after the completion of single approaches Nano-precision micropositioner feeding microballoon position, it is that achievable microballoon sphericity is high-precision to change microballoon direction and repeat above-mentioned measuring process Degree measurement.
- 2. a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW according to claim 1, its feature exist In：Two tuning fork tungsten tipped probes, two X possess nanometer to nano-precision micropositioner and a Y-direction nano-precision micropositioner Level measurement resolution, the X of the differential tuning fork tungsten tipped probe movement of control two are the same to nano-precision micropositioner stroke and not less than micro- The radius of a ball, the Y-direction nano-precision micropositioner stroke of control microballoon movement are not less than microsphere diameter.
- 3. a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW according to claim 2, its feature exist In：Two X choose linear micropositioner to nano-precision micropositioner and a Y-direction nano-precision micropositioner, wherein two A X is to 250 μm of nano-precision micropositioner linear course, and driving resolution ratio is 0.5nm, Y-direction nano-precision micropositioner linear course 500 μm, driving resolution ratio is 0.9nm.
- 4. a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW according to claim 1, its feature exist In：Two X to nano-precision micropositioner at the same time quickly approach survey ball, if a micropositioner first approach reach measurement position, it is necessary to Original place waits another micropositioner, and two micropositioners measure when reaching measurement position, is measured rear rapid backward at the same time.
- 5. a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW according to claim 1, its feature exist In：The data collecting card is NI PCI-6259 high-speed collection cards, there is 32 tunnel simulation inputs, 16 countings, single channel collection Speed reaches 1.25MS/s, and picking rate reaches 1MS/s to multichannel at the same time, and the high speed of capture card ensures collected signal information Integrality.
- 6. a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW according to claim 1, its feature exist In：The amplitude feedback circuit is made of amplification, rectification and filter module, and the original signal of tuning fork vibration is first amplified, then RMS conversion is realized by rectification chip, the processing of filtered complete pair signals after the completion of rectification.
- 7. a kind of microballoon sphericity high-accuracy measurement control system based on LabVIEW according to claim 1, its feature exist In：The micropositioner controller chooses Ensemble micropositioner controllers, and LabVIEW is read by .net communication modes Ensemble built-in functions realize with the data exchange of micropositioner, Ensemble built-in functions are arranged on LabVIEW's during use Under user.lib read paths, LabVIEW complete Library function recognition after i.e. can be achieved Initialize installation, console state control and Data read operation.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111879451A (en) * | 2020-07-30 | 2020-11-03 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111879451A (en) * | 2020-07-30 | 2020-11-03 | 合肥工业大学 | Microcosmic acting force measuring system and method for judging contact zero point and surface property of microcosmic acting force measuring system |
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Application publication date: 20180427 |