CN107955931A - Vertical high-temperature vacuum packet oozes stove - Google Patents
Vertical high-temperature vacuum packet oozes stove Download PDFInfo
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- CN107955931A CN107955931A CN201711161842.5A CN201711161842A CN107955931A CN 107955931 A CN107955931 A CN 107955931A CN 201711161842 A CN201711161842 A CN 201711161842A CN 107955931 A CN107955931 A CN 107955931A
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- furnace body
- activator
- stove
- sliding block
- insulating layer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/28—Solid state diffusion of only metal elements or silicon into metallic material surfaces using solids, e.g. powders, pastes
- C23C10/34—Embedding in a powder mixture, i.e. pack cementation
- C23C10/36—Embedding in a powder mixture, i.e. pack cementation only one element being diffused
- C23C10/44—Siliconising
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Abstract
The present invention provides a kind of vertical high-temperature vacuum packet to ooze stove, including furnace body, insulating layer, heating element, activator device and vacuum system, and the furnace body is the hollow circuit cylinder placed vertically, and both ends are closed by upper cover and lower cover respectively；The inboard wall of furnace body lays insulating layer, and hot-zone is formed in insulating layer；The heating element is installed in hot-zone；The vacuum system is connected with furnace body；The activator device is installed on lifting gear, below furnace body, the through hole of furnace body lower cover can be passed through to enter in furnace body；In the activator device, activator is placed in activation agent container, and separate heater is provided with outside activation agent container, and workpiece to be processed is placed in the product box of filling silicon grain, and activation agent container is connected with product box by graphite-pipe.The present invention can realize siliconising preparation process.
Description
Technical field
The present invention relates to the vacuum equipment that a kind of antioxidant coating is produced, and especially carries out high temperature to niobium tungsten alloy workpiece and oozes
The vacuum antioxidant coating equipment of silicon.
Background technology
Thrust chamber bears high temperature ablation to known rocket engine during the work time, is sprayed and is modified using high-temperature alloy surface
Rotating fields can mitigate thrust chamber weight, effectively lift thrust chamber fire-resistant oxidation resistant performance, for improving rail, attitude control engine
Specific impulse, raising spacecraft service life play an important role.Niobium hafnium alloy (NbHf10-1) is the current double elements liquid rocket hair in China
Widely used material is moved, material operating temperature under the protection of niobium silicide high-temperature oxidation resistant coating is 1200~1300 DEG C.Niobium
Tungsten alloy (Nb521) is the new material for engine jet pipe of domestic development in recent years, is sprayed or brushed using slurry, then
After the process of sintering prepares silicide high-temp antioxidant coating, the maximum operation (service) temperature upper limit is 1500 DEG C, is current material
Maximum operation (service) temperature.
But in produce reality, some thrust chamber wall temperature measurement temperature have reached 1700 DEG C.Thruster material system
Fire-resistant oxidation resistant ability, which actually has become, restricts the maximum bottleneck that new rail control engine performance further improves.Mesh
The countries such as preceding known Ukraine deposit Mo layers using ion sputtering technique in niobium tungsten alloy matrix surfaces externally and internally, then using vacuum
Bag cementation process makes Mo layers of silication generation MoSi2Coating, can make the operating temperature of thrust chamber bring up to 1700 DEG C.This is at home still
Belong to blank, it is therefore desirable to have a kind of vacuum equipment for realizing siliconising preparation process.
The content of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of to niobium tungsten alloy workpiece progress vacuum antioxidant coating
The equipment of preparation, can realize siliconising preparation process.
The technical solution adopted by the present invention to solve the technical problems is：A kind of high-temperature vacuum bag oozes stove, including furnace body, guarantor
Warm layer, heating element, activator device and vacuum system.
The furnace body is the hollow circuit cylinder placed vertically, and both ends are closed by upper cover and lower cover respectively；The furnace body
Inner wall lays insulating layer, and hot-zone is formed in insulating layer；The heating element is installed in hot-zone；The vacuum system and stove
Body connects；The activator device is installed on lifting gear, below the furnace body, can pass through the through hole of furnace body lower cover into
Enter in furnace body；In the activator device, activator is placed in activation agent container, and independent heating is provided with outside activation agent container
Device, workpiece to be processed are placed in the product box of filling silicon grain, and activation agent container is connected with product box by graphite-pipe.
Explosion diaphragm safety valve and pressure sensor are installed, furnace body shell wall, upper cover and lower cover be not by the furnace body
Rust steel is made, and has cooling jacket, cooling water bottom in and top out.
The steam lead of the upper cover perforate installation connection activator crystallizer, collects activator steam and forces to tie
It is brilliant.
The steam lead lower end uses horn mouth form, is prolonged inside jet chimney using the staggered mode of partition plate
The discharge course of long activator steam.
The insulating layer using the hard felt of graphite into.
The heating element uses three-phase heater.
The lifting gear includes sliding block, column, counterweight, hoist cable and stent；The sliding block is subtracted by turbine and worm
Fast device moves up and down along the rack of column side wall；Described column upper end installation fixed pulley, between sliding block and breeding by around
The hoist cable connection of fixed pulley；The stent is installed on sliding block by spring bearing so that stent can be rotated around column；Institute
The activator device stated is installed on stent by some springs；The upper and lower ends installation limit switches of the sliding block.
The beneficial effects of the invention are as follows：
The heating element of the present invention selects carbon carbon composite, does not find that domestic enterprise uses and is used as heating element, reaches
International most advanced level, disclosure satisfy that process high-temperature requirement；Furnace lining selection economical refractory material -- the graphite felt of the present invention, and according to
Product box with activation twoth area of agent container with stove but independent temperature control and 500 DEG C of the temperature difference the characteristics of, take diverse location using different
Combining structure form, can realize the preferable temperature uniformity in working region and temperature control and；The present invention is using first
Into fuzzy control PID technology, according to the parameter of system performance on-line tuning controller, thus according to specific object effectively into
Row is adjusted, and stable state accuracy and response time have reached Expected Results, improved labor productivity.
Brief description of the drawings
Fig. 1 is that the high-temperature vacuum bag of the present invention oozes the structure diagram of stove；
Fig. 2 is the structure diagram of furnace body；
Fig. 3 is the structure diagram of furnace body furnace shell；
Fig. 4 is the cross-sectional view of furnace insulation structure；
Fig. 5 is the front view of furnace body heating element；
Fig. 6 is the top view of furnace body heating element；
Fig. 7 is the cross-sectional view that high-temperature vacuum bag oozes stove activator device；
Fig. 8 is the cross-sectional view that high-temperature vacuum bag oozes stove lifting gear.
Embodiment
The present invention is further described with reference to the accompanying drawings and examples, and the present invention includes but are not limited to following implementations
Example.
High-temperature vacuum bag provided by the invention oozes stove by furnace body, insulating layer, heating element, activator device, vacuum system
And auxiliary system composition.Furnace body has cylinder side wall, upper cover and lower cover, and the upper cover and lower cover center are provided with logical
Hole, being dimensioned to of the through hole can hold product box outside diameter.Insulating layer, is arranged in the furnace body, the insulation
Hot-zone is formed in layer.Heating element, in the hot-zone of the insulating layer.Activator device is installed on the described of lifting gear
On stent, immediately below furnace body.Vacuum system is connected with furnace body, and the furnace interior region can be evacuated.It is auxiliary
Auxiliary system is connected with furnace body, lifting gear, vacuum system, carry out cooling system control, pneumatic control system control, data acquisition and
Implementing monitoring, improves the degree of automation of antioxidant coating equipment.
As shown in Figure 1, the present invention is by platform 1, furnace body 2, lifting gear 3, activator device 4, vacuum system 5 and auxiliary
System (containing water-cooling system, control system and pneumatic control system) composition.
As shown in Fig. 2, the furnace body 2 is made of burner body 6, primary heater 8 and 7 three parts of attemperator.Furnace body 2
For vertical heater, explosion diaphragm safety valve, pressure sensor and connection fixing fitting are installed on furnace body.
As shown in figure 3, housing 13 is made of stainless steel cylinder, both ends of the surface are flange arrangement, for upper cover 11 and lower cover 15
It is connected.Shell wall has cooling jacket, and cooling water is bottom in and top out form.Side is equipped with the right-angle elbow pipe 9 with cooling jacket, is used for
Connect vacuum system 5.Electrode 12 is cooled down equipped with three bands on housing, for powering to the primary heater 8 in housing.In housing 13
Three bearings 14 are housed, for whole stove to be fixed on the platform 1 on outer surface.Upper flange is provided with seal groove, for cylinder
With the sealed connection of upper cover 11.
Upper cover 11 contains cooling jacket, and water flows from bottom to top along cooling jacket.Activator crystallizer is housed in upper cover 11,
For to activator steam forced crystallization, three boom hoistings 10 being equipped with 11 outer surface of upper cover, for slinging or putting down upper cover
11.Lower cover 15 is similar with 11 structure of upper cover, and difference is that a centre bore, the inlet and outlet as product are arranged at 15 bottom of lower cover.
As shown in figure 4, the attemperator 7 is by upper end insulating layer 16, guide blot 17, intermediate insulating layer 18, fixation
Frame 19 and lower end insulating layer 20 form.Fixed frame 19 is metal framework structure, its inside is equipped with what is be made of the hard felt of graphite
Insulating layer, top are retainer rings, and three bearings for being used to install fixed frame are welded with ring.Heat guard on top opens circular hole, uses
In the installation of steam lead.Steam lead lower end uses bell-mouthed form, for farthest catching from activation agent container
The activator steam emerged in 28, and they are directed in the crystallizer of stove upper cover.In order to reduce from activation agent container
The activator vapor (steam) temperature come, jet chimney inside extend discharge course to reduce temperature using the staggered mode of partition plate.
Insulation construction uses monoblock type ring-type insulating layer made of the hard felt of graphite, and the upper and lower side of insulating layer is tabular, Gu
It is scheduled in 19 structure of metal framework, upper end insulating layer 16 is provided with circular hole, the installation for activator steam accumulator.Lower end is kept the temperature
Layer 20 is provided with step circular hole, for being docked with 4 insulating layer of activator device, ensures in main heating zone and activator device 4
Activator Heating Zone Temperature independent control, does not influence each other.
As shown in Figure 5, Figure 6, heating element 8 by nut 21, connects fixing device 22, exhausted using three-phase heater
Five parts such as edge connecting plate 23, carbon-carbon composite plate 24 and lower fixing device 25 form, carbon-carbon composite plate
24 are connected by delta connection mode, preferably select Germany's Xi Geli carbon-carbon composites, and elevated temperature strength is high, and electrical parameter is stablized.
Special-shaped block draws three-way power conducting wire made of the graphite material of upper end, and special-shaped block outer layer is cased with corundum set, for being filled in insulation
Put and heating element 8 is fixed on 7.
As shown in figure 8, lifting gear 3 is used to product be loaded to and taken out furnace body 2, driven by motor, and can realize activation
Steady mobile, the slowly fitting about 4 of agent device, ensures that movement will not overtravel using proximity sensor.Lifting gear 3 is by housing
44th, sliding block 45, column 38, runner assembly 36, counterweight 39, hoist cable 51, installing plate 42, stent 50, translator gear reducer 48 and company
Relay part forms.Sliding block 45 can rotate around 38 positive and negative 90 ° of column and can at an arbitrary position stop and lock.Housing 44 is aluminium alloy
Frame structure, housing 44 is on sliding block 45, and sliding block 45 is on column 38.In order to which housing 44 is fixed on sliding block 45, use
One center element and spring bearing with holes are fixed on sliding block 45, and this structure can make the rotation of 90 ° of sliding block two sides, use machine
Tool locator is in 0 ° ,+90 °, -90 ° of three given positions positioning.
Sliding block 45 can be realized to be moved up and down along the rack of housing posts 38.Slow down on sliding block 45 equipped with worm and gear
Device, worm gear and decelerator worm axis connection, worm gear are located on an axis with gear, wheel and rack occlusion.Due to there is rack,
Sliding block is unable to axial rotation, and it is not in deviate to ensure up and down motion.Place on sliding block 45 and set on the tablet of activator housing 34
In respect of 3 springs, it is ensured that the flexible loading after being contacted with cylinder lower flange of 4 upper O-shape ring of activator device, 45 upper and lower ends of sliding block dress
Limit switches, prevent excessive compression furnace body 2.
Rack is housed along 38 axial cylindrical surface of column, is used for realization sliding block 45 and is moved along its axis with housing 44, column
For hollow shaft, inner space is used to install counterweight 39 to balance the weight of housing.
Runner assembly 36 is that counterweight 39 is connected with housing 44 by cable wire with pulley, and housing 44 is balanced during reaching movement
The effect of gravity.Runner assembly 36 mounted in the bushing of column top surface by forming, cored axis on the bearing of 2 on bushing, axis it is upper
Portion is equipped with the balancing pole of two pulleys of band, and cable wire connects counterweight 39 and housing 44 through pulley.
The activator device 4 by activator housing 34, activator heater 33, activation agent container 28, product box 26,
Insulating layer 27, terminal box 35 and connection fixing fitting composition, structure are shown in Fig. 7.
Activator housing 34 is by the cylinder with cooling jacket, the flat and method with seal groove for being docked with housing bottom
Orchid composition.Three screw rods and a spherical bearing are housed below activator housing 34, for activator device to be fixed on liter
On falling unit 3.34 material of activator housing is stainless steel, wherein equipped with heat guard and activator heater 33.Heat guard is used for
Activator heater is protected from the influence of stove primary heater 8, so can be with independent control activator evaporation rate.Activator
Housing 34 is used for the fixed activation agent container 28 in shell holder containing bearing, and when installation is fixed with 3 studs, and this structure can
, can also adjustment equipment height activator heater 33 and activation agent container 28 to be co-axially mounted.Heat guard is the hard felt of graphite
Composition, needs coating adhesive to finished surface, prevents scaling-off.
Three bearings are installed inside activator housing 34 to be used to activator heater 33 is installed, on activator heater 33
Equipped with activation agent container 28 and product box 26.Activator heating unit is by activator heater 28, activator housing 34 and insulation
Layer 27 forms.Activator heater 33 is the single-phase cylindrical heaters of 220V made of carbon-carbon material.
Activation agent container 28 is used to place activator, and material is graphite, and metal cylinder is installed on after being connected with jet chimney
On platform, platform is fixed on three bearings of activator housing 34.
Product box 26 includes two cylinder type parts, and part bottom surface band gate hole, flows into, there is platform on periphery for activator steam
Rank, the product box 26 for that will assemble are mounted in jet chimney flange.High-temperature vacuum bag oozes furnaceman when making, dress inside product box
Full silica flour, it would be desirable to which the part for coating high-temperaure coating is embedded in the silica flour of product box.
The platform 1 is used for the installation and maintenance of apparatus casing and corollary equipment, by walking surface, working stand, fence and
The stent composition of fixed platform, is around provided with high 50mm backplates, and walking surface core is provided with prismatic hole and is used to fix furnace body
2, and be provided with two holes and be used for 5 branch pipe of vacuum system by the way that in addition to apparatus casing, transformer is also secured on platform 1.
The vacuum system 5 uses oil-free vacuum system, by turbomolecular pump, lobe pump, mechanical forevacuum oil-less pump
And be made of the mechanical part that shut-off valve, sensor and conduit with bellows are formed, system limits vacuum is preferably up to 10-
4Pa.Sensor is divided into low vacuum sensor and high vacuum sensor, and low vacuum sensor is used for during working machine pump in furnace body 2
Vacuum state measurement, high vacuum sensor is used for vacuum state measurement when showing molecule pump work in furnace body 2, and safety valve is used
Pressure value when vacuum breaker is controlled in furnace body 2.
The water-cooling system is made of 13 road pipelines, for conveying cooling water to housing, electrode, crystallizer, molecular pump,
Using cooling tower circulating water system.It is used to monitor leaving water temperature and stream equipped with flowmeter and temperature sensor on per road water return pipeline
Measure and flow is adjusted according to monitoring result.
The pneumatic control system uses gas cylinder central gas supply, for the opening and closing of Air control valve in vacuum system, molecular pump
Purging, and the cooling in furnace body and vacuum breaker, nitrogen, argon gas are provided to equipment.Nitrogen system is used for Pneumatic valve in vacuum system
The opening and closing of door, the purging of molecular pump；Argon system is used for cooling and vacuum breaker in furnace body.The pipeline of argon system, which is equipped with, to be subtracted
Depressor, solenoid valve, safety valve and 0.3mm flow-limiting nozzles.The outlet pressure of pressure reducer is first adjusted to 1.2MPa during use, opens electromagnetism
Valve, gas enter burner hearth by flow-limiting nozzle, due to the effect of orifice restriction make by gas cooling so that fire box temperature decline,
Achieve the purpose that to accelerate burner hearth cooling.
The control system is the control axis of whole equipment.Mainly by industrial personal computer, touch-screen, humidostat, true
Sky meter, PLC and general electric current, voltage, power meter composition.Adopted for completing equipment temperature control, fire door lifting action and parameter
Collect function.
Activator is placed into activation agent container, workpiece and temperature thermocouple are placed into the product box for piling silicon grain
Interior, activation agent container is linked together with product box by graphite-pipe, that is, is formed activator and be passed through product box circuit.By thermometric heat
In thermocouple wire insertion product box, the thermocouple derivation mechanism then drawn with lifting gear is connected by wire connection terminal, at this moment work
Part installation has been completely finished complete.Start workpiece lifting device, it is moved to furnace body, being moved through for loading device is spacing automatic
Stop.Vacuum system is opened, burner hearth is vacuumized.Open product heating successively according to process curve and activator is heated to
It is required that temperature.Kept the temperature, it is desirable to which product cylinder and the insulation of activator cylinder are in different humidity provinces.After heating, argon is opened
Gas inflation system, makes rapid drop in temperature and fast lifting pressure in burner hearth, when temperature is down to assigned temperature, opens furnace body and puts
After air valve to normal pressure, opening lifting gear makes workpiece remove outside stove, completes product whole siliconising process.
The embodiment of the present invention as shown in Figure 1 is by furnace body, activator device, lifting gear, platform, vacuum system, water cooling
System, control system, pneumatic control system composition.
1. furnace body
Furnace body with lower component by being formed：Housing, upper and lower covers, primary heater and attemperator.
Housing is made of stainless steel cylinder, and both ends of the surface are flange arrangement, for being connected with upper and lower covers.Shell wall has cooling to press from both sides
Set, cooling water is bottom in and top out form.Side is equipped with the right-angle elbow pipe with cooling jacket, for connecting vacuum system.On housing
Equipped with 3 band cooling electrodes, for the heating installation power supply in housing.3 bearings are housed on the outer surface, for by whole stove
Son is fixed on maintenance platform, and upper flange is provided with seal groove, the sealed connection for cylinder and upper cover.
On be stamped cooling jacket, water flows from bottom to top along cooling jacket.NaCl crystallizers are housed on upper cover upper flange, are used
In to NaCl steam forced crystallizations, 3 boom hoistings are housed on upper exterior surface, for slinging or putting down flange.
Lower cover is similar with superstructure, and difference is that have a centre bore, the inlet and outlet as product.
Primary heater is three-phase heater, is made of 24 circumferential carbon-to-carbon strip.Plate is connect by triangle
Line mode connects, the heater board selection Germany Xi Geli carbon/carbon compound materials, and elevated temperature strength is high, and electrical parameter is stablized.Upper end
Special-shaped block draws three-way power conducting wire made of graphite material, and special-shaped block outer layer is cased with corundum set, in heat-proof device
Fixed primary heater.
Attemperator includes：Fixed frame, heat guard, steam lead (band heat insulation lid) and bearing.
Fixed frame is metal framework structure, its inside is equipped with the insulating layer being made of the hard felt of graphite, and top is retainer ring,
3 bearings for being used to install fixed frame are welded with ring.Heat guard on top opens circular hole, the installation for steam lead.
Jet chimney is used to catch the NaCl steam emerged from activation agent container, and they are directed to the knot of stove upper cover
In brilliant device.In order to reduce the NaCl vapor (steam) temperatures come out from activation agent container, use partition plate staggered inside jet chimney
Mode extends discharge course to reduce temperature.
The operating mode that the furnace superintendent phase is operated in 1300 DEG C, while product box and activation two area's independence warm area of agent container are oozed according to bag
Feature.
When designing device structure, because calandria is the core element of whole equipment, heating is fully taken into account first
Taken in body running situation and equipment using space, product box area using side annulus global formation with upper end, lower end step
The liner body form connect, has obstructed more influence of the multiple hearth heat to outer layer furnace wall, has improved its fastness.Activator container area according to
Its design feature, main body furnace lining are integrally formed using side and bottom, reduce the hot gap of leakage, are overlapped with top furnace lining using side set
Form, improves heat insulation effect.
To realize product box and activating two area's independence warm area of agent container, there are jet chimney in main heating zone, heat in structure
Amount is transmitted to activator area from duct wall, and it is independent to destroy both warm areas.By theoretical calculation, increase in design in jet chimney outer wall
Add cylinder graphite felt, completely cut off heat, while two soak zones intersections design annulus graphite felt, prevent two area's heats directly to stove
The selection that wall forms impact wherein liner body thickness plays heating, cooling most important effect, and decision device economic indicator
One of key factor.Space is used according to equipment, determines that thickness is 70mm at active section in design, equivalent to fire clay
The thickness of one piece of standard refractory brick of tile product, but its heat preservation and insulation is equivalent to 3 times of one layer of standard brick.In both ends nonclient area
Domain, selection thickness are 50mm, reduce influence of the leakage heat to metal shell.Meanwhile to improve overall liner body intensity, in length direction
Upper segmentation, which is uniformly distributed along the circumference, is fixed liner body and frame with graphite rope.
Meanwhile all furnace lining inner walls paste one layer of carbon carbon composite plate, have both played metallic insulation screen, reduce
Thermal loss, and anti-airflow scouring performance is improved, the airflow scouring of 80~90m/s can be especially born at high temperature, this
Performance is that other refractory fibres are unable to reach.
2. activator device
Activator device is made of following primary clustering：Activator housing, heating unit, activates agent container and product box,
Structure is shown in Fig. 7.Component and heat guard equipped with connection thermocouple (6) in the present apparatus, protection activator heater is from stove
The influence of primary heater, so can be with independent control activator evaporation rate.
Activator housing is by the cylinder with cooling jacket, the flat and flange with seal groove for being docked with housing bottom
Composition.3 screw rods and spherical bearing are housed below housing, for activator device to be fixed on lifting gear.
Enclosure interior is used to install activator heater equipped with 3 bearings, and activation agent container and product are housed on heater
Case.Heating unit is made of activator heater, housing and heat guard.Activator heater 220V made of carbon-carbon material
Single-phase cylindrical heater.Case material is stainless steel, wherein equipped with heat guard and heater.Housing has bearing to be used in housing branch
Fixed activation agent container on frame.Fixed during installation with 3 studs, this structure can be coaxial by heating unit and activator glass holder
Installation, can also adjustment equipment height.Heat guard is the hard felt composition of graphite, needs coating adhesive to finished surface, prevents scaling-off.
Activation agent container is used to fill activator NaCl, and material is graphite, and metal cylinder is installed on after being connected with jet chimney
On platform, platform is fixed on 3 bearings of activator housing.
Product box includes 2 tube-type parts, and part bottom surface band gate hole, flows into, there is step on periphery, is used for for NaCl steam
By the product box assembled on jet chimney flange.
3. lifting gear
Lifting gear is used to product be loaded to and taken out furnace body.Sliding block can rotate around column ± 90 ° and can be at an arbitrary position
Stop and lock.
Lifting gear is made of following component：Housing, sliding block, column, runner assembly, counterweight.
Housing is frame structure of aluminum alloy, mitigates the load-bearing of cantilever, and housing is on sliding block, and sliding block is on column.For
Housing is fixed on sliding block with a center element and spring bearing with holes, is fixed at bearing fit on sliding block.This
Kind structure can make the rotation of 90 ° of sliding block two sides, and with mechanical positioners at 0 ° ,+90 °, -90 ° of three given positions position.
Sliding block can be realized to be moved up and down along the rack on housing posts.Worm type of reduction gearing, snail are housed on sliding block
Wheel and decelerator worm axis connection, worm gear are located on an axis with gear, wheel and rack occlusion.Due to having rack, sliding block
Axial rotation is unable to, it is not in deviate to ensure up and down motion.Placed on sliding block and be designed with 3 bullets on the tablet of activator housing
Spring, it is ensured that activator device upper O-shape ring is flexible after being contacted with cylinder lower flange to be loaded, and sliding block upper and lower ends are equipped with limit switch,
Prevent excessive compression furnace body.
Rack is housed along column axial cylindrical surface, is used for realization sliding block band housing and moves along its axis, column is hollow
Axis, inner space are used to install counterweight to balance the weight of housing.
Runner assembly is that counterweight is connected with housing by cable wire with pulley, the work of balance shell weight power during reaching movement
With.Runner assembly mounted in the bushing of column top surface by forming, cored axis on the bearing of 2 on bushing, and the top of axis is equipped with band two
The balancing pole of a pulley, cable wire connect counterweight and housing through pulley.
4. platform
Platform is used for the installation and maintenance of apparatus casing and corollary equipment.Platform is away from ground level 2324mm.Platform is by walking
Face, working stand, fence, the stent of 5 fixed platforms form.High 50mm backplates are installed, in walking surface around platform and ladder
Center portion point has a prismatic hole to be used to fix stove, and is designed with 2 holes and passes through for vacuum system branch pipe.In addition to apparatus casing,
Transformer is also secured on platform.
5. vacuum system
Vacuum system is traditional oil-free vacuum system.By turbomolecular pump (TURBOVAC MAG W 3200), lobe pump
(WAU251T) formed with mechanical forevacuum oil-less pump (SCROLLVAC SC 60D).Shut-off valve, sensor and leading with bellows
Pipe forms mechanical part.Sensor is divided into low vacuum sensor and high vacuum sensor, and low vacuum sensor is used for mechanical dry pump
Vacuum state measurement during work in furnace body, vacuum state when high vacuum sensor is used to show molecule pump work in furnace body are surveyed
Amount, pressure value when safety valve is used to control vacuum breaker in furnace body, all vacuum units select Lai Bao companies.Design vacuum system
Principle be system vacuum an order of magnitude higher than working vacuum degree, since the vacuum of equipment requirement is 1.33x10-
2Pa, i.e. 10-3Pa can be met the requirements, and the system limits vacuum is up to 10-4Pa, it is sufficient to meets the vacuum requirement of equipment.
6. control system
Control system is by master control system, heating control system, thermocouple temperature measurement system, fire door control system, vacuum control
System processed, water route monitor control system composition.
The control centre of master control system uses Omron PLC -- CJ1M, respectively with grinding the board-like industrial personal computer of Warburg Pincus and ohm
Imperial touch-screen completes information exchange using R232 communication modes.Flat industrial personal computer is mainly realized：According to operating mode and technological process
Each main technologic parameters of real-time display, such as temperature, heated current and power；React each equipment operation condition；Temperature control curve
Set and pass down setting, preservation and calling that picture is used for completing process curve；Real-time and history curve detection inquiry；Each number
Stored and printed according to history report, and to generation record data；To the needs such as overtemperature, overcurrent, short circuit alarm variable into
Row record Omron touch-screen is mainly realized：The switch of each motor, valve；The working condition of siliconising stove is monitored in real time；
The setting of system debug state；Display alarm condition directly perceived.
Heating system is divided into product heating and activator heats two parts, is respectively single control loop, the mutual not shadow of heating
Ring.This TV station stove is single area temperature control, using thermocouple temperature control, day island proper electricity FP23 high-performance adjusting apparatus control, Ying Jiegong
Sigong rate switch board Power Regulation (soft start), Yixing transformer transformation (change for being directed to Elema resistance value in heating process).This is matched somebody with somebody
Continuous voltage regulating can be met by putting, and can meet the requirement that heater aging voltage rises.
Using the design of fuzzy control PID temperature control system, according to technological requirement, equipment needs to meet with per hour
200 DEG C at the uniform velocity heat up, and uniform temperature is not more than ± 5 DEG C, and temperature-controlled precision is not more than ± 1 DEG C, this proposes temperature control higher
It is required that.Simultaneously as siliconising process is a physical and chemical reaction process, there are non-linear, hysteresis, random disturbances, to build
It is extremely difficult to found its mathematic model for optimal control.Traditional PID is difficult to obtain satisfaction when controlling non-linear stronger object
Control effect, and the solicitation for subscriptions of parameter generally requires veteran engineers and technicians to complete, i.e., it is time-consuming and laborious.For
This, we control its heating process using PID fuzzy control technologies, so as to effectively adjust the temperature of workspace.
Since FP23 not only has outstanding algorithm model, but also there is self-setting function, while Power Control cabinet is also
Intelligent control unit, the switch board not only with usual switch board with general parameter display control and defencive function, also may be used
Remote control, also has LZ control (first phase-shift voltage regulating, rear zero-crossing power adjustment) characteristics, so that temperature control reaches preferable knot
Fruit.
Thermocouple temperature measurement system totally 8 drive test amount, cavity temperature (the double branch armoured thermocouples of c-type), 1 tunnel are control in order to control on 1 tunnel
Activator chamber temperature processed (the double branch armoured thermocouples of K-type), 4 tunnels are measurement product temperature (S types thermocouple), 2 drive test amount activators
Temperature (K-type thermocouple).
Lifting device system realizes that activator device is steadily moved, is slowly bonded up and down, ensures to move using proximity sensor
Moving will not overtravel.
Vacuum-control(led) system control turbomolecular pump, lobe pump and the chain work of mechanical oil-less pump, and it is connected with nitrogen guarantee
Sky is broken in molecular pump cleaning inside and termination of pumping.
Water route monitor control system is responsible for the temperature of all cooling water channels and the dual monitoring of flow, and records number in real time
According to.
7. water-cooling system
It is made of 13 road pipelines, for cold to housing chuck, upper and lower covers chuck, electrode, crystallizer, the conveying of activator housing
But water, using cooling tower circulating water system, cooling water flow 4m3/h.Flowmeter and temperature sensing are housed on per road water return pipeline
Device is used to monitor leaving water temperature and flow and adjusts flow according to monitoring result.
8. pneumatic control system
Nitrogen, argon gas are provided to equipment.Wherein nitrogen system is used for the opening and closing of Air control valve in vacuum system, molecular pump
Purging, argon system are used for cooling and vacuum breaker in furnace body.The pipeline of argon system is equipped with pressure reducer, solenoid valve, safety
Valve, 0.3mm flow-limiting nozzles.The outlet pressure of pressure reducer is first adjusted to 1.2MPa during use, opens solenoid valve, gas passes through flow-limiting nozzle
Into burner hearth, since the effect of orifice restriction makes by gas cooling so that fire box temperature decline, reaches and accelerate burner hearth cooling
Purpose.
Claims (7)
1. a kind of vertical high-temperature vacuum packet oozes stove, including furnace body, insulating layer, heating element, activator device and vacuum system, its
It is characterized in that：The furnace body is the hollow circuit cylinder placed vertically, and both ends are closed by upper cover and lower cover respectively；The furnace body
Inner wall lays insulating layer, and hot-zone is formed in insulating layer；The heating element is installed in hot-zone；The vacuum system and stove
Body connects；The activator device is installed on lifting gear, below the furnace body, can pass through the through hole of furnace body lower cover into
Enter in furnace body；In the activator device, activator is placed in activation agent container, and independent heating is provided with outside activation agent container
Device, workpiece to be processed are placed in the product box of filling silicon grain, and activation agent container is connected with product box by graphite-pipe.
2. vertical high-temperature vacuum packet according to claim 1 oozes stove, it is characterised in that：Explosion is installed on the furnace body
Diaphragm safety valve and pressure sensor, furnace body shell wall, upper cover and lower cover are made of stainless steel, and have a cooling jacket, under cooling water into
On go out.
3. vertical high-temperature vacuum packet according to claim 1 oozes stove, it is characterised in that：The upper cover perforate installation connection
The steam lead of activator crystallizer, collects activator steam and forced crystallization.
4. vertical high-temperature vacuum packet according to claim 1 oozes stove, it is characterised in that：The steam lead lower end uses
Horn mouth form, jet chimney inside extend the discharge course of activator steam using the staggered mode of partition plate.
5. vertical high-temperature vacuum packet according to claim 1 oozes stove, it is characterised in that：The insulating layer is hard using graphite
Felt into.
6. vertical high-temperature vacuum packet according to claim 1 oozes stove, it is characterised in that：The heating element uses three-phase
Heater.
7. vertical high-temperature vacuum packet according to claim 1 oozes stove, it is characterised in that：The lifting gear includes sliding
Block, column, counterweight, hoist cable and stent；The sliding block is moved up and down by turbine and worm retarder along the rack of column side wall；
The column upper end installation fixed pulley, by being connected around the hoist cable of fixed pulley between sliding block and breeding；The stent leads to
Spring bearing is crossed on sliding block so that stent can be rotated around column；The activator device is pacified by some springs
It is attached on stent；The upper and lower ends installation limit switches of the sliding block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711161842.5A CN107955931A (en) | 2017-11-21 | 2017-11-21 | Vertical high-temperature vacuum packet oozes stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711161842.5A CN107955931A (en) | 2017-11-21 | 2017-11-21 | Vertical high-temperature vacuum packet oozes stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107955931A true CN107955931A (en) | 2018-04-24 |
Family
ID=61965012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711161842.5A Pending CN107955931A (en) | 2017-11-21 | 2017-11-21 | Vertical high-temperature vacuum packet oozes stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107955931A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113399663A (en) * | 2021-05-11 | 2021-09-17 | 滁州华海中谊工业炉有限公司 | Activating agent heating system for vacuum high-temperature sintering furnace |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105780000A (en) * | 2016-05-10 | 2016-07-20 | 航天材料及工艺研究所 | Preparation method for engine combustion chamber and combustion chamber surface composite silicide coating |
| CN107178998A (en) * | 2017-06-06 | 2017-09-19 | 中南大学 | Vacuum atmosphere oven |
-
2017
- 2017-11-21 CN CN201711161842.5A patent/CN107955931A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105780000A (en) * | 2016-05-10 | 2016-07-20 | 航天材料及工艺研究所 | Preparation method for engine combustion chamber and combustion chamber surface composite silicide coating |
| CN107178998A (en) * | 2017-06-06 | 2017-09-19 | 中南大学 | Vacuum atmosphere oven |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113399663A (en) * | 2021-05-11 | 2021-09-17 | 滁州华海中谊工业炉有限公司 | Activating agent heating system for vacuum high-temperature sintering furnace |
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