CN107945170A - One kind judges the linear non-uniform method and device of processing procedure - Google Patents
One kind judges the linear non-uniform method and device of processing procedure Download PDFInfo
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- CN107945170A CN107945170A CN201711261274.6A CN201711261274A CN107945170A CN 107945170 A CN107945170 A CN 107945170A CN 201711261274 A CN201711261274 A CN 201711261274A CN 107945170 A CN107945170 A CN 107945170A
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- uniform areas
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- processing procedure
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0008—Industrial image inspection checking presence/absence
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Abstract
The embodiment of the invention discloses one kind to judge the linear non-uniform method and device of processing procedure, the described method includes：Obtain the image of detection object；The non-uniform areas of the detection object is identified based on described image；According to the linear deflection angle described in default detection direction calculating on non-uniform areas specific direction；The non-uniform areas on the specific direction is filtered out based on the linear deflection angle and setting filter sizes；Uneven judgement is carried out to the non-uniform areas not filtered out.A kind of linear non-uniform method of processing procedure of judgement provided in an embodiment of the present invention, improves the accuracy of the uneven judgement of linear processing procedure.
Description
Technical field
The present embodiments relate to semiconductor detection technique field, more particularly to a kind of linear non-uniform side of processing procedure of judgement
Method and device.
Background technology
In semicon industry, in panel processing procedure, the panel such as AMOLED (Active Matrix Organic
Light Emitting Diode, active matrix organic light-emitting diode) or TFT (Thin Film Transistor, film
Transistor), the uneven detection of linear processing procedure is an important link, and described linear processing procedure is uneven can specifically refer to
Display panel brightness irregularities or panel have the phenomenon of various traces.
The uneven detection of linear processing procedure at present is mainly visually detected by human eye, this detection mode subjectivity
By force, judge by accident, risk of failing to judge height, and efficiency is low, it is even more impossible to quantify the phenomenon seen.Or examined by automatic optical checking machine
Survey, but by way of automatic optical checking machine is detected can because optical noise disturb and caused by detect failure.
The content of the invention
An embodiment of the present invention provides one kind to judge the linear non-uniform method and device of processing procedure, improves linear processing procedure not
The accuracy uniformly judged.
In a first aspect, an embodiment of the present invention provides one kind to judge the linear non-uniform method of processing procedure, the described method includes：
Obtain the image of detection object；
The non-uniform areas of the detection object is identified based on described image；
According to the linear deflection angle described in default detection direction calculating on non-uniform areas specific direction；
The non-uniform areas on the specific direction is filtered based on the linear deflection angle and setting filter sizes
Fall；
Uneven judgement is carried out to the non-uniform areas not filtered out.
Further, the non-uniform areas that the detection object is identified based on described image, including：
Binary conversion treatment is carried out to described image；
The ratio of black pixel point quantity and white pixel point quantity in statistics setting area；
By by the non-uniform areas of the ratio definite described image compared with threshold value.
Further, the basis presets the linear deflection angle on non-uniform areas specific direction described in detection direction calculating
Degree, including：
One straight line along the specific direction is determined from the non-uniform areas according to default detection direction；
Calculate the angle between the straight line and the default detection direction；
Using the angle as the linear deflection angle on the non-uniform areas specific direction.
Further, the default detection direction includes X-direction and Y-direction；
When the default detection direction is X-direction, the specific direction is Y-direction；
When the default detection direction is Y-direction, the specific direction is X-direction.
Further, the non-uniform areas to not filtering out carries out uneven judgement, including：
The ratio of black pixel point quantity and white pixel point quantity in the non-uniform areas not filtered out described in statistics；
Uneven judgement is carried out according to the ratio.
Further, the method further includes：
Processing procedure is carried out according to the uneven judgement result of the non-uniform areas not filtered out extremely to judge.
Second aspect, the embodiment of the present invention additionally provide a kind of linear non-uniform device of processing procedure of judgement, described device bag
Include：
Acquisition module, for obtaining the image of detection object；
Identification module, for identifying the non-uniform areas of the detection object based on described image；
Computing module, for the linear deflection angle according to default detection direction calculating on non-uniform areas specific direction
Degree；
Filtering module, for based on the linear deflection angle and setting filter sizes by the specific direction not
Homogeneous area filters out；
Determination module, for carrying out uneven judgement to the non-uniform areas not filtered out.
Further, the identification module includes：
Processing unit, for carrying out binary conversion treatment to described image；
Statistic unit, for counting the ratio of black pixel point quantity and white pixel point quantity in setting area；
Recognition unit, for by by the non-uniform areas of the ratio definite described image compared with threshold value.
Further, the computing module includes：
Determination unit, for determining one from the non-uniform areas along the specific direction according to default detection direction
Straight line；
Computing unit, for calculating the angle between the straight line and the default detection direction, and the angle is made
For the linear deflection angle on the non-uniform areas specific direction.
Further, the default detection direction includes X-direction and Y-direction；
When the default detection direction is X-direction, the specific direction is Y-direction；
When the default detection direction is Y-direction, the specific direction is X-direction；
Described device further includes：
Processing procedure exception judgment module, the uneven judgement result of the non-uniform areas for not filtered out according to carry out
Processing procedure judges extremely.
A kind of linear non-uniform method of processing procedure of judgement provided in an embodiment of the present invention, by the figure for obtaining detection object
Picture；The non-uniform areas of the detection object is identified based on described image；According to uneven area described in default detection direction calculating
Linear deflection angle on the specific direction of domain；Based on the linear deflection angle and filter sizes are set by the specific direction
On non-uniform areas filter out, the technological means of uneven judgement is carried out to the non-uniform areas that does not filter out, improves line
The accuracy of the property uneven judgement of processing procedure.
Brief description of the drawings
Fig. 1 is that one kind that the embodiment of the present invention one provides judges the linear non-uniform method flow schematic diagram of processing procedure；
Fig. 2 is that one kind that the embodiment of the present invention one provides is based on linear deflection angle and setting filter sizes determine to filter
The configuration shows schematic diagram in region；
Fig. 3 is a kind of linear non-uniform method flow schematic diagram of processing procedure of judgement provided by Embodiment 2 of the present invention；
Fig. 4 is that one kind that the embodiment of the present invention three provides judges the linear non-uniform apparatus structure schematic diagram of processing procedure.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention, rather than limitation of the invention.It also should be noted that in order to just
It illustrate only part related to the present invention rather than entire infrastructure in description, attached drawing.
It should be mentioned that some exemplary embodiments are described as before exemplary embodiment is discussed in greater detail
The processing described as flow chart or method.Although every step is described as the processing of order by flow chart, therein to be permitted
Multi-step can be implemented concurrently, concomitantly or at the same time.In addition, the order of every step can be rearranged.When it
The processing can be terminated when step is completed, it is also possible to the additional step being not included in attached drawing.The processing
It can correspond to method, function, code, subroutine, subprogram etc..
Embodiment one
Fig. 1 is that one kind that the embodiment of the present invention one provides judges the linear non-uniform method flow schematic diagram of processing procedure, the party
Method is applicable to the situation about being judged uneven to linear processing procedure in the processing procedure of semiconductor display panel, and this method can be by
Judge that the non-uniform device of linear processing procedure performs, described device can be realized by way of software and/or hardware.Referring specifically to
Shown in Fig. 1, this method specifically comprises the following steps：
Step 110, the image for obtaining detection object.
Wherein, the detection object can be display panel, such as AMOLED or TFT.Obtain the image of detection object
Lasting scanning can be carried out to detection object by CCD (Charge Coupled Device, charge coupling device) cameras to obtain
, it is assumed for example that detection object AMOLED, AMOLED keep fixed position motionless, and CCD camera at an appropriate angle and is kept
Certain translational speed carries out AMOLED to continue shooting, obtains multiple images；The angle and translational speed are to shoot
Image definition is adjusted on the basis of meeting the requirements.
Step 120, the non-uniform areas based on the described image identification detection object.
Specifically, identifying the non-uniform areas of the detection object can be carried by carrying out feature to the image of detection object
Take, the non-uniform areas of the detection object is further identified by the feature of extraction；Or by described image and standard picture
It is compared, is considered as non-uniform areas with the different region of standard picture, the standard picture comes with described image
From the detection object of same specification, non-uniform areas is not present in the corresponding detection object of the standard picture.Figure can also be passed through
The signal-to-noise ratio identification non-uniform areas of picture, or first by carrying out binary conversion treatment to described image, then by counting black
The ratio of color pixel point quantity and white pixel point quantity goes the non-uniform areas of recognition detection object, specifically may refer to implement
Described in example two.
Step 130, the linear deflection angle according to default detection direction calculating on non-uniform areas specific direction.
Wherein, the default detection direction includes X-direction and Y-direction；
When the default detection direction is X-direction, the specific direction is Y-direction；
When the default detection direction is Y-direction, the specific direction is X-direction.
Exemplarily, the linear deflection angle according to default detection direction calculating on non-uniform areas specific direction,
Including：
One straight line along the specific direction is determined from the non-uniform areas according to default detection direction；
Calculate the angle between the straight line and the default detection direction；
Using the angle as the linear deflection angle on the non-uniform areas specific direction.
Assuming that the default detection direction is X-direction, then the specific direction is Y-direction, specifically be may refer to shown in Fig. 2
The configuration shows schematic diagram of filtration zone is determined based on linear deflection angle and setting filter sizes.It is described to determine an edge
The straight line of specific direction can be realized by way of looking for black pixel point.The filter sizes can be set by staff
It is fixed.
Step 140, based on the linear deflection angle and setting filter sizes will be uneven on the specific direction
Area filter falls.
It is in order to avoid transverse direction (X-direction) and longitudinal direction (Y by the purpose that the non-uniform areas on the specific direction filters out
Direction) linear uneven mix and cause erroneous judgement situation, by the way that non-uniform areas on a direction is filtered out, carry
The high accuracy that uneven judgement is carried out to remaining non-uniform areas.
Meanwhile in manufacture of semiconductor field, a finished product is usually required by many technical process, for example, etching or
ELA (Excimer Laser Annealing, quasi-molecule laser annealing), each technical process may be to products in which side
Uneven influence is produced upwards, and related technical personnel are anticipated that.Therefore, by by non-uniform areas mistake on specific direction
Filter, the uneven judgement result according to the remaining region not filtered out, which can trace and differentiate specifically which processing procedure, to be produced
Exception, while before can also avoiding linear uneven erroneous judgement caused by processing procedure or non-supervised processing procedure situation, and then reduce
Inspection difficulty is blocked caused by the linear uneven influence of preceding processing procedure or non-supervised processing procedure.The preceding processing procedure refers specifically to linearly be made
The manufacturing process that product had been subjected to during journey uneven judgement, such as complete a finished product and need altogether by technique 1- techniques 2-
Technique 3, three technical process, uneven judgement is carried out when having carried out technique 2 to product, then the preceding processing procedure refers specifically to technique
1 and technique 2.It is scanned to the processing procedures of next manufacturing process without crucial effect, such as CCD that the non-supervised processing procedure refers to some
The optical noise produced in journey, also has embodiment on the image of its acquisition, causes on image that there are different beyond procedure for producing
Often, caused by such abnormal and nonproductive, and technologic influence will not be caused on next procedure for producing, and need not supervised
Control, is also not intended to appear on scan image.In another example panel is after multiple tracks processing procedure, it is understood that there may be two kinds of exceptions of A and B, but
It is that only exception B can have an impact next processing procedure, the processing procedure for causing abnormal A at this time is also non-supervised processing procedure.
Step 150, carry out uneven judgement to the non-uniform areas not filtered out.
The method that uneven judgement is carried out to the non-uniform areas not filtered out may refer to the explanation of step 120,
Meanwhile a kind of specific implementation is also given in embodiment two.
A kind of linear non-uniform method of processing procedure of judgement provided in this embodiment, passes through according to default detection direction calculating institute
The linear deflection angle on non-uniform areas specific direction is stated, and the linear deflection angle and setting filter sizes will be based on
Non-uniform areas on the specific direction is filtered out, uneven judgement finally is carried out to the non-uniform areas not filtered out,
Avoid linear uneven mix of transverse direction (X-direction) and longitudinal direction (Y-direction) and cause the situation of erroneous judgement, improve at the same time
The accuracy of uneven judgement is carried out to remaining non-uniform areas, and is sentenced according to remaining the uneven of the region not filtered out
The exception that specifically which processing procedure produces can be traced and differentiate by determining result, while is also achieved and avoided preceding processing procedure or non-supervised
The situation of linear uneven erroneous judgement caused by processing procedure, the linear uneven influence for thereby reducing preceding processing procedure or non-supervised processing procedure are made
Into block inspection difficulty.
Further, the method further includes on the basis of above-described embodiment technical solution：
Processing procedure is carried out according to the uneven judgement result of the non-uniform areas not filtered out extremely to judge.
Embodiment two
Fig. 3 is a kind of linear non-uniform method flow schematic diagram of processing procedure of judgement provided by Embodiment 2 of the present invention, in reality
On the basis of applying example one, the present embodiment is to " step 120, the uneven area that the detection object is identified based on described image
Domain " has carried out further optimization, and the benefit of optimization is can relatively accurately to identify the non-uniform areas of the detection object.Tool
Body is shown in Figure 3, and this method specifically includes as follows：
Step 310, the image for obtaining detection object.
Step 320, carry out binary conversion treatment to described image.
The ratio of black pixel point quantity and white pixel point quantity in step 330, statistics setting area.
Wherein, the setting area is intercepted successively from the image of detection object.Assuming that linear homogeneous state is divided into
It is 1/1 to determine the ratio of black pixel point quantity and white pixel point quantity in area, is 2/3 by counting obtained ratio, then
The surface area currently set can be drawn as non-uniform areas.
Step 340, by by the non-uniform areas of the ratio definite described image compared with threshold value.
Wherein, the threshold value is that black pixel point quantity and white pixel point quantity in area are set under linear homogeneous state
Ratio.
Step 350, the linear deflection angle according to default detection direction calculating on non-uniform areas specific direction.
Step 360, based on the linear deflection angle and setting filter sizes will be uneven on the specific direction
Area filter falls.
Step 370, carry out uneven judgement to the non-uniform areas not filtered out.
Exemplarily, the non-uniform areas to not filtering out carries out uneven judgement, including：
The ratio of black pixel point quantity and white pixel point quantity in the non-uniform areas not filtered out described in statistics；
Uneven judgement is carried out according to the ratio.
It is provided in this embodiment it is a kind of judge the linear non-uniform method of processing procedure, on the basis of embodiment one, based on
During described image identifies the non-uniform areas of the detection object, first by being carried out to described image at binaryzation
Reason, then in statistics setting area black pixel point quantity and white pixel point quantity ratio, by by the ratio and threshold
Value is compared the non-uniform areas of definite described image, realizes the uneven area for relatively accurately identifying the detection object
The purpose in domain.
Embodiment three
Fig. 4 is that one kind that the embodiment of the present invention three provides judges the linear non-uniform apparatus structure schematic diagram of processing procedure, described
Device includes：Acquisition module 410, identification module 420, computing module 430, filtering module 440 and determination module 450；
Wherein, acquisition module 410, for obtaining the image of detection object；Identification module 420, for based on described image
Identify the non-uniform areas of the detection object；Computing module 430, for the uneven area according to default detection direction calculating
Linear deflection angle on the specific direction of domain；Filtering module 440, for based on the linear deflection angle and setting filtering ruler
The very little non-uniform areas by the specific direction filters out；Determination module 450, for the non-uniform areas to not filtering out into
The uneven judgement of row.
Further, identification module 420 includes：
Processing unit, for carrying out binary conversion treatment to described image；
Statistic unit, for counting the ratio of black pixel point quantity and white pixel point quantity in setting area；
Recognition unit, for by by the non-uniform areas of the ratio definite described image compared with threshold value.
Further, computing module 430 includes：
Determination unit, for determining one from the non-uniform areas along the specific direction according to default detection direction
Straight line；
Computing unit, for calculating the angle between the straight line and the default detection direction, and the angle is made
For the linear deflection angle on the non-uniform areas specific direction.
Further, the default detection direction includes X-direction and Y-direction；
When the default detection direction is X-direction, the specific direction is Y-direction；
When the default detection direction is Y-direction, the specific direction is X-direction；
Described device further includes：
Processing procedure exception judgment module, the uneven judgement result of the non-uniform areas for not filtered out according to carry out
Processing procedure judges extremely.
A kind of linear non-uniform device of processing procedure of judgement provided in this embodiment, passes through according to default detection direction calculating institute
The linear deflection angle on non-uniform areas specific direction is stated, and the linear deflection angle and setting filter sizes will be based on
Non-uniform areas on the specific direction is filtered out, uneven judgement finally is carried out to the non-uniform areas not filtered out,
Avoid linear uneven mix of transverse direction (X-direction) and longitudinal direction (Y-direction) and cause the situation of erroneous judgement, improve at the same time
The accuracy of uneven judgement is carried out to remaining non-uniform areas, and is sentenced according to remaining the uneven of the region not filtered out
The exception that specifically which processing procedure produces can be traced and differentiate by determining result, while is also achieved and avoided preceding processing procedure or non-supervised
The situation of linear uneven erroneous judgement caused by processing procedure, the linear uneven influence for thereby reducing preceding processing procedure or non-supervised processing procedure are made
Into block inspection difficulty.
Above device can perform the method that any embodiment of the present invention is provided, and possess the corresponding function module of execution method
And beneficial effect.
It will be appreciated by those skilled in the art that realize that all or part of step in above-described embodiment method is to pass through
Program instructs relevant hardware to complete, and the program storage is in a storage medium, including some instructions are used so that one
A equipment (can be microcontroller, chip etc.) or processor (processor) perform each embodiment the method for the application
All or part of step.And foregoing storage medium includes：USB flash disk, mobile hard disk, read-only storage (ROM, Read-Only
Memory), random access memory (RAM, Random Access Memory), magnetic disc or CD etc. are various can store journey
The medium of sequence code.
Note that it above are only presently preferred embodiments of the present invention and institute's application technology principle.It will be appreciated by those skilled in the art that
The invention is not restricted to specific embodiment described here, can carry out for a person skilled in the art various obvious changes,
Readjust and substitute without departing from protection scope of the present invention.Therefore, although being carried out by above example to the present invention
It is described in further detail, but the present invention is not limited only to above example, without departing from the inventive concept, also
It can include other more equivalent embodiments, and the scope of the present invention is determined by scope of the appended claims.
Claims (10)
1. one kind judges the linear non-uniform method of processing procedure, it is characterised in that including：
Obtain the image of detection object；
The non-uniform areas of the detection object is identified based on described image；
According to the linear deflection angle described in default detection direction calculating on non-uniform areas specific direction；
The non-uniform areas on the specific direction is filtered out based on the linear deflection angle and setting filter sizes；
Uneven judgement is carried out to the non-uniform areas not filtered out.
2. according to the method described in claim 1, it is characterized in that, described identify the detection object not based on described image
Homogeneous area, including：
Binary conversion treatment is carried out to described image；
The ratio of black pixel point quantity and white pixel point quantity in statistics setting area；
By by the non-uniform areas of the ratio definite described image compared with threshold value.
3. method according to claim 1 or 2, it is characterised in that the basis is preset uneven described in detection direction calculating
Linear deflection angle on even region specific direction, including：
One straight line along the specific direction is determined from the non-uniform areas according to default detection direction；
Calculate the angle between the straight line and the default detection direction；
Using the angle as the linear deflection angle on the non-uniform areas specific direction.
4. method according to claim 1 or 2, it is characterised in that the default detection direction includes X-direction and Y-direction；
When the default detection direction is X-direction, the specific direction is Y-direction；
When the default detection direction is Y-direction, the specific direction is X-direction.
5. method according to claim 1 or 2, it is characterised in that the non-uniform areas to not filtering out carries out not
Uniformly judge, including：
The ratio of black pixel point quantity and white pixel point quantity in the non-uniform areas not filtered out described in statistics；
Uneven judgement is carried out according to the ratio.
6. method according to claim 1 or 2, it is characterised in that further include：
Processing procedure is carried out according to the uneven judgement result of the non-uniform areas not filtered out extremely to judge.
7. one kind judges the linear non-uniform device of processing procedure, it is characterised in that including：
Acquisition module, for obtaining the image of detection object；
Identification module, for identifying the non-uniform areas of the detection object based on described image；
Computing module, for the linear deflection angle according to default detection direction calculating on non-uniform areas specific direction；
Filtering module, for based on the linear deflection angle and setting filter sizes will be uneven on the specific direction
Area filter falls；
Determination module, for carrying out uneven judgement to the non-uniform areas not filtered out.
8. device according to claim 7, it is characterised in that the identification module includes：
Processing unit, for carrying out binary conversion treatment to described image；
Statistic unit, for counting the ratio of black pixel point quantity and white pixel point quantity in setting area；
Recognition unit, for by by the non-uniform areas of the ratio definite described image compared with threshold value.
9. the device according to claim 7 or 8, it is characterised in that the computing module includes：
Determination unit, for determining one from the non-uniform areas along the straight of the specific direction according to default detection direction
Line；
Computing unit, for calculating the angle between the straight line and the default detection direction, and using the angle as institute
State the linear deflection angle on non-uniform areas specific direction.
10. the device according to claim 7 or 8, it is characterised in that the default detection direction includes X-direction and Y side
To；
When the default detection direction is X-direction, the specific direction is Y-direction；
When the default detection direction is Y-direction, the specific direction is X-direction；
Described device further includes：
Processing procedure exception judgment module, the uneven judgement result of the non-uniform areas for not filtered out according to carry out processing procedure
It is abnormal to judge.
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| CN201711261274.6A CN107945170B (en) | 2017-12-04 | 2017-12-04 | Method and device for judging non-uniformity of linear process |
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| CN201711261274.6A CN107945170B (en) | 2017-12-04 | 2017-12-04 | Method and device for judging non-uniformity of linear process |
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| CN101082592A (en) * | 2006-06-01 | 2007-12-05 | 大日本网目版制造株式会社 | Uneven checking method and device and recording medium |
| JP4297574B2 (en) * | 1999-11-05 | 2009-07-15 | シャープ株式会社 | Liquid crystal display |
| CN104704822A (en) * | 2012-09-25 | 2015-06-10 | 宜客斯股份有限公司 | Image quality adjustment device, correction data generation method, and image quality adjustment technique utilizing same |
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2017
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4297574B2 (en) * | 1999-11-05 | 2009-07-15 | シャープ株式会社 | Liquid crystal display |
| JP2005017726A (en) * | 2003-06-26 | 2005-01-20 | Fuji Xerox Co Ltd | Optical switching element, as well as device using the same, optical writing type display medium, and display device |
| CN1758021A (en) * | 2004-10-08 | 2006-04-12 | 大日本网目版制造株式会社 | Device and method,and recording medium for checking gradation unequal |
| CN101082592A (en) * | 2006-06-01 | 2007-12-05 | 大日本网目版制造株式会社 | Uneven checking method and device and recording medium |
| CN104704822A (en) * | 2012-09-25 | 2015-06-10 | 宜客斯股份有限公司 | Image quality adjustment device, correction data generation method, and image quality adjustment technique utilizing same |
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| CN107945170B (en) | 2020-09-29 |
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