CN107941736A - Modulated optical absorption spectra gas-detecting device and method based on broadband IR source - Google Patents
Modulated optical absorption spectra gas-detecting device and method based on broadband IR source Download PDFInfo
- Publication number
- CN107941736A CN107941736A CN201711155676.8A CN201711155676A CN107941736A CN 107941736 A CN107941736 A CN 107941736A CN 201711155676 A CN201711155676 A CN 201711155676A CN 107941736 A CN107941736 A CN 107941736A
- Authority
- CN
- China
- Prior art keywords
- slit
- pzt
- module
- broadband
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000000862 absorption spectrum Methods 0.000 title claims abstract description 20
- 238000001228 spectrum Methods 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 239000000284 extract Substances 0.000 claims abstract description 7
- 238000012360 testing method Methods 0.000 claims description 28
- 239000006185 dispersion Substances 0.000 claims description 19
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 11
- 238000010521 absorption reaction Methods 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 10
- 238000010606 normalization Methods 0.000 claims description 10
- 102100027340 Slit homolog 2 protein Human genes 0.000 claims description 3
- 101710133576 Slit homolog 2 protein Proteins 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 230000011514 reflex Effects 0.000 claims description 3
- 238000010998 test method Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 5
- 238000012216 screening Methods 0.000 abstract description 4
- 238000004064 recycling Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 59
- 239000004065 semiconductor Substances 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 description 4
- 238000004566 IR spectroscopy Methods 0.000 description 2
- 238000004847 absorption spectroscopy Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention provides a kind of modulated optical absorption spectra gas-detecting device and method based on broadband IR source, device includes constant-current driven module, broadband IR source, the first convex lens, gas chamber, air inlet pipe, air outlet pipe, the second convex lens, pressure controller, air pump, grating module, PZT, PZT drive module, detector, lock-in amplifier, data collecting card, microcontroller.Broadband infrared optical signal after method absorbs gas using grating module carries out accurate light-splitting processing, outgoing optical signal is scanned using PZT at the same time/" screening " of modulation system handle and export detection, recycling lock-in amplifier extracts second harmonic signal and characterizes gas concentration.The auxiliary device and method tested and calibrated present invention also offers the normalized output spectrum of broadband IR source.The present invention provides novel solution to develop the low cost based on broadband IR source, high selectivity and highly sensitive modulated optical absorption spectra gas-detecting device.
Description
Technical field
The invention belongs to infrared gas detection technical field, is inhaled more particularly, to a kind of modulation based on broadband IR source
Receive spectroscopic gas detection device and method.
Background technology
Infrared absorption spectroscopies are one of key technologies of detection gas, and the technology is using gas molecule to infrared light
Absorption implements detection, has high sensitivity, precision height, adjustment cycle length, long lifespan, good selective.At present, exist
In infrared absorption spectroscopies, tunable absorption spectrometry (TAS) is the semiconductor laser light resource using tunable wave length, also known as
For distributed feed-back light source, by scanning and modulating the driving current of laser light source, make the suction of the inswept under test gas of its emission wavelength
Peak is received, recycles phase lock amplifying technology to extract the second harmonic of 2 times of frequency modulating signals from the output signal of detector
Signal, the concentration of under test gas is characterized according to the amplitude of the secondary singal.Since the current technology mainly uses two pole of laser
Pipe or laser, therefore the tunable laser diodes absorption spectrometry (TDLAS) that is otherwise known as.
At present, the quantum cascade laser (QCL) of infrared band (4-20 microns), middle infrared band during people use
The quantum-well laser or laser of the interband cascade lasers (ICL) and near infrared band (0.8-2.5 microns) of (2.5-6 microns)
Diode (LD) reports wavelength modulated optical absorption spectra gas-detecting device, its principle is the emission wavelength of semiconductor laser
With its operating temperature and the variation characteristic of operating current.However, infrared gas detection device face is developed using semiconductor laser
The main problem faced is the expensive price of semiconductor laser, and the laser of especially middle infrared band, price is up to 10,000 dollars
More than, it is difficult to it is practical.Compared to semiconductor laser, broadband IR source, including IR thermal emitter or light emitting diode,
Cheap, emission wavelength is in broadband feature, also generally uses the light as the important light source in infrared gas detection, people
Source have developed non-dispersion infrared absorption spectrum (NDIR) gas-detecting device.However, since broadband IR source does not have narrow line
Wide, wavelength tuning characteristic, people are difficult with such light source and establish modulated optical absorption spectra gas-detecting device；Meanwhile such light
The broadband character in source causes NDIR gas-detecting devices can not have preferable selectivity.
The content of the invention
It is different with device from the modulated optical absorption spectra gas detection technology based on semiconductor laser generally used at present,
The invention discloses a kind of modulated optical absorption spectra gas-detecting device and method based on broadband IR source, do not changing broadband
In the case of light source outgoing optical parameter, the broadband lightwave signal after being absorbed to gas carries out grating beam splitting and scanning/modulation system
" screening " is handled, and realizes a kind of modulated optical absorption spectra gas detection technology, is overcome existing based on semiconductor laser
TDLAS detection techniques are of high cost and the shortcomings that existing NDIR sensor selectivities based on wideband light source are poor, resolution ratio is low, are
Develop the low cost based on broadband IR source, high selectivity is provided with highly sensitive modulated optical absorption spectra gas-detecting device
Novel solution.
In view of the deficiencies of the prior art, the present invention adopts the technical scheme that：
Modulated optical absorption spectra gas-detecting device based on broadband IR source, including broadband IR source, detection device
Further include control module, the first convex lens, the second convex lens, gas chamber, grating module, detector, PZT micro positioners；
The control module includes microcontroller, constant-current driven module, data collecting card, lock-in amplifier, the gas chamber
Including first window, the second window, air inlet pipe, air outlet pipe, pressure controller, air pump, it is impermeable that the grating module includes first
Baffle plate, the second impermeable baffle plate, reflecting grating, the first plano-concave mirror, the second plano-concave mirror, the first impermeable baffle plate are equipped with first
Slit, the second impermeable baffle plate are equipped with the second slit, and the PZT micro positioners include PZT, PZT drive circuit, scanning signal
Generation circuit, adder circuit, modulated signal producing circuit；
The input terminal of constant-current driven module is electrically connected with microcontroller, output terminal and the broadband infrared light of constant-current driven module
Source electrical connection, first window and the second window are separately positioned on the both sides of gas chamber, and the first convex lens is arranged on broadband IR source
Between first window, the second convex lens is arranged between the second window and the first slit, and the air admission hole of gas chamber passes through air inlet pipe
It is connected with pressure controller, the venthole of gas chamber is connected by air outlet pipe with air pump, and the first plano-concave mirror is used for will be narrow by first
Sew up after the converged light being mapped in grating module is reflected and be changed into directional light, be then incident in reflecting grating, reflecting grating
For infrared light to be carried out dispersion, then reflex on the second plano-concave mirror, the second plano-concave mirror is used for reflecting grating each point dispersion
Light according to wavelength carry out reflecting focal, be then incident on the second impermeable baffle plate of the second slit of band, the second slit use
In the light of the wavelength of corresponding second slit location is selectively transmitted grating module, and incide on detector, PZT with
Second impermeable baffle plate bonding, the output terminal of detector and the output terminal of modulated signal generation module respectively with lock-in amplifier
Two input terminals are electrically connected, and the output of lock-in amplifier is electrically connected with the input of data collecting card, the output of data collecting card and
The input of microcontroller is electrically connected, the input terminal of modulated signal producing circuit and the input terminal of generation circuit of scanning signals and micro-control
Two outputs of device processed are electrically connected, the output terminal of modulated signal producing circuit and the output terminal of generation circuit of scanning signals with
Two input terminals of adder circuit are electrically connected, and the output terminal of adder is electrically connected with PZT drive circuits, PZT driving electricity
The output terminal on road is electrically connected with PZT.
Comprised the following steps using the detection method of above device：
S1：Air pump is opened, makes to be full of under test gas in gas chamber；Pressure controller is set, maintains the pressure in gas chamber to set
Definite value；Microcontroller is initialized, the scanning signal parameter of PZT is set, the position of the second slit is in linear change state, and
The center of second slit can pass through the infrared light under test gas molecule absorption peak just；The modulated signal ginseng of PZT is set
Number, makes the center of the second slit be in modulation variation state；Lock-in amplifier parameter is set, it is extracted second harmonic letter
Number；
S2：Under microprocessor control, constant-current driven module produces light source drive signal, broadband IR source is sent just
Beginning infrared signal, directional light is converted to by the first convex lens, and is transmitted to through first window in gas chamber；
S3：Acted on by under test gas molecule absorption, matched in initial infrared signal with test gas molecule absorption peak
Light will be absorbed, produce the infrared signal after being absorbed；
S4：Absorbed infrared signal described in S3 reaches the second convex lens through the second window, incidence after being accumulated
To the first slit；The infrared light for converging to the first slit is incited somebody to action by reflexing to up to reflecting grating, reflecting grating for the first plano-concave mirror
Infrared optical dispersion, the infrared light after dispersion pass through the second impermeable baffle plate reflexed to up to the second slit of band of the second plano-concave mirror；
Incided through the infrared light of the second slit 2 on infrared detector, it is defeated that infrared signal is converted to electric signal by infrared detector
Go out；
S5：Lock-in amplifier parameter extracts second harmonic signal from the signal that detector exports；Data collecting card is adopted
Collect second harmonic signal, and transmit it to microcontroller；Microcontroller calculates the amplitude of second harmonic signal, is converted to gas
Bulk concentration information.
Present invention also offers another test device, specific technical solution is：
The spectrum test device tested broadband IR source normalization luminescent spectrum, including broadband IR source,
It is micro- that test device further includes control module, the first convex lens, the second convex lens, optical chopper, grating module, detector, PZT
Shifter；
The control module includes microcontroller, constant-current driven module, data collecting card, lock-in amplifier, modulated signal
Generation circuit, the grating module include the first impermeable baffle plate, the second impermeable baffle plate, reflecting grating, the first plano-concave mirror, the
Two plano-concave mirrors, the first impermeable baffle plate are equipped with the first slit, and the second impermeable baffle plate is equipped with the second slit, and the PZT is micro-
Shifter includes PZT, PZT drive circuit；
The input terminal of constant-current driven module is electrically connected with microcontroller, output terminal and the broadband infrared light of constant-current driven module
Source is electrically connected, and the first convex lens, optical chopper, the second convex lens are set gradually between broadband IR source and the first slit,
First plano-concave mirror is used to be changed into directional light after the converged light incided by the first slit in grating module is reflected, then
Incide in reflecting grating, reflecting grating is used to infrared light carrying out dispersion, then reflexes on the second plano-concave mirror, the second plano-concave
Mirror is used to carry out reflecting focal according to wavelength to the light of reflecting grating each point dispersion, is then incident on the second of the second slit of band
On impermeable baffle plate, the second slit is used to the light of the wavelength of corresponding second slit location selectively transmiting grating mould
Block, and incide on detector, PZT is Nian Jie with the second impermeable baffle plate, the output terminal and modulated signal generation module of detector
An output terminal be electrically connected respectively with two input terminals of lock-in amplifier, another output terminal of modulated signal generation module
It is electrically connected with optical chopper, the output of lock-in amplifier is electrically connected with the input of data collecting card, the output of data collecting card
It is electrically connected with the input of microcontroller, the input terminal of modulated signal producing circuit and the input terminal and microcontroller of PZT drive circuits
Two outputs of device are electrically connected, and the output terminal of PZT drive circuits is electrically connected with PZT.
Corresponding detection method comprises the following steps：
S1：Under microprocessor control, constant-current driven module driving broadband IR source, makes it send infrared light；Micro-
Under controller control, modulated signal producing circuit produces modulated signal driving optical chopper, optical chopper is produced rotation；
Set the scanning range λ of wavelengthmin-λmax, scanning step is Δ λ；
S2：Under the effect of the first convex lens, infrared light is changed to directional light, then by being modulated after optical chopper；
S3：Second convex lens is incided in grating module after the infrared light modulated by optical chopper is converged；
S4：According to the second slit outgoing wavelength and the relation of PZT drive circuit input voltages of calibration, microcontroller is utilized
To PZT drive circuit outputting drive voltages vi, it is λ to make 2 output wavelength of sliti=λminThe infrared light of+(i-1) Δ λ；
S5：Detector receives the infrared signal of the second slit output, is changed into electric signal, and export to lock and mutually amplify
In device；Modulated signal by the use of modulated signal producing circuit output is exported as signal, lock-in amplifier is referred to from detector
First harmonic signal is extracted in electric signal；
S6：The first harmonic signal of data collecting card collection lock-in amplifier output, and output this to microcontroller；It is micro-
Controller calculates the amplitude A of first harmonic signali, and by it together with wavelength XiStorage；
S7：According to setting step-length, S4-S6 is repeated, until the wave-length coverage of setting is scanned terminating；It is red to finally obtain broadband
The output spectrum curve A- λ of outer light source；The curve is done can obtain after normalized broadband IR source normalization it is defeated
Go out spectrum.
In the above method, the device of the second slit of calibration includes：
Laser, laser temperature control module, laser diode current control module, microcontroller, data collecting card, detection
Device, generation circuit of scanning signals, PZT, drive circuit, grating module to be calibrated；Laser temperature control module and laser electricity
The input terminal of stream drive module is electrically connected with the output terminal of microcontroller, the output terminal and laser of laser temperature control module
The output terminal of electric current drive module is electrically connected with the input terminal of laser；The output terminal of laser corresponds to grating module to be calibrated
Input terminal；The input terminal of generation circuit of scanning signals is electrically connected with the output terminal of microcontroller；Generation circuit of scanning signals it is defeated
Outlet is electrically connected with the input terminal of drive circuit；The output terminal of drive circuit is electrically connected with PZT；PZT is bonded in grating to be calibrated
In module on the second impermeable baffle plate of the second slit of band；The output terminal of grating module to be calibrated and the input terminal of detector connect
Connect；The output terminal of detector is electrically connected with the input terminal of data collecting card；The output terminal of data collecting card and microcontroller
Input terminal is electrically connected；
The method for realizing the second slit of calibration using the device of the second slit of calibration comprises the following steps：
Step 1：Under microprocessor control, the operating temperature of laser is set by laser temperature control module；
Step 2：Set the emission wavelength range λ of lasermin-λmax, step delta λ and corresponding laser operating current
Scope umin-umax, step delta u, under microprocessor control, pass through the work of laser diode current drive module setting laser electricity
Flow ui, make laser emitting specific wavelength λiInfrared light；
Step 3：Under microprocessor control, a sawtooch sweep voltage is produced by generation circuit of scanning signals；
Step 4：Using the output signal of data collecting card collection detector, calculating detector exports corresponding during maximum
The value of sawtooch sweep voltage, is denoted as vi, it is λ thus to obtain projecting wavelength from the second slitiThe corresponding voltage v of lighti；
Step 5：Repeat step 2 is to step 4, according to step delta u, Δ λ, changes the operating current and laser of laser
Wavelength is emitted, obtains the input voltage of corresponding generation circuit of scanning signals, until scanned；Final fitting obtains PZT and sweeps
The relation curve v- λ of the input voltage of scanning circuit and the second slit outgoing optical wavelength, complete calibration.
In above-mentioned technical proposal：
The pressure controller is connected by air inlet pipe with gas chamber, for controlling the gas pressure intensity in the gas chamber；
The air pump is connected by air outlet pipe with gas chamber, under test gas to be pumped into the gas chamber；
The constant-current driven module is used to receive the drive signal for coming from the microcontroller, produces constant current letter
Number, drive the broadband IR source；
The broadband IR source is used to produce infrared signal, then exports；
First convex lens is used to the infrared light that the broadband IR source is sent being changed into directional light, Ran Houjing
Incided by first window in gas chamber；
The gas chamber is used to store outside under test gas, including air admission hole, venthole, first window, the second window, gas chamber
Shell；The air admission hole, venthole, first window, the second window are both secured on gas chamber shell；
Second convex lens is used to be converged the directional light appeared from the second window of the gas chamber, then enters
It is mapped in the grating module；
The grating module includes the first slit, the first impermeable baffle plate, the second slit, the band second of the first slit of band
Second impermeable baffle plate of slit, the first plano-concave mirror, the second plano-concave mirror, reflecting grating；First slit is attached to first
On impermeable baffle plate；Second slit is attached on the second impermeable baffle plate with slit；
The first plano-concave mirror is changed into directional light after reflecting the converged light incided in grating module, then enters
It is mapped in the reflecting grating；
Infrared light is carried out dispersion by reflecting grating, is then reflexed on the second plano-concave mirror；
The second plano-concave mirror carries out reflecting focal to the light of the reflecting grating each point dispersion according to wavelength, so
Incide afterwards on the second impermeable baffle plate with slit；
The second slit on the second impermeable baffle plate selectively transmits the light of the wavelength of its corresponding position
Grating module；
The PZT is bonded on the impermeable baffle plate of second with slit, for second of control with slit not
The position of printing opacity baffle, so that the second slit transmission goes out the infrared light of different wave length；
The PZT drive modules are used to receive the drive signal for coming from the microcontroller, produce and are used to drive PZT
Electric signal；The PZT drive modules include drive circuit, modulated signal producing circuit, adder circuit, scanning signal production
Raw circuit；The generation circuit of scanning signals produces the sawtooch sweep signal of low frequency, is then output to add circuit；It is described
Modulated signal producing circuit produce high frequency sinewave modulation signal, then export respectively to lock-in amplifier and addition electricity
Road；The add circuit receives the output signal of the generation circuit of scanning signals and modulated signal producing circuit, to it
Addition processing is carried out, is then output to drive circuit；
The detector is used for the infrared signal for receiving to go out from the second slit transmission, and is translated into electric signal,
Then export；
The lock-in amplifier receives the electric signal of the detector output as measured signal, and described in reception
The modulated signal of modulated signal generation module output extracts second harmonic signal, then exports as signal is referred to；
The data collecting card is used for the second harmonic signal for gathering lock-in amplifier output, and the signal that will be collected
It is output to microcontroller；
The second harmonic signal of the microcontroller processing data collecting card collection, extracts the width of second harmonic signal
Value, and it is converted into concentration information.
The beneficial effects of the present invention are：
In conclusion modulated optical absorption spectra gas-detecting device and side provided by the invention based on broadband IR source
Method, has the following advantages：
1st, single mode semiconductor laser is replaced using inexpensive broadband IR source, passes through the broadband light after being absorbed to gas
Ripple signal carries out " screening " processing of grating beam splitting and scanning/modulation system, realizes broadband IR source and is absorbed with wavelength modulation
The combination of spectral technique, breaches the limitation of the existing NDIR gas sensing techniques based on broadband IR source.
2nd, the position of the exit slit 2 to the modulated optical absorption spectra gas-detecting device based on broadband IR source is provided
Wavelength scaling, the auxiliary device that the normalization luminescent spectrum to broadband IR source is tested and method are carried out, so as to be somebody's turn to do
The practical of device provides support.
3rd, it is of high cost and existing based on width the present invention overcomes the existing TDLAS detection techniques based on semiconductor laser
The shortcomings that NDIR sensor selectivities with light source are poor, resolution ratio is low, to develop the low cost based on broadband IR source, Gao Xuan
Selecting property provides novel solution with highly sensitive modulated optical absorption spectra gas-detecting device.
Brief description of the drawings
Fig. 1 is the schematic diagram of measuring device in the embodiment of the present invention 1.
Fig. 2 is the step schematic diagram of measuring method in the embodiment of the present invention 1.
Fig. 3 is the schematic diagram of test device in the embodiment of the present invention 2.
Fig. 4 is the schematic diagram of robot scaling equipment in the embodiment of the present invention 2.
Reference numeral is as follows：
1. broadband IR source；2. constant-current driven module；3. microcontroller；4. data collecting card；5. lock-in amplifier；6.
Detector；7. pressure controller；8th, air pump；9th, the first convex lens；10th, first window；11st, gas chamber；12nd, the second window；13rd,
Two convex lenses；14th, the first impermeable baffle plate；15th, the first slit；16th, the first plano-concave mirror；17th, reflecting grating；18th, the second plano-concave
Mirror；19th, the second slit；20th, the second impermeable baffle plate；21、PZT；22nd, PZT drive circuits；23rd, generation circuit of scanning signals；
24th, adder circuit；25th, modulated signal producing circuit；26th, air inlet pipe；27th, air outlet pipe；28th, optical chopper；29th, laser
Device；30th, laser temperature control module；31st, laser diode current drive module；32nd, grating module to be calibrated.
Embodiment
The embodiment of the present invention is illustrated below in conjunction with the accompanying drawings：
Embodiment 1
Referring to Fig. 1, the present embodiment device includes constant-current driven module 2, broadband IR source 1, the first convex lens 9, gas chamber
11st, air inlet pipe 26, air outlet pipe 27, the second convex lens 13, pressure controller 7, air pump 8, grating module, PZT21, PZT driving mould
Block 22, detector 6, lock-in amplifier 5, data collecting card 4, microcontroller 3；
Gas chamber 11 includes air admission hole, venthole, first window 10, the second window 12, gas chamber shell；The air admission hole
26th, venthole 27, first window 10, the second window 12 are both secured on gas chamber shell；
Grating module further includes the first slit 15, the first of the first slit of band 15 the impermeable baffle plate 14, the second slit 19, band
Second impermeable baffle plate 20 of the second slit 19, the first plano-concave mirror 16, the second plano-concave mirror 18, reflecting grating 17；First slit 15
It is attached on the first impermeable baffle plate 14；Second slit 19 is attached on the second impermeable baffle plate 20；
PZT micro positioners further include PZT drive circuits 22, modulated signal producing circuit 25, adder circuit 24, scanning letter
Number generation circuit 23；Two of the input of modulated signal producing circuit 25 and generation circuit of scanning signals 23 and microcontroller 3 are defeated
Go out to be electrically connected；The output of modulated signal producing circuit 25 and generation circuit of scanning signals 23 with two of adder circuit 24
Input terminal is electrically connected；The output terminal of adder circuit 24 is electrically connected with PZT drive circuits 22；PZT drive circuits 22 it is defeated
Go out and be electrically connected with PZT21；
The inside connection relation of the present embodiment is：The input of constant-current driven module 2 is electrically connected with microcontroller 3；Constant current is driven
The output of dynamic model block 2 is electrically connected with broadband IR source 1；There are first window 10, the second window 12 in the left and right sides of gas chamber 11 respectively,
For through infrared light；The infrared light that broadband IR source 1 exports converges by the first convex lens 9 and through after first window 10
Into air inlet chamber 11；The air admission hole of gas chamber 11 is connected by air inlet pipe 26 with pressure controller 7；The venthole of gas chamber 11 passes through outlet
Pipe 27 is connected with air pump 8；Transmitted from the infrared light that gas chamber 11 is emitted by the second window 12 and after the convergence of the second convex lens 13
Reach grating module；First plano-concave mirror 16 is changed into directional light after reflecting the converged light incided in grating module, then
Incide in reflecting grating 17；Infrared light is carried out dispersion by reflecting grating 17, is then reflexed on the second plano-concave mirror 18；Second is flat
Concave mirror 18 carries out reflecting focal to the light of 17 each point dispersion of reflecting grating according to wavelength, be then incident on slit second not
On printing opacity baffle 20；The second slit 19 on the second impermeable baffle plate 20 is selective by the light of the wavelength of its corresponding position
Grating module is transmitted, and is incided on detector 6；PZT21 is bonded on the second impermeable baffle plate 20；The output of detector 6
Output with modulated signal producing circuit 25 is electrically connected with two input terminals of lock-in amplifier 5 respectively；Lock-in amplifier 5 it is defeated
Go out and be electrically connected with the input of data collecting card 4；The output of data collecting card 4 is electrically connected with the input of microcontroller 3.
Referring to Fig. 2, the method using the present embodiment device detection gas is as follows：
S1：Air pump 8 is opened, makes to be full of under test gas in gas chamber 11；Pressure controller 7 is set, maintains the pressure in gas chamber 11
Strong is setting value；Microcontroller 3 is initialized, the scanning signal parameter of PZT21 is set, the position of the second slit 19 is in linear
Variable condition, and its center can pass through the infrared light under test gas molecule absorption peak just；The modulation letter of PZT21 is set
Number parameter, makes the center of the second slit 19 be in modulation variation state；5 parameter of lock-in amplifier is set, it is extracted two
Rd harmonic signal；
S2：Under the control of microcontroller 3, constant-current driven module 2 produces light source drive signal, sends out broadband IR source 1
Go out initial infrared signal, directional light is converted to by the first convex lens 9, and be transmitted in gas chamber 11 through first window 10；
S3：Acted on by under test gas molecule absorption, matched in initial infrared signal with test gas molecule absorption peak
Light will be absorbed, produce the infrared signal after being absorbed；
S4：Absorbed infrared signal in S3 reaches the second convex lens 13 through the second window 12, incidence after being accumulated
To the first slit 15；The infrared light of the first slit 15 reflexing to up to reflecting grating 17 by the first plano-concave mirror 16 is converged to, instead
Grating 17 is penetrated by infrared optical dispersion, the infrared light after dispersion is impermeable up to second with slit by reflexing to for the second plano-concave mirror 18
Baffle plate 20；Incided through the infrared light of the second slit 19 on infrared detector 6, infrared signal is converted to telecommunications by the latter
Number output；
S5：Lock-in amplifier 5 extracts second harmonic signal from the signal that detector 6 exports；Data collecting card 4 gathers
Second harmonic signal, and transmit it to microcontroller 3；Microcontroller 3 calculates the amplitude of second harmonic signal, is converted to gas
Bulk concentration information.
Embodiment 2
Referring to Fig. 3, another is provided in the present embodiment broadband IR source normalization luminescent spectrum is tested
Spectrum test device and corresponding test method, replace the gas chamber 11 in embodiment 1 with optical chopper 28 in device, exchange
The connection mode of signal generating circuit 25 processed has carried out corresponding change, broadband IR source, constant-current driven module, the first convex lens
Mirror, the second convex lens, modulated signal producing circuit 25, microcontroller, data collecting card, detector, PZT, PZT drive circuit,
Grating module is same as Example 1, specific as follows：
The spectrum test device tested broadband IR source normalization luminescent spectrum includes optical chopper 28, width
Band infrared light supply, constant-current driven module, the first convex lens, the second convex lens, modulated signal producing circuit 25, microcontroller, number
According to capture card, detector, PZT drive circuits 22, grating module；
The connection relation of each module is in spectrum test device：The input of constant-current driven module and the output electricity of microcontroller
Connection, the output of constant-current driven module are electrically connected with broadband IR source；The infrared light of broadband IR source output passes through first
Optical chopper 28 is reached after convex lens convergence；The input of modulated signal generation module 25 is electrically connected with the output of microcontroller,
The output of modulated signal generation module 25 is electrically connected with the input of optical chopper 28；The infrared light warp that optical chopper 28 is emitted
The second convex lens is crossed to be transmitted to up to grating module；The input of PZT drive circuits 22 is electrically connected with the output of microcontroller；PZT drives
The output of dynamic circuit 22 is electrically connected with PZT；PZT controls the output light wavelength of grating module；PZT be bonded in slit second not
On printing opacity baffle；The output of grating module and the input of detector connect；The output of detector and modulated signal producing circuit 25
It is electrically connected with two inputs of lock-in amplifier；The output of lock-in amplifier is electrically connected with the input of data collecting card；Data are adopted
The output of truck is electrically connected with the input of microcontroller.
Using spectrum test device, the method tested broadband IR source normalization luminescent spectrum is as follows：
S1：Under microprocessor control, constant-current driven module driving broadband IR source, makes it send infrared light；Micro-
Under controller control, modulated signal producing circuit 25 produces modulated signal driving optical chopper 28, it is produced rotation；Setting
The scanning range λ of wavelengthmin-λmax, scanning step is Δ λ；
S2：Under the effect of the first convex lens, infrared light is changed to directional light, then by being modulated after chopper；
S3：Second convex lens will be incided in grating module after the infrared light convergence for being chopped into device modulation；
S4：According to the second slit outgoing wavelength and the relation of 22 input voltage of PZT drive circuits of calibration, microcontroller is utilized
Device is to 22 outputting drive voltage v of PZT drive circuitsi, it is λ to make the second slit output wavelengthi=λminThe infrared light of+(i-1) Δ λ；
S5：Detector receives the infrared signal of the second slit output, is changed into electric signal, and export to lock and mutually amplify
In device；Exported by the use of the modulated signal that modulated signal producing circuit 25 exports as signal, lock-in amplifier is referred to from detector
Electric signal in extract first harmonic signal；
S6：The first harmonic signal of data collecting card collection lock-in amplifier output, and output this to microcontroller；It is micro-
Controller calculates the amplitude A of first harmonic signali, and by it together with wavelength XiStorage；
S7：According to setting step-length, S4-S6 is repeated, until the wave-length coverage of setting is scanned terminating；It is red to finally obtain broadband
The output spectrum curve A- λ of outer light source；The curve is done can obtain after normalized broadband IR source normalization it is defeated
Go out spectrum.
In the present embodiment, referring to Fig. 4, the present embodiment additionally provide it is a kind of to be emitted the second slit of optics 19 position into
Row calibration device, including laser 29, laser temperature control module 30, laser diode current control module 31, microcontroller,
Data collecting card, detector, generation circuit of scanning signals, drive circuit, grating module to be calibrated 32；
Microcontroller 3, data collecting card 4, detector 6, generation circuit of scanning signals, drive circuit in robot scaling equipment with
Embodiment 1 is identical；
The connection relation of each module is in robot scaling equipment：Laser temperature control module 30 and laser diode current drive module
31 input is electrically connected with the output of microcontroller, laser temperature control module 30 and laser diode current drive module 31 it is defeated
Go out and be electrically connected with the input of laser 29；The input of the corresponding grating module 32 to be calibrated of output of laser 29；Scanning signal is produced
The input of raw circuit 23 is electrically connected with the output of microcontroller 3；The output of generation circuit of scanning signals 23 and PZT drive circuits 22
Input be electrically connected；The output of PZT drive circuits 22 is electrically connected with PZT；PZT is bonded on the second impermeable baffle plate；Wait to calibrate
The output of grating module 32 is connected with the input of detector 6；The output of detector 6 is electrically connected with the input of data collecting card 4；Number
It is electrically connected according to the output of capture card 4 with the input of microcontroller 3.
Using the robot scaling equipment shown in Fig. 4, the position for being emitted the second slit of optics 19 is carried out determining calibration method as follows：
S1：Under the control of microcontroller 3, the operating temperature of laser 29 is set by laser temperature control module 30；
S2：Set the emission wavelength range λ of laser 29min-λmax, step delta λ and corresponding laser operating current
Scope umin-umax, step delta u.Under the control of microcontroller 3, laser 29 is set by laser diode current drive module 31
Operating current ui, make laser emitting specific wavelength λiInfrared light；
S3：Under the control of microcontroller 3, a sawtooch sweep voltage is produced by generation circuit of scanning signals 23；
S4：The output signal of detector 6 is gathered using data collecting card 4, calculating detector 6 exports corresponding during maximum
The value of sawtooch sweep voltage, is denoted as vi, it is λ thus to obtain projecting wavelength from the second slit 19iThe corresponding voltage v of lighti；
S5：S2-S4 is repeated, according to step delta u, Δ λ, changes the operating current of laser 29 and the outgoing wave of laser 29
It is long, the input voltage of corresponding generation circuit of scanning signals 23 is obtained, until scanned；Final fitting obtains PZT scanning electricity
The relation curve v- λ of the input voltage on road and the second slit 19 outgoing optical wavelength, complete calibration.
The modulated optical absorption spectra gas-detecting device and method based on broadband IR source that the present invention carries, by gas
Broadband lightwave signal after absorption carries out " screening " processing of grating beam splitting and scanning/modulation system under PZT drivings, realizes width
Combination with infrared light supply and wavelength modulation spectroscopy, breaches the existing NDIR gases based on broadband IR source and passes
The limitation of sense technology.The present invention overcomes the existing TDLAS detection techniques based on semiconductor laser are of high cost and existing base
In the NDIR sensor selectivities of wideband light source are poor, resolution ratio is low the shortcomings that, for develop the low cost based on broadband IR source,
High selectivity provides novel solution with highly sensitive modulated optical absorption spectra gas-detecting device.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, some improvements and modifications can also be made, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (5)
1. a kind of modulated optical absorption spectra gas-detecting device based on broadband IR source, including broadband IR source, its feature
Be, the modulated optical absorption spectra gas-detecting device based on broadband IR source further include control module, the first convex lens,
Second convex lens, gas chamber, grating module, detector, PZT micro positioners；
The control module includes microcontroller, constant-current driven module, data collecting card, lock-in amplifier, and the gas chamber includes
First window, the second window, air inlet pipe, air outlet pipe, pressure controller, air pump, the grating module include the first impermeable light trap
Plate, the second impermeable baffle plate, reflecting grating, the first plano-concave mirror, the second plano-concave mirror, it is narrow that the first impermeable baffle plate is equipped with first
Seam, the second impermeable baffle plate are equipped with the second slit, and the PZT micro positioners include PZT, PZT drive circuit, scanning signal is produced
Raw circuit, adder circuit, modulated signal producing circuit；
The input terminal of constant-current driven module is electrically connected with microcontroller, output terminal and the broadband IR source electricity of constant-current driven module
Connection, first window and the second window are separately positioned on the both sides of gas chamber, and the first convex lens is arranged on broadband IR source and the
Between one window, the second convex lens is arranged between the second window and the first slit, and the air admission hole of gas chamber passes through air inlet pipe and pressure
Force controller connects, and the venthole of gas chamber is connected by air outlet pipe with air pump, and the first plano-concave mirror is used to by the first slit to enter
The converged light being mapped in grating module is changed into directional light after being reflected, and is then incident in reflecting grating, and reflecting grating is used for
Infrared light is subjected to dispersion, is then reflexed on the second plano-concave mirror, the second plano-concave mirror is used for the light to reflecting grating each point dispersion
Line carries out reflecting focal according to wavelength, is then incident on the second impermeable baffle plate of the second slit of band, and the second slit is used for will
The light of the wavelength of corresponding second slit location selectively transmits grating module, and incides on detector, PZT and second
Impermeable baffle plate bonding, the output terminal of detector and the output terminal of modulated signal generation module two with lock-in amplifier respectively
Input terminal is electrically connected, and the output of lock-in amplifier is electrically connected with the input of data collecting card, the output of data collecting card and micro-control
The input of device processed is electrically connected, the input terminal of modulated signal producing circuit and the input terminal of generation circuit of scanning signals and microcontroller
Two outputs be electrically connected, the output terminal of modulated signal producing circuit and the output terminal of generation circuit of scanning signals and addition
Two input terminals of device circuit are electrically connected, and the output terminal of adder is electrically connected with PZT drive circuits, PZT drive circuits
Output terminal is electrically connected with PZT.
A kind of 2. detection of the modulated optical absorption spectra gas-detecting device according to claim 1 based on broadband IR source
Method, it is characterised in that the described method comprises the following steps：
S1：Air pump is opened, makes to be full of under test gas in gas chamber；Pressure controller is set, and it is setting value to maintain the pressure in gas chamber；
Microcontroller is initialized, the scanning signal parameter of PZT is set, the position of the second slit is in linear change state, and second
The center of slit can pass through the infrared light under test gas molecule absorption peak just；The Modulation Signal Parameters of PZT are set, are made
The center of second slit is in modulation variation state；Lock-in amplifier parameter is set, it is extracted second harmonic signal；
S2：Under microprocessor control, constant-current driven module produces light source drive signal, sends broadband IR source initial red
Outer optical signal, directional light is converted to by the first convex lens, and is transmitted to through first window in gas chamber；
S3：Acted on by under test gas molecule absorption, the light to match in initial infrared signal with test gas molecule absorption peak
It will be absorbed, produce the infrared signal after being absorbed；
S4：Absorbed infrared signal described in S3 reaches the second convex lens through the second window, and the is incided after being accumulated
One slit；The infrared light for converging to the first slit will be infrared up to reflecting grating, reflecting grating by reflexing to for the first plano-concave mirror
Optical dispersion, the infrared light after dispersion pass through the second impermeable baffle plate reflexed to up to the second slit of band of the second plano-concave mirror；Through
The infrared light of second slit 2 is incided on infrared detector, and infrared signal is converted to electric signal output by infrared detector；
S5：Lock-in amplifier parameter extracts second harmonic signal from the signal that detector exports；Data collecting card collection two
Rd harmonic signal, and transmit it to microcontroller；Microcontroller calculates the amplitude of second harmonic signal, and it is dense to be converted to gas
Spend information.
3. a kind of spectrum test device tested broadband IR source normalization luminescent spectrum, including broadband infrared light
Source, it is characterised in that the test device further includes control module, the first convex lens, the second convex lens, optical chopper, light
Grid module, detector, PZT micro positioners；
The control module includes microcontroller, constant-current driven module, data collecting card, lock-in amplifier, modulated signal and produces
Circuit, the grating module include the first impermeable baffle plate, the second impermeable baffle plate, reflecting grating, the first plano-concave mirror, second flat
Concave mirror, the first impermeable baffle plate are equipped with the first slit, and the second impermeable baffle plate is equipped with the second slit, the PZT micro-displacements
Device includes PZT, PZT drive circuit；
The input terminal of constant-current driven module is electrically connected with microcontroller, output terminal and the broadband IR source electricity of constant-current driven module
Connection, sets gradually the first convex lens, optical chopper, the second convex lens between broadband IR source and the first slit, and first
Plano-concave mirror is used to be changed into directional light after the converged light incided by the first slit in grating module is reflected, then incident
Onto reflecting grating, reflecting grating is used to infrared light carrying out dispersion, then reflexes on the second plano-concave mirror, and the second plano-concave mirror is used
Reflecting focal is carried out according to wavelength in the light to reflecting grating each point dispersion, be then incident on the second slit of band second is impermeable
On baffle plate, the second slit is used to the light of the wavelength of corresponding second slit location selectively transmiting grating module, and
Incide on detector, PZT is Nian Jie with the second impermeable baffle plate, the output terminal of detector and one of modulated signal generation module
Output terminal is electrically connected with two input terminals of lock-in amplifier respectively, another output terminal and optics of modulated signal generation module
Chopper is electrically connected, and the output of lock-in amplifier is electrically connected with the input of data collecting card, the output of data collecting card and micro-control
The two of the input electrical connection of device processed, the input terminal of modulated signal producing circuit and the input terminal of PZT drive circuits and microcontroller
A output is electrically connected, and the output terminal of PZT drive circuits is electrically connected with PZT.
4. a kind of spectrum test according to claim 3 tested broadband IR source normalization luminescent spectrum fills
The test method put, it is characterised in that the described method comprises the following steps：
S1：Under microprocessor control, constant-current driven module driving broadband IR source, makes it send infrared light；In microcontroller
Under device control, modulated signal producing circuit produces modulated signal driving optical chopper, optical chopper is produced rotation；Setting
The scanning range λ of wavelengthmin-λmax, scanning step is Δ λ；
S2：Under the effect of the first convex lens, infrared light is changed to directional light, then by being modulated after optical chopper；
S3：Second convex lens is incided in grating module after the infrared light modulated by optical chopper is converged；
S4：According to the relation of the second slit outgoing wavelength and the PZT drive circuit input voltages of calibration, using microcontroller to
PZT drive circuit outputting drive voltages vi, it is λ to make 2 output wavelength of sliti=λminThe infrared light of+(i-1) Δ λ；
S5：Detector receives the infrared signal of the second slit output, is changed into electric signal, and export to lock-in amplifier
In；By the use of modulated signal producing circuit output modulated signal as referring to signal, the electricity that lock-in amplifier is exported from detector
First harmonic signal is extracted in signal；
S6：The first harmonic signal of data collecting card collection lock-in amplifier output, and output this to microcontroller；Microcontroller
Device calculates the amplitude A of first harmonic signali, and by it together with wavelength XiStorage；
S7：According to setting step-length, S4-S6 is repeated, until the wave-length coverage of setting is scanned terminating；Finally obtain broadband infrared light
The output spectrum curve A- λ in source；The normalized output light that can obtain broadband IR source after normalized is done to the curve
Spectrum.
A kind of 5. spectrum test side according to claim 4 tested broadband IR source normalization luminescent spectrum
Method, it is characterised in that the device of the second slit is calibrated in the method to be included：
Laser, laser temperature control module, laser diode current control module, microcontroller, data collecting card, detector,
Generation circuit of scanning signals, PZT, drive circuit, grating module to be calibrated；Laser temperature control module and laser diode current drive
The input terminal of dynamic model block is electrically connected with the output terminal of microcontroller, the output terminal and laser diode current of laser temperature control module
The output terminal of drive module is electrically connected with the input terminal of laser；Input of the output terminal of laser for grating module to be calibrated
End；The input terminal of generation circuit of scanning signals is electrically connected with the output terminal of microcontroller；The output terminal of generation circuit of scanning signals
It is electrically connected with the input terminal of drive circuit；The output terminal of drive circuit is electrically connected with PZT；PZT is bonded in grating module to be calibrated
On second impermeable baffle plate of middle the second slit of band；The output terminal of grating module to be calibrated and the input terminal of detector connect；Visit
The output terminal for surveying device is electrically connected with the input terminal of data collecting card；The output terminal of data collecting card and the input terminal of microcontroller
It is electrically connected；
The method for realizing the second slit of calibration using the device of the second slit of calibration comprises the following steps：
Step 1：Under microprocessor control, the operating temperature of laser is set by laser temperature control module；
Step 2：Set the emission wavelength range λ of lasermin-λmax, step delta λ and corresponding laser current margin
umin-umax, step delta u, under microprocessor control, pass through the operating current of laser diode current drive module setting laser
ui, make laser emitting specific wavelength λiInfrared light；
Step 3：Under microprocessor control, a sawtooch sweep voltage is produced by generation circuit of scanning signals；
Step 4：Using the output signal of data collecting card collection detector, corresponding sawtooth when calculating detector exports maximum
The value of ripple scanning voltage, is denoted as vi, it is λ thus to obtain projecting wavelength from the second slitiThe corresponding voltage v of lighti；
Step 5：Repeat step 2, according to step delta u, Δ λ, changes the outgoing of the operating current and laser of laser to step 4
Wavelength, obtains the input voltage of corresponding generation circuit of scanning signals, until scanned；Final fitting obtains PZT scanning electricity
The relation curve v- λ of the input voltage on road and the second slit outgoing optical wavelength, complete calibration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711155676.8A CN107941736B (en) | 2017-11-10 | 2017-11-10 | Gas detection device and method based on modulated absorption spectrum of broadband infrared light source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711155676.8A CN107941736B (en) | 2017-11-10 | 2017-11-10 | Gas detection device and method based on modulated absorption spectrum of broadband infrared light source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107941736A true CN107941736A (en) | 2018-04-20 |
| CN107941736B CN107941736B (en) | 2020-09-11 |
Family
ID=61929187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711155676.8A Active CN107941736B (en) | 2017-11-10 | 2017-11-10 | Gas detection device and method based on modulated absorption spectrum of broadband infrared light source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107941736B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108732116A (en) * | 2018-05-29 | 2018-11-02 | 大连大学 | A kind of open absorption spectrometer system |
| CN110618102A (en) * | 2019-09-25 | 2019-12-27 | 成都太阳神鸟智能控制有限公司 | Gas detection method and device based on dispersion spectrum analysis and artificial intelligence |
| CN111398205A (en) * | 2020-04-24 | 2020-07-10 | 吉林大学 | Infrared absorption spectrum isotope abundance detection method based on temperature gradient field compensation |
| CN112304891A (en) * | 2020-10-14 | 2021-02-02 | 西安工程大学 | System for detecting gas by adopting flexible grating and detection method thereof |
| CN113533207A (en) * | 2021-07-27 | 2021-10-22 | 吉林大学 | High-accuracy detection device and correction method based on TDLAS technology |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1567007A (en) * | 2003-07-08 | 2005-01-19 | 台达电子工业股份有限公司 | Adjustable laser ray source and its wavelength selection method |
| US20120300209A1 (en) * | 2011-04-19 | 2012-11-29 | Mark Francis Witinski | Heterodyne Off-Axis Integrated Cavity Output Spectroscopy |
| CN103439289A (en) * | 2013-09-02 | 2013-12-11 | 刘永宁 | Multichannel and multi-point-location gas detection system based on second harmonic detection technique |
| CN104062261A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Gas concentration measuring method based on wide-spectrum light source and harmonic detection technology |
| CN105890759A (en) * | 2015-10-14 | 2016-08-24 | 北京信息科技大学 | Fiber grating demodulation system utilizing micro-motion detector array to improve spectrum resolution |
| CN106768392A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Infrared photoelectric detector response characteristic parameter calibration device and method under low light condition |
| CN107044958A (en) * | 2017-03-17 | 2017-08-15 | 哈尔滨工业大学 | A kind of measured oxygen concentration system and measuring method based on ultraviolet two grades of absorption spectrums in broadband |
-
2017
- 2017-11-10 CN CN201711155676.8A patent/CN107941736B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1567007A (en) * | 2003-07-08 | 2005-01-19 | 台达电子工业股份有限公司 | Adjustable laser ray source and its wavelength selection method |
| US20120300209A1 (en) * | 2011-04-19 | 2012-11-29 | Mark Francis Witinski | Heterodyne Off-Axis Integrated Cavity Output Spectroscopy |
| CN103439289A (en) * | 2013-09-02 | 2013-12-11 | 刘永宁 | Multichannel and multi-point-location gas detection system based on second harmonic detection technique |
| CN104062261A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Gas concentration measuring method based on wide-spectrum light source and harmonic detection technology |
| CN105890759A (en) * | 2015-10-14 | 2016-08-24 | 北京信息科技大学 | Fiber grating demodulation system utilizing micro-motion detector array to improve spectrum resolution |
| CN106768392A (en) * | 2016-12-30 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Infrared photoelectric detector response characteristic parameter calibration device and method under low light condition |
| CN107044958A (en) * | 2017-03-17 | 2017-08-15 | 哈尔滨工业大学 | A kind of measured oxygen concentration system and measuring method based on ultraviolet two grades of absorption spectrums in broadband |
Non-Patent Citations (2)
| Title |
|---|
| 董磊: "基于腔增强吸收光谱的污染气体检测研究", 《中国博士学位论文全文数据库 工程科技Ⅰ辑》 * |
| 马成举: "《维纳光纤及其在传感技术中的应用》", 30 November 2015, 国防工业出版社 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108732116A (en) * | 2018-05-29 | 2018-11-02 | 大连大学 | A kind of open absorption spectrometer system |
| CN110618102A (en) * | 2019-09-25 | 2019-12-27 | 成都太阳神鸟智能控制有限公司 | Gas detection method and device based on dispersion spectrum analysis and artificial intelligence |
| CN111398205A (en) * | 2020-04-24 | 2020-07-10 | 吉林大学 | Infrared absorption spectrum isotope abundance detection method based on temperature gradient field compensation |
| CN112304891A (en) * | 2020-10-14 | 2021-02-02 | 西安工程大学 | System for detecting gas by adopting flexible grating and detection method thereof |
| CN113533207A (en) * | 2021-07-27 | 2021-10-22 | 吉林大学 | High-accuracy detection device and correction method based on TDLAS technology |
| CN113533207B (en) * | 2021-07-27 | 2022-08-09 | 吉林大学 | High-accuracy detection device and correction method based on TDLAS technology |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107941736B (en) | 2020-09-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107941736A (en) | Modulated optical absorption spectra gas-detecting device and method based on broadband IR source | |
| CN101435773B (en) | Gas monitoring method and apparatus based on quasi continuous diode laser modulated spectrum | |
| CN206710305U (en) | A kind of in-situ type laser gas analyzer based on TDLAS technologies | |
| CN108801977B (en) | Device and method for detecting carbon dioxide gas of non-calibrated trace carbon 12 and carbon 13 | |
| CN105954229B (en) | Alkanes gas detecting system and method based on step-scan integrated absorption method | |
| CN101460829A (en) | Measuring water vapor in hydrocarbons | |
| CN106033054B (en) | A kind of laser humiture measurement mechanism and method | |
| CN110160989B (en) | Trace gas detection method and detection device | |
| CN101308089B (en) | Ethyne gas optical checking method and apparatus | |
| CN107328739B (en) | Complete or collected works' accepted way of doing sth infrared gas sensor and its working method | |
| CN209911225U (en) | CO and CO2 trace detection device | |
| CN107328730B (en) | Complete or collected works' accepted way of doing sth infrared gas sensor and its working method | |
| CN112067582A (en) | Device and method for detecting water vapor stable isotope based on cavity enhanced absorption spectrum technology | |
| CN106769939A (en) | The real-time calibration system and measurement calibration method of a kind of Multi-axial differential absorption spectrometer | |
| CN116046721B (en) | Correlation open-circuit laser gas detector and gas detection real-time calibration method | |
| CN111735797B (en) | Gas sensor based on ultrathin two-dimensional semiconductor material coated quartz tuning fork | |
| CN103776547B (en) | A kind of scaling method of Terahertz quantum well detector absolute response rate and device | |
| US7064329B2 (en) | Amplifier-enhanced optical analysis system and method | |
| CN107389560A (en) | Multiband all -fiber high spectral resolution total atmospheric spectral transmittance simultaneous measuring apparatus and measuring method | |
| CN107764764B (en) | A kind of visible excitation-broadband infrared detection Ultrafast spectrum device | |
| CN101936903B (en) | Test system adopting double modulation scheme to enhance fluorescence test sensitivity | |
| CN107860749A (en) | Based on CO2The portable SF of laser6Leak remote sensing instrument | |
| CN116519596A (en) | Gas concentration detection device | |
| WO1999039188A1 (en) | Method of spectrochemical analysis of impurity in gas | |
| CN114235699A (en) | Trace gas concentration detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |